CN1608961B - Substrate transport device - Google Patents

Abstract

A substrate transfer apparatus is characterized by comprising: substrate floating members (1, 11, 16) for floating the substrate (3) in a non-contact state; a conveying mechanism for conveying the end of the substrate (3) floating on the substrate floating components (1, 11, 16); and a substrate support mechanism (49) which is provided at or near both side portions of the substrate floating member (1, 11, 16) in a direction orthogonal to the conveyance direction (C) of the substrate (3) and supports both end portions of the substrate (3) protruding in the orthogonal direction from both side portions of the substrate floating member side portion (1, 11, 16) from the lower surface side. When the substrate is lifted up and conveyed by the substrate lifting member, the substrate can be conveyed horizontally without contacting the substrate lifting member.

Description

Substrate conveying device

technical field

The invention relates to a substrate conveying device for floating and conveying a large substrate. the

Background technique

In recent years, the size of glass substrates used for FPDs has been increasing year by year as the screen size of flat-panel displays (hereinafter referred to as FPD) such as liquid crystal displays (hereinafter referred to as LCD) and plasma display panels (hereinafter referred to as PDP) increases. the trend of. the

Conventionally, in the FPD manufacturing process, as a substrate transfer device for transferring large glass substrates, compressed air is blown from an air blowing member (substrate floating member) to the lower surface of the glass substrate to float the glass substrate on the air blowing member (for example, Refer to Japanese Unexamined Patent Publication No. 2000-193604 (FIG. 3, FIG. 4)). In the substrate conveyance apparatus of such a structure, a glass substrate can be conveyed easily without damage to the surface. the

In addition, the substrate transfer device is provided with: a supporting roller mechanism supporting both ends in the width direction perpendicular to the traveling direction of the glass substrate from the lower surface; and a pair of regulating roller mechanisms contacting the both ends of the glass substrate in the width direction. The regulating roller mechanism regulates the position in the width direction by pinching both end portions in the width direction of the glass substrate protruding from the end portions (side end portions) in the width direction of the air blowing member from the sides. And, the support roller mechanism is arranged close to the limit roller mechanism. the

However, since the regulating roller mechanism holds the widthwise end of the glass substrate away from the air blowing member, when it is floated by compressed air, the widthwise end of the glass substrate held by the regulating roller mechanism faces each other. The surface of the glass substrate floated by the compressed air is deflected, and the entire glass substrate cannot be transported while holding it horizontally. the

In addition, since the glass substrate is clamped by the regulating roller mechanism, a large load is applied to the end portions of the glass substrate in the width direction, and the glass substrate may be damaged. the

And since the support roller mechanism is arrange|positioned close to this regulating roller mechanism, a glass substrate may bend downward between the side end part of an air blowing member, and a support roller mechanism. Here, the floating height of the glass substrate by the compressed air is as small as 0.2mm, so even if the above-mentioned deflection of the glass substrate is small, the deflection may cause the glass substrate to contact the side end of the air blowing member, causing the glass substrate to The substrate is damaged. the

Contents of the invention

The present invention was made in view of the above circumstances, and an object of the present invention is to provide a substrate conveying device that can reduce the external load on the substrate while conveying the substrate horizontally without contacting the air blowing member when the substrate is lifted and conveyed. . the

In order to achieve the above object, according to the substrate conveying device provided by the present invention, the substrate is floated and conveyed in a non-contact state, and it is characterized in that it has: a substrate floating member that floats the substrate in a non-contact state; a conveying mechanism that floats the side portion of the substrate on the floating member and forcibly conveys it; and a substrate support mechanism that is provided on the side portion of the substrate floating member parallel to the conveying direction of the substrate, and supports the substrate from the lower side. The side portion of the substrate floating member protrudes outside the side portion of the substrate. the

According to the substrate conveying apparatus having the above-mentioned structure, the substrate supporting mechanism is provided on the side portion of the substrate floating member, and supports the side portion of the substrate protruding outward from the side portion of the substrate floating member from the lower surface side, so that the substrate can be prevented from contacting the substrate floating portion. parts are damaged. In addition, even if the glass substrate is warped downward, the glass substrate can be corrected to a horizontal state. the

According to another aspect of the present invention, a substrate conveying device provides a substrate conveying device that floats a glass substrate in a non-contact state in a manufacturing process of a flat panel display, and is characterized in that it includes a substrate floating member whose width dimension is set to be smaller than The width dimension of the glass substrate is approximately the same as the outermost width dimension of the graphic area formed on the glass substrate, and the glass substrate is floated in a non-contact state; the conveying mechanism is kept floating by the substrate one side or both sides of the glass substrate other than the graphic area of the part floated and forcibly conveyed; and a substrate supporting mechanism that floats along the substrate parallel to the conveying direction of the glass substrate One side or both sides of the part are arranged, and one side or both sides of the glass substrate other than the pattern area protruding from the substrate floating part are supported from the lower side. The substrate support mechanism supports one side or both sides of the glass substrate protruding from the one side or both sides of the substrate floating member in a horizontal state. the

According to another aspect of the present invention, a substrate conveying device provides a substrate conveying device that floats a glass substrate in a non-contact state in a manufacturing process of a flat panel display, and is characterized in that it includes a substrate floating member whose width dimension is set to be smaller than The width dimension of the glass substrate is approximately the same as the outermost width dimension of the graphic area formed on the glass substrate, and the glass substrate is floated in a non-contact state; The lifting member is arranged on one side parallel to the conveying direction, and holds and conveys the front, rear and middle part of one side of the glass substrate floating on the substrate floating member; and the substrate support mechanism is arranged along the The other side of the substrate floating member on the opposite side of the conveying mechanism parallel to the conveying direction of the glass substrate is arranged, and the other side of the glass substrate other than the pattern area is supported from the lower surface side. part, using the conveying mechanism to maintain one side of the glass substrate floating on the substrate floating member in a horizontal state, and using the substrate support mechanism to transport all the glass substrates from the opposite side of the conveying mechanism The other side of the glass substrate protruding from the substrate floating member is supported in a horizontal state. the

Preferably, in the substrate transfer apparatus having the above configuration, the substrate support mechanism has a plurality of rotation support members provided on the side of the substrate floating member, and the rotation support members move the substrate toward the substrate by the transfer mechanism. When moving in the transport direction, it rotates in the direction of rolling on the lower surface of the substrate. the

Preferably, the rotating support member is a narrow roller rotatable in the conveying direction. the

Preferably, the rotation supporting member is a ball supported to freely rotate in a plurality of directions. the

According to the substrate support mechanism of the above structure, the substrate is supported by the rotating support member, and the rollers or balls as the rotating support member roll on the lower surface of the substrate when the substrate is conveyed, so the sliding friction between the rollers or balls and the substrate is reduced, enabling The substrate is prevented from being damaged by this sliding friction. the

In addition, according to the rotation supporting member having the above configuration, especially by using balls, even if the substrate moves in the width direction perpendicular to the conveying direction, the balls can contact the substrate and freely rotate, so that the substrate can be reliably prevented from being damaged. the

Preferably, in the substrate conveyance device having the above structure, the substrate supporting mechanism has a circulation member having a contact rail for moving a plurality of balls on the conveyance surface of the substrate floating member opposite to the lower surface of the substrate. exposed above, and make it roll and move on the lower surface of the substrate; the circulation track connects the two ends of the contact track, and makes the ball circulate on the contact track. the

According to the rotary support member structured as above, by circulating a plurality of balls on the contact track and the circulation track, wear of the balls due to rolling friction with the substrate can be suppressed, and the balls can be continuously used for a long time without replacement. the

Preferably, the substrate supporting mechanism is an air blowing unit that blows compressed air toward a side portion of the substrate protruding outward from a side portion of the substrate floating member. the

Preferably, the air blower is a system different from the air supply system of the substrate floating unit that floats the substrate, and is adjusted to a higher air pressure than the substrate floating unit. the

Preferably, in the substrate conveying device with the above structure, the substrate support mechanism is composed of a plurality of support units, and each support unit is arranged so as to be replaceable and freely attachable and detachable relative to the substrate floating member. the

According to the substrate support mechanism having the above configuration, by forming a plurality of units detachable from the substrate floating member, it is possible to easily replace a desired unit. the

Preferably, in the substrate transfer device having the above configuration, the substrate support mechanism is composed of a plurality of support units, and each support unit is provided so as to be adjustable in height relative to the substrate floating member. the

Preferably, in the substrate transfer apparatus configured as described above, the substrate support mechanism is disposed close to a side portion of the substrate floating member. the

Preferably, in the substrate transfer device having the above-mentioned structure, a width adjustment mechanism is provided, the substrate floating member is divided into a plurality of rectangular-shaped members that are elongated in the transfer direction, and the width adjustment mechanism slides each member in the width direction to adjust the width of each member. Spacing between components. the

Preferably, in the substrate transfer device having the above structure, the substrate floating member has a plurality of air holes for blowing air on the upper surface on which the substrate is placed, and has air holes for air blowing out of the air trapped in and blown out through the air holes on the upper surface. The air floats out of the grooves between the substrates to expel the air. the

According to the substrate supporting mechanism configured as described above, since the end of the substrate is supported by air and the substrate can be transported in a non-contact state, damage to the lower surface of the substrate can be reliably prevented. the

Description of drawings

FIG. 1 is a schematic plan view showing a substrate transfer device according to an embodiment of the present invention. the

Fig. 2 is a schematic side view of the substrate transfer device of Fig. 1 . the

FIG. 3A is an enlarged side view showing a support unit having a plurality of rollers in the substrate transfer device of FIG. 1 . the

Fig. 3B is an enlarged front sectional view showing the supporting unit. the

Fig. 4 is a schematic side view showing a state in which a glass substrate is floated on a substrate stage in the substrate transfer device of Fig. 1 . the

FIG. 5 is a schematic side view showing an air transport operation of a glass substrate in the substrate transport device of FIG. 1 . the

FIG. 6 is a schematic side view showing an air transport operation of a glass substrate in the substrate transport device of FIG. 1 . the

7A is an enlarged side view showing a support unit having a plurality of balls in a substrate transfer device according to another embodiment of the present invention. the

Fig. 7B is an enlarged front sectional view showing the supporting unit. the

8A is an enlarged side cross-sectional view showing a support unit having a plurality of balls arranged on a contact rail and a circulation rail in a substrate transfer device according to another embodiment of the present invention. the

Fig. 8B is an enlarged front sectional view showing the supporting unit. the

9A is an enlarged side cross-sectional view showing a support unit having an air blowing unit in a substrate transfer device according to another embodiment of the present invention. the

Fig. 9B is an enlarged front sectional view showing the supporting unit. the

Detailed ways

1 to 6 show an embodiment of the present invention, and the embodiment described here is a glass substrate conveying device suitable for inline inspection in the manufacturing process of FPDs such as large LCDs and PDPs. the

The loading-in substrate stage 1 constituting the substrate conveying device is provided on an anti-vibration table (vibration-isolating table) 2, and placed on the upper surface (conveying surface) is a glass substrate 3 (mother glass that can obtain multi-sided substrates for manufacturing a plurality of FPDs). substrate). The dimension in the width direction of the substrate stage 1 (direction perpendicular to the transport direction C of the glass substrate 3 ) is shorter than the width of the glass substrate 3 . The substrate stage 1 is configured as a substrate floating member that is provided with a plurality of air holes 4 for blowing air on its upper surface, and that floats a glass substrate 3 by air. The air holes 4 are substantially uniformly provided on the entire surface of the substrate stage 1 . the

Further, two grooves 5 are formed on the upper surface of the substrate stage 1 along the conveyance direction C at a predetermined distance from each other. In addition, the substrate stage 1 is provided with a plurality of (nine in the illustrated example) lift pins 6 (lift pins) that move up and down when the glass substrate 3 is carried in. the

In addition, the substrate stage 1 may be divided into rectangular parts that are elongated in the conveying direction C, and the interval between the divided parts (the tanks 5 ) may be adjusted to change the size of the substrate according to the different sizes of various glass substrates. The dimension in the width direction of the carrying platform 1 . In this case, the width dimension of the substrate stage 1 can be arbitrarily adjusted by a width adjustment mechanism (not shown) that slides the members positioned at both ends in the width direction of the substrate stage 1 in the width direction. the

On one side of the substrate stage 1 parallel to the conveyance direction C (on the left side of the conveyance direction C), a conveyance robot 7 for carrying in is provided. The transport robot 7 for carrying in takes out uninspected glass substrates 3 from the cassette and carries them onto the substrate stage 1 while rotating, advancing, and retreating the two transport arms 8 using a multi-joint arm not shown. the

On the downstream side of the substrate stage 1 , along the conveyance direction C, conveyance stages 9 are arranged in parallel. The length of this conveyance stand 9 is formed from the carrying-in side of the glass substrate 3 to the carrying-out side. The transport stand 9 is placed on a shock absorber 10 . the

A substrate floating member (inspection stage) 11 spanning the entire length of the conveyance stage 9 is provided on the upper surface of the conveyance stage 9 . The dimension in the width direction of the substrate floating member 11 is the same as that of the substrate stage 1 and shorter than the width of the glass substrate 3 . A plurality of air holes 12 for blowing air are also provided on the upper surface (transfer surface) of the substrate floating member 11 similarly to the substrate stage 1 . These air holes 12 are substantially uniformly provided over the entire surface of the substrate floating member 11 . the

Further, on the upper surface of the substrate floating member 11, two grooves 13 are formed along the conveyance direction C at a predetermined distance from each other. The upper surface height of the substrate floating member 11 is substantially the same as the upper surface height of the substrate stage 1 . the

In addition, the substrate floating member 11 is also the same as the substrate stage 1, and the width direction dimension of the substrate floating member 11 can be changed by adjusting the interval between each divided member (groove 13). the

At an approximately intermediate position of the conveyance stand 9 along the conveyance direction C, an inspection unit E for performing various inspections of the glass substrate 3 conveyed at a constant speed is provided. Various inspection devices 15 such as a portal arm 14 , a microscope, a line sensor, and a CCD camera are provided in the inspection unit E. As shown in FIG. In the inspection unit E, for example, image data of the glass substrate 3 is acquired by a plurality of line sensors arranged in the width direction, image processing is performed on the image data, and pattern inspection and defect inspection of the glass substrate 3 are performed. the

On the downstream side of the transport stage 9, along the transport direction C, a substrate stage 16 for unloading is arranged in parallel. This substrate stage 16 is provided on a shock absorber 17 and is used for temporary placement in order to carry out the glass substrate 3 conveyed from the substrate floating member 11 . The width dimension of the substrate stage 16 is the same as that of the substrate stage 1 and the substrate floating member 11 , and is shorter than the width of the glass substrate 3 . The substrate stage 16 is the same as the substrate stage 1 and the substrate floating member 11, and is configured as a substrate floating member that is provided with a plurality of air holes 18 for blowing air on its upper surface (conveying surface) to air-suspend the glass substrate 3. The air holes 18 are substantially uniformly provided on the entire surface of the substrate stage 16 . the

Further, two grooves 19 are formed in the substrate stage 16 along the conveyance direction C at a predetermined distance from each other to discharge the air blown out from the respective air holes 18 . In addition, a plurality of (nine in the illustrated example) lift pins 20 that move up and down when the glass substrate 3 is carried out are provided on the substrate stage 16 . The upper surface height of the substrate stage 16 is substantially the same as the upper surface height of the substrate floating member 11 . the

In addition, the substrate stage 16 is also the same as the substrate stage 1, and the width direction dimension of the substrate stage 16 can be changed by adjusting the interval between the divided parts (groove 19 ). the

On one side of the substrate stage 16 parallel to the conveyance direction C (on the left side in the conveyance direction C), a conveyance robot 21 for unloading is provided. This unloading transport robot 21 accommodates the inspected glass substrate 3 in a cassette while rotating, advancing, and retreating two hand transport arms 22 using a multi-joint arm not shown. the

One side or both sides of the glass substrate 3 that is kept floating are set on the conveying platform 9 and the shock absorber 17 and the conveying mechanism of fast conveying. This conveying mechanism is composed of the following parts: a conveying part that holds one side or both sides of the glass substrate floating on the substrate floating member and forcibly conveys it; The guide device configured on one side or both sides. As the transport mechanism, a linear motor composed of a mover (transport unit) that travels on a linear guide (slider) by coil excitation can be used. The sliders 23 to 28 constituting the linear guide are arranged in pairs and in parallel with each other along the conveying direction C across the substrate floating member 11 and the substrate stage 16 . the

The two sets of slides 23 , 24 , 27 , 28 located upstream and downstream in the conveying direction C are arranged on the widthwise outer side of the set of slides 25 , 26 located in the middle of the conveying direction C. the

On the pair of slide plates 23 and 24 disposed between the downstream side of the substrate stage 1 and the intermediate portion of the conveyance stand 9, conveyance parts 29 that absorb and hold the glass substrate 3 and move rapidly in the conveyance direction C and its opposite direction are respectively provided. , 30. Each conveying part 29, 30 has: the arm 29a, 30a that is installed so as to be able to expand and contract in the vertical direction and freely rotate; Adsorption pads (adsorption pads) 29b and 30b on the surface; plungers provided on the conveyance parts 29 and 30 to move the arms 29a and 30a in the conveyance direction C and the vertical direction. the

Furthermore, conveying parts 31 and 32 movable in the conveying direction C and its opposite direction are also respectively provided on the pair of slide plates 25 and 26 provided between the intermediate part and the downstream end of the conveying platform 9 . Each conveyance part 31, 32 is the same as the above-mentioned conveyance part 29, 30, and has arm 31a, 32a and adsorption pad 31b, 32b. the

In addition, a pair of slide plates 27 and 28 provided between the downstream end of the transport platform 9 and the downstream end of the substrate stage 16 are also respectively provided with transport parts 33 that can move in the transport direction C and its opposite direction. , 34. Each conveyance part 33, 34 is the same as the above-mentioned conveyance part 29, 30, and has the arm 33a, 34a and the suction pad 33b, 34b. the

In addition, the two sets of slide plates 23, 24, 27, and 28 located on the upstream and downstream sides of the conveying direction C are arranged outside the set of slide plates 25, 26 located in the middle part of the conveying direction C, so the arms 29a, 30a are set to , 33a, 34a length, so that the width direction positions of the adsorption pads 29b, 30b, 33b, 34b and the adsorption pads 31b, 32b are the same. the

Such a substrate transfer device includes a compressed air supply unit 46 , a vacuum suction unit 47 , a movement control unit 48 , and a substrate support mechanism 49 in addition to the above configuration. the

The compressed air supply part 46 communicates with the respective gaps of the substrate stage 1 for loading, the substrate floating member 11 and the substrate stage 16 for unloading through pipes, and selectively supplies compressed air to each gap, and passes through the air holes 4, 12. , 18 blow out compressed air. The glass substrate 3 can be floated on the substrate stage 1 for carrying in, the substrate floating member 11, or the substrate stage 16 for carrying out by this compressed air. In addition, the compressed air supply unit 46 may blow out air having an antistatic effect, for example, air ionized into positive ions or negative ions, from the air holes 4 , 12 , and 18 . These air holes 4 , 12 , 18 and the compressed air supply unit 46 constitute a substrate floating mechanism 101 that floats the glass substrate 3 . the

The vacuum adsorption unit 47 communicates with each of the adsorption pads 29b to 34b through piping, and selectively evacuates these adsorption pads 29b to 34b to adsorb and hold the glass substrate 3 . The movement control unit 48 is used to perform movement control of the transport units 29 to 34 on the respective slide plates 23 to 28 . the

The conveyance mechanism 102 which moves the glass substrate 3 in the conveyance direction C is comprised by these slide plates 23-28, conveyance part 29-34, the vacuum adsorption part 47, and the movement control part 48. the

The substrate support mechanism 49 is provided on or close to both sides of the substrate stage 1, 16 and the substrate floating member 11 parallel to the conveying direction C, and supports both sides of the glass substrate 3 from the lower side. The substrate support mechanism 49 has a plurality of support units 51 which are mounted so as to be replaceable and freely attachable and detachable to both sides of the substrate stage 1 , 16 and the substrate floating member 11 . the

According to Fig. 3 A, shown in Fig. 3B, in each support unit 51, a plurality of rollers (rotation support member) 53 that can rotate are installed as the rotation support member, and each roller 53 is arranged so that a part of its circumferential surface bears the distance from the substrate. The positions on the upper surfaces of the stages 1 and 16 and the substrate floating member 11 protrude at approximately the same height as the substrate floating height. There is a height adjustment mechanism for adjusting the height of the substrate floating member 11 so that the protruding length of each roller 53 reaches the floating height of the glass substrate 3 by compressed air. In addition, the peripheral surfaces of rollers 53 adjacent to each other in the conveyance direction C that contact the glass substrate 3 are made of synthetic resin or other softer wear-resistant material than the glass substrate 3 , and are arranged close to each other without contacting each other. These rollers 53 rotate in the direction (J direction) which rolls on the lower surface of the glass substrate 3 when the glass substrate 3 moves to conveyance direction C. In addition, the roller 53 has a narrow width so as to obtain a frictional force that does not slide against the glass substrate 3 . the

In addition, a plurality of (for example, 4 sides, 6 sides) graphic regions G constituting a display are formed on the glass substrate 3, and the width dimensions of the substrate stage 1, 16 and the substrate floating member 11 are set to be parallel to the conveying direction C. The outermost width dimensions of the graphic area G are substantially the same. As a result, both side portions of the glass substrate 3 where the pattern region G is not formed protrude from both side portions of the substrate stages 1 and 16 and the substrate floating member 11 . The rollers 53 are closely arranged along both sides of the substrate stages 1 and 16 and the substrate floating member 11 as shown in FIG. 3A , and support both sides of the glass substrate 3 from the bottom side as shown in FIG. 3B . the

Next, the operation of the substrate transfer device configured as above will be described. the

When placing the glass substrate 3 on the substrate stage 1, as shown in FIGS. the

From this state, the loading robot 7 takes out the uninspected glass substrate 3 from the cassette while rotating, advancing, and retreating the hand transfer arm 8 , and transfers it to the upper side of the substrate stage 1 . And, at the same time as the conveyance, each lift pin 6 of the substrate stage 1 is raised. Then, the robot arm 7 for carrying in lowers the hand transfer arm 8, places the glass substrate 3 on each lift pin 6, and exits. Each lift pin 6 descends, whereby the glass substrate 3 is placed on the substrate stage 1 . the

In this state, since the width dimension of the glass substrate 3 is longer than that of the substrate stage 1 , both sides of the glass substrate 3 parallel to the conveyance direction C protrude from both sides of the substrate stage 1 . And, in this state, as shown in FIG. 3B , the lower surface of the side portion of the glass substrate 3 positioned outside the pattern area G contacts the roller 53 . the

After the placement of the glass substrate 3 is completed, as shown in FIG. The pads 29 b and 30 b are adsorbed on the lower surface of the glass substrate 3 . The suction positions of these suction pads 29 b and 30 b are located on the outer side in the width direction of the glass substrate 3 than the contact position of the above-mentioned roller 53 , and are toward the front side of the glass substrate 3 in the conveyance direction C. In this state, the suction pads 29 b and 30 b are slightly elevated from the upper surface of the substrate stage 1 , and are located at approximately the same height as the contact position (substrate floating height) between the glass substrate 3 and the roller 53 . the

Simultaneously with the adsorption of the glass substrate 3, the compressed air supply unit 46 supplies compressed air to the gap between the substrate stage 1 and the substrate floating member 11 for carrying in through piping, and blows the compressed air from the air holes 4, 12. the

At this time, an air layer is formed between the substrate stage 1 and the glass substrate 3 , and the glass substrate 3 floats from the upper surface of the substrate stage 1 . And, the air blown out from the air hole 4 circulates through the groove 5 of the substrate stage 1 without staying in the air layer. Therefore, the glass substrate 3 floats on the substrate stage 1 while maintaining flatness. In addition, since the rollers 53 and the lower surface of the glass substrate 3 floated by the compressed air are approximately at the same height, even if the glass substrate 3 is warped or bent below, the rollers 53 can hold both sides of the glass substrate 3. The part is corrected to a horizontal state, and the glass substrate 3 floats and does not contact the conveying surface of the substrate stage 1 . the

Then, as shown in FIG. 5 , the movement control unit 48 makes the two transport units 29 , 30 having the suction pads 29 b , 30 b adsorbed on the lower surface of the glass substrate 3 move synchronously in the transport direction C on the slide plates 23 , 24 at the same speed. . As a result, the glass substrate 3 floats from the upper surfaces of the substrate stage 1 and the substrate floating member 11 by the compressed air from the air holes 4 and 12, and is quickly transported from the substrate stage 1 to the substrate float by the conveying parts 29 and 30. Part 11. At this time, the rollers 53 provided on the substrate stage 1 and the substrate floating member 11 contact the undersides of both sides of the glass substrate 3 located outside the pattern area G, and rotate in the J direction. the

When the conveyance of the glass substrate 3 to the substrate floating member 11 is completed, the compressed air supply part 46 stops supplying compressed air to the air hole 4 of the substrate stage 1 for carrying in. And at this time, the movement control part 48 moves the conveyance parts 31 and 32 on the two slide plates 25 and 26 located in the middle part in the direction opposite to the conveyance direction C. As shown in FIG. the

When these conveying parts 31, 32 reach the bottom of the glass substrate 3, they stop at the substrate transfer reference position on the slide plates 25, 26, and each arm 31a, 32a is raised, and the suction pads 31b, 32b are adsorbed on the glass substrate by the vacuum suction part 47. 3 below. The suction positions of these suction pads 31 b and 32 b are located on the outer side in the width direction of the glass substrate 3 than the contact position of the roller 53 , and are toward the front side of the glass substrate 3 in the conveyance direction C. the

When the adsorption pads 31b, 32b are adsorbed on the glass substrate 3, the adsorption of the respective adsorption pads 29b, 30b by the conveyance units 29, 30 of the vacuum adsorption unit 47 is released, and the respective arms 29a, 30a descend. Thereby, the suction-holding of the glass substrate 3 is transferred from the conveyance parts 29 and 30 to the conveyance parts 31 and 32 . Then, the two transport units 29, 30 move on the respective slide plates 23, 24 in the opposite direction to the transport direction C, stop at the substrate transfer reference position of the substrate stage 1 for carrying in, and stand by. the

After the transfer of the glass substrate 3 is completed, the conveying parts 31 and 32 that absorb and hold the glass substrate 3 move synchronously and quickly on the respective slide plates 25 and 26 in the conveying direction C at the same speed as shown in FIG. 6 . At this time, the rollers 53 provided near both sides of the substrate floating member 11 contact the undersides of both ends in the width direction of the glass substrate 3 located outside the pattern area G, and rotate in the J direction. Thereby, the glass substrate 3 floating on the substrate floating member 11 is pulled by the conveyance parts 31 and 32 and reaches the inspection part E. As shown in FIG. the

In the inspection part E, the speed of the conveying parts 29, 30 is controlled from high speed to low speed, so that the glass substrate 3 reaches a speed suitable for inspection. This image data is used for pattern inspection, defect inspection, and the like of the glass substrate 3 . the

After the inspection of the inspection unit E is completed, the transport units 31 and 32 that absorb and hold the glass substrate 3 move synchronously and quickly on the respective slide plates 25 and 26 at the same speed, and transport the glass substrate 3 in the transport direction C. At this time, the rollers 53 provided on the substrate floating member 11 and the substrate stage 16 contact the undersides of both sides of the glass substrate 3 located outside the pattern area G, and rotate in the J direction. the

When the glass substrate 3 reaches the downstream side of the substrate floating member 11, the adsorption and holding of the glass substrate 3 is transferred (received) from the conveying parts 31 and 32 on the substrate floating member 11 side to the substrate stage 16 side for carrying out. The transport units 33 and 34 and the compressed air supply unit 46 supply compressed air to the air hole 18 of the substrate stage 16 for carrying out. The transfer of the glass substrate 3 from these transfer parts 31 and 32 to the transfer parts 33 and 34 is the same as the transfer from the transfer parts 29 and 30 to the transfer parts 31 and 32 described above. the

After transfer of the glass substrate 3 is completed, the conveyance parts 33 and 34 move rapidly on the slide plates 27 and 28, and convey the glass substrate 3 to the conveyance direction C. And when the glass substrate 3 reaches above the substrate stage 16 for carrying out, each conveyance part 33,34 stops at a board|substrate transfer reference position. the

In the substrate stage 16 , the compressed air supply unit 46 stops supplying compressed air to the air hole 18 of the substrate stage 16 . At this time, the suction of the lower surface of the glass substrate 3 by the vacuum suction unit 47 is released, and the arms 33 a and 34 a are lowered while the lift pins 20 are raised to pick up the glass substrate 3 . Thereby, the glass substrate 3 is placed on the lift pins 20 . The unloading transport robot 21 rotates, advances and retreats the hand transport arm 22, and takes out the inspected glass substrate 3 from the lift pin 20 and stores it in a box. the

Thereafter, carrying in to the substrate stage 1 , air transport, inspection, and carrying out from the substrate stage 16 are repeated sequentially for the plurality of glass substrates 3 . the

As described above, according to this substrate conveying device, the rollers 53 contact and support the side undersides of the glass substrate 3 protruding from both sides of the substrate stage 1, 16 and the substrate floating member 11, so when conveying the glass substrate 3 Therefore, both sides of the glass substrate 3 can be prevented from being warped on the lower side, and the glass substrate 3 can be corrected to a horizontal state even when the glass substrate 3 is warped on the lower side. the

Therefore, the graphic area G of the glass substrate 3 is floated from the conveying surface by compressed air, and the both sides of the glass substrate 3 are supported by the rollers 53, whereby the glass substrate 3 can be conveyed stably and quickly without causing the both sides to be damaged. It is in contact with the substrate stage 1, 16 and the substrate floating member 11, and can prevent the glass substrate 3 from being damaged by contacting the substrate stage 1, 16 and the substrate floating member 11. In addition, the pattern region G of the glass substrate 3 is supported by the rollers 53 on both sides without the pattern, so that the rollers 53 can be transported without contacting the pattern region G of the glass substrate 3, so that the pattern region G corresponding to the pattern can be prevented. The lower surface of the glass substrate 3 is damaged. the

In addition, by sucking and holding the underside of the side portion of the glass substrate, it is possible to reduce the external load on the glass substrate 3 compared to conventionally clamping both side edges of the glass substrate 3 by a regulating roller mechanism. the

And, when the glass substrate 3 is moved in the conveying direction C on the substrate stage 1, 16 and the substrate floating member 11, the roller 53 rotates and rolls in the conveying direction C of the glass substrate 3, so the glass substrate 3 and the roller 53 has very little sliding friction. Therefore, glass substrate 3 can be prevented from being damaged by this sliding friction. the

In addition, when the rollers 53 are replaced, the plurality of support units 51 mounted with the plurality of rollers 53 can be attached to and detached from the substrate stage 1, 16 and the substrate floating member 11, so that the desired support unit can be easily replaced. 51, each supporting unit 51 can be replaced with a plurality of rollers 53 at the same time. Therefore, the replacement of the roller 53 can be easily performed in a short time. the

In addition, in the above-mentioned embodiment, the roller 53 that rotates in the conveying direction C is installed on the support unit 51, but it is not limited thereto. For example, as shown in FIGS. A plurality of balls 55. the

That is, each ball 55 is held rotatably around the center point of the ball 55 by a ball cage 57 fixed to the supporting unit 51. In addition, each ball 55 is the same as the roller 53, and is arranged so as to protrude from the upper surface of the substrate stage 1, 16 and the substrate floating member 11 at a position substantially equal to the substrate floating height, and to contact the glass substrate 3. below. the

In this structure, not only when the glass substrate 3 moves in the conveying direction C, but also when moving in the width direction of the substrate stage 1, 16 and the substrate floating member 11 perpendicular to the conveying direction C, the glass substrate 3 and the Since no sliding friction occurs between the balls 55, damage to the glass substrate 3 can be reliably prevented. In particular, in the case of positioning (alignment) of the glass substrate 3, when the glass substrate 3 is moved in a state of air suspension in a direction perpendicular to the conveyance direction C, the sliding friction is reduced compared to using the rollers 53. , and easy to position, can prevent the back of the glass substrate 3 from being damaged. the

And, for example, as shown in FIGS. 8A and 8B , it is also possible to form a structure in which a circulation member is provided on a support unit 63 that can be attached to and detached from the substrate stage 1, 16 and the substrate floating member 11, and the circulation member has: The contact rail 59 that is formed on the upper side of the substrate stage 1, 16 and the substrate floating member 11 exposed; and the contact rail 59 formed away from the upper side of the substrate stage 1, 16 and the substrate floating member 11 59 is an endless track 61 connected to each other at both ends in the formation direction, and a plurality of balls 55 can be arranged on these contact tracks 59 and the endless track 61 . In addition, each ball 55 is preferably disposed so as to be in contact with other adjacent balls 55 . the

In such a configuration, when the glass substrate 3 is moved in the transport direction C, the ball 55 contacting the glass substrate 3 rolls and moves from the one end 59 a to the other end 59 b of the contact rail 59 . And the ball 55 which reached the other end 59b of the contact rail 59 returns to the side of the one end 59a of the contact rail 59 through the circulation rail 61 which leaves the glass substrate 3. As shown in FIG. the

In this structure, the ball 55 circulates in the contact track 59 and the circulation track 61 and rolls while changing direction in a plurality of directions, so one ball 55 always contacts the glass substrate 3, so asymmetric wear is not formed. Therefore, wear of the ball 55 due to rolling friction with the glass substrate 3 can be suppressed, and the ball 55 can be continuously used for a long period of time without replacement. the

And, as the substrate supporting mechanism that supports the both sides of the glass substrate 3 outside the graphic area G, it is not limited to the rollers 53 and the balls 55. For example, as shown in FIGS. Blow compressed air for non-contact support. the

That is, the substrate support mechanism 65 is formed on the support unit 64 that can be attached to and detached from the substrate stage 1 , 16 and the substrate floating member 11 . The substrate supporting mechanism 65 has a plurality of air holes (air blowing parts) 67 exposed at approximately the same height as the upper surfaces of the substrate stage 1, 16 and the substrate floating member 11, and arranged in parallel along the conveying direction C; The plurality of air holes 67 and the communication passage 69 of the compressed air supply part 46 . the

In this structure, by blowing compressed air from each air hole 67 of the substrate support mechanism 65 to the bottom of the glass substrate 3, both sides of the glass substrate 3 can be lifted and supported from above by the compressed air, and the glass substrate 3 can be lifted and supported in a non-contact manner. Since the entire glass substrate 3 floated on the substrate stage 16 and the substrate floating member 11 is conveyed in the state of transport, damage to the glass substrate 3 can be reliably prevented. the

In addition, a plurality of air holes 67 for blowing compressed air are respectively provided in a plurality of supporting units 64, so that each supporting unit 64 can be attached and detached relative to the substrate stage 1, 16 and the substrate floating member 11, and the desired one can be easily replaced. The support unit 64 can replace the plurality of air holes 67 for each support unit 64 at a time. Therefore, replacement of the air holes 67 can be easily performed in a short time. the

In addition, as mentioned above, in the case of using compressed air to support the side portion of the glass substrate 3, it is also possible to directly form the side portion of the substrate stage 1, 16 and the substrate floating member 11 parallel to the conveyance direction C toward the glass substrate. Air holes for blowing compressed air from the side of the substrate 3 . the

In this case, the air hole (air blowing part) 67 constituting the substrate supporting structure 65 is another compressed air supply system different from the air holes 4, 12, 18 for floating the glass substrate 3 from the conveyance surface, and the pressure is set to The pressure is higher than the pressure of the compressed air for floating the substrate, and the pressure can be adjusted according to the warpage of the glass substrate 3 . the

In addition, the air blowing parts on both sides of the supporting glass substrate 3 are not limited to blowing out from a plurality of air holes arranged along the conveying direction C, for example, may be formed from elongated slits formed along the conveying direction C. blown out structure. the

And, in order to discharge the compressed air contacting the side of the glass substrate 3 to the outside of the side of the substrate stage 1, 16 or the substrate floating member 11, by setting the blowing direction of the compressed air to be inclined toward the outside, it is possible to make The glass substrate 3 is stably floated and conveyed, and the compressed air blown out from the air hole 67 does not go around the inside of the glass substrate 3, so it is a preferable structure. the

In addition, by making the pressure of the compressed air blown to the side of the glass substrate 3 higher than the pressure of the compressed air for floating the substrate, the side of the glass substrate 3 can be picked up from above, and the both sides of the glass substrate 3 can be moved to the lower side. It is an optimal structure since the warpage is corrected to a horizontal state. the

In addition, the pressure of the compressed air of the end lift mechanism 65 can be adjusted according to the amount of warping or deflection of the glass substrate 3, and the side portion of the glass substrate 3 can be reliably picked up above the conveying surface and conveyed stably, so it is preferable. structure. the

In addition, in the above-mentioned embodiment, the glass substrate 3 is floated by the compressed air blown from the air holes 4, 12, 18 of the substrate stage 1, 16 and the substrate floating member 11, but it is not limited thereto. Floating is achieved by electrostatic means. In such a configuration, it is only necessary that static electricity can be eliminated with respect to the glass substrate. the

Moreover, although the conveyance part 29-34 which conveys the glass substrate 3 moves on the slide plates 23-28 provided in both sides of the substrate stages 1 and 16 and the substrate floating member 11, it is not limited to this. That is, for example, slide plates may be arranged on the pair of grooves 5, 13, 19 of the substrate stages 1, 16 and the substrate floating member 11, and the transport unit may be provided on the slide plates so as to be movable. the

In addition, the suction positions of the suction pads 29b to 34b are the front sides of both sides of the glass substrate 3 parallel to the conveyance direction C of the glass substrate 3, but are not limited thereto, and may be, for example, the rear side or the center of the glass substrate 3. In any position, a plurality may be arranged at each of these positions. And, when transporting the glass substrate 3 back and forth, by arranging the suction pads at least at each end in the front-rear direction of the glass substrate 3, the glass substrate 3 can be transported stably and will not be shaken due to the back-and-forth movement of the glass substrate 3, so it is a preferable structure. . the

In addition, as long as the suction and holding position of the glass substrate 3 by the suction pad is a part deviated from the pattern area G, it may be the upper surface or the upper surface and the lower surface of the glass substrate 3, or a chuck that clamps the glass substrate from the upper and lower surfaces may be used instead. absorbent pad. the

In addition, the placing of the glass substrate 3 on the substrate supporting platform 1 and the taking out of the glass substrate 3 from the substrate supporting platform 16 may use any mechanism other than the conveying manipulators 7, 21, and may also adopt pneumatic conveying from other lines. Substrate float transfer unit. the

In addition, in the above-mentioned embodiment, the conveying mechanism is arranged along both sides of the substrate floating member, and the two-axis conveying method is formed to hold and convey the both end corners of the glass substrate floated by the substrate floating member. , using the substrate supporting mechanism to support the two sides of the glass substrate protruding from the both sides of the substrate floating member, but not limited to this, the conveying mechanism can also be formed to be arranged on one side of the substrate floating member, and the whole A uniaxial conveyance method that holds and conveys the front, rear and intermediate portions of one side (the side parallel to the conveyance direction C) of the glass substrate protruding from the substrate lifter. A substrate supporting mechanism for supporting the other side of the glass substrate is disposed on the other side of the glass substrate. the

By adopting a uniaxial conveyance method in which a conveyance mechanism is arranged on one side of the substrate floating member, the width dimension of the substrate conveyance apparatus can be reduced compared with a biaxial conveyance method. In particular, with the increasing size of glass substrates (mother glass substrates) used in the manufacture of flat panel displays, large substrates exceeding 2000mm have recently appeared. also becomes difficult. By adopting the single-axis conveying method, the width dimension of the substrate conveying device can be reduced to a minimum, so the above-mentioned conveying problem can be solved. the

In addition, since one side of the glass substrate can be horizontally supported by the conveying mechanism, the substrate supporting mechanism on one side can be omitted, and the conveying mechanism on the other side can be omitted, thereby reducing costs. the

In this case, the supporting unit 51 is not limited to the rotatable rollers 53, and a plurality of balls 55 rotatable in a plurality of directions may be attached. In addition, a circulation member may be provided on the support unit 51, and a plurality of balls 55 may be arranged thereon. Alternatively, compressed air can be blown out for support. the

When the supporting unit 51 is provided only at one end in the width direction of the substrate stage 1, 16 and the substrate floating member 11, the glass substrate 3 is sucked and held by the suction pads 29b to 34b of the conveying parts 29 to 34, so it is not necessary to The unit for restricting the position in the width direction of the glass substrate 3 is provided in contact with one or both ends of the glass substrate 3 in the width direction, and an appropriate similar unit may be provided. the

The embodiment of the present invention has been described in detail above with reference to the drawings, but the specific structure is not limited to the embodiment, and design changes and the like within the range not departing from the gist of the present invention are also included. the

Claims (7)

1. A substrate conveying device that floats a substrate in a non-contact state for conveying, characterized in that it has: A substrate floating member that floats the substrate in a non-contact state; A conveying mechanism comprising: a guide device arranged along one side of the substrate floating member; and a conveying part provided on the guide device so as to be able to walk, the conveying mechanism holds and conveys the substrate from the substrate as a whole. front, rear and middle portions of one side portion of the base plate from which the floating member protrudes; and a substrate support mechanism disposed on the other side of the substrate floating member and supporting the other side of the substrate protruding outward from the side of the substrate floating member from the lower side, The substrate supporting mechanism has a plurality of rotating supporting members provided on the side of the substrate floating member, and when the transferring mechanism moves the substrate in the conveying direction, the rotating supporting member The direction of scrolling on the lower surface is rotated. 2 . The substrate transfer device according to claim 1 , wherein the rotation support member is a narrow roller rotatable in a transfer direction of the substrate. 3 . 3. The substrate transfer apparatus according to claim 1, wherein the rotation supporting member is a ball supported to be freely rotatable in a plurality of directions. 4. The substrate conveying device according to claim 3, wherein the substrate supporting mechanism has a circulation member having a contact rail for making the plurality of balls move on the lower surface of the substrate. The conveying surface of the floating part of the substrate is exposed, and makes it roll and move on the lower surface of the substrate; the circulation track connects the two ends of the contact track, and makes the ball circulate on the contact track . 5 . The substrate conveying device according to claim 1 , wherein the substrate supporting mechanism is composed of a plurality of supporting units, and each unit is arranged to be replaceable and freely attachable and detachable relative to the substrate floating member. 6 . 6 . The substrate conveying device according to claim 1 , wherein the substrate supporting mechanism is composed of a plurality of supporting units, and each unit is arranged so that its height can be adjusted relative to the substrate floating member. 7 . 7 . The substrate transfer apparatus according to claim 1 , wherein the substrate supporting mechanism is disposed close to the side of the substrate floating member. 8 .

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