CN212622818U - Temperature-rise-and-fall controllable resistivity measurement system - Google Patents
Temperature-rise-and-fall controllable resistivity measurement system Download PDFInfo
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- CN212622818U CN212622818U CN202021056927.4U CN202021056927U CN212622818U CN 212622818 U CN212622818 U CN 212622818U CN 202021056927 U CN202021056927 U CN 202021056927U CN 212622818 U CN212622818 U CN 212622818U
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- temperature
- sample table
- liquid nitrogen
- box body
- sample
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- 238000005259 measurement Methods 0.000 title claims abstract description 18
- 239000000523 sample Substances 0.000 claims abstract description 89
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 76
- 239000007788 liquid Substances 0.000 claims abstract description 38
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 38
- 238000010438 heat treatment Methods 0.000 claims abstract description 28
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052802 copper Inorganic materials 0.000 claims abstract description 13
- 239000010949 copper Substances 0.000 claims abstract description 13
- 238000009413 insulation Methods 0.000 claims description 2
- 238000001816 cooling Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000005034 decoration Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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Abstract
The utility model discloses a temperature rise and drop controllable resistivity measuring system, which comprises a measuring device and a temperature control system; the measuring device comprises a sealed box body, a sample table and a data acquisition unit; the sample table is provided with a high-temperature-resistant probe for measuring the sample voltage at the upper end of the sample table and a conductive copper block for supplying current to the sample; the high-temperature-resistant probe and the conductive copper block are respectively and electrically connected with the data acquisition unit; the temperature control system comprises a liquid nitrogen refrigerating assembly, a heating assembly, a temperature sensor and a temperature control unit; the liquid nitrogen refrigerating assembly comprises a liquid nitrogen storage container, a liquid nitrogen pipeline and a liquid nitrogen pump which are communicated; the temperature control unit is electrically connected with the liquid nitrogen pump, the temperature sensor and the heating power supply. The utility model has the advantages that: the temperature sensor is combined with the liquid nitrogen refrigerating assembly and the heating assembly to realize accurate control of the temperature of the sample table, the temperature rise and the temperature reduction are stable and controllable, and the stability of the resistivity measurement result is guaranteed.
Description
Technical Field
The utility model belongs to the technical field of resistivity measurement, especially, relate to a controllable resistivity measurement system of temperature rise and fall.
Background
The resistivity measurement of the existing film sample usually adopts a four-wire method, namely, a voltage value and a current value flowing through the sample are respectively measured to obtain a resistance value of the sample between probes, and the resistivity value of the sample material is calculated according to a resistivity formula in combination with parameters such as the cross section area of the sample, the distance between the probes and the like. In order to measure the resistivity of samples at different temperatures, a measuring device needs to be heated or cooled, but the conventional heating or cooling method has the defects of uncontrollable heating and cooling and poor heating and cooling control precision, so that the measuring result is unstable.
SUMMERY OF THE UTILITY MODEL
The utility model aims to overcome the resistivity measuring device among the prior art and go up and down temperature precision control poor, the unstable defect of measuring result provides a temperature control precision height, the controllable resistivity measurement system of the temperature rise and fall of measuring result temperature.
In order to achieve the purpose, the resistivity measuring system with controllable temperature rise and drop designed by the utility model comprises a measuring device and a temperature control system;
the measuring device comprises a sealed box body, a sample table arranged in the box body and a data acquisition unit electrically connected with the sample table; the sample table is provided with a high-temperature-resistant probe for measuring the voltage of a sample at the upper end of the sample table and a conductive copper block for supplying current to the sample; the high-temperature-resistant probe and the conductive copper block are respectively and electrically connected with the data acquisition unit;
the temperature control system comprises a liquid nitrogen refrigerating assembly, a heating assembly, a temperature sensor and a temperature control unit; the liquid nitrogen refrigerating assembly comprises a liquid nitrogen storage container, a liquid nitrogen pipeline and a liquid nitrogen pump which are communicated; the liquid nitrogen pipeline is at least partially arranged in the box body and is abutted against the sample table; the heating assembly comprises a heating rod which is arranged in the box body and is abutted against the sample table and a heating power supply which is electrically connected with the heating rod; the temperature sensor is arranged on the sample table and used for measuring the temperature of the sample table; the temperature control unit is electrically connected with the liquid nitrogen pump, the temperature sensor and the heating power supply.
Further, the measuring device further comprises an insulating plate; the insulation board is arranged between the sample platform and the conductive copper block.
Furthermore, the measuring device also comprises a sample table mounting plate and a sample table bracket; the sample table bracket is arranged at the lower end of the sample table so as to keep the distance between the sample table and the box body; the sample table mounting plate is connected with the box body, and the liquid nitrogen pipeline is connected with the sample table mounting plate; and an electrical connector is also arranged on the sample table mounting plate.
Further, the measuring device also comprises a vacuum device which is communicated with the box body through a vacuum tube and is used for keeping the box body in vacuum.
Furthermore, the upper end of the box body is also provided with a screw cap.
Furthermore, an observation window is arranged on the rotary cover.
The utility model has the advantages that: the temperature sensor is combined with the liquid nitrogen refrigerating assembly and the heating assembly to realize accurate control of the temperature of the sample table, the temperature rise and the temperature reduction are stable and controllable, and the stability of the resistivity measurement result is guaranteed.
Drawings
Fig. 1 is the utility model discloses a temperature rise and fall controllable resistivity measurement system's schematic structure diagram.
Fig. 2 is a partial perspective view of the measuring device of fig. 1.
Fig. 3 is a schematic structural diagram of a sample table in the box body in fig. 2.
Fig. 4 is a left side view of the structure of fig. 3.
In the figure, a box body 1, a sample table 2, a sample 3, a data acquisition unit 4, a conductive copper block 5, a high-temperature-resistant probe 6, a spiral cover 7, an observation window 8, an insulating plate 9, a sample table mounting plate 10, a sample table bracket 11, a liquid nitrogen refrigerating assembly 12, a heating assembly 13, a temperature sensor 14, a temperature control unit 15, a heating rod 16, a liquid nitrogen pipeline 17, a liquid nitrogen pump 18 and an electrical connector 19.
Detailed Description
The invention is described in further detail below with reference to the figures and the specific embodiments.
The resistivity measurement system with controllable temperature rise and drop shown in fig. 1-4 comprises a measurement device and a temperature control system;
the measuring device comprises a sealed box body 1, a sample table 2 arranged in the box body 1 and a data acquisition unit 4 electrically connected with the sample table 2; the sample table 2 is provided with a high-temperature-resistant probe 6 for measuring the voltage of a sample 3 at the upper end of the sample table 2 and a conductive copper block 5 for supplying current to the sample 3; the high-temperature-resistant probe 6 and the conductive copper block 5 are respectively and electrically connected with the data acquisition unit 4; the upper end of the box body 1 is also provided with a spiral cover 7. The screw cap 7 is provided with an observation window 8. The upper end screw cap 7 can be conveniently opened to take and place samples, and a quartz observation window 8 arranged on the screw cap 7 is used for observing the samples.
The measuring device also comprises an insulating plate 9, a sample table mounting plate 10, a sample table bracket 11 and a vacuum device which is communicated with the box body 1 through a vacuum tube and is used for keeping the vacuum in the box body 1; the insulating plate 9 is arranged between the sample platform 2 and the conductive copper block 5. The sample table bracket 11 is arranged at the lower end of the sample table 2 so as to keep the distance between the sample table 2 and the box body 1; the sample table mounting plate 10 is connected with the box body 1, and the liquid nitrogen pipeline 17 is connected with the sample table mounting plate 10; the sample table mounting plate 10 is also provided with an electrical connector 19. And a gold sheet for contacting with a sample is welded at the upper end of the copper block so as to ensure good conductive contact.
The temperature control system comprises a liquid nitrogen refrigerating assembly 12, a heating assembly 13, a temperature sensor 14 and a temperature control unit 15; the liquid nitrogen refrigerating assembly 12 comprises a liquid nitrogen storage container, a liquid nitrogen pipeline 17 and a liquid nitrogen pump 18 which are communicated with each other; at least part of the liquid nitrogen pipeline 17 is arranged in the box body 1 and is abutted with the sample table 2; the heating component 13 comprises a heating rod 16 which is arranged in the box body 1 and is abutted with the sample table 2 and a heating power supply which is electrically connected with the heating rod 16; the temperature sensor 14 is arranged on the sample table 2 and used for measuring the temperature of the sample table 2; the temperature control unit 15 is electrically connected with the liquid nitrogen pump 18, the temperature sensor 14 and the heating power supply.
The data acquisition unit 4 of the present embodiment comprises a KEITHLEY/gishili integrated digital multimeter, preferably of the type 2401. The temperature sensor 14 is preferably a platinum resistor or thermocouple temperature sensor 14 that provides temperature-varying data for the sample stage 2. The temperature control unit 15 regulates and controls the temperature reduction amplitude of the liquid nitrogen refrigeration component 12 and the temperature rise amplitude of the heating component 13 according to the target temperature and the real-time temperature detected by the temperature sensor 14, and specifically, the temperature reduction amplitude control is realized by controlling the opening amount of the liquid nitrogen pump 18.
The temperature rise and the temperature fall of the measuring system can be measured and controlled, and the resistivity parameter of the sample can be measured by temperature rise and temperature fall; due to controllable cooling, the waiting time required by measurement is shorter, the test effect is better, and the consumption of liquid nitrogen is less; the sample applicable to the measuring device of the embodiment is not limited to a film material, and can also be used for measuring a block material, so that the application range is wide; the measuring device is small in size and small in occupied space, and the resistivity of the material is measured by using a four-wire method, so that the influence of contact resistance is eliminated; the test result has high repeatability and good stability.
It is above only the utility model discloses a preferred embodiment, the utility model discloses a scope of protection does not only confine above-mentioned embodiment, the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that a person skilled in the art should also recognize that several modifications and decorations can be made without departing from the principle of the present invention, and the protection scope of the present invention is also covered.
Claims (6)
1. The utility model provides a controllable resistivity measurement system of temperature rise and fall which characterized in that: comprises a measuring device and a temperature control system;
the measuring device comprises a sealed box body, a sample table arranged in the box body and a data acquisition unit electrically connected with the sample table; the sample table is provided with a high-temperature-resistant probe for measuring the voltage of a sample at the upper end of the sample table and a conductive copper block for supplying current to the sample; the high-temperature-resistant probe and the conductive copper block are respectively and electrically connected with the data acquisition unit;
the temperature control system comprises a liquid nitrogen refrigerating assembly, a heating assembly, a temperature sensor and a temperature control unit; the liquid nitrogen refrigerating assembly comprises a liquid nitrogen storage container, a liquid nitrogen pipeline and a liquid nitrogen pump which are communicated; the liquid nitrogen pipeline is at least partially arranged in the box body and is abutted against the sample table; the heating assembly comprises a heating rod which is arranged in the box body and is abutted against the sample table and a heating power supply which is electrically connected with the heating rod; the temperature sensor is arranged on the sample table and used for measuring the temperature of the sample table; the temperature control unit is electrically connected with the liquid nitrogen pump, the temperature sensor and the heating power supply.
2. The system of claim 1, wherein the temperature of the resistivity measurement system is controlled by: the measuring device further comprises an insulating plate; the insulation board is arranged between the sample platform and the conductive copper block.
3. The system of claim 1, wherein the temperature of the resistivity measurement system is controlled by: the measuring device also comprises a sample table mounting plate and a sample table bracket; the sample table bracket is arranged at the lower end of the sample table so as to keep the distance between the sample table and the box body; the sample table mounting plate is connected with the box body, and the liquid nitrogen pipeline is connected with the sample table mounting plate; and an electrical connector is also arranged on the sample table mounting plate.
4. The system of claim 1, wherein the temperature of the resistivity measurement system is controlled by: the measuring device also comprises a vacuum device which is communicated with the box body through a vacuum tube and is used for keeping the box body in vacuum.
5. The system of claim 1, wherein the temperature of the resistivity measurement system is controlled by: the upper end of the box body is also provided with a spiral cover.
6. The system of claim 5, wherein the temperature of the resistivity measurement system is controlled by: and the rotary cover is provided with an observation window.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021056927.4U CN212622818U (en) | 2020-06-10 | 2020-06-10 | Temperature-rise-and-fall controllable resistivity measurement system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021056927.4U CN212622818U (en) | 2020-06-10 | 2020-06-10 | Temperature-rise-and-fall controllable resistivity measurement system |
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| Publication Number | Publication Date |
|---|---|
| CN212622818U true CN212622818U (en) | 2021-02-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021056927.4U Expired - Fee Related CN212622818U (en) | 2020-06-10 | 2020-06-10 | Temperature-rise-and-fall controllable resistivity measurement system |
Country Status (1)
| Country | Link |
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| CN (1) | CN212622818U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116593396A (en) * | 2023-04-25 | 2023-08-15 | 中国特种设备检测研究院 | A gas sample cell with continuously and uniformly adjustable temperature in a wide range |
| CN116661523A (en) * | 2023-06-06 | 2023-08-29 | 深圳市森美协尔科技有限公司 | Temperature control system and method applied to semiconductor probe station |
-
2020
- 2020-06-10 CN CN202021056927.4U patent/CN212622818U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116593396A (en) * | 2023-04-25 | 2023-08-15 | 中国特种设备检测研究院 | A gas sample cell with continuously and uniformly adjustable temperature in a wide range |
| CN116661523A (en) * | 2023-06-06 | 2023-08-29 | 深圳市森美协尔科技有限公司 | Temperature control system and method applied to semiconductor probe station |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210226 |