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CN1711310A - Process and apparatus for depositing plasma coating onto a container - Google Patents

Process and apparatus for depositing plasma coating onto a container Download PDF

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CN1711310A
CN1711310A CN 200380103073 CN200380103073A CN1711310A CN 1711310 A CN1711310 A CN 1711310A CN 200380103073 CN200380103073 CN 200380103073 CN 200380103073 A CN200380103073 A CN 200380103073A CN 1711310 A CN1711310 A CN 1711310A
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container
syringe
layer
plasma polymerization
plasma
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CN100347229C (en
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C·M·魏卡特
P·J·奥康纳
I-F·胡
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Dow Global Technologies LLC
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Abstract

The present invention describes a method and an apparatus for plasma coating the inside surface of a container to provide an effective barrier against gas transmission. The method provides a way to deposit rapidly and uniformly very thin and nearly defect-free layers of polyorganosiloxane and silicon oxide on the inner surface of a container to achieve more than an order of magnitude increase in barrier properties.

Description

在容器中沉积等离子体涂层的方法和设备Method and apparatus for depositing a plasma coating in a vessel

本发明涉及用来在容器中、更具体的是在容器的内表面,优选在塑料容器中沉积等离子体形成的涂层的方法和设备。The present invention relates to a method and apparatus for depositing a plasma-formed coating in a container, more particularly on the inner surface of a container, preferably in a plastic container.

多年来,塑料容器一直用来包装碳酸饮料和非碳酸饮料。消费者优选使用诸如聚对苯二甲酸乙二醇酯(PET)或聚丙烯(PP)的塑料,因为它们耐开裂、重量轻而且透明。不幸地是,由于对氧和二氧化碳具有比较高的透过性,限制了塑料包装的饮料的保存期。For many years, plastic containers have been used to package carbonated and non-carbonated beverages. Consumers prefer to use plastics such as polyethylene terephthalate (PET) or polypropylene (PP) because they are resistant to cracking, lightweight and transparent. Unfortunately, the relatively high permeability to oxygen and carbon dioxide limits the shelf life of beverages packaged in plastic.

致力于对塑料容器进行处理以赋予其比较低的氧和二氧化碳透过性的努力是已知的。比如,Laurent等人(WO 9917333)叙述了使用等离子体增强化学蒸汽沉积法(PECVD)给塑料容器的内表面涂布SiOx层的方法。一般说来,SiOx涂层对气体穿透提供了有效的阻隔,然而,对于塑料容器来说,SiOx对形成有效的气体穿透的阻隔是不够的。Efforts to treat plastic containers to render them relatively low oxygen and carbon dioxide permeability are known. For example, Laurent et al. (WO 9917333) describe the use of plasma enhanced chemical vapor deposition (PECVD) to coat the inner surface of plastic containers with a layer of SiOx . In general, SiOx coatings provide an effective barrier to gas permeation, however, for plastic containers, SiOx is not sufficient to form an effective barrier to gas permeation.

在美国专利5,641,559中,Namiki叙述了在PET和PP瓶子的外表面上沉积等离子体聚合硅化合物、然后沉积SiOx层的方法。聚合硅化合物的厚度为0.01~0.1μm,而SiOx层的厚度为0.03~0.2μm。虽然Namiki公开了等离子体聚合的硅化合物与SiOx层(其中x是1.5~2.0)的结合提供了比两者中任何单独的一层都更好的阻隔性能,但涂层的总沉积时间在15分钟左右,这对于商业的应用是不实际的。再者,Namiki所叙述的方法是有缺点的,因为有太多的等离子体聚合的单体沉积在所需基体以外的地方。这种不需要的沉积导致前体-涂层的转化率太低,造成污染和弄脏设备,还导致基体涂层不均匀。In US Patent No. 5,641,559, Namiki describes the deposition of a plasma polymerized silicon compound followed by a layer of SiOx on the outer surface of PET and PP bottles. The thickness of the polymeric silicon compound is 0.01-0.1 μm, and the thickness of the SiO x layer is 0.03-0.2 μm. Although Namiki discloses that the combination of a plasma-polymerized silicon compound and a SiOx layer (where x is 1.5-2.0) provides better barrier properties than either layer alone, the total deposition time of the coating is between 15 minutes or so, which is impractical for commercial applications. Furthermore, the method described by Namiki is disadvantageous in that too much plasma-polymerized monomer is deposited outside the desired substrate. This unwanted deposition results in too low a precursor-to-coating conversion, causing contamination and fouling of equipment, as well as non-uniform substrate coatings.

因此,希望发明一种用来均匀而迅速地涂布容器、特别是涂布塑料容器的方法,该方法能对气体穿透提供有效的阻隔,并且减少污染。Accordingly, it would be desirable to develop a method for uniformly and rapidly coating containers, especially plastic containers, which provides an effective barrier to gas penetration and reduces contamination.

通过给具有内表面的容器提供一种制备保护阻隔层的方法,本发明旨在解决现有技术的问题,此方法包括如下步骤:a)在部分真空下和在富氧的气氛中,使第一有机硅化合物在聚合条件下进行等离子体聚合以在容器内表面上沉积一层厚度均匀的聚有机硅氧烷层;以及b)在部分真空下,使第二有机硅化合物在聚合条件下进行等离子体聚合以沉积叠置于相同或不同的聚有机硅氧烷层上的氧化硅层。The present invention aims to solve the problems of the prior art by providing a method of preparing a protective barrier for a container having an inner surface, the method comprising the following steps: a) subjecting the first plasma polymerizing an organosilicon compound under polymerization conditions to deposit a polyorganosiloxane layer of uniform thickness on the inner surface of the container; and b) under partial vacuum, subjecting a second organosilicon compound to polymerization conditions Plasma polymerisation to deposit silicon oxide layers superimposed on the same or different polyorganosiloxane layers.

在另一方面,本发明是一种改进的用于在容器的表面上沉积等离子体形成的涂层的设备,该设备具有:a)具有腔、内侧和外测的外导电谐振筒体;b)在微波区能够提供电磁场、并与谐振腔的外测相连的发电器;c)位于外导电谐振筒体和发电器之间的波导,该波导能够直接将微波引向外导电谐振筒体的内侧;d)位于外导电谐振筒体中、微波可透过的圆柱形管,该管在一端闭合,在另一端打开,使得能够通入容器中;e)位于谐振腔中的至少一个导电板;和e)用于打开一端的盖子;其中改进之处包括固定于盖子的注射器,该注射器是多孔的、同轴的、在纵向往复的、或者围绕着纵轴转动,或者它们的组合,该注射器可以插入容器中,使其至少有部分延伸到容器内。In another aspect, the present invention is an improved apparatus for depositing a plasma-formed coating on a surface of a container having: a) an outer conductive resonant cylinder having a cavity, an inner side and an outer side; b ) a generator that can provide an electromagnetic field in the microwave region and is connected to the outside of the resonant cavity; c) a waveguide located between the outer conductive resonant cylinder and the generator, which can directly guide the microwave to the outer conductive resonant cylinder inside; d) a microwave-permeable cylindrical tube in the outer conductive resonant cylinder, which is closed at one end and open at the other end, allowing access to the container; e) at least one conductive plate in the resonant cavity and e) a cap for opening one end; wherein the improvement includes a syringe secured to the cap that is porous, coaxial, longitudinally reciprocating, or rotates about a longitudinal axis, or a combination thereof, the A syringe can be inserted into the container such that it extends at least partially into the container.

图1是用于涂布容器内侧的设备的说明图。FIG. 1 is an explanatory diagram of an apparatus for coating the inside of a container.

使用在WO 0066804中所述的设备,实施本发明的方法是有利的,虽然这不是唯一的,该设备是对图1做了一些修改而制造出的。该设备10具有外导电谐振腔12,其优选是筒状的(还指的是具有腔的外导电谐振筒体)。设备10包括一个与谐振腔12的外测相连的发电器14。此发电器14能够在微波区提供电磁场,更具体的是相当于频率2.45GHz的场。发电器14安装在谐振腔12外测上的盒子13上,它所提供的电磁辐射被与轴线A1充分垂直、沿着谐振腔12的半径延伸、并且通过位于谐振腔12的内侧的窗口而显露出的波导15带到谐振腔12中。The method of the invention is advantageously carried out using the apparatus described in WO 0066804, although this is not the only one, made with some modifications to FIG. 1 . The device 10 has an outer conductive resonant cavity 12, which is preferably cylindrical (also referred to as outer conductive resonant cylinder with cavity). Apparatus 10 includes a generator 14 connected to the outside of cavity 12 . This generator 14 is capable of providing an electromagnetic field in the microwave region, more specifically a field corresponding to a frequency of 2.45 GHz. The generator 14 is installed on the box 13 on the outside of the resonant cavity 12, and the electromagnetic radiation it provides is fully perpendicular to the axis A1, extends along the radius of the resonant cavity 12, and is exposed through a window located inside the resonant cavity 12 The outgoing waveguide 15 is brought into the resonant cavity 12.

管子16是位于谐振腔内侧、微波可透过的中空筒体,管子16在其一端被壁26封闭,在另一端打开使得能够伸入待被PECVD处理的容器中。容器24可以由任何不导电的材料,包括由玻璃、陶瓷、复合材料和塑料制造。容器24优选是塑料的,比如聚对苯二甲酸亚烷基二醇酯,包括聚对苯二甲酸乙二醇酯和聚对苯二甲酸丁二醇酯;聚烯烃,包括聚丙烯和聚乙烯;聚碳酸酯;聚氯乙烯;聚萘二酸乙二醇酯;聚偏氯乙烯;聚酰胺,包括尼龙;聚苯乙烯;聚氨酯;环氧树脂;丙烯酸树脂,包括聚甲基丙烯酸甲酯;和聚乳酸。The tube 16 is a microwave-permeable hollow cylinder inside the resonator, closed at one end by a wall 26 and open at the other end to allow access to the container to be treated by PECVD. Container 24 may be fabricated from any non-conductive material, including glass, ceramics, composites, and plastics. Container 24 is preferably plastic, such as polyalkylene terephthalates, including polyethylene terephthalate and polybutylene terephthalate; polyolefins, including polypropylene and polyethylene Polycarbonate; Polyvinyl chloride; Polyethylene naphthalate; Polyvinylidene chloride; Polyamides, including nylon; Polystyrene; Polyurethane; Epoxy resins; Acrylic resins, including polymethylmethacrylate; and polylactic acid.

然后,管子16的开放端被盖子20密封,使得可以在管子16所定义的空间中能够部分抽真空,在容器24的内侧建立低分压。将容器24在颈部保持在容器24的支架22上。在容器24的内侧和外侧都有利地施加部分真空,以避免容器24受到太大的压差而使容器24变形。在容器内侧和外侧的部分真空是不同的,在容器外侧保持部分真空,使得在不希望进行沉积的容器24的外侧不形成等离子体。优选地,容器24内侧的部分真空保持在20~200μar,而在容器24的外侧抽成20~100mbar、或者低于10μbar的部分真空。The open end of the tube 16 is then sealed by the cap 20 so that a partial vacuum can be drawn in the space defined by the tube 16 , establishing a low partial pressure inside the container 24 . The container 24 is held at the neck on the holder 22 of the container 24 . A partial vacuum is advantageously applied to both the inside and outside of the container 24 to avoid deformation of the container 24 by subjecting the container 24 to a pressure differential that is too large. The partial vacuum is different inside and outside the vessel, where a partial vacuum is maintained so that no plasma is formed outside the vessel 24 where deposition is not desired. Preferably, the partial vacuum inside the container 24 is maintained at 20-200 μar, while the partial vacuum outside the container 24 is evacuated to 20-100 mbar, or lower than 10 μbar.

盖子20与固定在容器24上的注射器27相配合,使得至少部分伸入到容器27中,以引入含有活性单体和载体的活性流体。可以将注射器27设计成比如是多孔的、开口的、纵向往复的、转动的、同轴的、以及它们的组合。正如在此所使用的,单词“多孔的”是使用其传统的意义,意味着其具有孔,还普遍指的是所有透气的通道,其可以包括一个或多个狭缝。注射器27的一个优选实施例是一种开口的多孔注射器,更优选是一种开口、具有分级的孔隙度,即具有不同等级的孔隙度的注射器,这种注射器优选伸展在几乎整个容器的长度上。注射器27的孔隙尺寸随着向着容器24的底部而扩大,使得在容器24内表面上的活性前体气体的流量均匀度实现优化。图1用不同程度的阴影来说明孔隙度的这个差别,此图说明在注射器的上三分之一27a的孔隙度低于该注射器的中三分之一27b的孔隙度,而中三分之一27b的孔隙度低于该注射器下三分之一27c的孔隙度。注射器27的孔隙度一般为0.5μm~1mm。然而,分级可以采取各种形式,从所说明的阶梯式到真正的连续式。注射器27横断面的直径可以从刚好小于容器24最窄部分的内径(一般从40mm开始)至1mm之间变化。The cap 20 cooperates with a syringe 27 secured to the container 24 so as to protrude at least partially into the container 27 to introduce the active fluid containing the active monomer and carrier. The syringe 27 can be designed, for example, to be porous, open, longitudinally reciprocating, rotating, coaxial, and combinations thereof. As used herein, the word "porous" is used in its traditional sense, meaning that it has holes, and also generally refers to any gas-permeable passage, which may include one or more slits. A preferred embodiment of the syringe 27 is an open porous syringe, more preferably an open, graded porosity, i.e. a syringe with different levels of porosity, which preferably extends substantially the entire length of the container . The pore size of the injector 27 increases towards the bottom of the container 24 to optimize the flow uniformity of the reactive precursor gas on the inner surface of the container 24 . Figure 1 illustrates this difference in porosity with varying degrees of shading, which shows that the porosity in the upper third 27a of the syringe is lower than the porosity in the middle third 27b of the syringe, which - 27b has a lower porosity than the lower third of the syringe 27c. The porosity of the syringe 27 is generally 0.5 μm to 1 mm. Grading, however, can take various forms, from the illustrated stepwise to truly continuous. The diameter of the cross-section of the syringe 27 can vary from just below the inner diameter of the narrowest part of the container 24 (typically starting at 40 mm) to 1 mm.

设备10在谐振腔中还包括至少一个导电板,用来给谐振腔的几何形状进行调谐,以对容器24中的等离子体分布进行控制。虽然并非必要,但更优选如在图1中所说明的,设备10包括两个环形的导电板28和30,它们位于谐振腔12中,并且围绕着管子16。导电板28和30互相移动,使得它们在轴向附着在管子16的两侧,波导15通过此管子通到谐振腔12中。导电板28和30的设计使得能够对电磁场进行调节,在沉积的过程中点燃和维持等离子体。使用滑杆32和34可以调节导电板28和30的位置。Apparatus 10 also includes at least one conductive plate in the cavity for tuning the geometry of the cavity to control the plasma distribution in vessel 24 . More preferably, though not required, as illustrated in FIG. The conductive plates 28 and 30 are moved relative to each other so that they are attached axially on either side of the tube 16 through which the waveguide 15 leads into the cavity 12 . The design of the conductive plates 28 and 30 enables the modulation of the electromagnetic field to ignite and maintain the plasma during deposition. The position of conductive plates 28 and 30 can be adjusted using slide bars 32 and 34 .

可以按照如下的方法实现聚有机硅氧烷和SiOx层的沉积。使包括平衡气体和工作气体(一起称为全部气体混合物)的气体混合物流经注射器27,其浓度和电功密度以及时间都足以形成具有所需气体阻隔性能的涂层。Deposition of polyorganosiloxane and SiOx layers can be achieved as follows. A gas mixture comprising a balance gas and a working gas (collectively referred to as the total gas mixture) is passed through injector 27 at a concentration and power density and for a time sufficient to form a coating having the desired gas barrier properties.

正如在此所使用的,术语“工作气体”指的是一种活性物质,在标准温度和压力下,它们可以是也可以不是气体,能够聚合在基体上形成涂层。适当的工作气体的例子包括诸如硅烷、硅氧烷和硅氮烷的有机硅化合物。硅烷的例子包括四甲基硅烷、三甲基硅烷、二甲基硅烷、甲基硅烷、二甲氧基二甲基硅烷、甲基三甲氧基硅烷、四甲氧基硅烷、甲基三乙氧基硅烷、二乙氧基二甲基硅烷、甲基三乙氧基硅烷、三乙氧基乙烯基硅烷、四乙氧基硅烷(也叫作原硅酸四乙酯,即TEOS)、二甲氧基甲基苯基硅烷、苯基三甲氧基硅烷、3-缩水甘油氧丙基三甲氧基硅烷、3-甲基丙烯酰丙基三甲氧基硅烷、二乙氧基甲基苯基硅烷、三(2-甲氧基乙氧基)乙烯基硅烷、苯基三乙氧基硅烷和二甲氧基二苯基硅烷。硅氧烷的例子包括四甲基二硅氧烷、六甲基二硅氧烷和八甲基三硅氧烷。硅氮烷的例子包括六甲基硅氮烷和四甲基硅氮烷。硅氧烷是优选的工作气体,而四甲基二硅氧烷(TMDSO)是特别优选的。As used herein, the term "working gas" refers to a reactive substance, which may or may not be a gas, at standard temperature and pressure, capable of polymerizing on a substrate to form a coating. Examples of suitable working gases include organosilicon compounds such as silanes, siloxanes and silazanes. Examples of silanes include tetramethylsilane, trimethylsilane, dimethylsilane, methylsilane, dimethoxydimethylsilane, methyltrimethoxysilane, tetramethoxysilane, methyltriethoxy Diethoxysilane, Diethoxydimethylsilane, Methyltriethoxysilane, Triethoxyvinylsilane, Tetraethoxysilane (also known as Tetraethyl Orthosilicate, or TEOS), Dimethyl Oxymethylphenylsilane, phenyltrimethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-methacryloylpropyltrimethoxysilane, diethoxymethylphenylsilane, Tris(2-methoxyethoxy)vinylsilane, phenyltriethoxysilane and dimethoxydiphenylsilane. Examples of siloxanes include tetramethyldisiloxane, hexamethyldisiloxane and octamethyltrisiloxane. Examples of silazanes include hexamethylsilazane and tetramethylsilazane. Siloxanes are the preferred working gases, with tetramethyldisiloxane (TMDSO) being particularly preferred.

正如在此使用的,术语“平衡气体”是携带工作气体通过电极和最终到达基体上的活性或非活性气体。适当的平衡气体的例子包括空气、O2、CO2、NO、N2O以及它们的组合。氧气(O2)是优选的平衡气体。As used herein, the term "balance gas" is the reactive or non-reactive gas that carries the working gas through the electrodes and ultimately onto the substrate. Examples of suitable balance gases include air, O2 , CO2 , NO, N2O , and combinations thereof. Oxygen ( O2 ) is the preferred balance gas.

在第一等离子体聚合步骤中,在富氧气氛中,使第一有机硅化合物在容器的内表面上进行等离子体聚合,容器的内表面可以预先进行表面改性,比如进行粗糙化、交联或表面氧化,也可以不预先进行表面改性。正如在此使用的,术语“富氧气氛”意味着平衡气体含有至少20%的氧,更优选含有至少50%的氧。因此,对于本发明的目的,空气是合适的平衡气体,但N2不是。In the first plasma polymerization step, in an oxygen-enriched atmosphere, the first organosilicon compound is plasma-polymerized on the inner surface of the container, and the inner surface of the container can be surface-modified in advance, such as roughening, cross-linking Or surface oxidation, or no surface modification in advance. As used herein, the term "oxygen-enriched atmosphere" means that the equilibrium gas contains at least 20% oxygen, more preferably at least 50% oxygen. Thus, for the purposes of this invention, air is a suitable equilibrium gas, but N2 is not.

在平衡气体占全部气体混合物的摩尔百分比直至80摩尔%以前,聚有机硅氧烷层的质量实质上与此百分比无关,从此点开始,该层的质量实质上变差。用于制备聚有机硅氧烷层的等离子体的功率密度优选大于10MJ/kg,更优选大于20MJ/kg,最优选大于30MJ/kg;优选小于1,000MJ/kg,更优选小于500MJ/kg,最优选小于300MJ/kg。The mass of the polyorganosiloxane layer is substantially independent of this percentage until the equilibrium gas constitutes a mole percent of the total gas mixture up to 80 mole percent, at which point the quality of the layer deteriorates substantially. The power density of the plasma used to prepare the polyorganosiloxane layer is preferably greater than 10MJ/kg, more preferably greater than 20MJ/kg, most preferably greater than 30MJ/kg; preferably less than 1,000MJ/kg, more preferably less than 500MJ/kg, most preferably Preferably less than 300 MJ/kg.

在此第一步中,等离子体优选持续小于5秒,更优选小于2秒,最优选小于1秒;而优选长于0.1妙,更优选长于0.2秒,以形成厚度优选小于500,更优选小于200,最优选小于100;优选大于25,更优选大于50的聚有机硅氧烷层。In this first step, the plasma preferably lasts less than 5 seconds, more preferably less than 2 seconds, most preferably less than 1 second; and preferably longer than 0.1 seconds, more preferably longer than 0.2 seconds, to form a thickness preferably less than 500 Å, more preferably less than 200 Å, most preferably less than 100 Å; preferably greater than 25 Å, more preferably greater than 50 Å polyorganosiloxane layer.

优选以小于500/sec,更优选小于200/sec,优选大于50/sec,更优选大于100/sec的沉积速度实施第一等离子体聚合步骤。The first plasma polymerisation step is preferably carried out at a deposition rate of less than 500 Å/sec, more preferably less than 200 Å/sec, preferably greater than 50 Å/sec, more preferably greater than 100 Å/sec.

聚有机硅氧烷层优选的化学组成是SiOxCyHz,这里x为1.0~2.4,y为0.2~2.4,而z大于或等于0,更优选不大于4。The preferred chemical composition of the polyorganosiloxane layer is SiO x C y H z , where x is 1.0-2.4, y is 0.2-2.4, and z is greater than or equal to 0, more preferably not greater than 4.

在第二等离子体聚合步骤中,可以与第一有机硅化合物相同或者不同的第二有机硅化合物,在如上所述的聚有机硅氧烷层上进行等离子体聚合,形成氧化硅层,或者不同的聚有机硅氧烷层。换句话说,具有不同化学组成的一层以上的聚有机硅氧烷层是可能的,有时是有利的。氧化硅层优选是SiOx层,此处x为1.5~2.0。In the second plasma polymerization step, the second organosilicon compound, which may be the same as or different from the first organosilicon compound, is plasma-polymerized on the polyorganosiloxane layer as described above to form a silicon oxide layer, or it may be different from the first organosilicon compound. polyorganosiloxane layer. In other words, more than one polyorganosiloxane layer having a different chemical composition is possible and sometimes advantageous. The silicon oxide layer is preferably a SiO x layer, where x is 1.5-2.0.

对于第二等离子体聚合步骤,平衡气体对气体混合物的摩尔比优选对平衡气体和工作气体是化学当量的。比如,在平衡气体是氧,而工作气体是TMDSO的情况下,优选的平衡气体对全部气体的摩尔比为85~95%。用于制备氧化硅层的等离子体的功率密度优选大于10MJ/kg,更优选大于20MJ/kg,最优选大于30MJ/kg;优选小于500MJ/kg,更优选小于300MJ/kg。For the second plasma polymerisation step, the molar ratio of balance gas to gas mixture is preferably stoichiometric for balance gas and working gas. For example, when the balance gas is oxygen and the working gas is TMDSO, the preferred molar ratio of the balance gas to the total gas is 85-95%. The power density of the plasma used to prepare the silicon oxide layer is preferably greater than 10MJ/kg, more preferably greater than 20MJ/kg, most preferably greater than 30MJ/kg; preferably less than 500MJ/kg, more preferably less than 300MJ/kg.

在此第二步中,等离子体持续优选小于10秒,更优选小于5秒,优选长于1秒,以形成厚度小于500,更优选小于300,最优选小于200,优选大于50,更优选大于100的氧化硅涂层。In this second step, the plasma lasts preferably less than 10 seconds, more preferably less than 5 seconds, preferably longer than 1 second, to form a thickness of less than 500 Å, more preferably less than 300 Å, most preferably less than 200 Å, preferably greater than 50 Å, A silicon oxide coating greater than 100 Å is more preferred.

优选以小于500/sec,更优选小于200/sec,优选大于50/sec,更优选大于100/sec的沉积速度实施第二等离子体聚合的步骤。The second plasma polymerisation step is preferably carried out at a deposition rate of less than 500 Å/sec, more preferably less than 200 Å/sec, preferably greater than 50 Å/sec, more preferably greater than 100 Å/sec.

第一等离子体聚合层和第二等离子体聚合层的总厚度优选小于1,000,更优选小于500,更优选小于400,最优选小于300,优选大于100。等离子体聚合的总沉积时间(即用于第一和第二层的沉积时间)优选小于20秒,更优选小于10秒,最优选小于5秒。The total thickness of the first plasma polymerized layer and the second plasma polymerized layer is preferably less than 1,000 Å, more preferably less than 500 Å, more preferably less than 400 Å, most preferably less than 300 Å, preferably greater than 100 Å. The total deposition time for plasma polymerization (ie the deposition time for the first and second layers) is preferably less than 20 seconds, more preferably less than 10 seconds, most preferably less than 5 seconds.

意外地发现,可以迅速地在容器的内表面上沉积厚度均匀的很薄的涂层,以对比如O2和CO2等小分子的渗透形成阻隔层。正如在此所使用的,术语“厚度均匀”指的是在整个涂布区中涂层厚度的变化小于25%。优选涂层实质上没有开裂或小孔。优选阻隔改善因子(BIF,是未处理瓶子与已处理瓶子对特定气体的透过率之比)至少是10,更优选至少是20。It was unexpectedly found that a very thin coating of uniform thickness can be rapidly deposited on the inner surface of a container to form a barrier to the permeation of small molecules such as O2 and CO2 . As used herein, the term "uniform thickness" means that the thickness of the coating varies by less than 25% over the entire coating area. Preferably the coating is substantially free of cracks or pinholes. Preferably the Barrier Improvement Factor (BIF, the ratio of the transmission rate of an untreated bottle to a treated bottle for a specific gas) is at least 10, more preferably at least 20.

下面的实施例用于说明的目的,并不对本发明的范围构成限制。The following examples are for illustrative purposes and do not limit the scope of the invention.

实施例-在PET瓶子上制备等离子体涂层Example - Preparation of plasma coatings on PET bottles

在此实施例中使用如在图1中所示的设备。在此实施例中,容器24是一个适合于碳酸饮料的500mL的PET瓶。瓶24插入位于谐振腔12中的管子16中。盖子12与固定在瓶子上的开口的分级多孔注射器27相适应,使得注射器27伸到离瓶底1cm处。通过将三段2.5”(6.3cm)长的多孔中空不锈钢管(外径0.25”(0.64cm),内径0.16”(0.41cm))焊接在一起制造此注射器,每段管子具有不同的孔隙度,形成如在图1中所说明的单个7.5”(19cm)分级注射器。此注射器上三分之一27a的孔隙尺寸是20μm,注射器中三分之一27b的孔隙尺寸是30μm,而注射器下三分之一27c的孔隙尺寸是50μm(多孔管购自Mott公司)。An apparatus as shown in FIG. 1 is used in this example. In this embodiment, container 24 is a 500 mL PET bottle suitable for carbonated beverages. The vial 24 is inserted into the tube 16 located in the resonant cavity 12 . The cap 12 is fitted with an open stepped multi-hole syringe 27 secured to the bottle so that the syringe 27 protrudes 1 cm from the bottom of the bottle. The syringe was fabricated by welding together three 2.5" (6.3cm) long sections of porous hollow stainless steel tubing (0.25" (0.64cm) OD, 0.16" (0.41cm) ID), each with a different porosity, A single 7.5" (19 cm) stepped syringe was formed as illustrated in Figure 1 . The pore size of the upper third 27a of the syringe is 20 μm, the pore size of the middle third 27b of the syringe is 30 μm, and the pore size of the lower third 27c of the syringe is 50 μm (porous tubing purchased from Mott).

在瓶子24的内侧和外侧都建立部分真空。瓶子24的外侧保持在80mbar,而其内侧开始时保持在10μbars。按照如下的方法,在瓶子24的内表面上均匀地沉积一个有机硅氧烷层。以10sccm的速度使TMDSO和O2一起流过注射器27,由此使容器内侧的分压升高。一旦分压达到40μbars(一般小于1秒),施加150W的功率(相当于功率密度为120MJ/kg)0.5秒,形成厚度为50的有机硅氧烷层。A partial vacuum is established both inside and outside the bottle 24 . The outside of the bottle 24 was kept at 80 mbar, while its inside was initially kept at 10 μbars. A layer of organosiloxane was uniformly deposited on the inner surface of the bottle 24 as follows. TMDSO and O2 were flowed together through syringe 27 at a rate of 10 sccm, thereby raising the partial pressure inside the vessel. Once the partial pressure reaches 40μbars (generally less than 1 second), apply a power of 150W (equivalent to a power density of 120MJ/kg) for 0.5 seconds to form an organosiloxane layer with a thickness of 50 Å.

按照下面的方法,在该有机硅氧烷层上均匀地沉积一个SiOx层。TMDSO和O2分别以10sccm和80sccm的流量一起流过注射器27,由此使瓶24内侧的分压升高。一旦分压达到60μbars(一般小于1秒),施加350W的功率(相当于功率密度为120MJ/kg)3.0秒,形成厚度为150的SiOx层。A SiOx layer was uniformly deposited on the organosiloxane layer according to the following method. TMDSO and O 2 flow together through the syringe 27 at flow rates of 10 sccm and 80 sccm, respectively, thereby raising the partial pressure inside the bottle 24 . Once the partial pressure reaches 60μbars (generally less than 1 second), a power of 350W (equivalent to a power density of 120MJ/kg) is applied for 3.0 seconds to form a SiO x layer with a thickness of 150 Å.

用阻隔改善因子(BIF)表示阻隔性能,它表示未涂布瓶子的氧气透过率和已涂布瓶子的氧气透过率之比。使用Oxtran 2/20氧透过装置(购自Mocon公司)测量的BIF是27。这相当于氧气透过率为0.0017cm3/瓶/天。Barrier properties are expressed by the barrier improvement factor (BIF), which expresses the ratio of the oxygen transmission rate of the uncoated bottle to the oxygen transmission rate of the coated bottle. The BIF was 27 as measured using an Oxtran 2/20 oxygen permeation device (available from Mocon). This corresponds to an oxygen transmission rate of 0.0017 cm 3 /bottle/day.

Claims (9)

1. be used to the container with internal surface to prepare the method for protecting barrier layer, this method comprises the steps:
A) under partial vacuum and in the atmosphere of oxygen enrichment, make first silicoorganic compound under polymerizing condition, carry out plasma polymerization with the uniform organopolysiloxane layer of deposition one layer thickness on inner surface of container; And
B) under partial vacuum, make second silicoorganic compound under polymerizing condition, carry out plasma polymerization and be stacked and placed on the uniform silicon oxide layer of thickness on the identical or different organopolysiloxane layer with deposition.
2. method according to claim 1 is wherein carried out the plasma polymerization step with the so concentration and the time of the power density and first and second silicoorganic compound, makes the total thickness of organopolysiloxane and silicon oxide layer less than 400 .
3. method according to claim 1 and 2, wherein with greater than 100 /sec, implement the first plasma polymerization step less than the sedimentation velocity of 200 /sec, implement the second plasma polymerization step under the sedimentation velocity of 60 /sec being not less than 30 /sec and being not more than, and wherein total depositing time of plasma polymerization is not more than 10 seconds.
4. according to the arbitrary described method of claim 1-3, wherein use general formula SiO xC yH zThe expression organopolysiloxane, wherein x is 1.0~2.4, y is 0.2~2.4, and z is not more than 4, uses SiO xThe expression silicon oxide layer, wherein x is 1.5~2.0, and wherein this container contains the plastics of polyethylene terephthalate, polybutylene terephthalate, polyethylene, polypropylene or poly(lactic acid).
5. according to the arbitrary described method of claim 1-4, wherein send into the oxygen and first and second silicoorganic compound by syringe reciprocal, that rotate or co-axial or their combinations porous, opening, vertical.
6. method according to claim 5, wherein send into the oxygen and first and second silicoorganic compound by being arranged in container and being stretched over almost the classifying porous syringe of opening of entire container length, wherein porosity increases being staged or continous way on the direction of container bottom.
7. method according to claim 6, the inboard of this container and outside retaining part vacuum all wherein, wherein the partial vacuum of container inside is extremely about 200 μ bar of about 20 μ bar, and the partial vacuum of outside of containers is that 20mbar is to about 100mbar or less than 10 μ bar.
8. the equipment of the coating that deposition plasma forms on a kind of improved surface that is used at container, this equipment has:
A) have chamber, inboard and the outer outer conduction resonant cylindrical shell of surveying;
B) electric organ that can electromagnetic field is provided in the microwave region and link to each other with the outer survey of resonator cavity;
C) outside waveguide between conduction resonant cylindrical shell and the electric organ, the inboard of outer conduction resonant cylindrical shell can be directly guided microwave in this waveguide;
D) be arranged in the cylindrical tube of outer conduction resonant cylindrical shell to microwave, this pipe is at one end closed, opens at the other end, makes it possible to feed in the container;
E) be arranged at least one conducting plates of resonator cavity; With
F) be used to open the lid of an end;
Wherein improvements comprise the syringe that is fixed in lid, this syringe be porous, co-axial, vertically reciprocal or rotate round the longitudinal axis, perhaps their combination, this syringe can insert in the container, makes it have at least part to extend in the container.
9. equipment according to claim 8, wherein syringe is classifying porous and opening, and wherein porosity is being staged or continuous mode increases in the direction towards the injector orifice part.
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