CN103706946B - A kind of laser beam splitter vibration mirror scanning processing unit (plant) - Google Patents
A kind of laser beam splitter vibration mirror scanning processing unit (plant) Download PDFInfo
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- CN103706946B CN103706946B CN201310641799.8A CN201310641799A CN103706946B CN 103706946 B CN103706946 B CN 103706946B CN 201310641799 A CN201310641799 A CN 201310641799A CN 103706946 B CN103706946 B CN 103706946B
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/707—Auxiliary equipment for monitoring laser beam transmission optics
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The present invention relates to field of laser processing, particularly to a kind of laser beam splitter vibration mirror scanning processing unit (plant).Including Beam Control module, laser beam splitter module and vibration mirror scanning focus module.Single beam laser processing can be become multiple laser by laser beam splitter module by the laser beam splitter vibration mirror scanning processing unit (plant) of the present invention, the high speed switching of laser spot can be carried out by vibration mirror scanning focus module simultaneously, and the combination of above-mentioned two module, it is achieved that high-speed and high-efficiency high accuracy array laser processing；The beam motion TRAJECTORY CONTROL content in Laser Processing can also be enriched further by the Beam Control module increased, the demand of various processing environment, processing conditions can be met.Comparing conventional laser processing, technical scheme is all improved largely at aspects such as machining accuracy, working (machining) efficiency, crudies, and adapts with the development trend of modern solid-state laser, can be widely used in field of laser processing.
Description
Technical field
The present invention relates to field of laser processing, particularly to a kind of laser beam splitter vibration mirror scanning processing unit (plant).
Background technology
In prior art, the laser processing device that configuration vibration mirror scanning focuses on, is all to use single beam laser
Processing, working (machining) efficiency is not high enough, can not meet industrial requirement；And use the device that multi-beam laser processes,
It is all based on static focus mode, there is the slow-footed problem of laser spot switching position.And current consolidating
Body laser particularly optical fiber laser, all towards high pulse repetition frequency, high power ultrashort pulsewidth direction
Development, above-mentioned processing mode, can not want to mate with the development of current solid state laser, it is impossible to
Enough give full play to high pulse repetition frequency and the advantage of the ultrashort pulsewidth of high power of existing laser instrument, it is necessary to look for
To more efficient laser processing mode, match with current laser developments level.
Summary of the invention
The technical problem to be solved is to provide a kind of laser beam splitter vibration mirror scanning processing unit (plant), solves
The technical problem that in prior art of having determined, laser processing device working (machining) efficiency is low, process velocity is slow.
The technical scheme is that a kind of laser beam splitter vibration mirror scanning processing
Device, it is characterised in that: include Beam Control module, laser beam splitter module and vibration mirror scanning focus module,
Described incident beam sequentially passes through described Beam Control module, described laser beam splitter module be irradiated to described in shake
Scarnning mirror focus module；Or described incident beam sequentially passes through described laser beam splitter module, described light beam
Control module is irradiated to described vibration mirror scanning focus module；
Described Beam Control module is irradiated to the state of laser beam thereon for regulation；Described smooth beam control
Molding block includes laser beam expanding unit, and described laser beam expanding unit is for being irradiated to laser thereon to described
Light beam carries out beam-expanding collimation；Or described Beam Control module includes described laser beam expanding unit and described light
Bundle dynamic control unit, described light beam dynamic control unit is irradiated to laser beam thereon for regulation
Motion state；
Described laser beam splitter module, for being split irradiating laser beam thereon, forms how light
Bundle group, each light beam in described multiple beam group and the described laser light being irradiated in described laser beam splitter module
Bundle keeps synchronizing static or being synchronized with the movement；
Described vibration mirror scanning focus module, including scanning galvanometer and scanning f-theta mirror；Or including sweeping
Retouching galvanometer, scanning f-theta mirror and motion platform, described motion platform is one-dimensional or multi-dimensional movement is put down
Platform；Described scanning f-theta mirror is for entering each light beam of the multiple beam group exported from described scanning galvanometer
Line focusing is formed and focuses on light beam group, and described scanning galvanometer is for controlling each laser of described focusing light beam group
The switching at a high speed of focus locus between different machining cells, or to institute at a machining cell
Each laser spot scans motion stating focusing light beam group carries out synkinesia control；Described one-dimensional or many
Maintenance and operation moving platform is processed workpiece for carrying and completes the switching of machining area, or at a machining cell
Each laser spot scans of described focusing light beam group is moved and carries out synkinesia control by place.
The invention has the beneficial effects as follows: the present invention is divided by described vibration mirror scanning focus module, described laser
Bundle module and the combination of described Beam Control module, it is possible to achieve multi-beam laser carries out synchronizing focus and adds
Work, and laser spot is switched fast at different machining cells, Laser Processing efficiency is greatly improved
With quality；Or at a machining cell, laser spot is carried out synkinesia control, enriches further
Laser beam space track modulation, it is achieved more complicated laser processing mode.Technical scheme can be used
Apply in laser cutting, boring, milling, welding etc..If described Beam Control module includes that light beam is dynamic
Control unit, then be irradiated to laser thereon to described before can be implemented in incident beam light splitting or after light splitting
The motion state of light beam carries out high-speed, high precision modulation, thus carries out highly efficient rate and high-precision multichannel
Laser Focusing synchronous processing, more greatly improves working (machining) efficiency.
On the basis of technique scheme, the present invention can also do following improvement.
Further, described laser beam splitter module is the first beam splitting unit, the second beam splitting unit, the 3rd beam splitting
Any one of unit；Or described laser beam splitter module be the first beam splitting unit, the second beam splitting unit,
The tandem compound of at least two in 3rd beam splitting unit, described tandem compound is for thereon sharp to being irradiated to
Light light beam is split, and forms multiple beam group；
Described first beam splitting unit is any one or multiple tandem compound of micro optical element, described
Micro optical element is for carrying out light splitting to the laser beam irradiated thereon；Described micro optical element includes two
Unit's optical element, diffraction grating, microlens array or holographic optical elements (HOE)；Described diffraction grating includes one
Dimension transmissive diffraction grating, two-dimensional transmission formula diffraction grating, 3-D transmission formula diffraction grating or reflecting light
Grid；
Described second beam splitting unit is the tandem compound of optical thin film light-splitting device and optical mirror；Or
Described second beam splitting unit is the tandem compound of optical thin film light-splitting device, optical mirror and slide；
Described 3rd beam splitting device is the tandem compound of birefringece crystal and optical mirror；Or described
Three beam splitting unit are the tandem compound of birefringece crystal, optical mirror and slide.
Described micro optical element, is development upper in optics and photoelectron technology, and that develops is novel
Optical element, has the advantages such as volume is little, light weight, cost are low, it is achieved common optical elements is difficult to reality
The New function such as existing small, array, integrated, imaging and corrugated conversion.Described micro optical element, presses
The approach that irradiation is propagated can be divided into diffraction optical element and the big class of refractiveness optical element two, including binary optical
Learn element, diffraction grating, microlens array or holographic optical elements (HOE), apply in laser optics field permissible
Change laser beam corrugated, it is achieved optical beam transformation, such as the collimation of light beam, shaping, beam splitting etc..
Described binary optical elements, for the one of diffraction optical element, its diffraction theory based on light wave,
Utilize CAD, and by ultra-large integrated (VLSI) circuit production technique, in chip base (or
Traditional optics surface) etching produce two or more step depth embossment structure, formed pure phase place,
The coaxial diffraction optical element reproduced, its diffraction efficiency is high, and beam shaping is effective, and beam splitting uniformity is good.
Described grating, also referred to as diffraction grating, mainly have four fundamental propertys: dispersion, beam splitting, polarization and
Phase matched, most application of grating are all based on these four characteristic.The splitting properties of grating refers to
A branch of incident monochromatic light can be divided into the ability of multi beam emergent light by grating, is divided into reflecting diffraction grating with saturating
Penetrate the big class of diffraction grating two, can apply at light network, the conjunction of light lotus root, Uniform Illumination, optical communication, photometry
The fields such as calculation.The Performance Evaluating Indexes of grating has: diffraction efficiency, splitting ratio, compression ratio, hot spot are non-all
Even property and facular model etc..Described transmissive diffraction grating beam splitter can be roughly divided into one-dimensional transmission-type
Diffraction grating, two-dimensional transmission formula diffraction grating, 3-D transmission formula diffraction grating, described one-dimensional transmission-type is spread out
Penetrating grating to laser beam splitter, the laser beam after beam splitting is in the same plane；Described two-dimensional transmission formula diffraction light
Grid are to laser beam splitter, and the most in the same plane, institute's divided beams can divide the laser beam after beam splitting with rectangular array
Cloth, can also distribution etc. in two orthogonal planes with circumference array distribution；Described 3-D transmission formula
Diffraction grating, the laser beam after beam splitting is not only two-dimensional space array distribution, and along with Laser Transmission direction,
And after Laser Focusing, Diode laser or short depth of focus feature can be presented.
Described microlens array is the array that micron-sized lens form by clear aperature and relief depth,
It will spatially be divided into many small parts before a complete laser wave, every part is all by accordingly
Lenslet be focussed onto, a series of lenticules can be obtained by by a series of focuses form flat
Face, in the available extensively application of the multiple systems such as wavefront sensing, light cumulative, light shaping, is originally adding frock
In putting, possesses good spectrophotometric result.
Described holographic optical elements (HOE) uses stereolithography process to make, and its interference based on light and diffraction are former
Reason, it is possible to complete the functions such as collimation, focusing, imaging, beam splitting, light beam steering and light beam scanning, at this
In the processing unit (plant) of invention, there is preferable spectrophotometric result.
Further, described laser beam splitter module is adjustable with the spacing of described vibration mirror scanning focus module, it is possible to
In adjusting described multiple beam group, each light beam is in the relative position of scanning f-theta mirror porch, such that it is able to
Adjust the relative position of the described focusing each laser spot of light beam group；Described laser beam splitter module is around irradiating it
On laser beam optical axis rotate, its output array beams distribution also can be along the optical axis of described laser beam
Rotating, the light splitting surface of the most described laser beam splitter module changes according to the rotation of described laser beam splitter module.
Further, the light beam that described laser beam splitter vibration mirror scanning processing unit (plant) comprises one or more series connection moves
State control unit.
Described light beam dynamic control unit is the first control subelement, the second control subelement, the 3rd control
Subelement, the 4th control subelement any one；Or described light beam dynamic control unit is the first control
At least two in subunit, the second control subelement, the 3rd control subelement, the 4th control subelement
Tandem compound, described tandem compound is irradiated to the motion state of laser beam thereon for regulation；
Described first controls subelement includes transmission optical component and for controlling described transmission optics unit
Part carries out motor or the piezoelectric ceramics swinging or translating；
Described second controls subelement includes reflective optical devices and for controlling described reflection optics unit
Part carries out motor or the piezoelectric ceramics deflecting or translating；
Described 3rd controls subelement includes acousto-optic modulator, and described acousto-optic modulator is by changing driving source
Carrier frequency regulate described laser beam Bragg grating reflection angle, change described Laser beam propagation
State；
Described 4th controls subelement includes a laser beam gyrator unit or at least two series connection
Laser beam gyrator unit；Described laser beam gyrator unit include rotate transmission optical component with
And for controlling the driving means that described rotation transmission optical component rotates；When the described 3rd controls
When subelement is the laser beam gyrator unit of two or more series connection, described laser beam rotates
Subelement the most independently controls to rotate, the optical axis edge of described previous laser beam gyrator unit output beam
The optical axis its incident light carries out rotation, the optical axis edge of the output beam of a rear laser beam gyrator unit
The optical axis previous laser beam gyrator unit output beam revolves round the sun, and also along revolution track
Carry out rotation.
Above-mentioned further scheme is used to provide the benefit that: for described light beam dynamic control unit, permissible
Any one or a few tandem compound for above-mentioned subelement.If using Piezoelectric Ceramic speculum
Mode, i.e. use the mode of piezoelectric ceramics galvanometer, can the most dynamically change at a high speed described in be irradiated to thereon
The movement locus of laser beam, be suitable on same workpiece carrying out different size of through hole, blind hole,
The laser milling Drilling operation of the shape such as groove, blind slot, and the size of hole or groove can be according to reality
Border needs dynamically to regulate.
If using laser beam gyrator unit, then by driving motor, incident beam can be carried out height
Speed even ultrahigh speed rotates and controls, and compares the mode that galvanometer swings, has higher process velocity and processing
Precision, in a lot of processing processing the low material of threshold values or thin-film material, can be greatly improved laser
Working (machining) efficiency and quality.
Further, described transmission optical component is transmission flat optical element or optical prism optical element；
Described reflective optical devices is reflecting optics；Described rotation transmission optical component be prism wedge, lens,
Flat optical element, one-dimensional transmissive diffraction optical element, two-dimensional transmission formula diffraction optical element, three-dimensional
Transmissive diffraction optical element, any one or multiple tandem compound of microlens array.
Described transmissive diffraction optical element is divided into one-dimensional transmissive diffraction optical element, two-dimensional transmission formula to spread out
Penetrating optical element, 3-D transmission formula diffraction optical element, described one-dimensional transmissive diffraction optical element is to swashing
Light beam splitting, the laser beam after beam splitting is in the same plane；Described two-dimensional transmission formula diffraction optical element is to swashing
Light beam splitting, the most in the same plane, institute's divided beams can be distributed the laser beam after beam splitting with rectangular array, can
Can also be distributed in two orthogonal planes with circumference array distribution, and other situation spatial distributions
Deng；Described 3-D transmission formula diffraction optical element, the laser beam after beam splitting is not only two-dimensional space array and is divided
Cloth, and along with Laser Transmission direction, and after Laser Focusing, can present during every a branch of Laser Focusing
Diode laser or short depth of focus feature.
Further, the driving means of described laser beam gyrator unit is hollow spindle motor, described rotation
Turning transmission optical component to be arranged on the main shaft of described hollow spindle motor, described electric machine main shaft is hollow
Axle；Or
The driving means of described laser beam gyrator unit is motor belt transmission device, described motor skin
Belt driver include motor, driving wheel, driven pulley and be set on described driving wheel and driven pulley same
Step band, described motor is arranged on described driving wheel, and described rotation transmission optical component is fixedly mounted on institute
State on driven pulley.
Further, described hollow spindle motor be air supporting hollow spindle motor, magnetic floating heart spindle motor,
Hydraulic pressure hollow electric spindle motor or servo hollow spindle motor.
When the hollow electric spindle of described hollow electric spindle motor is arranged on air-bearing, this hollow electric spindle
Motor is also referred to as air supporting hollow electric spindle motor, and described air-bearing refers to by importing pressure in bearing bore
Power air realizes the bearing that hollow electric spindle suspends in atmosphere.Pressure release in described air-bearing bearing bore
Gap is minimum, it is ensured that the high accuracy of hollow electric spindle suspends and rotates, it is possible to revolve the most accurately
Turn, possess high rotating speed, pinpoint accuracy, zerofriction force, without abrasion, need not lubricating oil, have brilliance
Speeds control performance, compact conformation, lightweight, vibrate the advantages such as little, noise is low, the little response of inertia is fast.
When the hollow electric spindle of described hollow electric spindle motor is arranged on Hydrodynamic and-static Bearing, and this is hollow
Electric spindle motor is also referred to as hydraulic pressure hollow electric spindle motor.Described Hydrodynamic and-static Bearing refers to a kind of outer
Portion's supply constant pressure oil, set up in bearing and make electro spindle suspension high voltage static pressure all the time from start to stopping
The bearing of carrying oil film.Described Hydrodynamic and-static Bearing have do not wear and tear, length in service life, start merit
Rate is little, extremely low, the most applicable feature under the speed of even zero.Additionally, this bearing also has rotation
Turn precision height, oil film rigidity is big, can suppress the advantages such as film shocks.Described hydraulic pressure hollow electric spindle motor,
Owing to have employed Hydrodynamic and-static Bearing, therefore possess the highest rigidity and damping, possess higher rotation speed and
Service life.
When the hollow electric spindle of described hollow electric spindle motor is arranged on electromagnetic suspension bearing, this hollow electricity
Spindle motor is also referred to as magnetic floating electrocardio spindle motor.Described electromagnetic suspension bearing is that one utilizes electromagnetic force
Electro spindle is suspended in space and realizes the bearing of contactless supporting, have without friction, without lubrication, nothing
Greasy dirt dye, the advantage such as energy consumption is low, noise is little, life-span length, be particularly well-suited to vacuum, super dead room, at a high speed
Etc. in particular surroundings.Described magnetic floating electrocardio spindle motor, owing to using electromagnetic suspension bearing, therefore has
Standby high speed performance is good, and precision is high, easily realizes the advantages such as diagnosis and on-line monitoring.
When the hollow electric spindle of described hollow electric spindle motor is arranged on ceramic bearing, this hollow electric spindle
Motor is also referred to as ceramic bearing hollow electric spindle motor.Described ceramic bearing refers to that the rolling element of bearing uses
Ceramic Balls, bearing ring is still the bearing of steel ring, and ceramic bearing standardization level is high, is meeting certain turning
Under conditions of speed, the advantage possessing low cost simple in construction.Described ceramic bearing hollow electric spindle motor
Hollow electric spindle is arranged on ceramic bearing, and the rotating speed of this ceramic bearing is up to more than 10,000 turns per minute.
Further, described scanning f-theta mirror be the scanning focused mirror of common flat field or the scanning of telecentricity flat field poly-
Jiao Jing；Described Laser Focusing handover module configuration light path coaxial camera head monitor device.
Above-mentioned further scheme is used to provide the benefit that: configuration light path coaxial camera head monitor device, can
To carry out the location of focal position of laser very easily, and can see easily in laser processing procedure
Examine the state of Reciprocity of Laser & Materials.
Further, the horizontal stroke of each focus spot being perpendicular to optical axis of each light beam in described focusing light beam group
Cross section is oval.
Above-mentioned further scheme is used to provide the benefit that: if the long axis direction of oval focal beam spot is sharp
The optical focus direction of motion, then when laser pulse repetition frequency one timing, can improve laser scribing speed,
Pulse overlap degree, joint-cutting section smooth degree；If the short-axis direction of oval focal beam spot is laser spot
The direction of motion, then can obtain relatively wide joint-cutting, laser machines occasion at some, and wide joint-cutting has
It is beneficial to the material slag ejection from joint-cutting effectively that laser cutting boring produces.
Accompanying drawing explanation
Fig. 1 is the structural representation of the embodiment of the present invention 1；
Fig. 2 is the structural representation of the embodiment of the present invention 2；
Fig. 3 is the structural representation of the embodiment of the present invention 3；
Fig. 4 is the structural representation of the embodiment of the present invention 4.
Detailed description of the invention
Being described principle and the feature of the present invention below in conjunction with accompanying drawing, example is served only for explaining this
Invention, is not intended to limit the scope of the present invention.
The laser beam splitter vibration mirror scanning processing unit (plant) of the present invention, before carrying out Laser Focusing and switching, uses light
The laser beam expanding unit of bundle control module carries out beam-expanding collimation to incident beam, and uses laser beam splitter module
The laser beam of described Beam Control module output is split, or first uses laser beam splitter module pair
Incident beam is split, and each light beam of the light beam group after beam splitting is again through the laser beam expanding of Beam Control module
Unit carries out beam-expanding collimation, thus realizes the multi-path laser synchronous processing to workpiece.Owing to swashing through described
The angle of each light beam after light beam splitting module is split is limited, such as after diffraction grating beam splitting, and each light
It is relatively big that the angle of bundle is difficult to do, such as, reach 30 degree, the most all within 10 degree, so laser
Need between beam splitting module and Laser Focusing handover module retain certain space for each laser beam point
From, if described Beam Control module is placed in described laser beam splitter module and described Laser Focusing switching mould
Between block, the most whole apparatus structure can be the compactest.
If described Beam Control module is provided with light beam dynamic control unit, then can be by being irradiated to it
On laser beam carry out high-speed, high precision motion modulation control, coordinate the fast switching capability of vibration mirror scanning
Or the high precision displacement ability of platform motion, just can complete more high accuracy and high efficiency and laser machine.
Now, described light beam dynamic control unit is interchangeable with described laser beam expanding cell position, when described laser
Expanding unit when being arranged on after described light beam dynamic control unit, described laser beam expanding unit swashs completing
While light beam-expanding collimation, also complete the laser fortune after described light beam dynamic control unit is modulated
The work that dynamic track imaging is amplified, so, at certain beam motion rail entering Laser Focusing handover module
Under mark premise, described light beam dynamic control unit has only to carry out the least modulation, the most described light
Bundle dynamic control unit modulating speed can improve further.
If the cross section controlling the focus spot being perpendicular to optical axis of described each focusing light beam is ellipse, then
It is very suitable for laser scribing.
The operation principle of the present invention is as follows: incident beam is carried out through the laser beam expanding unit of Beam Control module
After beam-expanding collimation, forming the first light beam, described first light beam is irradiated in described laser beam splitter module, shape
Becoming the second light beam group, each light beam in described second light beam group and described incident beam, the first light beam are Tong Bu
Static；Or incident beam is first after laser beam splitter module beam splitting, form the first light beam group, described first
Each light beam of light beam group, after Beam Control module carries out beam-expanding collimation, forms the second light beam group, and described
One light beam group, the second light beam group each light beam Tong Bu with described incident beam static.Described second light beam group
Each light beam be irradiated to described vibration mirror scanning focus module, by described vibration mirror scanning focus module to each light
Bundle is focused switching with high-speed displacement, controls each laser spot and switches between different machining cells
Or at a machining cell, laser spot scans motion is carried out synkinesia control, reach workpiece is entered
Row on a large scale, high-speed high-quality amount Laser Processing purpose, be very suitable for array blind slot or blind hole laser
Milling Process, or array micropore holes the even field of laser processing such as laser welding, precision laser cutting.
When described Beam Control module includes light beam dynamic control unit, it is irradiated to laser beam thereon
Through described light beam dynamic control unit adjustment state, described state includes beam motion state, light beam polarization
State and Laser beam propagation state etc., such as light beam steering, light beam translation or rotation.Incident beam warp
After Beam Control module carries out beam-expanding collimation and motion state regulation, form the first light beam, described first light
Bundle is irradiated in described laser beam splitter module, forms the second light beam group, each light in described second light beam group
Bundle is synchronized with the movement with described incident beam, the first light beam；Or incident beam is through laser beam splitter module beam splitting
After, forming the first light beam group, each light beam of described first light beam group carries out expanding standard through Beam Control module
After straight and motion state regulates, form the second light beam group, described first light beam group, the second light beam group each
Light beam is synchronized with the movement with described incident beam；Each light beam of described second light beam group is irradiated to described galvanometer and sweeps
Retouch focus module, by described vibration mirror scanning focus module each light beam is focused and high-speed displacement is cut
Change, control each laser spot and switch between different machining cells or to swashing at a machining cell
Optical focus scanning motion carries out synkinesia control, reaches to carry out workpiece on a large scale, high-speed high-quality amount swashs
The purpose of light processing, is very suitable for array blind slot or the processing of blind hole laser milling, or array micropore
Hole the even laser processing application such as laser welding, precision laser cutting.
Light beam dynamic control unit can use laser beam gyrator unit, Piezoelectric Ceramic speculum
Etc. structure.Described laser beam rotates the structure of subunit and generally uses driven by motor to rotate transmission optics
The mode of element, described motor can be air supporting hollow spindle motor, magnetic floating heart spindle motor, hydraulic pressure sky
Heart spindle motor or servo hollow spindle motor, such as air-floating main shaft motor speed up to 160,000 revolutions per seconds,
Realize the most even ultrahigh speed to rotate, meet actual a large amount of process requirements.Now, transmission optics unit is rotated
Part rotary speed is at a high speed at 5000 revs/min to 50,000 revs/min, is super more than 50,000 revs/min
At a high speed.If using this structure of Piezoelectric Ceramic speculum, then the swing of described first light beam is adjusted
Frequency processed is up to more than 5000 hertz.Therefore, incident beam is adjusted through described light beam dynamic control unit
After system and described laser beam splitter module light splitting, it is possible to achieve high-speed, multi-path laser motion.
Described laser beam splitter vibration mirror scanning processing unit (plant) can be applied and beat at stainless steel light guide plate mask laser
The various fields such as the boring of point, silicon chip, stainless steel filtering net boring, aluminium nitride ceramics laser milling blind hole, tool
Body illustrates in following embodiment.
Embodiment 1
Fig. 1 is that described laser beam splitter vibration mirror scanning processing unit (plant) is in stainless steel light guide plate mask laser is got ready
The structural representation used, as shown in Figure 1: the stainless steel light guide plate mask laser of the present embodiment gets dress ready
Put and include incident beam 1, Beam Control module, laser beam splitter module 3 and vibration mirror scanning focusing unit,
Described workpiece to be processed 14 is 200 micron thickness stainless steel substrates.
Described Beam Control module includes that laser beam expanding unit 2, described vibration mirror scanning focusing unit include sweeping
Retouch galvanometer and scanning f-theta mirror.Described scanning f-theta mirror has the scanning focused mirror of common flat field with remote
The types such as the heart scanning focused mirror of flat field, in the present embodiment, described scanning f-theta mirror uses telecentricity flat field
Scanning focused mirror 12, the focal length of described telecentric scanning focus lamp 12 is 100 millimeters, f-theta scope
50 millimeters × 50 millimeters.Described scanning galvanometer includes the first vibration mirror scanning reflecting optics 9 and the second galvanometer
Scanning reflection eyeglass 6, described first vibration mirror scanning reflecting optics 9 is arranged on the first of described scanning galvanometer
On the electric machine main shaft 10 of motor 11；Described second vibration mirror scanning reflecting optics 6 is arranged on described scanning and shakes
On the electric machine main shaft 5 of the second motor of mirror.In the present embodiment, described first vibration mirror scanning reflecting optics 9
All driven by motor with the second vibration mirror scanning reflecting optics 6, in other preferred embodiments, it is also possible to
The mode using piezoelectric ceramics is driven the first vibration mirror scanning reflecting optics 9 and the reflection of the second vibration mirror scanning
Eyeglass 6 coordinates swing.Preferably, described vibration mirror scanning focusing unit can configure light path coaxial and takes the photograph
As head supervising device.
In the present embodiment, described incident beam 1 is the incident beam of a diameter of 7 millimeters, its relevant parameter
As follows: optical maser wavelength 532 nanometer, beam quality factor is less than 1.2, and hot spot circularity is more than 9 percent
Ten, mean power 30 watts, single mode gauss laser (horizontal field intensity is Gaussian Profile), pulse repeats frequency
Rate 10 KHz.
In the present embodiment, described laser beam splitter module 3 is one-dimensional transmissive diffraction grating, and splitting ratio designs
Being 1 point 4, neighboring diffraction angle 1 degree, by the first vibration mirror scanning reflecting optics 9 He of scanning galvanometer
The coordination of the second vibration mirror scanning reflecting optics 6, it is possible to achieve four road laser are simultaneously to workpiece to be processed
14 laser machine.In other preferred embodiments, described laser beam splitter module 3 can by one or
The multiple diffraction element of person is composed in series, it would however also be possible to employ two dimension even multidimensional diffraction beam splitting element substitutes, also
Can be made up of discrete optical element, such as film beam splitter and arrangement of mirrors, or birefringence
Crystal and speculum, the combination etc. of slide.
The light path flow process of the present embodiment is as follows: incident beam 1 forms the first light after laser beam expanding unit 2
Bundle, the first light beam, after transmissive diffraction grating, obtains the second light beam group 4, described second light beam group 4
The 3rd light beam group 8, described 3rd light beam group is formed after scanned galvanometer the first vibration mirror scanning reflecting optics 9
Second vibration mirror scanning reflecting optics 6 of 8 scanned galvanometers forms the 4th light beam group 7, described 4th light beam
Group 7 is focused through the scanning focused mirror of telecentricity flat field 12, obtains focusing on light beam group 13, described focusing light
Bundle group 13 directly acts on workpiece to be processed 14.Preferably, in described focusing light beam group 13 each
The cross section of each focus spot being perpendicular to optical axis of light beam is ellipse.At described workpiece to be processed 14
Series volcanic crater pit formation template is got on surface, is imprinted on the template by plastic tab, can be in institute
State extrusion pit on plastic formwork, may be used for the light guide plate etc. below mobile phone display screen.The present embodiment can
Work with 4 road laser simultaneously, substantially increase Laser Processing efficiency.If selecting bigger the spreading out of splitting ratio
Penetrating beam splitter, even two dimension diffraction beam splitter, diffraction goes out the laser beam of series array distribution, that
The present embodiment working (machining) efficiency can improve further.
In other embodiments, it is also possible to described workpiece to be processed 14 is placed on mobile platform (in figure
Do not indicate), so can realize laser machining on a large scale, practice laser machines sweep limits face
The commonly referred to large area of long-pending generally more than 200 millimeters × 200 millimeters.
Change described laser beam splitter module 3 and the distance of vibration mirror scanning focusing unit, thus it is possible to vary described poly-
The position relationship of each laser spot in defocused laser beam group 13, such as spacing size.
Embodiment 2:
The knot that Fig. 2 is the present invention a kind of laser beam splitter vibration mirror scanning processing unit (plant) when applying in silicon chip is holed
Structure schematic diagram, as shown in Figure 2: include that Beam Control module, laser beam splitter module and vibration mirror scanning focus on
Module, described workpiece to be processed 34 is 200 micron thickness polysilicon silicon chips, is fixedly mounted on linear shifting
On moving platform.
The Beam Control module of the present embodiment includes laser beam expanding unit 19 and light beam dynamic control unit.
The incident beam 18 of the present embodiment is the incident beam-expanding collimation light beam of a diameter of 10 millimeters, and it is correlated with
Parameter is as follows: optical maser wavelength 532 nanometer, and beam quality factor is less than 1.2, and hot spot circularity is more than percentage
90, mean power 35 watts, single mode gauss laser (horizontal field intensity is Gaussian Profile), pulse weight
Complex frequency 50 KHz.
The described light beam dynamic control unit of the present embodiment includes a laser beam gyrator unit, described
Laser beam gyrator unit includes rotating transmission optical component and stating transmission optics for driving to be rotated
The driving means that element rotates.Preferably, described rotation transmission optical component be prism wedge,
Lens, flat optical element, diffracting object grating, any one or multiple combination of microlens array.
In the present embodiment, described rotation transmission optical component is flat quartz glass 20, described flat quartz glass
20 thickness are 6 millimeters, and refractive index is 1.45, and two sides is all coated with the anti-reflection film of 532 nanometers.Described drive
Dynamic device can be hollow spindle motor or motor belt transmission device.If driving means is hollow spindle electricity
Machine, then can be air supporting hollow spindle motor, magnetic floating heart spindle motor, hydraulic pressure hollow electric spindle motor or
Servo hollow spindle motor, uses air supporting hollow spindle motor, described flat quartz glass in the present embodiment
20 tilt to be fixed on the hollow spindle 21 of described air supporting hollow spindle motor, and air-floating main shaft 21 endoporus is straight
15 millimeters of footpath, air-floating main shaft motor speed 180,000 revs/min.If described driving means uses motor skin
Belt driver, described motor belt transmission device includes motor, driving wheel, driven pulley and is set in institute
Stating the Timing Belt on driving wheel and driven pulley, described motor is arranged on described driving wheel, described flat board stone
English glass 20 is fixedly mounted on described driven pulley.
In other embodiments, described light beam dynamic control unit can also be revolved by least two laser beam
Rotor unit is constituted, and described laser beam gyrator unit the most independently controls to rotate, previous laser beam
The output beam optical axis of gyrator unit carries out rotation, a rear laser beam along the optical axis of its incident beam
The optical axis of the output beam of gyrator unit is along the output beam of previous laser beam gyrator unit
Optical axis revolves round the sun, and also carries out rotation along revolution track.
Described laser beam splitter module is transmissive diffraction grating 23, and laser beam splitter ratio is designed as 1 point 4, phase
Adjacent angle of diffraction 1 degree.In other preferred embodiments, described laser beam splitter module can by one or
Multiple diffraction elements are composed in series, it would however also be possible to employ two dimension even multidimensional diffraction beam splitting element substitutes, and also may be used
To be made up of discrete optical element, such as film beam splitter and arrangement of mirrors, or birefringence is brilliant
Body and speculum, the combination etc. of slide.
In the present embodiment, described vibration mirror scanning focus module is vibration mirror scanning focusing unit, and described galvanometer is swept
Retouch focusing unit and include scanning galvanometer and scanning f-theta mirror.Described scanning f-theta mirror has common flat
The types such as field scan focus lamp and the telecentricity scanning focused mirror of flat field, in the present embodiment, described scanning flat field gathers
Burnt mirror uses the scanning focused mirror of telecentricity flat field 32, and the focal length of the described scanning focused mirror of telecentricity flat field 32 is 256
Millimeter, f-theta scope 156 millimeters × 156 millimeters.Described scanning galvanometer includes the first scanning galvanometer
Scan mirror 29 and the second scanning galvanometer scan mirror 26.First scanning galvanometer of described scanning galvanometer is swept
Retouch eyeglass 29 to be arranged on the electric machine main shaft 30 of the first motor 31 of scanning galvanometer.Described scanning galvanometer
The second scanning galvanometer scan mirror 26 the second motor of being arranged on scanning galvanometer electric machine main shaft 25 on.
The light path flow process of the present embodiment is as follows: incident beam 18 is irradiated to institute after laser beam expanding unit 19
Stating laser beam gyrator unit, form the first light beam 22, described first light beam 22 is through transmissive diffraction
After grating 23 light splitting, forming the second light beam group 24, the second scanned galvanometer of light beam group 24 first scanning is shaken
Scarnning mirror eyeglass 29 forms the 3rd light beam group 28, and the second of the described 3rd scanned galvanometer of light beam group 28 is swept
Retouching vibration mirror scanning eyeglass 26 and form the 4th light beam group 27, described 4th light beam group 27 scans through telecentricity flat field
Focus lamp 32 is focused, and obtains focusing on light beam group 33, and described focusing light beam group 33 directly acts on to be treated
Processing workpiece 34.
First scanning galvanometer scan mirror 29 and the second scanning galvanometer scan mirror 26 of described scanning galvanometer
Match, every array hole completion of processing, just each beam focus focusing on light beam group 33 is moved to next
Individual position, in this jump procedure, laser is black out；When described first scanning galvanometer scan mirror 29
Lock motionless again with the second scanning galvanometer scan mirror 26, now Laser output.By described light
Bundle gyrator unit, forms the first light beam 22 of High Rotation Speed, and the first light beam 22 of High Rotation Speed is through thoroughly
Penetrate formula diffraction grating 23 and be diffracted to the second light beam group 24 of four bundle High Rotation Speeds, described second light beam group 24
Four bundle light all do and being synchronized with the movement of the first light beam 22, described focusing light beam group 33 is due to f-theta
The focussing force of mirror 32, can depict corresponding circle on workpiece 34 relevant position to be added.In necessity
When, the second light beam group 24 of four bundle High Rotation Speeds can also be by the first scanning of described scanning galvanometer
Vibration mirror scanning eyeglass 29 and the coordination of the second scanning galvanometer scan mirror 26, it is achieved four road laser are same
Time workpiece to be processed 34 is carried out more complicated Laser Processing.
Change described laser beam splitter module and the distance of vibration mirror scanning focusing unit, thus it is possible to vary described focusing
The position relationship of each laser spot in light beam group 33, such as spacing size.
The position of described laser beam splitter module and Beam Control module can exchange, the processing effect realized
Essentially identical.
The benefit of this processing mode of the present embodiment is that the High Rotation Speed combining laser rotary subelement is excellent
Point, the single channel processing of laser beam splitter become the advantage of multichannel processing, vibration mirror scanning high speed switched laser focus
Advantage, it is achieved that high-speed and high-efficiency high-precision laser machining arrayed drills.
Embodiment 3
As it is shown on figure 3, be that one laser beam splitter vibration mirror scanning processing unit (plant) of the present invention bores at stainless steel filtering net
The structural representation of the application in hole, focuses on including Beam Control module, laser beam splitter module and vibration mirror scanning
Module, described workpiece to be processed 54 is 100 micron thickness stainless steel substrates.
Described incident beam is the incident beam-expanding collimation light beam of a diameter of 10 millimeters, and its relevant parameter is as follows:
Optical maser wavelength 532 nanometer, beam quality factor is less than 1.2, and hot spot circularity is more than 90 percent, puts down
All power 30 watts, single mode gauss laser (horizontal field intensity is Gaussian Profile), pulse recurrence frequencies 100
KHz.
The Beam Control module of the present embodiment includes laser beam expanding unit 38 and light beam dynamic control unit.
It is single that described light beam dynamic control unit includes that the first incident beam control unit and the second incident beam control
Unit, described first incident beam control unit includes the first piezo-electrical mirror 39 and for driving described
First Piezoelectric Driving pottery (not indicating in figure) of one piezo-electrical mirror 39.Second incident beam controls
Unit includes the second piezo-electrical mirror 41 and for driving the second piezoelectricity of described second piezo-electrical mirror 41
Drive pottery (not indicating in figure), the swinging axle of described second piezo-electrical mirror 41 and described first pressure
The swinging axle of galvanic reflex mirror 39 is perpendicular.Preferably, described light beam dynamic control unit can also be sound
Optical modulator, drives the carrier frequency in source to regulate the Bradley of described incident beam by changing acousto-optic modulator
Lattice optical grating reflection angle, changes described incident beam transmission state.
Described laser beam splitter module is transmissive diffraction grating 43, and laser beam splitter ratio is designed as 1 point 4, phase
Adjacent angle of diffraction 1 degree.In other preferred embodiments, described laser beam splitter module can by one or
Multiple diffraction elements are composed in series, it would however also be possible to employ two dimension even multidimensional diffraction beam splitting element substitutes, and also may be used
To be made up of discrete optical element, such as film beam splitter and arrangement of mirrors, or birefringence is brilliant
Body and speculum, the combination etc. of slide.
In the present embodiment, described vibration mirror scanning focus module is vibration mirror scanning focusing unit, and described galvanometer is swept
Retouch focusing unit and include scanning galvanometer and scanning f-theta mirror.Described scanning f-theta mirror has common flat
The types such as field scan focus lamp and the telecentricity scanning focused mirror of flat field, in the present embodiment, described scanning flat field gathers
Burnt mirror uses the scanning focused mirror of telecentricity flat field 52, and the focal length of the described scanning focused mirror of telecentricity flat field 52 is 100
Millimeter, f-theta scope 50 millimeters × 50 millimeters.Described scanning galvanometer includes that the first vibration mirror scanning is anti-
Penetrate eyeglass 49 and the second vibration mirror scanning reflecting optics 46.First vibration mirror scanning reflection of described scanning galvanometer
Eyeglass 49 is arranged on the electric machine main shaft 50 of the first motor 51 of scanning galvanometer；Described scanning galvanometer
On the electric machine main shaft 45 of the second motor that the second vibration mirror scanning reflecting optics 46 is arranged on scanning galvanometer.
The light path flow process of the present embodiment is as follows: incident beam is irradiated to after described laser beam expanding unit 38
Described first piezo-electrical mirror 39, reflects through described first piezo-electrical mirror 39, obtains light beam 40, institute
State light beam 40 to reflect through the second piezo-electrical mirror 41, export the first light beam 42, described first light beam 42
After described transmissive diffraction grating 43, obtaining the second light beam group 44, the second light beam group 44 is scanned shakes
The reflection of mirror the first vibration mirror scanning eyeglass 49 obtains the 3rd light beam group 48, and described 3rd light beam group 48 is scanned
Second vibration mirror scanning reflecting optics 46 of galvanometer obtains the 4th light beam group 47, described 4th light beam group 47
It is focused through the scanning focused mirror of telecentricity flat field 52, obtains focusing on light beam group 53, described focusing light beam group
53 directly act on workpiece to be processed 54.
First vibration mirror scanning reflecting optics 49 and the second vibration mirror scanning reflecting optics 46 of described scanning galvanometer
Match, every array hole completion of processing, just each beam focus focusing on light beam group 53 is moved to next
Individual position, in this jump procedure, laser is black out；When described first vibration mirror scanning reflecting optics 49
Lock motionless again with the second vibration mirror scanning reflecting optics 46, now Laser output.By the first pressure
The oscillating motion repeatedly of galvanic reflex mirror 39 and the second piezo-electrical mirror 41 controls described first light beam 42
Track, such as circular motion, circle diameter 100 microns, then four bundle light of the second light beam group 44 are equal
Doing and being synchronized with the movement of described first light beam 42, described focusing light beam group 53 is due to f-theta mirror 52
Focussing force, corresponding circle can be depicted on workpiece 54 relevant position to be added, thus by the
The motion control of one piezo-electrical mirror 39 and the second piezo-electrical mirror 41 changes the track of the first light beam 42,
Described focusing light beam group 53 can depict the profile of correspondence on workpiece to be processed 54 relevant position.
By the first vibration mirror scanning reflecting optics 49 and the second vibration mirror scanning reflecting optics 46 of scanning galvanometer
Coordination, it is possible to achieve workpiece to be processed 54 is laser machined by four road laser simultaneously.This reality
Execute example to work with 4 road laser simultaneously, substantially increase Laser Processing efficiency.If selecting splitting ratio more
Big diffraction beam splitter, even two dimension diffraction beam splitter, diffraction goes out the laser of series array distribution
Bundle, then the present embodiment working (machining) efficiency can improve further.In other embodiments, it is also possible to described
Workpiece to be processed 54 is placed on mobile platform (not indicating in figure), so can realize on a large scale
Laser Processing, laser machines sweep limits area and is generally more than 200 millimeters × 200 millimeters logical in practice
It is frequently referred to large area.
In another preferred embodiment, described laser beam expanding unit 38 can also arrange described second piezoelectricity
Between speculum 41 and transmissive diffraction grating 43, so amplify due to the imaging of laser beam expanding unit and make
With, the amplitude of fluctuation of the first piezo-electrical mirror and the second piezo-electrical mirror can be smaller, and hunting frequency can
With higher.
Change described laser beam splitter module and the distance of vibration mirror scanning focusing unit, thus it is possible to vary described focusing
The position relationship of each laser spot in light beam group 53, such as spacing size.
The position of described laser beam splitter module and Beam Control module can exchange, the processing effect realized
Essentially identical.
The benefit of this processing mode of the present embodiment is, combines the high-speed, high precision control of piezoelectric ceramics galvanometer
Advantage, the single channel of laser beam splitter that piezo-electrical mirror processed swings process the advantage of change multichannel processing, galvanometer is swept
The advantage retouching high speed switched laser focus, it is achieved that high-speed and high-efficiency high-precision laser machining arrayed drills.
Embodiment 4
As shown in Figure 4, blind at aluminium nitride ceramics laser milling for this laser beam splitter vibration mirror scanning processing unit (plant)
The structural representation of application in hole, focuses on including Beam Control module, laser beam splitter module and vibration mirror scanning
Module, described workpiece to be processed 74 is 300 micron thickness aluminium nitride ceramics.
Described incident beam 54 is the incident beam-expanding collimation light beam of a diameter of 10 millimeters, optical maser wavelength 532
Nanometer, beam quality factor be less than 1.2, hot spot circularity be more than 90 percent, mean power 30 watts,
Single mode gauss laser (horizontal field intensity is Gaussian Profile), pulse recurrence frequency 100 KHz.
The Beam Control module of the present embodiment includes laser beam expanding unit 55 and light beam dynamic control unit.
It is single that described light beam dynamic control unit includes that the first incident beam control unit and the second incident beam control
Unit, the first incident beam control unit includes the first flat quartz glass 56 and for driving described first
First motor of flat quartz glass 56, described first flat quartz glass 56 is arranged on the first motor
On electric machine main shaft 57.Second incident beam control unit includes the second flat quartz glass 60 and for driving
Second motor 59 of dynamic described second flat quartz glass 60, described second flat quartz glass 60 is installed
On the electric machine main shaft 60 of the second motor 59.In the present embodiment, described first flat quartz glass 56
Refractive index be 1.45, thickness 3 millimeters, its two sides all plates 532 nanometer anti-reflection films, can be around being perpendicular to
The electric machine main shaft 57 of paper flat quartz the first motor rotates so that described first flat quartz glass 56
The angle [alpha] of incidence surface normal and incident beam 55 change in the range of 0～10 degree, and make light
Bundle 58 obtains corresponding displacement relative to described incident beam 55, side-play amount 0～167 micrometer ranges it
Between change.
Described second flat quartz glass 61 is identical with the first flat quartz glass 56, but its rotary shaft is (i.e.
The electric machine main shaft 60 of the second motor 59) it is mutually perpendicular to the electric machine main shaft 57 of the first motor.Described motor
Main shaft 60 controls described second flat quartz glass 61 so that entering of described second flat quartz glass 61
Reflective surface normal is 0～10 degree of change with the angle [alpha] of described light beam 58 so that described first light beam 62
Obtaining corresponding displacement relative to described light beam 58, side-play amount changes between 0～167 micrometer ranges.
Described second flat quartz glass 61 directly determines with the motion of the first flat quartz quartz glass 56
The movement locus of described first light beam 62, the axis movement scope of the present embodiment the first light beam 62 is 334
Micron × the square region of 334 microns.
In other preferred embodiments, by wide range incident angle anti-reflection film coating technique, so that the
Angle angle [alpha] between incidence surface normal and the incident beam of one flat quartz glass 56 is at 0-90 degree
Change between scope；Between incidence surface normal and the described light beam 58 of the second flat quartz glass 61
Angle angle [alpha] changes between 0-90 degree scope, so can ensure the same of precision to a certain extent
Time also can strengthen sweep limits.
In other preferred embodiments, described quartz glass can also is that other transmission flat optical element or
Optical prism optical element.
Described laser beam splitter module is transmissive diffraction grating 63, and laser beam splitter is 1 to 4 than score ratio,
The angle of diffraction 1 degree.In other preferred embodiments, described laser beam splitter module can be by one or more
Diffraction element is composed in series, it would however also be possible to employ two dimension even multidimensional diffraction beam splitting element substitutes, it is also possible to by
Discrete optical element is constituted, such as film beam splitter and speculum, the combination of slide, or two-fold
Penetrate crystal and speculum, the combination etc. of slide.
In the present embodiment, described vibration mirror scanning focus module is vibration mirror scanning focusing unit, and described galvanometer is swept
Retouch focusing unit and include scanning galvanometer and scanning f-theta mirror.Described scanning f-theta mirror has common flat
The types such as field scan focus lamp and the telecentricity scanning focused mirror of flat field, in the present embodiment, described scanning flat field gathers
Burnt mirror uses telecentric scanning focus lamp 72, and the focal length of described telecentric scanning focus lamp 72 is 100 millimeters,
F-theta scope 50 millimeters × 50 millimeters.Described scanning galvanometer includes the first scanning galvanometer scan mirror
69 and the second scanning galvanometer scan mirror 66, the first scanning galvanometer scanning mirror of described scanning galvanometer
Sheet 69 is arranged on the electric machine main shaft 70 of the first motor 71 of scanning galvanometer, the of described scanning galvanometer
On the electric machine main shaft 65 of the second motor that two scanning galvanometer scan mirror 66 are arranged on scanning galvanometer.
The light path flow process of the present embodiment is as follows: incident beam is irradiated to after described laser beam expanding unit 55
Described first flat quartz glass 56, forms light beam 58, described light after the first flat quartz glass 56
Bundle 58 obtains the first light beam 62 through the second flat quartz glass 61, and described first light beam 62 is through transmission-type
Diffraction grating 63, obtains the second light beam group 64, has 4 light beams, the second light beam group 64 in light beam 64
Scanned galvanometer the first scanning galvanometer scan mirror 69 obtains the 3rd light beam group 68, described 3rd light beam group
Second scanning galvanometer scan mirror 66 of 68 scanned galvanometers obtains the 4th light beam group 67, described 4th light
Bundle group 67 is focused through the scanning focused mirror of telecentricity flat field 72, obtains focusing on light beam group 73, described focusing
Light beam group 73 directly acts on workpiece to be processed 74.
The two panels reflecting optics that is first scanning galvanometer scan mirror 69 of scanning galvanometer and the second scanning galvanometer
Scan mirror 66 matches, after every array blind hole completion of processing, just described focusing light beam group 73
Beam focus synchronizing moving is to next position, and in this jump procedure, laser is black out；When described
One scan vibration mirror scanning eyeglass 69 locks motionless, now with the second scanning galvanometer scan mirror 66 again
Laser output.By the motion control of the second flat quartz glass 61 and the first flat quartz glass 56
The track of one light beam 62, such as circular motion, circle diameter 100 microns, described focusing light beam group 73
Each light beam can depict respective diameters circle on workpiece 74 relevant position.By the second flat quartz
The motion control of glass 61 and the first flat quartz quartz glass 56 changes the track of the first light beam 62,
Thus each light beam of described focusing light beam group 73 can depict the wheel of correspondence on workpiece 74 relevant position
Wide.By changing thickness or the refractive index of first flat quartz glass the 56, second quartz plate glass 61,
The scanning profile size of the first light beam 62 can be changed.
In actual applications, it is also possible to described workpiece to be processed 74 is placed on mobile platform and (figure does not has
Have sign), so can realize laser machining on a large scale, practice laser machines sweep limits area
The commonly referred to large area of generally more than 200 millimeters × 200 millimeters.
In other preferred embodiments, described laser beam expanding unit 55 can also be placed in described second quartz
Between plate glass 61 and described transmissive diffraction grating 63, so amplify due to the imaging of beam expander and make
With, the amplitude of fluctuation of the first quartz plate glass 56 and the second quartz plate glass 61 can be smaller,
Hunting frequency can be higher.
Change described laser beam splitter module and the distance of vibration mirror scanning focusing unit, thus it is possible to vary described focusing
The position relationship of each laser spot in light beam group 73, such as spacing size.
The position of described laser beam splitter module and Beam Control module can exchange, the processing effect realized
Essentially identical.
The light splitting surface of described laser beam splitter module can change according to the rotation of described laser beam splitter module,
Described laser beam splitter module rotates around the optical axis irradiating laser beam thereon, and the array beams of its output is divided
Cloth also can rotate along the optical axis of described laser beam.
The benefit of this processing mode of the present embodiment is, combines the high-speed, high precision control of quartz plate glass
The single channel processing of light beam translation processed rather than the advantage of beat, laser beam splitter becomes the advantage of multichannel processing, shakes
The advantage of scarnning mirror high speed switched laser focus, beneficially kerf edge or the perpendicularity of bore edges, real
Show high-speed and high-efficiency high-precision laser machining arrayed drills.
Four typical application of above-described embodiment 1 to 4 simply present invention, actually its principle is applied not
It is limited to situation described above, such as, can also process bellmouth even on transparent material or hard brittle material
Blind hole etc..
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all in the present invention
Spirit and principle within, any modification, equivalent substitution and improvement etc. made, should be included in this
Within bright protection domain.
Claims (8)
1. a laser beam splitter vibration mirror scanning processing unit (plant), it is characterised in that: include Beam Control module,
Laser beam splitter module and vibration mirror scanning focus module, incident beam sequentially pass through described Beam Control module,
Described laser beam splitter module is irradiated to described vibration mirror scanning focus module；Or incident beam sequentially passes through institute
State laser beam splitter module, described Beam Control module is irradiated to described vibration mirror scanning focus module；
Described Beam Control module is irradiated to the state of laser beam thereon for regulation；Described smooth beam control
Molding block includes laser beam expanding unit and light beam dynamic control unit, and described laser beam expanding unit is for institute
State and be irradiated to laser beam thereon and carry out beam-expanding collimation；Described light beam dynamic control unit is used for regulating photograph
It is mapped to the motion state of laser beam thereon；
Described laser beam splitter module, for being split irradiating laser beam thereon, forms how light
Bundle group, each light beam in described multiple beam group with described be irradiated in described laser beam splitter module described swash
Light light beam keeps synchronizing static or being synchronized with the movement；
Described laser beam splitter module be the first beam splitting unit, the second beam splitting unit, the 3rd beam splitting unit appoint
Meaning one；Or described laser beam splitter module is the first beam splitting unit, the second beam splitting unit, the 3rd beam splitting
The tandem compound of at least two in unit, described tandem compound is for entering being irradiated to laser beam thereon
Row beam splitting, forms multiple beam group；
Described first beam splitting unit is any one or multiple tandem compound of micro optical element, described
Micro optical element is for carrying out light splitting to the laser beam irradiated thereon；Described micro optical element includes two
Unit's optical element, diffraction grating, microlens array or holographic optical elements (HOE)；Described diffraction grating includes one
Dimension transmissive diffraction grating, two-dimensional transmission formula diffraction grating, 3-D transmission formula diffraction grating or reflecting light
Grid；
Described second beam splitting unit is the tandem compound of optical thin film light-splitting device and optical mirror；Or
Described second beam splitting unit is the tandem compound of optical thin film light-splitting device, optical mirror and slide；
Described 3rd beam splitting device is the tandem compound of birefringece crystal and optical mirror；Or described
Three beam splitting unit are the tandem compound of birefringece crystal, optical mirror and slide；
Described vibration mirror scanning focus module, including scanning galvanometer and scanning f-theta mirror；Or including sweeping
Retouching galvanometer, scanning f-theta mirror and motion platform, described motion platform is the Multi-dimension Motion Platform；Described
Scanning f-theta mirror is for being focused each light beam of the multiple beam group exported from described scanning galvanometer
Being formed and focus on light beam group, described scanning galvanometer exists for each laser spot controlling described focusing light beam group
The switching at a high speed of the locus of different machining cells, or to described focusing light beam at a machining cell
Each laser spot scans motion of group carries out synkinesia control；Described the Multi-dimension Motion Platform is used for carrying
Process workpiece and complete the switching of machining area, or to described focusing light beam group at a machining cell
Each laser spot scans motion carry out synkinesia control；
Described laser beam splitter module is adjustable with the spacing of described vibration mirror scanning focus module；Described laser beam splitter
The light splitting surface of module changes according to the rotation of described laser beam splitter module.
A kind of laser beam splitter vibration mirror scanning processing unit (plant) the most according to claim 1, its feature exists
In: the light beam that described laser beam splitter vibration mirror scanning processing unit (plant) comprises one or more series connection dynamically controls list
Unit.
A kind of laser beam splitter vibration mirror scanning processing unit (plant) the most according to claim 2, its feature exists
In: described light beam dynamic control unit is the first control subelement, the second control subelement, the 3rd control
Subelement, the 4th control subelement any one；Or described light beam dynamic control unit is the first control
At least two in subunit, the second control subelement, the 3rd control subelement, the 4th control subelement
Tandem compound, described tandem compound is irradiated to the motion state of laser beam thereon for regulation；
Described first controls subelement includes transmission optical component and for controlling described transmission optics unit
Part carries out motor or the piezoelectric ceramics swinging or translating；
Described second controls subelement includes reflective optical devices and for controlling described reflection optics unit
Part carries out motor or the piezoelectric ceramics deflecting or translating；
Described 3rd controls subelement includes acousto-optic modulator, and described acousto-optic modulator is by changing driving source
Carrier frequency regulate described laser beam Bragg grating reflection angle, change described Laser beam propagation
State；
Described 4th controls subelement includes a laser beam gyrator unit or at least two series connection
Laser beam gyrator unit；Described laser beam gyrator unit include rotate transmission optical component with
And for controlling the driving means that described rotation transmission optical component rotates；When the described 4th controls
When subelement is the laser beam gyrator unit of two or more series connection, described laser beam gyrator unit
The most independent control rotates, and the optical axis of previous laser beam gyrator unit output beam is along its incident light
Optical axis carry out rotation, the optical axis of the output beam of a rear laser beam gyrator unit is along previous laser
The optical axis of Beam rotation subelement output beam revolves round the sun, and also carries out rotation along revolution track.
A kind of laser beam splitter vibration mirror scanning processing unit (plant) the most according to claim 3, its feature exists
In: described transmission optical component is transmission flat optical element or optical prism optical element；Described reflection
Optical element is reflecting optics；Described rotation transmission optical component is prism wedge, lens, planar optics
Element, one-dimensional transmissive diffraction optical element, two-dimensional transmission formula diffraction optical element, 3-D transmission formula are spread out
Penetrate any one or multiple tandem compound of optical element, microlens array.
5., according to a kind of laser beam splitter vibration mirror scanning processing unit (plant) described in claim 3 or 4, it is special
Levy and be: the driving means of described laser beam gyrator unit is hollow spindle motor, and described rotation is saturating
Penetrating optical element to be arranged on the main shaft of described hollow spindle motor, electric machine main shaft is hollow shaft；Or
The driving means of described laser beam gyrator unit is motor belt transmission device, described motor skin
Belt driver include motor, driving wheel, driven pulley and be set on described driving wheel and driven pulley same
Step band, described motor is arranged on described driving wheel, and described rotation transmission optical component is fixedly mounted on institute
State on driven pulley.
A kind of laser beam splitter vibration mirror scanning processing unit (plant) the most according to claim 5, its feature exists
It is that air supporting hollow spindle motor, magnetic floating heart spindle motor, hydraulic pressure are hollow in: described hollow spindle motor
Electric spindle motor or servo hollow spindle motor.
A kind of laser beam splitter vibration mirror scanning processing unit (plant) the most according to claim 6, its feature exists
In: described scanning f-theta mirror is the scanning focused mirror of common flat field or the scanning focused mirror of telecentricity flat field；Institute
State Laser Focusing handover module configuration light path coaxial camera head monitor device.
A kind of laser beam splitter vibration mirror scanning processing unit (plant) the most according to claim 6, its feature exists
In: in described focusing light beam group, the cross section of each focus spot being perpendicular to optical axis of each light beam is ellipse
Circular.
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