CN203932120U - A kind of OLED device and evaporation coating device thereof with electric conductive oxidation zinc-aluminium film - Google Patents
A kind of OLED device and evaporation coating device thereof with electric conductive oxidation zinc-aluminium film Download PDFInfo
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- CN203932120U CN203932120U CN201420319754.9U CN201420319754U CN203932120U CN 203932120 U CN203932120 U CN 203932120U CN 201420319754 U CN201420319754 U CN 201420319754U CN 203932120 U CN203932120 U CN 203932120U
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- zinc oxide
- aluminum thin
- oxide aluminum
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- 238000001704 evaporation Methods 0.000 title claims abstract description 43
- 230000008020 evaporation Effects 0.000 title claims abstract description 40
- 229910000611 Zinc aluminium Inorganic materials 0.000 title claims abstract description 20
- HXFVOUUOTHJFPX-UHFFFAOYSA-N alumane;zinc Chemical compound [AlH3].[Zn] HXFVOUUOTHJFPX-UHFFFAOYSA-N 0.000 title claims abstract description 20
- 230000003647 oxidation Effects 0.000 title claims abstract description 20
- 238000007254 oxidation reaction Methods 0.000 title claims abstract description 20
- 239000011248 coating agent Substances 0.000 title claims abstract description 12
- 238000000576 coating method Methods 0.000 title claims abstract description 12
- JYMITAMFTJDTAE-UHFFFAOYSA-N aluminum zinc oxygen(2-) Chemical compound [O-2].[Al+3].[Zn+2] JYMITAMFTJDTAE-UHFFFAOYSA-N 0.000 claims abstract description 46
- 239000000758 substrate Substances 0.000 claims abstract description 39
- 238000002347 injection Methods 0.000 claims abstract description 29
- 239000007924 injection Substances 0.000 claims abstract description 29
- 230000027756 respiratory electron transport chain Effects 0.000 claims abstract description 27
- 230000004888 barrier function Effects 0.000 claims abstract description 25
- 239000000463 material Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910001316 Ag alloy Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 150000004982 aromatic amines Chemical class 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000007850 fluorescent dye Substances 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 2
- SJCKRGFTWFGHGZ-UHFFFAOYSA-N magnesium silver Chemical compound [Mg].[Ag] SJCKRGFTWFGHGZ-UHFFFAOYSA-N 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- OMFXVFTZEKFJBZ-HJTSIMOOSA-N corticosterone Chemical compound O=C1CC[C@]2(C)[C@H]3[C@@H](O)C[C@](C)([C@H](CC4)C(=O)CO)[C@@H]4[C@@H]3CCC2=C1 OMFXVFTZEKFJBZ-HJTSIMOOSA-N 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
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- Electroluminescent Light Sources (AREA)
Abstract
The utility model relates to a kind of OLED device with electric conductive oxidation zinc-aluminium film, comprise metallic cathode layer, electron transfer layer, organic luminous layer, hole injection layer, translucent anode layer, substrate, anti-reflecting layer, zinc oxide aluminum thin layer one, zinc oxide aluminum thin layer two and barrier coat, it on substrate, is barrier coat, at least one deck zinc oxide aluminum thin layer two is set on barrier coat, it on zinc oxide aluminum thin layer two, is translucent anode layer, it on translucent anode layer, is hole injection layer, it on hole injection layer, is organic luminous layer, it on organic luminous layer, is electron transfer layer, it on electron transfer layer, is metallic cathode layer, at least one deck zinc oxide aluminum thin layer one is set on metallic cathode layer, it on zinc oxide aluminum thin layer one, is anti-reflecting layer, the utility model also relates to a kind of evaporation coating device of the OLED device with electric conductive oxidation zinc-aluminium film, that this product can be made into is ultra-thin, the bendable display of light weight, antidetonation.
Description
Technical field
The utility model belongs to electronic manufacturing field, relates to a kind of diode Display Technique, particularly a kind of OLED device and evaporation coating device thereof with electric conductive oxidation zinc-aluminium film.
Background technology
OLED is to be basic plane Display Technique of new generation taking Organic Electricity to luminescent material technology, and this technique functions comes from America and Europe, but the country of realizing extensive industrialization mainly concentrates on East Asia, as Japan, Korea S, China's Mainland and Taiwan etc.
Whole world OLED industry is also in the industrialization initial stage, the enterprise product that sets foot in OLED industry is mainly small size passive OLED device, really to LCD(liquid crystal) the active OLED device that constitutes a threat to, realize the several companies of only having of volume production, though China has certain OLED Industry Foundation, but industrial chain is not perfect, especially upstream product competitiveness is not strong.
Domestic OLED industry at present, because technology is immature, cause the yield of product low, cost is higher, therefore in price, temporarily cannot with Japan, Korea S and European enterprise form effective competition, and OLED product on the market, owing to having used rare metal in manufacturing process, and aspect industrialization process and OLED technological development, compare gap with area very far away with advanced country in the world, cause domestic OLED product price higher, and the display screen of making is in resolution, anti-seismic performance, low temperature resistant, the aspects such as luminous efficiency are also not as Japan, Korea S and European product.
Utility model content
Technical problem to be solved in the utility model is, for overcoming the shortcoming of prior art, a kind of OLED device and evaporation coating device thereof with electric conductive oxidation zinc-aluminium film is provided, that the display that the utility model is made has is ultra-thin, the feature of light weight, antidetonation, and not smear of motion picture, and low-temperature characteristics is good, technique is simple, with low cost, luminous efficiency is higher simultaneously, and can on the substrate of unlike material, manufacture, and makes the soft display that energy is bending.
In order to solve above technical problem, the utility model provides a kind of OLED device with electric conductive oxidation zinc-aluminium film, comprise metallic cathode layer, electron transfer layer, organic luminous layer, hole injection layer, translucent anode layer and substrate, also comprise anti-reflecting layer, zinc oxide aluminum thin layer one, zinc oxide aluminum thin layer two and barrier coat, it on substrate, is barrier coat, at least one deck zinc oxide aluminum thin layer two is set on barrier coat, it on zinc oxide aluminum thin layer two, is translucent anode layer, it on translucent anode layer, is hole injection layer, it on hole injection layer, is organic luminous layer, it on organic luminous layer, is electron transfer layer, it on electron transfer layer, is metallic cathode layer, at least one deck zinc oxide aluminum thin layer one is set on metallic cathode layer, it on zinc oxide aluminum thin layer one, is anti-reflecting layer.
The utility model also provides a kind of OLED device with electric conductive oxidation zinc-aluminium film, comprise anti-reflecting layer, zinc oxide aluminum thin layer one, metallic cathode layer, electron transfer layer, organic luminous layer, hole injection layer, zinc oxide aluminum thin layer two, barrier coat and substrate, it on substrate, is barrier coat, at least one deck zinc oxide aluminum thin layer two is set on barrier coat, it on zinc oxide aluminum thin layer two, is hole injection layer, it on hole injection layer, is organic luminous layer, it on organic luminous layer, is electron transfer layer, it on electron transfer layer, is metallic cathode layer, at least one deck zinc oxide aluminum thin layer one is set on metallic cathode layer, it on zinc oxide aluminum thin layer one, is anti-reflecting layer.
The utility model is selected zinc oxide aluminum film, can be located between translucent anode layer and barrier coat, also can replace tin indium oxide, be located between hole injection layer and barrier coat as anode layer, zinc oxide aluminum not only has not defeated in the photoelectric properties of tin indium oxide, and the reserves of zinc and aluminium are abundant, low price, and zinc oxide aluminum cost of manufacture is low, environmental protection, simultaneous oxidation zinc-aluminium stable chemical performance, not perishable under chemistry or wet environment.
The technical scheme that the utility model further limits is:
The utility model also provides a kind of evaporation coating device of the OLED device with electric conductive oxidation zinc-aluminium film, comprise substrate, vacuum chamber, evaporation material and vacuum pump, also comprise heating resistor and evaporation tank, evaporation tank is cube or the cylindrical structure of an opening, heating resistor is evenly distributed in the sidewall of other non-opening surfaces of evaporation tank, substrate is arranged at vacuum chamber top, and the substrate that is positioned at vacuum chamber upper middle position is parallel to vacuum chamber upper wall and arranges down, the substrate tilting that is positioned at vacuum chamber top edge position arranges downwards, evaporation material is contained in evaporation tank, vacuum chamber bottom at least arranges a vacuum pump.
The substrate of vacuum chamber top edge position and the angle of inclination A of horizontal direction are 5-45 degree.
The evaporation coating device that the utility model relates to, substrate in the setting of vacuum chamber upper middle position is parallel to vacuum chamber upper wall down, the substrate tilting that marginal position arranges is downward, make evaporation gas except directive vertical direction, the evaporation gas around spreading apart with umbrella also can make full use of, and has reduced to a certain extent waste; And in the time of design evaporation tank, at bottom and the wall of evaporation tank, heating resistor is all installed, has been improved the efficiency of heating surface of evaporation material, and be heated evenly.
The beneficial effects of the utility model are:
The display that device of the present utility model is made, thickness can be as small as 1mm, and weight is also lighter; Whole device is all solid state mechanism, there is no liquid substance, and anti-seismic performance is better, is not afraid of and falls; Do not have visible angle problem, even watch under very large visual angle, picture is still undistorted; Response time is short, and motion picture is smear not; Low-temperature characteristics is good, can normally show at 40 degrees below zero; Manufacturing process is simple, and cost is lower; Luminous efficiency is higher, and energy consumption is low; Can on the substrate of unlike material, manufacture, can make the soft display that energy is bending.
Brief description of the drawings
Fig. 1 is scheme one structural representation that the utlity model has the OLED device of electric conductive oxidation zinc-aluminium film;
Fig. 2 is scheme two structural representations that the utlity model has the OLED device of electric conductive oxidation zinc-aluminium film;
Fig. 3 is the structural representation that the utlity model has the evaporation coating device of the OLED device of electric conductive oxidation zinc-aluminium film;
Wherein, 1-anti-reflecting layer, 2-zinc oxide aluminum thin layer one, 3-metallic cathode layer, 4-electron transfer layer, 5-organic luminous layer, 6-hole injection layer, the translucent anode layer of 7-, 8-zinc oxide aluminum thin layer two, 9-barrier coat, 10-substrate, 11-substrate, 12-vacuum chamber, 13-evaporation gas, 14-heating resistor, 15-evaporation tank, 16-evaporation material, 17-vacuum pump.
Embodiment
By specific embodiment, the specific embodiment of the present invention is described in further detail below.
embodiment 1
The present embodiment provides a kind of OLED device with electric conductive oxidation zinc-aluminium film, structure as shown in Figure 1, comprise metallic cathode layer 3, electron transfer layer 4, organic luminous layer 5, hole injection layer 6, translucent anode layer 7 and substrate 10, also comprise anti-reflecting layer 1, zinc oxide aluminum thin layer 1, zinc oxide aluminum thin layer 28 and barrier coat 9, wherein, anti-reflecting layer 1 is amorphous silicon carbide alloy; Cathode layer 2 is magnesium silver alloy; Electron transfer layer 4 is fluorescent dye compound Znq; Organic luminous layer 5 is DPVB; Hole injection layer 6 is aromatic amine fluorescent compounds TPD; Anode layer 7 is indium tin oxide; Barrier coat 8 is noncrystalline silicon carbide; Substrate 9 is quartz base plate.
It on substrate 10, is barrier coat 9, one deck zinc oxide aluminum thin layer 28 is set on barrier coat 9, it on zinc oxide aluminum thin layer 28, is translucent anode layer 7, on translucent anode layer 7, it is hole injection layer 6, on hole injection layer 6, being organic luminous layer 5, is electron transfer layer 4 on organic luminous layer 5, is metallic cathode layer 3 on electron transfer layer 4, one deck zinc oxide aluminum thin layer 1 is set on metallic cathode layer 3, is anti-reflecting layer 1 on zinc oxide aluminum thin layer 1.
In the time that device is worked, translucent anode layer 7 and metallic cathode layer 3 are respectively as anode and the negative electrode of device, under certain direct voltage drive, electronics and hole are injected into electron transfer layer 4 and hole injection layer 6 from negative electrode and anode respectively, then, electronics and hole move to luminescent layer through electron transfer layer 4 and hole injection layer 6 respectively, and meet in luminescent layer, form exciton and light emitting molecule is excited, the latter sends visible ray through radiative relaxation.
embodiment 2
The present embodiment provides a kind of OLED device with electric conductive oxidation zinc-aluminium film, structure as shown in Figure 2, comprise anti-reflecting layer 1, zinc oxide aluminum thin layer 1, metallic cathode layer 3, electron transfer layer 4, organic luminous layer 5, hole injection layer 6, zinc oxide aluminum thin layer 28, barrier coat 9 and substrate 10, wherein, anti-reflecting layer 1 is amorphous silicon carbide alloy; Cathode layer 2 is magnesium silver alloy; Electron transfer layer 4 is fluorescent dye compd B BOT; Organic luminous layer 5 is DPVB; Hole injection layer 6 is aromatic amine fluorescent compounds Alq; Anode layer 7 is indium tin oxide; Barrier coat 8 is silicon dioxide; Substrate 9 is glass substrate.
It on substrate 10, is barrier coat 9, one deck zinc oxide aluminum thin layer 28 is set on barrier coat 9, it on zinc oxide aluminum thin layer 28, is hole injection layer 6, it on hole injection layer 6, is organic luminous layer 5, it on organic luminous layer 5, is electron transfer layer 4, on electron transfer layer 4, being metallic cathode layer 3, one deck zinc oxide aluminum thin layer 1 is set on metallic cathode layer 3, is anti-reflecting layer 1 on zinc oxide aluminum thin layer 1.
In the time that device is worked, zinc oxide aluminum thin layer 28 and metallic cathode layer 3 are respectively as anode and the negative electrode of device, under certain direct voltage drive, electronics and hole are injected into electron transfer layer 4 and hole injection layer 6 from negative electrode and anode respectively, then, electronics and hole move to luminescent layer through electron transfer layer 4 and hole injection layer 6 respectively, and meet in luminescent layer, form exciton and light emitting molecule is excited, the latter sends visible ray through radiative relaxation.
embodiment 3
The present embodiment provide a kind of OLED device with electric conductive oxidation zinc-aluminium film evaporation coating device, structure as shown in Figure 3, comprise substrate 11, vacuum chamber 12, evaporation gas 13, heating resistor 14, evaporation tank 15, evaporation material 16 and vacuum pump 17, evaporation tank 15 is cube or the cylindrical structure of an opening, heating resistor 14 is evenly distributed in the sidewall of other non-opening surfaces of evaporation tank 15, substrate 11 is arranged at vacuum chamber 12 tops, and the substrate 11 that is positioned at vacuum chamber 12 upper middle position is parallel to vacuum chamber 12 upper walls and arranges down, the substrate 11 that is positioned at vacuum chamber 12 top edge positions is tilted to lower setting, evaporation material 16 is contained in evaporation tank 15, vacuum chamber 12 bottoms arrange a vacuum pump 17.
The substrate 11 that is positioned at vacuum chamber 12 top edge positions is 25 degree with the angle of inclination A of horizontal direction.
In the time that evaporation coating device is worked, first vacuum pump 17 is first extracted the air in vacuum chamber 12 out, then connect the power supply of heating resistor 14, heating resistor 14 generates heat, evaporation material 16 in evaporation tank 15 is heated to high temperature, evaporation material 16 becomes in the chamber of evaporation gas 13 directive vacuum chambers 12, and is attached on substrate 11.
Above embodiment is only explanation technological thought of the present utility model; can not limit protection range of the present utility model with this; every technological thought according to the utility model proposes, any change of doing on technical scheme basis, within all falling into the utility model protection range.
Claims (4)
1. one kind has the OLED device of electric conductive oxidation zinc-aluminium film, comprise metallic cathode layer (3), electron transfer layer (4), organic luminous layer (5), hole injection layer (6), translucent anode layer (7) and substrate (10), it is characterized in that, also comprise anti-reflecting layer (1), zinc oxide aluminum thin layer one (2), zinc oxide aluminum thin layer two (8) and barrier coat (9), described substrate (10) is upper is barrier coat (9), at least one deck zinc oxide aluminum thin layer two (8) is set on barrier coat (9), zinc oxide aluminum thin layer two (8) is upper is translucent anode layer (7), translucent anode layer (7) is upper is hole injection layer (6), hole injection layer (6) is upper is organic luminous layer (5), organic luminous layer (5) is upper is electron transfer layer (4), electron transfer layer (4) is upper is metallic cathode layer (3), at least one deck zinc oxide aluminum thin layer one (2) is set on metallic cathode layer (3), zinc oxide aluminum thin layer one (2) is upper is anti-reflecting layer (1).
2. the OLED device with electric conductive oxidation zinc-aluminium film according to claim 1, it is characterized in that, comprise anti-reflecting layer (1), zinc oxide aluminum thin layer one (2), metallic cathode layer (3), electron transfer layer (4), organic luminous layer (5), hole injection layer (6), zinc oxide aluminum thin layer two (8), barrier coat (9) and substrate (10), described substrate (10) is upper is barrier coat (9), at least one deck zinc oxide aluminum thin layer two (8) is set on barrier coat (9), zinc oxide aluminum thin layer two (8) is upper is hole injection layer (6), hole injection layer (6) is upper is organic luminous layer (5), organic luminous layer (5) is upper is electron transfer layer (4), electron transfer layer (4) is upper is metallic cathode layer (3), at least one deck zinc oxide aluminum thin layer one (2) is set on metallic cathode layer (3), zinc oxide aluminum thin layer one (2) is upper is anti-reflecting layer (1).
3. the evaporation coating device of the OLED device with electric conductive oxidation zinc-aluminium film based on described in claim 1 or 2, comprise substrate (11), vacuum chamber (12), evaporation material (16) and vacuum pump (17), it is characterized in that, also comprise heating resistor (14) and evaporation tank (15), described evaporation tank (15) is cube or the cylindrical structure of an opening, described heating resistor (14) is evenly distributed in the sidewall of other non-opening surfaces of described evaporation tank (15), described substrate (11) is arranged at vacuum chamber (12) top, and the substrate (11) that is positioned at vacuum chamber (12) upper middle position is parallel to vacuum chamber (12) upper wall and arranges down, the substrate (11) that is positioned at vacuum chamber (12) top edge position is tilted to lower setting, evaporation material (16) is contained in evaporation tank (15), described vacuum chamber (12) bottom at least arranges a vacuum pump (17).
4. the evaporation coating device of the OLED device with electric conductive oxidation zinc-aluminium film according to claim 3, it is characterized in that, described in be positioned at the substrate (11) of vacuum chamber (12) top edge position and the angle of inclination A of horizontal direction is 5-45 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420319754.9U CN203932120U (en) | 2014-06-16 | 2014-06-16 | A kind of OLED device and evaporation coating device thereof with electric conductive oxidation zinc-aluminium film |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420319754.9U CN203932120U (en) | 2014-06-16 | 2014-06-16 | A kind of OLED device and evaporation coating device thereof with electric conductive oxidation zinc-aluminium film |
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| Publication Number | Publication Date |
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| CN203932120U true CN203932120U (en) | 2014-11-05 |
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| CN201420319754.9U Expired - Fee Related CN203932120U (en) | 2014-06-16 | 2014-06-16 | A kind of OLED device and evaporation coating device thereof with electric conductive oxidation zinc-aluminium film |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106910844A (en) * | 2015-12-22 | 2017-06-30 | 昆山工研院新型平板显示技术中心有限公司 | The evaporation coating method of TFT substrate |
| CN109695028A (en) * | 2017-10-20 | 2019-04-30 | Tcl集团股份有限公司 | Zinc-oxide film and preparation method thereof, luminescent device |
-
2014
- 2014-06-16 CN CN201420319754.9U patent/CN203932120U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106910844A (en) * | 2015-12-22 | 2017-06-30 | 昆山工研院新型平板显示技术中心有限公司 | The evaporation coating method of TFT substrate |
| CN106910844B (en) * | 2015-12-22 | 2019-03-26 | 昆山工研院新型平板显示技术中心有限公司 | The evaporation coating method of TFT substrate |
| CN109695028A (en) * | 2017-10-20 | 2019-04-30 | Tcl集团股份有限公司 | Zinc-oxide film and preparation method thereof, luminescent device |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141105 Termination date: 20170616 |