CN101458203A - Scanning Probe Microscope for Simultaneous Measurement of Two Probes - Google Patents

Abstract

The dual-probe same-point measurement scanning probe microscope uses an XY or XYZ piezoelectric scanner, an XY or XYZ piezoelectric scanner with an enhanced X positioning range or an additional XY inertial stepper, to move the sample measurement point from the first probe to the vicinity of the second probe and to achieve re-measurement of the first probe measurement point by the second probe by finding the mark. The two probes are adjusted by two independent Z positioners to adjust the distance between them and the sample, so that each probe does not interfere with the measurement of the other probe. This design has one less long-range degree of freedom than the existing mobile probe same-point measurement technology, and the dual needles are allowed to be separated by a long distance and different types of probes are allowed, so the control and production are greatly simplified, and the data provided are more comprehensive, reliable, and have a wider and deeper meaning. It is particularly suitable for phase change, reaction kinetics and interdisciplinary research.

Description

Scanning Probe Microscope for Simultaneous Measurement of Two Probes

technical field

The invention relates to a scanning double-probe microscope capable of performing measurement and scanning imaging with two independent probes at the same point to be measured on the same sample, and belongs to the technical field of scanning probe microscopes.

Background technique

There are many types of scanning probe microscopes (SPM), such as scanning tunneling microscopes (STM), atomic force microscopes (AFM), magnetic force microscopes (MFM), etc., and these different types of scanning probe microscopes have obvious advantages and disadvantages. : STM can measure important quantum information such as electronic density of states, has atomic resolution, and can perform atomic manipulation, but it cannot measure insulating samples, nor can it obtain important information on sample spintronics and magnetism; while AFM Although it can measure insulating samples and has atomic resolution, it cannot give information on electronic density of states and magnetism; MFM can provide data on spintronics and magnetism, but the resolution is generally not higher than 20 nanometers , does not have atomic resolution and cannot be manipulated atomically.

In order to solve the above problems, German physicist F.J.Giessibl and others wrote a paper on page 1923 of the 65th issue of the scientific research journal "Review of Scientific Instrument" (Review of Scientific Instrument) in 1994, proposing to use the same probe as the instrument of STM. The probe is also used as the scanning probe of AFM or other SPM to form a combined microscope. One problem with this is that it is unlikely that this probe will be the best choice for all the different SPMs that make up the combined microscope. There will be some compromises. For example, tungsten, platinum, and iridium probes are suitable as STM probes, but they are not ferromagnetic and cannot be used as MFM probes. If they are plated with iron and then magnetized to make MFM probes, the sharpness (resolution) of the probes will be damaged, and they are not suitable for STM probes. Even if a magnetic probe with atomic resolution can be found, how to completely separate the magnetic interaction in the obtained signal from the local density of states (LDOS for short) is the first problem.

If a multi-probe (STM probe + AFM probe + MFM probe +...) is used to construct a combined microscope, how to change the needle in-situ (change the needle without destroying the vacuum and the sample), and How to make the different types of probes that are replaced point to the same sample measurement point (same point measurement) like the single probe SPM is just very difficult, which is the second problem.

How to reduce the volume of the multi-probe combination microscope so that it can be placed in various extreme physical environments is not easy. This is the third problem.

In addition, the use of multiple probes must introduce more controllers to control the increased degrees of freedom, which makes cost, complexity, interference, and thermal stability all pose a problem. For example, Alex deLozanne et al., March 2006, Vol. 5, No. 2, IEEE TRANSACTIONS ON NANOTECHNOLOGY Journal, p. 77, relies on (stepping) moving the second probe to find a first (fixed) probe that is farther apart. The measurement point of the fixed) measurement point, its algorithm and equipment are very complex: it is necessary to move a probe in a large range beyond the maximum scanning range of a single scanning tube in the XY plane (2 long-range degrees of freedom, or XY stepping degrees of freedom) to allow the tip of the double-needle to approach the maximum scanning imaging range to measure the same sample point, and the rough approach of the Z-direction of the double-needle also requires 2 long-range degrees of freedom (or coarse approximation degrees of freedom), a total of 4 long-range controls degrees of freedom (not counting the short-range XYZ scanning imaging degrees of freedom), and two feedback controllers are required to independently control the Z feedback adjustment of the double needles (very expensive). In addition, the double needles can only be used as STM probes and cannot be selected Different types of probes, because the STM probes are slender, and the two STM probes can be close to each other or even touch each other within 45 degrees of intersection, but the AFM probes are pyramid-shaped and the bottom of the tower Also fixed on the micro-cantilever, the STM probes must have a wide angle with the AFM probes to allow their tips to be very close, which is very difficult or even impossible to install.

In view of this, the present invention proposes a way to drive the sample laterally (only one long-range degree of freedom is required) to send the measurement point of the first probe on the sample to within the scanning range of the second probe to achieve the same point measurement, plus two There are only 3 long-range degrees of freedom in total, and the dual probes only need to be set in parallel or at a small angle. Completely different types of probes can be used, and only one feedback controller is required, because The sample can be scanned for imaging only (no scanning with both probes).

Contents of the invention

The object of the present invention is to provide a simple and easy-to-control dual-probe simultaneous-point measurement scanning probe microscope to solve the above-mentioned problems of complex control of dual-probe simultaneous-point measurement and difficulty in selecting different types of probes.

The purpose of the present invention can be achieved through the following technical solutions: a scanning probe microscope for measuring the same point with two probes, comprising a substrate and a sample holder, characterized in that it also includes a first probe, a second probe, and a first Z positioner , the second Z positioner, the positioning seat, the XY piezoelectric scanner, the sample seat is fixed on the XY piezoelectric scanner, the first Z positioner is fixed on the positioning seat, and the first probe is fixed on the first Z positioner Moving the end and pointing to the sample holder constitutes the first Z adjuster, and the second Z adjuster is constituted in one of the following three ways:

(a) The second Z locator is fixed on the positioning seat, the second probe is fixed on the moving end of the second Z locator and points to the sample holder, and the positioning seat and the XY piezoelectric scanner are fixed on the substrate;

(b) The second probe is fixed on the positioning seat and points to the sample seat, the positioning seat is fixed on the moving end of the second Z positioner, and the second Z positioner and the XY piezoelectric scanner are fixed on the substrate;

(c) The second probe is fixed on the positioning seat and points to the sample seat, the XY piezoelectric scanner is fixed on the moving end of the second Z positioner, and the second Z positioner and the positioning seat are fixed on the substrate;

Z positioning can be added to the XY piezoelectric scanner to form an XYZ piezoelectric scanner.

The first Z positioner and the second Z positioner are arranged side by side, and a positioner positioned along the side-by-side direction is added on the XY or XYZ piezoelectric scanner so that the XY or XYZ piezoelectric scanner Orientation range increased.

A pressing piece can be added on the scanning end of the XY or XYZ piezoelectric scanner, and the sample holder is either fixed on the pressing piece or integrated with the pressing piece. A tensioner is added between the ends, the scanning end supports the pressing piece and generates pressure against the pressing piece, and the pressing piece is electrically insulated from the scanning end.

The tensioner is a spring, a magnet, an elastic cord, a hanging hammer or a pressing piece itself.

The first Z positioner or the second Z positioner is a piezoelectric motor, an inertia motor, a screw adjustment or a stepping motor.

The inertia motor includes a piezoelectric stretcher, a spring piece, and a mass block. The telescoping end of the piezoelectric stretcher clamps the mass block with an elastic force perpendicular to the Z direction through the spring piece.

The working principle of the double-probe same-point measurement scanning probe microscope of the present invention is: the sample seat is fixed on the XY piezoelectric scanner, the first Z locator is fixed on the positioning seat, and the first probe is fixed on the first Z locator. The sample on the moving end and pointing to the sample seat constitutes the first Z adjuster; the second Z positioner is fixed on the positioning seat, the second probe is fixed on the moving end of the second Z positioner and points to the sample, and the positioning seat and The XY piezoelectric scanner is fixed on the substrate to form the second Z adjuster. In this way, the distance between the twin needles and the sample can be independently controlled. The first and second Z positioners function independently to make the first and second positioning probes approach the sample roughly (coarse approach), and can also be used to implement Z feedback control or fine adjustment in the Z direction (fine adjustment).

We first adjust the second Z adjuster so that the second probe is away from the sample surface. Next, the first Z adjuster is adjusted so that the first probe is close to the surface of the sample, and the positioning and scanning functions of the XY piezoelectric scanner are used to measure or image the sample with the first probe. A unique pattern or feature can be selected from the measured image as a mark, or the first probe can be used to leave a mark by atomic manipulation or gas deposition near the measurement point. After that, use the XY piezoelectric scanner to send the original measurement point within the measurement range of the second probe, and then adjust the second Z adjuster so that the second probe is close to the sample surface and perform the measurement or imaging of the sample by the second probe . The marks obtained during the measurement of the first probe can be searched in the formed image to accurately obtain the measurement point of the first probe. The feasibility of this method lies in: the imaging area of the first probe can be selected to be a little larger (micron level), and then the small-area imaging (atomic resolution) is done after marking, and then marking; use XY piezoelectric scanning When the sensor sends the original measurement point to the second probe, it does not need to be sent to the second probe tip very accurately, as long as it is sent to the maximum imaging range of the second probe, it can be found in the image formed by it. The mark in the large image obtained by the first probe, and then use the positioning and scanning functions of the XY piezoelectric scanner to move the second probe to the mark for zoom-in scanning (atomic resolution) to obtain the atomic-level positioning of the original measurement point or imaging.

The purpose of the above-mentioned second Z adjuster is to independently adjust the distance between the second probe and the sample, so the second adjuster can also be configured in one of the following ways: the second probe is fixed on the positioning seat and points to the sample , the positioning seat is fixed on the moving end of the second Z positioner, the second Z positioner and the XY piezoelectric scanner are fixed on the substrate; or: the second probe is fixed on the positioning seat and points to the sample, and the XY piezoelectric scanner It is fixed at the moving end of the second Z positioner, and the second Z positioner and the positioning seat are fixed on the base. Z positioning can be added to the XY piezoelectric scanner to form an XYZ piezoelectric scanner to realize Z feedback control.

Since the present invention transports the sample measurement point from one probe to another probe to measure the same point, instead of moving the probe like the prior art (two needles must be able to get close together to measure the same point), so only A controller is needed (only need to control the scanning and imaging of the sample), and as long as the sample can be transported far enough, the double needles can be separated relatively, and there is no need to bring their needle tips close to the scanning imaging range, and the double needles can also Can be placed at a small angle or even parallel so that the placement of the double needle has a high degree of flexibility. However, in actual operation, the double needles should be placed as close as possible, so that the XY or XYZ piezoelectric scanner can deliver the measurement point of the first probe to the second probe faster and more accurately without transporting a large distance. Here are some ways to increase the sample transport distance.

The first Z positioner and the second Z positioner are arranged side by side, and a positioner positioned along the side-by-side direction is added on the XY or XYZ piezoelectric scanner, so that the XY or XYZ piezoelectric scanner is in the Orientation range increased.

On the scanning end of the above-mentioned XY or XYZ piezoelectric scanner, a pressing piece can be added, and a tensioner is added to pull the pressing piece to the fixed end of the XY or XYZ piezoelectric scanner, and the scanning end supports the pressing piece and is in contact with the fixed end of the XY or XYZ piezoelectric scanner. The pressing piece generates pressure to prevent it from being pulled to the fixed end, and the pressing piece is electrically insulated from the XY or XYZ piezoelectric scanner. This constitutes an inertial step scanner that can both scan within its scan range and step outside of its scan range to move the sample over a wide range. Its working principle is as follows: the tensioner pulls the pressing piece to the fixed end of the XY or XYZ piezoelectric scanner, but is supported by its scanning end, so that a pressure N is generated between the pressing piece and the scanning end. We apply a slowly changing signal V(t) on the X electrode, Y electrode or Z electrode of the XY or XYZ piezoelectric scanning tube. The definition of slow here is as follows: the motion acceleration a generated by the change of V(t) on the tablet is equivalent to making the tablet subject to the inertial force F, F is equal to the total mass m of the tablet and the sample on it multiplied by a; if F is less than N The maximum static friction force f (equal to μN, μ is the maximum static friction coefficient), then F will not be enough to overcome f and produce sliding. Such V(t) changes are called slow changes. At this time, F=ma<f=μN. Because the distance that the tablet moves in one step is s=0.5at ² , where t is the time required for the tablet to move s, so m(2s/t ² )<μN, that is, t>sqrt(2ms/μN) can be called slow , where sqrt() is the square root. Define t ₀ =sqrt(2ms/μN) as the critical time.

Under such a slow V(t) action, the pressing piece will scan along with the scanning end of the XY or XYZ piezoelectric scanning tube without stepping. This is its scanning positioning function, and the maximum scanning range is on the order of 10-100 microns.

If you want to produce stepping motion, as long as XY moves slowly and then quickly move back, the time of back movement is faster than t ₀ , at this time, the inertial force on the pressing piece is greater than the maximum static friction force, and the pressing piece will not follow the XY or XYZ piezoelectric force. The scanning end of the scanning tube moves back together but there is a slip, so that XY stepping can be generated by repeating the cycle, and the sample is sent far away, but the XY stepping is carried out under the condition of friction, and the positioning accuracy is low.

In order to improve the positioning accuracy, a Z elongation signal and a slow XY signal can be applied to the XYZ piezoelectric scanning tube, so that the pressing piece is elongated in the Z direction s _Z and moves S _XY in the XY plane, and then these two The signal quickly retracts, here the definition of fast is as follows: Z retraction is equivalent to a Z direction inertial force F _Z =ma _Z , where a _Z is the retraction acceleration in Z direction: a _Z =2s _Z /t _Z ² , where t _Z is the time taken for Z to retract; if F _Z is large enough to completely offset the pressure N that generates friction: F _Z >N, that is, ma _Z =m2s _Z /t _Z ² >N, that is: t _Z < sqrt(2ms _Z /N), such a retracement is called fast. At this time, because the positive pressure that can generate friction is 0, that is, the friction is 0, so when the XY return signal is applied and the return process occurs within the Z retraction process, the pressing piece will stay in the position due to inertia. Local, does not move back together with the scanning end of the XYZ piezoelectric scanning tube. This process is not disturbed by friction, so the tablet will remain very precisely in a locality that has been displaced by exactly one step S _XY relative to the original starting point. Repeating this L times can accumulatively produce a large-scale movement S _XY L, realizing its large-scale positioning function. Since friction is completely eliminated, such macropositioning is very precisely equal to a known value: S _XY L, so macropositioning is precise and there are no bias issues.

The above-mentioned tensioner can be a spring, a magnet, an elastic cord, a pendant or the pressing piece itself, as long as the pressing piece can be pulled to the base of the XYZ piezoelectric scanner, it can be supported by the free end of the XYZ piezoelectric scanner to generate positive pressure.

The above-mentioned first and second Z positioners may be piezoelectric motors, inertia motors, screw adjustment or stepping motors. If the inertia motor is selected, it can be manufactured as follows: the telescopic end of the piezoelectric telescopic device clamps the mass block with the elastic force perpendicular to the Z direction through the spring plate. Its working principle is: when roughly approaching, the mass block is subjected to the periodic slow elongation and fast contraction of the piezoelectric stretcher in the Z direction, and is subjected to an inertial force greater than the maximum static friction force during fast contraction, resulting in the mass block being in the piezoelectric stretcher. The upper slides along its elongation direction, driving the sample seat (or probe seat) on the mass block to approach the probe seat (or sample seat). On the contrary, the cycle of fast elongation and slow contraction separates them.

Compared with the prior art, the beneficial effects of the present invention are reflected in:

(1) The same measurement point of the same sample can be repeatedly measured with different types of probes, because even if different types of probes are used, the distance between the probes has to be increased, but only one lateral stepper can move the first The measurement point of one probe is sent to the second probe.

(2) Only three long-range degrees of freedom are required, one less than the prior art.

(3) The measured data can come from different types of microscopes.

(4) The measured data are highly comparable because they come from the same measurement point.

(5) The measured data can help people get more, more important, and more reliable conclusions. For example, the first probe can be selected as a scanning tunneling microscope probe, and the second probe can be selected as an atomic force or magnetic force microscope probe. needle, then the data obtained from the first probe can be corroborated or provided with additional clues by the data from the second probe.

(6) The structure of the whole device is very simple, compact and firm, with low noise and strong anti-interference and vibration capabilities. The whole system has no looseness, suspension, complicated winding, easy vibration, etc. that will damage the stability.

(7) The operation is simple, only a few piezoelectric signals are needed, the program can be completely controlled, manual adjustment is avoided, and it can work under extreme physical conditions (small size, no heat generation, low gas output, no magnetism, compatible with extreme conditions) .

Description of drawings

Fig. 1 is a schematic diagram of the structure of a dual-probe scanning probe microscope for parallel same-point measurement in the present invention.

Fig. 2 is a schematic diagram of the structure of the dual-probe scanning probe microscope for serial same-point measurement of the present invention.

Fig. 3 is a schematic diagram of the structure of the linkage-type same-point measurement dual-probe scanning probe microscope of the present invention.

Fig. 4 is a schematic diagram of the structure of the double-probe scanning probe microscope for horizontal stepping and same-point measurement of the present invention.

Numbers in the figure: 1 first probe, 1a first Z positioner, 2 second probe, 2a second Z positioner, 3 sample, 3a sample seat, 4XY piezoelectric scanner, 5 positioning seat, 6 substrate, 7 horizontal step scanners, 8 tablet presses, 9 tensioners.

The present invention will be further described below through specific embodiments and structural drawings.

Detailed ways

Example 1: Parallel same-point measurement dual-probe scanning probe microscope

Fig. 1 is a schematic diagram of the structure of a dual-probe scanning probe microscope for parallel same-point measurement in the present invention. The sample 3 is fixed on the sample holder 3a, the sample holder 3a is fixed on the XY piezoelectric scanner 4, the first Z positioner 1a is fixed on the positioning seat 5, and the first probe 1 is fixed on the movement of the first Z positioner 1a end and point to the sample 3 to form the first Z adjuster; the second Z positioner 2a is fixed on the positioning seat 5, the second probe 2 is fixed on the moving end of the second Z positioner 2a and points to the sample 3, the positioning seat 5 and The XY piezoelectric scanner 4 is fixed on the substrate 6 to form a second Z adjuster. In this way, the spacing between the double needles 1, 2 and the sample 3 can be independently controlled. The first positioner 1a and the second positioner 2a play the role of roughly approaching the first probe 1 and the second fixed probe 2 to the sample 3 independently.

The working principle is: firstly adjust the second positioner 2 a so that the second probe 2 is away from the surface of the sample 3 . Next, the first Z positioner 1 a is adjusted so that the first probe 1 is close to the surface of the sample 3 and the scanning positioning function of the XY piezoelectric scanner 4 is used to measure or image the sample 3 with the first probe 1 . A unique pattern or feature can be selected from the measured image as a mark, or the first probe 1 can be used to make a mark by atomic transport or gas deposition near the measurement point. After that, use the XY piezoelectric scanner 4 to send the original measurement point to the vicinity of the second probe 2, and then adjust the second Z positioner 2a so that the second probe 2 is close to the surface of the sample 3 and perform the second probe 2 to the sample 3 measurement or imaging. The marks obtained during the measurement of the first probe 1 can be found in the formed image to accurately obtain the measurement point of the first probe 1 . The imaging area of the first probe 1 can be selected to be larger (micron order) first, and then perform small-area imaging (atomic resolution) after marking, and then mark; use the XY piezoelectric scanner 4 to send the original measurement point When going to the second probe 2, it is not necessary to be delivered to the needle tip of the second probe 2 very accurately, as long as it is sent to the maximum imaging range of the second probe 2, the previous first probe can be found in the image formed by it. The mark in the large image obtained by the first probe 1, and then use the positioning and scanning functions of the XY piezoelectric scanner 4 to move the second probe 2 to the mark for enlarged scanning (atomic resolution) to obtain the atomic level of the original measurement point positioning or imaging.

The above-mentioned double needles 1 and 2 should be placed as close as possible, so that the XY piezoelectric scanner 4 can deliver the measurement point of the first probe 1 to the second probe 2 more accurately and quickly without transporting a large distance .

Example 2: Serial Same-Point Measurement Dual-probe Scanning Probe Microscope

The purpose of the second Z regulator in the above-mentioned embodiment 1 is to independently adjust the distance between the second probe 2 and the sample 3, so the second regulator can also be formed in the manner shown in Figure 2: the second probe 2 is fixed On the positioning seat 5 and pointing to the sample 3 , the positioning seat 5 is fixed on the moving end of the second Z positioner 2 a , and the second Z positioner 2 a and the XY piezoelectric scanner 4 are fixed on the base 6 . In this way, when the second Z positioner 2a performs Z telescopic adjustment, the distance between the sample 3 and the second probe 2 can be adjusted. Although the distance between the sample 3 and the first probe 1 also changes due to the serial connection between the first Z positioner 1a and the second Z positioner 2a, this distance can be adjusted by adjusting the first Z positioner The device 1a prevents the first probe 1 from being damaged if there is no contact between the first probe 1 and the sample 3 . Therefore, this structure can also realize independent adjustment of the distance between the dual probes and the sample.

Example 3: Linkage-type same-point measurement dual-probe scanning probe microscope

As shown in Figure 3, the second probe 2 is fixed on the positioning seat 5 and points to the sample 3, the XY piezoelectric scanner 4 is fixed on the moving end of the second Z positioner 2a, and the second Z positioner 2a and the positioning seat 5 are both fixed on the substrate 6. In this way, when the second Z positioner 2a performs Z telescopic adjustment, the entire XY piezoelectric scanner 4 and the sample 3 fixed on it will be linked to it, thereby adjusting the distance between the second probe 2 and the sample 3 . Although the distance between the sample 3 and the first probe 1 also changes accordingly, this distance can be adjusted by adjusting the first Z positioner 1a so that the first probe 1 and the sample 3 will not be damaged without contact. Probe 1. This structure also enables independent adjustment of the distance between the dual probes and the sample.

Embodiment 4: XYZ type same-point measurement dual-probe scanning probe microscope

Z positioning can be added to the XY piezoelectric scanner in the above-mentioned embodiments 1-3 to form an XYZ piezoelectric scanner.

Example 5: Two-probe Scanning Probe Microscope for Horizontal Step-by-Spot Measurement

In the above-mentioned embodiments 1-4, the first Z positioner and the second Z positioner can be arranged side by side, and a positioner positioned along the side-by-side direction can be added on the XY or XYZ piezoelectric scanner, This increases the positioning range of the XY or XYZ piezoelectric scanner in this direction.

In addition, referring to Fig. 4, the XY or XYZ piezoelectric scanning tube in the above-mentioned embodiments 1-4 can construct a horizontal step scanner 7 in the following manner: a pressing piece 8 is added on the scanning end of the XY or XYZ piezoelectric scanner, so The sample holder 3a is either fixed on the pressing piece 8 or integrated with the pressing piece 8, and a tensioner 9 is added between the pressing piece 8 and the fixed end of the XY or XYZ piezoelectric scanner, and the scanning end supports Hold the pressing piece 8 (so that it is not pulled to the fixed end by the puller 9) and generate pressure with the pressing piece 8, and the pressing piece 8 is electrically insulated from the scanning end. The tensioner 9 can be a spring, a magnet, a hanging hammer, an elastic cord or a pressing piece itself. The tensioner 9 can be placed inside or outside the XY or XYZ piezoelectric scanning tube. The horizontal step scanner 7 can work in the microscopic scanning and positioning mode, and can also work in the macroscopic large-scale stepping mode.

For the microscopic scanning and positioning mode, a slowly changing positioning or scanning signal is applied to the X electrode and the Y electrode of the XY or XYZ piezoelectric scanning tube so that the inertial force received by the pressing piece 8 is not enough to overcome the maximum static friction force generated by the pressure, that is, the pressure The sheet 8 moves together with the scanning end of the XY or XYZ piezoelectric scanning tube without relative movement, that is, without stepping. Without stepping, it cannot move in a large range. This is its microscopic scanning and positioning functions, and the working range is up to 10-100 microns.

If you want to produce stepping motion, you only need to move back quickly after XY moves slowly, and the time of back movement is so short that the inertial force on the tablet (including the sample on it) is greater than the maximum static friction force, and the tablet will not follow XY or XY. The scanning end of the XYZ piezoelectric scanning tube moves back together but has a slip, so that the cycle repeats to generate a step in the direction of the slip to send the sample far away, but the step is carried out under the condition of friction, positioning The precision is lower.

In order to improve the positioning accuracy, a Z elongation signal and a slow XY signal can be applied to the XYZ piezoelectric scanning tube, so that the pressing piece 4 is elongated in the Z direction and moves in the XY plane. There is no relative movement between the scanning ends of the electronic scanning tube. Then quickly withdraw these two signals. Here, fast refers to: the inertial force in the Z direction equivalent to the retraction of Z extension is so large that it completely offsets the pressure N that can generate friction. At this time, the total positive pressure that can generate friction force is 0, that is, the friction force is 0, so when the XY return signal is applied and the return process occurs within the Z retraction process, the pressing piece 8 will stay due to inertia. Locally, it does not move back together with the scanning end of the XYZ piezoelectric scanning tube. This process is not disturbed by friction, so that the pressure piece 8 will stay very precisely on the spot which has been displaced by exactly one step relative to the original starting point. Such repetition can generate a long-distance stepping cumulatively, realizing its macroscopic and large-scale positioning and stepping functions. Because friction is completely eliminated, positioning over a wide range is precise and there are no misalignment issues.

The setting of the above-mentioned tensioner is to pull the pressing piece to the fixed end of the XY or XYZ piezoelectric scanning tube and interact with the scanning end of the XY or XYZ piezoelectric scanning tube with pressure. Therefore, the tensioner can be in XY or XYZ except its position The inside or outside of the piezoelectric scanning tube can also be of non-spring type, such as elastic cords, magnets attracting the pressing piece, hanging hammers hanging under the pressing piece, or the pressing piece itself (the tension that generates the pressure comes from the pressing piece. The gravity of the sheet itself) and other devices that can generate the pressure.

Example 6: Simultaneous measurement of the Z positioner of a dual-probe scanning probe microscope

The function of the first and second Z positioners of the same-point measurement dual-probe scanning probe microscope described in the above-mentioned embodiments 1-5 is to independently adjust the distance between the first and second probes and the sample to achieve a rough approximation. Regulatory effect. Therefore, various coarse approximation regulators used in scanning probe microscopes can be used as the Z positioner of the same-point scanning dual-probe microscope of the present invention, including piezoelectric motors, inertia motors, screw adjustments or stepping motors. From the aspects of simple control, small size, low cost, high stability, and compatibility with extreme physical conditions, a better choice is an inertial motor. A better embodiment of the inertial motor is: including a piezoelectric expander, a base , a spring piece, a quality block, the telescoping end of the piezoelectric stretcher clamps the quality block with an elastic force perpendicular to the Z direction through the spring piece.

Claims (7)

1. A scanning probe microscope for measuring the same point with two probes, including a substrate and a sample holder, is characterized in that it also includes a first probe, a second probe, a first Z locator, a second Z locator, a positioning seat, XY piezoelectric scanner, the sample seat is fixed on the XY piezoelectric scanner, the first Z locator is fixed on the positioning seat, the first probe is fixed on the moving end of the first Z locator and points to the sample seat to form the first Z regulator, the second Z regulator is constructed in one of three ways: (a) The second Z locator is fixed on the positioning seat, the second probe is fixed on the moving end of the second Z locator and points to the sample holder, and the positioning seat and the XY piezoelectric scanner are fixed on the substrate; (b) The second probe is fixed on the positioning seat and points to the sample seat, the positioning seat is fixed on the moving end of the second Z positioner, and the second Z positioner and the XY piezoelectric scanner are fixed on the substrate; (c) The second probe is fixed on the positioning seat and points to the sample seat, the XY piezoelectric scanner is fixed on the moving end of the second Z positioner, and the second Z positioner and the positioning seat are fixed on the substrate; 2. The scanning probe microscope for dual-probe same-point measurement according to claim 1, characterized in that Z positioning can be added to the XY piezoelectric scanner to form an XYZ piezoelectric scanner. 3. The scanning probe microscope for dual-probe same-point measurement according to claim 1 or 2, characterized in that the first Z positioner and the second Z positioner are arranged side by side and scan in the XY or XYZ piezoelectric Adding a positioner positioned along the side-by-side direction on the scanner increases the positioning range of the XY or XYZ piezoelectric scanner in this direction. 4. The scanning probe microscope for dual-probe same-point measurement according to claim 1 or 2, characterized in that: a pressing piece is added on the scanning end of the XY piezoelectric scanner or XYZ piezoelectric scanner, and the sample The seat is either fixed on the pressing piece or integrated with the pressing piece, and a tensioner is added between the pressing piece and the fixed end of the XY or XYZ piezoelectric scanner, and the scanning end supports the pressing piece and is connected with the pressing piece. The pressure piece generates pressure, and the pressure piece is electrically insulated from the scanning end. 5. The scanning probe microscope for dual-probe same-point measurement according to claim 4, characterized in that the tensioner is a spring, a magnet, an elastic cord, a hanging hammer or a pressing piece itself. 6. The dual-probe simultaneous-point measurement scanning probe microscope according to claim 1 or 2, characterized in that the first Z positioner or the second Z positioner is a piezoelectric motor, an inertia motor, a screw adjustment or a stepping motor. 7. The scanning probe microscope for dual-probe same-point measurement according to claim 6, characterized in that the inertial motor includes a piezoelectric stretcher, a spring piece, and a mass block, and the telescopic end of the piezoelectric stretcher passes through the spring piece to be perpendicular to the Z direction. The elastic force clamps the mass block.

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