CN85100507B - modified lead barium sodium niobate piezoelectric ceramic material - Google Patents
modified lead barium sodium niobate piezoelectric ceramic materialInfo
- Publication number
- CN85100507B CN85100507B CN85100507A CN85100507A CN85100507B CN 85100507 B CN85100507 B CN 85100507B CN 85100507 A CN85100507 A CN 85100507A CN 85100507 A CN85100507 A CN 85100507A CN 85100507 B CN85100507 B CN 85100507B
- Authority
- CN
- China
- Prior art keywords
- weight
- sodium niobate
- piezoelectric ceramic
- ceramic material
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- PILOURHZNVHRME-UHFFFAOYSA-N [Na].[Ba] Chemical compound [Na].[Ba] PILOURHZNVHRME-UHFFFAOYSA-N 0.000 title claims abstract description 4
- 229910010293 ceramic material Inorganic materials 0.000 title abstract description 3
- 239000000463 material Substances 0.000 claims abstract description 12
- 229910000906 Bronze Inorganic materials 0.000 claims abstract description 4
- 239000010974 bronze Substances 0.000 claims abstract description 4
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052751 metal Inorganic materials 0.000 claims abstract description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 4
- 239000010937 tungsten Substances 0.000 claims abstract description 4
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 4
- 239000002184 metal Substances 0.000 claims abstract description 3
- 239000000126 substance Substances 0.000 claims abstract description 3
- 239000011734 sodium Substances 0.000 claims description 5
- 229910003870 O—Li Inorganic materials 0.000 claims 1
- 229910010413 TiO 2 Inorganic materials 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 abstract description 19
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000008859 change Effects 0.000 abstract description 3
- 239000000203 mixture Substances 0.000 abstract description 3
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 abstract 1
- 230000028161 membrane depolarization Effects 0.000 abstract 1
- 238000005245 sintering Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000010955 niobium Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Images
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- Compositions Of Oxide Ceramics (AREA)
Abstract
The present invention belongs to a tungsten bronze type modified lead barium sodium niobate piezoelectric ceramic material. The chemical formula of the material is that M is tetravalent metal element, such as Zr, Ti and other substituted partial Nb elements, x is 0.5-0.9, y is 0.03-0.5, and theta is 0-1.5. Eta is 0.1 to 2. Preferably, the composition contains PbO 26-36 wt%, Na2O and Li21 to 3% by weight of total O, MO21 to 5% by weight. The material has the characteristics of simple manufacturing process, good repeatability, higher coercive field strength, high alternating current depolarization resistance, good linearity of displacement along with the change of voltage, basically zero return and suitability for high-precision piezoelectric micro-displacers.
Description
The invention relates to tungsten bronze type modification niobium acid lead titanate sodium piezoelectric stupalith.
Utilize piezoceramic material can produce the characteristic of certain displacement corresponding to a certain impressed voltage, can make electric micro positioner, as the fine motion control of laser mirror, laser interferometer, automatically controlled distorting lens, the driving mechanism that large-scale integrated circuit is used the exposure machine micro displacement workbench.Yet, the relation of displacement and voltage is different because of the piezoceramic material prescription, " soft " material that displacement is bigger in general, the phenomenon that displacement lags behind voltage is serious, displacement is the two-valued function of voltage, form a loop line that does not seal, thereby same magnitude of voltage correspondence different displacements, displacement did not return zero when voltage returned zero.United States Patent (USP) 4,263,527th adopts the method that changes pilot circuit to reduce lag-effect, rather than sets about from improving the stupalith prescription.The method of this pilot circuit often causes complex structure though can reach the purpose that reduces to lag behind, and brings and makes complexity, and problems such as use inconvenience also increase the cost of manufacturing; Less " rigid " material of another kind of displacement though the displacement hysteresis is less, still forms less loop line, has influenced the use in the high precision field.
The objective of the invention is to set about providing a kind of displacement to be linear substantially with voltage change from improving the piezoelectric ceramics prescription, it is very little to lag behind, and displacement in time, the strength of electric field variation is all stablized and manufacturing process is simple, " rigid " piezoceramic material of good reproducibility.
Piezoceramic material provided by the invention, chemical formula is
Wherein M represents the tetravalent metal element, as Zr, Ti etc.
x＝0.5～0.9，y＝0.03～0.5，θ＝0～1.5。η＝0.1～2。
Crystalline structure belongs to tungsten bronze type, be characterized in lead tolerance than lead zirconate-titanate ceramic few half, during sintering without any need for preventing plumbous evaporable measure.
Piezoceramic material manufacturing process provided by the invention is simple, after partly replacing Nb with metallic elements such as Zr, Ti, can enlarge sintering range and dense sintering (can than the low about 100 ℃ of sintering temperatures of general Pb-based lanthanumdoped zirconate titanates) at a lower temperature.The preferential composition of recommending of the present invention is PbO26～36%(weight), Na
2O and Li
2O1～3%(weight), MO
21～5%(weight).
Material coercive field strength provided by the invention, room temperature can reach 1800V/mm, though the polarization condition harshness, after polarization fully, anti-interchange depolarize ability is also strong, room temperature is 800V/mm in the time of 150 ℃ greater than 1000V/mm.Its dielectric coefficient ε
T 35Be 1100, tg δ 0.5% and also change with temperature, strength of electric field more smooth, K
p=0.34, K
1=0.44, d
33180 * 10
-12M/V is rigid piezoelectric.
Advantage of the present invention is that the displacement of material is linear substantially with the variation of voltage, as shown in Figure 1.X-coordinate is a voltage among the figure, ordinate zou is displacement, frequency 0.01Hz/S, when figure can find out that voltage returns zero, displacement also returned zero substantially, to the collinear maximum deviation in 1～2%, returning the general piezoelectric ceramics of zero problem is greatly improved, response is fast, creep is little, even strength of electric field is also stable up to the 1600V/mm displacement, is suitable as the high precision piezoelectric actuator.The piezoelectric actuator driving exposure machine micro displacement workbench displacement sensitivity made from it can reach 0.04 μ m, bearing accuracy ± 0.02 μ m, and reproducibility error is less than 0.01 μ m.
Embodiments of the invention are to contain PbO35.12%(weight), BaO6.03%(weight), Na
2O and Li
2O1.91%(weight), MO
21.75%(weight), all the other compositions are Nb
2O
3By said components batching, the alcohol wet mixing is after 10～15 hours, the infrared lamp oven dry, and it is synthetic to sieve, and synthesis condition is 800 ℃, carries out levigate compressing tablet again, can burn till under 1190 ℃.
Claims (6)
1, a kind of piezoceramic material that belongs to the tungsten bronze type Modifed lead barium sodium niobate is by PbO-BaO-Na
2O-Li
2O-Nb
2O
5-TiO
2/ ZrO
2Deng becoming to be grouped into, it is characterized in that:
(1) chemical formula is:
Wherein M is Zr, Ti tetravalent metal element, replaces part Nb element;
x＝0.5～0.9，y＝0.03～0.5，θ＝0～1.5。η＝0.1～2
(2) the preferential PbO content of recommending is 26～36%(weight); Na
2O and Li
2The total content of O is 1～3%(weight); MO
2Content be 1～5%(weight).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN85100507A CN85100507B (en) | 1985-04-01 | 1985-04-01 | modified lead barium sodium niobate piezoelectric ceramic material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN85100507A CN85100507B (en) | 1985-04-01 | 1985-04-01 | modified lead barium sodium niobate piezoelectric ceramic material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN85100507A CN85100507A (en) | 1986-08-13 |
| CN85100507B true CN85100507B (en) | 1987-11-11 |
Family
ID=4791216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN85100507A Expired CN85100507B (en) | 1985-04-01 | 1985-04-01 | modified lead barium sodium niobate piezoelectric ceramic material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN85100507B (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5762816A (en) * | 1995-11-14 | 1998-06-09 | Murata Manufacturing Co., Ltd. | Piezoelectric ceramic composition |
| TW429636B (en) * | 1998-02-18 | 2001-04-11 | Murata Manufacturing Co | Piezoelectric ceramic composition |
| TW563265B (en) * | 1998-02-18 | 2003-11-21 | Murata Manufacturing Co | Piezoelectric ceramic composition |
| CN1934659B (en) * | 2004-03-29 | 2010-11-24 | 日本化学工业株式会社 | Inorganic dielectric powder for composite dielectric material and composite dielectric material |
| CN101538159B (en) * | 2009-04-11 | 2011-11-09 | 桂林工学院 | Microwave dielectric ceramic with medium dielectric constant sintered at low temperature and preparation method thereof |
| US8678562B2 (en) * | 2009-09-30 | 2014-03-25 | Canon Kabushiki Kaisha | Piezoelectric material, piezoelectric device, liquid discharge head, and ultrasonic motor |
| EP2867929B1 (en) | 2012-08-27 | 2016-11-30 | Canon Kabushiki Kaisha | Piezoelectric material |
| CN112745121B (en) * | 2021-01-14 | 2022-05-10 | 中国科学院上海硅酸盐研究所 | Reverse light scattering transparent ceramic capable of realizing light path on-off and application thereof |
-
1985
- 1985-04-01 CN CN85100507A patent/CN85100507B/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CN85100507A (en) | 1986-08-13 |
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| SE01 | Entry into force of request for substantive examination | ||
| PB01 | Publication | ||
| C06 | Publication | ||
| C13 | Decision | ||
| GR02 | Examined patent application | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |