DD237916A1

DD237916A1 - ARRANGEMENT FOR MOUNTING MEASURING OBJECTS

Info

Publication number: DD237916A1
Application number: DD27689285A
Authority: DD
Inventors: Bredo Stitz
Original assignee: Zeiss Jena Veb Carl
Priority date: 1985-06-03
Filing date: 1985-06-03
Publication date: 1986-07-30

Abstract

Die Erfindung betrifft eine Anordnung zur Halterung von Messobjekten, vorzugsweise mit ebenen Formen wie Schablonen, Wafer u. ae. und kann in solchen Messgeraeten eingesetzt werden, bei denen des Messvorganges keine Verschiebung der Messobjekte zueinander oder zu einem Bezugspunkt eintreten darf. Durch Vakuum wird ein Messobjekt am Messobjekthalter, und dieser selbst an einem beweglichen Feintisch quasi absolut fixiert. Fig. 1The invention relates to an arrangement for holding objects to be measured, preferably with planar shapes such as stencils, wafers u. ae. and can be used in those measuring devices in which the measuring process must not occur a displacement of the measuring objects to each other or to a reference point. Vacuum is used to fix a measuring object on the measuring object holder, and this, even on a movable fine table, is almost completely fixed. Fig. 1

Description

ein Aufnahmerahmen durch mindestens vier Metallbälge, von denen sich je zwei Metallbälge an der linken und rechten Seite des Aufnahmerahmens befinden, mit dem Meßobjekthalter in Wirkverbindung steht, daß der Meßobjekthalter durch mindestens jeweils einem Metallbalg mit jeder Führung in Wirkverbindung steht, daß jeweils für zwei Taschen, zwei Metallbälge und mindestens eines einem Metallbalg über Vakuumkanäle und einem Vakuumkanal ein gemeinsamer Vakuumanschluß vorhanden ist und daß der Aufnahmerahmen an seiner Rückseite mittels mindestens zwei stellbaren Anschlägen und mindestens zwei Metallbälgen, die jeweils einen Vakuumanschluß besitzen, mit dem Feintisch in Wirkverbindung steht. Durch die erfindungsgemäße Lösung wird eine sichere, quasi absolute Anlage des Meßobjektes an den Meßobjekthalter erreicht, in dem durch Vakuum auch der Aufnahmerahmen gegen den Meßobjekthalter gezogen wird, wodurch gegenüber den bisher bekannten Lösungen ein zusätzlicher Andruck des Meßobjektes an den Meßobjekthalter erzeugt wird. Die Sicherung der justierten Lage des Meßobjekthalters zum Feintisch wird durch vier stellbare Füße in Verbindung mit einem zusätzlichen Andruck des Meßobjekthalters an die mit dem Feintisch verbundenen Führungen bewirkt. Damit können die genannten Nachteile bisher bekannten technischen Lösungen beseitigt werden.a receiving frame by at least four metal bellows, of which there are two metal bellows on the left and right side of the receiving frame, is in operative connection with the Meßobjekthalter that the Meßobjekthalter is operatively connected by at least one metal bellows with each guide that each for two pockets , two metal bellows and at least one metal bellows via vacuum channels and a vacuum channel a common vacuum connection is present and that the receiving frame is on its rear side by means of at least two adjustable stops and at least two Metallbälgen, each having a vacuum connection, in operative connection with the fine table. The inventive solution a secure, quasi-absolute investment of the measurement object is achieved at the Meßobjekthalter, in which the receiving frame is pulled against the Meßobjekthalter by vacuum, whereby compared to the previously known solutions, an additional contact pressure of the measurement object is generated to the Meßobjekthalter. The securing of the adjusted position of the object holder to the fine table is effected by four adjustable feet in conjunction with an additional pressure of the Meßobjekthalters to the associated with the fine table guides. Thus, the aforementioned disadvantages of previously known technical solutions can be eliminated.

embodiment

Die Erfindung wird im folgenden anhand eines Ausführungsbeispieles näher erläutert. Die Zeichnungen zeigen inThe invention will be explained in more detail below with reference to an embodiment. The drawings show in

Figur 1: in Draufsicht eine schematische Darstellung der erfindungsgemäßen Anordnung zur Halterung von Meßobjekten, Figur 2: einen Schnitt ÄÄ durch die Figur 1 und Figur 3: einen Schnitt BB durch die Figur 1.1 shows a plan view of a schematic representation of the arrangement according to the invention for holding objects to be measured, FIG. 2 shows a section AA through FIG. 1 and FIG. 3 shows a section BB through FIG.

Die Figur 2 zeigt ein Meßobjekt 12, das im Aufnahmerahmen 8 eingelegt ist. Das Meßobjekt 12 wird mittels eines Schubes 7 an die Unterseite des Meßbbjekthalters 9 gebracht.FIG. 2 shows a test object 12 which is inserted in the mounting frame 8. The measurement object 12 is brought by means of a thrust 7 to the underside of the Meßbbjekthalters 9.

Die Schubbewegung wird begrenzt durch die lageorientierenden, zum Aufnahmerahmen 8 justierbaren stellbaren Anschläge 16 und den entsprechenden Anschlägen im Feintisch 1, in der Figur 1 dargestellt. Die Lageorientierung in den Koordinaten χ und y erfolgt mittels eines stellbaren Anschlages 16 in einer prismatischen Nut 17 im Feintisch 1, wobei als bewegliche Koordinate ζ erhalten bleibt. Durch den zweiten stellbaren Anschlag 16 in Verbindung mit einer Planfläche am Feintisch 1 erfolgt die Fixierung des Winkels φ senkrecht zur Koordinate z. Über mindestens vier Stößel 2, in Figur 2 dargestellt, jeder Ecke des Aufnahmerahmens 8 ist ein Stößel 2 zugeordnet, wird der Aufnahmerahmen 8 mit dem Meßobjekt 12 zur Anlage der Referenzebene an die Finger 13 (siehe auch Figur 1) gebracht, wobei die Anlage durch die federnde Wirkung der Metallbälge 11 gedämpft erfolgt.The thrust movement is limited by the position-oriented, adjustable to the receiving frame 8 adjustable stops 16 and the corresponding stops in the fine table 1, shown in the figure 1. The position orientation in the coordinates χ and y by means of an adjustable stop 16 in a prismatic groove 17 in the fine table 1, being maintained as a movable coordinate ζ. By the second adjustable stop 16 in conjunction with a plane surface on the fine table 1, the fixing of the angle φ is perpendicular to the coordinate z. About at least four plunger 2, shown in Figure 2, each corner of the receiving frame 8 is associated with a plunger 2, the receiving frame 8 is brought to the test object 12 for conditioning the reference plane to the fingers 13 (see also Figure 1), the system by the resilient action of the metal bellows 11 is damped.

Der auswechselbare Meßobjekthalter 9, in Figur 1 und 3 dargestellt, wird durch die stellbaren Füße 19,20,21 in Verbindung mit einer Kegelsenkung für den stellbaren Fuß 19 und einer nicht dargestellten prismatischen Nut für den stellbaren Fuß 20 in der auf der linken Seite befindlichen Führung 3 und mit jeweils einer ebenen Auflagefläche für jeden der zwei stellbaren Füße 21 in der auf der rechten Seite befindlichen Führung 3 lageorientiert.The replaceable Meßobjekthalter 9, shown in Figures 1 and 3, is located by the adjustable feet 19,20,21 in conjunction with a countersink for the adjustable foot 19 and a prismatic groove, not shown, for the adjustable foot 20 in the on the left side Guide 3 and each with a flat support surface for each of the two adjustable feet 21 in the guide located on the right side 3 orientation.

Die kraftschlüssige, reproduzierbare₍quasi absolute Fixierung des Meßpbjektes 12 zum Meßobjekthalter erfolgt mittels vier mit dem Aufnahmerahmen 8 fest verbundenen Metallbälgen 11, in Figur 1 und 2 dargestellt, die über die Vakuumkanäle 10 im Meßobjekthalter 9 evakuiert werden, unterstützt durch die Taschen 14 in den Fingern 13. Die Verbindung vom Vakuumanschluß 4 zu den Vakuumkanälen 10 im Meßobjekthalter 9 erfolgt über den Metallbalg 6 durch" dessen Boden der Vakuumkanal 5 geführtThe non-positive, reproducible ₍ quasi-absolute fixation of the Meßpbjektes 12 to Meßobjekthalter done by means of four with the receiving frame 8 firmly connected Metallbälgen 11, shown in Figures 1 and 2, which are evacuated via the vacuum channels 10 in the Meßobjekthalter 9, supported by the pockets 14 in the Fingers 13. The connection from the vacuum port 4 to the vacuum channels 10 in the Meßobjekthalter 9 via the metal bellows 6 through "the bottom of the vacuum channel 5 out

Für jeweils zwei Taschen 14, zwei Metallbälge 11 und mindestens einem Metallbalg 6 ist ein gemeinsamer Vakuumanschluß 4 vorgesehen. Dadurch wird gleichzeitig mittels den Taschen 14 und den Metallbälgen 11 in Verbindung mit dem Aufnahmerahmen 8 das Meßobjekt 12 an den Meßobjekthalter 9 und der Meßobjekthalter 9 selbst mittels den Metallbälgen 6 über die Führungen 3 an den Feintisch 1 angedrückt, wodurch ein stabiles geschlossenes Kräftesystem entsteht.For each two pockets 14, two metal bellows 11 and at least one metal bellows 6, a common vacuum port 4 is provided. As a result, at the same time by means of the pockets 14 and the metal bellows 11 in conjunction with the receiving frame 8, the test object 12 is pressed against the Meßobjekthalter 9 and the Meßobjekthalter 9 itself by means of Metallbälgen 6 via the guides 3 to the Feintisch 1, creating a stable closed force system.

Weiterhin wird der Aufnahmerahmen 8 mittels der Metallbälge 18 kraftschlüssig und reproduzierbar an den Feintisch 1 fixiert.Furthermore, the receiving frame 8 is fixed by means of the metal bellows 18 frictionally and reproducibly to the fine table 1.

Claims

Claim:

Arrangement for holding objects to be measured, in which a Meßobjekthalter, with a window and four fingers protruding into the window, each with a pocket and vacuum channels, by means of four adjustable feet on two guides, which are located on the left and right side of the Meßobjekthalters and with Feintisch are stored, is mounted between the guides immediately above the table a horizontally movable, guided in the guides thrust on the thrust a vertically movable interchangeable receiving frame and mounted thereon a DUT and the receiving frame is supported from bottom by four plungers characterized in that the receiving frame (8) is operatively connected to the measuring object holder (9) by at least four metal bellows (11) of which two metal bellows (11) are located on the left and right sides of the receiving frame (8), that the Meßobjekthalter (9) by at least one metal bellows (6) is in operative connection with each guide (3) that in each case for two pockets (14), two metal bellows (11) and at least one metal bellows (6) via vacuum channels (10) and a vacuum channel (5) a common vacuum connection (4 ) is present and that the receiving frame (8) on its rear side by means of at least two adjustable stops (16) and at least two Metallbälgen (18), each having a vacuum connection (15) is in operative connection with the fine table (1).

For this

2 pages drawings

Field of application of the invention

The invention can be used for the mounting of objects to be measured, such as stencils, wafers, scales, reticles and the like. be used.

Especially in those measuring devices in which no displacement of the measured objects may occur to each other or to a reference point during the measuring process.

Characteristic of the known technical solutions

There are known Meß.bei which the test objects to be tested, for. As stencils, each inserted in a receiving frame and brought by means of a thrust to the underside of the Meßobjekthalter. In diener position, a pneumatic system is switched on, which raises the receiving frame until the measurement object lying on this lying on the, located on the Meßobjekthalter fingers. The fingers of the object holder are provided on the side facing the object to be measured with pockets, which should ensure the position-oriented, reproducible fixation of the object to be measured when using vacuum. The measuring object holder is fixed by its own mass by means of at least three adjustable feet on the system of the fine tables.

In general, two recording and holding devices for each object to be measured are present in a meter (brochure material for "SVG 160" of the combine VEB Carl Zeiss JENA, brochure material for "MVG" Fa. Leitz, Wetzlar, FRG). The disadvantage of these solutions is that by dynamic forces acting on the outside of the meter and the generated during the measurement process in the meter itself, a shift of highly concentrated measuring objects to each other occurs, the measurement accuracy of the order of 1 χ 10 ~ ⁴ mm not guaranteed. Another disadvantage is the undamped, hard stop of the DUT on the fingers of the DUT, during the lifting of the receiving frame.

Furthermore, technical solutions are known in which the measured object is fixed and held by means of a mechanical clamping device. The disadvantage of these solutions is the high equipment complexity, a lower ease of use and a lower degree of automation of the preparation of the measurement object to the measurement process.

Object of the invention

The object of the invention is to provide an arrangement for holding objects to be measured with the least technical equipment effort, high ease of use in the supply of the measurement object and a small amount of time for the preparation of the measurement object to the measurement process.

Essence of the invention

The invention has for its object an arrangement for holding DUTs, z. As templates for the production of integrated circuits to create, in which by means of the device existing components and automatically working vacuum components in conjunction with mechanical stops a quasi-absolute, non-positive, reproducible fixation of the object is guaranteed, a damping of the system of the test object to Finger of Meßobjekthalters takes place and measurement accuracies of 1 χ 10 ~ ⁴ mm can be reproduced achieved. The object is achieved by an arrangement for holding test objects in a Meßobjekthalter, with a window and four fingers projecting into the window, each with a pocket and vacuum channels, by means of four adjustable feet on two guides, located on the left and right side of the Meßobjekthalters are located and connected to the fine table, is stored, between the guides immediately above the fine table a horizontally movable, guided in the guides thrust is arranged on the thrust a vertically movable interchangeable receiving frame and on this a DUT and the receiving frame from below through four plunger is supported, according to the invention solved in that