CN1298030C - Precisively butting apparatus for photoelectric device package - Google Patents
Precisively butting apparatus for photoelectric device package Download PDFInfo
- Publication number
- CN1298030C CN1298030C CNB2003101108477A CN200310110847A CN1298030C CN 1298030 C CN1298030 C CN 1298030C CN B2003101108477 A CNB2003101108477 A CN B2003101108477A CN 200310110847 A CN200310110847 A CN 200310110847A CN 1298030 C CN1298030 C CN 1298030C
- Authority
- CN
- China
- Prior art keywords
- rods
- optical fiber
- micro
- fixed
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013307 optical fiber Substances 0.000 claims abstract description 14
- 238000004806 packaging method and process Methods 0.000 claims abstract description 10
- 230000005693 optoelectronics Effects 0.000 claims description 26
- 238000006073 displacement reaction Methods 0.000 claims description 24
- 238000003466 welding Methods 0.000 claims description 21
- 238000003032 molecular docking Methods 0.000 claims description 20
- 238000013519 translation Methods 0.000 claims description 18
- 239000000919 ceramic Substances 0.000 claims 1
- 238000005538 encapsulation Methods 0.000 description 20
- 239000000835 fiber Substances 0.000 description 20
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 17
- 210000001503 joint Anatomy 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 238000009966 trimming Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 241000167880 Hirundinidae Species 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000010353 genetic engineering Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000002406 microsurgery Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Images
Landscapes
- Laser Beam Processing (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
The present invention provides a precise interfacing device used for packaging photoelectronic devices. The present invention is composed of a base (1), a two-way translational platform, four positioning bases (4, 7, 23, 26), a movable platform (9), rods (6, 19, 20, 24) in fixed length, an upper optical fiber clamping device (13), a lower optical fiber clamp (10), etc., wherein one end of each of the rods (6, 19, 20, 24) in fixed length is connected with the movable platform (8) through a spherical hinge, the other end of each of the rods (6, 20) with fixed length is connected with the positioning bases (4, 23) through a revolute pair, the rods (19, 24) with fixed length are connected with the positioning bases (7, 26) through hook hinges or spherical hinges, and a spatial parallel connection closed chain mechanism is formed. The present invention has the advantages of simple and compact structure, simple control, high movement resolution, moving decoupling, good dynamic performance, etc. The present invention can realize micro-motion interfacing packaging operation with high resolution to improve the packaging yield of photoelectronic devices.
Description
Technical field
This invention belongs to the light mechanical and electrical integration field, and it is particularly related to the accurate encapsulation technology of opto-electronic device.
Background technology
Encapsulation is very big with the reliability relation of opto-electronic device, and the packaging cost of integrated opto-electronics device accounts for the 70-90% of its total cost.Automatic butt device and technology are the key technologies of opto-electronic device encapsulation, and it can reduce production costs, and enhance productivity, and guarantee device quality.In the research of precise jiggle docking mechanism, parallel institution especially causes people's attention, this mainly is because parallel institution has the following advantages: (1) compact conformation (2) design processing is simple, can place on the pedestal (4) error value product to involve to the sensitivity of temperature not high (3) driver amplifies little (5) natural frequency height, has avoided the uncontrollable repetitive error of being introduced by vibrations.
Si Taodun (Stoughton) has designed a kind of jiggle robot of being made up of two parallel institutions, and each parallel institution is made up of six piezoelectric elements; Hu Genzi (Hudgens) and special plug (Tesar) have proposed this base of a fruit watt (Stewart) platform jiggle robot of a kind of complete parallel connection; More domestic units have also developed six-freedom parallel jiggle robot (Harbin Institute of Technology) based on GENERAL TYPE Stewart structure, series-parallel connection six-freedom micro displacement robot (BJ University of Aeronautics ﹠ Astronautics), based on the cell manipulation jiggle robot (Tongji University) and the parallel micromotion decoupling-structure jogging robot (University On The Mountain Of Swallows) of its (Delta) mechanism of Dare.They contribute with progressive for the development of jiggle robot, and the some of them achievement in research has been applied for patent.The bibliographical information that at present relevant opto-electronic device encapsulates automatically is few, and known to the inventor, the patent documentation of the accurate docking facilities of relevant opto-electronic device encapsulation does not almost have.
Summary of the invention
The object of the present invention is to provide a kind of accurate docking facilities that is used for the opto-electronic device encapsulation, advantages such as that this device has is simple and compact for structure, control simple, Motion Resolution rate height, mobile decoupling, dynamic property are good, can realize high-resolution fine motion butt joint encapsulation operation, to improve the encapsulation rate of finished products of opto-electronic device.
The technical scheme of the accurate docking facilities that is used for opto-electronic device encapsulation of the present invention is as follows:
A kind of accurate docking facilities that is used for the opto-electronic device encapsulation provided by the invention, as shown in Figure 1, it is characterized in that it is by pedestal 1,2,27, four positioning seats 4,7,23,26 of two-way translation platform, moving platform 9, connecting-rods with constant lengh 6,19,20,24, last optic fibre clamp, following fiber clamp 10, and laser welding gun 11,16,22 is formed; Said connecting-rods with constant lengh is 4, one end of connecting-rods with constant lengh 6,19,20,24 links by ball pivot and moving platform 9, link by revolute pair at the other end of connecting-rods with constant lengh 6,20 and positioning seat 4,23, connecting-rods with constant lengh 19,24 links by Hooke's hinge or ball pivot and positioning seat 7,26, thereby has formed space closed chain mechanism in parallel; Said two-way translation platform can be positioned at the top (as shown in Figure 12,27) of pedestal 1, also can be positioned at upper rack (as shown in Figure 2 38,40); Said fiber clamp 10 down is fixed on the moving platform 9, and last optic fibre clamp is made up of arc flexure spring 12, fiber clamp 13, micro-displacement driver 14, is positioned at upper rack; Laser welding gun 11,16,22 is positioned at and is mutually 120 ° of evenly distributions on the loop bracket 17, and loop bracket 17 connects firmly with rigidity of frame.
Need to prove:
Described positioning seat is made up of parallel-plate compliant translational joint 67, micro-displacement driver 66, positioning seat pedestal 65, by shown in Figure 5;
Above-mentioned ball pivot, Hooke's hinge and revolute pair are flexible hinge structure; Said micro-displacement driver 14,66 can be a piezoelectric micro-displacement actuator, also can be the micro-displacement driver of other type;
The anchor clamps 10,13 of above-mentioned fixed fiber can adopt step motor drive, also can adopt pneumatic; Form optic fibre clamp by arc flexure spring 12, fiber clamp 13, micro-displacement driver 14, can realize little translation of Y direction;
Said two-way translation platform can be realized the translation of X, Y direction under the driving of stepping motor;
Need to prove to be provided with two CCD cameras 15,18 on the loop bracket 17, be respectively applied for the alignment error of detection fiber in X-axis and Y direction; Laser welding gun 11,16,22, the molten solder that is used to dock optical fiber.
Because the present invention has adopted the space four-freedom parallel mechanism, and the space four-freedom parallel mechanism has characteristics such as kinematic accuracy height, mobile decoupling, as shown in Figure 3.Advantages such as that the accurate docking facilities that is used for the opto-electronic device encapsulation therefore provided by the invention has is simple and compact for structure, control is simple, Motion Resolution rate height, mobile decoupling, dynamic property are good, it can realize high-resolution fine motion butt joint encapsulation operation, to improve the encapsulation rate of finished products of opto-electronic device.
Description of drawings:
Accompanying drawing 1 is the general structure schematic diagram that is used for the accurate docking facilities embodiment one of opto-electronic device encapsulation of the present invention
1 pedestal among the figure, 2X be to mobile platform, 3 stepping motors, 4 positioning seats, 5 flexible revolute pairs, 6 connecting-rods with constant lenghs, 7 positioning seats, 8 flexible ball pivots, 9 moving platforms, 10 fiber clamps, 11 laser welding guns, 12 arc flexure springs, 13 fiber clamps, 14 micro-displacement drivers, 15CCD camera, 16 laser welding guns, 17 loop brackets, 18CCD camera, 19 connecting-rods with constant lenghs, 20 connecting-rods with constant lenghs, 21 flexible ball pivots, 22 laser welding guns, 23 positioning seats, 24 connecting-rods with constant lenghs, 25 flexible Hooke's hinge or ball pivots, 26 positioning seats, 27Y are to mobile platform, 28 stepping motors.
Accompanying drawing 2 is the general structure schematic diagram that is used for the accurate docking facilities embodiment two of opto-electronic device encapsulation of the present invention
29 pedestals among the figure, 30 positioning seats, 31 flexible revolute pairs, 32 connecting-rods with constant lenghs, 33 positioning seats, 34 flexible ball pivots, 35 moving platforms, 36 fiber clamps, 37 stepping motors, 38Y is to mobile platform, 39 laser welding guns, and 40X is to mobile platform, 41 stepping motors, 42 arc flexure springs, 43CCD camera, 44 micro-displacement drivers, 45 laser welding guns, 46 fiber clamps, the 47CCD camera, 48 loop brackets, 49 connecting-rods with constant lenghs, 50 laser welding guns, 51 connecting-rods with constant lenghs, 52 flexible ball pivots, 53 positioning seats, 54 connecting-rods with constant lenghs, 55 flexible Hooke's hinge or ball pivots, 56 positioning seats.
Accompanying drawing 3 is the schematic diagram of space four-freedom parallel mechanism
C among the figure
1, C
2, C
3, C
1The expression ball pivot, B
1, B
3Expression Hooke's hinge or ball pivot, B
2, B
4The expression revolute pair.
57 rotational pins among the figure, 58 laser welding guns, 59 little snap rings, 60 micrometer adjusting screws, 61 big snap rings, 62 rotational pins, 63 supporting traverses, 64 supporting bases.
Accompanying drawing 5 is the positioning seat structural representation
Accompanying drawing 6 is that the A-A of positioning seat in the accompanying drawing 5 is to the sectional structure schematic diagram
65 is the positioning seat pedestal among the figure, and 66 is micro-displacement driver, and 67 is the parallel-plate compliant translational joint.
Embodiment
Below in conjunction with accompanying drawing, introduce two kinds of structure and operation principles of the present invention in detail based on the accurate docking facilities embodiment that is used for the opto-electronic device encapsulation of four-freedom parallel mechanism.
Embodiment one
Accompanying drawing 1 is one embodiment of the present of invention.This accurate docking facilities that is used for opto-electronic device encapsulation is by pedestal 1, moving platform 9, connecting-rods with constant lengh 6,19,20,24, positioning seat 4,7,23,26, micro-displacement driver, two- way translation platform 2,27, and composition such as fiber clamp 10,13.Link by 4 connecting-rods with constant lenghs between pedestal 1 and the moving platform 9, wherein the parallel-plate moving sets on two connecting-rods with constant lengh 6,20 1 ends and the positioning seat 4,23 links by revolute pair, the other end links by ball pivot and moving platform 9, two other connecting-rods with constant lengh 19,24 1 ends link by the parallel-plate moving sets on Hooke's hinge or ball pivot and the positioning seat 7,26, the other end links by ball pivot and moving platform 9, thereby has formed space parallel mechanism.Said revolute pair, Hooke's hinge or ball pivot all refer to flexible hinge, and the parallel-plate moving sets all adopts micro positioner to drive.On moving platform 9 and upper bracket, be provided with the anchor clamps 10,13 of clamping optical fiber, wherein the fiber clamp on the upper bracket 13 can realize under the driving of the micro-displacement driver of a side that the little of Y direction moves, opposite side is provided with arc flexure spring 12, and the pedestal and the upper bracket rigidity of the pedestal of micro-displacement driver 14 and arc flexure spring 12 connect firmly.Two- way translation platform 2,27 is installed on the pedestal, two-way translation platform can be realized the translation of X, Y direction under the driving of stepping motor 3,28, positioning seat 4,7,23,26, connecting-rods with constant lengh 6,19,20,24, the fiber clamp 10 on moving platform 9 and the moving platform all can move along with moving of two-way translation platform 2,27.Loop bracket 17 is provided with two CCD cameras 15,18, be used to provide the precision positions feedback information, also be provided with three laser welding guns 11,16,22 of 120 ° each other on the loop bracket 17, be used to dock the molten solder of optical fiber, the Precision trimming mechanism of laser welding gun 11,16,22 as shown in Figure 4.
Embodiment two
Accompanying drawing 2 is an alternative embodiment of the invention.By pedestal 29, moving platform 35, connecting-rods with constant lengh 32,49,51,54, positioning seat 30,33,53,56, micro-displacement driver, two-way translation platform 38,40, and composition such as fiber clamp 36,46.Link by 4 connecting-rods with constant lenghs between pedestal 29 and the moving platform 35, wherein the parallel-plate moving sets on two connecting-rods with constant lengh 32,51 1 ends and the positioning seat links by revolute pair, the other end links by ball pivot and moving platform 35, two other connecting-rods with constant lengh 49,54 1 ends link by the parallel-plate moving sets on Hooke's hinge or ball pivot and the positioning seat, the other end links by ball pivot and moving platform 35, thereby has formed space parallel mechanism.Positioning seat is provided with micro-displacement driver, and said revolute pair, Hooke's hinge or ball pivot all refer to flexible hinge, and the parallel-plate moving sets all adopts micro positioner to drive.On moving platform 35 and upper bracket, be provided with fiber clamp 36,46, wherein the fiber clamp on the upper bracket 46 can realize under the driving of the micro-displacement driver 44 of a side that the little of Y direction moves, opposite side is provided with arc-shaped elastic pair 42, and the pedestal and the upper bracket rigidity of the pedestal of micro-displacement driver 44 and arc flexure spring 42 connect firmly.Upper bracket is provided with two-way translation platform 38,40, can drive micro-displacement driver 44, fiber clamp 46 and the arc flexure spring 42 realization X on it, the translation of Y direction under the driving of stepping motor 37,41.Loop bracket 48 is provided with 43,47 and three of two CCD cameras, 120 ° laser welding gun 39,45,50 each other, and the Precision trimming mechanism of laser welding gun 11,16,22 as shown in Figure 4.。
Accompanying drawing 4 is the schematic diagram of the Precision trimming mechanism of laser welding gun.57,62 is bearing pin among the figure, and 58 is the laser welding gun, and 59,61 is snap ring, and 60 is micrometer adjusting screw, and 63 is crossbeam, and 64 is supporting base.By adjusting the attitude up and down that micrometer adjusting screw 60 can fine adjustment laser welding gun.
Need to prove that the foregoing description one with the difference of embodiment two is: said two-way translation platform can be positioned at the top of pedestal 1,2,27 in as shown in Figure 1; Also can be positioned at upper rack, 38,40 in as shown in Figure 2.
The course of work of the present invention: the process that the present invention is used for the opto-electronic device encapsulation can be divided into thick butt joint and two operating process of smart butt joint.LASER Light Source and light power meter are at first opened in thick butt joint, the starting power trace routine, realize carrying out the luminous power search by the two-way translation platform of step motor drive, when detected luminous power surpasses the noise level of a certain setting, start smart docking operation and carry out the fine motion adjusting; Be positioned at 4 micro-displacement drivers on the two-way translation platform and be positioned at micro-displacement driver on the frame by control, under the guiding of power system, carry out the precise jiggle butt joint, till searching maximum power point.After finishing, butt joint, finishes the molten solder work of butt joint optical fiber enabling laser welding gun irradiation junction.
Advantages such as that this accurate docking facilities that is used for opto-electronic device encapsulation has is simple and compact for structure, low cost of manufacture, control are simple, Motion Resolution rate height, dynamic characteristic are good, mobile decoupling, accumulated error are little, can realize high-resolution fine motion docking operation, improve the rate of finished products of opto-electronic device encapsulation.And can be applicable to other such as field and other occasions of handling small items, carrying out fine location and microoperation such as retrofit, integrated circuit manufacturing, CCD butt joint, biology and genetic engineering, microsurgery, microelectronics assemblings.
Claims (6)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101108477A CN1298030C (en) | 2003-11-04 | 2003-11-04 | Precisively butting apparatus for photoelectric device package |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101108477A CN1298030C (en) | 2003-11-04 | 2003-11-04 | Precisively butting apparatus for photoelectric device package |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1614758A CN1614758A (en) | 2005-05-11 |
| CN1298030C true CN1298030C (en) | 2007-01-31 |
Family
ID=34759250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2003101108477A Expired - Fee Related CN1298030C (en) | 2003-11-04 | 2003-11-04 | Precisively butting apparatus for photoelectric device package |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1298030C (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1324334C (en) * | 2005-12-05 | 2007-07-04 | 北京航空航天大学 | Motion platform mechanism suitable for optical waveguide automatic-packaging robot system |
| CN102120289A (en) * | 2010-12-16 | 2011-07-13 | 蚌埠市华泰液力变矩器有限公司 | Numerical-control automatic three-gun welding machine |
| CN102275040B (en) * | 2011-07-11 | 2013-12-11 | 中南大学 | Auto-coupling welding and packaging mechanical device of coaxial-type optical transceiving device |
| CN102819186B (en) * | 2012-09-07 | 2014-01-15 | 天津大学 | 3T1R four-degree-of-freedom precision positioning table |
| CN108687470B (en) * | 2018-05-22 | 2021-10-08 | 蔡仁爱 | Welding robot |
| CN113246100A (en) * | 2021-05-14 | 2021-08-13 | 湖北工业大学 | Novel 3-PSS three-dimensional translational flexible parallel micro-motion platform |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5425616A (en) * | 1993-07-15 | 1995-06-20 | Agency Of Industrial Science & Technology | Micromotion stage |
| US6516681B1 (en) * | 1999-09-17 | 2003-02-11 | Francois Pierrot | Four-degree-of-freedom parallel robot |
| CN1399150A (en) * | 2001-06-06 | 2003-02-26 | 株式会社藤倉 | Optical fiber welding machine and welding method |
| CN1410231A (en) * | 2001-09-29 | 2003-04-16 | 四川大学 | New type series-parallel connection jogging robot |
-
2003
- 2003-11-04 CN CNB2003101108477A patent/CN1298030C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5425616A (en) * | 1993-07-15 | 1995-06-20 | Agency Of Industrial Science & Technology | Micromotion stage |
| US6516681B1 (en) * | 1999-09-17 | 2003-02-11 | Francois Pierrot | Four-degree-of-freedom parallel robot |
| CN1399150A (en) * | 2001-06-06 | 2003-02-26 | 株式会社藤倉 | Optical fiber welding machine and welding method |
| CN1410231A (en) * | 2001-09-29 | 2003-04-16 | 四川大学 | New type series-parallel connection jogging robot |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1614758A (en) | 2005-05-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7707907B2 (en) | Planar parallel mechanism and method | |
| CN100342517C (en) | Silicon wafer carrying robot with two-dimensional parallel driven | |
| CN100563946C (en) | Two degrees of freedom mobile parallel decoupling mechanism | |
| CN101286369B (en) | X-Y-Z three freedom degree tandem type nanometer grade microposition workstation | |
| CN109454635B (en) | Steel wire flexible cable parallel mirror surface machining device based on lever principle | |
| CN102540442A (en) | Plane parallel three-degree-of-freedom precise operating platform | |
| US7849762B2 (en) | Constrained tri-sphere kinematic positioning system | |
| CN109129494B (en) | A parallel micro-compensation device | |
| CN1298030C (en) | Precisively butting apparatus for photoelectric device package | |
| CN108582035A (en) | Three-degree of freedom flexible parallel motion platform applied to optoelectronic packaging | |
| CN102380788A (en) | Double-parallel-flexible-hinge-based tool rest driving platform of super-precision machining lathe | |
| CN101157216A (en) | Three-degree-of-freedom micro-manipulation robot | |
| CN107020643A (en) | Object clamping part and robot | |
| CN100340378C (en) | Six-freedom-degree precision positioning workbench | |
| CN100376361C (en) | Miniature two-dimensional decoupling workbench | |
| CN100551633C (en) | Two-degree-of-freedom mobile parallel mechanism with buffer capacity | |
| CN200982947Y (en) | Multi-function small friction and wearing tester | |
| CN1634684A (en) | A new type of precision micro-manipulation robot structure | |
| CN116494214A (en) | A 4PUS-3UPS Redundant Drive Parallel Robot | |
| CN202317816U (en) | Tool-rest driving platform of ultra-precision processing lathe based on bi-parallel flexible hinge | |
| CN206869903U (en) | Object clamping part and robot | |
| CN2466767Y (en) | Six-freedom super-precision location and fine operating platform | |
| CN1324334C (en) | Motion platform mechanism suitable for optical waveguide automatic-packaging robot system | |
| CN1588556A (en) | Five-degree-of-freedom precision positioning platform | |
| CN2782326Y (en) | Six-freedom-degree precision positioning workbench |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Zhongshan Silsmart Optoelectronics Co., Ltd. Assignor: University of Electronic Science and Technology of China Contract fulfillment period: 2007.3.3 to 2012.3.2 contract change Contract record no.: 2008440000505 Denomination of invention: Precisively butting apparatus for photoelectric device package Granted publication date: 20070131 License type: Exclusive license Record date: 20081211 |
|
| LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2007.3.3 TO 2012.3.2; CHANGE OF CONTRACT Name of requester: ZHONGSHAN CITY JINGMING OPTO-ELECTRICAL SCIENCE CO Effective date: 20081211 |
|
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070131 Termination date: 20091204 |