CN1689141B - Substrate carrier having door latching and substrate clamping mechanisms - Google Patents

Abstract

On one hand, the present invention provides an automatic door opener, which comprises a platform (1), a door-opening mechanism (2) and a pipeline (3), wherein, the platform is used to support an underlayer bracket, and the door-opening mechanism is used to open the door of the underlayer bracket when the underlayer bracket is supported by the platform. The pipeline is extended from an opening on a clean room wall to the flatform and at least partially circles the platform. The pipeline is further used to guide the airflow coming form the clean room wall to the platform and out of the pipeline. The automatic door opener provides many other aspects.

Description

Substrate carrier with door latch and substrate clamping mechanism

This application claims priority to US Provisional Application No. 60/407340, filed August 31, 2002, the entire contents of which are hereby incorporated by reference. the

technical field

The present invention relates generally to substrate processing, and more particularly to substrate carriers and apparatus and methods for coupling them to processing tools. the

Related application reference

This application is related to co-pending U.S. patent applications of the same assignee as listed below, each of which is hereby incorporated by reference in its entirety:

U.S. Provisional Patent Application No. 60/407451, filed August 31, 2002, entitled "System For Transporting Wafer Carriers" (Attorney No. 6900/L);

U.S. Provisional Patent Application No. 60/407339, filed August 31, 2002, entitled "Method and Apparatus for Using Wafer Carrier Movement to Actuate Wafer Carrier Door Opening/Closing" (Attorney No. 6976/L);

U.S. Provisional Patent Application No. 60/407474, filed August 31, 2002, entitled "Method and Apparatus for Unloading Wafer Carrier from WaferCarrier Transport Systems" (Attorney No. 7024/L);

U.S. Provisional Patent Application No. 60/407336, filed August 31, 2002, entitled "Method and Apparatus for Supplying Wafers to a Processing Tool" (Attorney No. 7096/L);

U.S. Provisional Patent Application No. 60/407452, filed August 31, 2002, entitled "End Effector Having Mechanism For Reorienting A Wafer Carrier Between Vertical And Horizontal Orientations" (Attorney No. 7097/L);

U.S. Provisional Patent Application No. 60/407337, filed August 31, 2002, entitled "Wafer Loading Station with Docking Grippers at Docking Station" (Attorney No. 7099/L);

U.S. Provisional Patent Application No. 60/407087, filed January 27, 2003, entitled "Method and Apparatus for Transporting Wafer Carriers" (Attorney No. 7163/L);

U.S. Patent Application No. 60/407463 filed on August 31, 2002, entitled "Wafer Carrier Handler That Unloads Wafer Carriers Directly From a Moving Conveyor" (Attorney No. 7676/L1);

U.S. Patent Application No. 60/443004 filed on January 27, 2003, entitled "Wafer Carrier Handler That Unloads Wafer Carriers Directly From a Moving Conveyor" (Attorney No. 7676/L2);

U.S. Patent Application No. 60/443153 filed on January 27, 2003, entitled "Overhead Transfer Flange and Support for Suspending Wafer Carrier" (Attorney No. 8092/L);

U.S. Provisional Patent Application No. 60/443001, filed January 27, 2003, entitled "System and Methods For Transferring Wafer Carriers Between Processing Tools" (Attorney No. 8201/L); and

U.S. Provisional Patent Application No. 60/443,115, filed January 27, 2003, entitled "Apparatus and Method for Storing and Loading Wafer Carriers" (Attorney No. 8202/L). the

Background technique

Semiconductor devices are formed on substrates such as silicon substrates, glass plates, etc., commonly referred to as wafers, for computers, monitors, and the like. These devices are formed through a series of fabrication steps such as thin film deposition, oxidation, etching, polishing, and thermal and photolithographic processing. While multiple fabrication steps are often performed on a single processing tool, typically, at least for some of the fabrication steps required for device fabrication, the substrate must be transferred between different processing tools. the

Substrates are typically stored in racks for transport between process tools and other locations. In many cases, a substrate carrier completely encloses one or more substrates contained therein in a fixed volume of gas or other gas to reduce the risk of specific contamination of the substrates. A conventional substrate carrier typically has a door that must be opened and/or removed when the substrate carrier is interfaced with a processing tool to allow the substrate to be withdrawn from the substrate carrier. the

It is desirable to provide a latch mechanism for a substrate carrier to ensure that the door of the carrier remains closed when it needs to be closed, such as during transport. It is also desirable to provide a clamping mechanism in the substrate carrier to ensure that the substrates remain stationary within the carrier housing as they are transported to and from the processing tool. The above described latching and clamping structures typically require many actuators and the use of specially designed keys, which add to the cost and complexity of the substrate holder. A simpler, more cost-effective substrate carrier would be advantageous. the

Contents of the invention

The first aspect of the present invention provides an automatic door opener, including: (1) a platform for supporting the substrate carrier; (2) a door opening mechanism for opening the substrate carrier from the above platform opening the door of the substrate carrier when supported; and (3) a duct adapted to extend from an opening in the wall of the clean room to the platform and at least partially around the platform, said duct also being adapted to pass The airflow guides the platform and exits the duct. the

In a second aspect of the invention, there is provided a method of loading a substrate into a processing tool. The method comprises the steps of: (1) loading the substrate carrier onto a platform positioned adjacent a clean chamber wall separating the platform from the processing tool; (2) at least partially surrounding the substrate carrier with a conduit (3) opening the door of the substrate carrier when the substrate carrier is supported by the platform; and (4) directing the air flow from the clean room wall to the platform and Export pipeline. the

In a third aspect of the present invention, there is provided an apparatus for unlocking a substrate holder. The apparatus includes (1) a substrate transfer unit including a support structure for supporting a substrate carrier; and (2) a drive mechanism positioned relative to the support structure. The drive mechanism is adapted to interact with a latch mechanism of the substrate carrier supported by the support structure to initiate unlocking of the substrate carrier with movement of the substrate carrier. the

In a fourth aspect of the present invention, there is provided an apparatus for releasing a substrate clamping mechanism of a substrate holder. The apparatus includes (1) a substrate transfer unit including a support structure for supporting a substrate carrier; and (2) a drive mechanism positioned relative to the support structure. The drive mechanism is used in conjunction with the substrate clamping mechanism of the substrate carrier held by the support structure so that movement of the substrate carrier initiates release of the substrate clamping mechanism. the

In a fifth aspect of the present invention, there is provided a substrate clamp for unlocking a substrate holder and for releasing the substrate holder by using the features of the first and second aspects of the invention. Mechanism device. The invention also provides numerous other aspects, as well as systems and methods for implementing these aspects. the

The sixth aspect of the present invention provides an automatic door opener, including: (1) a platform, which is suitable for supporting a substrate carrier; (2) a carrier opening mechanism, which includes a driving mechanism, the The drive mechanism is adapted to release or release as the substrate carrier is undocked or docked when the substrate carrier is supported by the platform and moves away from or towards the inlet in the clean chamber wall. blocking a latch on the substrate carrier, thereby allowing the substrate carrier door to be guided by the carrier opening mechanism to a closed position or an open position; and (3) a conduit adapted to: An inlet in the chamber wall extends toward the platform and at least partially surrounds a substrate holder supported by the platform; and directs a gas flow from the clean chamber wall to the platform and out of the conduit. the

In a seventh aspect of the present invention, there is provided a method of loading a substrate into a processing tool. The method includes the steps of: (1) loading a substrate carrier onto a platform located adjacent to a clean chamber wall that isolates the platform from the process tool; (2) (3) open the door of the substrate holder by using the drive mechanism of the holder opening mechanism, and the door of the holder opening mechanism The drive mechanism is adapted to move as the substrate carrier disengages or docking to release or block a latch on the substrate carrier, thereby allowing the substrate carrier door to be guided by the carrier opening mechanism to a closed position or an open position; and (4) diverting air flow from the A clean room wall leads to the platform and leads out of the duct. the

As used in this specification and appended claims, the term "latching mechanism" should be understood to mean a mechanism that applies a force to the door of a substrate carrier to hold the door in a closed position. "Latching" refers to maintaining the door of the substrate carrier in a closed position. "Unlocking" refers to allowing the door of the substrate carrier to open (whether or not the door actually opens). the

Description of drawings

By means of the apparatus and method of the present invention, the door of the substrate carrier can be securely closed despite the tendency of gravity or other external forces to open the door. Also according to the invention, the substrate clamping mechanism included in the substrate carrier ensures that the substrate is held in a stable position within the substrate carrier during transport of the substrate carrier. This prevents accidental contact between the substrate and the interior of the substrate carrier, thereby reducing the possibility of specific contamination or damage to the substrate. According to one or more embodiments of the present invention, these features are equipped with fewer drives or use less specially designed keys than are employed by many conventional substrate carriers. the

Further features and advantages of the present invention will appear more fully from the following detailed description, appended claims and drawings. the

Fig. 1 is a schematic side elevational view showing a substrate transport unit provided according to the present invention;

2A and 2B are perspective views of substrate holders provided according to the present invention, respectively showing the substrate holders of the present invention in a closed state and an open state;

Figure 2C is a side view of the substrate holder in Figure 2B;

Figure 3 is an enlarged partial side view showing some parts of the substrate holder of the present invention in Figures 2A-2B when the substrate holder of the present invention is in a closed and locked state;

Fig. 4A is a perspective view of a substrate opening mechanism as a part of the substrate conveying unit in Fig. 1 according to the present invention;

Figure 4B is an enlarged perspective view showing a portion of the view in Figure 4A;

4C is a top front view of the carrier opening mechanism of FIG. 4A with the substrate carrier located in FIGS. 2A-2C;

Figure 5A is a schematic perspective view showing a clamping mechanism provided according to the present invention, and the clamping mechanism is included in the substrate holder shown in Figures 2A-2B;

Figure 5B is an enlarged schematic perspective view showing a portion of the view in Figure 5A;

5C is a perspective view of the embodiment of the substrate carrier shown in FIGS. 2A-2B , wherein the cover of the substrate carrier is removed, and each clamping member is clamping a substrate;

Figure 5D is an enlarged perspective view showing details of a part of Figure 5C;

Figure 6A is a partial side view showing the clamping member of the clamping mechanism of Figures 5A and 5B in clamping contact with the substrate;

Figure 6B is a cross-sectional view of the substrate holder shown in Figure 5C, wherein another alternative clamping member configuration is used;

Figure 6C is an enlarged perspective view showing details of a part of Figure 6B;

7A and 7B are views similar to FIGS. 5A and 5B, respectively, showing the substrate clamping mechanism of the present invention in a relaxed state;

Figure 7C is a cross-sectional view similar to Figure 6B, but with the clamping components shown retracted;

Figure 7D is an enlarged perspective view showing details of a part of Figure 7C;

Figure 7E is a perspective view of one embodiment of a substrate carrier with the cover of the substrate carrier removed and the clamping members retracted from the substrate;

FIG. 8 is a perspective view of another alternative embodiment of a substrate loading station including a substrate carrier handling apparatus that may be used in the present invention. the

Detailed ways

According to the invention, the door locking mechanism of the substrate carrier is automatically unlocked by the interaction of the locking mechanism with a drive mechanism located in the substrate transport unit (the substrate transport unit is for example For example, the substrate transport unit of the processing tool that may be used in the semiconductor device manufacturing process). The same drive mechanism can also release a substrate clamping mechanism that can be part of a substrate carrier (for example, a substrate clamp that secures a substrate stored by a substrate carrier during transport). tight mechanism). the

FIG. 1 is a schematic side elevational view showing a process tool and an associated factory interface, including a substrate transport unit arranged according to the invention. In FIG. 1, reference numeral 100 denotes a schematic designation of a processing tool. the

As is well known to those skilled in the art, the processing tool 100 may include one or more load latches, one or more transfer chambers, and/or one or more processing chambers associated with the one or more transfer chambers described above. None of these components are individually shown. It will be appreciated that in the processing chamber, one or more semiconductor device fabrication processes may be applied to the substrate being loaded into the processing tool 100. the

A factory interface (FI) 102 is connected to the processing tool 100 to provide an interface between the processing tool 100 and one or more substrate carriers containing substrates to be loaded into the processing tool 100 . The factory interface 102 includes a clean room wall 103 that isolates the interior of the factory interface 102 from a clean room environment 105 . The factory interface 102 includes an inlet 104 through which one or more substrates may be transported into the factory interface 102 . More than one inlet 104 may be used. An optional door 106 can selectively close the entrance 104 of the plant interface 102 . (In one embodiment of the present invention, the door 106 shown in Fig. 1 can be omitted, and the factory interface 102 can have positive internal pressure, thereby make constant airflow flow out factory interface 102 through inlet 104. Therefore, the factory interface 102 Positive internal pressure acts to prevent particulates/contaminants from entering the plant interface 102.) For example, by means of filtered air flow through the plant interface (e.g., from the top of the plant interface to the bottom of the plant interface), and the use of high-efficiency particulate air filtration A filter (HEPA), ultra-low permeability air filter (ULPA), or similar filter of cleanroom grade known in the art, can maintain a positive static pressure within the plant interface 102. In one embodiment of the invention, a water pressure differential of 0.005-0.2 inches between the interior and exterior of plant interface 102 may be utilized (eg, using recirculated filtered ambient air). the

According to the invention, a substrate transport unit 108 is provided outside the factory interface 102 (eg, outside the door 106 and at the entrance 104). The substrate transfer unit 108 includes a substrate carrier support structure, such as a support platform 110, on which a substrate carrier 112 of the present invention (described later) can be supported. the

Associated with the support platform 110 is a carriage moving mechanism 114, such as an electric platform or a pneumatic cylinder, adapted to move the substrate carriage 112 toward the entrance 104 of the factory interface 102 or to move the substrate carriage 112 from the entrance of the factory interface 102 The entrance 104 is removed. It should be understood that the substrate carrier may also be supported by grippers (not shown) that clamp the substrate carrier, such as by a transfer flange (not shown) above the substrate carrier to lift the substrate. Bottom bracket. The gripper or support platform 110 may include one or more kinematic components (eg, kinematic pins, fixtures, or the like) to aid in substrate carrier positioning. the

In FIG. 1 , reference numeral 116 schematically represents a door or openable portion of the substrate holder 112 . A drive mechanism (described later) included in the substrate transfer unit 108, and a lock mechanism (described later) provided on the substrate holder 112 are not separately shown in FIG. 1 . In accordance with at least one embodiment of the present invention, movement of the substrate carrier 112 causes the drive mechanism of the substrate transport unit 108 to interact with the latch mechanism of the substrate carrier 112, thereby unlocking the openable portion 116 of the substrate carrier 112. . The interaction between the drive mechanism of the substrate transport unit 108 and the latch mechanism of the substrate carrier 112 may also be used to release the substrate clamping mechanism of the substrate carrier 112 (not shown in FIG. 1 ). The driving mechanism of the substrate transport unit 108 , and the locking mechanism and substrate clamping mechanism of the substrate carrier 112 will be further described with reference to FIGS. 2A to 7E . the

The factory interface 102 may also include a substrate handling robot, not shown, adapted to transfer substrates between the substrate carrier 112 and the processing tool 100 . the

In the embodiment shown in FIG. 1, a controller 118 is coupled to the door 106 and the carriage movement mechanism 114 of the factory interface 102 to control the operation thereof. the

Reference numeral 120 denotes one or more substrate carrier storage racks (for storing one or more substrate carriers), which may be installed in conjunction with the substrate transport unit 108 . For example, the one or more substrate carrier storage racks 120 may be positioned above the substrate transport unit 108 as shown. the

2A is a perspective view of the substrate holder 112 of the present invention shown in FIG. 1 in a closed state, and FIG. 2B is a view similar to FIG. 2A showing the substrate holder 112 of the present invention in an open state. The substrate carrier 112 of the present invention includes a carrier housing 200 that accommodates a substrate 202 (FIG. 2B). The cradle housing 200 includes an openable portion 204 that includes a door 206 pivotally mounted on the cradle housing 200 . Door 206 pivots between a closed position shown in FIG. 2A and an open position shown in FIG. 2B. the

In accordance with the present invention, the substrate holder 112 of the present invention includes a latch mechanism 208 . In at least one embodiment, the latch mechanism 208 of the present invention may include an elongated tubular appendage 210 disposed along a side wall 214 of the cradle housing 200, preferably along the bottom edge 212 of the outer wall (although other location) layout. For example, attachment 210 may have a square or rectangular cross-section. Other shapes may also be used. For example, the accessory 210 may be integrally formed with the cradle housing 200 or be separate from the cradle housing 200 . the

As shown in the side view in FIG. 2C , the openable portion 204 of the cradle housing 200 can have a surface 216 with a beveled angle (eg, 45° or some other suitable angle), and the door 206 can have a complementary (complementary) angle. ) surface 218 at an inclined angle, so that when the door 206 is closed, the door closes without frictional movement relative to the openable portion 204 of the bracket housing. Accordingly, the possibility of particle generation when the door 206 is closed may be reduced. One or both of the angled surfaces 216, 218 may be covered with an elastomeric material, such as silicone, to provide a seal therebetween. the

3 is a partial side elevational view of the substrate holder 112 of the present invention showing details of an exemplary embodiment of the latch mechanism 208 of the present invention. The locking action of the locking mechanism 208 is achieved by the interaction between a key 300 projecting outwardly from the right side 301 of the door 206 ( FIG. 2B ) and a locking member 302 slidable in the attachment 210 . In the example shown, the key 300 is positioned over the bottom edge 304 ( FIG. 3 ) of the door 206 . The latch member 302 has an outer end 306 that protrudes from an outlet 308 of the attachment 210 . The latch member 302 includes a finger 310 extending outwardly from the outer end 306 of the latch member 302 . Because of the provision of the fingers 310, when the locking mechanism 208 is in its locked state, as shown in FIG. Located under the key 300. In this position, the fingers 310 prevent the key 300 (and thus the door 206) from rotating about the pivot point P relative to the bracket housing 200 (e.g., by an upward force acting on the key 300 to keep the door 206 in place). in the closed position). In particular, a portion 310a of the finger 310 contacts a portion 300a of the key 300, as shown in FIG. 3 . the

)、聚四氟乙烯类材料、其它低摩擦和/或低微粒生成材料等。  In at least one embodiment of the present invention, the portion 300a of the key 300 and/or the portion 310a of the finger 310 are inclined relative to the horizontal plane (for example, the inclination angle is about 10-15°, but other angles or no angle can also be used) . Tilting portion 310a of finger 310 provides a vertical component of force that can assist in closing substrate holder 112 . Sloping the portion 300a of the key 300 reduces particle generation by more evenly distributing the frictional contact on the surfaces of the key 300 and fingers 310, and/or the key 300 and/or fingers The wear of the shaped part 310. Low-friction coatings or low-friction contact surfaces (not shown) may also be added to the keys 300 and/or fingers 310 to reduce friction in the key shape during opening and/or closing of the substrate holder 112. Mutual friction between object 300 and finger 310. Examples of such low friction coatings/contact surfaces include polytetrafluoroethylene (PTFE) or Teflon

), PTFE-like materials, other low friction and/or low particle generation materials, etc.

The latching mechanism 208 also includes a biasing mechanism such as a spring 312 . The spring 312 is fixed at an inner end 313 of the attachment 210 (eg, opposite the outlet 308 of the attachment 210). Spring 312 pushes inner end 314 of latch member 302, biasing latch member 302 outward (in the direction of arrow 316) toward key 300 of door 206 (eg, toward the latched position shown in FIG. 3 ). Other similar suitable biasing mechanisms may be used.

A step 318 is formed on the outer end 306 of the latch member 302 at the location where the finger 310 protrudes from the outer end 306 . When the latch mechanism 208 is in the latched position shown in FIG. 3 , the step 318 of the latch member 302 abuts against the side 320 of the key 300 , thereby limiting outward movement of the latch member 302 . the

Referring again to FIGS. 2A and 2B , although only one latch mechanism 208 associated with the side wall 214 of the cradle housing 200 is shown in the drawings, it is contemplated that a latch mechanism 208 associated with the opposite side wall of the cradle housing 200 may be provided. A second locking mechanism is used to lock the left side 322 of the door 206 (FIG. 2B). the

Figure 4A is a perspective view of an exemplary embodiment of a tray opening mechanism 400 configured in accordance with the present invention. In this illustrative embodiment, the bay opening mechanism 400 may be disposed near or even within the entrance 104 of the factory interface 102 . In general, the carrier opening mechanism 400 may be used in any location where access to the substrate 202 in the substrate carrier 112 is desired. the

Referring to FIG. 4A , the illustrated carriage opening mechanism 400 is viewed from the interior of the factory interface 102 ( FIG. 1 ), looking through the inlet 104 toward the substrate transfer unit 108 . Figure 4B is an enlarged perspective view showing details of a portion 401 of the substrate opening mechanism 400 (Figure 4A). As shown in Figures 4A, 4B, the shape of the carrier opening mechanism 400 generally matches the contours of the substrate carrier 112, and as further described and illustrated below, the carrier opening mechanism 400 typically has the aid of, for example, a rectangular duct. 402 , providing a small gap for clean air flow around the substrate holder 112 . Other configurations may also be used. For example, the tray opening mechanism 400 may include two sided components with drive mechanisms coupled near the inlet 104 (as described below). the

Referring to FIG. 4B , a cam groove 404 is formed on a side wall 406 of the pipe 402 . As more fully made in previously incorporated U.S. Patent Application No. 60/407,339, filed August 31, 2002, entitled "Method and Apparatus for Using Wafer Carrier Movement to Actuate Wafer Carrier Door Opening/Closing" (Attorney No. 6976) As described above, the door 206 of the substrate carrier 112 may be equipped with a cam follower 408 ( FIGS. Lead to the open position shown in Figures 2B and 2C. the

Opening of the door 206 can be effected by docking movement of the substrate holder 112 relative to the inlet 104 as described in the co-pending patent application cited above. The term "docking" or docking movement as used herein refers to the inward movement of a substrate carrier towards an inlet through which substrates are exchanged, such as an inlet in a clean chamber wall. Similarly, "disengagement" or disengagement movement refers to the outward movement of a substrate carrier away from an inlet for exchanging substrates, such as an inlet in a clean room wall. Arrow 410 in FIG. 4B schematically represents the docking movement described above. the

As shown in FIG. 4B , a stopper 412 is disposed near the sidewall 406 and the cam groove 404 of the pipe 402 , and is located in the opening area 413 of the sidewall 406 . The open area 413 is configured to accommodate the latch mechanism 208 (which protrudes from the sidewall of the cradle housing 200, as shown in FIGS. 2A-2C ). Fig. 4A～Fig. 4B have also shown the carriage moving mechanism 114 (such as a slide plate) juxtaposed with the carriage opening mechanism 400, and a motion pin 414 is set on the carriage moving mechanism 114, with substrate carriage An alignment feature (not shown) on the bottom of 112 (see FIG. 1 ) interacts to guide the substrate carrier 112 into the correct position on the substrate moving mechanism 114 . Typically multiple motion components (eg, three or more) may be used to assist in the positioning of the substrate carrier 112 relative to the substrate movement mechanism 114 . A step 416 is provided adjacent to the stop 412 of the carriage opening mechanism 400 for structurally engaging the stop 412 and for controlling the air flow around the substrate carriage 112 and/or the carriage movement mechanism 114 (described later). . It should be appreciated that the opposite side wall of the substrate opening mechanism 400 (e.g., side wall 418) may be similarly configured as a cam slot for receiving the side of the substrate holder 112 disposed opposite the side 214 of FIGS. 2A-2C . Open area, stop and/or step of the locking mechanism on the the

The stop 412 acts as a drive mechanism to interact with the latch mechanism 208 of the substrate holder 112 (FIG. 3). (An additional entry stop, not shown, provided at the side wall 418 (FIG. 4A) of the conduit 402 may interact with a second latch mechanism (not shown) of the substrate holder 112.) In particular, Docking movement of the substrate holder 112 may cause the fingers 310 ( FIG. 3 ) of the latch member 302 to contact the stop 412 . The substrate holder 112 may or may not contact the step 416 during docking. As the substrate holder 112 continues to move in the direction indicated by the arrow 410 ( FIG. 4B ), the movement of the locking member 302 in this direction is stopped by the stopper 412 , causing the locking member 302 to be pushed into the attachment 210 , and the spring 312 against the bias force. Thus, the key 300 is released from the finger 310 of the latch member 302, allowing the door 206 to pivot (about point P (FIG. 3)) and pass through the aforementioned cam slot 404 (FIG. 4B). and cam follower 408 (FIG. 3) to be turned on. the

FIG. 4C is a front top view of the carrier opening mechanism 400 in FIG. 4A, including the substrate carrier 112 disposed in the carrier opening mechanism. As shown in FIG. 4C, the step 416 provides a controlled air gap G between the carrier opening mechanism 400 and the substrate carrier 112 and the carrier moving mechanism 114 (eg, thereby forming a laminar air flow therein), Excess airflow from the factory interface 102 ( FIG. 1 ), through the inlet 104 and the bay opening mechanism 400 can be helped to reduce. Such a laminar airflow can be created, for example, by providing an air gap G of between about 0.05 and 0.15 inches. Other air gap spacings may also be used. the

As mentioned above, for example, by means of filtered air flow through the plant interface (eg, from the top of the plant interface to the bottom of the plant interface) and the use of high-efficiency particulate air (HEPA), ultra-low permeability air (ULPA ) or a similar clean room grade filter known in the art to maintain a positive static pressure within the factory interface 102. In one embodiment of the invention, a water pressure differential of between 0.005 and 0.2 inches may be used between the interior and exterior of the plant interface 102 (eg, using recirculated filtered ambient air). the

In one or more aspects of the invention, door 106 (FIG. 1), also referred to herein as an "entry door," may include a key (not shown) for unlocking, receiving, and supporting door 116 of substrate carrier 112. release) or other unlocking mechanism and/or door opening mechanism, such as described in U.S. Patent No. 6,082,951 entitled "Wafer Cassette Load Station", the entire content of which is incorporated herein by reference. The door 106 can be moved back from the platform 110 and then lowered, thereby carrying the door 116 of the substrate carrier 112 as is generally known. Alternatively, the door 106 may not have any X-axis movement, and the platform 110 may instead move the substrate carrier 112 away from the inlet 104 (or other similar opening in the clean chamber wall 103), thereby allowing the door 106 is lowered (supporting the door 116 of the substrate holder 112) without contacting the substrate holder 112, as described in the previously noted US Patent No. 6,082,951. The platform 110 may then move the substrate carrier 112 back to the inlet 104 (eg, to enable removal of the substrate therefrom). In either case, in accordance with the present invention, substrate holder 112 can remain within conduit 402 and receive a gas flow (eg, laminar gas flow) from factory interface 102, as described above. the

The laminar air flow tends to prevent particles from reaching the point where the substrate is to be removed from the substrate carrier for transport to the processing tool 100 . Note that the laminar airflow and/or positive pressure factory interface configurations described above can be used with any substrate carrier (e.g., single substrate carrier, multiple substrate carrier, front opening substrate carrier) , Front Opening Unified Pod, etc.) and any substrate carrier door configuration, regardless of whether movement of the substrate carrier is used to open and/or close the substrate carrier door. For example, the present invention can be used to surround an inlet through which substrates are conveyed between an open substrate carrier and a process tool, thereby creating a laminar air flow from one side of the process tool , flows through an open substrate holder (eg, and out of conduit 402). the

A substrate clamping mechanism that may be included in the substrate holder 112 of the present invention will now be described with reference to FIGS. 5A-7E. the

FIG. 5A is a schematic perspective view of an exemplary substrate clamping mechanism 500 according to the present invention. FIG. 5B is an enlarged perspective view showing details of portion 502 in FIG. 5A. the

The substrate clamping mechanism 500 of the present invention operates through the interaction of a clamping member 504 and a latching member 302 of the type associated with the latching mechanism 208 (FIG. 3) described above. In one embodiment of the present invention, as shown in FIG. 5A , four clamping members 504 are provided, including two pairs of clamping members 504 , wherein each pair of clamping members 504 is combined with a corresponding locking member 302 . Other numbers of clamping members may also be used. the

Referring to FIG. 5B , in one embodiment of the invention, each clamping member 504 is generally L-shaped with a horizontal leg 506 and a relatively short vertical leg 508 . Other shapes or configurations may also be used. In FIG. 5B , the side walls of the cradle housing 200 ( FIGS. 2A-2C ) are schematically indicated by dashed lines 214 . Each clamping member 504 may be slidably mounted in an aperture 511 ( FIG. 2C and FIG. 5C described below) in the side wall 214 of the respective cradle housing 200 . the

When the substrate clamping mechanism 500 is in its clamped state, as shown in FIGS. End 514 of horizontal leg 506 of 504 contacts edge 516 of substrate 202 . Simultaneous contact of all four clamping members 504 with the substrate 202 may clamp the substrate 202 (eg, particularly during transport of the substrate carrier 112 , thereby stabilizing the substrate 202 ). the

Figure 5C is a perspective view of one embodiment of the substrate holder 112 with the cover (not shown) of the substrate holder 112 removed. Figure 5D is an enlarged perspective view showing details of portion 517 in Figure 5C. In the embodiment shown in FIGS. 5C and 5D , the substrate holder 112 includes a hollowed out region 520 having sloped sidewall portions 522 and non-sloped sidewall portions 524 (see FIG. 5D ). The unsloped sidewall portion 524 has a diameter approximately equal to the diameter of the substrate 202 (e.g., about 0.004 to 0.005 inches larger than the substrate 202 in one embodiment, although other dimensions may be used), and the sloped sidewall portion 522 is tilted so that the substrate 202 is placed in the non-sloping sidewall portion 524 of the substrate holder 112 to ensure accurate positioning of the substrate 202. In at least one embodiment, sloped sidewall portion 522 is at an angle of approximately 45° from the plane of substrate 202, although other angles may also be used. the

In Figures 5C and 5D, the clamping member 504 is shown in the clamping position; the latching member 302 extends below the key 300 of the door 206, thereby securing the door 206 in the closed position, as previously described (and as shown in Figure 5C shown). As further shown in FIG. 5C, in the clamped position, the latch member 302 squeezes the vertical leg 508 of each clamping member 504, thereby compressing each clamping member 504 through the hole 511 and into contact with the substrate. 202 contacts. the

FIG. 6A is a partial side view illustrating the contact between one of the clamping members 504 and the substrate 202 . As shown in FIG. 6A , contact with the substrate 202 may be accomplished through a V-shaped groove 526 formed in the end 514 of the horizontal leg 506 of the clamping member 504 . Other structures than V-shaped grooves may also be used to contact the substrate 202 . For example, FIG. 6B is a cross-sectional view of the substrate holder 112 in FIG. 5C; and FIG. 6C is an enlarged perspective view showing details of portion 525 in FIG. A flat slot is in the end 514 of the horizontal leg 506 . As described above, other structures for effective clamping of the substrate 202 may also be used. As further shown in FIGS. 6B and 6C , the vertical leg 508 of each clamping member 504 is biased (eg, by a spring 530 or other suitable biasing mechanism) against the latching member 302 . the

In order to protect the substrate 202 from contamination due to the locking mechanism 208 and/or due to contact between the substrate 202 and the clamping member 504, (1) a thin film (such as a diaphragm in FIG. 6C ) can be used. soft film 532), to isolate the locking mechanism 208 from the clean substrate area 533 of the substrate holder 112, where the substrate 202 is placed in the above clean substrate area (as shown in Figure 6B and Figure 6C ); and/or (2) the end 514 of each clamping member 504 may be provided with a "soft surface" 534 for contacting the substrate 202 (as shown in FIG. 6A ). For example, the flexible membrane 532 may isolate the substrate 202 from all moving parts of the latch mechanism 208 that can generate particles (eg, latch member 302, clamp member 504, spring 530, etc.). For example, the flexible film 532 and/or the soft surface 534 may be composed of urethane, silicone, or the like. the

Referring again to FIG. 5B , a notch 536 is formed on the side 512 of the latch member 302 . When the substrate clamping mechanism 500 is in its clamping position as shown in FIG. 5B, the notch 536 is positioned at a predetermined distance relative to the direction of advancement of the clamping member 504 (as further described below). ). Similar notches, not shown, are positioned in a similar manner relative to the other clamping members 504 associated with the latching member 302 of FIG. 5B . In addition, similar notches (not shown) are provided on the other latching member 302 ( FIGS. 5A and 6B ), and they are in a similar manner relative to the clamping member 504 associated with the other latching member 302. positioned. the

Figures 7A and 7B are views similar to Figures 5A and 5B, respectively, but showing the substrate clamping mechanism 500 in an unclamped (unclamped) state. FIG. 7B is an enlarged view showing details of portion 700 of FIG. 7A. the

Referring to Figures 5A and 5B and Figures 7A and 7B, the release process of the clamping mechanism 500 occurs as follows. The docking movement of the substrate holder 112 is performed relative to the inlet 104 (FIG. 1). That is, the bracket housing 200 (represented by the side wall 214 in FIGS. 5B and 7B ), the latching member 302, the clamping member 504 and the substrate 202 are indicated by arrow 702 in FIG. 5B (or in FIG. 4B ). moving together in the direction indicated by arrow 410). Referring to FIG. 5B , during the docking movement, the finger 310 of the latch member 302 contacts the stop 412 of the carriage opening mechanism 400 ( FIG. 4B ). Therefore, the movement of the locking member 302 in the direction indicated by the arrow 702 is stopped. Clamping member 504 is advanced along latching member 302 until it reaches notch 536 . A biasing structure such as spring 530 of FIGS. 6B and 6C may be used to cause clamping member 504 to enter notch 536 , thereby allowing clamping member 504 to move away from and out of contact with substrate 202 . All four clamping members 504 ( FIG. 5A ) may be disengaged from the substrate 202 in a similar manner substantially simultaneously, thereby releasing the clamped state of the substrate 202 . (As an alternative to the biasing structure described above, the clamping member 504, and in particular its vertical leg 508, may be connected to the latching member 302 by some tongue-and-groove arrangement or other similar camming arrangement such that the clamping Component 504 is drawn into notch 536 and away from substrate 202.)

FIG. 7C is a cross-sectional view similar to FIG. 6B, but wherein the clamping member 504 is retracted in the notch 536 of each latch member 302; FIG. 7D is an enlarged perspective view showing details of the portion 704 in FIG. 7C and FIG. 7E is a perspective view of one embodiment of the substrate holder 112, wherein the cover 706 of the substrate holder 112 has been removed. As shown in FIGS. 7C to 7E , when the substrate holder 112 moves forward relative to each locking member 302 , the spring 530 biases each clamping member 504 against the locking member 302 , so that each Each latch member 504 enters its respective notch 536 and is retracted from the substrate 202 through the aperture 511. Thereafter, the substrate 202 may be removed from the substrate holder 112 as described below.

Referring to FIGS. 1-7E , in operation, the substrate carrier 112 contains a substrate 202 to be processed in the processing tool 100, for example by a carrier handling robot (not shown) that cooperates with the factory interface 102, placed on the support platform 110 of the substrate transfer unit 108 . The controller 118 causes the door 106 (if present) to open and the substrate movement mechanism 114 to interface the substrate carrier 112 with the inlet 104 . The docking movement of the substrate holder 112 brings the fingers 310 (FIG. 3) of the latch member 302 into contact with the stops of the conduit 402 (see FIG. 4B, only one shown). As the substrate carrier 112 continues to advance, the latch members 302 are separated from the keys 300 (only one shown, see FIG. 3 ) and pushed into the attachment 210 . Simultaneously, cam member 408 (FIG. 3, only one shown) enters cam groove 404 (FIG. 4B, only one shown) of conduit 402 and is guided downward, thereby causing door 206 of substrate holder 112 to rotate downward. (As shown in Figures 2B, 2C and 7E). At the same time, the clamping member 504 moves into the notch 536 of the latching member 302 (FIGS. 5B, 7B and 7D). Clamping member 504 enters notch 536 to move away from substrate 202 and unclamp substrate 202 . In at least one embodiment, each notch 536 of each latch member 302 is positioned such that when the cam member 408 is at the bottom of the cam slot 404 and/or the door 206 is fully open, the clamping member 504 will be in the notch. within mouth 536. the

Now that the door 206 (if present) has been unlocked and opened, and the substrate 202 has been released, the substrate 202 can be removed from the substrate holder 112 . A substrate handling robot (not shown) of the factory interface 102 removes the substrate 202 from the substrate carrier 112 and loads the substrate 202 into the processing tool 100 . For example, the blades (not shown) of the substrate handling device may extend below the substrate 202 (e.g., in region 533 of the substrate carrier 112 (FIG. Lift to region 708 of substrate holder 112 (FIG. 7B). Substrate 202 may then be loaded into process tool 100 . The substrate 202 is processed in the processing tool 100 . After processing of the substrate 202 is completed, the substrate handling robot returns the substrate 202 to the substrate holder 112 . the

The carrier moving mechanism 114 then disengages the substrate carrier 112 from the inlet 104 . Disengagement movement of the substrate carrier 112 causes the cam follower 408 to be guided upward into the cam slot 404, thereby closing the door 206. When the bracket housing 200 was removed from the stop 412 of the bracket opening mechanism 400, the biasing force of the spring 312 pushed the locking member 302 outward from the attachment 210 so that the fingers 310 and the keys on the door 206 300 engaged. The door 206 is thus in the closed position again.

By the same movement of the latching member 302 , the notch 536 ( FIGS. 5B , 7B ) in the latching member 302 is moved away from the clamping member 504 . Also in response, the sides 512 of the latch member 302 force the clamping member 504 into contact with the substrate 202 thereby clamping the substrate 202 . The locked substrate carrier 112 containing the clamped substrate 202 therein is now ready to be transported away from the substrate transport unit 108 and it can be transported to another processing tool for further processing or to elsewhere in the manufacturing facility. the

The invention can be used to ensure the latching of the door of the substrate carrier and to ensure that the substrate is clamped within the substrate carrier. Thus, rough handling of the substrate or damage to the substrate and/or particulate contamination can be avoided. the

The foregoing description discloses only exemplary embodiments of the invention; modifications of the above-described devices which fall within the scope of the invention will readily occur to those of ordinary skill in the art. For example, although the invention has been illustrated with reference to a single substrate carrier, it is equally contemplated that the invention can be applied to substrate carriers holding more than one substrate. A "single substrate carrier" is understood to mean a substrate carrier of shape and size that can accommodate only one substrate at a time. the

As shown in this specification, the substrate holder of the present invention includes both the locking mechanism of the present invention and the substrate clamping mechanism of the present invention. However, it is also possible according to the inventive concept to provide a substrate carrier comprising a locking mechanism without a substrate clamping mechanism, or to provide a substrate carrier with a substrate clamping mechanism without a locking mechanism. Alternatively or additionally, clamping member 504 may be designed to rotate away from substrate 202 . the

The present invention may be used in conjunction with any processing tool, for example, a processing tool that performs one or more of the following steps: deposition, oxidation, etching, heat treatment, photolithography, and the like. Instead of using the substrate transport unit of the present invention at the factory interface, the substrate transport unit of the present invention may be used directly at the load lock of the process tool or at any other suitable location. the

The invention is described in connection with coupling a substrate carrier to a processing tool. However, the present invention is equally applicable to connecting a substrate carrier to a metrology station, to a chemical/mechanical polishing (CMP) apparatus, or to any other location or device that can transport substrates in a substrate carrier . the

Instead of the support platform 110 and carrier moving structure 114 shown here, the substrate transport unit 108 may have a gripper (not shown) which acts as a substrate carrier support structure and adapted to hold the substrate holder 112 (e.g., by the top flange of the substrate holder) and move the substrate holder 112 to or from the inlet 104, as previously incorporated on August 31, 2002 U.S. Patent Application No. 60/407,337, filed on 11 December 1999 (Attorney No. 7099), entitled "Wafer Loading Station with Docking Grippers at Docking Station". For example, Figure 8 is a perspective view of an alternative embodiment of a substrate loading station that may include a substrate carrier handling device that can be used with the present invention. In FIG. 8, reference numeral 801 denotes an optional substrate loading station. Reference numeral 803 denotes an optional substrate carrier handling device. Substrate loading station 801 in FIG. 8 is generally similar to previously cited co-pending U.S. Ser. No. 60/407,337, filed August 31, 2002, entitled "Wafer Loading Station with Docking Grippers at Docking Station" Example of a loading station disclosed in patent application (Attorney No. 7099). the

The substrate carrier handling apparatus 803 of FIG. 8 includes a pair of vertical rails 805, 807 and a horizontal rail 809 mounted on the vertical rails 805, 807 for vertical movement. The bracket 811 is installed on the horizontal guide rail 809 to move horizontally along the horizontal guide rail 809 . An end effector 813 is mounted on a bracket 811 . End effector 813 may include, for example, an end effector capable of changing the orientation of a substrate holder from vertical to horizontal and vice versa, as in the previously referenced, filed August 31, 2002 titled "End Effector Having Mechanism For Reorienting A Wafer Carrier Between Vertical And Horizontal Orientations" is described in US Patent Application No. 60/407452 (Attorney No. 7097). Any other suitable end effector may also be used, such as an end effector that grips the substrate holder through a transport flange above the substrate holder. the

It can be seen that the substrate loading station 801 has two columns of docking stations 815, although fewer or more columns of docking stations could be used. Each docking station 815 includes a plurality of docking grippers 817 . Each docking gripper 817 is adapted to support a substrate carrier one by one with a transfer flange above it, and is adapted to dock and undock a substrate carrier (as previously described). Furthermore, the aforementioned docking grippers can be supported by the substrate carrier (e.g. by the bottom surface of the substrate carrier) and moved to the clean room wall (or the front wall of a compartment such as a factory interface bay) or from the clean room wall. The removed docking platform is replaced, wherein the docking platform is mounted on the clean room wall. the

Preferably, the substrate loading station 801 includes a frame F connected to vertical rails 805 , 807 and horizontal rails 809 . In this manner, the preferred substrate loading station 801 is modular and can be quickly installed and calibrated. Consequently, the substrate loading station 801 includes one or more storage racks S (shown in dashed lines), which may also be mounted on the frame F. As shown in FIG. By mounting both the substrate carrier handler and the one or more storage racks to the frame, the substrate carrier handler and the storage racks have predetermined positions relative to each other. This not only further simplifies installation and alignment, but is another advantage of using a modular substrate loading station. Similarly, other mechanisms, such as specialized mechanisms for loading and/or unloading substrate carriers from the factory conveyor system above, may be conveniently mounted on frame F, for example, as previously cited in 2002 US Patent Application No. 60/407,451 (Attorney No. 6900), filed August 31, entitled "System For Transporting Wafer Carriers." the

In one aspect, the frame F can be mounted to predetermined mounting locations on a clean room wall (eg, pre-drilled bolt holes, etc.), or to a predetermined mounting location on the front wall of a chamber (eg, a factory interface chamber). Preferably, the above-mentioned wall also has predetermined installation positions, and the docking holder or the docking platform is installed to these predetermined installation positions. In addition, the wall may have a predetermined installation location where the substrate holder opening mechanism 400 can be installed. When the frame F, the docking mechanism, and the substrate holder opening mechanism are installed at respective predetermined positions on the same surface, their respective relative positions are predetermined and facilitate the installation and alignment of the substrate loading station 801 . the

While this invention has been disclosed in terms of typical embodiments thereof, it should be understood that other embodiments may fall within the spirit and scope of the invention as defined by the appended claims.

Claims (25)

1. automatic door opener comprises:

One platform, it is suitable for the support substrates carriage;

One carriage opener; It comprises a driving mechanism; This driving mechanism is suitable for when said substrate holder is supported and moved away from inlet or the inlet on the cleaning locular wall on the cleaning locular wall and moves by said platform; Along with said substrate holder breaks away from or butt joint and discharge or stop the closed block on the said substrate holder, thereby allow the door of said substrate holder to be guided to off-position or open position by said carriage opener; And

One pipeline, it is suitable for:

Inlet from the cleaning locular wall extends to said platform, and the substrate holder that supports around this platform at least in part; And,

With air-flow from said clean room wall guided to this platform and derive said pipeline.

2. automatic door opener according to claim 1, wherein said substrate holder comprises the front open type substrate holder.

3. automatic door opener according to claim 1, wherein said substrate holder comprises single substrate holder.

4. automatic door opener according to claim 1, wherein said substrate holder comprises many substrate holders.

5. automatic door opener according to claim 1, wherein said substrate holder comprise front open type system collection box.

6. automatic door opener according to claim 1, wherein said substrate holder is positioned at said pipeline.

7. automatic door opener according to claim 1, wherein said carriage opener are suitable for utilizing butt joint to move the door of opening said substrate holder.

8. automatic door opener according to claim 1; Wherein said pipeline be suitable for letting air-flow can be owing to the pressure differential that is kept between the inlet of said cleaning locular wall and the said platform, arrive said platform from the inlet of said cleaning locular wall, and air-flow is directed into said platform from said cleaning locular wall.

9. automatic door opener according to claim 1, wherein said air-flow comprise that part is around the laminar airflow of said substrate holder at least.

10. automatic door opener according to claim 1, wherein said cleaning locular wall comprises the wall of the factor interface of machining tool.

11. automatic door opener according to claim 1, it further comprises entrance door, and this entrance door is suitable for release, holds and supports the door of said substrate holder, and descends subsequently so that substrate can be removed from said substrate holder.

12. automatic door opener according to claim 11, wherein said entrance door are suitable for removing and decline subsequently from said substrate holder.

13. automatic door opener according to claim 11, wherein said platform is suitable for:

Said substrate holder is removed from said entrance door, so that said entrance door can be descended; And

Then, said substrate holder is moved on to the said inlet on the said cleaning locular wall backward.

14. one kind is loaded into the method in the machining tool with substrate, comprising:

Substrate holder is loaded on the platform, said platform be positioned at cleaning locular wall that this platform is kept apart with said machining tool near;

Use pipeline to come at least in part around said substrate holder from the entrance extension on the said cleaning locular wall to said platform;

Utilize the driving mechanism of carriage opener to open the door of said substrate holder; The said driving mechanism of said carriage opener is suitable for when said substrate holder is supported and moved away from inlet or the inlet on said cleaning locular wall on the cleaning locular wall and moves by said platform; Along with said substrate holder breaks away from or butt joint and discharge or stop the closed block on the said substrate holder, thereby allow the door of said substrate holder to be guided to off-position or open position by said carriage opener; And

Air-flow is directed into said platform and derives said pipeline from said cleaning locular wall.

15. method according to claim 14, wherein said substrate holder comprises the front open type substrate holder.

16. method according to claim 14, wherein said substrate holder comprises single substrate holder.

17. method according to claim 14, wherein said substrate holder comprises many substrate holders.

18. method according to claim 14, wherein said substrate holder comprise front open type system collection box.

19. further comprising using, method according to claim 14, the door of wherein opening said substrate holder be suitable for utilizing the mobile said carriage opener of butt joint to open the door of this substrate holder.

20. method according to claim 14; Wherein air-flow is directed into said platform from said cleaning locular wall and comprise and let the air-flow can be, arrive said platform from the inlet of said cleaning locular wall owing to the pressure differential that is kept between the inlet of said cleaning locular wall and the said platform.

21. method according to claim 20 further is included between inlet and the said platform of said cleaning locular wall and produces said pressure differential.

22. method according to claim 21 wherein produces said pressure differential and comprises and make filtered air flows into the factor interface relevant with said machining tool between the inlet of said cleaning locular wall and said platform.

23. method according to claim 21 wherein keeps 0.005 to 0.2 inch differential water pressures producing between the inlet of said cleaning locular wall and the said platform between inlet and the said platform that said pressure differential is included in said cleaning locular wall.

24. method according to claim 14, wherein said cleaning locular wall comprises the wall of the factor interface of said machining tool.

25. method according to claim 14 wherein directs into air-flow said platform and derives said pipeline from said cleaning locular wall and comprises laminar airflow is directed into said platform and derives said pipeline from said cleaning locular wall.

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