CN1677138A - Radiation sensitive composition for color filter, color filter and color liquid crystal display device - Google Patents
Radiation sensitive composition for color filter, color filter and color liquid crystal display device Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及滤色片用放射线敏感性组合物、滤色片以及彩色液晶显示装置。具体地,本发明涉及可以用于制造滤色片的滤色片用放射线敏感性组合物、由该组合物形成的滤色片以及具有该滤色片的彩色液晶显示装置,其中所述滤色片用于透射型或反射型彩色液晶显示装置、彩色摄像管元件等。The invention relates to a radiation-sensitive composition for color filters, a color filter and a color liquid crystal display device. Specifically, the present invention relates to a radiation-sensitive composition for color filters that can be used to manufacture color filters, a color filter formed from the composition, and a color liquid crystal display device having the color filter, wherein the color filter Sheets are used in transmissive or reflective color liquid crystal display devices, color imaging tube components, and the like.
背景技术Background technique
已知用着色放射线敏感性组合物制造滤色片时,通常在基板或预先形成了所需图案的遮光层的基板上,形成着色放射线敏感性组合物的被膜,并通过具有所需图案形状的光掩模照射放射线(以下称为“曝光”),然后显影并溶解除去未曝光的部分,接着用クリ-ンオ-ブン或热板进行后烘焙,由此形成各种颜色的象素图案的方法(参照特开平2-144502号公报和特开平3-53201号公报)。然而,在上述方法中,特别是当着色放射线敏感性组合物中所含的颜料浓度高时,显影时有时在未曝光部分的基板上或遮光层上产生残渣或浮垢。It is known that when a colored radiation-sensitive composition is used to manufacture a color filter, a film of the colored radiation-sensitive composition is usually formed on a substrate or a substrate on which a light-shielding layer of a desired pattern is formed in advance, and the color filter is passed through a color filter having a desired pattern shape. A method in which a photomask is irradiated with radiation (hereinafter referred to as "exposure"), then developed and dissolved to remove unexposed parts, and then post-baked with cre-n-o-bun or a hot plate to form pixel patterns of various colors (Refer to JP-A-2-144502 and JP-A-3-53201). However, in the above method, particularly when the pigment concentration contained in the colored radiation-sensitive composition is high, residue or scum sometimes occurs on the unexposed portion of the substrate or on the light-shielding layer at the time of development.
提高显影液的喷出压力对避免产生上述残渣或浮垢有效,但另一方面又存在出现图案缺损或剥落的弊病,因此有待开发一种与基板的附着性好、即使提高显影液的喷出压力也不发生图案缺损或剥落的着色放射线敏感性组合物。Increasing the ejection pressure of the developer is effective to avoid the above-mentioned residue or scum, but on the other hand, there are disadvantages of pattern defects or peeling off. A colored radiation-sensitive composition in which pattern chipping or peeling does not occur under pressure.
另外,近年来,随着液晶显示装置的大型化,形成了滤色片的基板也逐渐增大。因此,在形成滤色片时的曝光工序中,采用分数次曝光的所谓“分次曝光”方法,但曝光所需的总时间增长。因此,从提高生产能力方面考虑,需要即使曝光时间较短也能形成象素图案的着色放射线敏感性组合物。In addition, in recent years, along with the increase in size of liquid crystal display devices, the number of substrates on which color filters are formed has gradually increased. Therefore, in the exposure process for forming a color filter, a so-called "fraction exposure" method of fractional exposure is used, but the total time required for exposure increases. Therefore, from the viewpoint of improving productivity, there is a need for a colored radiation-sensitive composition capable of forming a pixel pattern even with a short exposure time.
然而,现有的着色放射线敏感性组合物当以短曝光时间(即低曝光量)形成象素图案时,显影时有时出现图案的缺损或脱落,不一定能满足要求。另外,在低曝光量的情况下,由着色放射线敏感性组合物构成的被膜固化不充分,图案的表面平滑性明显受损,结果有导致液晶取向不良等问题。并且,现有的着色放射线敏感性组合物一般有经时增粘的倾向,存在制备后不能长时间贮存的问题。However, when the existing colored radiation-sensitive composition forms a pixel pattern with a short exposure time (ie, low exposure dose), the pattern may be missing or peeled off during development, which may not meet the requirements. In addition, in the case of a low exposure amount, the coating film composed of the colored radiation-sensitive composition is insufficiently cured, and the surface smoothness of the pattern is significantly impaired, resulting in problems such as poor alignment of liquid crystals. In addition, conventional colored radiation-sensitive compositions generally tend to increase in viscosity over time, and there is a problem that they cannot be stored for a long time after preparation.
因此,亟待开发一种与基板密着性好、即使在低曝光量的情况下也具有足够的显影性和图案表面平滑性、并且贮存稳定性也很好的滤色片用放射线敏感性组合物。Therefore, there is an urgent need to develop a radiation-sensitive composition for color filters that has good adhesion to the substrate, has sufficient developability and pattern surface smoothness even at low exposure levels, and has good storage stability.
发明内容Contents of the invention
本发明的课题是提供一种与基板密着性好、即使在低曝光量的情况下也具有足够的显影性和图案表面平滑性、并且贮存稳定性等也很好的滤色片用放射线敏感性组合物。The object of the present invention is to provide a radiation-sensitive color filter that has good adhesion to the substrate, has sufficient developability and pattern surface smoothness even at low exposure levels, and is also excellent in storage stability. combination.
本发明的另一课题是提供由本发明的上述组合物形成的滤色片。Another subject of this invention is to provide the color filter formed from the said composition of this invention.
本发明的另一课题是提供具有本发明滤色片的液晶显示装置。Another object of the present invention is to provide a liquid crystal display device having the color filter of the present invention.
本发明的其它课题和优点将通过以下的说明来明确。Other subjects and advantages of the present invention will be clarified by the following description.
第一,根据本发明,本发明的上述课题通过下述的滤色片用放射线敏感性组合物解决,其特征在于,该组合物包含:(A)颜料;(B)分散剂;(C)碱可溶性树脂,其包含(c1)含有(甲基)丙烯酸的含羧基不饱和单体、(c2)N-位取代的马来酰亚胺、以及(c3)选自苯乙烯、α-甲基苯乙烯、对羟基-α-甲基苯乙烯、(甲基)丙烯酸甲酯、(甲基)丙烯酸正丁酯、2-乙基己基(甲基)丙烯酸酯、2-羟基乙基(甲基)丙烯酸酯、烯丙基(甲基)丙烯酸酯、苄基(甲基)丙烯酸酯、甘油单(甲基)丙烯酸酯、聚苯乙烯大分子单体和聚甲基丙烯酸甲酯大分子单体中的至少1种的共聚物;(D)多官能性单体;(E)光聚合引发剂和(F)溶剂,其中所述(B)分散剂含有丙烯酸类共聚物,该丙烯酸类共聚物经活性阴离子聚合得到,并且其胺值(单位mg KOH/g)与酸值(单位mg KOH/g)均大于0。First, according to the present invention, the above-mentioned problems of the present invention are solved by the following radiation-sensitive composition for color filters, which is characterized in that the composition comprises: (A) pigment; (B) dispersant; (C) Alkali-soluble resin comprising (c1) a carboxyl group-containing unsaturated monomer containing (meth)acrylic acid, (c2) maleimide substituted at N-position, and (c3) selected from styrene, α-methyl Styrene, p-hydroxy-α-methylstyrene, methyl (meth)acrylate, n-butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, 2-hydroxyethyl (methyl) ) acrylate, allyl (meth)acrylate, benzyl (meth)acrylate, glycerol mono(meth)acrylate, polystyrene macromer and polymethyl methacrylate macromer (D) a polyfunctional monomer; (E) a photopolymerization initiator and (F) a solvent, wherein the (B) dispersant contains an acrylic copolymer, and the acrylic copolymer It is obtained by living anionic polymerization, and its amine value (unit mg KOH/g) and acid value (unit mg KOH/g) are both greater than 0.
第二,根据本发明,本发明的上述课题通过下述滤色片用放射线敏感性组合物解决,其特征在于,该组合物包含:(A)颜料;(B)分散剂;(C)碱可溶性树脂;(D)多官能性单体;(E)光聚合引发剂和(F)溶剂,并且该组合物通过将(A)颜料预先分散在包含(B)分散剂、(C)碱可溶性树脂和(F)溶剂的介质中制备,其中所述(B)分散剂含有丙烯酸类共聚物,该丙烯酸类共聚物经活性阴离子聚合得到,并且其胺值(单位mg KOH/g)与酸值(单位mg KOH/g)均大于0。Second, according to the present invention, the above-mentioned problems of the present invention are solved by the following radiation-sensitive composition for color filters, which is characterized in that the composition comprises: (A) pigment; (B) dispersant; (C) alkali soluble resin; (D) polyfunctional monomer; (E) photopolymerization initiator and (F) solvent, and the composition is pre-dispersed by (A) pigment in containing (B) dispersant, (C) alkali-soluble Prepared in the medium of resin and (F) solvent, wherein said (B) dispersant contains acrylic copolymer, the acrylic copolymer is obtained through living anion polymerization, and its amine value (unit mg KOH/g) and acid value (unit mg KOH/g) are greater than 0.
第三,根据本发明,本发明的上述课题可以通过由上述各滤色片用放射线敏感性组合物形成的滤色片解决。Thirdly, according to the present invention, the above-mentioned problems of the present invention can be solved by a color filter formed from each of the above-mentioned radiation-sensitive compositions for color filters.
第四,根据本发明,本发明的上述课题可以通过包含上述滤色片的液晶显示装置解决。Fourth, according to the present invention, the above-mentioned problems of the present invention can be solved by a liquid crystal display device including the above-mentioned color filter.
本发明的滤色片用放射线敏感性组合物与基板的密着性好,即使在低曝光量的情况下也具有足够的显影性和图案表面平滑性,并且贮存稳定性等也很好。The radiation-sensitive composition for color filters of the present invention has good adhesion to a substrate, has sufficient developability and pattern surface smoothness even at a low exposure dose, and is also excellent in storage stability and the like.
因此,本发明的滤色片用放射线敏感性组合物极适合用于形成电子工业领域中以彩色液晶显示装置用滤色片为代表的各种滤色片。Therefore, the radiation-sensitive composition for color filters of the present invention is very suitable for forming various color filters represented by color filters for color liquid crystal display devices in the field of electronics industry.
具体实施方式Detailed ways
以下详细说明本发明。The present invention will be described in detail below.
滤色片用放射线敏感性组合物Radiation sensitive composition for color filter
-(A)颜料--(A) Pigment-
对本发明中的颜料没有特殊限制,可以是有机颜料、无机颜料中的任何一种。其中,从追求滤色片在高纯度下高透射性的显色和耐热性方面考虑,特别优选有机颜料。There is no special limitation on the pigment in the present invention, and it can be any one of organic pigments and inorganic pigments. Among them, organic pigments are particularly preferable from the viewpoint of pursuit of high purity, high transmittance, color development and heat resistance of color filters.
上述有机颜料包括例如染料索引(C.I.;The Society of Dyersand Colourists社发行)中分类在颜料中的化合物,具体可以列举下述染料索引(C.I.)编号的物质。The above-mentioned organic pigments include, for example, compounds classified in pigments in the Dyers Index (C.I.; issued by The Society of Dyers and Colourists), and specifically, substances having the following Dyers Index (C.I.) numbers are listed.
C.I.颜料黄12、C.I.颜料黄13、C.I.颜料黄14、C.I.颜料黄17、C.I.颜料黄20、C.I.颜料黄24、C.I.颜料黄31、C.I.颜料黄55、C.I.颜料黄83、C.I.颜料黄93、C.I.颜料黄109、C.I.颜料黄110、C.I.颜料黄138、C.I.颜料黄139、C.I.颜料黄150、C.I.颜料黄153、C.I.颜料黄154、C.I.颜料黄155、C.I.颜料黄166、C.I.颜料黄168、C.I.颜料黄211;C.I. Pigment Yellow 12, C.I. Pigment Yellow 13, C.I. Pigment Yellow 14, C.I. Pigment Yellow 17, C.I. Pigment Yellow 20, C.I. Pigment Yellow 24, C.I. Pigment Yellow 31, C.I. Pigment Yellow 55, C.I. Pigment Yellow 83, C.I. C.I. Pigment Yellow 109, C.I. Pigment Yellow 110, C.I. Pigment Yellow 138, C.I. Pigment Yellow 139, C.I. Pigment Yellow 150, C.I. Pigment Yellow 153, C.I. Pigment Yellow 154, C.I. Pigment Yellow 155, C.I. C.I. Pigment Yellow 211;
C.I.颜料橙36、C.I.颜料橙43、C.I.颜料橙51、C.I.颜料橙61、C.I.颜料橙71;C.I. Pigment Orange 36, C.I. Pigment Orange 43, C.I. Pigment Orange 51, C.I. Pigment Orange 61, C.I. Pigment Orange 71;
C.I.颜料红9、C.I.颜料红97、C.I.颜料红122、C.I.颜料红123、C.I.颜料红149、C.I.颜料红168、C.I.颜料红176、C.I.颜料红177、C.I.颜料红180、C.I.颜料红185、C.I.颜料红207、C.I.颜料红208、C.I.颜料红209、C.I.颜料红215、C.I.颜料红224、C.I.颜料红242、C.I.颜料红243、C.I.颜料红254;Pigment Red 9, C.I. Pigment Red 97, C.I. Pigment Red 122, C.I. Pigment Red 123, C.I. Pigment Red 149, C.I. Pigment Red 168, C.I. Pigment Red 176, C.I. Pigment Red 177, C.I. Pigment Red 180, C.I. Pigment Red 185, C.I. Pigment Red 207, C.I. Pigment Red 208, C.I. Pigment Red 209, C.I. Pigment Red 215, C.I. Pigment Red 224, C.I. Pigment Red 242, C.I. Pigment Red 243, C.I. Pigment Red 254;
C.I.颜料紫19、C.I.颜料紫23、C.I.颜料紫29;C.I. Pigment Violet 19, C.I. Pigment Violet 23, C.I. Pigment Violet 29;
C.I.颜料蓝15、C.I.颜料蓝60、C.I.颜料蓝15:3、C.I.颜料蓝15:4、C.I.颜料蓝15:6;C.I. Pigment Blue 15, C.I. Pigment Blue 60, C.I. Pigment Blue 15:3, C.I. Pigment Blue 15:4, C.I. Pigment Blue 15:6;
C.I.颜料绿7、C.I.颜料绿36、C.I.颜料绿136、C.I.颜料绿210;C.I. Pigment Green 7, C.I. Pigment Green 36, C.I. Pigment Green 136, C.I. Pigment Green 210;
C.I.颜料棕23、C.I.颜料棕25。C.I. Pigment Brown 23, C.I. Pigment Brown 25.
这些有机颜料可以单独使用,或者两种或多种混合使用。These organic pigments may be used alone or in combination of two or more.
本发明中,有机颜料可以通过重结晶法、再沉淀法、溶剂洗涤法、升华法、真空加热法或这些方法的组合精制后使用。In the present invention, the organic pigment can be used after being purified by recrystallization method, reprecipitation method, solvent washing method, sublimation method, vacuum heating method or a combination of these methods.
上述无机颜料可以列举例如氧化钛、硫酸钡、碳酸钙、氧化锌、硫酸铅、黄色铅、锌黄、氧化铁红(红色氧化铁(III))、镉红、群青、深蓝、氧化铬绿、钴绿、棕土、钛黑、合成铁黑、炭黑等。The above-mentioned inorganic pigments include, for example, titanium oxide, barium sulfate, calcium carbonate, zinc oxide, lead sulfate, yellow lead, zinc yellow, iron oxide red (red iron oxide (III)), cadmium red, ultramarine blue, dark blue, chromium oxide green, Cobalt green, umber, titanium black, synthetic iron black, carbon black, etc.
这些无机颜料可以单独使用,或者两种或多种混合使用。These inorganic pigments may be used alone or in combination of two or more.
并且,在本发明中,根据情况,还可以将上述颜料与一种或多种染料或天然色素并用。In addition, in the present invention, the above-mentioned pigment may be used in combination with one or more dyes or natural pigments depending on circumstances.
本发明中,根据需要,可以用聚合物对颜料粒子表面进行改性而使用。将颜料粒子表面改性的聚合物可以列举例如特开平8-259876号公报中记载的聚合物或市售的各种颜料分散用聚合物或低聚物等。In the present invention, if necessary, the surface of the pigment particle can be modified and used with a polymer. The polymer for modifying the surface of the pigment particles includes, for example, polymers described in JP-A-8-259876, various commercially available polymers or oligomers for pigment dispersion, and the like.
-(B)-分散剂-(B)-dispersant
本发明中的分散剂含有丙烯酸类共聚物(以下称为“丙烯酸类分散剂(B1)”,该丙烯酸类共聚物经活性阴离子聚合得到,并且其胺值(单位mg KOH/g,以下同)与酸值(单位mg KOH/g,以下同)均大于0。The dispersant in the present invention contains an acrylic copolymer (hereinafter referred to as "acrylic dispersant (B1)", which is obtained by living anion polymerization, and its amine value (unit mg KOH/g, the same below) Both the acid value (unit mg KOH/g, the same below) are greater than 0.
丙烯酸类分散剂(B1)的胺值优选为10~100,更优选15~50。丙烯酸类分散剂(B1)的酸值优选5~50,更优选10~30。此时,如果丙烯酸类分散剂(B1)的胺值为0,则所得的组合物有贮存稳定性降低的倾向,而丙烯酸类分散剂(B1)的酸值为0时,与基板的密着性有降低的倾向。The amine value of the acrylic dispersant (B1) is preferably 10-100, more preferably 15-50. The acid value of the acrylic dispersant (B1) is preferably 5-50, more preferably 10-30. At this time, if the amine value of the acrylic dispersant (B1) is 0, the storage stability of the obtained composition tends to decrease, and when the acid value of the acrylic dispersant (B1) is 0, the adhesion to the substrate will be reduced. tends to decrease.
丙烯酸类分散剂(B1)的市售品可以列举Disperbyk-2001(胺值=29、酸值=19,BYK公司)等。As a commercial item of an acrylic dispersant (B1), Disperbyk-2001 (amine value=29, acid value=19, BYK company) etc. are mentioned.
本发明中,丙烯酸类分散剂(B1)可以单独、或者两种或多种混合使用。In the present invention, the acrylic dispersant (B1) may be used alone or in combination of two or more.
本发明中,可以将丙烯酸类分散剂(B1)与其它分散剂并用。In the present invention, the acrylic dispersant (B1) can be used in combination with other dispersants.
所述其它的分散剂包括例如聚环氧乙烷月桂基醚、聚环氧乙烷硬脂基醚、聚环氧乙烷油基醚等聚环氧乙烷烷基醚;聚环氧乙烷正辛基苯基醚、聚环氧乙烷正壬基苯基醚等聚环氧乙烷烷基苯基醚;聚乙二醇二月桂酸酯、聚乙二醇二硬脂酸酯等聚乙二醇二酯;脱水山梨糖醇脂肪酸酯;脂肪酸改性聚酯;叔胺改性聚氨酯;聚乙烯亚胺类;此外还包括以下商品名的物质,KP(信越化学工业(株)制)、ポリフロ-(共荣社化学(株)制)、エフトツプ(ト-ケムプロダクツ社制)、メガフアツク(大日本インキ化学工业(株)制)、フロラ-ド(住友スリ-エム(株)制)、アサヒガ-ド、サ-フロン(以上物质为旭哨子(株)制)、Disperbyk-101、Disperbyk-103、Disperbyk-107、Disperbyk-110、Disperbyk-111、Disperbyk-115、Disperbyk-130、Disperbyk-160、Disperbyk-161、Disperbyk-162、Disperbyk-163、Disperbyk-164、Disperbyk-165、Disperbyk-166、Disperbyk-170、Disperbyk-180、Disperbyk-182、Disperbyk-2000(以上物质为ビツクケミ-·ジヤパン(株)制)、ソルスパ-スS5000、ソルスパ-スS12000、ソルスパ-スS13240、ソルスパ-スS13940、ソルスパ-スS17000、ソルスパ-スS20000、ソルスパ-スS22000、ソルスパ-スS24000、ソルスパ-スS24000GR、ソルスパ-スS26000、ソルスパ-スS27000、ソルスパ-スS28000(以上物质为アビシア(株)制)、EFKA46、EFKA47、EFKA48、EFKA745、EFKA4540、EFKA4550、EFKA6750、EFKA LP4008、EFKA LP4009、EFKA LP4010、EFKA LP4015、EFKA LP4050、EFKA LP4055、EFKA LP4560、EFKA LP4800、EFKA Polymer400、EFKA Polymer 401、EFKA Polymer 402、EFKA Polymer 403、EFKA Polymer 450、EFKA Polymer 451、EFKA Polymer 453(以上物质为エフカケミカルズ(株)制);アジスパ-PB-822(味之素フアインテクノ(株)制)等。Said other dispersants include polyethylene oxide alkyl ethers such as polyethylene oxide lauryl ether, polyethylene oxide stearyl ether, polyethylene oxide oleyl ether; polyethylene oxide Polyethylene oxide alkyl phenyl ethers such as n-octyl phenyl ether, polyethylene oxide n-nonyl phenyl ether, etc. Polyethylene glycol dilaurate, polyethylene glycol distearate, etc. Ethylene glycol diesters; sorbitan fatty acid esters; fatty acid-modified polyesters; tertiary amine-modified polyurethanes; ), Polyflo- (manufactured by Kyoeisha Chemical Co., Ltd.), Eftoptop (manufactured by To-Chem Prodactus Co., Ltd.), Megafactuk (manufactured by Dainippon Inki ), Asahiga-do, Sa-Fron (the above substances are manufactured by Asahi Whistle Co., Ltd.), Disperbyk-101, Disperbyk-103, Disperbyk-107, Disperbyk-110, Disperbyk-111, Disperbyk-115, Disperbyk-130, Disperbyk -160, Disperbyk-161, Disperbyk-162, Disperbyk-163, Disperbyk-164, Disperbyk-165, Disperbyk-166, Disperbyk-170, Disperbyk-180, Disperbyk-182, Disperbyk-2000 (manufactured by Co., Ltd.), Solsper-S5000, Solsper-s12000, Solsper-s13240, Solsper-s13940, Solsper-s17000, Solsper-s20000, Solsper-s22000, Solsper-s24000, Solsper-s24000GR , ソルスパ-スS26000, ソルスパ-スS27000, ソルスパ-スS28000 (the above substances are manufactured by Abishia Co., Ltd.), EFKA46, EFKA47, EFKA48, EFKA745, EFKA4540, EFKA4550, EFKA6750, EFKA LP4008, EFKA LP400LP4010, EFKA LP4015, EFKA LP4050, EFKA LP4055, EFKA LP4560, EFKA LP4800, EFKA Polymer400, EFKA Polymer 401, EFKA Polymer 402, EFKA Polymer 403, EFKA Polymer 450, EFKA Polymer 451, EFKA Polymer 401, EFKA Polymer 402, EFKA Polymer 403, EFKA Polymer 450, EFKA Polymer 451, EFKA Polymer 5 Manufactured by Ajispa-PB-822 (manufactured by Ajinomoto Fine Technology Co., Ltd.), etc.
上述其它分散剂可以单独、或者两种或多种混合使用。The other dispersants mentioned above may be used alone or in combination of two or more.
相对于丙烯酸类分散剂(B1)和其它分散剂的总量,其它分散剂的使用比例优选为0~75重量%,更优选0~50重量%。当其它分散剂的使用比例超过75重量%时,可能不能确保显影性、表面平滑性和贮存稳定性的良好平衡。The usage ratio of other dispersants is preferably 0 to 75% by weight, more preferably 0 to 50% by weight, based on the total amount of the acrylic dispersant (B1) and other dispersants. When other dispersants are used in a proportion exceeding 75% by weight, a good balance of developability, surface smoothness and storage stability may not be ensured.
本发明中,相对于(A)颜料100重量份,丙烯酸类分散剂(B1)的用量(以固体成分换算)优选为1~50重量份,更优选3~30重量份。如果丙烯酸类分散剂(B1)的用量低于1重量份,则所得组合物有贮存稳定性降低的倾向;另一方面,如果丙烯酸类分散剂(B1)的用量高于50重量份,有容易在基板上产生残渣的倾向。In the present invention, the amount (in terms of solid content) of the acrylic dispersant (B1) used is preferably 1 to 50 parts by weight, more preferably 3 to 30 parts by weight, based on 100 parts by weight of the (A) pigment. If the amount of acrylic dispersant (B1) is less than 1 part by weight, the resulting composition tends to decrease in storage stability; on the other hand, if the amount of acrylic dispersant (B1) is higher than 50 parts by weight, there is a tendency to Tendency to generate residue on the substrate.
-(C)碱可溶性树脂--(C) Alkali-soluble resin-
本发明中的碱可溶性树脂只要是对(A)颜料起粘合剂的作用,并且对滤色片制造中的显影步骤所用的显影液、特别优选对碱性显影液具有可溶性的物质,则没有特殊限定。其中,优选带有羧基的碱可溶性树脂,更优选分子中有一个或多个羧基的烯键式不饱和单体(以下称为“含羧基不饱和单体”)与其它可共聚的烯键式不饱和单体(以下称为“共聚性不饱和单体”)的共聚物(以下称为“含羧基共聚物”)。As long as the alkali-soluble resin in the present invention acts as a binder for the (A) pigment and is soluble in the developer used in the development step in the production of the color filter, particularly preferably in an alkaline developer, there is no Special limited. Among them, alkali-soluble resins with carboxyl groups are preferred, more preferably ethylenically unsaturated monomers with one or more carboxyl groups in the molecule (hereinafter referred to as "carboxyl-containing unsaturated monomers") and other copolymerizable ethylenically unsaturated monomers. A copolymer (hereinafter referred to as "carboxyl group-containing copolymer") of an unsaturated monomer (hereinafter referred to as "copolymerizable unsaturated monomer").
含羧基不饱和单体包括例如:Carboxy-containing unsaturated monomers include, for example:
(甲基)丙烯酸、巴豆酸、α-氯丙烯酸、肉桂酸等不饱和一羧酸;(Meth)acrylic acid, crotonic acid, α-chloroacrylic acid, cinnamic acid and other unsaturated monocarboxylic acids;
马来酸、马来酸酐、富马酸、衣康酸、衣康酸酐、柠康酸、柠康酸酐、中康酸等不饱和二羧酸或其酸酐;Maleic acid, maleic anhydride, fumaric acid, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, mesaconic acid and other unsaturated dicarboxylic acids or their anhydrides;
三元或三元以上的不饱和多元羧酸或其酸酐;Unsaturated polycarboxylic acids or their anhydrides with three or more valences;
琥珀酸单[2-(甲基)丙烯酰氧基乙基]酯、邻苯二甲酸单[2-(甲基)丙烯酰氧基乙基]酯等二元或二元以上多元羧酸的单[(甲基)丙烯酰氧基烷基]酯;Mono[2-(meth)acryloyloxyethyl] succinate, mono[2-(meth)acryloyloxyethyl] phthalate and other dibasic or more than dibasic polycarboxylic acids Mono[(meth)acryloyloxyalkyl]esters;
ω-羧基聚己内酯单(甲基)丙烯酸酯等两末端带有羧基和羟基的聚合物的单(甲基)丙烯酸酯等。Mono(meth)acrylates of polymers having carboxyl and hydroxyl groups at both ends, such as ω-carboxypolycaprolactone mono(meth)acrylate, and the like.
这些含羧基不饱和单体中,邻苯二甲酸单[2-丙烯酰氧基乙基]酯以商品名M-5400(东亚合成(株)制)有市售。Among these carboxyl group-containing unsaturated monomers, mono[2-acryloyloxyethyl]phthalate is commercially available under the trade name M-5400 (manufactured by Toagosei Co., Ltd.).
上述含羧基不饱和单体可以单独、或者两种或多种混合使用。The above carboxyl group-containing unsaturated monomers can be used alone or in combination of two or more.
另外,共聚性不饱和单体包括例如:In addition, copolymerizable unsaturated monomers include, for example:
马来酰亚胺;Maleimide;
N-苯基马来酰亚胺、N-邻羟基苯基马来酰亚胺、N-间羟基苯基马来酰亚胺、N-对羟基苯基马来酰亚胺、N-苄基马来酰亚胺、N-环己基马来酰亚胺、N-琥珀酰亚胺基(スクシンイミジル)-3-马来酰亚胺苯甲酸盐、N-琥珀酰亚胺基-4-马来酰亚胺丁酸盐、N-琥珀酰亚胺基-6-马来酰亚胺己酸盐、N-琥珀酰亚胺基-3-马来酰亚胺丙酸盐、N-(吖啶基)马来酰亚胺等N-位取代的马来酰亚胺;N-phenylmaleimide, N-o-hydroxyphenylmaleimide, N-m-hydroxyphenylmaleimide, N-p-hydroxyphenylmaleimide, N-benzyl Maleimide, N-cyclohexylmaleimide, N-succinimide-3-maleimide benzoate, N-succinimide-4-maleimide Leimide butyrate, N-succinimidyl-6-maleimide hexanoate, N-succinimidyl-3-maleimide propionate, N-(acridine N-position substituted maleimides such as pyridyl) maleimide;
苯乙烯、α-甲基苯乙烯、邻-乙烯基甲苯、间-乙烯基甲苯、对-乙烯基甲苯、对-氯苯乙烯、邻-甲氧基苯乙烯、间-甲氧基苯乙烯、对-甲氧基苯乙烯、对-羟基-α-甲基苯乙烯、邻-乙烯基苄基甲基醚、间-乙烯基苄基甲基醚、对-乙烯基苄基甲基醚、邻-乙烯基苄基缩水甘油基醚、间-乙烯基苄基缩水甘油基醚、对-乙烯基苄基缩水甘油基醚等芳香族乙烯基化合物;Styrene, α-methylstyrene, o-vinyltoluene, m-vinyltoluene, p-vinyltoluene, p-chlorostyrene, o-methoxystyrene, m-methoxystyrene, p-methoxystyrene, p-hydroxy-α-methylstyrene, o-vinylbenzyl methyl ether, m-vinylbenzyl methyl ether, p-vinylbenzyl methyl ether, o -Aromatic vinyl compounds such as vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether, p-vinylbenzyl glycidyl ether, etc.;
茚、1-甲基茚等茚类;Indene, 1-methylindene and other indene;
(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸正丙酯、(甲基)丙烯酸异丙酯、(甲基)丙烯酸正丁酯、(甲基)丙烯酸异丁酯、(甲基)丙烯酸仲丁酯、(甲基)丙烯酸叔丁酯、2-乙基己基(甲基)丙烯酸酯、2-羟基乙基(甲基)丙烯酸酯、2-羟基丙基(甲基)丙烯酸酯、3-羟基丙基(甲基)丙烯酸酯、2-羟基丁基(甲基)丙烯酸酯、3-羟基丁基(甲基)丙烯酸酯、4-羟基丁基(甲基)丙烯酸酯、烯丙基(甲基)丙烯酸酯、苄基(甲基)丙烯酸酯、环己基(甲基)丙烯酸酯、苯基(甲基)丙烯酸酯、2-甲氧基乙基(甲基)丙烯酸酯、2-苯氧基乙基(甲基)丙烯酸酯、甲氧基二甘醇(甲基)丙烯酸酯、甲氧基三甘醇(甲基)丙烯酸酯、甲氧基丙二醇(甲基)丙烯酸酯、甲氧基二丙二醇(甲基)丙烯酸酯、异冰片基(甲基)丙烯酸酯、三环[5.2.1.02,6]癸-8-基(甲基)丙烯酸酯、2-羟基-3-苯氧基丙基(甲基)丙烯酸酯、甘油单(甲基)丙烯酸酯等不饱和羧酸酯;Methyl (meth)acrylate, ethyl (meth)acrylate, n-propyl (meth)acrylate, isopropyl (meth)acrylate, n-butyl (meth)acrylate, isobutyl (meth)acrylate ester, sec-butyl (meth)acrylate, tert-butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl ( Meth)acrylate, 3-Hydroxypropyl (meth)acrylate, 2-Hydroxybutyl (meth)acrylate, 3-Hydroxybutyl (meth)acrylate, 4-Hydroxybutyl (methyl) ) acrylate, allyl (meth)acrylate, benzyl (meth)acrylate, cyclohexyl (meth)acrylate, phenyl (meth)acrylate, 2-methoxyethyl (meth)acrylate base) acrylate, 2-phenoxyethyl (meth)acrylate, methoxydiethylene glycol (meth)acrylate, methoxytriethylene glycol (meth)acrylate, methoxypropylene glycol ( Meth)acrylate, methoxydipropylene glycol (meth)acrylate, isobornyl (meth)acrylate, tricyclo[5.2.1.0 2,6 ]dec-8-yl (meth)acrylate, 2-Hydroxy-3-phenoxypropyl (meth)acrylate, glycerol mono(meth)acrylate and other unsaturated carboxylic acid esters;
2-氨基乙基(甲基)丙烯酸酯、2-二甲氨基乙基(甲基)丙烯酸酯、2-氨基丙基(甲基)丙烯酸酯、2-二甲氨基丙基(甲基)丙烯酸酯、3-氨基丙基(甲基)丙烯酸酯、3-二甲氨基丙基(甲基)丙烯酸酯等不饱和羧酸氨基烷基酯;2-aminoethyl (meth)acrylate, 2-dimethylaminoethyl (meth)acrylate, 2-aminopropyl (meth)acrylate, 2-dimethylaminopropyl (meth)acrylic acid Unsaturated carboxylic acid aminoalkyl esters such as ester, 3-aminopropyl (meth)acrylate, 3-dimethylaminopropyl (meth)acrylate;
缩水甘油基(甲基)丙烯酸酯等不饱和羧酸缩水甘油酯;Unsaturated carboxylic acid glycidyl esters such as glycidyl (meth)acrylate;
醋酸乙烯酯、丙酸乙烯酯、丁酸乙烯酯、苯甲酸乙烯酯等羧酸乙烯酯;Vinyl carboxylates such as vinyl acetate, vinyl propionate, vinyl butyrate, vinyl benzoate;
乙烯基甲基醚、乙烯基乙基醚、烯丙基缩水甘油醚等不饱和醚;Vinyl methyl ether, vinyl ethyl ether, allyl glycidyl ether and other unsaturated ethers;
(甲基)丙烯腈、α-氯代丙烯腈、偏二氰乙烯等乙烯基氰化合物;(Meth)acrylonitrile, α-chloroacrylonitrile, vinylidene cyanide and other vinyl cyanide compounds;
(甲基)丙烯酰胺、α-氯代丙烯酰胺、N-2-羟乙基(甲基)丙烯酰胺等不饱和酰胺;(Meth)acrylamide, α-chloroacrylamide, N-2-hydroxyethyl (meth)acrylamide and other unsaturated amides;
1,3-丁二烯、异戊二烯、氯丁二烯等脂肪族共轭二烯;1,3-butadiene, isoprene, chloroprene and other aliphatic conjugated dienes;
聚苯乙烯、聚(甲基)丙烯酸甲酯、聚(甲基)丙烯酸正丁酯、聚硅氧烷等聚合物分子链末端带有单(甲基)丙烯酰基的大分子单体等。Macromonomers with a single (meth)acryloyl group at the end of the polymer molecular chain such as polystyrene, polymethyl (meth)acrylate, poly-n-butyl (meth)acrylate, polysiloxane, etc.
这些共聚性不饱和单体可以单独、或者两种或多种混合使用。These copolymerizable unsaturated monomers may be used alone or in combination of two or more.
本发明中的含羧基共聚物优选(c1)以(甲基)丙烯酸作为必要成分,根据情况含有琥珀酸单[2-(甲基)丙烯酰氧基乙基]酯和/或ω-羧基聚己内酯(カクロラクトン)单(甲基)丙烯酸酯的含羧基不饱和单体;(c2)N-位取代的马来酰亚胺;以及(c3)选自苯乙烯、α-甲基苯乙烯、对羟基-α-甲基苯乙烯、(甲基)丙烯酸甲酯、(甲基)丙烯酸正丁酯、2-乙基己基(甲基)丙烯酸酯、2-羟乙基(甲基)丙烯酸酯、(甲基)丙烯酸烯丙酯、(甲基)丙烯酸苄酯、甘油单(甲基)丙烯酸酯、聚苯乙烯大分子单体和聚甲基丙烯酸甲酯大分子单体的其它共聚性不饱和单体中的至少1种的共聚物(以下称为“含羧基共聚物(C1)”)。The carboxyl group-containing copolymer in the present invention preferably (c1) contains (meth)acrylic acid as an essential component, and contains succinic acid mono[2-(meth)acryloyloxyethyl] ester and/or ω-carboxypoly Caprolactone (kacrolacton) mono(meth)acrylate carboxyl unsaturated monomer; (c2) maleimide substituted at N-position; and (c3) selected from styrene, α-methylstyrene , p-hydroxy-α-methylstyrene, methyl (meth)acrylate, n-butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, 2-hydroxyethyl (meth)acrylic acid Other copolymerizability of esters, allyl (meth)acrylate, benzyl (meth)acrylate, glycerol mono(meth)acrylate, polystyrene macromers and polymethylmethacrylate macromers A copolymer of at least one type of unsaturated monomer (hereinafter referred to as "carboxyl group-containing copolymer (C1)").
含羧基共聚物(C1)的优选具体例子包括例如:Preferred specific examples of the carboxyl group-containing copolymer (C1) include, for example:
(甲基)丙烯酸/N-苯基马来酰亚胺/苯乙烯/苄基(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/N-phenylmaleimide/styrene/benzyl (meth)acrylate copolymer;
(甲基)丙烯酸/N-间-羟基苯基马来酰亚胺/苯乙烯/苄基(甲基)丙烯酸酯共聚物;(meth)acrylic acid/N-m-hydroxyphenylmaleimide/styrene/benzyl (meth)acrylate copolymer;
(甲基)丙烯酸/N-对-羟基苯基马来酰亚胺/苯乙烯/苄基(甲基)丙烯酸酯共聚物;(meth)acrylic acid/N-p-hydroxyphenylmaleimide/styrene/benzyl (meth)acrylate copolymer;
(甲基)丙烯酸/N-环己基马来酰亚胺/苯乙烯/苄基(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/N-cyclohexylmaleimide/styrene/benzyl (meth)acrylate copolymer;
(甲基)丙烯酸/N-苯基马来酰亚胺/α-甲基苯乙烯/苄基(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/N-phenylmaleimide/α-methylstyrene/benzyl (meth)acrylate copolymer;
(甲基)丙烯酸/N-苯基马来酰亚胺/苯乙烯/正丁基(甲基)丙烯酸酯共聚物;(meth)acrylic acid/N-phenylmaleimide/styrene/n-butyl (meth)acrylate copolymer;
(甲基)丙烯酸/N-苯基马来酰亚胺/苯乙烯/2-乙基己基(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/N-phenylmaleimide/styrene/2-ethylhexyl (meth)acrylate copolymer;
(甲基)丙烯酸/N-苯基马来酰亚胺/对-羟基-α-甲基苯乙烯/苄基(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/N-phenylmaleimide/p-hydroxy-α-methylstyrene/benzyl (meth)acrylate copolymer;
(甲基)丙烯酸/N-苯基马来酰亚胺/苯乙烯/正丁基(甲基)丙烯酸酯共聚物;(meth)acrylic acid/N-phenylmaleimide/styrene/n-butyl (meth)acrylate copolymer;
(甲基)丙烯酸/N-苯基马来酰亚胺/苯乙烯/2-乙基己基(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/N-phenylmaleimide/styrene/2-ethylhexyl (meth)acrylate copolymer;
(甲基)丙烯酸/N-苯基马来酰亚胺/苯乙烯/2-羟乙基(甲基)丙烯酸酯/苄基(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/N-phenylmaleimide/styrene/2-hydroxyethyl (meth)acrylate/benzyl (meth)acrylate copolymer;
(甲基)丙烯酸/N-苯基马来酰亚胺/苯乙烯/苄基(甲基)丙烯酸酯/甘油单(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/N-phenylmaleimide/styrene/benzyl (meth)acrylate/glycerol mono(meth)acrylate copolymer;
(甲基)丙烯酸/N-对-羟基苯基马来酰亚胺/苯乙烯/苄基(甲基)丙烯酸酯/甘油单(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/N-p-hydroxyphenylmaleimide/styrene/benzyl (meth)acrylate/glycerol mono(meth)acrylate copolymer;
(甲基)丙烯酸/N-苯基马来酰亚胺/苯乙烯/苯基(甲基)丙烯酸酯/2-羟乙基(甲基)丙烯酸酯/聚苯乙烯大分子单体共聚物;(Meth)acrylic acid/N-phenylmaleimide/styrene/phenyl (meth)acrylate/2-hydroxyethyl (meth)acrylate/polystyrene macromonomer copolymer;
(甲基)丙烯酸/N-苯基马来酰亚胺/苯乙烯/苯基(甲基)丙烯酸酯/2-羟乙基(甲基)丙烯酸酯/聚甲基丙烯酸甲酯大分子单体共聚物;(Meth)acrylic acid/N-phenylmaleimide/styrene/phenyl(meth)acrylate/2-hydroxyethyl(meth)acrylate/polymethylmethacrylate macromer copolymer;
(甲基)丙烯酸/琥珀酸单[2-(甲基)丙烯酰氧基乙基]酯/N-苯基马来酰亚胺/苯乙烯/苄基(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/mono[2-(meth)acryloyloxyethyl]succinate/N-phenylmaleimide/styrene/benzyl (meth)acrylate copolymer;
(甲基)丙烯酸/琥珀酸单[2-(甲基)丙烯酰氧基乙基]酯/N-对-羟基苯基马来酰亚胺/苯乙烯/苄基(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/mono[2-(meth)acryloyloxyethyl]succinate/N-p-hydroxyphenylmaleimide/styrene/benzyl(meth)acrylate copolymerization thing;
(甲基)丙烯酸/琥珀酸单[2-(甲基)丙烯酰氧基乙基]酯/N-苯基马来酰亚胺/苯乙烯/烯丙基(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/mono[2-(meth)acryloyloxyethyl]succinate/N-phenylmaleimide/styrene/allyl (meth)acrylate copolymer;
(甲基)丙烯酸/琥珀酸单[2-(甲基)丙烯酰氧基乙基]酯/N-环己基马来酰亚胺/苯乙烯/烯丙基(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/mono[2-(meth)acryloyloxyethyl]succinate/N-cyclohexylmaleimide/styrene/allyl (meth)acrylate copolymer;
(甲基)丙烯酸/琥珀酸单[2-(甲基)丙烯酰氧基乙基]酯/N-环己基马来酰亚胺/苯乙烯/苄基(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/mono[2-(meth)acryloyloxyethyl]succinate/N-cyclohexylmaleimide/styrene/benzyl (meth)acrylate copolymer;
(甲基)丙烯酸/ω-羧基聚己内酯单(甲基)丙烯酸酯/N-间-羟基苯基马来酰亚胺/苯乙烯/苄基(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/omega-carboxypolycaprolactone mono(meth)acrylate/N-m-hydroxyphenylmaleimide/styrene/benzyl (meth)acrylate copolymer;
(甲基)丙烯酸/ω-羧基聚己内酯单(甲基)丙烯酸酯/N-对-羟基苯基马来酰亚胺/苯乙烯/苄基(甲基)丙烯酸酯共聚物;(meth)acrylic acid/omega-carboxypolycaprolactone mono(meth)acrylate/N-p-hydroxyphenylmaleimide/styrene/benzyl (meth)acrylate copolymer;
(甲基)丙烯酸/ω-羧基聚己内酯单(甲基)丙烯酸酯/N-苯基马来酰亚胺/苯乙烯/苄基(甲基)丙烯酸酯/甘油单(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/ω-carboxypolycaprolactone mono(meth)acrylate/N-phenylmaleimide/styrene/benzyl(meth)acrylate/glycerol mono(meth)acrylate ester copolymer;
(甲基)丙烯酸/ω-羧基聚己内酯单(甲基)丙烯酸酯/N-对-羟基苯基马来酰亚胺/苯乙烯/苄基(甲基)丙烯酸酯/甘油单(甲基)丙烯酸酯共聚物等。(Meth)acrylic acid/omega-carboxypolycaprolactone mono(meth)acrylate/N-p-hydroxyphenylmaleimide/styrene/benzyl (meth)acrylate/glycerol mono(meth)acrylate base) acrylate copolymer, etc.
另外,含羧基共聚物(C1)以外的含羧基共聚物包括例如:In addition, carboxyl group-containing copolymers other than carboxyl group-containing copolymer (C1) include, for example:
(甲基)丙烯酸/(甲基)丙烯酸甲酯共聚物;(meth)acrylic acid/methyl (meth)acrylate copolymer;
(甲基)丙烯酸/苄基(甲基)丙烯酸酯共聚物;(meth)acrylic acid/benzyl (meth)acrylate copolymer;
(甲基)丙烯酸/2-羟乙基(甲基)丙烯酸酯/苄基(甲基)丙烯酸酯共聚物;(Meth)acrylic acid/2-hydroxyethyl (meth)acrylate/benzyl (meth)acrylate copolymer;
(甲基)丙烯酸/(甲基)丙烯酸甲酯/聚苯乙烯大分子单体共聚物;(meth)acrylic acid/methyl(meth)acrylate/polystyrene macromer copolymer;
(甲基)丙烯酸/(甲基)丙烯酸甲酯/聚甲基丙烯酸甲酯大分子单体共聚物;(Meth)acrylic acid/methyl (meth)acrylate/polymethyl methacrylate macromer copolymer;
(甲基)丙烯酸/苄基(甲基)丙烯酸酯/聚苯乙烯大分子单体共聚物;(meth)acrylic acid/benzyl (meth)acrylate/polystyrene macromonomer copolymer;
(甲基)丙烯酸/苄基(甲基)丙烯酸酯/聚甲基丙烯酸甲酯大分子单体共聚物;(meth)acrylic acid/benzyl (meth)acrylate/polymethyl methacrylate macromer copolymer;
(甲基)丙烯酸/2-羟乙基(甲基)丙烯酸酯/苄基(甲基)丙烯酸酯/聚苯乙烯大分子单体共聚物;(Meth)acrylic acid/2-hydroxyethyl (meth)acrylate/benzyl (meth)acrylate/polystyrene macromonomer copolymer;
(甲基)丙烯酸/2-羟乙基(甲基)丙烯酸酯/苄基(甲基)丙烯酸酯/聚甲基丙烯酸甲酯大分子单体共聚物等。(Meth)acrylic acid/2-hydroxyethyl (meth)acrylate/benzyl (meth)acrylate/polymethyl methacrylate macromer copolymer, etc.
含羧基共聚物中,含羧基不饱和单体的共聚比例优选为5~50重量%,更优选10~40重量%。该聚合比例低于5重量%时,所得放射线敏感性组合物对碱显影液的溶解性有降低的倾向,而高于50重量%时,对碱显影液的溶解性过大,用碱性显影液显影时,存在容易导致象素从基板脱落或象素表面膜裂的倾向。In the carboxyl group-containing copolymer, the copolymerization ratio of the carboxyl group-containing unsaturated monomer is preferably 5 to 50% by weight, more preferably 10 to 40% by weight. When the polymerization ratio is lower than 5% by weight, the resulting radiation-sensitive composition tends to have a reduced solubility in alkali developing solution, and when it is higher than 50% by weight, the solubility in alkaline developing solution is too large, and the resulting radiation-sensitive composition tends to be less soluble in alkaline developing solution. During liquid development, there is a tendency to cause the pixel to fall off from the substrate or the film on the surface of the pixel to crack.
通过凝胶渗透色谱法(GPC,洗脱溶剂:四氢呋喃)测得的碱可溶性树脂Mw优选为3,000~300,000,更优选为5,000~100,000。The Mw of the alkali-soluble resin measured by gel permeation chromatography (GPC, elution solvent: tetrahydrofuran) is preferably 3,000 to 300,000, more preferably 5,000 to 100,000.
另外,通过凝胶渗透色谱法(GPC,洗脱溶剂:四氢呋喃)测得的碱可溶性树脂Mn优选为3,000~60,000,更优选为5,000~25,000。In addition, Mn of the alkali-soluble resin measured by gel permeation chromatography (GPC, elution solvent: tetrahydrofuran) is preferably 3,000 to 60,000, more preferably 5,000 to 25,000.
碱可溶性树脂的Mw与Mn之比(Mw/Mn)优选为1~5,更优选为1~4。The ratio (Mw/Mn) of Mw to Mn of the alkali-soluble resin is preferably 1-5, more preferably 1-4.
本发明通过使用具有上述特定范围Mw与Mn的碱可溶性树脂,可以获得显影性好的放射线敏感性组合物,由此可以形成锐图像边缘的象素图案,并且显影时难于在未曝光部的基板和遮光层上形成残渣、浮垢和残膜等。In the present invention, by using an alkali-soluble resin having the above-mentioned specific range of Mw and Mn, a radiation-sensitive composition with good developability can be obtained, whereby a pixel pattern with a sharp image edge can be formed, and it is difficult to form a pixel pattern on the unexposed portion of the substrate during development. Formation of residue, scum and residual film etc. on the shading layer.
本发明中,碱可溶性树脂可以单独、或者两种或多种混合使用。In the present invention, the alkali-soluble resins may be used alone or in combination of two or more kinds.
本发明中,相对于(A)颜料100重量份,碱可溶性树脂的用量优选为10~1,000重量份,更优选20~500重量份。如果碱可溶性树脂的用量低于10重量份,则可能出现例如碱显影性降低、或在未曝光部的基板或遮光层上产生浮垢或残膜。另一方面,如果碱可溶性树脂的用量高于1,000重量份,则颜料浓度相对降低,因此作为薄膜可能难于达到目标色密度。In the present invention, the usage-amount of the alkali-soluble resin is preferably 10 to 1,000 parts by weight, more preferably 20 to 500 parts by weight, relative to 100 parts by weight of the (A) pigment. If the amount of the alkali-soluble resin used is less than 10 parts by weight, for example, alkali developability may decrease, or scum or residual film may occur on the substrate or light-shielding layer of the unexposed portion. On the other hand, if the amount of the alkali-soluble resin used is more than 1,000 parts by weight, the pigment concentration is relatively reduced, so it may be difficult to achieve the target color density as a film.
-(D)多官能性单体--(D) Polyfunctional monomer-
本发明的多官能性单体是具有两个或两个以上聚合性不饱和键的单体。The polyfunctional monomer of the present invention is a monomer having two or more polymerizable unsaturated bonds.
多官能性单体包括例如:Multifunctional monomers include, for example:
乙二醇、丙二醇等亚烷基二醇的二(甲基)丙烯酸酯;Di(meth)acrylates of alkylene glycols such as ethylene glycol and propylene glycol;
聚乙二醇、聚丙二醇等聚亚烷基二醇的二(甲基)丙烯酸酯;Di(meth)acrylates of polyalkylene glycols such as polyethylene glycol and polypropylene glycol;
甘油、三羟甲基丙烷、季戊四醇、二季戊四醇等三元或三元以上的多元醇的聚(甲基)丙烯酸酯或其二羧酸改性物;Glycerin, trimethylolpropane, pentaerythritol, dipentaerythritol and other poly(meth)acrylates of trivalent or higher polyhydric alcohols or their dicarboxylic acid modified products;
聚酯、环氧树脂、聚氨酯树脂、醇酸树脂、硅氧烷树脂、螺环树脂等低聚(甲基)丙烯酸酯;Polyester, epoxy resin, polyurethane resin, alkyd resin, silicone resin, spiro ring resin and other oligomeric (meth)acrylates;
两末端为羟基的聚1,3-丁二烯,两末端为羟基的聚异戊二烯、两末端为羟基的聚己内酯等两末端羟基化聚合物的二(甲基)丙烯酸酯,或Di(meth)acrylates of hydroxylated polymers at both ends, such as poly1,3-butadiene having hydroxyl groups at both ends, polyisoprene having hydroxyl groups at both ends, and polycaprolactone having hydroxyl groups at both ends, or
三[2-(甲基)丙烯酰氧基乙基]磷酸酯等。Tris[2-(meth)acryloyloxyethyl]phosphate and the like.
上述多官能性单体中,优选三元或三元以上的多元醇的聚(甲基)丙烯酸酯或其二羧酸改性物,具体为三羟甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯等。从象素强度和表面平滑性好,并且难于在未曝光部分的基板和遮光层上形成浮垢、残膜等方面考虑,特别优选三羟甲基丙烷三丙烯酸酯、季戊四醇三丙烯酸酯和二季戊四醇六丙烯酸酯。Among the above-mentioned polyfunctional monomers, poly(meth)acrylates of trivalent or higher polyhydric alcohols or their dicarboxylic acid modified products are preferred, specifically trimethylolpropane tri(meth)acrylate, Pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, and the like. In terms of pixel intensity and surface smoothness, and it is difficult to form scum and residual film on the substrate and light-shielding layer of the unexposed part, trimethylolpropane triacrylate, pentaerythritol triacrylate and dipentaerythritol are particularly preferred. Hexaacrylate.
上述多官能性单体可以单独、或者两种或多种混合使用。The above polyfunctional monomers may be used alone or in combination of two or more.
本发明中,相对于(C)碱可溶性树脂100重量份,多官能性单体的用量优选为5~500重量份,更优选20~300重量份。如果多官能性单体的用量低于5重量份,则有象素强度和表面平滑性降低的倾向,而多官能性单体的用量高于500重量份时,存在例如碱显影性降低、或在未曝光部的基板或遮光层上容易产生浮垢或残膜等的倾向。In this invention, it is preferable that the usage-amount of a polyfunctional monomer is 5-500 weight part with respect to 100 weight part of (C) alkali-soluble resins, More preferably, it is 20-300 weight part. If the amount of the multifunctional monomer is less than 5 parts by weight, there is a tendency for the pixel strength and surface smoothness to decrease, and when the amount of the multifunctional monomer is higher than 500 parts by weight, for example, the alkali developability decreases, or There is a tendency to generate scum, residual film, etc. on the substrate or light-shielding layer of the unexposed portion.
本发明中,可以用带有1个聚合性不饱和键的单官能性单体代替多官能性单体的一部分。In the present invention, a part of the polyfunctional monomer can be replaced with a monofunctional monomer having one polymerizable unsaturated bond.
作为上述单官能性单体,除了例如与(C)碱可溶性树脂中列举的含羧基不饱和单体或共聚性不饱和单体相同的单体或N-(甲基)丙烯酰基吗啉、N-乙烯基吡咯烷酮、N-乙烯基-ε-己内酰胺以外,还可以列举M-5600(商品名,东亚合成(株)制)等。As the above-mentioned monofunctional monomer, other than the same monomers as the carboxyl group-containing unsaturated monomers or copolymerizable unsaturated monomers listed in (C) Alkali-soluble resin, N-(meth)acryloylmorpholine, N -In addition to vinylpyrrolidone and N-vinyl-ε-caprolactam, M-5600 (trade name, manufactured by Toagosei Co., Ltd.) etc. are mentioned.
上述单官能性单体可以单独、或者两种或多种混合使用。The above-mentioned monofunctional monomers may be used alone or in combination of two or more kinds.
本发明中,相对于多官能性单体和单官能性单体的总量,单官能性单体的使用比例优选低于或等于90重量%,更优选低于或等于50重量%。如果单官能性单体的使用比例高于90重量%,象素强度或表面平滑性就有可能不足。In the present invention, the usage ratio of the monofunctional monomer is preferably less than or equal to 90% by weight, more preferably less than or equal to 50% by weight, based on the total amount of the polyfunctional monomer and the monofunctional monomer. If the usage ratio of the monofunctional monomer is higher than 90% by weight, pixel strength or surface smoothness may be insufficient.
本发明中,相对于(C)碱可溶性树脂100重量份,多官能性单体和单官能性单体的合计使用量优选为5~500重量份,更优选20~300重量份。如果该合计使用量低于5重量份,则有象素强度和表面平滑性降低的倾向,而高于500重量份时,存在例如碱显影性降低、或在未曝光部的基板或遮光层上容易产生浮垢或残膜等的倾向。In this invention, it is preferable that the total usage-amount of a polyfunctional monomer and a monofunctional monomer is 5-500 weight part with respect to 100 weight part of (C) alkali-soluble resins, More preferably, it is 20-300 weight part. If the total amount used is less than 5 parts by weight, there is a tendency for the pixel strength and surface smoothness to decrease, and when it exceeds 500 parts by weight, for example, alkali developability decreases, or the substrate or light-shielding layer of the unexposed portion Tendency to generate scum or residual film easily.
-(E)光聚合引发剂--(E) Photopolymerization initiator-
本发明中,光聚合引发剂是能够通过可见光、紫外线、远紫外线、电子射线、X射线等放射线的曝光,产生能使上述(D)多官能性单体以及根据情况使用的单官能性单体开始聚合的活性种的化合物。In the present invention, the photopolymerization initiator is capable of generating the above-mentioned (D) polyfunctional monomer and the monofunctional monomer used according to the case by exposure to radiation such as visible light, ultraviolet rays, far ultraviolet rays, electron rays, and X-rays. The active species of compound that initiates polymerization.
所述光聚合引发剂包括例如乙酰苯类化合物、联咪唑类化合物、三嗪类化合物、苯偶姻类化合物、二苯酮类化合物、α-二酮类化合物、多核醌类化合物、呫吨酮类化合物、重氮类化合物等。The photopolymerization initiator includes, for example, acetophenone compounds, biimidazole compounds, triazine compounds, benzoin compounds, benzophenone compounds, α-diketone compounds, polynuclear quinone compounds, xanthone compounds, diazo compounds, etc.
本发明中,光聚合引发剂可以单独、或者两种或多种混合使用。本发明中的光聚合引发剂优选选自乙酰苯类化合物、联咪唑类化合物和三嗪类化合物中的至少一种。In the present invention, the photopolymerization initiators may be used alone or in combination of two or more. The photopolymerization initiator in the present invention is preferably at least one selected from acetophenone compounds, biimidazole compounds and triazine compounds.
本发明优选的光聚合引发剂中,乙酰苯类化合物的具体例子包括2-羟基-2-甲基-1-苯基丙酮-1、2-甲基-1-(4-甲硫基苯基)-2-吗啉代丙酮-1、2-苄基-2-二甲氨基-1-(4-吗啉代苯基)丁酮-1、1-羟基环己基·苯基酮、2,2-二甲氧基-1,2-二苯基乙酮-1等。Among the preferred photopolymerization initiators of the present invention, specific examples of acetophenone compounds include 2-hydroxy-2-methyl-1-phenylacetone-1, 2-methyl-1-(4-methylthiophenyl )-2-morpholinoacetone-1, 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl) butanone-1, 1-hydroxycyclohexyl phenyl ketone, 2, 2-dimethoxy-1,2-diphenylethanone-1, etc.
上述乙酰苯类化合物中,特别优选2-甲基-1-(4-甲硫基苯基)-2-吗啉代丙酮-1、2-苄基-2-二甲氨基-1-(4-吗啉代苯基)丁酮-1等。Among the above-mentioned acetophenone compounds, particularly preferred 2-methyl-1-(4-methylthiophenyl)-2-morpholinoacetone-1, 2-benzyl-2-dimethylamino-1-(4 -morpholinophenyl) butanone-1 and the like.
上述乙酰苯类化合物可以单独、或者两种或多种混合使用。The above acetophenone compounds can be used alone or in combination of two or more.
本发明中,用乙酰苯类化合物作为光聚合引发剂时,相对于(D)多官能性单体和单官能性单体的合计重量100重量份,其使用量优选为0.01~100重量份,更优选1~80重量份,进一步优选5~60重量份。如果乙酰苯类化合物的用量低于0.01重量份,则可能通过曝光进行的固化不充分,难于得到象素图案按照预定排列配置的着色层。另一方面,如果该用量高于100重量份,则所形成的象素在显影时有易于从基板脱落的倾向。In the present invention, when an acetophenone compound is used as a photopolymerization initiator, the amount used is preferably 0.01 to 100 parts by weight relative to 100 parts by weight of the total weight of (D) polyfunctional monomers and monofunctional monomers, More preferably, it is 1-80 weight part, More preferably, it is 5-60 weight part. If the amount of the acetophenone compound used is less than 0.01 parts by weight, curing by exposure may be insufficient, making it difficult to obtain a colored layer in which pixel patterns are arranged in a predetermined arrangement. On the other hand, if the amount is more than 100 parts by weight, the formed pixels tend to be easily peeled off from the substrate at the time of development.
另外,上述联咪唑类化合物的具体例子包括例如2,2’-双(2-氯苯基)-4,4’,5,5’-四(4-乙氧基羰基苯基)-1,2’-联咪唑、2,2’-双(2-溴苯基)-4,4’,5,5’-四(4-乙氧基羰基苯基)-1,2’-联咪唑、2,2’-双(2-氯苯基)-4,4’,5,5’-四苯基-1,2’-联咪唑、2,2’-双(2,4-二氯苯基)-4,4’,5,5’-四苯基-1,2’-联咪唑、2,2’-双(2,4,6-三氯苯基)-4,4’,5,5’-四苯基-1,2’-联咪唑、2,2’-双(2-溴苯基)-4,4’,5,5’-四苯基-1,2’-联咪唑、2,2’-双(2,4-二溴苯基)-4,4’,5,5’-四苯基-1,2’-联咪唑、2,2’-双(2,4,6-三溴苯基)-4,4’,5,5’-四苯基-1,2’-联咪唑等。In addition, specific examples of the above-mentioned biimidazole compounds include, for example, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetrakis(4-ethoxycarbonylphenyl)-1, 2'-biimidazole, 2,2'-bis(2-bromophenyl)-4,4',5,5'-tetrakis(4-ethoxycarbonylphenyl)-1,2'-biimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis(2,4-dichlorobenzene base)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis(2,4,6-trichlorophenyl)-4,4',5 , 5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis(2-bromophenyl)-4,4',5,5'-tetraphenyl-1,2'-bis Imidazole, 2,2'-bis(2,4-dibromophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis(2, 4,6-tribromophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, etc.
上述联咪唑类化合物中,更优选2,2’-双(2-氯苯基)-4,4’,5,5’-四苯基-1,2’-联咪唑、2,2’-双(2,4-二氯苯基)-4,4’,5,5’-四苯基-1,2’-联咪唑、2,2’-双(2,4,6-三氯苯基)-4,4’,5,5’-四苯基-1,2’-联咪唑等。特别优选2,2’-双(2,4-二氯苯基)-4,4’,5,5’-四苯基-1,2’-联咪唑。Among the above-mentioned biimidazole compounds, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, 2,2'- Bis(2,4-dichlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis(2,4,6-trichlorobenzene base)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, etc. Particular preference is given to 2,2'-bis(2,4-dichlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole.
上述联咪唑类化合物在溶剂中的溶解性好,不会产生不溶物、析出物等异物,并且灵敏度高,通过低能量的曝光就可以使固化反应充分进行,而且不会在未曝光部分发生固化反应,因此,曝光后的被膜被明确分为不溶于显影液的固化部分和在显影液中具有高溶解性的未固化部分。由此可以形成没有undercut的象素图案按照预定排列配置的高精细着色层。The above-mentioned biimidazole compounds have good solubility in solvents, will not produce foreign matter such as insolubles and precipitates, and have high sensitivity. The curing reaction can be fully carried out through low-energy exposure, and no curing will occur in the unexposed part. Therefore, the film after exposure is clearly divided into a cured portion that is insoluble in the developer and an uncured portion that is highly soluble in the developer. Thereby, a high-definition colored layer in which pixel patterns without undercut are arranged in a predetermined arrangement can be formed.
上述联咪唑类化合物可以单独、或者两种或多种混合使用。The above-mentioned biimidazole compounds can be used alone or in combination of two or more.
本发明中,用联咪唑类化合物作为光聚合引发剂时,相对于(D)多官能性单体和单官能性单体的合计重量100重量份,其使用量优选为0.01~40重量份,更优选1~30重量份,进一步优选1~20重量份。如果联咪唑类化合物的用量低于0.01重量份,则可能通过曝光进行的固化不充分,难于得到象素图案按照预定排列配置的着色层。另一方面,如果该用量高于40重量份,则所形成的象素在显影时有易于从基板脱落的倾向。In the present invention, when a biimidazole compound is used as a photopolymerization initiator, the amount used is preferably 0.01 to 40 parts by weight relative to 100 parts by weight of the total weight of (D) polyfunctional monomer and monofunctional monomer, More preferably, it is 1-30 weight part, More preferably, it is 1-20 weight part. If the amount of the biimidazole compound used is less than 0.01 parts by weight, curing by exposure may be insufficient, making it difficult to obtain a colored layer in which pixel patterns are arranged in a predetermined arrangement. On the other hand, if the amount is more than 40 parts by weight, the formed pixels tend to be easily peeled off from the substrate at the time of development.
-氢供体--Hydrogen donor-
本发明中,用联咪唑类化合物作为光聚合引发剂时,与下述氢供体并用可以进一步提高灵敏度,因此优选。In the present invention, when a biimidazole compound is used as a photopolymerization initiator, it is preferable to use it together with a hydrogen donor described below because the sensitivity can be further improved.
所谓“氢供体”是指能够对通过曝光由联咪唑类化合物产生的游离基提供氢原子的化合物。The term "hydrogen donor" refers to a compound capable of donating a hydrogen atom to a radical generated from a biimidazole compound by exposure.
本发明中的氢供体优选下述定义的硫醇类化合物和胺类化合物等。The hydrogen donor in the present invention is preferably a thiol compound, an amine compound, etc. defined below.
所述硫醇类化合物包括以苯环或杂环为母核,并且含有1个或多个、优选1~3个、更优选1~2个与该母核直接结合的巯基的化合物(以下称为“硫醇类氢供体”)。The thiol compound includes a benzene ring or a heterocyclic ring as the core, and contains 1 or more, preferably 1 to 3, more preferably 1 to 2 mercapto groups directly bonded to the core (hereinafter referred to as as "thiol hydrogen donor").
所述胺类化合物包括以苯环或杂环为母核,并且含有1个或多个、优选1~3个、更优选1~2个与该母核直接相连的氨基的化合物(以下称为“胺类氢供体”)。The amine compounds include compounds with a benzene ring or a heterocyclic ring as the core and one or more, preferably 1 to 3, more preferably 1 to 2 amino groups directly connected to the core (hereinafter referred to as "amine hydrogen donor").
另外,这些氢供体也可以同时具有巯基和氨基。In addition, these hydrogen donors may have both a mercapto group and an amino group.
以下更具体地说明这些氢供体。These hydrogen donors are described more specifically below.
硫醇类氢供体可以分别包含苯环或杂环1个或1个以上,也可以包含苯环和杂环两者。含有两个或两个以上的所述环时,可以形成或不形成稠环。The thiol-based hydrogen donor may contain one or more benzene rings or heterocycles, or may contain both benzene rings and heterocycles. When two or more of the above-mentioned rings are contained, a condensed ring may or may not be formed.
另外,硫醇类氢供体具有两个或多个巯基时,只要残留至少1个游离巯基,其余巯基中的一个或多个可以被烷基、芳烷基或芳基取代。并且只要残留至少1个游离巯基,可以具有两个硫原子通过亚烷基等二价有机基团结合的结构单元,或两个硫原子以二硫醚的形式结合的结构单元。In addition, when the thiol-type hydrogen donor has two or more mercapto groups, as long as at least one free mercapto group remains, one or more of the remaining mercapto groups may be substituted by an alkyl group, an aralkyl group or an aryl group. And as long as at least one free mercapto group remains, it may have a structural unit in which two sulfur atoms are bonded through a divalent organic group such as an alkylene group, or a structural unit in which two sulfur atoms are bonded in the form of a disulfide.
并且,硫醇类氢供体可以在巯基以外的地方被羧基、烷氧基羰基、取代烷氧基羰基、苯氧基羰基、取代苯氧基羰基和腈(ニトリル)基等取代。In addition, the thiol hydrogen donor may be substituted by a carboxyl group, alkoxycarbonyl group, substituted alkoxycarbonyl group, phenoxycarbonyl group, substituted phenoxycarbonyl group, nitril group, etc. other than the mercapto group.
所述硫醇类氢供体的具体例子包括2-巯基苯并噻唑、2-巯基苯并噁唑、2-巯基苯并咪唑、2,5-二巯基-1,3,4-噻二唑、2-巯基-2,5-二甲基氨基吡啶等。Specific examples of the thiol hydrogen donor include 2-mercaptobenzothiazole, 2-mercaptobenzoxazole, 2-mercaptobenzimidazole, 2,5-dimercapto-1,3,4-thiadiazole , 2-mercapto-2,5-dimethylaminopyridine, etc.
上述硫醇类氢供体中,优选2-巯基苯并噻唑、2-巯基苯并噁唑等,特别优选2-巯基苯并噻唑。Among the above-mentioned thiol hydrogen donors, 2-mercaptobenzothiazole, 2-mercaptobenzoxazole, etc. are preferable, and 2-mercaptobenzothiazole is particularly preferable.
其次,胺类氢供体可以分别包含苯环或杂环1个或1个以上,也可以包含苯环和杂环两者。含有两个或两个以上的所述环时,可以形成或不形成稠环。Next, the amine hydrogen donor may contain one or more benzene rings or heterocycles, or may contain both benzene rings and heterocycles. When two or more of the above-mentioned rings are contained, a condensed ring may or may not be formed.
另外,胺类氢供体可以有1个或多个氨基被烷基或取代烷基取代,并且还可以在氨基以外的地方被羧基、烷氧基羰基、取代烷氧基羰基、苯氧基羰基、取代苯氧基羰基和腈基等取代。In addition, the amine hydrogen donor can have one or more amino groups substituted by alkyl or substituted alkyl, and can also be substituted by carboxyl, alkoxycarbonyl, substituted alkoxycarbonyl, phenoxycarbonyl in places other than amino , Substituted phenoxycarbonyl and nitrile etc. substitutions.
所述胺类氢供体的具体例子包括4,4’-双(二甲氨基)二苯甲酮、4,4’-双(二乙氨基)二苯甲酮、4-二乙氨基苯乙酮、4-二甲氨基苯基·乙基甲酮、乙基-4-二甲氨基苯甲酸酯、4-二甲氨基苯甲酸、4-二甲氨基苄腈等。Specific examples of the amine hydrogen donor include 4,4'-bis(dimethylamino)benzophenone, 4,4'-bis(diethylamino)benzophenone, 4-diethylaminophenethyl Ketones, 4-dimethylaminophenyl ethyl ketone, ethyl-4-dimethylaminobenzoate, 4-dimethylaminobenzoic acid, 4-dimethylaminobenzonitrile, etc.
上述胺类氢供体中,优选4,4’-双(二甲氨基)二苯甲酮、4,4’-双(二乙氨基)二苯甲酮等,特别优选4,4’-双(二乙氨基)二苯甲酮。Among the above-mentioned amine hydrogen donors, 4,4'-bis(dimethylamino)benzophenone, 4,4'-bis(diethylamino)benzophenone, etc. are preferred, and 4,4'-bis (Diethylamino)benzophenone.
另外,胺类氢供体在使用联咪唑类化合物以外的光聚合引发剂时,有敏化剂的作用。In addition, the amine hydrogen donor functions as a sensitizer when a photopolymerization initiator other than the biimidazole compound is used.
本发明中,氢供体可以单独、或者两种或多种混合使用。从所形成的象素在显影时不易从基板脱落、以及象素的强度和灵敏度高的方面考虑,优选组合使用1种或多种硫醇类氢供体与1种或多种胺类氢供体。In the present invention, hydrogen donors may be used alone or in combination of two or more. In view of the fact that the formed pixel is not easy to fall off from the substrate during development, and the intensity and sensitivity of the pixel are high, it is preferable to use one or more thiol hydrogen donors in combination with one or more amine hydrogen donors. body.
硫醇类氢供体与胺类氢供体组合的具体优选例子包括2-巯基苯并噻唑/4,4’-双(二甲氨基)二苯甲酮、2-巯基苯并噻唑/4,4’-双(二乙氨基)二苯甲酮、2-巯基苯并噁唑/4,4’-双(二甲氨基)二苯甲酮、2-巯基苯并噁唑/4,4’-双(二乙氨基)二苯甲酮等。更优选的组合包括2-巯基苯并噻唑/4,4’-双(二乙氨基)二苯甲酮、2-巯基苯并噁唑/4,4’-双(二乙氨基)二苯甲酮等,特别优选的组合是2-巯基苯并噻唑/4,4’-双(二乙氨基)二苯甲酮。Specific preferred examples of combinations of thiol hydrogen donors and amine hydrogen donors include 2-mercaptobenzothiazole/4,4'-bis(dimethylamino)benzophenone, 2-mercaptobenzothiazole/4, 4'-bis(diethylamino)benzophenone, 2-mercaptobenzoxazole/4,4'-bis(dimethylamino)benzophenone, 2-mercaptobenzoxazole/4,4' - Bis(diethylamino)benzophenone and the like. More preferred combinations include 2-mercaptobenzothiazole/4,4'-bis(diethylamino)benzophenone, 2-mercaptobenzoxazole/4,4'-bis(diethylamino)benzophenone Ketones and the like, and a particularly preferable combination is 2-mercaptobenzothiazole/4,4'-bis(diethylamino)benzophenone.
硫醇类氢供体和胺类氢供体的组合中,硫醇类氢供体与胺类氢供体的重量比优选为1∶1~1∶4,更优选为1∶1~1∶3。In the combination of the thiol hydrogen donor and the amine hydrogen donor, the weight ratio of the thiol hydrogen donor to the amine hydrogen donor is preferably 1:1 to 1:4, more preferably 1:1 to 1: 3.
本发明中,将氢供体与联咪唑类化合物并用时,相对于(D)多官能性单体和单官能性单体的合计重量100重量份,氢供体的用量优选为0.01~40重量份,更优选1~30重量份,进一步优选1~20重量份。如果氢供体的用量低于0.01重量份,则灵敏度的改善效果有降低倾向,而该用量高于40重量份时,所形成的象素在显影时有易于从基板脱落的倾向。In the present invention, when a hydrogen donor is used in combination with a biimidazole compound, the amount of the hydrogen donor used is preferably 0.01 to 40 parts by weight based on 100 parts by weight of the total of (D) polyfunctional monomers and monofunctional monomers. parts, more preferably 1 to 30 parts by weight, even more preferably 1 to 20 parts by weight. If the amount of the hydrogen donor is less than 0.01 parts by weight, the sensitivity improvement effect tends to decrease, and when the amount exceeds 40 parts by weight, the formed pixels tend to be easily peeled off from the substrate during development.
另外,上述三嗪类化合物的具体例子包括2,4,6-三(三氯甲基)-s-三嗪、2-甲基-4,6-二(三氯甲基)-s-三嗪、2-[2-(5-甲基呋喃-2-基)乙烯基]-4,6-二(三氯甲基)-s-三嗪、2-[2-(呋喃-2-基)乙烯基]-4,6-二(三氯甲基)-s-三嗪、2-[2-(4-二乙氨基-2-甲基苯基)乙烯基]-4,6-二(三氯甲基)-s-三嗪、2-[2-(3,4-二甲氧苯基)乙烯基]-4,6-二(三氯甲基)-s-三嗪、2-(4-甲氧基苯基]-4,6-二(三氯甲基)-s-三嗪、2-(4-乙氧基苯乙烯基]-4,6-二(三氯甲基)-s-三嗪和2-(4-正丁氧基苯基]-4,6-二(三氯甲基)-s-三嗪等具有卤代甲基的三嗪类化合物。In addition, specific examples of the aforementioned triazine compounds include 2,4,6-tris(trichloromethyl)-s-triazine, 2-methyl-4,6-bis(trichloromethyl)-s-triazine, Oxazine, 2-[2-(5-methylfuran-2-yl)vinyl]-4,6-bis(trichloromethyl)-s-triazine, 2-[2-(furan-2-yl ) vinyl] -4,6-bis(trichloromethyl)-s-triazine, 2-[2-(4-diethylamino-2-methylphenyl) vinyl]-4,6-two (Trichloromethyl)-s-triazine, 2-[2-(3,4-dimethoxyphenyl)vinyl]-4,6-bis(trichloromethyl)-s-triazine, 2 -(4-methoxyphenyl]-4,6-bis(trichloromethyl)-s-triazine, 2-(4-ethoxystyryl]-4,6-bis(trichloromethyl) Triazine compounds with halomethyl groups, such as base)-s-triazine and 2-(4-n-butoxyphenyl]-4,6-bis(trichloromethyl)-s-triazine.
上述三嗪类化合物中,特别优选2-[2-(3,4-二甲氧苯基)乙烯基]-4,6-二(三氯甲基)-s-三嗪。Among the above-mentioned triazine compounds, 2-[2-(3,4-dimethoxyphenyl)vinyl]-4,6-bis(trichloromethyl)-s-triazine is particularly preferable.
上述三嗪类化合物可以单独、或者两种或多种混合使用。The above-mentioned triazine compounds can be used alone or in combination of two or more kinds.
本发明中,用三嗪类化合物作为光聚合引发剂时,相对于(D)多官能性单体和单官能性单体的合计重量100重量份,三嗪类化合物的用量优选为0.01~40重量份,更优选1~30重量份,进一步优选1~20重量份。如果三嗪类化合物的用量低于0.01重量份,则恐怕通过曝光进行的固化不充分,难于得到象素图案按照预定排列配置的着色层,而该用量高于40重量份时,所形成的象素在显影时有易于从基板脱落的倾向。In the present invention, when a triazine compound is used as a photopolymerization initiator, the amount of the triazine compound used is preferably 0.01 to 40 parts by weight relative to the total weight of (D) polyfunctional monomer and monofunctional monomer. Parts by weight, more preferably 1 to 30 parts by weight, still more preferably 1 to 20 parts by weight. If the amount of the triazine compound is less than 0.01 parts by weight, then it is likely that the curing by exposure will be insufficient, and it will be difficult to obtain a colored layer in which the pixel pattern is configured according to a predetermined arrangement, and when the amount is higher than 40 parts by weight, the formed image The pigment tends to be easily peeled off from the substrate during development.
-添加剂成分--Additive ingredients-
本发明的滤色片用放射线敏感性组合物中,根据需要还可以包含各种添加剂成分。The radiation-sensitive composition for color filters of the present invention may contain various additive components as necessary.
作为上述添加剂成分,可以列举具有进一步改善放射线敏感性组合物在碱显影液中的溶解性、并且进一步抑制显影后不溶物残留的作用等的有机酸或有机氨基化合物(除上述氢供体之外)等。Examples of the above-mentioned additive components include organic acids or organic amino compounds (other than the above-mentioned hydrogen donors) that have the effect of further improving the solubility of the radiation-sensitive composition in an alkaline developer and further suppressing the insoluble matter remaining after development. )wait.
上述有机酸优选分子中有1个或多个羧基的脂肪族羧酸或含苯基羧酸。The above-mentioned organic acid is preferably an aliphatic carboxylic acid or a phenyl-containing carboxylic acid having one or more carboxyl groups in the molecule.
所述脂肪族羧酸包括例如:The aliphatic carboxylic acids include, for example:
甲酸、乙酸、丙酸、丁酸、戊酸、三甲基乙酸、己酸、二乙基乙酸、庚酸、辛酸等脂肪族单羧酸;Formic acid, acetic acid, propionic acid, butyric acid, valeric acid, trimethylacetic acid, hexanoic acid, diethylacetic acid, heptanoic acid, octanoic acid and other aliphatic monocarboxylic acids;
草酸、丙二酸、琥珀酸、戊二酸、己二酸、庚二酸、辛二酸、壬二酸、癸二酸、ブラシル酸、甲基丙二酸、乙基丙二酸、二甲基丙二酸、甲基琥珀酸、四甲基琥珀酸、环己烷二羧酸、衣康酸、柠康酸、马来酸、富马酸、中康酸等脂肪族二羧酸;Oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, brasilic acid, methylmalonic acid, ethylmalonic acid, dimethylmalonic acid Aliphatic dicarboxylic acids such as malonic acid, methylsuccinic acid, tetramethylsuccinic acid, cyclohexanedicarboxylic acid, itaconic acid, citraconic acid, maleic acid, fumaric acid, and mesaconic acid;
丙三羧酸、乌头酸、樟脑三酸等脂肪族三羧酸等。Aliphatic tricarboxylic acids such as propanetricarboxylic acid, aconitic acid, and camphortricarboxylic acid, etc.
另外,上述含苯基羧酸可包括例如羧基直接与苯基相连的化合物、或羧基通过二价碳链与苯基相连的化合物等。In addition, the above-mentioned phenyl-containing carboxylic acid may include, for example, a compound in which a carboxyl group is directly connected to a phenyl group, or a compound in which a carboxyl group is connected to a phenyl group through a divalent carbon chain, and the like.
含苯基羧酸包括例如:Phenyl-containing carboxylic acids include, for example:
苯甲酸、甲苯酸、枯酸、2,3-二甲基苯甲酸、3,5-二甲基苯甲酸等芳香族单羧酸;Aromatic monocarboxylic acids such as benzoic acid, toluic acid, cumic acid, 2,3-dimethylbenzoic acid, 3,5-dimethylbenzoic acid;
邻苯二甲酸、间苯二甲酸、对苯二甲酸等芳香族二羧酸;Aromatic dicarboxylic acids such as phthalic acid, isophthalic acid, and terephthalic acid;
偏苯三酸、均苯三酸、偏苯四酸、均苯四酸等三元或三元以上的芳香族多元羧酸;或Trimellitic acid, trimellitic acid, trimellitic acid, pyromellitic acid and other three or more aromatic polycarboxylic acids; or
苯基乙酸、氢化阿托酸、氢化肉桂酸、扁桃酸、苯基琥珀酸、阿托酸、肉桂酸、シンナミリデン酸、クマル酸、伞形酸等。Phenylacetic acid, hydrogenated atropic acid, hydrogenated cinnamic acid, mandelic acid, phenylsuccinic acid, atropic acid, cinnamic acid, cinnamiriden acid, kumaric acid, umbelliferic acid, and the like.
上述有机酸中,从碱溶解性、在后述溶剂中的溶解性、防止未曝光部分的基板和遮光层上的浮垢或残膜等方面考虑,脂肪族羧酸优选脂肪族二羧酸,特别优选丙二酸、己二酸、衣康酸、柠康酸、富马酸和中康酸等,含苯基羧酸优选芳香族二羧酸,并且特别优选邻苯二甲酸。Among the above-mentioned organic acids, the aliphatic carboxylic acid is preferably an aliphatic dicarboxylic acid in terms of alkali solubility, solubility in a solvent described later, and prevention of scum or residual film on the unexposed portion of the substrate and the light-shielding layer. Particularly preferred are malonic acid, adipic acid, itaconic acid, citraconic acid, fumaric acid, mesaconic acid, and the like, phenyl-containing carboxylic acids are preferably aromatic dicarboxylic acids, and phthalic acid is particularly preferred.
上述有机酸可以单独、或者两种或多种混合使用。The above organic acids may be used alone or in combination of two or more.
相对于(A)~(E)成分和添加剂成分的合计重量100重量份,有机酸的用量优选低于或等于15重量份,更优选低于或等于10重量份。如果有机酸的用量低于15重量份,则所形成的象素与基板的密着性有降低的倾向。The amount of the organic acid used is preferably 15 parts by weight or less, more preferably 10 parts by weight or less, based on 100 parts by weight of the total of components (A) to (E) and additive components. If the amount of the organic acid used is less than 15 parts by weight, the adhesion between the formed pixel and the substrate tends to decrease.
另外,上述有机氨基化合物优选分子中有一个或多个氨基的脂肪族胺或含苯基胺。In addition, the above-mentioned organic amino compound is preferably an aliphatic amine or a phenylamine containing one or more amino groups in the molecule.
所述脂肪族胺包括例如:The aliphatic amines include, for example:
正丙胺、异丙胺、正丁胺、异丁胺、仲丁胺、叔丁胺、正戊胺、正己胺等单(环)烷基胺;N-propylamine, isopropylamine, n-butylamine, isobutylamine, sec-butylamine, tert-butylamine, n-pentylamine, n-hexylamine and other mono(cyclo)alkylamines;
甲基·乙基胺、二乙基胺、甲基·正丙基胺、乙基·正丙基胺、二正丙基胺、二异丙基胺、二正丁基胺、二异丁基胺、二仲丁基胺、二叔丁基胺等二(环)烷基胺;Methyl ethylamine, diethylamine, methyl n-propylamine, ethyl n-propylamine, di-n-propylamine, diisopropylamine, di-n-butylamine, diisobutylamine Amine, di-sec-butylamine, di-tert-butylamine and other di(cyclo)alkylamines;
二甲基.乙基胺、甲基·二乙基胺、三乙胺、二甲基·正丙基胺、二乙基.正丙基胺、甲基·二正丙基胺、乙基·二正丙基胺、三正丙基胺、三异丙基胺、三正丁基胺、三异丁基胺、三仲丁基胺、三叔丁基胺等三(环)烷基胺;Dimethyl, ethylamine, methyl, diethylamine, triethylamine, dimethyl, n-propylamine, diethyl, n-propylamine, methyl, di-n-propylamine, ethyl Di-n-propylamine, tri-n-propylamine, triisopropylamine, tri-n-butylamine, triisobutylamine, tri-sec-butylamine, tri-tert-butylamine and other tri(cyclo)alkylamines;
2-氨基乙醇、3-氨基-1-丙醇、1-氨基-2-丙醇、4-氨基-1-丁醇等单(环)链烷醇胺;2-aminoethanol, 3-amino-1-propanol, 1-amino-2-propanol, 4-amino-1-butanol and other mono(cyclic) alkanolamines;
二乙醇胺、二正丙醇胺、二异丙醇胺、二正丁醇胺、二异丁醇胺等二(环)链烷醇胺;Two (ring) alkanolamines such as diethanolamine, di-n-propanolamine, diisopropanolamine, di-n-butanolamine, and diisobutanolamine;
三乙醇胺、三正丙醇胺、三异丙醇胺、三正丁醇胺、三异丁醇胺等三(环)链烷醇胺;Triethanolamine, tri-n-propanolamine, triisopropanolamine, tri-n-butanolamine, triisobutanolamine and other tri(cyclic) alkanolamines;
3-氨基-1,2-丙二醇、2-氨基-1,3-丙二醇、4-氨基-1,2-丁二醇、4-氨基-1,3-丁二醇、3-二甲氨基-1,2-丙二醇、3-二乙氨基-1,2-丙二醇、2-二甲氨基-1,3-丙二醇、2-二乙氨基-1,3-丙二醇等氨基(环)烷二醇;3-amino-1,2-propanediol, 2-amino-1,3-propanediol, 4-amino-1,2-butanediol, 4-amino-1,3-butanediol, 3-dimethylamino- 1,2-propanediol, 3-diethylamino-1,2-propanediol, 2-dimethylamino-1,3-propanediol, 2-diethylamino-1,3-propanediol and other amino (cyclo)alkanediols;
β-丙氨酸、2-氨基丁酸、3-氨基丁酸、4-氨基丁酸、2-氨基异丁酸、3-氨基异丁酸等氨基羧酸等。Aminocarboxylic acids such as β-alanine, 2-aminobutyric acid, 3-aminobutyric acid, 4-aminobutyric acid, 2-aminoisobutyric acid, 3-aminoisobutyric acid, etc.
含苯基胺包括例如氨基与苯基直接相连的化合物、氨基通过二价碳链与苯基相连的化合物等。Phenyl-containing amines include, for example, compounds in which the amino group is directly linked to the phenyl group, compounds in which the amino group is linked to the phenyl group through a divalent carbon chain, and the like.
含苯基胺包括例如:Phenylamines include, for example:
苯胺、邻-甲基苯胺、间-甲基苯胺、对-甲基苯胺、对-乙基苯胺、1-萘胺、2-萘胺、N,N-二甲基苯胺、N,N-二乙基苯胺、对-甲基-N,N-二甲基苯胺等芳香族胺;Aniline, o-methylaniline, m-methylaniline, p-methylaniline, p-ethylaniline, 1-naphthylamine, 2-naphthylamine, N,N-dimethylaniline, N,N-di Aromatic amines such as ethylaniline, p-methyl-N, N-dimethylaniline;
邻-氨基苄醇、间-氨基苄醇、对-氨基苄醇、对-二甲氨基苄醇、对-二乙氨基苄醇等氨基苄醇类;o-aminobenzyl alcohol, m-aminobenzyl alcohol, p-aminobenzyl alcohol, p-dimethylaminobenzyl alcohol, p-diethylaminobenzyl alcohol and other aminobenzyl alcohols;
邻-氨基苯酚、间-氨基苯酚、对-氨基苯酚、对-二甲氨基苯酚、对-二乙氨基苯酚等氨基酚类;o-aminophenol, m-aminophenol, p-aminophenol, p-dimethylaminophenol, p-diethylaminophenol and other aminophenols;
间-氨基苯甲酸、对-氨基苯甲酸、对-二甲氨基苯甲酸、对-二乙氨基苯甲酸等氨基苯甲酸类等。Aminobenzoic acids such as m-aminobenzoic acid, p-aminobenzoic acid, p-dimethylaminobenzoic acid, p-diethylaminobenzoic acid, and the like.
上述有机氨基化合物中,从在后述溶剂中的溶解性、防止未曝光部分的基板和遮光层上的浮垢或残膜等方面考虑,脂肪族胺优选单(环)链烷醇胺和氨基(环)烷二醇,特别优选2-氨基乙醇、3-氨基-1-丙醇、5-氨基-1-戊醇、3-氨基-1,2-丙二醇、2-氨基-1,3-丙二醇、4-氨基-1,2-丁二醇等。含苯基胺优选氨基酚类,特别优选邻-氨基苯酚、间-氨基苯酚、对-氨基苯酚等。Among the above-mentioned organic amino compounds, the aliphatic amines are preferably mono(cyclic)alkanolamines and amino groups from the viewpoints of solubility in solvents described later, and prevention of scum or residual film on unexposed substrates and light-shielding layers. (Cyclo)alkanediols, particularly preferably 2-aminoethanol, 3-amino-1-propanol, 5-amino-1-pentanol, 3-amino-1,2-propanediol, 2-amino-1,3- Propylene glycol, 4-amino-1,2-butanediol and the like. Phenyl-containing amines are preferably aminophenols, and particularly preferably o-aminophenol, m-aminophenol, p-aminophenol and the like.
上述有机氨基化合物可以单独、或者两种或多种混合使用。The above organic amino compounds may be used alone or in combination of two or more.
相对于(A)~(E)成分和添加剂成分的合计重量100重量份,有机氨基化合物的用量优选低于或等于15重量份,更优选低于或等于10重量份。如果有机氨基化合物的用量超过15重量份,则所形成的象素与基板的密着性有降低的倾向。The amount of the organic amino compound used is preferably 15 parts by weight or less, more preferably 10 parts by weight or less, based on 100 parts by weight of the total of components (A) to (E) and additive components. If the amount of the organic amino compound exceeds 15 parts by weight, the adhesion between the formed pixel and the substrate tends to decrease.
另外,上述以外的添加剂成分包括例如:In addition, additive ingredients other than the above include, for example:
铜酞菁衍生物等蓝颜料衍生物或黄颜料衍生物等分散助剂;Dispersion aids such as blue pigment derivatives such as copper phthalocyanine derivatives or yellow pigment derivatives;
玻璃、氧化铝等填充剂;Fillers such as glass and alumina;
聚乙烯醇、聚乙二醇单烷基醚、聚(氟代烷基丙烯酸酯)等高分子化合物;High molecular compounds such as polyvinyl alcohol, polyethylene glycol monoalkyl ether, poly(fluoroalkyl acrylate);
非离子类、阳离子类、阴离子类等表面活性剂;Non-ionic, cationic, anionic and other surfactants;
乙烯基三甲氧基硅烷、乙烯基三乙氧基硅烷、乙烯基三(2-甲氧基乙氧基)硅烷、N-(2-氨基乙基)-3-氨基丙基·甲基·二甲氧基硅烷、N-(2-氨基乙基)-3-氨基丙基三甲氧基硅烷、3-氨基丙基三乙氧基硅烷、3-环氧丙氧基丙基三甲氧基硅烷、3-环氧丙氧基丙基·甲基·二甲氧基硅烷、2-(3,4-环氧基环己基)乙基三甲氧基硅烷、3-氯丙基·甲基·二甲氧基硅烷、3-氯丙基三甲氧基硅烷、3-甲基丙烯酰氧基丙基三甲氧基硅烷、3-巯基丙基三甲氧基硅烷等密着促进剂;Vinyltrimethoxysilane, Vinyltriethoxysilane, Vinyltris(2-methoxyethoxy)silane, N-(2-Aminoethyl)-3-Aminopropyl·Methyl·Di Methoxysilane, N-(2-aminoethyl)-3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-Glycidoxypropyl Methyl Dimethoxysilane, 2-(3,4-Epoxycyclohexyl) Ethyl Trimethoxysilane, 3-Chloropropyl Methyl Dimethoxysilane Oxysilane, 3-chloropropyltrimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-mercaptopropyltrimethoxysilane and other adhesion promoters;
2,2-硫代双(4-甲基-6-叔丁基苯酚)、2,6-二叔丁基苯酚等抗氧剂;2,2-thiobis(4-methyl-6-tert-butylphenol), 2,6-di-tert-butylphenol and other antioxidants;
2-(3-叔丁基-5-甲基-2-羟基苯基)-5-氯苯并三唑、烷氧基二苯甲酮类等紫外线吸收剂;2-(3-tert-butyl-5-methyl-2-hydroxyphenyl)-5-chlorobenzotriazole, alkoxybenzophenones and other UV absorbers;
聚丙烯酸钠等抗凝剂;Anticoagulants such as sodium polyacrylate;
1,1’-偶氮双(环己-1-腈)、2-苯基偶氮-4-甲氧基-2,4-二甲基戊腈等热自由基发生剂等。Thermal radical generators such as 1,1'-azobis(cyclohexa-1-carbonitrile), 2-phenylazo-4-methoxy-2,4-dimethylvaleronitrile, etc.
(F)溶剂(F) solvent
本发明中的溶剂可以适当选择使用分散或溶解构成放射线敏感性组合物的(A)~(E)成分和添加剂、并且不与这些成分反应、具有适度挥发性的溶剂。The solvent in the present invention can be appropriately selected from a solvent that disperses or dissolves (A) to (E) components and additives constituting the radiation-sensitive composition, does not react with these components, and has moderate volatility.
所述溶剂包括例如:Such solvents include, for example:
甲醇、乙醇、苄醇等醇类;Methanol, ethanol, benzyl alcohol and other alcohols;
乙二醇单甲基醚、乙二醇单乙基醚、乙二醇单正丙基醚、乙二醇单正丁基醚、二甘醇单甲基醚、二甘醇单乙基醚、二甘醇单正丙基醚、二甘醇单正丁基醚、三甘醇单甲基醚、三甘醇单乙基醚、丙二醇单甲基醚、丙二醇单乙基醚、二丙二醇单甲基醚、二丙二醇单乙基醚、二丙二醇单正丙基醚、二丙二醇单正丁基醚、三丙二醇单甲基醚、三丙二醇单乙基醚等(聚)亚烷基二醇单烷基醚;Ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol mono-n-propyl ether, ethylene glycol mono-n-butyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, Diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether Dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether, etc. base ether;
乙二醇单甲基醚乙酸酯、乙二醇单乙基醚乙酸酯、乙二醇单正丙基醚乙酸酯、乙二醇单正丁基醚乙酸酯、二甘醇单甲基醚乙酸酯、二甘醇单乙基醚乙酸酯、二甘醇单正丙基醚乙酸酯、二甘醇单正丁基醚乙酸酯、丙二醇单甲基醚乙酸酯、丙二醇单乙基醚乙酸酯、3-甲氧基丁基乙酸酯等(聚)亚烷基二醇单烷基醚乙酸酯;Ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol mono-n-propyl ether acetate, ethylene glycol mono-n-butyl ether acetate, diethylene glycol mono Methyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol mono-n-propyl ether acetate, diethylene glycol mono-n-butyl ether acetate, propylene glycol monomethyl ether acetate , propylene glycol monoethyl ether acetate, 3-methoxybutyl acetate, etc. (poly)alkylene glycol monoalkyl ether acetate;
二甘醇二甲基醚、二甘醇甲基乙基醚、二甘醇二乙基醚、四氢呋喃等醚类;Diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether, diethylene glycol diethyl ether, tetrahydrofuran and other ethers;
甲基乙基酮、环己酮、2-庚酮、3-庚酮、双丙酮醇(4-羟基-4-甲基戊-2-酮)、4-羟基-4-甲基己-2-酮等酮类;Methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone, diacetone alcohol (4-hydroxy-4-methylpentan-2-one), 4-hydroxy-4-methylhexan-2 - ketones such as ketones;
乳酸甲酯、乳酸乙酯等乳酸烷基酯;Lactate alkyl esters such as methyl lactate and ethyl lactate;
乙酸乙酯、乙酸正丙酯、乙酸异丙酯、乙酸正丁酯、乙酸异丁酯、甲酸正戊酯、乙酸异戊酯、3-甲基-3-甲氧基丁基乙酸酯、丙酸正丁酯、3-甲基-3-甲氧基丁基丙酸酯、丁酸乙酯、丁酸正丙酯、丁酸异丙酯、丁酸正丁酯、羟基乙酸乙酯、乙氧基乙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸正丙酯、乙酰乙酸甲酯、乙酰乙酸乙酯、2-羟基-2-甲基丙酸乙酯、2-羟基-3-甲基丁酸甲酯、2-氧代丁酸乙酯等酯类;Ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, isobutyl acetate, n-pentyl formate, isoamyl acetate, 3-methyl-3-methoxybutyl acetate, n-butyl propionate, 3-methyl-3-methoxybutyl propionate, ethyl butyrate, n-propyl butyrate, isopropyl butyrate, n-butyl butyrate, ethyl glycolate, Ethoxyethyl acetate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, methyl pyruvate ester, ethyl pyruvate, n-propyl pyruvate, methyl acetoacetate, ethyl acetoacetate, ethyl 2-hydroxy-2-methylpropionate, methyl 2-hydroxy-3-methylbutyrate, 2 - Esters such as ethyl oxobutyrate;
甲苯、二甲苯等芳烃;Aromatic hydrocarbons such as toluene and xylene;
N-甲基吡咯烷酮、N,N-二甲基甲酰胺、N,N-二甲基乙酰胺等酰胺类等。Amides such as N-methylpyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, etc.
上述溶剂中,从溶解性、颜料分散性、涂布性等方面考虑,优选苄醇、乙二醇单正丁基醚、丙二醇单甲基醚、丙二醇单乙基醚、乙二醇单甲基醚乙酸酯、乙二醇单正丁基醚乙酸酯、二甘醇单正丁基醚乙酸酯、丙二醇单甲基醚乙酸酯、丙二醇单乙基醚乙酸酯、二甘醇二甲基醚、二甘醇甲基乙基醚、环己酮、2-庚酮、3-庚酮、乙酸正丁酯、乙酸异丁酯、甲酸正戊酯、乙酸异戊酯、3-甲氧基丁基乙酸酯、丙酸正丁酯、丁酸乙酯、丁酸异丙酯、丁酸正丁酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、3-甲基-3-甲氧基丁基丙酸酯、丙酮酸乙酯等。Among the above-mentioned solvents, benzyl alcohol, ethylene glycol mono-n-butyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, ethylene glycol monomethyl ether, etc. Ether acetate, ethylene glycol mono-n-butyl ether acetate, diethylene glycol mono-n-butyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, diethylene glycol Dimethyl ether, diethylene glycol methyl ethyl ether, cyclohexanone, 2-heptanone, 3-heptanone, n-butyl acetate, isobutyl acetate, n-pentyl formate, isoamyl acetate, 3- Methoxybutyl acetate, n-butyl propionate, ethyl butyrate, isopropyl butyrate, n-butyl butyrate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate ester, ethyl 3-ethoxypropionate, 3-methyl-3-methoxybutylpropionate, ethyl pyruvate, etc.
上述溶剂可以单独、或者两种或多种混合使用。The above solvents may be used alone or in combination of two or more.
另外,上述溶剂还可以与苄基乙基醚、二己基醚、丙酮基丙酮、异佛尔酮、己酸、辛酸、1-辛醇、1-壬醇、乙酸苄酯、苯甲酸乙酯、草酸二乙酯、马来酸二乙酯、γ-丁内酯、碳酸亚乙酯、碳酸亚丙酯、乙二醇单苯基醚乙酸酯等高沸点溶剂并用。In addition, the above-mentioned solvents can also be mixed with benzyl ethyl ether, dihexyl ether, acetonylacetone, isophorone, caproic acid, octanoic acid, 1-octanol, 1-nonanol, benzyl acetate, ethyl benzoate, Diethyl oxalate, diethyl maleate, γ-butyrolactone, ethylene carbonate, propylene carbonate, ethylene glycol monophenyl ether acetate and other high boiling point solvents are used together.
上述高沸点溶剂可以单独、或者两种或多种混合使用。The above-mentioned high boiling point solvents may be used alone or in combination of two or more kinds.
对溶剂的用量没有特殊限制,但从所得放射线敏感性组合物的涂布性、贮存稳定性等方面考虑,除该组合物中的溶剂外的其它各成分的总浓度优选为5~50重量%,更优选10~40重量%。There is no special limitation on the amount of solvent used, but in view of the applicability and storage stability of the obtained radiation-sensitive composition, the total concentration of other components except the solvent in the composition is preferably 5 to 50% by weight , more preferably 10 to 40% by weight.
-滤色片用放射线敏感性组合物的制备方法--Manufacturing method of radiation-sensitive composition for color filter-
对本发明滤色片用放射线敏感性组合物的制备方法没有特殊限制,但优选经过预先使(A)颜料分散在包含(B)分散剂、(C)碱可溶性树脂和(F)溶剂的介质中的步骤进行制备。The preparation method of the radiation-sensitive composition for color filters of the present invention is not particularly limited, but it is preferred to disperse (A) pigment in a medium containing (B) dispersant, (C) alkali-soluble resin and (F) solvent in advance. steps for preparation.
以下将预先使(A)颜料分散在上述介质中的步骤称为“预备分散步骤”,预先使(A)颜料分散在上述介质中所得的分散液称为“预备分散液”。Hereinafter, the step of dispersing the (A) pigment in the above-mentioned medium in advance is referred to as a "preliminary dispersion step", and the dispersion obtained by dispersing the (A) pigment in the above-mentioned medium in advance is referred to as a "preliminary dispersion".
预备分散步骤中(C)碱可溶性树脂的用量相对滤色片用放射线敏感性组合物中(C)碱可溶性树脂用量,优选为5~100重量%,更优选为10~50重量%。此时,如果(C)碱可溶性树脂的用量低于5重量%,则有所得组合物的贮存稳定性降低、或容易在基板上产生残渣的倾向。The amount of the (C) alkali-soluble resin used in the preliminary dispersion step is preferably 5 to 100% by weight, more preferably 10 to 50% by weight relative to the amount of the (C) alkali-soluble resin used in the radiation-sensitive composition for color filters. In this case, when the usage-amount of (C) alkali-soluble resin is less than 5 weight%, the storage stability of the obtained composition will fall, and there exists a tendency for a residue to generate|occur|produce easily on a board|substrate.
预备分散步骤可以例如通过使用溶解器、珠磨机、棒磨机等混合装置混合上述各成分来进行。The preliminary dispersion step can be performed, for example, by mixing the above-mentioned components using a mixing device such as a dissolver, a bead mill, or a rod mill.
这样得到的预备分散液中,(A)颜料的平均粒径优选为50~400nm,更优选为50~150nm。In the preliminary dispersion thus obtained, the (A) pigment has an average particle diameter of preferably 50 to 400 nm, more preferably 50 to 150 nm.
继预备分散步骤之后,预备分散液与(D)多官能性单体和(E)光聚合引发剂、以及根据情况还有(C)碱可溶性树脂和(F)溶剂,将其-起通过常规方法混合,由此可以获得本发明的滤色片用放射线敏感性组合物。Following the preliminary dispersion step, the preliminary dispersion liquid is passed through conventional By mixing the methods, the radiation-sensitive composition for color filters of the present invention can be obtained.
滤色片的形成方法Method for forming color filters
下面说明使用本发明的滤色片用放射线敏感性组合物(以下简称为“放射线敏感性组合物”)形成本发明滤色片的方法。A method for forming the color filter of the present invention using the radiation-sensitive composition for color filters of the present invention (hereinafter simply referred to as "radiation-sensitive composition") will be described below.
本发明滤色片的形成方法至少包括下述(1)~(4)的步骤。The method for forming the color filter of the present invention at least includes the following steps (1) to (4).
(1)在基板上形成本发明放射线敏感性组合物被膜的步骤;(1) a step of forming a film of the radiation-sensitive composition of the present invention on a substrate;
(2)用放射线将上述被膜的至少一部分曝光的步骤;(2) a step of exposing at least a part of the film to radiation;
(3)将曝光后的所述被膜显影的步骤;(3) a step of developing the film after exposure;
(4)将显影后的所述被膜后烘焙的步骤。(4) A step of post-baking the developed film.
以下依次说明上述步骤。The above steps will be described in sequence below.
-(1)步骤--(1) Step-
首先,根据需要在基板的表面上以划分形成象素的部分的方式形成遮光层,在该基板上涂布本发明的放射线敏感性组合物,然后进行预烘焙,使溶剂蒸发,从而形成被膜。First, if necessary, a light-shielding layer is formed on the surface of a substrate so as to divide portions where pixels are to be formed, and the radiation-sensitive composition of the present invention is coated on the substrate, followed by prebaking to evaporate the solvent to form a film.
该步骤中使用的基板包括例如玻璃、硅、聚碳酸酯、聚酯、芳香族聚酰胺、聚酰胺酰亚胺、聚酰亚胺和聚酯砜,此外还有环状烯烃的开环聚合物或其加氢产物等。Substrates used in this step include, for example, glass, silicon, polycarbonate, polyester, aramid, polyamideimide, polyimide, and polyestersulfone, in addition to ring-opening polymers of cyclic olefins or its hydrogenation products, etc.
另外,这些基板还可以根据需要进行采用硅烷偶联剂等的药品处理、等离子处理、离子电镀、溅射、气相反应法和真空蒸镀等适当的预处理。In addition, these substrates can also undergo appropriate pretreatments such as chemical treatment with silane coupling agents, plasma treatment, ion plating, sputtering, gas phase reaction method, and vacuum evaporation as required.
将放射线敏感性组合物涂布在基板上时,可以采用旋涂、流延涂布、辊涂等适当的涂布法,其中优选采用旋涂器或缝模涂布器的涂布法。When coating the radiation-sensitive composition on the substrate, appropriate coating methods such as spin coating, cast coating, and roll coating can be used, among which coating methods using a spin coater or a slot die coater are preferred.
预烘焙的条件优选温度为70~110℃、时间为2~4分钟左右。Prebaking conditions are preferably a temperature of 70 to 110° C. and a time of about 2 to 4 minutes.
涂布厚度以干燥后的膜厚计优选为0.1~8.0μm,更优选0.2~6.0μm,进一步优选0.2~4.0μm。The coating thickness is preferably 0.1 to 8.0 μm, more preferably 0.2 to 6.0 μm, and still more preferably 0.2 to 4.0 μm in terms of the film thickness after drying.
-(2)步骤--(2) Steps-
然后,用放射线使所形成的被膜至少一部分曝光。该步骤中,使被膜的一部分曝光时,优选通过具有预定图案的光掩模进行曝光。Then, at least a part of the formed film is exposed to radiation. In this step, when exposing a part of the film, it is preferable to expose through a photomask having a predetermined pattern.
曝光所用的放射线可以适当选用例如可见光、紫外线、远紫外线、电子射线和X射线等放射线,优选波长在190~450nm范围内的放射线。The radiation used for exposure can be suitably selected from radiation such as visible light, ultraviolet rays, deep ultraviolet rays, electron beams, and X-rays, preferably radiation with a wavelength in the range of 190 to 450 nm.
放射线曝光量优选为10~10,000J/m2左右。The amount of radiation exposure is preferably about 10 to 10,000 J/m 2 .
-(3)步骤--(3) Steps-
接着,将曝光后的被膜用显影液、优选碱显影液显影,溶解除去被膜的未曝光部分,由此形成预定图案。Next, the exposed coating is developed with a developing solution, preferably an alkaline developing solution, and unexposed portions of the coating are dissolved and removed, whereby a predetermined pattern is formed.
所述碱显影液优选例如碳酸钠、氢氧化钠、氢氧化钾、氢氧化四甲基铵、胆碱、1,8-二氮杂双环-[5.4.0]-7-十一碳烯和1,5-二氮杂双环-[4.3.0]-5-壬烯等的水溶液。The alkali developing solution is preferably such as sodium carbonate, sodium hydroxide, potassium hydroxide, tetramethylammonium hydroxide, choline, 1,8-diazabicyclo-[5.4.0]-7-undecene and Aqueous solutions of 1,5-diazabicyclo-[4.3.0]-5-nonene and the like.
上述碱显影液中也可以适量添加例如甲醇、乙醇等水溶性有机溶剂或表面活性剂等。另外,碱显影后优选被水洗。A suitable amount of water-soluble organic solvents such as methanol and ethanol, surfactants, and the like may be added to the above-mentioned alkaline developing solution. Moreover, it is preferable to wash with water after alkali image development.
显影处理法可以应用喷淋(シヤワ-)显影法、喷雾显影法、浸渍显影法和パドル显影法等。As the developing treatment method, a shower developing method, a spray developing method, a dip developing method, a paddle developing method, and the like can be applied.
显影条件优选温度为常温、时间为5~300秒左右。As image development conditions, temperature is preferably normal temperature, and time is about 5 to 300 seconds.
-(4)步骤--(4) Steps-
然后,将显影后的被膜后烘焙,由此可以得到象素图案以预定排列配置的基板。Then, by post-baking the developed film, a substrate in which pixel patterns are arranged in a predetermined array can be obtained.
后烘焙的处理条件优选例如温度为180~240℃、时间为15~90分钟左右。这样形成的象素的膜厚优选0.1~6.0μm,更优选0.5~3.0μm。The post-baking treatment conditions are preferably, for example, a temperature of 180 to 240° C. and a time of about 15 to 90 minutes. The film thickness of the pixel thus formed is preferably 0.1 to 6.0 µm, more preferably 0.5 to 3.0 µm.
通过用分散了红色、绿色或蓝色颜料的各放射线敏感性组合物重复进行上述(1)~(4)步骤,在同一基板上形成红色、绿色和蓝色象素图案,由此可以在基板上形成红色、绿色和蓝色三原色的象素图案以预定排列配置的着色层。By repeating the steps (1) to (4) above with each radiation sensitive composition dispersed with red, green or blue pigments, red, green and blue pixel patterns are formed on the same substrate. A colored layer in which pixel patterns of the three primary colors of red, green and blue are arranged in a predetermined arrangement is formed on it.
另外,本发明中可以任意选择各色象素图案的形成顺序。In addition, in the present invention, the order of forming the pixel patterns of each color can be selected arbitrarily.
滤色片color filter
本发明的滤色片用本发明的滤色片用放射线敏感性组合物形成。The color filter of the present invention is formed from the radiation-sensitive composition for color filters of the present invention.
除了透射型或反射型彩色液晶显示装置,本发明的滤色片在彩色摄像管元件、彩色传感器中非常有用。In addition to transmissive or reflective color liquid crystal display devices, the color filter of the present invention is very useful in color imaging tube elements and color sensors.
彩色液晶显示装置Color liquid crystal display device
本发明的彩色液晶显示装置具有本发明的滤色片。The color liquid crystal display device of the present invention has the color filter of the present invention.
本发明的彩色液晶显示装置可以采用适当的结构。例如,可以采用下述结构:使滤色片形成于配置了薄膜晶体管(TFT)的驱动用基板以外的基板上,驱动用基板与形成了滤色片的基板通过液晶层相对。也可以采用以下结构:在配置了薄膜晶体管(TFT)的驱动用基板表面上形成滤色片,该基板与ITO(掺杂锡的氧化铟)电极的基板通过液晶层相对。后一结构可以大幅提高孔径比,有能够得到明亮且高精细液晶显示装置的优点。The color liquid crystal display device of the present invention can adopt an appropriate structure. For example, a configuration may be adopted in which color filters are formed on a substrate other than a driving substrate on which thin film transistors (TFTs) are disposed, and the driving substrate and the substrate on which color filters are formed face each other through a liquid crystal layer. A structure may also be adopted in which a color filter is formed on the surface of a driving substrate on which thin film transistors (TFTs) are disposed, and the substrate is opposed to a substrate of ITO (tin-doped indium oxide) electrodes via a liquid crystal layer. The latter structure can greatly increase the aperture ratio, and has the advantage of being able to obtain a bright and high-definition liquid crystal display device.
实施例Example
以下通过实施例更具体地说明本发明的实施方案,但本发明不限于以下实施例。Embodiments of the present invention will be described more specifically by way of examples below, but the present invention is not limited to the following examples.
实施例1Example 1
将作为(A)颜料的C.I.颜料红254/C.I.颜料红177=80/20(重量比)的混合物15重量份、作为(B)分散剂的Disperbyk-2001(固体成分浓度45.1重量%)5重量份(按固体成分换算,约2.26重量份)、作为(C)碱可溶性树脂的甲基丙烯酸/N-苯基马来酰亚胺/苯乙烯/苄基甲基丙烯酸酯共聚物(共聚重量比=20/30/20/30,Mw=9,500,Mn=5,000)6重量份以及作为(F)溶剂的丙二醇单甲基醚乙酸酯37重量份和3-乙氧基丙酸乙酯37重量份,用珠磨机进行处理,制备预备分散液(R1)。15 parts by weight of a mixture of C.I. Pigment Red 254/C.I. Pigment Red 177=80/20 (weight ratio) as (A) pigment, and 5 parts by weight of Disperbyk-2001 (solid content concentration: 45.1% by weight) as (B) dispersant parts (in terms of solid content, about 2.26 parts by weight), methacrylic acid/N-phenylmaleimide/styrene/benzyl methacrylate copolymer as (C) alkali-soluble resin (copolymerization weight ratio =20/30/20/30, Mw=9,500, Mn=5,000) 6 parts by weight and 37 parts by weight of propylene glycol monomethyl ether acetate and 37 parts by weight of ethyl 3-ethoxy propionate as the (F) solvent Parts were treated with a bead mill to prepare a preliminary dispersion (R1).
然后,混合预备分散液(R1)100重量份、作为(C)碱可溶性树脂的甲基丙烯酸/琥珀酸单(2-甲基丙烯酰氧基乙基)酯/N-苯基马来酰亚胺/苯乙烯/苄基甲基丙烯酸酯共聚物(共聚重量比=25/10/30/20/15,Mw=12,000,Mn=6,500)5重量份、作为(D)多官能性单体的二季戊四醇六丙烯酸酯10重量份、作为(E)光聚合引发剂的2-甲基-(4-甲硫基苯基)-2-吗啉代-1-丙酮-15重量份以及作为(F)溶剂的3-甲氧基丁基乙酸酯70重量份,制备放射线敏感性组合物。Then, 100 parts by weight of the preliminary dispersion liquid (R1), methacrylic acid/succinic acid mono(2-methacryloyloxyethyl) ester/N-phenylmaleimide as (C) alkali-soluble resin were mixed. Amine/styrene/benzyl methacrylate copolymer (copolymerization weight ratio=25/10/30/20/15, Mw=12,000, Mn=6,500) 5 parts by weight, as (D) polyfunctional monomer 10 parts by weight of dipentaerythritol hexaacrylate, 2-methyl-(4-methylthiophenyl)-2-morpholino-1-acetone-15 parts by weight as (E) photopolymerization initiator, and 15 parts by weight as (F ) 70 parts by weight of 3-methoxybutyl acetate as a solvent to prepare a radiation-sensitive composition.
实施例2Example 2
将作为(A)颜料的C.I.颜料绿36/C.I.颜料黄138/C.I.颜料黄150=50/40/10(重量比)的混合物15重量份、作为(B)分散剂的Disperbyk-2001 7.5重量份(按固体成分换算,约3.38重量份)、作为(C)碱可溶性树脂的甲基丙烯酸/ω-羧基二己内酯单丙烯酸酯/N-苯基马来酰亚胺/苯乙烯/苄基甲基丙烯酸酯/甘油单甲基丙烯酸酯共聚物(共聚重量比=15/10/20/10/35/10,Mw=6,000,Mn=3,000)4重量份以及作为(F)溶剂的丙二醇单甲基醚乙酸酯73.5重量份,与实施例1同法处理,制备预备分散液(G1)。Pigment Green 36/C.I. Pigment Yellow 138/C.I. Pigment Yellow 150=50/40/10 (weight ratio) mixture 15 parts by weight as (A) pigment, Disperbyk-2001 7.5 parts by weight as (B) dispersant (about 3.38 parts by weight in terms of solid content), as (C) alkali-soluble resin, methacrylic acid/ω-carboxydicaprolactone monoacrylate/N-phenylmaleimide/styrene/benzyl 4 parts by weight of methacrylate/glycerol monomethacrylate copolymer (copolymerization weight ratio=15/10/20/10/35/10, Mw=6,000, Mn=3,000) and propylene glycol mono 73.5 parts by weight of methyl ether acetate were treated in the same manner as in Example 1 to prepare a preliminary dispersion (G1).
然后,混合预备分散液(G1)100重量份、作为(C)碱可溶性树脂的甲基丙烯酸/N-苯基马来酰亚胺/苯乙烯/苄基甲基丙烯酸酯/甘油单甲基丙烯酸酯共聚物(共聚重量比=15/25/15/35/10,Mw=13,500,Mn=6,000)5重量份、作为(D)多官能性单体的二季戊四醇六丙烯酸酯10重量份、作为(E)光聚合引发剂的2-苄基-2-二甲氨基-1-(4-吗啉代苯基)丁酮-15重量份以及作为(F)溶剂的3-乙氧基丙酸乙酯70重量份,制备放射线敏感性组合物。Then, 100 parts by weight of the preliminary dispersion liquid (G1), methacrylic acid/N-phenylmaleimide/styrene/benzyl methacrylate/glycerin monomethacrylic acid as the (C) alkali-soluble resin were mixed 5 parts by weight of ester copolymer (copolymer weight ratio = 15/25/15/35/10, Mw = 13,500, Mn = 6,000), 10 parts by weight of dipentaerythritol hexaacrylate as (D) polyfunctional monomer, as (E) 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl) butanone-15 parts by weight of photopolymerization initiator and 3-ethoxypropionic acid as (F) solvent 70 parts by weight of ethyl ester to prepare a radiation-sensitive composition.
实施例3Example 3
将作为(A)颜料的C.I.颜料蓝15/C.I.颜料紫23=90/10(重量比)的混合物15重量份、作为(B)分散剂的Disperbyk-2001 10重量份(按固体成分换算,4.51重量份)、作为(C)碱可溶性树脂的丙烯酸/N-苯基马来酰亚胺/苯乙烯/苯基甲基丙烯酸酯/2-羟乙基甲基丙烯酸酯/聚甲基丙烯酸甲酯大分子单体共聚物(共聚重量比=15/20/10/35/10/10,Mw=23,000,Mn=11,000)2重量份以及作为(F)溶剂的丙二醇单甲基醚乙酸酯63重量份和丙二醇单甲基醚10重量份,与实施例1同法处理,制备预备分散液(B1)。Pigment Blue 15/C.I. Pigment Violet 23=90/10 (weight ratio) mixture 15 parts by weight as (A) pigment, Disperbyk-2001 10 parts by weight as (B) dispersant (calculated by solid content, 4.51 parts by weight), acrylic acid/N-phenylmaleimide/styrene/phenyl methacrylate/2-hydroxyethyl methacrylate/polymethyl methacrylate as (C) alkali-soluble resin Macromonomer copolymer (copolymerization weight ratio=15/20/10/35/10/10, Mw=23,000, Mn=11,000) 2 parts by weight and 63 propylene glycol monomethyl ether acetate as (F) solvent Parts by weight and 10 parts by weight of propylene glycol monomethyl ether were treated in the same way as in Example 1 to prepare a preliminary dispersion (B1).
然后,混合预备分散液(B1)100重量份、作为(C)碱可溶性树脂的甲基丙烯酸/N-苯基马来酰亚胺/α-甲基苯乙烯/苄基甲基丙烯酸酯共聚物(共聚重量比=20/25/25/30,Mw=43,000,Mn=21,000)10重量份、作为(D)多官能性单体的二季戊四醇六丙烯酸酯20重量份、作为(E)光聚合引发剂的2-甲基-(4-甲硫基苯基)-2-吗啉代-1-丙酮-15重量份以及作为(F)溶剂的3-甲基-3-甲氧基丁基乙酸酯30重量份和丙二醇单乙基醚乙酸酯80,制备放射线敏感性组合物。Then, 100 parts by weight of the preliminary dispersion liquid (B1) and methacrylic acid/N-phenylmaleimide/α-methylstyrene/benzyl methacrylate copolymer as (C) alkali-soluble resin were mixed (Copolymerization weight ratio=20/25/25/30, Mw=43,000, Mn=21,000) 10 parts by weight, dipentaerythritol hexaacrylate as (D) polyfunctional monomer 20 parts by weight, as (E) photopolymerization 2-methyl-(4-methylthiophenyl)-2-morpholino-1-acetone-15 parts by weight of initiator and 3-methyl-3-methoxybutyl as (F) solvent 30 parts by weight of acetate and 80 parts by weight of propylene glycol monoethyl ether acetate were used to prepare a radiation-sensitive composition.
实施例4Example 4
在预备分散步骤中,用甲基丙烯酸/N-苯基马来酰亚胺/苯乙烯/正丁基甲基丙烯酸酯共聚物(共聚重量比=20/30/20/30,Mw=8,000,Mn=4,000)6重量份代替实施例1中的(C)碱可溶性树脂6重量份;在与预备分散液(R1)混合的步骤中,用甲基丙烯酸/N-苯基马来酰亚胺/苯乙烯/2-乙基己基甲基丙烯酸酯共聚物(共聚重量比=20/30/20/30,Mw=14,000,Mn=6,500)5重量份代替实施例1中的(C)碱可溶性树脂5重量份,其它与实施例1相同,制备放射线敏感性组合物。In the preliminary dispersion step, methacrylic acid/N-phenylmaleimide/styrene/n-butyl methacrylate copolymer (copolymerization weight ratio=20/30/20/30, Mw=8,000, Mn= 4,000) 6 parts by weight instead of (C) 6 parts by weight of alkali-soluble resin in embodiment 1; Ethylene/2-ethylhexyl methacrylate copolymer (copolymer weight ratio=20/30/20/30, Mw=14,000, Mn=6,500) 5 parts by weight instead of (C) alkali-soluble resin 5 in Example 1 parts by weight, and the others are the same as in Example 1 to prepare a radiation-sensitive composition.
比较例1Comparative example 1
用ソルスパ-スS24000(胺值=50,酸值=25)2.5重量份代替实施例1中预备分散液(R1)的(B)分散剂Disperbyk-2001 5重量份,其它与实施例1相同,制备放射线敏感性组合物。Replace the (B) dispersant Disperbyk-2001 5 parts by weight of pre-dispersion liquid (R1) in embodiment 1 with 2.5 parts by weight of solsupa-su S24000 (amine value=50, acid value=25), and other are identical with embodiment 1, Preparation of radiation-sensitive compositions.
比较例2Comparative example 2
用甲基丙烯酸/苄基甲基丙烯酸酯共聚物(共聚重量比=25/75,Mw=13,000,Mn=6,500)代替实施例1中预备分散液(R1)的(C)碱可溶性树脂的甲基丙烯酸/N-苯基马来酰亚胺/苯乙烯/苄基甲基丙烯酸酯共聚物。另外,用甲基丙烯酸/2-羟乙基甲基丙烯酸酯/苄基甲基丙烯酸酯共聚物(共聚重量比=15/15/70,Mw=16,000,Mn=7,500)代替实施例1中的(C)碱可溶性树脂甲基丙烯酸/琥珀酸单(2-甲基丙烯酰氧基乙基)酯/N-苯基马来酰亚胺/苯乙烯/苄基甲基丙烯酸酯共聚物,其它与实施例1相同,制备放射线敏感性组合物。Use methacrylic acid/benzyl methacrylate copolymer (copolymerization weight ratio = 25/75, Mw = 13,000, Mn = 6,500) to replace the formazan of (C) alkali-soluble resin in the preliminary dispersion (R1) in Example 1. Acrylic/N-phenylmaleimide/styrene/benzyl methacrylate copolymer. In addition, methacrylic acid/2-hydroxyethyl methacrylate/benzyl methacrylate copolymer (copolymerization weight ratio = 15/15/70, Mw = 16,000, Mn = 7,500) was used instead of the (C) Alkali-soluble resin Methacrylic acid/mono(2-methacryloyloxyethyl)succinate/N-phenylmaleimide/styrene/benzyl methacrylate copolymer, others In the same manner as in Example 1, a radiation-sensitive composition was prepared.
比较例3Comparative example 3
用Disperbyk-182(胺值=14,酸值=0,固体成分浓度44.6重量%)7.5重量份(按固体成分换算约3.35重量份)代替实施例2中预备分散液(G1)的(B)分散剂Disperbyk-2001 7.5重量份,其它与实施例2相同,制备放射线敏感性组合物。7.5 parts by weight (approximately 3.35 parts by weight in terms of solid content) of Disperbyk-182 (amine value=14, acid value=0, solid content concentration 44.6% by weight) was used instead of (B) of the preliminary dispersion (G1) in Example 2 Dispersant Disperbyk-2001 7.5 parts by weight, others are the same as in Example 2 to prepare a radiation-sensitive composition.
比较例4Comparative example 4
用甲基丙烯酸/ω-羧基聚己内酯单丙烯酸酯/苯乙烯/苄基甲基丙烯酸酯/甘油单甲基丙烯酸酯共聚物(共聚重量比=15/15/20/35/15,Mw=15,500,Mn=6,500)代替实施例2中预备分散液(G1)的(C)碱可溶性树脂甲基丙烯酸/ω-羧基二己内酯单丙烯酸酯/N-苯基马来酰亚胺/苯乙烯/苄基甲基丙烯酸酯/甘油单甲基丙烯酸酯共聚物。另外,用甲基丙烯酸/苄基甲基丙烯酸酯共聚物(共聚重量比=25/75,Mw=22,000,Mn=10,000)代替实施例2中的(C)碱可溶性树脂甲基丙烯酸/N-苯基马来酰亚胺/苯乙烯/苄基甲基丙烯酸酯/甘油单甲基丙烯酸酯共聚物,其它与实施例2相同,制备放射线敏感性组合物。With methacrylic acid/ω-carboxy polycaprolactone monoacrylate/styrene/benzyl methacrylate/glycerin monomethacrylate copolymer (copolymerization weight ratio=15/15/20/35/15, Mw =15,500, Mn=6,500) instead of (C) alkali-soluble resin methacrylic acid/ω-carboxydicaprolactone monoacrylate/N-phenylmaleimide/ Styrene/Benzyl Methacrylate/Glycerol Monomethacrylate Copolymer. In addition, (C) alkali-soluble resin methacrylic acid/N- Phenylmaleimide/styrene/benzyl methacrylate/glycerol monomethacrylate copolymer, and the other is the same as in Example 2 to prepare a radiation-sensitive composition.
比较例5Comparative Example 5
用アジスパ-PB-822(胺值=13,酸值=16)4.5重量份代替实施例3中预备分散液(B1)的(B)分散剂Disperbyk-2001 10重量份,其它与实施例3相同,制备放射线敏感性组合物。Replace 10 parts by weight of (B) dispersant Disperbyk-2001 of pre-dispersion liquid (B1) in Example 3 with 4.5 parts by weight of Assispa-PB-822 (amine value=13, acid value=16), and others are the same as in Example 3 , to prepare a radiation-sensitive composition.
对上述各实施例和比较例中得到的放射线敏感性组合物进行以下评价,评价结果如表1所示。The following evaluations were performed on the radiation-sensitive compositions obtained in the above-mentioned Examples and Comparative Examples, and the evaluation results are shown in Table 1.
密着性评价Adhesion evaluation
准备コ-ニング公司的#1737玻璃基板2块,用旋涂机将上述各放射线敏感性组合物涂布在各基板表面上,然后在70℃进行3分钟预烘焙,形成膜厚度为2.5μm的被膜。接着将各基板冷却至室温,用高压水银灯(照度250W/m2)通过光掩模用包括365nm、405nm和436nm各波长的紫外线曝光,其中一块基板上的被膜曝光量为1,000J/m2,另一块基板上的被膜曝光量为500J/m2。然后将各基板上的被膜用JSR(株)公司的23℃显影液CD150CR(含氢氧化钾0.04重量%)作为显影液,以显影液喷出压0.3MPa(喷嘴直径1.0mm)喷淋显影1分钟,用超纯水洗涤,然后于200℃后烘焙30分钟,在各基板上形成90/210μm的线/空样式(ライン·アンド·スペ-スパタ-ン)条纹状象素图案。Prepare 2 pieces of #1737 glass substrates of Corning Company, apply the above-mentioned radiation-sensitive compositions on the surface of each substrate with a spin coater, and then pre-bake them at 70° C. for 3 minutes to form a film with a thickness of 2.5 μm. film. Next, each substrate was cooled to room temperature, and exposed to ultraviolet rays with wavelengths of 365nm, 405nm, and 436nm through a photomask with a high-pressure mercury lamp (illuminance 250W/m 2 ) . The exposure dose of the film on the other substrate was 500 J/m 2 . Then, the film on each substrate is used as a developing solution at 23° C. of developing solution CD150CR (containing potassium hydroxide 0.04% by weight) of JSR Co., Ltd., and is sprayed and developed with a developing solution spray pressure of 0.3 MPa (nozzle diameter: 1.0 mm) for 1 Minutes, washed with ultrapure water, and then post-baked at 200°C for 30 minutes to form a 90/210 μm line/space pattern (Rain·And·Spe-Spata-n) stripe-like pixel pattern on each substrate.
用光学显微镜观察所得的象素图案,没有发现象素图案缺损和剥落的评价为“○”,发现缺损或剥落的评价为“×”。The resulting pixel pattern was observed with an optical microscope, and the evaluation was "O" when no chipping or peeling of the pixel pattern was found, and "X" was found when chipping or peeling was found.
表面平滑性评价Evaluation of surface smoothness
用デジタル·インスツルメンツ公司的原子力显微镜测定评价上述密着性评价中所得的各象素图案的上部表面粗糙度,一般地表面粗糙度不高于60时视为表面平滑性良好。The surface roughness of the upper part of each pixel pattern obtained in the above adhesion evaluation was measured and evaluated with an atomic force microscope of Digital Instruments Co., Ltd. Generally, when the surface roughness is not higher than 60 Å, the surface smoothness is considered good.
显影性评价Developability evaluation
用旋涂机将上述各放射线敏感性组合物涂布在コ-ニング公司的#1737玻璃基板表面,然后在90℃进行3分钟预烘焙,形成膜厚度为2.5μm的被膜。接着将基板冷却至室温,用高压水银灯(照度250W/m2)通过光掩模,用包括365nm、405nm和436nm各波长的紫外线,以1,000J/m2的曝光量曝光该被膜。然后将被膜用JSR(株)公司的显影液CD150CR(含氢氧化钾0.04重量%)作为显影液,以显影液喷出压0.1MPa(喷嘴直径0.3mm)喷淋显影被膜1分钟,用超纯水洗涤,然后于200℃后烘焙30分钟,在基板上形成90/210μm的线/空样式条纹状象素图案。Each of the above radiation-sensitive compositions was coated on the surface of Corning's #1737 glass substrate with a spin coater, and then prebaked at 90° C. for 3 minutes to form a film with a film thickness of 2.5 μm. Next, the substrate was cooled to room temperature, and the film was exposed to ultraviolet rays of wavelengths including 365nm, 405nm and 436nm at an exposure dose of 1,000J/ m2 through a photomask with a high-pressure mercury lamp (illuminance: 250W/ m2 ). Then use the developer solution CD150CR (containing potassium hydroxide 0.04% by weight) of JSR (strain) company as the developing solution for the film, spray the developing film for 1 minute with the spraying pressure of the developing solution at 0.1 MPa (0.3 mm in diameter of the nozzle), and use an ultra-pure Washing with water, and then post-baking at 200° C. for 30 minutes to form a 90/210 μm line/space pattern of striped pixel patterns on the substrate.
用光学显微镜观察所得的象素图案,在未曝光部分的基板上没有发现残渣和浮垢的评价为“○”,发现残渣或浮垢的评价为“×”。The resulting pixel pattern was observed with an optical microscope, and the evaluation was "O" when no residue or scum was found on the unexposed portion of the substrate, and the evaluation was "X" when residue or scum was found.
贮存稳定性评价Storage Stability Evaluation
用东京计器公司的E型粘度计测定各放射线敏感性组合物的初始粘度。将各放射线敏感性组合物50g装入避光玻璃容器中,以密闭状态在23℃静置14天,然后用东京计器公司的E型粘度计测定静置后的粘度。计算静置后的粘度相对于初始粘度的变化率,变化率小于5%时评价为“○”,变化率为5%~<10%时评价为“△“,变化率为10%或10%以上时评价为“×”。The initial viscosity of each radiation-sensitive composition was measured with a Tokyo Keiki E-type viscometer. 50 g of each radiation-sensitive composition was put into a light-shielding glass container, and was left to stand at 23° C. for 14 days in an airtight state, and then the viscosity after standing was measured with a Tokyo Keiki E-type viscometer. Calculate the change rate of the viscosity after standing with respect to the initial viscosity, evaluate as "○" when the rate of change is less than 5%, evaluate as "△" when the rate of change is 5% to <10%, and rate of change is 10% or 10% In the case of the above, the evaluation was "x".
表1
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| JP3922757B2 (en) | 1997-04-24 | 2007-05-30 | 三菱化学株式会社 | Resist composition for color filter |
| JP3867177B2 (en) | 1997-04-30 | 2007-01-10 | Jsr株式会社 | Radiation sensitive composition for color filter |
| JP2000155209A (en) * | 1998-11-20 | 2000-06-06 | Jsr Corp | Radiation-sensitive composition for color filter |
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| JP2001031900A (en) * | 1999-05-20 | 2001-02-06 | Hitachi Maxell Ltd | Dispersion composition and method for producing the same |
| JP3726556B2 (en) | 1999-05-24 | 2005-12-14 | Jsr株式会社 | Preparation method of radiation sensitive composition for color filter |
| JP4805467B2 (en) * | 2001-03-15 | 2011-11-02 | 日本ペイント株式会社 | Ground treatment agent |
| JP2002365795A (en) | 2001-06-06 | 2002-12-18 | Jsr Corp | Radiation-sensitive composition for color liquid crystal display |
| WO2003027156A1 (en) * | 2001-09-25 | 2003-04-03 | Dainippon Printing Co., Ltd. | Alkali-soluble maleimide copolymer and liquid crystal display comprising the same |
| JP4094857B2 (en) * | 2002-01-30 | 2008-06-04 | 日本ペイント株式会社 | Method for forming coating film using cationic electrodeposition coating composition for intermediate coating |
| JP4428911B2 (en) * | 2002-07-05 | 2010-03-10 | Jsr株式会社 | Radiation sensitive composition for color filter, color filter and color liquid crystal display element |
-
2005
- 2005-01-25 JP JP2005016799A patent/JP2005316388A/en not_active Withdrawn
- 2005-03-29 TW TW094109806A patent/TWI358611B/en not_active IP Right Cessation
- 2005-03-29 SG SG200501868A patent/SG115803A1/en unknown
- 2005-03-29 KR KR1020050025907A patent/KR100887096B1/en not_active Expired - Fee Related
- 2005-03-30 CN CNB2005100627042A patent/CN100376905C/en not_active Expired - Fee Related
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| CN101059655B (en) * | 2006-04-19 | 2013-05-01 | 东京应化工业株式会社 | Photosensitive composition and color filter formed from photosensitive composition |
| CN101109900B (en) * | 2006-07-18 | 2011-03-09 | 第一毛织株式会社 | Photosensitive resin composition for color filter of image sensor and color filter of image sensor using the same |
| CN101356452B (en) * | 2006-07-25 | 2011-09-21 | 日立化成工业株式会社 | Resin composition for optical material, resin film for optical material, and optical waveguide |
| CN101517486B (en) * | 2006-11-10 | 2012-06-27 | 昭和电工株式会社 | Photosensitive resin composition |
| CN101414121B (en) * | 2007-10-19 | 2013-04-10 | Jsr株式会社 | Radiation sensitive composition for forming a colored layer, color filter and color liquid crystal display device |
| TWI406090B (en) * | 2008-09-30 | 2013-08-21 | Fujifilm Corp | Colored curable composition, color filter and method of producing the same, and solid-state imaging device |
| WO2013007214A1 (en) * | 2011-07-14 | 2013-01-17 | 京东方科技集团股份有限公司 | Alkali-soluble resin and photosensitive resin composition containing same and use thereof |
| US8945815B2 (en) | 2011-07-14 | 2015-02-03 | Boe Technology Group Co., Ltd. | Alkaline soluble resin and light sensible resin composition comprising same and use thereof |
| US11693310B2 (en) | 2017-11-16 | 2023-07-04 | Sumitomo Chemical Company, Limited | Blue curable resin composition, blue color filter, and display device including same |
| TWI823874B (en) * | 2017-11-16 | 2023-12-01 | 日商住友化學股份有限公司 | Blue curable resin composition, blue color filter and display device containing the same |
| TWI832828B (en) * | 2017-11-16 | 2024-02-21 | 日商住友化學股份有限公司 | Blue curable resin composition, blue color filter and display device containing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI358611B (en) | 2012-02-21 |
| CN100376905C (en) | 2008-03-26 |
| SG115803A1 (en) | 2005-10-28 |
| KR20060044916A (en) | 2006-05-16 |
| KR100887096B1 (en) | 2009-03-04 |
| JP2005316388A (en) | 2005-11-10 |
| TW200540566A (en) | 2005-12-16 |
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