DE102004002087A1 - Piezoaktor und ein Verfahren zu dessen Herstellung - Google Patents
Piezoaktor und ein Verfahren zu dessen Herstellung Download PDFInfo
- Publication number
- DE102004002087A1 DE102004002087A1 DE102004002087A DE102004002087A DE102004002087A1 DE 102004002087 A1 DE102004002087 A1 DE 102004002087A1 DE 102004002087 A DE102004002087 A DE 102004002087A DE 102004002087 A DE102004002087 A DE 102004002087A DE 102004002087 A1 DE102004002087 A1 DE 102004002087A1
- Authority
- DE
- Germany
- Prior art keywords
- internal electrodes
- piezoelectric
- layers
- contact elements
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- 238000000034 method Methods 0.000 title description 2
- 239000004020 conductor Substances 0.000 claims abstract description 10
- 239000007772 electrode material Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims 1
- 230000008901 benefit Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
- H10N30/874—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices embedded within piezoelectric or electrostrictive material, e.g. via connections
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
- H10N30/063—Forming interconnections, e.g. connection electrodes of multilayered piezoelectric or electrostrictive parts
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102004002087A DE102004002087A1 (de) | 2004-01-15 | 2004-01-15 | Piezoaktor und ein Verfahren zu dessen Herstellung |
| PCT/EP2004/052961 WO2005069393A1 (fr) | 2004-01-15 | 2004-11-15 | Piezo-actionneur et procede de fabrication dudit piezo-actionneur |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102004002087A DE102004002087A1 (de) | 2004-01-15 | 2004-01-15 | Piezoaktor und ein Verfahren zu dessen Herstellung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102004002087A1 true DE102004002087A1 (de) | 2005-08-04 |
Family
ID=34716564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102004002087A Withdrawn DE102004002087A1 (de) | 2004-01-15 | 2004-01-15 | Piezoaktor und ein Verfahren zu dessen Herstellung |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE102004002087A1 (fr) |
| WO (1) | WO2005069393A1 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010049311A1 (de) * | 2010-10-22 | 2012-04-26 | Epcos Ag | Piezoelektrisches Aktorbauelement |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE602005004917T2 (de) * | 2005-09-14 | 2009-03-05 | Ariose Electronics Co., Ltd. | Piezoelektrisches Keramikelement and Bauteile daraus |
| CN102611967B (zh) * | 2011-12-09 | 2014-07-16 | 张家港市玉同电子科技有限公司 | 双晶压电陶瓷片及由其制备的双晶压电陶瓷扬声器 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3378393D1 (en) * | 1982-05-11 | 1988-12-08 | Nec Corp | Multilayer electrostrictive element which withstands repeated application of pulses |
| JPH0794796A (ja) * | 1993-09-24 | 1995-04-07 | Fuji Elelctrochem Co Ltd | 積層型電歪／圧電素子 |
| JPH08316542A (ja) * | 1995-05-19 | 1996-11-29 | Nippon Cement Co Ltd | 積層型圧電アクチュエーターの製造方法 |
| JPH09162450A (ja) * | 1995-12-04 | 1997-06-20 | Matsushita Electric Ind Co Ltd | 積層圧電体素子 |
| DE19757877A1 (de) * | 1997-12-24 | 1999-07-01 | Bosch Gmbh Robert | Verfahren zur Herstellung piezoelektrischer Aktoren und piezoelektrischer Aktor |
| DE10024701A1 (de) * | 2000-05-18 | 2001-11-29 | Bosch Gmbh Robert | Piezoaktor |
| JP2004002069A (ja) * | 2002-05-30 | 2004-01-08 | Tdk Corp | 圧電磁器の製造方法および圧電素子の製造方法 |
-
2004
- 2004-01-15 DE DE102004002087A patent/DE102004002087A1/de not_active Withdrawn
- 2004-11-15 WO PCT/EP2004/052961 patent/WO2005069393A1/fr not_active Ceased
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010049311A1 (de) * | 2010-10-22 | 2012-04-26 | Epcos Ag | Piezoelektrisches Aktorbauelement |
| DE102010049311B4 (de) | 2010-10-22 | 2018-04-19 | Epcos Ag | Verfahren zur Herstellung eines piezoelektrischen Aktorbauelements |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2005069393A1 (fr) | 2005-07-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8141 | Disposal/no request for examination |