CN2901640Y - Double stick serial connection high power solid laser - Google Patents
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Abstract
双棒串接大功率固体激光器属于大功率固体激光器技术领域。目前国内已有的Nd∶YAG激光器采用两400W单棒激光器模块串接时的输出功率只有500-700W,电光转换效率只有3%。本实用新型特征在于,同时满足以下条件:选择平均有效热焦距f、径向热焦距fr、切向热焦距fθ相同的两个大功率激光器模块用于两棒串接;激光器谐振腔选择对称平行平面结构;选择激光器棒棒间距为棒与腔镜的间距的2倍,棒间距的范围为平均热焦距f的1到2倍;选择两孔径相同的光阑对称放置于两串接激光器棒的两端;调整两个串接的激光器棒的棒中心共轴。本实用新型激光器的最大输出功率可达1100-1200W,光束质量为21-25mm·mrad,总体电光转换效率为3.8%-4.1%。
A high-power solid-state laser connected in series with two rods belongs to the technical field of high-power solid-state lasers. At present, the output power of the existing Nd:YAG laser in China is only 500-700W when two 400W single-rod laser modules are connected in series, and the electro-optical conversion efficiency is only 3%. The utility model is characterized in that the following conditions are met at the same time: two high-power laser modules with the same average effective thermal focal length f, radial thermal focal length fr, and tangential thermal focal length fθ are selected for two rods to be connected in series; the laser resonator is selected to be symmetrically parallel Planar structure; the distance between the rods of the laser is selected to be twice the distance between the rod and the cavity mirror, and the range of the distance between the rods is 1 to 2 times the average thermal focal length f; two apertures with the same aperture are selected to be symmetrically placed between the two series connected laser rods Both ends; adjust the coaxiality of the rod centers of the two serially connected laser rods. The maximum output power of the laser of the utility model can reach 1100-1200W, the beam quality is 21-25mm·mrad, and the overall electro-optic conversion efficiency is 3.8%-4.1%.
Description
技术领域:Technical field:
双棒串接大功率固体激光器属于大功率固体激光器技术领域。A high-power solid-state laser connected in series with two rods belongs to the technical field of high-power solid-state lasers.
背景技术Background technique
工业激光材料加工方面的应用要求大功率、高光束质量的激光输出。目前主要有两类激光器,即CO2气体激光器和Nd:YAG固体激光器。固体激光器与CO2气体激光器相比存在明显的优点:固体激光器波长短(相对于CO2激光),材料吸收率高,体积小,能采用光纤传输等优点,是工业应用中有竞争力的激光光源。Applications in industrial laser material processing require high power, high beam quality laser output. There are currently two main types of lasers, namely CO2 gas lasers and Nd:YAG solid-state lasers. Compared with CO2 gas lasers, solid-state lasers have obvious advantages: solid-state lasers have short wavelength (compared to CO2 lasers), high material absorption rate, small size, and can be transmitted by optical fibers. They are competitive laser light sources in industrial applications.
工业激光材料加工的应用要求固体激光器输出千瓦甚至更高的功率,通常200mm长单棒Nd:YAG激光器模块的输出功率被局限在单模块输出400-600W。有两种途径可能实现更大输出功率的要求,一是采用多棒振荡放大的结构,由于放大级中输出激光的强度远低于激光棒的饱和强度,放大级的效率低;对于高功率激光而言,振荡放大系统中由于热透镜效应的影响,会造成输出光束质量的降低,且光路准直的偏差容易造成激光棒的损坏;另一是采用多棒串接的模块组合式结构,可实现激光器输出功率按单棒的功率累加,而光束质量近似保持不变,避免振荡放大结构的问题,工业化大功率YAG激光器一般采用多棒串接的模块组合式结构。The application of industrial laser material processing requires solid-state lasers to output kilowatts or even higher power. Usually, the output power of a 200mm long single-rod Nd:YAG laser module is limited to a single module output of 400-600W. There are two ways to achieve greater output power requirements. One is to use a multi-rod oscillation amplification structure. Since the intensity of the output laser in the amplifier stage is much lower than the saturation intensity of the laser rod, the efficiency of the amplifier stage is low; for high-power laser In terms of vibration amplification system, due to the influence of thermal lens effect, the quality of the output beam will be reduced, and the deviation of optical path collimation will easily cause damage to the laser rod; Realize that the output power of the laser is accumulated according to the power of a single rod, while the beam quality remains approximately unchanged, avoiding the problem of the oscillation amplification structure. Industrial high-power YAG lasers generally adopt a modular structure with multiple rods connected in series.
用多棒串接大功率YAG激光器的输出特性,包括输出功率和光束质量,既与单棒激光器的特性有关,又与串接多棒激光模块之间的匹配有关。对于特性一致的两单棒激光器模块,只有在两棒激光器模块之间的结构、热焦距和双折射、临界稳定和稳定区等参数匹配的条件下,输出功率才能按两模块的功率累加,而光束质量维持单棒激光器模块的光束质量。由于激光模块之间的匹配问题,使输出功率受到限制,目前国内已有的Nd:YAG激光器采用两400W单棒激光器模块串接时的输出功率只有500-700W,电光转换效率只有3%,光束模式为基模和低阶模组成的混合模。The output characteristics of multi-rod high-power YAG lasers, including output power and beam quality, are not only related to the characteristics of single-rod lasers, but also related to the matching between serially connected multi-rod laser modules. For two single-rod laser modules with the same characteristics, the output power can be accumulated according to the power of the two modules only under the conditions of matching parameters such as structure, thermal focal length and birefringence, critical stability and stable region between the two rod laser modules, and Beam quality maintains the beam quality of a single rod laser module. Due to the matching problem between laser modules, the output power is limited. At present, the output power of the existing Nd:YAG lasers in China is only 500-700W when two 400W single-rod laser modules are connected in series, and the electro-optical conversion efficiency is only 3%. The mode is a mixed mode composed of the base mode and the lower order mode.
实用新型内容:Utility model content:
本实用新型的目的是通过两棒激光器模块之间的结构、热焦距、临界点和稳定区等参数匹配,提高激光系统的输出功率,使激光系统的功率按两激光器模块的功率累加,而光束质量维持单棒激光器模块的光束质量。The purpose of this utility model is to increase the output power of the laser system by matching parameters such as the structure, thermal focal length, critical point and stable area between the two laser modules, so that the power of the laser system is accumulated according to the power of the two laser modules, and the beam Quality maintains the beam quality of a single rod laser module.
本实用新型的双棒串接大功率固体激光器,特征在于,同时满足以下条件:The double-rod serial connection high-power solid-state laser of the present invention is characterized in that it satisfies the following conditions at the same time:
选择平均有效热焦距f、径向热焦距fr、切向热焦距fθ相同的两个大功率激光器模块用于两棒串接;Select two high-power laser modules with the same average effective thermal focal length f, radial thermal focal length fr, and tangential thermal focal length fθ for two-rod serial connection;
激光器谐振腔选择对称平行平面结构;The laser resonator chooses a symmetrical parallel plane structure;
选择激光器棒3棒间距为棒3与腔镜的间距的2倍,棒3间距的范围为平均热焦距f的1倍到2倍;The distance between the rods 3 of the laser is selected to be twice the distance between the rods 3 and the cavity mirror, and the distance between the rods 3 ranges from 1 to 2 times the average thermal focal length f;
选择两孔径相同的光阑4对称放置于两串接激光器棒3的两端;Choose two diaphragms 4 with the same aperture and place them symmetrically at both ends of the two serially connected laser rods 3;
调整两个串接的激光器棒3的棒中心共轴。Adjust the rod center coaxiality of the two serially connected laser rods 3 .
选择平均有效热焦距f、径向热焦距fr、切向热焦距fθ相同的两个大功率激光器模块用于两棒串接。Two high-power laser modules with the same average effective thermal focal length f, radial thermal focal length fr, and tangential thermal focal length fθ are selected for two rods to be connected in series.
谐振腔选择对称平行平面结构,即两个平面镜对称放置在激光晶体棒3两侧的谐振腔结构。由于对称平行平面谐振腔与其它谐振腔相比,两棒串接大功率激光器模块在对称结构时可等效为一谐振腔,易于两棒串接大功率激光器模块匹配。同时,对称平行平面谐振腔具有模体积大、失调灵敏度小、光束束腰位于输出镜处,便于光纤耦合输出等优点,因而两棒串接大功率固体激光器采用平行平面谐振腔。The resonant cavity adopts a symmetrical parallel plane structure, that is, a resonant cavity structure in which two plane mirrors are symmetrically placed on both sides of the laser crystal rod 3 . Compared with other resonators, the symmetrical parallel planar resonant cavity can be equivalent to a resonant cavity when the high-power laser module is connected in series with two rods in a symmetrical structure, and it is easy to match the high-power laser module connected in series with two rods. At the same time, the symmetrical parallel plane resonator has the advantages of large mode volume, small misalignment sensitivity, and the beam waist is located at the output mirror, which is convenient for fiber coupling output. Therefore, the parallel plane resonator is used for the high-power solid-state laser with two rods connected in series.
选择棒3间距和棒3与腔镜的间距,即棒间距为棒与腔镜的间距的2倍,使激光器工作在稳定区。因而,在较宽的泵浦功率范围内激光器都能稳定工作,输出功率随着泵浦功率的增加而稳定增加,有利于最大输出功率的获得。设计时应考虑到稳定工作区的边界,棒3间距的范围为平均热焦距f的1倍到2倍。The distance between the rods 3 and the distance between the rods 3 and the cavity mirror is selected, that is, the distance between the rods is twice the distance between the rods and the cavity mirror, so that the laser works in a stable region. Therefore, the laser can work stably in a wide range of pump power, and the output power increases steadily with the increase of pump power, which is beneficial to obtain the maximum output power. The boundary of the stable working area should be taken into consideration during design, and the distance between the rods 3 ranges from 1 to 2 times the average thermal focal length f.
选择两孔径相同的光阑4对称放置于两串接激光器棒的两端,使径向热焦距fr和切向热焦距fθ在临界点及附近匹配。由于激光器晶体的径向热焦距fr和切向热焦距fθ不同时通过临界点,因而就需要选择孔径大小为激光器棒直径0.85-0.95倍的光阑4使其在临界点和附近位置匹配。Two apertures 4 with the same aperture are chosen to be placed symmetrically at both ends of the two serially connected laser rods, so that the radial thermal focal length fr and the tangential thermal focal length fθ match at and near the critical point. Since the radial thermal focal length fr and the tangential thermal focal length fθ of the laser crystal do not pass through the critical point at the same time, it is necessary to select the diaphragm 4 with an aperture size of 0.85-0.95 times the diameter of the laser rod to match the critical point and its vicinity.
调整两棒串接激光器的径向匹配,即使串接激光器的两棒3的棒中心共轴。激光棒虽然可等效为正类透镜元件,但同时也是工作物质,大功率输出需要有大的工作模体积,当两串接激光器两棒的径向匹配时才能有大功率输出。The radial matching of the two rods connected in series is adjusted, even if the rod centers of the two rods 3 of the series connected lasers are coaxial. Although the laser rod can be equivalent to a positive lens element, it is also a working substance. High power output requires a large working mode volume. Only when the two rods of the two series connected lasers are radially matched can there be high power output.
综上所述,满足上面五点匹配方法,按照这五点来调整两个激光器模块的匹配,激光器的最大输出功率可达1100-1200W,光束质量为21-25mm·mrad,总体电光转换效率为3.8%-4.1%。To sum up, if the above five-point matching method is satisfied, the matching of the two laser modules is adjusted according to these five points. The maximum output power of the laser can reach 1100-1200W, the beam quality is 21-25mm·mrad, and the overall electro-optical conversion efficiency is 3.8%-4.1%.
附图说明:Description of drawings:
图1.激光器的原理结构图Figure 1. The schematic structure diagram of the laser
图2.电源泵浦功率与输出激光功率图Figure 2. Power supply pump power and output laser power diagram
图3.输出激光光束的功率密度进行测量图Figure 3. The power density of the output laser beam is measured
图中,1为全反镜,2为部分反射耦合输出镜,3为棒,4为光阑。In the figure, 1 is a total reflection mirror, 2 is a partial reflection coupling output mirror, 3 is a rod, and 4 is an aperture.
具体实施方式:Detailed ways:
下面结合附图对本实用新型的具体实施例加以说明:The specific embodiment of the utility model is described below in conjunction with accompanying drawing:
请参阅图1所示,为该激光器的原理结构。两棒串接激光器模块的参数为:激光晶体棒3即Nd:YAG棒的尺寸为φ9mm×155mm,泵浦灯为φ8mm×150mm的氪灯;聚光腔采用陶瓷漫反射体,陶瓷体表面镀釉。陶瓷体对增益介质吸收波段的反射率大于97%;激光腔采用全腔水冷,由双循环水冷系统提供冷却,温度为20℃(±1℃);本激光器实施时采用双灯泵浦,电源的最大泵浦功率为16kW。对单灯泵浦的激光器,本匹配方法同样适用。Please refer to Figure 1 for the principle structure of the laser. The parameters of the laser module connected in series by two rods are: the laser crystal rod 3, that is, the Nd:YAG rod, has a size of φ9mm×155mm, and the pump lamp is a krypton lamp of φ8mm×150mm; glaze. The reflectivity of the ceramic body to the absorption band of the gain medium is greater than 97%; the laser cavity adopts full-cavity water cooling, and the cooling is provided by a double-circulation water cooling system, and the temperature is 20°C (±1°C); the laser is implemented with double lamp pumping, and the power supply The maximum pump power is 16kW. This matching method is also applicable to lasers pumped by a single lamp.
对串接的两大功率激光器模块的热焦距进行测量,在最大泵浦功率为16kW时,其平均热焦距f为150mm,对应的径向热焦距fr和切向热焦距fθ分别为170mm(±2mm),130mm(±2mm)。The thermal focal length of the two power laser modules connected in series is measured. When the maximum pump power is 16kW, the average thermal focal length f is 150mm, and the corresponding radial thermal focal length fr and tangential thermal focal length fθ are respectively 170mm (± 2mm), 130mm (±2mm).
采用对称平行平面谐振腔结构,棒3间距为230mm,棒3的主面与腔镜的间距为115mm;腔镜由全反镜1和反射率为80%的部分反射耦合输出镜2组成;两棒3与腔镜的之间对称放置两光阑4,距离棒端面60mm,光阑4的孔径为8.5mm;两串接激光器模块的棒中心共轴。A symmetrical parallel plane resonant cavity structure is adopted, the distance between the rods 3 is 230mm, and the distance between the main surface of the rods 3 and the cavity mirror is 115mm; the cavity mirror is composed of a total reflection mirror 1 and a partial reflection coupling output mirror 2 with a reflectivity of 80%; Two diaphragms 4 are placed symmetrically between the rod 3 and the cavity mirror, the distance from the end face of the rod is 60 mm, and the aperture of the diaphragm 4 is 8.5 mm; the centers of the rods of the two serially connected laser modules are coaxial.
测量输出激光的功率,激光器的输出功率随泵浦功率近线性的增加,在30kW最大电源泵浦功率时,输出功率1176W,电源泵浦功率与输出激光功率如图2。采用大功率光束光斑质量诊断仪,对输出激光光束的功率密度进行测量,如图3。由于激光器输出激光的束腰在输出镜处,用透镜聚焦输出激光束,采用“套孔法”测量输出激光光束质量,即用大功率光束光斑质量诊断仪测量透镜聚焦束腰和焦距处包含激光光强86%的半径及相应距离,求得输出激光束的光束质量为23mm·mrad。测量在高光束质量条件下的最高输出功率和注入的电功率,求得激光器的总体电光转换效率为4%。Measure the power of the output laser. The output power of the laser increases nearly linearly with the pump power. When the maximum power pump power is 30kW, the output power is 1176W. The power pump power and output laser power are shown in Figure 2. Use a high-power beam spot quality diagnostic instrument to measure the power density of the output laser beam, as shown in Figure 3. Since the beam waist of the laser output laser is at the output mirror, the output laser beam is focused by the lens, and the output laser beam quality is measured by the "hole method", that is, the high-power beam spot quality diagnostic instrument is used to measure the laser beam at the focus beam waist and the focal length of the lens. The radius of the light intensity of 86% and the corresponding distance are obtained to obtain the beam quality of the output laser beam as 23mm·mrad. The highest output power and the injected electric power are measured under the condition of high beam quality, and the overall electro-optical conversion efficiency of the laser is found to be 4%.
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| CN102299474A (en) * | 2011-07-05 | 2011-12-28 | 北京工业大学 | Method for precisely aligning multi-rod serial connection solid laser crystal rods |
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| CN102299474A (en) * | 2011-07-05 | 2011-12-28 | 北京工业大学 | Method for precisely aligning multi-rod serial connection solid laser crystal rods |
| CN102299474B (en) * | 2011-07-05 | 2012-09-05 | 北京工业大学 | Method for precisely aligning multi-rod serial connection solid laser crystal rods |
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