CN201311385Y - Non-microbot scanning force microscope column with fixed probe and oscillated sample - Google Patents
Non-microbot scanning force microscope column with fixed probe and oscillated sample Download PDFInfo
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- CN201311385Y CN201311385Y CNU2008201304220U CN200820130422U CN201311385Y CN 201311385 Y CN201311385 Y CN 201311385Y CN U2008201304220 U CNU2008201304220 U CN U2008201304220U CN 200820130422 U CN200820130422 U CN 200820130422U CN 201311385 Y CN201311385 Y CN 201311385Y
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Abstract
本实用新型探针固定而样品振荡型无微杆扫描力显微镜镜体涉及扫描探针显微镜，包括探针、样品、振子、定位器，定位器设置于探针与振子之间，探针指向固定于振子上的样品。定位器由XYZ定位压电管及分别设置在其两端的探针座和振子座构成，探针与振子分别固定在探针座与振子座上。探针是分立的无微杆探针。振子为压电振子、晶体振子、石英晶振片或石英微叉。本实用新型有益效果为：可使用分立的无微杆探针，如性能优越的STM探针；探针成本大大降低，利于性能更好扫描力显微镜的出现和普及；使用高品质因子的晶体振子能提高频率分辨率和测量精度；在定位器与振子间增设辅助振子还可获得小振幅振荡，提高短程力测量灵敏度和原子分辨能力。
The mirror body of the microrod-free scanning force microscope with fixed probe and sample oscillation of the utility model relates to a scanning probe microscope, including a probe, a sample, a vibrator, and a locator. The locator is arranged between the probe and the vibrator, and the probe points to a fixed position. samples on the vibrator. The positioner is composed of an XYZ positioning piezoelectric tube and a probe seat and a vibrator seat respectively arranged at both ends thereof, and the probe and the vibrator are respectively fixed on the probe seat and the vibrator seat. The probes are discrete rodless probes. The vibrator is a piezoelectric vibrator, a crystal vibrator, a quartz crystal oscillator or a quartz micro-fork. The beneficial effects of the utility model are as follows: discrete non-microrod probes can be used, such as STM probes with superior performance; the cost of the probes is greatly reduced, which is beneficial to the emergence and popularization of scanning force microscopes with better performance; crystal oscillators with high quality factors are used The frequency resolution and measurement accuracy can be improved; adding an auxiliary vibrator between the positioner and the vibrator can also obtain small-amplitude oscillation, and improve the short-range force measurement sensitivity and atomic resolution capability.
Description
Technical field
The utility model relates to scanning probe microscopy, is a kind of probe stationary and sample oscillation mode scanning force microscope lens body specifically.
Background technology
Existing scanning force microscopy (scanning force microscope, be called for short SFM), comprise atomic force microscope and magnetic force microscopy etc., its probe (tip) all is an end that is fixed in probe microbot (cantilever), and vibrate with the vibration of probe microbot, and sample is non-oscillating.The variation that the acting force of probe and sample room changes by the oscillation frequency of probe microbot provides.This causes four great difficult problems: the integrated very difficulty of (1) probe and probe microbot, to use little processing and photoetching technique usually, and cause that its cost is high to be stood to being difficult to.For example: the price of pressure drag (piezo-resistive) probe is just up to 800 yuans one piece.Though this makes SFM powerful in having subatomic resolution characteristic, it is used with universal limited greatly.(2) the more important thing is, cheap and good-quality probe is not have, as scanning tunnel microscope (scanning tunnelingmicroscope, be called for short STM) probe, not only make easily, also more sharp-pointed, more superiority arranged, but embarrass SFM used, because existing SFM be unable to do without the probe microbot, and the probe microbot is very tiny, the discrete STM probe stationary that corrosion is good is very difficult to tiny probe microbot.If can break away from the dependence of SFM to the probe microbot, just do not need to develop specially New type of S FM probe, directly just can use probe as various existing, technology maturations such as STM probe, superior performance, make SFM universal rapidly.(3) traditional SFM uses the general quality factor q of vibration of probe microbot generation not high, is unfavorable for obtaining very high measurement sensitivity.(4) traditional SFM uses the general amplitude of vibration of probe microbot generation bigger, be unfavorable for obtaining very high short-range contingence and measure sensitivity, and short-range contingence is measured the atom resolution characteristic that the decline of sensitivity directly reduces SFM.
Summary of the invention
In order to overcome scanning force microscopy probe manufacturing difficulty in the prior art, and can not use the difficult problem of no microbot probe again, provide a kind of probe stationary and sample oscillation mode does not have microbot scanning force microscope lens body.
The utility model overcomes in the prior art scanning force microscopy probe manufacturing difficulty and can not use the technical scheme of no microbot probe to be:
The utility model probe stationary and sample oscillation mode does not have microbot scanning force microscope lens body comprises that probe, sample, oscillator, steady arm, steady arm are arranged between probe and the oscillator, and probe points to the sample that is fixed on the oscillator.
Described steady arm is made of XYZ positioning and voltage pipe and the probe base and the oscillator seat that are separately positioned on its two ends, and probe stationary is on probe base, and oscillator is fixed on the oscillator seat.
Described probe is discrete no microbot probe.
Described oscillator is a piezoelectric vibrator.
Described piezoelectric vibrator is a quartz crystal unit.
Described quartz crystal unit is quartz crystal oscillator sheet or quartzy little fork.
Set up auxiliary oscillator between described steady arm and the oscillator.
Described auxiliary oscillator is a piezoelectric vibrator.
The utility model probe stationary and sample oscillation mode do not have the principle of work of microbot scanning force microscope lens body and are:
Sample is fixed on the oscillator, and probe points to sample, and the position adjustments of probe and sample room is finished by steady arm.Because oscillator is to drive the sample vibration, and probe is depressed, so probe can be the discrete probe of no microbot.Sample causes the eigenfrequency of probe oscillation to change to the variation of force of vibration probe in the prior art; This frequency change measured to obtain imaging signal.The utility model utilizes acting force and reacting force principle: probe also can cause the eigenfrequency of sample vibration to change to the variation of the reacting force of vibration sample, obtains imaging signal by the variation of measuring this frequency.
It is to utilize the low coefficient of stiffiness K of microbot to reduce oscillation frequency that tradition SFM uses the benefit of probe microbot, thereby improve the sensitivity of the variation of probe measurement power, but two shortcomings are arranged also: the quality factor q of (1) microbot vibration is not high, thereby reduces the sensitivity of the variation of probe measurement power; (2) amplitude of microbot vibration is bigger, causes the sensitivity of probe measurement short-range contingence to descend, and is unfavorable for the atom resolution.The oscillator of the utility model vibration sample can be selected quartz crystal unit for use, though its coefficient of stiffiness K than high 1 to 2 magnitude of microbot, unfavorable to measuring sensitivity, benefit is: (1) its quality factor q (can reach 10
6) be far longer than the quality factor (several thousand) of microbot, help greatly improving and measure sensitivity, be that the advantages outweigh the disadvantages fully; (2) its amplitude is less, helps improving the sensitivity that short-range contingence is measured, and improves atom and differentiates quality.
The high vibration quality factor of modern quartz crystal unit successfully has been used for accurately measuring the thickness of nanoscale ultrathin film, about 0.1 hertz frequency resolution that its frequency discrimination ability is required far above the imaging of SFM atom will use the SFM of probe microbot to have higher sensitivity and precision than tradition.Because probe does not need to be fixed on the probe microbot, can use any type of probe in principle, comprises the STM probe.
Can set up auxiliary oscillator between above-mentioned steady arm and the oscillator and drive oscillator vibration.The effect of auxiliary oscillator is: (1) makes the oscillator starting of oscillation easy, and amplitude is easily controlled, and (2) can obtain small amplitude oscillation, helps improving the sensitivity of short distance force measurement, improves atom resolution imaging quality.
Compared with the prior art, the beneficial effects of the utility model are embodied in:
(1) can use the discrete probe of no microbot,, make the better SFM of performance as more sharp-pointed, the better STM probe of aciculiform.
(2) the probe cost reduces greatly, helps popularizing rapidly of SFM.
Quality factor when (3) using quartz crystal unit is higher than the quality factor that tradition is used the probe microbot, helps the appearance of sensitiveer SFM.
(4) help obtaining small amplitude oscillation, improve the sensitivity of short distance force measurement, thereby improve the atom resolution characteristic.
Description of drawings
Fig. 1 is the utility model basic model probe stationary and sample oscillation mode does not have the structural representation of microbot scanning force microscope lens body.
Fig. 2 is that the utility model uses the probe stationary of XYZ positioning and voltage pipe and sample oscillation mode does not have the structural representation of microbot scanning force microscope lens body.
Fig. 3 is that the utility model uses the probe stationary of quartzy little fork oscillator and sample oscillation mode does not have the structural representation of microbot scanning force microscope lens body.
Fig. 4 is that the utility model is set up the probe stationary of auxiliary oscillator and sample oscillation mode does not have the structural representation of microbot scanning force microscope lens body.
Number in the figure: 1 probe, 2 samples, 3 oscillators, 4 steady arms, 5 probe bases, 6 oscillator seats, 7 XYZ positioning and voltage pipes, 8 quartzy little fork oscillators, 9 auxiliary oscillators.
Below by embodiment, the structure accompanying drawing is further described the utility model
Embodiment
Embodiment 1: basic model probe stationary and sample oscillation mode does not have microbot scanning force microscope lens body.
Fig. 1 is a basic model probe stationary and sample oscillation mode does not have the structural representation of microbot scanning force microscope lens body, and steady arm 4 is arranged between probe 1 and the oscillator 3, and probe 1 points to the sample 2 that is fixed on the oscillator 3.
During work, steady arm 4 is used for location, scanning and the probe-sample gap adjustment between probe 1 and the sample 2.2 variation of force of probe 1 and sample are provided by the variation of the dynamic eigenfrequency of oscillator.
Embodiment 2: use the probe stationary of XYZ positioning and voltage pipe and sample oscillation mode does not have microbot scanning force microscope lens body.
Embodiment 3: use the probe stationary of quartzy little fork oscillator and sample oscillation mode does not have microbot scanning force microscope lens body.
Embodiment 4: set up the probe stationary of auxiliary oscillator and sample oscillation mode does not have microbot scanning force microscope lens body.
Also can set up auxiliary oscillator 9 between steady arm 4 in the foregoing description and the oscillator 3, thereby can drive oscillator 3 vibrations by auxiliary oscillator 9, concrete structure is seen Fig. 4.Auxiliary oscillator 9 can make the amplitude of oscillator 3 easily control, and starting of oscillation is easy; Can obtain small amplitude oscillation, improve the sensitivity of short distance force measurement, improve the atom resolution characteristic.Auxiliary oscillator 9 can be a piezoelectric vibrator.
Claims (8)
1, a kind of probe stationary and sample oscillation mode does not have microbot scanning force microscope lens body comprises probe, sample, oscillator, steady arm, it is characterized in that steady arm is arranged between probe and the oscillator, and probe points to the sample that is fixed on the oscillator.
2, probe stationary according to claim 1 and sample oscillation mode does not have microbot scanning force microscope lens body, it is characterized in that described steady arm is made of XYZ positioning and voltage pipe and the probe base and the oscillator seat that are separately positioned on its two ends, probe stationary is on probe base, and oscillator is fixed on the oscillator seat.
3, probe stationary according to claim 1 and sample oscillation mode does not have microbot scanning force microscope lens body is characterized in that described probe is discrete no microbot probe.
4, probe stationary according to claim 1 and sample oscillation mode does not have microbot scanning force microscope lens body is characterized in that described oscillator is a piezoelectric vibrator.
5, probe stationary according to claim 4 and sample oscillation mode does not have microbot scanning force microscope lens body is characterized in that described piezoelectric vibrator is a quartz crystal unit.
6, probe stationary according to claim 5 and sample oscillation mode does not have microbot scanning force microscope lens body is characterized in that described quartz crystal unit is quartz crystal oscillator sheet or quartzy little fork.
7,, it is characterized in that setting up between described steady arm and the oscillator auxiliary oscillator according to claim 1 or 2 or 3 or 4 or 5 or 6 described probe stationary and sample oscillation mode does not have microbot scanning force microscope lens body.
8, probe stationary according to claim 7 and sample oscillation mode does not have microbot scanning force microscope lens body is characterized in that described auxiliary oscillator is a piezoelectric vibrator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201304220U CN201311385Y (en) | 2008-12-12 | 2008-12-12 | Non-microbot scanning force microscope column with fixed probe and oscillated sample |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201304220U CN201311385Y (en) | 2008-12-12 | 2008-12-12 | Non-microbot scanning force microscope column with fixed probe and oscillated sample |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201311385Y true CN201311385Y (en) | 2009-09-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201304220U Expired - Fee Related CN201311385Y (en) | 2008-12-12 | 2008-12-12 | Non-microbot scanning force microscope column with fixed probe and oscillated sample |
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| Country | Link |
|---|---|
| CN (1) | CN201311385Y (en) |
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2008
- 2008-12-12 CN CNU2008201304220U patent/CN201311385Y/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090916 Termination date: 20111212 |