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CZ101195A3 - Process and apparatus for investigating transparent material - Google Patents

Process and apparatus for investigating transparent material Download PDF

Info

Publication number
CZ101195A3
CZ101195A3 CZ951011A CZ101195A CZ101195A3 CZ 101195 A3 CZ101195 A3 CZ 101195A3 CZ 951011 A CZ951011 A CZ 951011A CZ 101195 A CZ101195 A CZ 101195A CZ 101195 A3 CZ101195 A3 CZ 101195A3
Authority
CZ
Czechia
Prior art keywords
camera
thickness
light
images
defects
Prior art date
Application number
CZ951011A
Other languages
Czech (cs)
English (en)
Inventor
Yann Jutard
Jean-Jacques Sacre
Original Assignee
Thomson Csf
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson Csf filed Critical Thomson Csf
Publication of CZ101195A3 publication Critical patent/CZ101195A3/cs

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/38Concrete; Lime; Mortar; Gypsum; Bricks; Ceramics; Glass
    • G01N33/386Glass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • G01N2021/8829Shadow projection or structured background, e.g. for deflectometry
    • G01N2021/8832Structured background, e.g. for transparent objects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8962Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod for detecting separately opaque flaws and refracting flaws
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8967Discriminating defects on opposite sides or at different depths of sheet or rod
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/10Scanning
    • G01N2201/102Video camera

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Textile Engineering (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CZ951011A 1992-10-20 1993-10-13 Process and apparatus for investigating transparent material CZ101195A3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9212526A FR2697086B1 (fr) 1992-10-20 1992-10-20 Procédé et dispositif d'inspection de matériau transparent.

Publications (1)

Publication Number Publication Date
CZ101195A3 true CZ101195A3 (en) 1996-11-13

Family

ID=9434692

Family Applications (1)

Application Number Title Priority Date Filing Date
CZ951011A CZ101195A3 (en) 1992-10-20 1993-10-13 Process and apparatus for investigating transparent material

Country Status (10)

Country Link
US (1) US5598262A (fr)
EP (1) EP0665951B1 (fr)
JP (1) JPH08502361A (fr)
KR (1) KR950704679A (fr)
CZ (1) CZ101195A3 (fr)
DE (1) DE69307722T2 (fr)
FR (1) FR2697086B1 (fr)
PL (1) PL172759B1 (fr)
RU (1) RU95109712A (fr)
WO (1) WO1994009358A1 (fr)

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US5715051A (en) * 1996-10-21 1998-02-03 Medar, Inc. Method and system for detecting defects in optically transmissive coatings formed on optical media substrates
KR100532238B1 (ko) * 1997-03-10 2006-02-28 신에쓰 가가꾸 고교 가부시끼가이샤 박판막 검사방법, 이에 사용되는 장치 및 검사시스템
GB9812091D0 (en) * 1998-06-05 1998-08-05 Glaverbel Defect detecting unit
GB2338309B (en) * 1998-06-13 2002-05-08 Neil Colin Hamilton Recognition apparatus for toughened glass
JP3330089B2 (ja) 1998-09-30 2002-09-30 株式会社大協精工 ゴム製品の検査方法及び装置
ES2156071B1 (es) * 1999-03-01 2002-02-01 Sevilla Juan Antonio Lasso Equipo de luz coherente xenon para el control de calidad en la fabricacion del vidrio.
US6521905B1 (en) * 1999-09-22 2003-02-18 Nexpress Solutions Llc Method and device for detecting the position of a transparent moving conveyor belt
JP4647090B2 (ja) * 2000-12-13 2011-03-09 ローム株式会社 透明積層体の検査装置
RU2196299C2 (ru) * 2001-01-23 2003-01-10 Гультяев Юрий Павлович Устройство измерения характеристик прозрачных неоднородностей
US6629010B2 (en) 2001-05-18 2003-09-30 Advanced Vision Particle Measurement, Inc. Control feedback system and method for bulk material industrial processes using automated object or particle analysis
US6885904B2 (en) * 2001-05-18 2005-04-26 Advanced Vision Particle Measurement, Inc. Control feedback system and method for bulk material industrial processes using automated object or particle analysis
US7142295B2 (en) * 2003-03-05 2006-11-28 Corning Incorporated Inspection of transparent substrates for defects
DE102004005019A1 (de) * 2004-01-30 2005-08-18 Isra Glass Vision Gmbh Verfahren zur Bestimmung der Tiefe eines Fehlers in einem Glasband
US7122819B2 (en) * 2004-05-06 2006-10-17 Micron Technology, Inc. Method and apparatus for imager die package quality testing
DE102004026375B4 (de) * 2004-05-29 2007-03-22 Isra Glass Vision Gmbh Vorrichtung und Verfahren zur Detektion von Kratzern
US7199386B2 (en) * 2004-07-29 2007-04-03 General Electric Company System and method for detecting defects in a light-management film
WO2006087213A2 (fr) * 2005-02-18 2006-08-24 Schott Ag Procede et dispositif pour detecter et/ou classifier des endroits defectueux
US7567344B2 (en) * 2006-05-12 2009-07-28 Corning Incorporated Apparatus and method for characterizing defects in a transparent substrate
US7369240B1 (en) 2006-07-20 2008-05-06 Litesentry Corporation Apparatus and methods for real-time adaptive inspection for glass production
US7551274B1 (en) 2007-02-28 2009-06-23 Lite Sentry Corporation Defect detection lighting system and methods for large glass sheets
US7940382B2 (en) * 2007-03-16 2011-05-10 Asahi Kasei Chemicals Corporation Method for inspecting defect of hollow fiber porous membrane, defect inspection equipment and production method
US7800749B2 (en) * 2007-05-31 2010-09-21 Corning Incorporated Inspection technique for transparent substrates
DE102007037812B4 (de) * 2007-08-10 2023-03-16 Carl Zeiss Optotechnik GmbH Verfahren und Vorrichtung zur Detektion von Oberflächenfehlern eines Bauteils
JP5491518B2 (ja) * 2008-11-25 2014-05-14 スリーエム イノベイティブ プロパティズ カンパニー 可撓性ウェブ洗浄用装置及び方法
JP4796160B2 (ja) * 2009-02-27 2011-10-19 三菱重工業株式会社 薄膜の検査装置及び検査方法
DE102010021853B4 (de) 2010-05-28 2012-04-26 Isra Vision Ag Einrichtung und Verfahren zur optischen Überprüfung eines Gegenstands
IT1402103B1 (it) * 2010-10-08 2013-08-28 Università Di Pisa Metodo e dispositivo per rilevare la posizione geometrica di un difetto in un oggetto
KR20130140058A (ko) * 2010-12-09 2013-12-23 아사히 가라스 가부시키가이샤 유리 리본 내 결함 측정 방법 및 유리 리본 내 결함 측정 시스템
JP5874139B2 (ja) * 2011-12-01 2016-03-02 国立大学法人東京工業大学 膜材料の欠陥の光学的観察方法および装置
US9790465B2 (en) 2013-04-30 2017-10-17 Corning Incorporated Spheroid cell culture well article and methods thereof
DE102013107215B3 (de) 2013-07-09 2014-10-09 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines Spiegelsubstrat-Rohlings aus Titan-dotiertem Kieselglas für die EUV-Lithographie, sowie System zur Positionsbestimmung von Defekten in einem Rohling
DE202014102853U1 (de) 2014-06-23 2014-07-14 Oliver Gabriel Vorrichtung zur Detektion der optischen Güte einer transparenten Materialoberfläche sowie deren Verwendung
WO2016069895A1 (fr) 2014-10-29 2016-05-06 Corning Incorporated Insert de culture cellulaire
JP2017532971A (ja) 2014-10-29 2017-11-09 コーニング インコーポレイテッド 細胞培養集合体を生成するためのマイクロウェル設計および製造
WO2019014635A1 (fr) 2017-07-14 2019-01-17 Corning Incorporated Récipients de culture cellulaire 3d pour échange de milieu manuel ou automatique
PL3652292T3 (pl) 2017-07-14 2025-09-01 Corning Incorporated Naczynie do hodowli komórkowej 3d i sposoby hodowli komórkowej 3d
US11857970B2 (en) 2017-07-14 2024-01-02 Corning Incorporated Cell culture vessel
EP3649226B1 (fr) 2018-07-13 2022-04-06 Corning Incorporated Boîtes de petri pourvues d'une paroi latérale comprenant une surface de distribution de milieu liquide
PL3649229T3 (pl) 2018-07-13 2021-12-06 Corning Incorporated Naczynia do hodowli komórkowych ze stabilizującymi urządzeniami
EP3649227A1 (fr) 2018-07-13 2020-05-13 Corning Incorporated Dispositifs fluidiques comprenant des microplaques avec des puits interconnectés
EP3657535B1 (fr) 2018-11-20 2023-02-15 Simulacions Optiques S.L. Dispositif de vérification d'un circuit intégré comportant un émetteur optoélectronique, installation de fabrication et procédés de vérification et de fabrication correspondants
EP3838470A1 (fr) * 2019-12-17 2021-06-23 Bystronic Laser AG Détection de pièces étrangères et de scories sur une table de travail
KR20230044505A (ko) * 2020-08-04 2023-04-04 코닝 인코포레이티드 재료를 검사하는 방법들 및 장치
CN113899760B (zh) * 2021-09-30 2025-01-21 长沙韶光铬版有限公司 一种玻璃基板的检测方法、装置、电子设备及存储介质

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US3519362A (en) * 1968-03-12 1970-07-07 Ppg Industries Inc Glass color streak detector including a flexible background material biased against the glass
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Also Published As

Publication number Publication date
EP0665951B1 (fr) 1997-01-22
PL172759B1 (en) 1997-11-28
US5598262A (en) 1997-01-28
KR950704679A (ko) 1995-11-20
JPH08502361A (ja) 1996-03-12
EP0665951A1 (fr) 1995-08-09
DE69307722T2 (de) 1997-06-12
WO1994009358A1 (fr) 1994-04-28
FR2697086B1 (fr) 1994-12-09
RU95109712A (ru) 1996-12-27
FR2697086A1 (fr) 1994-04-22
PL308462A1 (en) 1995-07-24
DE69307722D1 (de) 1997-03-06

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