CN1614758A - Precisively butting apparatus for photoelectric device package - Google Patents

Abstract

The present invention provides a precision docking device for optoelectronic device packaging, which is composed of: a base (1), a two-way translation platform, four positioning seats (4, 7, 23, 26), a moving platform (9) , fixed-length rod (6, 19, 20, 24), upper optical fiber clamping device (13), lower optical fiber clamp (10) etc.; one end of the fixed-length rod (6, 19, 20, 24) is connected to the The fixed length rod (6, 20) is connected with the positioning seat (4, 23) through a rotating pair at the other end of the fixed length rod (6, 20), and the fixed length rod (19, 24) is connected with the fixed length rod (19, 24) through a Hooke hinge or a spherical hinge. The positioning seats (7, 26) are connected to form a space parallel closed-chain mechanism. The invention has the advantages of simple and compact structure, simple control, high motion resolution, motion decoupling, good dynamic performance, etc., and can realize high-resolution micro-motion butt joint packaging operation to improve the packaging yield of optoelectronic devices.

Description

A precision docking device for optoelectronic device packaging

Technical field

The invention belongs to the technical field of optical-mechanical-electrical integration, and in particular relates to the precise packaging technology of optoelectronic devices.

Background technique

Packaging has a great relationship with the reliability of optoelectronic devices, and the packaging cost of optoelectronic integrated devices accounts for about 70-90% of the total cost. Automatic docking device and technology is the key technology of optoelectronic device packaging, which can reduce production cost, improve production efficiency and ensure device quality. In the research of precision micro-motion docking mechanism, the parallel mechanism has attracted people's attention, mainly because the parallel mechanism has the following advantages: (1) compact structure (2) simple design and processing, and low sensitivity to temperature (3) drive It can be placed on the pedestal (4) The error accumulation and amplification are small (5) The natural frequency is high, which avoids the uncontrollable repetition error caused by vibration.

Stoughton (Stoughton) designed a microrobot consisting of two parallel mechanisms, each composed of six piezoelectric elements; Hudgens (Hudgens) and Tesar (Tesar) proposed a complete Parallel Stewart platform micro-movement robot; some domestic units have also developed a six-degree-of-freedom parallel micro-robot based on a general Stewart structure (Harbin Institute of Technology), a hybrid six-degree-of-freedom micro-robot (Beijing Aerospace Engineering Co., Ltd. University), cell manipulation micro-robots based on Delta mechanism (Tongji University) and parallel micro-motion decoupling structure micro-robots (Yanshan University). They have contributed to the development and progress of micro-robots, and some of their research results have been patented. At present, there are not many literature reports on the automatic packaging of optoelectronic devices. As far as the inventor knows, there are almost no patent documents on precision docking devices for packaging optoelectronic devices.

Contents of the invention

The purpose of the present invention is to provide a precision docking device for optoelectronic device packaging. This device has the advantages of simple and compact structure, simple control, high motion resolution, motion decoupling, and good dynamic performance. It can realize high-resolution Micro-movement butt packaging operation to improve the packaging yield of optoelectronic devices.

The technical scheme of the precision docking device for optoelectronic device packaging of the present invention is as follows:

A precision butt joint device for optoelectronic device packaging provided by the present invention, as shown in Figure 1, is characterized in that it is composed of: a base (1), a two-way translation platform (2, 27), four positioning seats ( 4, 7, 23, 26), moving platform (9), fixed length rod (6, 19, 20, 24), upper optical fiber clamping device, lower optical fiber clamp (10), and laser welding torch (11, 16, 22 ) composition; said fixed-length rods are 4, and one end of the fixed-length rods (6, 19, 20, 24) links with the moving platform (8) through a ball joint, and the other end of the fixed-length rods (6, 20) One end is connected with the positioning seat (4, 23) through a rotating pair, and the fixed length rod (19, 24) is connected with the positioning seat (7, 26) through a Hooke hinge or a spherical hinge, thereby forming a space parallel closed-chain mechanism; Said two-way translation platform can be located above the base (1) ((2, 27) as shown in Figure 1), or on the top of the frame ((38, 40) as shown in Figure 2); Said lower optical fiber clamp (10) is fixed on the moving platform (9), and the upper optical fiber clamping device is composed of an arc-shaped flexible spring 12, an optical fiber clamp 13, and a micro-displacement driver 14, and is located at the top of the frame; the laser welding torch (11 , 16, 22) are located on the ring bracket (17) and become 120 ° evenly distributed mutually, and the ring bracket (17) is rigidly connected with the frame.

It should be noted:

The positioning seat is composed of a parallel plate flexible moving pair 67, a micro-displacement driver 66, and a positioning seat body 65, as shown in Figure 5;

The above-mentioned spherical hinge, Hooke hinge and revolving pair are all flexible hinge structures; said micro-displacement drivers (14, 66) can be piezoelectric ceramic micro-displacement drivers or other types of micro-displacement drivers;

The above-mentioned clamps (10, 13) for fixing optical fibers can be driven by stepping motors or pneumatically; the upper optical fiber clamping device is composed of an arc-shaped flexible spring 12, an optical fiber clamp 13, and a micro-displacement driver 14, which can realize the Y-axis direction. micro-translation;

The said two-way translation platform can realize translation in X and Y directions under the drive of stepping motor;

It should be noted that two CCD cameras (15, 18) can be arranged on the ring bracket (17), which are respectively used to detect alignment errors of the optical fiber in the X-axis and Y-axis directions; , for fusion welding of butt optical fibers.

Since the present invention adopts a parallel mechanism with four degrees of freedom in space, the parallel mechanism with four degrees of freedom in space has the characteristics of high motion precision and decoupling motion, as shown in FIG. 3 . Therefore, the precision docking device for optoelectronic device packaging provided by the present invention has the advantages of simple and compact structure, simple control, high motion resolution, motion decoupling, and good dynamic performance. It can realize high-resolution micro-motion docking packaging operations, To improve the packaging yield of optoelectronic devices.

Drawings and descriptions of drawings:

Accompanying drawing 1 is the overall structure schematic diagram of Embodiment 1 of the precision docking device for optoelectronic device packaging of the present invention

In the figure 1. base, 2. X-direction mobile platform, 3. stepping motor, 4. positioning seat, 5. flexible rotating pair, 6. fixed length rod, 7. positioning seat, 8. flexible ball joint, 9. Moving platform, 10. Fiber optic fixture, 11. Laser welding torch, 12. Arc flexible spring, 13. Fiber optic fixture, 14. Micro displacement driver, 15. CCD camera, 16. Laser welding torch, 17. Ring bracket, 18. CCD Camera, 19. fixed length rod, 20. fixed length rod, 21. flexible ball hinge, 22. laser welding torch, 23. positioning seat, 24. fixed length rod, 25 flexible Hooke hinge or spherical hinge, 26. positioning seat, 27. Y direction moving platform, 28. Stepping motor.

Accompanying drawing 2 is the overall structure schematic diagram of Embodiment 2 of the precision docking device for optoelectronic device packaging of the present invention

In the figure, 29. base, 30. positioning seat, 31. flexible rotating pair, 32. fixed length rod, 33. positioning seat, 34. flexible ball joint, 35. moving platform, 36. optical fiber fixture, 37. stepping motor , 38. Y-direction mobile platform, 39. Laser welding torch, 40. X-direction mobile platform, 41. Stepper motor, 42. Arc-shaped flexible spring, 43. CCD camera, 44. Micro-displacement driver, 45. Laser welding torch, 46 .Fiber optic fixture, 47. CCD camera, 48. Ring bracket, 49. Fixed length rod, 50. Laser welding torch, 51. Fixed length rod, 52. Flexible ball hinge, 53. Positioning seat, 54. Fixed length rod, 55 . Flexible Hooke hinge or spherical hinge, 56. Positioning seat.

Accompanying drawing 3 is a schematic diagram of a parallel mechanism with four degrees of freedom in space

In the figure, C ₁ , C ₂ , C ₃ , and C ₄ represent spherical joints, B ₁ , B ₃ represent Hooke hinges or spherical joints, and B ₂ , B ₄ represent rotating joints.

Accompanying drawing 4 is the schematic diagram of the precise fine-tuning mechanism of the laser welding torch

Among the figure 57. rotating pin, 58. laser welding torch, 59. small snap ring, 60. fine-tuning screw, 61. large snap ring, 62. rotating pin, 63. supporting beam, 64. bearing seat.

Accompanying drawing 5 is a schematic diagram of the positioning seat structure

Accompanying drawing 6 is a schematic diagram of the A-A sectional structure of the positioning seat in the accompanying drawing 5

Among the figure, 65 is the seat body of the positioning seat, 66 is the micro-displacement driver, and 67 is the flexible moving pair of the parallel plate.

Detailed ways

The structure and working principle of the two embodiments of the precision docking device for optoelectronic device packaging based on the four-degree-of-freedom parallel mechanism of the present invention will be described in detail below with reference to the accompanying drawings.

Embodiment one

Accompanying drawing 1 is an embodiment of the present invention. This precision docking device for optoelectronic device packaging consists of a base (1), a moving platform (9), fixed length rods (6, 19, 20, 24), positioning seats (4, 7, 23, 26), micro It is composed of a displacement driver, a two-way translation platform (2, 27), an optical fiber clamp (10, 13) and the like. The base 1 and the moving platform 9 are connected by 4 fixed-length rods, one end of the two fixed-length rods (6, 20) is connected with the parallel plate moving pair on the positioning seat (4, 23) through the rotating pair, The other end is connected with the moving platform (9) through a ball joint, and one end of the other two fixed-length rods (19, 24) is connected with the parallel plate moving pair on the positioning seat (7, 26) through a Hooke joint or a ball joint. The other end is connected with the moving platform (9) through a ball joint, thereby forming a spatial parallel mechanism. The so-called revolving joints, Hooke hinges or spherical joints all refer to flexible hinges, and the moving pairs of parallel plates are all driven by micro-displacers. Both the moving platform (9) and the upper frame are provided with clamps (10, 13) for clamping optical fibers, wherein the optical fiber clamps (13) on the upper frame can be driven by a micro-displacement driver on one side to realize Y-axis direction micro-movement, the other side is provided with an arc-shaped flexible spring (12), and the seat body of the micro-displacement driver (14) and the seat body of the arc-shaped flexible spring (12) are rigidly connected with the upper frame. A two-way translation platform (2, 27) is installed on the base, and the two-way translation platform can realize translation in the X and Y axis directions under the drive of the stepper motor (3, 28), and the positioning seat (4, 7, 23 , 26), fixed length rods (6, 19, 20, 24), moving platform (9) and the optical fiber clamps (10) on the moving platform all can move along with the movement of two-way translation platform (2, 27). The ring bracket (17) is provided with two CCD cameras (15, 18) for providing precise position feedback information, and the ring bracket (17) is also provided with three laser welding torches (11, 16, 22), for fusion welding of butt-connected optical fibers, the precision fine-tuning mechanism of the laser welding torches (11, 16, 22) is shown in FIG. 4 .

Embodiment two

Accompanying drawing 2 is another embodiment of the present invention. It consists of a base (29), a moving platform (35), a fixed length rod (32, 49, 51, 54), a positioning seat (30, 33, 53, 56), a micro-displacement driver, and a two-way translation platform (38, 40 ) and optical fiber clamps (36, 46) and other components. The base 29 and the moving platform 35 are connected by four fixed-length rods, one end of the two fixed-length rods (32, 51) is connected with the parallel plate moving pair on the positioning seat through a rotating pair, and the other end is connected through a ball joint. Linked with the moving platform (35), one end of the other two fixed length rods (49, 54) is connected with the parallel plate moving pair on the positioning seat through a Hooke hinge or a spherical hinge, and the other end is connected with the moving platform (35) through a spherical hinge. ) to form a spatial parallel mechanism. The positioning seat is provided with a micro-displacement driver, and the so-called revolving joint, Hooke hinge or ball joint all refer to flexible hinges, and the parallel plate moving pair is driven by a micro-displacement device. Both the moving platform (35) and the upper frame are provided with optical fiber clamps (36, 46), wherein the optical fiber clamps (46) on the upper frame can be driven by a micro-displacement driver (44) on one side to realize the Y-axis Direction micro-movement, the other side is provided with circular arc elastic pair (42), the base body of micro-displacement driver (44) and the base body of arc flexible spring (42) are rigidly connected with upper frame. The upper frame is provided with a two-way translation platform (38, 40), which can drive the micro-displacement driver (44), optical fiber clamp (46) and arc-shaped flexible spring on it under the drive of the stepping motor (37, 41) (42) Realize translation in X and Y axis directions. Two CCD cameras (43, 47) and three laser welding torches (39, 45, 50) that are 120° to each other are arranged on the ring bracket (48), and the precise fine-tuning mechanism of the laser welding torches (11, 16, 22) is as follows: Figure 4 shows. .

Accompanying drawing 4 is the schematic diagram of the precise fine-tuning mechanism of the laser welding torch. Among the figure, 57 and 62 are bearing pins, 58 are laser welding torches, 59 and 61 are snap rings, 60 are fine-tuning screws, 63 are beams, and 64 are support seats. The up and down attitude of the laser welding torch can be finely adjusted by adjusting the fine adjustment screw 60 .

It should be noted that the difference between the first embodiment and the second embodiment is that the two-way translation platform can be located above the base (1), as shown in (2, 27) in Figure 1; it can also be located The upper part of the frame, as shown in Figure 2 (38,40).

The working process of the present invention: the process of the present invention for the packaging of optoelectronic devices can be divided into two operating processes, rough docking and fine docking. For rough docking, first turn on the laser light source and optical power meter, start the power detection program, and realize the optical power search through the stepping motor to drive the bidirectional translation platform. When the detected optical power exceeds a certain set noise level, start the fine docking process Perform micro-adjustment; by controlling the 4 micro-displacement drivers on the two-way translation platform and the micro-displacement driver on the frame, under the guidance of the power system, perform precise micro-motion docking until the maximum power point is searched. After the docking is completed, the laser welding torch is used to irradiate the joint to complete the fusion welding of the butt optical fiber.

This precision docking device for optoelectronic device packaging has the advantages of simple and compact structure, low manufacturing cost, simple control, high motion resolution, good dynamic characteristics, motion decoupling, small cumulative error, etc., and can realize high-resolution micro-motion Docking operation to improve the yield of optoelectronic device packaging. And it can be applied to other fields such as fine processing, integrated circuit manufacturing, CCD docking, biological and genetic engineering, micro-surgery, microelectronic assembly and other occasions for processing tiny objects, performing micro-positioning and micro-operation.

Claims (6)

1. A precision docking device for optoelectronic device packaging, characterized in that it is composed of: base (1), two-way translation platform (2, 27), four positioning seats (4, 7, 23, 26) , moving platform (9), fixed-length rod (6, 19, 20, 24), upper optical fiber clamping device, lower optical fiber clamp (10), and laser welding torch (11, 16, 22); said fixed-length There are 4 rods, one end of the fixed-length rod (6, 19, 20, 24) is connected with the moving platform (8) through a ball joint, and the other end of the fixed-length rod (6, 20) is connected with the positioning seat (4, 23 ) are connected by revolving pairs, and fixed length rods (19,24) are connected with positioning seats (7,26) through Hooke hinges or spherical hinges, thereby forming a space parallel closed-chain mechanism; said two-way translation platform ( 2, 27) can be located above the base (1) or on the upper part of the frame; the said lower optical fiber clamp (10) is fixed on the moving platform (9), and the upper optical fiber clamping device is formed by an arc-shaped flexible spring 12, optical fiber clamp 13, micro-displacement driver 14 is formed, is positioned at the frame top; Positioning seat (4,7,23,26) is made up of parallel plate flexible moving pair 67, micro-displacement driver 66, positioning seat body 65. 2. A precision docking device for optoelectronic device packaging according to claim 1, characterized in that said micro-displacement drivers (14) and (66) can use piezoelectric ceramic micro-displacement drivers. 3. A precision docking device for optoelectronic device packaging according to claim 1, characterized in that the lower optical fiber clamp (10) and optical fiber clamp (13) for fixing optical fibers can be driven by stepping motors, and can also be Pneumatic can be used. 4. A precision docking device for optoelectronic device packaging according to claim 1, characterized in that said laser welding torches (11, 16, 22) are located on the ring bracket (17) and are evenly distributed at 120° from each other , the ring bracket (17) is rigidly connected with the frame. 5. A precision docking device for optoelectronic device packaging according to claim 1, characterized in that two CCD cameras (15, 18) can be arranged on the ring bracket (17). 6. A precision docking device for optoelectronic device packaging according to claim 1, characterized in that said spherical joint, Hooke's joint and rotating joint are all flexible joint structures.

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