CN201117676Y - High-power light-emitting diode packaging structure with integrated microstructure - Google Patents
High-power light-emitting diode packaging structure with integrated microstructure Download PDFInfo
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- CN201117676Y CN201117676Y CNU2007200737530U CN200720073753U CN201117676Y CN 201117676 Y CN201117676 Y CN 201117676Y CN U2007200737530 U CNU2007200737530 U CN U2007200737530U CN 200720073753 U CN200720073753 U CN 200720073753U CN 201117676 Y CN201117676 Y CN 201117676Y
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Abstract
一种集成微结构的大功率发光二极管封装结构,主要包括陶瓷片、上铜片和下铜片,其特征在于所述两铜片通过直接键合铜(DBC)工艺键合在陶瓷片上下表面,并且下铜片表面或内部设有微通道。本实用新型的优点是发光芯片直接焊接在金属焊盘上,陶瓷基板上下表面都有铜层,热失配应力小,制作成本低,结构紧凑,有利于提高封装密度,并且微通道中可通入冷却液,大大提高了封装散热能力。
A high-power light-emitting diode packaging structure with integrated microstructure, mainly including a ceramic sheet, an upper copper sheet and a lower copper sheet, characterized in that the two copper sheets are bonded to the upper and lower surfaces of the ceramic sheet by a direct bonded copper (DBC) process , and a microchannel is provided on the surface or inside of the lower copper sheet. The utility model has the advantages that the light-emitting chip is directly welded on the metal pad, the upper and lower surfaces of the ceramic substrate have copper layers, the thermal mismatch stress is small, the manufacturing cost is low, the structure is compact, and it is beneficial to increase the packaging density, and the microchannel can pass The cooling liquid is added, which greatly improves the heat dissipation capability of the package.
Description
技术领域technical field
本实用新型涉及一种半导体器件,特别涉及一种集成微结构的大功率发光二极管封装结构。The utility model relates to a semiconductor device, in particular to a high-power light-emitting diode packaging structure with integrated microstructure.
背景技术Background technique
发光二极管(LED)的内量子效率和外量子效率决定着LED总的出光效率和器件亮度。传统光源中,日光灯的发光效率为60-100lm/W,高压钠灯的发光效率为60-120lm/W,而目前大功率氮化镓(GaN)基白光LED(蓝光+荧光粉)的发光效率最高也只有100lm/W,普通的只有30-50lm/W。从LED发光原理来看,LED效率(外量子效率)主要由注入效率、内量子效率和光提取效率三者的乘积来决定。其中,注入效率与材料结构和器件串联电阻有关,内量子效率主要由晶体生长的质量、量子阱的结构和器件制作过程中对有源层的损伤等因素决定。目前室温下GaN基LED的内量子效率较低,只有30%左右,而GaN基大功率LED的光提取效率更低,只有10%左右,使得GaN基大功率LED的效率小于10%,有90%左右的光不能导出而在器件中以热形式消耗掉,造成电能浪费,更严重的是使器件发热、升温导致LED光效急剧下降,同时芯片、焊线和封装材料严重老化,缩短寿命。The internal quantum efficiency and external quantum efficiency of a light-emitting diode (LED) determine the total light extraction efficiency and device brightness of the LED. Among the traditional light sources, the luminous efficiency of fluorescent lamps is 60-100lm/W, and that of high-pressure sodium lamps is 60-120lm/W. At present, the luminous efficiency of high-power gallium nitride (GaN)-based white LEDs (blue light + phosphor) is the highest It is only 100lm/W, and the ordinary one is only 30-50lm/W. From the perspective of LED luminescence principle, LED efficiency (external quantum efficiency) is mainly determined by the product of injection efficiency, internal quantum efficiency and light extraction efficiency. Among them, the injection efficiency is related to the material structure and the series resistance of the device, and the internal quantum efficiency is mainly determined by factors such as the quality of crystal growth, the structure of the quantum well, and the damage to the active layer during the device manufacturing process. At present, the internal quantum efficiency of GaN-based LEDs at room temperature is low, only about 30%, while the light extraction efficiency of GaN-based high-power LEDs is even lower, only about 10%, making the efficiency of GaN-based high-power LEDs less than 10%, 90% About 100% of the light cannot be exported and is consumed in the form of heat in the device, resulting in waste of electric energy. What is more serious is that the device heats up and the temperature rises, resulting in a sharp drop in LED light efficiency. At the same time, the chip, bonding wire and packaging materials are seriously aged, shortening the life.
由以上分析可以看到,散热问题是影响LED获得广泛应用的难题之一。一般LED封装结构如图1所示。发光芯片通过焊膏焊接在基板上,基板与热沉之间以热界面材料相接,故散热路径为:发光芯片-基板-热沉-环境。常用的基板一般为MCPCB板,含有一层绝缘层,其热阻较高,散热效果受到影响。基板与热沉之间选用的热界面材料,亦有一定热阻,增加了散热难度。热量传导至热沉以后,现行的被动散热如图1所示,通过散热片把热量散发至环境中。此种方法在LED功率较小时散热效果尚能匹配,但随着LED功率的不断提高,散热量增加,这类被动散热结构已不能满足LED的散热要求。It can be seen from the above analysis that heat dissipation is one of the problems that affect the wide application of LEDs. The general LED packaging structure is shown in Figure 1. The light-emitting chip is welded on the substrate by solder paste, and the substrate and the heat sink are connected by a thermal interface material, so the heat dissipation path is: light-emitting chip-substrate-heat sink-environment. The commonly used substrate is generally MCPCB board, which contains a layer of insulating layer, which has high thermal resistance and affects the heat dissipation effect. The thermal interface material selected between the substrate and the heat sink also has a certain thermal resistance, which increases the difficulty of heat dissipation. After the heat is conducted to the heat sink, the current passive heat dissipation is shown in Figure 1, and the heat is dissipated to the environment through the heat sink. This method can still match the heat dissipation effect when the LED power is small, but as the LED power continues to increase, the heat dissipation increases, and this type of passive heat dissipation structure can no longer meet the heat dissipation requirements of the LED.
发明内容Contents of the invention
本实用新型的目的是针对已有技术中存在的缺陷,提供了一种集成微结构的大功率发光二极管封装结构。The purpose of the utility model is to provide a high-power light-emitting diode packaging structure with integrated microstructure for the defects in the prior art.
本实用新型主要包括:陶瓷片、上铜片和下铜片,其特征在于所述上铜片和下铜片通过直接键合铜(DBC Directed Bonded Cooper)工艺键合在陶瓷片上下表面,并且在下铜片表面或内部设有微通道。本实用新型的优点是发光芯片直接焊接在金属焊盘上,陶瓷基板上下表面都有铜层,热失配应力小,制作成本低,结构紧凑,有利于提高封装密度,并且微通道中可通入冷却循环液,大大提高了封装散热能力。The utility model mainly comprises: a ceramic sheet, an upper copper sheet and a lower copper sheet, which is characterized in that the upper and lower copper sheets are bonded to the upper and lower surfaces of the ceramic sheet through a direct bonded copper (DBC Directed Bonded Cooper) process, and Microchannels are arranged on the surface or inside of the lower copper sheet. The utility model has the advantages that the light-emitting chip is directly welded on the metal pad, the upper and lower surfaces of the ceramic substrate have copper layers, the thermal mismatch stress is small, the manufacturing cost is low, the structure is compact, and it is beneficial to increase the packaging density, and the microchannel can pass The cooling circulating fluid is added, which greatly improves the heat dissipation capability of the package.
附图说明Description of drawings
图1现有的LED封装结构平面图;Figure 1 is a plan view of the existing LED package structure;
图2a上铜片截面剖视图;The sectional view of the upper copper sheet in Fig. 2a;
图2b下铜片加工前的截面剖视图;The cross-sectional view of the lower copper sheet before the processing of Fig. 2b;
图2c下铜片加工后的截面剖视图;The cross-sectional view of the lower copper sheet after processing in Fig. 2c;
图2d上下铜片与陶瓷片键合后的截面剖视图;Figure 2d is a cross-sectional view of the upper and lower copper sheets bonded to the ceramic sheet;
图2e金属腐蚀工艺加工后的结构截面剖视图;Figure 2e is a cross-sectional view of the structure after the metal corrosion process;
图3a金属扩散键合工艺加工后的结构截面剖视图;Fig. 3a is a cross-sectional view of the structure after the metal diffusion bonding process;
图3b上下铜片与陶瓷片键合后的截面剖视图;Figure 3b is a cross-sectional view of the upper and lower copper sheets bonded to the ceramic sheet;
图3c金属腐蚀工艺加工后的结构截面剖视图;Figure 3c is a cross-sectional view of the structure after the metal corrosion process;
图4LED封装结构的截面剖视图。Figure 4 is a cross-sectional view of the LED package structure.
11发光芯片、12固晶层、13金属膜层、14绝缘层、15金属基板、16焊接(粘结)层、17热沉、18含荧光粉硅胶层、19金线、20封装胶层、21上铜片、22下铜片、23微通道、24陶瓷片、25芯片区和电路、31上铜片、32下铜片、33微通道、34铜片、35陶瓷片、36复合铜片、37芯片区和电路、41发光芯片、42固晶层、43芯片区和电路、44陶瓷片、45微通道、46下铜片、47含荧光粉硅胶层、48金线、49封装硅胶层。11 light-emitting chip, 12 solid crystal layer, 13 metal film layer, 14 insulating layer, 15 metal substrate, 16 welding (bonding) layer, 17 heat sink, 18 silica gel layer containing phosphor, 19 gold wire, 20 packaging adhesive layer, 21 upper copper sheet, 22 lower copper sheet, 23 microchannel, 24 ceramic sheet, 25 chip area and circuit, 31 upper copper sheet, 32 lower copper sheet, 33 microchannel, 34 copper sheet, 35 ceramic sheet, 36 composite copper sheet , 37 chip area and circuit, 41 light-emitting chip, 42 solid crystal layer, 43 chip area and circuit, 44 ceramic sheet, 45 microchannel, 46 lower copper sheet, 47 silica gel layer containing fluorescent powder, 48 gold wire, 49 packaging silica gel layer .
具体实施方式Detailed ways
实施例一Embodiment one
下面结合附图进一步说明本实用新型的实施例:Further illustrate the embodiment of the present utility model below in conjunction with accompanying drawing:
参见图2a、图2b,选择两块厚度合适的高纯无氧铜铜片,上铜片21厚度为0.3mm,下铜片22厚度为5mm。Referring to Fig. 2a and Fig. 2b, select two pieces of high-purity oxygen-free copper sheets with appropriate thickness, the thickness of the
采用机械加工技术,在下铜片22表面制作截面为正方形的微通道23,正方形边长为2mm,参见图2c。微通道可布置为蛇形或M形单层或多层结构。Using mechanical processing technology, a
采用直接键合铜(DBC)工艺将两块铜片同时键合到一块氧化铝陶瓷片24的上下表面,陶瓷片24厚度为0.63mm,参见图2d。Two copper sheets are simultaneously bonded to the upper and lower surfaces of an alumina
采用金属腐蚀工艺,在上铜片21上形成芯片区和电路结构25(同时保护下铜片22),即制备出集成微通道结构的封装基板,参见图2e。Using a metal corrosion process, a chip area and a
实施例二Embodiment two
实施例二与实施例一相同,所不同是先选择两块厚度合适的高纯无氧铜铜片,其中上铜片31厚度为1mm,下铜片32厚度为3mm。
采用机械加工工艺在下铜片32表面制作出正方形微通道33,正方形边长为2mm。并采用金属扩散键合工艺把两块铜片键合到一起,参见图3a。A
采用DBC工艺把另一块铜片34(厚度为0.2mm)和复合铜片36同时键合到陶瓷片35的上下表面,陶瓷片材料为氮化铝,厚度为1mm,参见图3b。Another copper sheet 34 (thickness: 0.2mm) and
采用金属腐蚀工艺,在铜片34上形成芯片区和电路结构37(同时保护下铜片31),即制备出另一种集成微通道结构的封装基板,参见图3c。Using a metal corrosion process, a chip area and a
图4为采用本实用新型制备的LED封装基板结构图,发光芯片41通过固晶层42固定在芯片区43,发光芯片41通过金线48与电路连接,下铜片45采用DBC工艺与陶瓷片44键合在一起,下铜片45上设有微通道46,发光芯片41上表面设有含荧光粉硅胶层47,外部为封装硅胶层49。Fig. 4 is the structural diagram of the LED packaging substrate prepared by the utility model, the light-emitting
在上述实施例中,所述微通道结构的截面形状还可为长方形或半圆形,微通道可布置为蛇形或M形单层或多层结构。In the above embodiments, the cross-sectional shape of the microchannel structure can also be rectangular or semicircular, and the microchannels can be arranged in a serpentine or M-shaped single-layer or multi-layer structure.
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| CN101916757A (en) * | 2010-07-23 | 2010-12-15 | 广东昭信光电科技有限公司 | Microfluid cooling silicon wafer level LED illuminating system |
| CN102011969A (en) * | 2010-10-12 | 2011-04-13 | 江苏捷诚车载电子信息工程有限公司 | Combined modular backlight unit for flat panel display and helmet |
| WO2011060714A1 (en) * | 2009-11-18 | 2011-05-26 | 珠海晟源同泰电子有限公司 | Led light emitting module and manufacturing method thereof |
| CN102280540A (en) * | 2011-08-18 | 2011-12-14 | 上海亚明灯泡厂有限公司 | Light emitting diode (LED) module with microchannel radiator and method for making LED module |
| CN102655732A (en) * | 2012-05-12 | 2012-09-05 | 浙江大学 | Power module substrate with heat radiation structure |
| CN102820405A (en) * | 2012-07-17 | 2012-12-12 | 大连理工大学 | Integrated manufacturing method of silicon base plate and copper micro heat pipe of LED (light emitting diode) apparatus |
| WO2013091143A1 (en) * | 2011-12-21 | 2013-06-27 | 武汉飞恩微电子有限公司 | Microchannel direct bonded copper substrate and packaging structure and process of power device thereof |
| CN103748676A (en) * | 2011-05-31 | 2014-04-23 | 赛方塊股份有限公司 | Stacked module packaging structure using interposer |
| CN104253121A (en) * | 2013-06-28 | 2014-12-31 | 横山明聪 | Omni-directional light-emitting diode device and packaging method thereof |
| CN104755836A (en) * | 2012-08-22 | 2015-07-01 | 弗莱克斯-N-格特现代产品开发有限公司 | Micro-channel heat sink for LED headlamp |
| CN107994107A (en) * | 2017-11-28 | 2018-05-04 | 西安科锐盛创新科技有限公司 | A kind of great power LED double-decker packaging technology |
| CN108011027A (en) * | 2017-11-28 | 2018-05-08 | 西安科锐盛创新科技有限公司 | LED encapsulation structure and its method |
| CN108831986A (en) * | 2018-05-07 | 2018-11-16 | 深圳技术大学(筹) | Heat sink device and manufacturing method thereof |
| CN109119392A (en) * | 2018-08-06 | 2019-01-01 | 华进半导体封装先导技术研发中心有限公司 | The device encapsulation structure and preparation method thereof to be radiated by fluid channel |
| CN109920904A (en) * | 2019-04-10 | 2019-06-21 | 黄山学院 | Heat dissipation structure and processing technology of high-power GaN-based LED |
| CN110571200A (en) * | 2019-09-20 | 2019-12-13 | 清华大学 | Sunken flexible circuit integrated device and manufacturing method thereof |
| CN114256176A (en) * | 2021-11-23 | 2022-03-29 | 中国科学院微电子研究所 | High-power chip heat dissipation structure and preparation method thereof |
| CN114256177A (en) * | 2021-11-23 | 2022-03-29 | 中国科学院微电子研究所 | High-power chip heat dissipation structure and preparation method thereof |
| CN115863275A (en) * | 2022-12-09 | 2023-03-28 | 武汉利之达科技股份有限公司 | A kind of ceramic substrate containing heat dissipation copper tube and preparation method thereof |
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| CN101916757B (en) * | 2010-07-23 | 2011-12-21 | 广东昭信光电科技有限公司 | Microfluid cooling silicon wafer level LED illuminating system |
| CN101916757A (en) * | 2010-07-23 | 2010-12-15 | 广东昭信光电科技有限公司 | Microfluid cooling silicon wafer level LED illuminating system |
| CN102011969A (en) * | 2010-10-12 | 2011-04-13 | 江苏捷诚车载电子信息工程有限公司 | Combined modular backlight unit for flat panel display and helmet |
| CN103748676A (en) * | 2011-05-31 | 2014-04-23 | 赛方塊股份有限公司 | Stacked module packaging structure using interposer |
| CN102280540A (en) * | 2011-08-18 | 2011-12-14 | 上海亚明灯泡厂有限公司 | Light emitting diode (LED) module with microchannel radiator and method for making LED module |
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| CN103975432A (en) * | 2011-12-21 | 2014-08-06 | 武汉飞恩微电子有限公司 | Microchannel direct bonded copper substrate and packaging structure and process of power device thereof |
| CN102655732A (en) * | 2012-05-12 | 2012-09-05 | 浙江大学 | Power module substrate with heat radiation structure |
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| CN104755836A (en) * | 2012-08-22 | 2015-07-01 | 弗莱克斯-N-格特现代产品开发有限公司 | Micro-channel heat sink for LED headlamp |
| CN104253121A (en) * | 2013-06-28 | 2014-12-31 | 横山明聪 | Omni-directional light-emitting diode device and packaging method thereof |
| CN107994107A (en) * | 2017-11-28 | 2018-05-04 | 西安科锐盛创新科技有限公司 | A kind of great power LED double-decker packaging technology |
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| CN108831986A (en) * | 2018-05-07 | 2018-11-16 | 深圳技术大学(筹) | Heat sink device and manufacturing method thereof |
| CN109119392A (en) * | 2018-08-06 | 2019-01-01 | 华进半导体封装先导技术研发中心有限公司 | The device encapsulation structure and preparation method thereof to be radiated by fluid channel |
| CN109920904A (en) * | 2019-04-10 | 2019-06-21 | 黄山学院 | Heat dissipation structure and processing technology of high-power GaN-based LED |
| CN109920904B (en) * | 2019-04-10 | 2023-11-10 | 黄山学院 | Heat radiation structure of high-power GaN-based LED and processing technology |
| CN110571200A (en) * | 2019-09-20 | 2019-12-13 | 清华大学 | Sunken flexible circuit integrated device and manufacturing method thereof |
| CN114256176A (en) * | 2021-11-23 | 2022-03-29 | 中国科学院微电子研究所 | High-power chip heat dissipation structure and preparation method thereof |
| CN114256177A (en) * | 2021-11-23 | 2022-03-29 | 中国科学院微电子研究所 | High-power chip heat dissipation structure and preparation method thereof |
| CN115863275A (en) * | 2022-12-09 | 2023-03-28 | 武汉利之达科技股份有限公司 | A kind of ceramic substrate containing heat dissipation copper tube and preparation method thereof |
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