CN201954009U - Ventilation door device - Google Patents
Ventilation door device Download PDFInfo
- Publication number
- CN201954009U CN201954009U CN2010207008641U CN201020700864U CN201954009U CN 201954009 U CN201954009 U CN 201954009U CN 2010207008641 U CN2010207008641 U CN 2010207008641U CN 201020700864 U CN201020700864 U CN 201020700864U CN 201954009 U CN201954009 U CN 201954009U
- Authority
- CN
- China
- Prior art keywords
- air door
- ventilation door
- rotating shaft
- equipment
- oscillating cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009423 ventilation Methods 0.000 title abstract 8
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
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- Air-Flow Control Members (AREA)
Abstract
The utility model discloses a ventilation door device, which comprises a ventilation door (1), an oscillating cylinder (4) and a differential pressure gage (7), wherein a rotating shaft of the oscillating cylinder (4) is connected with a rotating shaft (2) of the ventilation door (1); and the differential pressure gage (7) is externally connected with the ventilation door (1) and equipment. The ventilation door device has simple design and excellent effect, and can automatically open the ventilation door, so as to avoid safety accidents when the air pressure difference adjacent to the ventilation door and outside the equipment exceeds the set range.
Description
Technical field
The utility model relates to the semiconductor cleaning device field, relates in particular to a kind of throttle setting.
Background technique
In semiconductor cleaning device, the state of microenvironment is bigger to the influence of the cleaning performance of wafer, keep a good equipment microenvironment to technology carry out most important.Usually, the FFU (Filter Fan Unit) of equipment top can produce the clean air-flow after filtering, air-flow flows to other unit in the equipment from top to bottom, as wash chamber, mechanism hand zone, CDS (Chemical Dispense System), have venting gas appliance simultaneously issuable contaminated gas in the equipment is discharged, thereby make air-flow in the equipment be in the state of a transient equiliblium.Usually can air door be installed at the relief opening of equipment, with the switch of control exhaust.The air door of semiconductor cleaning device all is hand switch usually, but air door is mounted in the top of equipment sometimes, inconvenient manual control.And, in doing the process of semiconductor technology, have no talent at the scene sometimes, if need the situation of switch air door, at this time just can not satisfy the needs of equipment.If there is chemical liquids to evaporate in the equipment, after air door stopped up, a large amount of chemical gas can be stayed in the equipment, may cause security incident.
The model utility content
(1) technical problem that will solve
The purpose of this utility model is the throttle setting of a kind of recloser of design, to satisfy the needs of semiconductor equipment.
(2) technological scheme
For achieving the above object, the utility model proposes a kind of throttle setting, comprising:
Air door;
Oscillating cylinder, its rotating shaft is connected with the rotating shaft of described air door;
Differential pressure gauge, it is connected with device external with described air door.
Wherein, also comprise coupling, it is arranged between the rotating shaft of the rotating shaft of described oscillating cylinder and described air door.
Wherein, also comprise support, be used for described oscillating cylinder is arranged at described air door.
Wherein, the baffle plate in described rotating shaft and the described air door is connected.
(3) beneficial effect
Technique scheme of the present utility model has following advantage: throttle setting simplicity of design of the present utility model, effective, when exceeding setting range with the draught head of device external near the air door, can realize opening automatically of air door, thereby avoid the generation of security incident.
Description of drawings
Fig. 1 is the utility model throttle setting embodiment's a schematic representation;
Fig. 2 is the schematic representation of the utility model throttle setting embodiment's cylinder.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples are used to illustrate the utility model, but are not used for limiting scope of the present utility model.
Be illustrated in figure 1 as the utility model throttle setting embodiment's schematic representation, throttle setting of the present utility model is positioned at device interior, and comprises: air door 1, oscillating cylinder 4, coupling 5, support 6 and differential pressure gauge 7.The other end passes equipment outside plate 8 and is connected with device external thereby an end of differential manometer 7 is connected with air door 1, to detect the draught head between them.Be connected with the rotating shaft of oscillating cylinder 4 with the rotating shaft 2 of coupling 5 with air door 1, the baffle plate 3 in the rotating shaft 2 of air door 1 and the air door 1 is connected, and with support 6 oscillating cylinder 4 is fixed on the panel of air door 1 simultaneously.
As shown in Figure 2, the work of oscillating cylinder 4 by two five-way electromagnetic valves control (not shown, its be arranged on the oscillating cylinder 4 or near), the source of the gas of oscillating cylinder 4 is provided by the pressurized air in the equipment.
Working principle of the present utility model is: the initial position of baffle plate 3 is and 9 one-tenth 10 ° of air door flanges, when differential manometer 7 detects draught head and exceeds setting range, the solenoid valve action, cylinder 4 can be swung 80 ° simultaneously, the baffle plate 3 that drives in the rotating shaft rotates 80 °, and this moment, baffle plate 3 was vertical with the air door flange 9 of equipment, and air door is opened fully, gas can be discharged with gas in the assurance equipment fast at the flow cross section maximum in the air door (the gas flow direction is shown in the arrow among Fig. 1).When discharging enough gas, differential manometer can detect draught head and be within the setting range, thus the control electromagnetic valve action, cylinder is back swung 80 °, drives baffle plate and gets back to initial position, and air door is closed automatically.
The above only is a mode of execution of the present utility model; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the utility model know-why; can also make some improvement and modification, these improve and modification also should be considered as protection domain of the present utility model.
Claims (4)
1. a throttle setting is characterized in that, comprising:
Air door (1);
Oscillating cylinder (4), its rotating shaft is connected with the rotating shaft (2) of described air door (1);
Differential pressure gauge (7), it is connected with device external with described air door (1).
2. throttle setting as claimed in claim 1 also comprises coupling (5), and it is arranged between the rotating shaft (2) of the rotating shaft of described oscillating cylinder (4) and described air door (1).
3. throttle setting as claimed in claim 2 also comprises support (6), is used for described oscillating cylinder (4) is arranged at described air door (1).
4. throttle setting as claimed in claim 3 is characterized in that, described rotating shaft (2) links together with the baffle plate (3) that is arranged in the described air door (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010207008641U CN201954009U (en) | 2010-12-27 | 2010-12-27 | Ventilation door device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010207008641U CN201954009U (en) | 2010-12-27 | 2010-12-27 | Ventilation door device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201954009U true CN201954009U (en) | 2011-08-31 |
Family
ID=44498119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010207008641U Expired - Lifetime CN201954009U (en) | 2010-12-27 | 2010-12-27 | Ventilation door device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201954009U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102162531A (en) * | 2010-12-27 | 2011-08-24 | 北京七星华创电子股份有限公司 | Air door device |
-
2010
- 2010-12-27 CN CN2010207008641U patent/CN201954009U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102162531A (en) * | 2010-12-27 | 2011-08-24 | 北京七星华创电子股份有限公司 | Air door device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Beijing Si Yuan Electrical electronic technology limited liability company Assignor: Qixinghuachuang Electronic Co., Ltd., Beijing Contract record no.: 2012990000723 Denomination of utility model: Automobile air conditioner air door device Granted publication date: 20110831 License type: Exclusive License Record date: 20120928 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110831 |