CN203265914U - Large-breadth micropore high-speed hole-drilling system - Google Patents
Large-breadth micropore high-speed hole-drilling system Download PDFInfo
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- CN203265914U CN203265914U CN 201320098197 CN201320098197U CN203265914U CN 203265914 U CN203265914 U CN 203265914U CN 201320098197 CN201320098197 CN 201320098197 CN 201320098197 U CN201320098197 U CN 201320098197U CN 203265914 U CN203265914 U CN 203265914U
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Abstract
The utility model relates to a large-breadth micropore high-speed hole-drilling system, which comprises a light beam spatial modulation module and a galvanometer scanning f-theta module. Particularly, the light beam spatial modulation module is adopted, in particular the combination of a plurality of transparent flat plate optical elements and the galvanometer scanning f-theta module is adopted, the light beam spatial modulation module is used for carrying out spatial trajectory modulation on a laser light beam, the galvanometer scanning f-theta module is used for focusing the laser and enabling the focus of the laser to be shifted quickly among different processing positions, and the light beam spatial modulation module and the galvanometer scanning f-theta module have different responsibilities and are cooperated with each other. According to the scheme, large-breadth micropore drilling can be carried out, the laser hole-drilling efficiency and the hole-drilling quality can be greatly improved, the hole-drilling system is very suitable for drilling straight holes, the laser light beam filling scanning shape and size can be dynamically controlled, the size of an aperture of a drilled micropore can be dynamically changed, and the hole-drilling system has flexible processing capability for tiny structures.
Description
Technical field
The utility model relates to field of laser processing, relates in particular to a kind of large format micropore high speed drilling system device.
Background technology
The laser drill field, laser spot is switched between hole and hole, and vibration mirror scanning is the fastest switching mode undoubtedly, shows high acceleration and deceleration and displacement line speed, and locating speed.The two-dimension displacement platform is very slow a kind of mode beyond doubt, has generally seldom adopted.
Application number is 201010183539.7 patent, and the Beam rotation module that adopts cannot dynamically change the Beam rotation diameter in process, is only suitable for using in the situation of the less variation of same work piece surface boring aperture.Therefore certain limitation is arranged.
application number is 200380110303.9 patent, the switching that galvanometer is used for laser spot is no problem, but, the light beam circumference modulation movement of galvanometer front is to use the reflecting optics mode, reflection modulation laser moves in a circle, its shortcoming is that laser is to do taper to rotatablely move, particularly the arrangement of mirrors more than 2 and 2 uses, and when the reflecting optics spacing is slightly large, laser beam is reflected to reflect, the very bad control of laser beam modulation track, bad control when carrying out retrofit, this mode is undesirable to the small-bore high-speed, high precision boring below 100 microns, and because speculum is the space circle taper to the reflective scan track of light beam, the aperture that bores is reverse taper hole, this hole shape should be avoided in practice.
The utility model content
Technical problem to be solved in the utility model is to provide a kind of large format, high-speed, high precision and can dynamically changes the laser scanning filling or the micropore high speed drilling system that can carry out fine structure processing of laser ring cutting shape and size.
The technical scheme that the utility model solves the problems of the technologies described above is as follows: a kind of large format micropore high speed drilling system, comprise light beam spatial modulation module and vibration mirror scanning flat field focus module, described light beam spatial modulation module comprises one or more transparent optical element, each described transparent optical element is arranged on a drive unit corresponding with it, and each described transparent optical element all can independently swing under the driving of the drive unit corresponding with it and/or the drive unit of translation.
Described light beam spatial modulation module is used for incoming laser beam is carried out the space motion path modulation, forms according to the first light beam of setting orbiting motion, and this first beam emissions is arrived described vibration mirror scanning flat field focus module.
Described vibration mirror scanning flat field focus module, be positioned at a side of described light beam spatial modulation module output the first light beam, be used for receiving from described light beam spatial modulation module output the first light beam, and the first light beam is focused on, forming focused beam, and the laser spot of controlling described focused beam is switched between different machining cells or at a machining cell place, synkinesia is carried out in the laser spot scanning motion of described focused beam and controlled.
Described scanning flat field focus lamp comprises common flat field scanning mirror and telecentric scanning focus lamp.
Further, described transparent optical element is the transparent plate optical element, described transparent plate optical element can swing under the drive of the drive unit corresponding with it, and realize the variable angle of surface normal and incoming laser beam by the swing of described transparent plate optical element, adjust the shift offset of incoming laser beam and outgoing laser beam, control the spacescan track of laser beam.The scope of the incident angle α that forms between the surface normal of transparent plate optical element and its incoming laser beam is extremely positive 45 degree of negative 45 degree.
Further, the surface of described transparent plate optical element is coated with anti-reflection film.The surface process grinding and polishing of described transparent plate optical element, and be coated with anti-reflection film, preferably plate the anti-reflection film of wide angle of incidence.
Further, described transparent optical element is the transparent prism optical element, described transparent prism optical element can swing and/or translation under the drive of the drive unit corresponding with it, and the shift offset of adjusting incoming laser beam and outgoing laser beam by swing and/or the translation of transparent prism, and control the spacescan track of light beam.Scanning galvanometer is controlled the high speed of laser spot between different machining cells and is switched, or scanning galvanometer is controlled laser spot and the laser beam of having been modulated by the transparent prism optical element carried out the modulation of auxiliary space track while scan a machining cell inside.
Further, described transparent optical element material is ordinary optical glass or quartz glass or sapphire.
Further, described drive unit is motor, and described transparent optical element is arranged on described electric machine main shaft.
Perhaps, described drive unit is electrostriction element, and described transparent optical element is arranged on electrostriction element, and it is flexible that electrostriction element issues the growth degree at DC Electric Field, drives described transparent optical element and swings or translation.
Further, described electrostriction element is piezoelectric ceramics.
Further, described light beam spatial modulation module comprises the transparent optical element more than three or three, and for the laser beam that sees through, transparent optical element is connected, and namely a plurality of transparent optical elements are arranged in order along the laser beam transmission direction.The beam motion track will be the motion biosynthesis locus that numerous transparent optical elements are controlled beam motion, and laser is filled scanning machining characteristic infinite approach flat-top laser beam processing effect.
further, described vibration mirror scanning flat field focus module comprises scanning galvanometer and scanning flat field focus lamp, described scanning galvanometer comprises the first speculum and the second speculum, described the first speculum is arranged on the main shaft of the first motor, described the second speculum is arranged on the main shaft of the second motor, described the first electric machine main shaft is mutually vertical with described the second electric machine main shaft, described the first speculum is used for receiving and reflecting the first light beam that launches from described light beam spatial modulation module, be transmitted to the first folded light beam of described the second speculum with formation, described the second speculum receives and reflects described the first folded light beam, be transmitted into the second folded light beam of described scanning flat field focus lamp with formation, described scanning flat field focus lamp is used for focusing on this second folded light beam, be transmitted into the focused beam of work surface with formation.
Further, described drive unit is a plurality of electrostriction elements, described transparent optical element is arranged on described a plurality of electrostriction element, and it is flexible that electrostriction element issues the growth degree at DC Electric Field, drives described transparent optical element and swings and/or translation.Take the electrostriction element piezoelectric ceramics as example, utilize three blocks of piezoelectric ceramics to form the piezoelectric ceramics telescope support, the transparent plate optical element be can control and two dimension angular deflection and one dimension displacement stretching motion done.Described combining structure or support be a plurality of electrostriction elements side by side or the structure that rearranges of arranged in series or connection in series-parallel.
Transparent optical element can be the transparent plate optical element, and its quantity is in two or more situation.If the drive unit of transparent plate optical element is electrostriction element, electrostriction element can drive transparent optical element and do one dimension or multi-dimensional movement under External Electrical Field, a planar optics element can be realized hyperspace motion (deflection and translation) with a plurality of electrostriction elements; If the drive unit of transparent plate optical element is electric machine main shaft, between adjacent electric machine main shaft, spatial vertical is placed, and is namely mutually vertical between adjacent electric machine main shaft, and electric machine main shaft is perpendicular to the incident laser light beam.The transparent plate optical element arranges according to the laser beam series connection that is through, and namely a plurality of transparent plate optical elements are arranged in order along the laser beam transmission direction.Surface normal by described planar optics element and the angle of its incident beam are adjusted the shift offset of its incoming laser beam and its outgoing laser beam, control the spacescan track of laser beam.Scanning galvanometer is controlled the high speed of laser spot between different machining cells and is switched, or scanning galvanometer is controlled laser spot and the laser beam of having been modulated by the planar optics element carried out the modulation of auxiliary space track while scan a machining cell inside.
Transparent optical element is the transparent prism optical element, and its quantity is in two or more situation.If the drive unit of transparent prism optical element is electrostriction element, electrostriction element can drive transparent optical element and do one dimension or multi-dimensional movement under External Electrical Field; If the drive unit of transparent prism optical element is electric machine main shaft, between adjacent electric machine main shaft, spatial vertical is placed, i.e. vertical placement mutually between adjacent electric machine main shaft, and electric machine main shaft is perpendicular to the incident laser light beam.The transparent prism optical element arranges according to the laser beam series connection that is through, and namely a plurality of transparent prism optical elements are arranged in order along the laser beam transmission direction.Surface normal by described transparent prism optical element and the angle of its incident beam are adjusted the shift offset of its incoming laser beam and its outgoing laser beam, control the spacescan track of laser beam.Scanning galvanometer is controlled the high speed of laser spot between different machining cells and is switched, or scanning galvanometer is controlled laser spot and the laser beam of having been modulated by the transparent prism optical element carried out the modulation of auxiliary space track while scan a machining cell inside.
Incident laser is injected the scanning galvanometer in vibration mirror scanning flat field focus module after carrying out the spacescan track modulation through light beam spatial modulation module directly or indirectly, then focuses on the workpiece to be processed surface through the scanning focused mirror of flat field.The switching of laser spot between the surface of the work machining cell completed by scanning galvanometer, and in the machining cell handoff procedure, laser is in off state.When laser spot when a machining cell carries out capillary processing or miniature laser marking or other Laser Processing, scanning galvanometer is failure to actuate, the control of laser spot track while scan is completed by the described transparent optical element wobble modulations of series, and this moment, laser was light state.If this moment, scanning galvanometer was also done the spatial movement assisted modulation to laser, can further enrich the laser spot movement locus, complete more complicated Laser Micro-Machining action.
The purpose of this utility model is to use light beam spatial modulation module, particularly a plurality of transparent plate optical elements carry out high accuracy, the flexible scanning modulation of space tracking at high speed to incoming laser beam, coordinate vibration mirror scanning flat field focus module to high-speed displacement switching capability and the large format sector scanning focusing power of laser beam, reach dynamic control laser scanning and fill the size and shape of milling blind hole blind slot or ring cutting micropore, possess simultaneously large format, at a high speed, the purpose of high-quality working ability.
If described light beam spatial modulation module contains the transparent optical element more than three or three, particularly during the transparent plate optical element, use particularly transparent plate optical element suitable swing or the translation of these transparent optical elements of software control, will form very complicated high-speed and high-efficiency and fill uniformly the scanning effect, be very suitable for the applications such as laser milling, blind hole boring.
The operation principle of a kind of large format micropore of the utility model high speed drilling system is as follows: incoming laser beam is through after transparent optical element, and due to the refraction action of transparent optical element, outgoing laser beam will produce spatial deflection and translation with respect to incoming laser beam.Because of the difference of transparent optical element, outgoing laser beam can produce the situations such as translation, deflection.Light beam spatial modulation module comprises one or more than one transparent optical element; The swing of each transparent optical element is controlled by corresponding separately drive unit, cause each transparent optical element independently to swing, so transmitted light outgoing track is also thereupon modulated.Laser is injected scanning galvanometer after carrying out the spacescan track modulation through light beam spatial modulation module directly or indirectly, then focuses on the workpiece to be processed surface through the scanning focused mirror of flat field.The switching of laser spot between two machining cells of surface of the work completed by scanning galvanometer, and in machining cell switching position process, laser is in off state.When a machining cell carried out capillary processing or miniature laser marking, scanning galvanometer was failure to actuate when laser spot, and the laser spot track while scan is completed by described light beam spatial modulation module wobble modulations, and this moment, laser was light state.In Laser output processing, in case of necessity, can control simultaneously motion and the scanning galvanometer sub-scanning of each transparent optical element by software, can further enrich the laser spot track while scan, complete more complicated Laser Processing action.
For the sweep limits of light beam spatial modulation module, in this area, scanning area surpasses the large format that is commonly referred to of 5 millimeters * 5 millimeters scopes; Boring aperture is at the micropore that is commonly referred to below 300 microns.
Use the technical solution of the utility model, compared with prior art, have following advantage and good effect:
(1) the utility model proposes the Combination application that adopts light beam spatial modulation module and vibration mirror scanning flat field focus module, light beam spatial modulation module is carried out space dynamic trajectory modulation to laser beam, scanning galvanometer switches fast to laser spot, Division and Cooperations both, compare simple vibration mirror scanning flat field focus module, laser drill efficient and drilling quality that this programme significantly improves.
(2) the utility model proposes the Combination application that adopts light beam spatial modulation module and vibration mirror scanning flat field focus module, compare the scheme that simple light beam spatial modulation module directly focuses on after completing the laser beam space track modulation, this programme has significantly improved the scanning machining breadth of microwell array.Its reason is, simple employing light beam spatial modulation module particularly a plurality of planar optics elements is carried out the space dynamic modulation to laser beam, directly focus on and the array hole scanning machining, its scanning breadth is very limited, owing to introducing vibration mirror scanning flat field focus module, directly realize the scanning machining of microwell array on a large scale.
(3) the utility model proposes the Combination application that adopts light beam spatial modulation module and vibration mirror scanning flat field focus module, scanning galvanometer also can also carry out the spatial modulation of laser beam when light beam spatial modulation module spatial modulation laser beam carries out Laser Processing, further enrich the motion of laser beam space track modulation, realized more complicated laser processing mode.
(4) the utility model proposes the Combination application that adopts light beam spatial modulation module and vibration mirror scanning flat field focus module, if transparent optical element is the transparent plate optical element, incoming laser beam and outgoing laser beam are the space parallel position relationships in theory, its parallel distance changes relevant with thickness, refractive index and the incoming laser beam incident angle of transparent plate optical element, its translational beam motion precision is very high, this series connection for a plurality of transparent plate optical elements provides extraordinary condition, is very beneficial for the space high-speed, high precision modulation of laser beam.
(5) the utility model proposes the Combination application that adopts light beam spatial modulation module and vibration mirror scanning flat field focus module, contrast Beam rotation module adds vibration mirror scanning and focuses on assembled scheme, the track dynamically changeable is filled in the size and shape of this programme scanning patter and laser scanning, processing flexibility increases greatly, and this is more to need in actual processed and applied.
(6) the utility model proposes the Combination application that adopts light beam spatial modulation module and vibration mirror scanning flat field focus module, the patent of contrast 200380110303.9, what this programme was processed is straight hole, and machining accuracy is higher, and the processing straight hole is maximum requirement in reality processing, can certainly be designed to taper hole, therefore this programme flexibility flexibility is larger, the processing straight hole more meets market demand, and the transmissive optical element arranged in series takes up space very compactly, is conducive to the dustproof processing of optical mirror slip.
(7) the utility model proposes the Combination application that adopts light beam spatial modulation module and vibration mirror scanning flat field focus module, when described light beam spatial modulation module comprises at least three transparent optical elements, can form complicated laser scanning and fill track, the shape and size of its Laser Processing figure can dynamically change, and are very suitable for the processing of laser milling and laser blind hole.
(8) the utility model proposes the Combination application that adopts light beam spatial modulation module and vibration mirror scanning flat field focus module, if transparent optical element is the transparent prism optical element, and driving element is particularly Piezoelectric Ceramic of electrostriction element, transparent prism optical element kinematic accuracy and acceleration of motion will be very high so, its translational beam motion precision and acceleration will be very high, are very beneficial for the space high-speed, high precision modulation of laser beam.
Description of drawings
Fig. 1 is the apparatus structure schematic diagram of embodiment 1 stainless sheet steel laser drill;
Fig. 2 is the apparatus structure schematic diagram of embodiment 2 ceramic laser borings.
The specific embodiment
Below in conjunction with accompanying drawing, principle of the present utility model and feature are described, example only is used for explaining the utility model, is not be used to limiting scope of the present utility model.
Describe the utility model in detail below in conjunction with accompanying drawing and specific embodiment, be used for explaining the utility model in this illustrative examples of the present utility model and explanation, but not as to restriction of the present utility model.
Embodiment 1:
Fig. 1 is the apparatus structure schematic diagram of stainless sheet steel laser drill, and this device comprises light beam spatial modulation module and vibration mirror scanning flat field focus module.Wherein light beam spatial modulation module comprises the first quartzy plate glass 12 and the second quartzy plate glass 17, the described first quartzy plate glass 12 is arranged on the electric machine main shaft 13 of the first motor (not shown), and the described second quartzy plate glass 17 is arranged on the electric machine main shaft 16 of the second motor 15.The first quartzy plate glass 12 and the second quartzy plate glass 17 can swing around electric machine main shaft.Vibration mirror scanning flat field focus module comprises scanning galvanometer and scanning flat field focus lamp.Described scanning flat field focus lamp is heart focus lamp 116 far away, described scanning galvanometer comprises the first reflecting optics 112, the second reflecting optics 110, described the first reflecting optics 112 is arranged on the electric machine main shaft 113 of the first scanning galvanometer motor 114, and described the second reflecting optics 110 is arranged on the electric machine main shaft 19 of the second scanning galvanometer motor (not shown).
as shown in Figure 1: the light path flow process in the apparatus structure of whole stainless sheet steel laser drill is as follows: incoming laser beam 11 obtains first refractive light beam 14 after the first quartzy plate glass 12, described first refractive light beam 14 obtains the first light beam 18 through the second quartzy plate glass 17, described the first light beam 18 obtains the first folded light beam 111 through the first reflecting optics 112 of scanning galvanometer, described the first folded light beam 111 obtains the second folded light beam 115 through the second reflecting optics 110 of scanning galvanometer, described the second folded light beam 115 focuses on through heart focus lamp 116 far away, obtain focused beam 117, described focused beam 117 directly acts on workpiece to be processed 118.
Described workpiece to be processed 118 is 0.2 millimeter thickness stainless sheet steel.
The focal length of the camera lens of described heart focus lamp 116 far away is 100 millimeters, 50 millimeters * 50 millimeters of flat field focusing ranges.
Described focused beam 117(laser) relevant parameter is as follows: optical maser wavelength 532 nanometers, beam quality factor are less than 1.1, and hot spot circularity is greater than 90 percent, 30 watts of mean powers, single mode, pulse recurrence frequency 100 KHzs.
Described incident laser light beam 11 is the incident beam-expanding collimation light beam of 5 millimeters for diameter, wavelength 532 nanometers, and incident laser light beam 11 calculates by 1 with first refractive light beam 14 place air refractions.
The refractive index of the described first quartzy plate glass 12 is 1.45,3 millimeters of thickness, the 532nm anti-reflection film is all plated on its two sides, can be around rotating shaft 13 rotations perpendicular to the first quartzy plate glass 12 of paper, making the normal of the described first quartzy plate glass 12 and the angle [alpha] of incoming laser beam 11 is that 0～10 degree changes, and makes first refractive light beam 14 obtain 0～0.86 millimeter variation of corresponding shift offset with respect to described incoming laser beam 11.
The described second quartzy plate glass 17 is identical with the first quartzy plate glass 12, but the second quartzy plate glass 17 swinging axles (electric machine main shaft 16 of the second motor 15) are placed with swinging axle (electric machine main shaft 13 of the first motor) spatial vertical of the first quartzy plate glass 12, and the electric machine main shaft 13 of the electric machine main shaft 16 of the first motor 15 and the first motor is all perpendicular to incoming laser beam 11.Above-mentioned spatial vertical namely refers between two adjacent electric machine main shafts mutually vertical.Described electric machine main shaft 16 is controlled the described second quartzy plate glass 17, make the angle [alpha] of the described second quartzy plate glass 17 normals and described first refractive light beam 14 change between 0～10 degree scope, make from the first light beam 18 of the described second quartzy plate glass 17 outputs and obtain corresponding displacement with respect to described first refractive light beam 14, side-play amount changes between 0～0.86 millimeter scope.
The oscillating motion of the second quartzy plate glass 17 and the first quartzy plate glass 12 has directly determined the movement locus of described the first light beam 18, and the range of movement of the present embodiment the first light beam 18 is the square region of 0.86 millimeter * 0.86 millimeter.
The first reflecting optics 112 in vibration mirror scanning flat field focus module matches with the second reflecting optics 110, every completion of processing hole, just Focal Point Shift to next machining cell, in machining cell switching position process, laser is black out.When described the first reflecting optics 112 and the second reflecting optics 110 lock motionless again, this moment Laser output, motion control the first light beam 18 by the second quartzy plate glass 17 and the first quartzy plate glass 12 repeats picture circular motion, 180 microns of circle diameters.Described focused beam 117 can get out 200 micron diameter through holes (20 microns of focus spot diameters) on the relevant position, by this method, can get out needed via-hole array on described workpiece to be processed 118.The focal length of the camera lens of described heart focus lamp 116 far away is 100 millimeters, and 50 millimeters * 50 millimeters square region of the scanning focused scope of flat field realize the large-area scanning range of work.If change the focal length of the scanning focused mirror of flat field, can realize the large area scanning processing of 1 meter * 1 meter.For the sweep limits of light beam spatial modulation module, in this area, scanning area surpasses the large tracts of land that is commonly referred to of 5 millimeters * 5 millimeters.
In fact pass through good wide region incidence angle anti-reflection film coating technique, can be so that the angle [alpha] between the normal of the first quartzy plate glass 12 and incoming laser beam 11 changes between positive and negative 15 degree scopes; The angle [alpha] of the second quartzy plate glass 17 normals and described first refractive light beam 14 changes between positive and negative 15 degree scopes, can also can strengthen sweep limits to a certain extent when guaranteeing precision like this.
The range of work of described heart focus lamp 116 far away is still limited after all, if the processing breadth is large not enough, in fact can also be placed in described workpiece to be processed 118 on mobile platform, can realize large-scale Laser Processing like this.
Embodiment 2:
Fig. 2 is the apparatus structure schematic diagram of ceramic laser boring, and as shown in Figure 2, the present embodiment is to increase two planar optics elements again and be used for controlling two motors that the planar optics element swings on the basis of embodiment 1.This device comprises light beam spatial modulation module and vibration mirror scanning flat field focus module.Wherein light beam spatial modulation module comprises the first quartzy plate glass 22, the second quartzy plate glass 27, the 3rd quartzy plate glass 29 and the 4th quartzy plate glass 214, the described first quartzy plate glass 22 is arranged on the first swinging axle 23, can swing around the first swinging axle 23, described the first swinging axle 23 is the electric machine main shaft of the first motor (not shown).The described second quartzy plate glass 27 is arranged on the second swinging axle 26, can swing around the second swinging axle 26, and described the second swinging axle 26 is the electric machine main shaft of the second motor 25.The described the 3rd quartzy plate glass 29 is arranged on the 3rd swinging axle 210, can swing around the 3rd swinging axle 210, and described the 3rd swinging axle 210 is the electric machine main shaft of the 3rd motor (not shown).The described the 4th quartzy plate glass 214 is arranged on the 4th swinging axle 213, can swing around the 4th swinging axle 213, and described the 4th swinging axle 213 is the electric machine main shaft of the 4th motor 212.
Vibration mirror scanning flat field focus module comprises scanning galvanometer and scanning flat field focus lamp.Described scanning flat field focus lamp is heart focus lamp 223 far away, described scanning galvanometer comprises the first reflecting optics 221, the second reflecting optics 227, described the first reflecting optics 221 is arranged on the electric machine main shaft 219 of the first scanning galvanometer motor 220, and described the second reflecting optics 217 is arranged on the electric machine main shaft 216 of the second scanning galvanometer motor (not shown).
light path flow process in the apparatus structure of ceramic laser boring is as follows: initial incoming laser beam 21 obtains first refractive light beam 24 through the first dull and stereotyped quartz glass 22, first refractive light beam 24 obtains the second deflecting light beams 28 through the second dull and stereotyped quartz glass 27 again, described the second deflecting light beams obtains third reflect light beam 211 through the 3rd dull and stereotyped quartz glass 29, described third reflect light beam 211 obtains the first light beam 215 through Siping City's flag English glass 214, described the first light beam 215 obtains the first folded light beam 218 through the first reflecting optics 221 of scanning galvanometer, described the first folded light beam 218 obtains the second folded light beam 222 through the second reflecting optics 217 of scanning galvanometer, described the second folded light beam 222 obtains focused beam 224 through heart focus lamp 223 far away, described focused beam 224 directly acts on workpiece to be processed 225.
Described workpiece to be processed 225 is 0.3 millimeter thickness alumina ceramic plate.
Described initial incoming laser beam 21 is incident beam-expanding collimation light beam, 5 millimeters of the diameters of light beam, and wavelength 532 nanometers, initial incoming laser beam 21, first refractive light beam 24, the second deflecting light beams 28 calculate by 1 with third reflect light beam 211 place air refractions.
The refractive index of the described the 3rd dull and stereotyped quartz glass 29, Siping City's flag English glass the 214, second dull and stereotyped quartz glass 27 and the first dull and stereotyped quartz glass 22 is 1.45, and thickness is 3 millimeters, and the two sides all is coated with the anti-reflection film that thickness is 532 nanometers.
Described focused beam 224(laser) relevant parameter is as follows: optical maser wavelength 532 nanometers, beam quality factor are less than 1.1, and hot spot circularity is greater than 90 percent, 30 watts of mean powers, single mode, pulse recurrence frequency 100 KHzs.
The described first dull and stereotyped quartz glass 22 can swing around the first swinging axle 23 perpendicular to paper, make the normal of the first dull and stereotyped quartz glass 22 and the angle between initial incoming laser beam 21 change in 0～10 degree scope, make first refractive light beam 24 obtain translation with respect to initial incoming laser beam 21, side-play amount changes in 0～0.86 millimeter scope.
The second rotating shaft 26 of the described second dull and stereotyped quartz glass 27 and first dull and stereotyped the first swinging axle 23 spatial vertical of quartzy 22, and perpendicular to incident laser light beam 21.The second swinging axle 26 is controlled the second dull and stereotyped quartz glass 27 and is swung, make the surface normal of the second quartzy plate glass 27 and the angle of first refractive light beam 24 change between 0～10 degree scope, make the second deflecting light beams 28 obtain corresponding displacement with respect to first refractive light beam 24, side-play amount changes between 0～0.86 millimeter scope.
The routing motion of the described first dull and stereotyped quartz glass 22 and the second dull and stereotyped quartz glass 27 has directly determined the movement locus of the second deflecting light beams 28, and in the present embodiment, the range of movement of the second deflecting light beams 28 is the square region of 0.86 millimeter * 0.86 millimeter.
The described the 3rd dull and stereotyped quartz glass 29 swings around the 3rd swinging axle 210 perpendicular to paper, make the surface normal of the described the 3rd dull and stereotyped quartz glass 29 and the angle between the second deflecting light beams 28 change between 0～10 degree scope, make third reflect light beam 211 obtain corresponding displacement with respect to described the second deflecting light beams 28, side-play amount changes between 0～0.86 millimeter scope.
Described Siping City flag English glass 214 is identical with the 3rd dull and stereotyped quartz glass 29, but its 4th swinging axle 213 and the 3rd swinging axle 210 spatial vertical, and perpendicular to incident laser light beam 21; Described the 4th swinging axle 213 is controlled the described the 4th quartzy plate glass 214 and is swung, make the surface normal of described Siping City flag English glass 214 and the angle between described third reflect light beam 211 change between 0～10 degree scope, make described the first light beam 215 obtain corresponding displacement with respect to described third reflect light beam 211, side-play amount changes between 0～0.86 millimeter scope.
The motion of described Siping City flag English glass the 214 and the 3rd dull and stereotyped quartz glass 29 has directly determined the movement locus of described the first light beam 215, and the present embodiment the first light beam 215 is the square region of 0.86 millimeter * 0.86 millimeter with respect to the range of movement of the second deflecting light beams 28.
The described first dull and stereotyped quartz glass 22, the second dull and stereotyped quartz glass 27, the 3rd dull and stereotyped quartz glass 29 and Siping City's flag English glass 214 carry out the comprehensive angle oscillating motion and control, the movement locus of the first light beam 215 will enrich complicated very much so, for example, the described first dull and stereotyped quartz glass 22 and the second dull and stereotyped quartz glass 27 aggregate motions, make the second deflecting light beams 28 do 50 microns circular motion of diameter, linear velocity is 10 mm/second, and the rotating speed of the second deflecting light beams 28 is 63.7 circles/seconds; Make the 4th light beam 215 do 175 microns circular motion of diameter with respect to the second deflecting light beams 28, linear velocity 5 mm/second, relative rotation speed is 8 revolutions per seconds.Comprehensive the above, the movement locus of the first light beam 215 is that diameter is 175 microns circular motion (revolution) and the resultant motion track of doing the circular motion (rotation) of 50 micron diameters around 175 microns circumference of diameter.Another kind of situation, if the motion rotating speed of the second deflecting light beams 28 is 10 circles/second, the first light beam 215 is 100 circles/seconds with respect to the rotating speed of the second deflecting light beams 28, and the biosynthesis locus of the first light beam 215 at this time is a series of filling circles, and final formation filled circle ring area.The shape and size of formed complicated fill area can dynamically change.The biosynthesis locus reference frame is Laser Processing sample 225.
In order to obtain large-scale Laser Processing, the first light beam 215 enters vibration mirror scanning flat field focus module.
The first reflecting optics 221 in vibration mirror scanning flat field focus module matches with the second reflecting optics 217, every completion of processing hole, just Focal Point Shift to next machining cell, in machining cell switching position process, laser is the black out state.When described the first reflecting optics 221 and the second reflecting optics 217 lock when motionless again, controlling the second deflecting light beams 28 by the swing of the described first quartzy plate glass 22 and the second dull and stereotyped quartz glass 27 moves in a circle, the circular motion speed of the second deflecting light beams 28 is 10 circles/seconds, and circle diameter is 50 microns; Control the 4th light beam 215 by the swing of the described the 3rd quartzy plate glass 29 and Siping City's flag English glass 214 and move in a circle with respect to the second deflecting light beams 28, circular diameter encloses 175 microns.Described focused beam 224 can get out 200 micron diameter through holes on the relevant position, by this method, can get out needed via-hole array on described workpiece to be processed 225.
The focal length of the camera lens of described heart focus lamp 223 far away is 100 millimeters, and 50 millimeters * 50 millimeters square region of the scanning focused scope of flat field realize the large-area scanning range of work.If change the focal length of the scanning focused mirror of flat field, can realize the large area scanning processing of 1 meter * 1 meter.For the sweep limits of light beam spatial modulation module, in this area, scanning area surpasses the large format that is commonly referred to of 5 millimeters * 5 millimeters.
The range of work of described heart focus lamp 223 far away is still limited after all, if the processing breadth is large not enough, in fact can also be placed in described workpiece to be processed 225 on the mobile platform (not shown), can realize large-scale Laser Processing like this.
The benefit of this processing mode of the present embodiment is, realize flat-top Laser Processing effect with gauss laser, the advantages such as Laser Processing characteristics that keep simultaneously the long depth of focus of gauss laser and Gaussian distribution light intensity, needing to be very suitable for the field of flat-top Laser Processing or the even Fast Filling scanning of small scope, processing effect is better than flat-top laser and controls very simple.Adopt traditional vibration mirror scanning to process switching between machining cell, galvanometer no longer participate in holing ring cutting scanning or the even Fast Filling scanning of microsize scope, the working (machining) efficiency and the crudy that also improve.
In above-described embodiment, in the time of the mutual spatial vertical of electric machine main shaft of adjacent panels optical element, also need in theory vertically with beam optical axis, the alignment error in actual the use can be proofreaied and correct and gets final product by being controlled software.
Be used for driving the driving element of the first quartzy plate glass and the second quartzy plate glass motion in above-described embodiment 1 and embodiment 2, also can adopt electrostriction element, as piezoelectric ceramics etc.It is flexible that electrostriction element issues the growth degree at DC Electric Field, and the quartzy plate glass of driving element first and the second quartzy plate glass swing or translation.Above-described embodiment 1 is two typical application of the present utility model with embodiment 2, and in fact its application of principle is not limited to top described situation, such as can also process even blind hole etc. of bellmouth on transparent material or hard brittle material.
in a word, the utility model proposes a kind of large format micropore high speed drilling system, its important feature is: the Combination application that adopts light beam spatial modulation module and vibration mirror scanning flat field focus module, light beam spatial modulation module is carried out the modulation of high-speed, high precision space tracking to laser beam, vibration mirror scanning flat field focus module is switched fast to laser spot, Division and Cooperations both, this programme can carry out the boring of large format micropore, the laser drill efficient and the drilling quality that significantly improve, and be fit to very much bore straight hole, and laser beam is filled shape and the size of scanning and can dynamically be controlled, micropore boring aperture size dynamically changeable, and possesses the flexible working ability of the fine structure of carrying out.
The above is only preferred embodiment of the present utility model, and is in order to limit the utility model, not all within spirit of the present utility model and principle, any modification of doing, is equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.
Claims (10)
1. large format micropore high speed drilling system, it is characterized in that: comprise light beam spatial modulation module and vibration mirror scanning flat field focus module, described light beam spatial modulation module comprises one or more transparent optical element, each described transparent optical element is arranged on a drive unit corresponding with it, and each described transparent optical element all can independently swing under the driving of the drive unit corresponding with it and/or the drive unit of translation;
Described light beam spatial modulation module is used for incoming laser beam is carried out the space motion path modulation, forms according to the first light beam of setting orbiting motion, and this first beam emissions is arrived described vibration mirror scanning flat field focus module;
Described vibration mirror scanning flat field focus module, be positioned at a side of described light beam spatial modulation module output the first light beam, be used for receiving from described light beam spatial modulation module output the first light beam, and the first light beam is focused on, forming focused beam, and the laser spot of controlling described focused beam is switched between different machining cells or at a machining cell place, synkinesia is carried out in the laser spot scanning motion of described focused beam and controlled.
2. a kind of large format micropore high speed drilling system according to claim 1, it is characterized in that: described transparent optical element is the transparent plate optical element, described transparent plate optical element can swing under the drive of the drive unit corresponding with it, and realize the variable angle of surface normal and incoming laser beam by the swing of described transparent plate optical element, adjust the shift offset of incoming laser beam and outgoing laser beam, control the spacescan track of laser beam.
3. a kind of large format micropore high speed drilling system according to claim 2, it is characterized in that: the surface of described transparent plate optical element is coated with anti-reflection film.
4. a kind of large format micropore high speed drilling system according to claim 1, it is characterized in that: described transparent optical element is the transparent prism optical element, described transparent prism optical element can swing and/or translation under the drive of the drive unit corresponding with it, and the shift offset of adjusting incoming laser beam and outgoing laser beam by swing and/or the translation of transparent prism, and control the spacescan track of light beam.
According to claim 1 to 4 arbitrary described a kind of large format micropore high speed drilling system, it is characterized in that: described transparent optical element material is ordinary optical glass or quartz glass or sapphire.
According to claim 1 to 4 arbitrary described a kind of large format micropore high speed drilling system, it is characterized in that: described drive unit is motor, described transparent optical element material is arranged on described electric machine main shaft; Perhaps, described drive unit is electrostriction element, and described transparent optical element is arranged on electrostriction element, and it is flexible that electrostriction element issues the growth degree at DC Electric Field, drives described transparent optical element and swings and/or translation.
7. arbitrary described a kind of large format micropore high speed drilling system according to claim 6, it is characterized in that: described electrostriction element is piezoelectric ceramics.
According to claim 1 to 4 arbitrary described a kind of large format micropore high speed drilling system, it is characterized in that: described light beam spatial modulation module comprises the transparent optical element more than three or three, for the laser beam that sees through, transparent optical element is connected.
according to claim 1 to 4 arbitrary described a kind of large format micropore high speed drilling system, it is characterized in that: described vibration mirror scanning flat field focus module comprises scanning galvanometer and scanning flat field focus lamp, described scanning galvanometer comprises the first speculum and the second speculum, described the first speculum is arranged on the main shaft of the first motor, described the second speculum is arranged on the main shaft of the second motor, described the first electric machine main shaft is mutually vertical with described the second electric machine main shaft, described the first speculum is used for receiving and reflecting the first light beam that launches from described light beam spatial modulation module, be transmitted to the first folded light beam of described the second speculum with formation, described the second speculum receives and reflects described the first folded light beam, be transmitted into the second folded light beam of described scanning flat field focus lamp with formation, described scanning flat field focus lamp is used for focusing on this second folded light beam, be transmitted into the focused beam of work surface with formation.
According to claim 1 to 4 arbitrary described a kind of large format micropore high speed drilling system, it is characterized in that: described drive unit is a plurality of electrostriction elements, described transparent optical element is arranged on described a plurality of electrostriction element, it is flexible that electrostriction element issues the growth degree at DC Electric Field, drives described transparent optical element and swing and/or translation.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201320098197 CN203265914U (en) | 2012-10-12 | 2013-03-04 | Large-breadth micropore high-speed hole-drilling system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210388795.9 | 2012-10-12 | ||
| CN 201210388795 CN102922130A (en) | 2012-10-12 | 2012-10-12 | Transmission-type scanning galvanometer |
| CN201210460145.0 | 2012-11-15 | ||
| CN201210460145 | 2012-11-15 | ||
| CN 201320098197 CN203265914U (en) | 2012-10-12 | 2013-03-04 | Large-breadth micropore high-speed hole-drilling system |
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| CN203265914U true CN203265914U (en) | 2013-11-06 |
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| CN201310068726.4A Active CN103203552B (en) | 2012-10-12 | 2013-03-04 | A kind of large format micropore high speed drilling system |
| CN 201320098197 Expired - Lifetime CN203265914U (en) | 2012-10-12 | 2013-03-04 | Large-breadth micropore high-speed hole-drilling system |
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| CN201310068726.4A Active CN103203552B (en) | 2012-10-12 | 2013-03-04 | A kind of large format micropore high speed drilling system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103203552A (en) * | 2012-10-12 | 2013-07-17 | 张立国 | Large-size high-speed micropore drilling system |
| CN103706946A (en) * | 2013-12-03 | 2014-04-09 | 张立国 | Laser splitting galvanometer scanning and processing device |
| CN117506162A (en) * | 2023-11-27 | 2024-02-06 | 安徽华创鸿度光电科技有限公司 | Ultrafast solid laser |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE102013217126B4 (en) | 2013-08-28 | 2015-09-03 | Trumpf Laser- Und Systemtechnik Gmbh | Method for determining deviations of an actual position of a laser processing head from a desired position, laser processing machine and computer program product |
| CN105458515B (en) * | 2014-09-11 | 2018-01-05 | 大族激光科技产业集团股份有限公司 | A kind of sapphire laser grooving device and its grooving method |
| CN104889575A (en) * | 2015-06-15 | 2015-09-09 | 博敏电子股份有限公司 | A method for making through holes with CO2 laser for printed circuit boards |
| CN105562947B (en) * | 2016-02-19 | 2017-09-15 | 武汉铱科赛科技有限公司 | A kind of rotation axes of symmetry parallel rotary light beam group hole-drilling system and boring method |
| CN105598593B (en) * | 2016-02-29 | 2018-05-22 | 英诺激光科技股份有限公司 | For the laser-processing system and method for hard brittle material drilling |
| TWI685392B (en) * | 2018-11-29 | 2020-02-21 | 財團法人金屬工業研究發展中心 | Multifunctional shaft apparatus |
| CN112192019B (en) * | 2020-10-13 | 2021-06-04 | 深圳市韵腾激光科技有限公司 | Laser processing drilling system |
| CN112264723A (en) * | 2020-10-16 | 2021-01-26 | 西安中科微精光子制造科技有限公司 | Laser micropore machining equipment and machining method suitable for small-sized complex curved surface part |
| GB202208383D0 (en) * | 2022-06-08 | 2022-07-20 | Rolls Royce Plc | Ablation tool |
| CN115194342B (en) * | 2022-09-19 | 2022-12-13 | 武汉引领光学技术有限公司 | Taper controllable laser grooving device and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6804269B2 (en) * | 2001-06-19 | 2004-10-12 | Hitachi Via Mechanics, Ltd. | Laser beam delivery system with trepanning module |
| DE10317363B3 (en) * | 2003-04-15 | 2004-08-26 | Siemens Ag | Laser-powered hole boring machine for manufacture of substrates for electrical switching circuits has scanning system with oscillating mirrors and focusing lens |
| WO2006000549A1 (en) * | 2004-06-29 | 2006-01-05 | Hitachi Via Mechanics, Ltd. | Laser machining device for drilling holes into a workpiece comprising an optical deflecting device and a diverting unit |
| CN101856772A (en) * | 2010-05-27 | 2010-10-13 | 张立国 | Light beam-rotating galvanometer-scanning focused processing system |
| CN103203552B (en) * | 2012-10-12 | 2015-10-07 | 张立国 | A kind of large format micropore high speed drilling system |
-
2013
- 2013-03-04 CN CN201310068726.4A patent/CN103203552B/en active Active
- 2013-03-04 CN CN 201320098197 patent/CN203265914U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103203552A (en) * | 2012-10-12 | 2013-07-17 | 张立国 | Large-size high-speed micropore drilling system |
| CN103203552B (en) * | 2012-10-12 | 2015-10-07 | 张立国 | A kind of large format micropore high speed drilling system |
| CN103706946A (en) * | 2013-12-03 | 2014-04-09 | 张立国 | Laser splitting galvanometer scanning and processing device |
| CN103706946B (en) * | 2013-12-03 | 2016-09-07 | 张立国 | A kind of laser beam splitter vibration mirror scanning processing unit (plant) |
| CN117506162A (en) * | 2023-11-27 | 2024-02-06 | 安徽华创鸿度光电科技有限公司 | Ultrafast solid laser |
| CN117506162B (en) * | 2023-11-27 | 2024-05-10 | 安徽华创鸿度光电科技有限公司 | An ultrafast solid-state laser |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103203552B (en) | 2015-10-07 |
| CN103203552A (en) | 2013-07-17 |
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