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CN207303051U - 基板处理装置 - Google Patents

基板处理装置 Download PDF

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Publication number
CN207303051U
CN207303051U CN201721067465.4U CN201721067465U CN207303051U CN 207303051 U CN207303051 U CN 207303051U CN 201721067465 U CN201721067465 U CN 201721067465U CN 207303051 U CN207303051 U CN 207303051U
Authority
CN
China
Prior art keywords
processing
exhaust
substrate processing
unit
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201721067465.4U
Other languages
English (en)
Chinese (zh)
Inventor
南田纯也
滨本启佑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of CN207303051U publication Critical patent/CN207303051U/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H10P72/0402—
    • H10P72/0448—

Landscapes

  • Engineering & Computer Science (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN201721067465.4U 2016-08-24 2017-08-24 基板处理装置 Active CN207303051U (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-163669 2016-08-24
JP2016163669A JP6675955B2 (ja) 2016-08-24 2016-08-24 基板処理装置

Publications (1)

Publication Number Publication Date
CN207303051U true CN207303051U (zh) 2018-05-01

Family

ID=61304531

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721067465.4U Active CN207303051U (zh) 2016-08-24 2017-08-24 基板处理装置

Country Status (3)

Country Link
JP (1) JP6675955B2 (ja)
KR (1) KR200496544Y1 (ja)
CN (1) CN207303051U (ja)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10303168A (ja) * 1997-04-28 1998-11-13 Dainippon Screen Mfg Co Ltd 基板処理装置
JP5146526B2 (ja) 2010-12-28 2013-02-20 東京エレクトロン株式会社 液処理装置
JP6033048B2 (ja) * 2012-11-15 2016-11-30 東京エレクトロン株式会社 液処理装置
JP6454629B2 (ja) * 2014-12-16 2019-01-16 東京エレクトロン株式会社 基板液処理装置

Also Published As

Publication number Publication date
KR20180000636U (ko) 2018-03-06
JP6675955B2 (ja) 2020-04-08
JP2018032724A (ja) 2018-03-01
KR200496544Y1 (ko) 2023-02-23

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