CN1573542A - Colored photoresist composition - Google Patents
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- CN1573542A CN1573542A CNA2004100475242A CN200410047524A CN1573542A CN 1573542 A CN1573542 A CN 1573542A CN A2004100475242 A CNA2004100475242 A CN A2004100475242A CN 200410047524 A CN200410047524 A CN 200410047524A CN 1573542 A CN1573542 A CN 1573542A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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Abstract
一种着色感光性树脂组合物,包含着色剂(A)、粘结剂树脂(B)、光聚合性化合物(C)、光聚合引发剂(D)、颜料分散剂(E)和溶剂(F),所述着色感光性树脂组合物在玻璃基板上涂布形成树脂层、使所述树脂层预烘干、经掩膜曝光、显像、后烘干时,后烘干后所得到的硬化树脂层的硬度是铅笔硬度3H以上~9H以下,且预烘干、经掩膜曝光后得到的感光性树脂层在100rpm搅拌下的25℃碱水溶液中浸渍120秒后感光性树脂层非曝光部溶解的部分的透射率(400~780nm的平均值)在98%以上~100%以下。A colored photosensitive resin composition comprising a colorant (A), a binder resin (B), a photopolymerizable compound (C), a photopolymerization initiator (D), a pigment dispersant (E) and a solvent (F ), when the colored photosensitive resin composition is coated on a glass substrate to form a resin layer, the resin layer is pre-dried, exposed through a mask, developed, and post-dried, the resulting hardened The hardness of the resin layer is more than 3H to less than 9H in pencil hardness, and the photosensitive resin layer obtained after pre-drying and mask exposure is immersed in an alkaline aqueous solution at 25°C under stirring at 100rpm for 120 seconds, and then the non-exposed part of the photosensitive resin layer The transmittance (average value of 400 to 780 nm) of the dissolved portion is not less than 98% and not more than 100%.
Description
技术领域technical field
本发明涉及着色感光性树脂组合物。The present invention relates to a colored photosensitive resin composition.
背景技术Background technique
彩色液晶显示装置或摄像元件等中使用的彩色滤光器是通过在使黑色基体形成图案的基板上形成相当于红、绿和蓝三原色的着色层来制造的。A color filter used in a color liquid crystal display device, an imaging element, etc. is manufactured by forming colored layers corresponding to the three primary colors of red, green, and blue on a substrate patterned with a black matrix.
惯常以图案状形成的着色层(着色像素)是硬度不充分的,在彩色滤光器制作后的取向膜摩擦处理等后工序中会使着色层损伤,或者在液晶板组装时介于2枚基板之间的间隔材料所产生的压力容易使着色层变形,因而使液晶池间隙发生局部变动,有容易产生显示缺陷等问题。Colored layers (colored pixels) that are conventionally formed in a pattern are not sufficiently hard, and the colored layer may be damaged in post-processes such as alignment film rubbing treatment after color filter production, or the coloring layer may be interposed between two layers when assembling a liquid crystal panel. The pressure generated by the spacer material between the substrates tends to deform the colored layer, thereby locally changing the gap of the liquid crystal cell, which easily causes problems such as display defects.
该着色层可以从着色树脂组合物形成。作为着色树脂组合物,含有着色剂、粘结剂树脂、分散剂、溶剂、和陶瓷微粒的着色感光性树脂组合物是已知的(参照特开平10-186126号公报),但该组合物预烘干、经掩膜曝光后非曝光部分的感光性树脂层在碱水溶液中浸渍而使感光性树脂层溶解时因含有陶瓷微粒而发生残渣,有使溶解部分的透射率(400~780nm的平均值)降低、显像性不能令人满意这样的问题。The colored layer can be formed from a colored resin composition. As a colored resin composition, a colored photosensitive resin composition containing a colorant, a binder resin, a dispersant, a solvent, and ceramic particles is known (see JP-A-10-186126), but the composition After drying and exposure through the mask, the photosensitive resin layer of the non-exposed part is immersed in an aqueous alkali solution to dissolve the photosensitive resin layer, because ceramic particles are contained and residues occur, and the transmittance of the dissolved part (average of 400-780nm value) is lowered, and the image quality is not satisfactory.
发明公开invention disclosure
本发明的目的是提供显像性优异、能形成高表面硬度的硬化树脂层的着色感光性树脂组合物。An object of the present invention is to provide a colored photosensitive resin composition that is excellent in developability and can form a cured resin layer with high surface hardness.
本发明者等进行锐意探讨的结果,发现了显像性优异、能形成高表面硬度的硬化树脂层的着色感光性树脂组合物。As a result of earnest research, the inventors of the present invention have found a colored photosensitive resin composition that is excellent in developability and can form a cured resin layer with high surface hardness.
即,本发明提供以下〔1〕~〔11〕。That is, the present invention provides the following [1] to [11].
〔1〕一种着色感光性树脂组合物,包含着色剂(A)、粘结剂树脂(B)、光聚合性化合物(C)、光聚合引发剂(D)、颜料分散剂(E)和溶剂(F),所述着色感光性树脂组合物在玻璃基板上涂布形成树脂层、使所述树脂层预烘干、经掩膜曝光、显像、后烘干时,后烘干后所得到的硬化树脂层的硬度是铅笔硬度3H以上~9H以下,且预烘干、经掩膜曝光后得到的感光性树脂层在100rpm搅拌下的25℃碱水溶液中浸渍120秒后感光性树脂层非曝光部溶解的部分的透射率(400~780nm的平均值)在98%以上~100%以下。[1] A colored photosensitive resin composition comprising a colorant (A), a binder resin (B), a photopolymerizable compound (C), a photopolymerization initiator (D), a pigment dispersant (E) and Solvent (F), when the colored photosensitive resin composition is coated on a glass substrate to form a resin layer, the resin layer is pre-dried, exposed through a mask, developed, and post-dried, the resulting The hardness of the obtained hardened resin layer is pencil hardness above 3H to below 9H, and the photosensitive resin layer obtained after pre-drying and mask exposure is immersed in an alkaline aqueous solution at 25°C under stirring at 100rpm for 120 seconds. After the photosensitive resin layer The transmittance (average value of 400 to 780 nm) of the melted portion of the non-exposed portion is not less than 98% and not more than 100%.
〔2〕〔1〕记载的着色感光性树脂组合物,其中,粘结剂树脂(B)是包含从(甲基)丙烯酸衍生的结构单元的树脂。[2] The colored photosensitive resin composition according to [1], wherein the binder resin (B) is a resin containing a structural unit derived from (meth)acrylic acid.
〔3〕〔1〕或〔2〕记载的着色感光性树脂组合物,其中,在构成粘结剂树脂(B)的总结构单元中从(甲基)丙烯酸衍生的结构单元的含有量在16mol%以上~40mol%以下。[3] The colored photosensitive resin composition according to [1] or [2], wherein the content of structural units derived from (meth)acrylic acid in the total structural units constituting the binder resin (B) is 16 mol % or more to 40 mol% or less.
〔4〕〔1〕~〔3〕中任何一项记载的着色感光性树脂组合物,其中,粘结剂树脂(B)进一步包含从(甲基)丙烯酸苄酯衍生的结构单元。[4] The colored photosensitive resin composition according to any one of [1] to [3], wherein the binder resin (B) further contains a structural unit derived from benzyl (meth)acrylate.
〔5〕〔1〕~〔4〕中任何一项记载的着色感光性树脂组合物,其中,粘结剂树脂(B)是进一步包含式(I)所示结构单元的树脂:[5] The colored photosensitive resin composition described in any one of [1] to [4], wherein the binder resin (B) is a resin further comprising a structural unit represented by formula (I):
式(I)中R1和R2各自独立地表示氢原子或甲基。In formula (I), R 1 and R 2 each independently represent a hydrogen atom or a methyl group.
〔6〕〔1〕~〔5〕中任何一项记载的着色感光性树脂组合物,其中,粘结剂树脂(B)的聚苯乙烯换算重均分子量在5,000以上~35,000以下。[6] The colored photosensitive resin composition according to any one of [1] to [5], wherein the polystyrene-equivalent weight average molecular weight of the binder resin (B) is 5,000 to 35,000.
〔7〕〔1〕~〔6〕中任何一项记载的着色感光性树脂组合物,其中,颜料分散剂(E)是从聚酯系、聚乙烯亚胺系、聚氨酯系和丙烯酸系组成的一组中选择的至少一种表面活性剂。[7] The colored photosensitive resin composition described in any one of [1] to [6], wherein the pigment dispersant (E) is composed of polyester-based, polyethyleneimine-based, polyurethane-based, and acrylic-based at least one surfactant selected from the group.
〔8〕〔1〕~〔7〕中任何一项记载的着色感光性树脂组合物,其中,颜料分散剂(E)是丙烯酸系表面活性剂。[8] The colored photosensitive resin composition according to any one of [1] to [7], wherein the pigment dispersant (E) is an acrylic surfactant.
〔9〕着色图案的形成方法,其特征在于在基板上形成由〔1〕~〔8〕中任何一项记载的着色感光性树脂组合物组成的树脂层,使该树脂层经掩膜曝光后、显像、然后后烘干。[9] A method for forming a colored pattern, comprising forming a resin layer composed of the colored photosensitive resin composition described in any one of [1] to [8] on a substrate, and exposing the resin layer through a mask. , development, and post-drying.
〔10〕〔9〕记载的着色图案形成方法,其中,后烘干处理的温度是180℃以上~250℃以下。[10] The colored pattern forming method according to [9], wherein the temperature of the post-baking treatment is 180°C to 250°C.
〔11〕彩色滤光器,包含用〔9〕或〔10〕记载的方法形成的着色图案。[11] A color filter comprising a colored pattern formed by the method described in [9] or [10].
发明实施形态Embodiment of the invention
本发明的着色感光性树脂组合物是含有着色剂(A)、粘结剂树脂(B)、光聚合性化合物(C)、光聚合引发剂(D)、颜料分散剂(E)和溶剂(F)的着色感光性树脂组合物,所述着色感光性树脂组合物在玻璃基板上涂布形成树脂层,所述树脂层预烘干、经掩膜曝光、显像、后烘干时,后烘干后得到的硬化树脂层的硬度是铅笔硬度3H以上~9H以下,且预烘干、经掩膜曝光后得到的感光性树脂层在100rpm搅拌下的25℃碱性水溶液中浸渍120秒后感光性树脂层非曝光部溶解的部分的透射率(400~780nm的平均值)在98%以上~100%以下。The colored photosensitive resin composition of the present invention contains a colorant (A), a binder resin (B), a photopolymerizable compound (C), a photopolymerization initiator (D), a pigment dispersant (E) and a solvent ( F) the colored photosensitive resin composition, the colored photosensitive resin composition is coated on a glass substrate to form a resin layer, the resin layer is pre-dried, exposed through a mask, developed, and post-dried, after The hardness of the cured resin layer obtained after drying is more than 3H to less than 9H in pencil hardness, and the photosensitive resin layer obtained after pre-drying and mask exposure is immersed in an alkaline aqueous solution at 25°C under 100rpm stirring for 120 seconds. The transmittance (average value of 400 to 780 nm) of the portion of the photosensitive resin layer where the non-exposed portion is dissolved is 98% or more and 100% or less.
硬化树脂层(涂膜)的硬度必须是铅笔硬度3H以上~9H以下,较好4H以上~9H以下,更好5H以下~9H以下。硬化树脂层(涂膜)虽然是成为像素部的部分,但当其铅笔硬度在3H以上~9H以下时,在像素形成后进行的液晶取向膜的制作等的步骤中硬化树脂层(涂膜)难以受损伤,因而较好。铅笔硬度是按照JIS K 5400号的方法测定的。The hardness of the cured resin layer (coating film) must be pencil hardness of not less than 3H and not more than 9H, preferably not less than 4H and not more than 9H, more preferably not more than 5H and not more than 9H. The cured resin layer (coating film) is the part that becomes the pixel portion, but when the pencil hardness is 3H to 9H, the resin layer (coating film) is cured in steps such as the preparation of the liquid crystal alignment film after the pixel is formed. It is hard to be damaged, so it is better. Pencil hardness is measured according to the method of JIS K 5400.
上述预烘干较好的是将该着色感光性树脂组合物涂布在玻璃基板上并在100℃实施3分钟左右。It is preferable to apply the colored photosensitive resin composition on a glass substrate and perform the prebaking at 100° C. for about 3 minutes.
预烘干、经掩膜曝光后得到的感光性树脂层在100rpm搅拌下的25℃碱水溶液中浸渍。在此,碱水溶液通常使用按质量分率计分别含有氢氧化钾0.05%、丁基萘磺酸钠0.2%的水溶液。The photosensitive resin layer obtained after pre-drying and mask exposure was immersed in an aqueous alkali solution at 25° C. under stirring at 100 rpm. Here, the alkaline aqueous solution generally uses an aqueous solution containing 0.05% of potassium hydroxide and 0.2% of sodium butylnaphthalenesulfonate in mass fractions, respectively.
该感光性树脂层的非曝光部当浸渍于100rpm搅拌下的25℃碱水溶液中时,较好在120秒内溶解、更好在1秒以上~100秒以内、甚至更好在1秒以上~80秒以内、还更好在1秒以上~60秒以内溶解。溶解所需要的时间若在所述范围内就可以抑制彩色滤光器生产率的低下,因而较好。When the non-exposed portion of the photosensitive resin layer is immersed in an aqueous alkali solution at 25° C. under stirring at 100 rpm, it is preferably dissolved within 120 seconds, more preferably within 1 second to within 100 seconds, and even more preferably between 1 second to 1 second. It dissolves within 80 seconds, more preferably within 1 second to 60 seconds. When the time required for dissolution is within the above-mentioned range, a decrease in the productivity of the color filter can be suppressed, which is preferable.
该感光性树脂层的非曝光部在100rpm搅拌下的25℃碱水溶液中浸渍120秒后感光性树脂层溶解的部分的透射率(透射波长在400nm~780nm范围内的平均值)必须在98%以上~100%以下,较好在99%以上~100%以下、更好在99.5%以上~100%以下。若透射率在98%以上~100%以下,则对着色层亮度的影响小,因而较好。The non-exposed portion of the photosensitive resin layer must have a transmittance (the average value of the transmission wavelength in the range of 400nm to 780nm) of the part where the photosensitive resin layer dissolves after being immersed in an aqueous alkali solution at 25° C. under stirring at 100 rpm for 120 seconds. From 99% to 100%, preferably from 99% to 100%, more preferably from 99.5% to 100%. When the transmittance is at least 98% and at most 100%, it is preferable because the influence on the brightness of the colored layer is small.
本发明中使用的着色剂(A)既可以是有机着色剂,也可以是无机着色剂。有机着色剂既可以是有机颜料,也可以是有机染料。进而,有机着色剂既可以是合成着色剂也可以是天然着色剂。无机着色剂也可以是金属氧化物、金属络合物盐、硫酸钡的无机盐(体质颜料)等的无机颜料。在这些着色剂中,较好使用有机着色剂、更好使用有机颜料。The colorant (A) used in the present invention may be an organic colorant or an inorganic colorant. Organic colorants can be either organic pigments or organic dyes. Furthermore, the organic colorant may be either a synthetic colorant or a natural colorant. Inorganic colorants may be inorganic pigments such as metal oxides, metal complex salts, and inorganic salts of barium sulfate (extender pigments). Among these colorants, an organic colorant is preferably used, and an organic pigment is more preferably used.
作为有机颜料和无机颜料,可以列举《染料索引》(Colour Index,The Society of Dyers和Colourists出版)中分类为颜料(Pigment)的化合物。As organic pigments and inorganic pigments, compounds classified as pigments in "Colour Index" (Colour Index, published by The Society of Dyers and Colourists) can be cited.
具体地说,可以列举C.I.颜料黄-1、C.I.颜料黄-3、C.I.颜料黄-12、C.I.颜料黄-13、C.I.颜料黄-14、C.I.颜料黄-15、C.I.颜料黄-16、C.I.颜料黄-17、C.I.颜料黄-20、C.I.颜料黄-24、C.I.颜料黄-31、C.I.颜料黄-53、C.I.颜料黄-83、C.I.颜料黄-86、C.I.颜料黄-93、C.I.颜料黄-94、C.I.颜料黄-109、C.I.颜料黄-110、C.I.颜料黄-117、C.I.颜料黄-125、C.I.颜料黄-128、C.I.颜料黄-137、C.I.颜料黄-138、C.I.颜料黄-139、C.I.颜料黄-147、C.I.颜料黄-148、C.I.颜料黄-150、C.I.颜料黄-153、C.I.颜料黄-154、C.I.颜料黄-166、C.I.颜料黄-173、C.I.颜料黄-194、C.I.颜料黄-214等黄色颜料;Specifically, C.I. Pigment Yellow-1, C.I. Pigment Yellow-3, C.I. Pigment Yellow-12, C.I. Pigment Yellow-13, C.I. Pigment Yellow-14, C.I. Pigment Yellow-15, C.I. Pigment Yellow-16, C.I. Pigment Yellow-17, C.I. Pigment Yellow-20, C.I. Pigment Yellow-24, C.I. Pigment Yellow-31, C.I. Pigment Yellow-53, C.I. Pigment Yellow-83, C.I. Pigment Yellow-86, C.I. Pigment Yellow-93, C.I. Pigment Yellow- 94. C.I. Pigment Yellow-109, C.I. Pigment Yellow-110, C.I. Pigment Yellow-117, C.I. Pigment Yellow-125, C.I. Pigment Yellow-128, C.I. Pigment Yellow-137, C.I. Pigment Yellow-138, C.I. Pigment Yellow-139, C.I. Pigment Yellow-147, C.I. Pigment Yellow-148, C.I. Pigment Yellow-150, C.I. Pigment Yellow-153, C.I. Pigment Yellow-154, C.I. Pigment Yellow-166, C.I. Pigment Yellow-173, C.I. Pigment Yellow-194, C.I. Pigment Yellow pigments such as Huang-214;
C.I.颜料橙-13、C.I.颜料橙-31、C.I.颜料橙-36、C.I.颜料橙-38、C.I.颜料橙-40、C.I.颜料橙-42、C.I.颜料橙-43、C.I.颜料橙-51、C.I.颜料橙-55、C.I.颜料橙-59、C.I.颜料橙-61、C.I.颜料橙-64、C.I.颜料橙-65、C.I.颜料橙-71、C.I.颜料橙-73等橙色颜料;C.I. Pigment Orange-13, C.I. Pigment Orange-31, C.I. Pigment Orange-36, C.I. Pigment Orange-38, C.I. Pigment Orange-40, C.I. Pigment Orange-42, C.I. Pigment Orange-43, C.I. Pigment Orange-51, C.I. Pigment Orange-55, C.I. Pigment Orange-59, C.I. Pigment Orange-61, C.I. Pigment Orange-64, C.I. Pigment Orange-65, C.I. Pigment Orange-71, C.I. Pigment Orange-73 and other orange pigments;
C.I.颜料红-9、C.I.颜料红-97、C.I.颜料红-105、C.I.颜料红-122、C.I.颜料红-123、C.I.颜料红-144、C.I.颜料红-149、C.I.颜料红-166、C.I.颜料红-168、C.I.颜料红-176、C.I.颜料红-177、C.I.颜料红-180、C.I.颜料红-192、C.I.颜料红-209、C.I.颜料红-215、C.I.颜料红-216、C.I.颜料红-224、C.I.颜料红-242、C.I.颜料红-254、C.I.颜料红-264、C.I.颜料红-265等红色颜料;C.I. Pigment Red-9, C.I. Pigment Red-97, C.I. Pigment Red-105, C.I. Pigment Red-122, C.I. Pigment Red-123, C.I. Pigment Red-144, C.I. Pigment Red-149, C.I. Pigment Red-166, C.I. Pigment Red-168, C.I. Pigment Red-176, C.I. Pigment Red-177, C.I. Pigment Red-180, C.I. Pigment Red-192, C.I. Pigment Red-209, C.I. Pigment Red-215, C.I. Pigment Red-216, C.I. Pigment Red- 224, C.I. Pigment Red-242, C.I. Pigment Red-254, C.I. Pigment Red-264, C.I. Pigment Red-265 and other red pigments;
C.I.颜料蓝-15、C.I.颜料蓝-15:3、C.I.颜料蓝-15:4、C.I.颜料蓝-15:6、C.I.颜料蓝-60等蓝色颜料;C.I. Pigment Blue-15, C.I. Pigment Blue-15:3, C.I. Pigment Blue-15:4, C.I. Pigment Blue-15:6, C.I. Pigment Blue-60 and other blue pigments;
C.I.颜料紫-1、C.I.颜料紫-19、C.I.颜料紫-23、C.I.颜料紫-29、C.I.颜料紫-32、C.I.颜料紫-36、C.I.颜料紫-38等紫色颜料;C.I. Pigment Violet-1, C.I. Pigment Violet-19, C.I. Pigment Violet-23, C.I. Pigment Violet-29, C.I. Pigment Violet-32, C.I. Pigment Violet-36, C.I. Pigment Violet-38 and other purple pigments;
C.I.颜料绿-7、C.I.颜料绿-36等绿色颜料;C.I. Pigment Green-7, C.I. Pigment Green-36 and other green pigments;
C.I.颜料棕-23、C.I.颜料棕-25等棕色颜料;C.I. Pigment Brown-23, C.I. Pigment Brown-25 and other brown pigments;
C.I.颜料黑-1、C.I.颜料黑-7等黑色颜料等。C.I. Pigment Black-1, C.I. Pigment Black-7 and other black pigments, etc.
较好的是含有这些颜料当中从C.I.颜料黄-138、C.I.颜料黄-139、C.I.颜料黄-150、C.I.颜料红-177、C.I.颜料红-209、C.I.颜料红-254、C.I.颜料紫-23、C.I.颜料蓝-15:6和C.I.颜料绿-36中选择的至少一种颜料。Pigment Yellow-138, C.I. Pigment Yellow-139, C.I. Pigment Yellow-150, C.I. Pigment Red-177, C.I. Pigment Red-209, C.I. Pigment Red-254, C.I. Pigment Violet-23 , C.I. Pigment Blue-15:6 and at least one pigment selected from C.I. Pigment Green-36.
这些有机颜料和无机颜料既可以各自单独使用,也可以2种以上混合使用。These organic pigments and inorganic pigments may be used alone or in combination of two or more.
例如,为了形成红色像素,较好含有C.I.颜料红-254和C.I.颜料黄-139。For example, in order to form a red pixel, it is preferable to contain C.I. Pigment Red-254 and C.I. Pigment Yellow-139.
为了形成绿色像素,较好含有从C.I.颜料黄-150和C.I.颜料黄-138组成的一组中选择的至少1种以及C.I.颜料绿-36。In order to form a green pixel, it is preferable to contain at least one selected from the group consisting of C.I. Pigment Yellow-150 and C.I. Pigment Yellow-138 and C.I. Pigment Green-36.
为了形成蓝色像素,较好含有C.I.颜料蓝-15:6和C.I.颜料紫-23。In order to form a blue pixel, it is preferable to contain C.I. Pigment Blue-15:6 and C.I. Pigment Violet-23.
所述颜料中的有机颜料必要时也可以实施松香处理、使用导入了酸性基或碱性基的颜料衍生物等的表面处理、用高分子化合物等对颜料表面的接枝处理、采用硫酸微粒化法等的微粒化处理、为除去杂质而用有机溶剂或水等的洗涤处理、离子性杂质用离子交换法等的除去处理等。进而,着色感光性树脂组合物制备后,也可以实施例如离子交换法等的除去处理。The organic pigments in the above-mentioned pigments may also be subjected to rosin treatment, surface treatment using pigment derivatives introduced with acidic groups or basic groups, etc., grafting treatment on the surface of pigments with polymer compounds, etc., micronization with sulfuric acid, etc., if necessary. Micronization treatment such as method, washing treatment with organic solvent or water to remove impurities, removal treatment of ionic impurities by ion exchange method, etc. Furthermore, after preparation of a colored photosensitive resin composition, removal processing, such as an ion exchange method, can also be implemented, for example.
着色剂(A)的含有量,当以着色感光性树脂组合物中的固形分为100质量份时,通常是25质量份以上~60质量份以下、较好27质量份以上~55质量份以下、更好30质量份以上~50质量份以下。若着色剂(A)的含有量在25质量份以上~60质量份以下,则制作彩色滤光器时色浓度是令人满意的,而且组合物中可以含有必要量的粘结剂树脂,因而可以形成机械强度足够的图案,因而较好。The content of the colorant (A) is usually not less than 25 parts by mass and not more than 60 parts by mass, preferably not less than 27 parts by mass and not more than 55 parts by mass, when the solid content in the colored photosensitive resin composition is 100 parts by mass , More preferably 30 mass parts or more - 50 mass parts or less. If the content of the colorant (A) is more than 25 parts by mass and less than 60 parts by mass, the color density is satisfactory when making a color filter, and a necessary amount of binder resin can be contained in the composition, so Since a pattern with sufficient mechanical strength can be formed, it is preferable.
在此,着色感光性树脂组合物中的固形分系指从着色感光性树脂组合物中除去溶剂(F)后剩余的部分。Here, the solid content in a colored photosensitive resin composition means what remains after removing a solvent (F) from a colored photosensitive resin composition.
本发明的着色感光性树脂组合物中,在使用颜料作为着色剂(A)的情况下,较好是其粒径均一的。为了使颜料有均一粒径,可以列举含有表面活性剂作为颜料分散剂(E)进行分散处理的方法等。In the coloring photosensitive resin composition of this invention, when using a pigment as a coloring agent (A), it is preferable that the particle diameter is uniform. In order for the pigment to have a uniform particle size, a method of dispersing a surfactant as a pigment dispersant (E) and performing a dispersion treatment, etc. are mentioned.
作为所述颜料分散剂(E),可以列举例如聚氧乙烯烷基醚系、聚氧乙烯烷基苯基醚系、聚酯系、丙烯酸系、聚氨酯系、聚乙烯亚胺系等表面活性剂,这些既可以各自单独使用,也可以两种以上组合使用。Examples of the pigment dispersant (E) include surfactants such as polyoxyethylene alkyl ethers, polyoxyethylene alkylphenyl ethers, polyesters, acrylics, polyurethanes, and polyethyleneimines. , and these may be used alone or in combination of two or more.
作为聚氧乙烯烷基醚系表面活性剂,可以列举有下式结构者(14102の化学商品,1286页(化学工业日报社,2002年1月29日发行)):Examples of polyoxyethylene alkyl ether-based surfactants include those having the following formula (14102 Chemical Commodities, page 1286 (Chemical Industry Daily, published on January 29, 2002)):
RO(CH2CH2O)nHRO(CH 2 CH 2 O) n H
式中,R表示C12~22烷基,n表示2~60的数。In the formula, R represents a C 12-22 alkyl group, and n represents a number of 2-60.
作为聚氧乙烯烷基醚系表面活性剂,可以列举例如聚氧乙烯癸基醚、聚氧乙烯月桂基醚、聚氧乙烯鲸蜡基醚、聚氧乙烯硬脂基醚、聚氧乙烯油基醚、聚氧乙烯2-乙基己基醚等。Examples of polyoxyethylene alkyl ether-based surfactants include polyoxyethylene decyl ether, polyoxyethylene lauryl ether, polyoxyethylene cetyl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether, and polyoxyethylene oleyl ether. Ether, polyoxyethylene 2-ethylhexyl ether, etc.
作为聚氧乙烯烷基醚系表面活性剂的市售品,可以列举BLAUNON-EL系列、BLAUNON-CH系列、BLAUNON-SR系列、BLAUNON-EN系列、BLAUNON-EH系列、BLAUNON-DAL系列、BLAUNON-DAI系列、BLAUNON-DAH系列、BLAUNON-OX系列(均为青木油脂公司制造)等,其它公司的等效品也可以同样使用。Commercially available polyoxyethylene alkyl ether surfactants include BLAUNON-EL series, BLAUNON-CH series, BLAUNON-SR series, BLAUNON-EN series, BLAUNON-EH series, BLAUNON-DAL series, BLAUNON- DAI series, BLAUNON-DAH series, BLAUNON-OX series (all manufactured by Aoki Oil & Fat Co., Ltd.), etc., and equivalent products from other companies can also be used in the same way.
作为聚氧乙烯烷基苯基醚系表面活性剂,可以列举有下式结构者等(14102の化学商品,1287页(化学工业日报社,2002年1月29日发行));Examples of polyoxyethylene alkylphenyl ether surfactants include those with the following formula (14102 Chemical Commodities, page 1287 (Chemical Industry Daily, published on January 29, 2002));
式中,m表示1~5的整数,n表示2~60的数,R表示C12~22烷基或也可以有取代的苯基,但m为2~5时R既可以相同也可以不同。In the formula, m represents an integer of 1 to 5, n represents a number of 2 to 60, R represents a C 12 to 22 alkyl group or a substituted phenyl group, but when m is 2 to 5, R can be the same or different .
作为聚氧乙烯烷基苯基醚系表面活性剂的市售品,可以列举BLAUNON-NK系列、BLAUNON-N系列、BLAUNON-DP系列、BLAUNON-DNP系列、BLAUNON-DSP系列、BLAUNON-TSP系列、BLAUNON-PH系列、BLAUNON-BA系列等,其它公司的等效品也同样可以使用。Examples of commercially available polyoxyethylene alkylphenyl ether surfactants include BLAUNON-NK series, BLAUNON-N series, BLAUNON-DP series, BLAUNON-DNP series, BLAUNON-DSP series, BLAUNON-TSP series, BLAUNON-PH series, BLAUNON-BA series, etc., equivalent products from other companies can also be used.
聚酯系表面活性剂有聚酯结构。作为聚酯系表面活性剂,可以列举Disperbyk-161、同商标170(BYKChemie公司制)、PB821(味の素公司制)等。Polyester-based surfactants have a polyester structure. As a polyester surfactant, Disperbyk-161, the same brand 170 (made by BYK Chemie), PB821 (made by Ajinomoto Co., Ltd.), etc. are mentioned.
聚乙烯亚胺系表面活性剂有乙烯亚胺结构。作为聚乙烯亚胺系表面活性剂,可以列举Sorsperse 24000 GR(Seneca公司制)等,其它公司的等效品也同样可以使用。Polyethyleneimine-based surfactants have an ethyleneimine structure. Examples of polyethyleneimine-based surfactants include Sorsperse 24000 GR (manufactured by Seneca), and equivalents from other companies can also be used in the same manner.
丙烯酸系表面活性剂有丙烯酸共聚结构。作为丙烯酸系表面活性剂,可以列举Disperbyk-352、同商标354、同商标2000、同商标2001(BYK Chemie公司制),EFKA-Polymer 401(EFKA Chemicals公司制)等,其它公司的等效产品也同样可以使用。Acrylic surfactants have an acrylic copolymer structure. Examples of the acrylic surfactants include Disperbyk-352, TOTO 354, TOTO 2000, TOTO 2001 (manufactured by BYK Chemie), and EFKA-Polymer 401 (manufactured by EFKA Chemicals). Equivalent products from other companies are also available. The same can be used.
聚氨酯系表面活性剂有聚氨酯结构。作为聚氨酯系表面活性剂,可以列举EFKA-Polymer 452、EFKA-47(EFKA Chemicals公司制)等,其它公司的等效产品也同样可以使用。Polyurethane-based surfactants have a polyurethane structure. Examples of polyurethane-based surfactants include EFKA-Polymer 452 and EFKA-47 (manufactured by EFKA Chemicals), and equivalent products from other companies can also be used in the same manner.
进而,作为上述以外的表面活性剂,可以列举商品名KP(信越化学工业公司制)、ポリフロ-(共荣化学公司制)、EFTOP(TochemProducts公司制)、メガフアックス(大日本Ink化学工业公司制)、フロラ-ド(住友スリ-エム公司制)、アサヒガ-ド、サ-フロン(以上系旭硝子公司制)等。Furthermore, examples of surfactants other than the above include trade names KP (manufactured by Shin-Etsu Chemical Co., Ltd.), Polyflo- (manufactured by Kyoei Chemical Co., Ltd.), EFTOP (manufactured by Tochem Products Co., Ltd.), Megafax (manufactured by Dainippon Ink Chemical Co., Ltd. ), Flora-do (manufactured by Sumitomo Suri-Em Co., Ltd.), Asahiga-do, Sa-flon (manufactured by Asahi Glass Co., Ltd.).
作为颜料分散剂(E),较好使用从聚酯系表面活性剂、聚乙烯亚胺系表面活性剂、聚氨酯系表面活性剂、丙烯酸系表面活性剂组成的一组中选择的至少1种表面活性剂,更好使用丙烯酸系表面活性剂。As the pigment dispersant (E), it is preferable to use at least one surface-active agent selected from the group consisting of polyester-based surfactants, polyethyleneimine-based surfactants, polyurethane-based surfactants, and acrylic-based surfactants. Active agent, preferably acrylic surfactant.
颜料分散剂(E)的使用量,相对于着色剂(A)每1质量份而言,通常是1质量份以下、较好是0.05质量份以上~0.5质量份以下。若颜料分散剂(E)的使用量相对于着色剂(A)每1质量份而言在1质量份以下,则有能得到均一粒径颜料的倾向,因而较好。The usage-amount of a pigment dispersant (E) is 1 mass part or less normally with respect to 1 mass part of a coloring agent (A), Preferably it is 0.05 mass part or more - 0.5 mass part or less. When the usage-amount of a pigment dispersant (E) is 1 mass part or less with respect to 1 mass part of a coloring agent (A), since it exists in the tendency for a uniform particle diameter pigment to be obtained, it is preferable.
本发明的着色感光性树脂组合物中使用的粘结剂树脂(B)较好含有从(甲基)丙烯酸衍生的结构单元。粘结剂树脂(B)更好的是从(甲基)丙烯酸衍生的结构单元和可与其共聚的其它单体的丙烯酸系共聚物。The binder resin (B) used in the colored photosensitive resin composition of the present invention preferably contains a structural unit derived from (meth)acrylic acid. The binder resin (B) is more preferably an acrylic copolymer of a structural unit derived from (meth)acrylic acid and other monomers copolymerizable therewith.
在此,(甲基)丙烯酸表示丙烯酸和/或甲基丙烯酸。所述从(甲基)丙烯酸衍生的结构单元的含有量在构成粘结剂树脂(B)的总结构单元中较好是16mol%以上~40mol%以下。若(甲基)丙烯酸单元的含有量在所述范围内,则显像时树脂层内非像素部的溶解性良好,而且显像后的非像素部有残渣难以残留的倾向,因而较好。Here, (meth)acrylic acid means acrylic acid and/or methacrylic acid. The content of the structural unit derived from (meth)acrylic acid is preferably from 16 mol % to 40 mol % in total structural units constituting the binder resin (B). When the content of the (meth)acrylic acid unit is within the above range, the solubility of the non-pixel portion in the resin layer during image development is good, and residue tends to be less likely to remain in the non-pixel portion after image development, which is preferable.
作为其它可共聚的单体,可以列举例如芳香族乙烯基化合物、不饱和羧酸酯类、不饱和羧酸氨基烷酯类、不饱和羧酸缩水甘油酯类、羧酸乙烯酯类、不饱和醚类、氰化乙烯基化合物、不饱和酰胺类、不饱和酰亚胺类、脂肪族共轭双烯类、聚合物分子链末端有一丙烯酰基或一甲基丙烯酰基的大分子单体类等。Examples of other copolymerizable monomers include aromatic vinyl compounds, unsaturated carboxylic acid esters, unsaturated carboxylic acid aminoalkyl esters, unsaturated carboxylic acid glycidyl esters, carboxylic acid vinyl esters, unsaturated Ethers, vinyl cyanide compounds, unsaturated amides, unsaturated imides, aliphatic conjugated dienes, macromonomers with an acryloyl group or a methacryloyl group at the end of the polymer molecular chain, etc. .
作为所述丙烯酸系共聚物,可以列举例如甲基丙烯酸/甲基丙烯酸苄酯共聚物、甲基丙烯酸/甲基丙烯酸苄酯/苯乙烯共聚物、甲基丙烯酸/甲基丙烯酸苄酯/甲基丙烯酸异降冰片酯共聚物、甲基丙烯酸/苯乙烯/甲基丙烯酸苄酯/N-苯基马来酰亚胺共聚物、和含有以下式(I)所示构成成分的共聚物等:Examples of the acrylic copolymer include methacrylic acid/benzyl methacrylate copolymer, methacrylic acid/benzyl methacrylate/styrene copolymer, methacrylic acid/benzyl methacrylate/methacrylic acid Isonorbornyl acrylate copolymer, methacrylic acid/styrene/benzyl methacrylate/N-phenylmaleimide copolymer, and copolymers containing constituents represented by the following formula (I):
式(I)中R1和R2各自独立地表示氢原子或甲基。In formula (I), R 1 and R 2 each independently represent a hydrogen atom or a methyl group.
其中,较好使用甲基丙烯酸/甲基丙烯酸苄酯共聚物、甲基丙烯酸/甲基丙烯酸苄酯/苯乙烯共聚物、甲基丙烯酸/甲基丙烯酸苄酯/甲基丙烯酸异降冰片酯共聚物、甲基丙烯酸/所述式(I)所示构成成分(R1是甲基、R2是氢原子)/甲基丙烯酸苄酯共聚物和所述式(I)所示构成成分(R1是甲基、R2是氢原子)/甲基丙烯酸苄酯共聚物。Among them, methacrylic acid/benzyl methacrylate copolymer, methacrylic acid/benzyl methacrylate/styrene copolymer, methacrylic acid/benzyl methacrylate/isonorbornyl methacrylate copolymer are preferably used. substance, methacrylic acid/the constituents represented by the formula (I) (R 1 is a methyl group, R 2 is a hydrogen atom)/benzyl methacrylate copolymer and the constituents represented by the formula (I) (R 1 is a methyl group, R 2 is a hydrogen atom)/benzyl methacrylate copolymer.
有式(I)所示构成成分的粘结剂树脂,例如甲基丙烯酸/所述式(I)所示构成成分(R1是甲基、R2是氢原子)/甲基丙烯酸苄酯共聚物可以通过使甲基丙烯酸和甲基丙烯酸苄酯聚合得到2成分聚合物、再使所得到的2成分聚合物与以下式(II)所示成分反应的方法等得到:A binder resin with constituents shown in formula (I), such as methacrylic acid/constituents represented by formula (I) (R 1 is a methyl group, R 2 is a hydrogen atom)/benzyl methacrylate copolymer The product can be obtained by polymerizing methacrylic acid and benzyl methacrylate to obtain a two-component polymer, and then reacting the obtained two-component polymer with a component represented by the following formula (II):
式(II)中,R2表示氢原子。In formula (II), R 2 represents a hydrogen atom.
本发明中使用的粘结剂树脂(B)的酸值通常是50~150、较好是60~135、更好是70~135。若所述酸值为50~150,则对显像液的溶解性提高,未曝光部变得容易溶解,而且敏感度提高,显像时使曝光部的图案残留,有提高残膜率的倾向,因而较好。在此,酸值是作为中和丙烯酸系聚合物1g所需要的氢氧化钾数量(mg)测定的值,通常可以通过用氢氧化钾水溶液滴定来求出。The acid value of the binder resin (B) used for this invention is 50-150 normally, Preferably it is 60-135, More preferably, it is 70-135. When the acid value is 50 to 150, the solubility to the developing solution increases, the unexposed portion becomes easy to dissolve, and the sensitivity increases, and the pattern of the exposed portion remains during development, which tends to increase the residual film rate. , so it is better. Here, the acid value is a value measured as the amount (mg) of potassium hydroxide required to neutralize 1 g of the acrylic polymer, and can usually be obtained by titration with an aqueous potassium hydroxide solution.
进而,粘结剂树脂(B)是其聚苯乙烯换算重均分子量通常为5,000~35,000、较好6,000~30,000、更好7,000~28,000的。若分子量为5,000~35,000,则硬化树脂层(涂膜)的硬度提高、残膜率也高、未曝光部对显像液的溶解性良好、有提高解像度的倾向,因而较好。Furthermore, the binder resin (B) has polystyrene conversion weight average molecular weight normally 5,000-35,000, Preferably it is 6,000-30,000, More preferably, it is 7,000-28,000. When the molecular weight is 5,000 to 35,000, the hardness of the cured resin layer (coating film) increases, the remaining film rate is also high, the solubility of the unexposed portion to the developing solution is good, and the resolution tends to be improved, so it is preferable.
所述粘结剂树脂(B)相对于着色感光性树脂组合物的固形分而言的质量分率通常是5质量%以上~50质量%以下、较好是10质量%以上~40质量%以下、更好是15质量%以上~35质量%以下。所述粘结剂树脂的含有量若在5质量%以上~50质量%以下,则图案形成是可能的,而且解像度和残膜率有提高的倾向,因而较好。The mass fraction of the binder resin (B) relative to the solid content of the colored photosensitive resin composition is usually at least 5% by mass and at most 50% by mass, preferably at least 10% by mass and at most 40% by mass. , More preferably, it is not less than 15% by mass and not more than 35% by mass. When the content of the binder resin is at least 5% by mass and at most 50% by mass, pattern formation is possible, and the resolution and residual film ratio tend to be improved, which is preferable.
本发明中使用的光聚合性化合物(C)是能通过照射光线而从光聚合引发剂发生的活性自由基来引发聚合的化合物。作为光聚合性化合物(C),可以列举例如有聚合性碳-碳不饱和键的化合物等。该化合物既可以是单官能的光聚合性化合物,也可以是2官能或3官能以上的多官能光聚合性化合物。The photopolymerizable compound (C) used in the present invention is a compound capable of initiating polymerization by active radicals generated from a photopolymerization initiator by irradiation with light. As a photopolymerizable compound (C), the compound etc. which have a polymerizable carbon-carbon unsaturated bond are mentioned, for example. This compound may be a monofunctional photopolymerizable compound or a bifunctional or trifunctional or higher polyfunctional photopolymerizable compound.
作为单官能的光聚合性化合物,可以列举例如丙烯酸壬基苯基卡必醇酯、丙烯酸2-羟基-3-苯氧基丙酯、丙烯酸2-乙基己基卡必醇酯、丙烯酸2-羟基乙酯、N-乙烯基吡咯烷酮等。Examples of monofunctional photopolymerizable compounds include nonylphenyl carbitol acrylate, 2-hydroxy-3-phenoxypropyl acrylate, 2-ethylhexyl carbitol acrylate, 2-hydroxy acrylate Ethyl ester, N-vinylpyrrolidone, etc.
作为2官能的光聚合性化合物,可以列举例如二丙烯酸1,6-己二醇酯、二甲基丙烯酸1,6-己二醇酯、二丙烯酸乙二醇酯、二甲基丙烯酸乙二醇酯、二丙烯酸新戊二醇酯、二甲基丙烯酸新戊二醇酯、二丙烯酸三甘醇酯、二甲基丙烯酸三甘醇酯、双酚A的二(丙烯酰氧乙基)醚、二丙烯酸3-甲基戊二醇酯、二甲基丙烯酸3-甲基戊二醇酯等。Examples of bifunctional photopolymerizable compounds include 1,6-hexanediol diacrylate, 1,6-hexanediol dimethacrylate, ethylene glycol diacrylate, and ethylene glycol dimethacrylate. ester, neopentyl glycol diacrylate, neopentyl glycol dimethacrylate, triethylene glycol diacrylate, triethylene glycol dimethacrylate, bis(acryloxyethyl) ether of bisphenol A, 3-methylpentanediol diacrylate, 3-methylpentanediol dimethacrylate, and the like.
作为3官能以上的多官能光聚合性化合物,可以列举例如三丙烯酸三(羟甲基)丙烷酯、三甲基丙烯酸三(羟甲基)丙烷酯、三丙烯酸季戊四醇酯、三甲基丙烯酸季戊四醇酯、四丙烯酸季戊四醇酯、四甲基丙烯酸季戊四醇酯、五丙烯酸二聚季戊四醇酯、五甲基丙烯酸二聚季戊四醇酯、六丙烯酸二聚季戊四醇酯、六甲基丙烯酸二聚季戊四醇酯等。Examples of trifunctional or higher polyfunctional photopolymerizable compounds include tri(hydroxymethyl)propane triacrylate, tri(hydroxymethyl)propane trimethacrylate, pentaerythritol triacrylate, and pentaerythritol trimethacrylate. , pentaerythritol tetraacrylate, pentaerythritol tetramethacrylate, dipentaerythritol pentaacrylate, dipentaerythritol pentamethacrylate, dipentaerythritol hexaacrylate, dipentaerythritol hexamethacrylate, etc.
所述光聚合性化合物既可以各自单独使用、也可以2种以上组合使用。光聚合性化合物(C)的含有量,相对于着色感光性树脂组合物的固形分而言,按质量分率计,通常是16质量%以上~31质量%以下、较好是18质量%以上~30质量%以下、更好是19质量%以上~29质量%以下。光聚合性化合物(C)的含有量若为16质量%以上~31质量%以下,则硬化充分发生、提高了残膜率,因而较好。These photopolymerizable compounds may be used alone or in combination of two or more. The content of the photopolymerizable compound (C) is usually not less than 16% by mass and not more than 31% by mass, preferably not less than 18% by mass, in terms of mass fraction relative to the solid content of the colored photosensitive resin composition. - 30% by mass or less, more preferably 19% by mass or more and 29% by mass or less. When the content of the photopolymerizable compound (C) is 16% by mass or more to 31% by mass or less, hardening occurs sufficiently and the residual film rate increases, which is preferable.
作为本发明中使用的光聚合引发剂(D),可以列举例如乙酰苯系化合物、三嗪系化合物、联咪唑系化合物、肟化合物,这些化合物中2种以上的混合物。Examples of the photopolymerization initiator (D) used in the present invention include acetophenone-based compounds, triazine-based compounds, biimidazole-based compounds, and oxime compounds, and mixtures of two or more of these compounds.
作为乙酰苯系化合物,可以列举例如二乙氧基乙酰苯、2-甲基-2-吗啉代-1-(4-甲硫基苯基)丙-1-酮、2-苄基-2-二甲胺基-1-(4-吗啉代苯基)丁-1-酮、2-羟基-2-甲基-1-苯基丙-1-酮、苄基二甲醛缩苯乙酮、2-羟基-2-甲基-1-〔4-(2-羟基乙氧基)苯基〕丙-1-酮、1-羟基环己基苯基酮、2-羟基-2-甲基-1-〔4-(1-甲基乙烯基)苯基〕丙-1-酮的低聚物等。这些当中,较好使用2-甲基-2-吗啉代-1-(4-甲硫基苯基)丙-1-酮。进而,多种乙酰苯系和其它光聚合引发剂也可以组合使用。Examples of the acetophenone compound include diethoxyacetophenone, 2-methyl-2-morpholino-1-(4-methylthiophenyl)propan-1-one, 2-benzyl-2 -Dimethylamino-1-(4-morpholinophenyl)butan-1-one, 2-hydroxy-2-methyl-1-phenylpropan-1-one, benzyl dimethyl ketal , 2-hydroxy-2-methyl-1-[4-(2-hydroxyethoxy)phenyl]propan-1-one, 1-hydroxycyclohexyl phenyl ketone, 2-hydroxy-2-methyl- Oligomers of 1-[4-(1-methylvinyl)phenyl]propan-1-one, etc. Among these, 2-methyl-2-morpholino-1-(4-methylthiophenyl)propan-1-one is preferably used. Furthermore, multiple types of acetophenone-based and other photopolymerization initiators can also be used in combination.
作为其它光聚合引发剂,可以列举可通过照射光而发生活性自由基的活性自由基发生剂、酸发生剂等。Examples of other photopolymerization initiators include active radical generators and acid generators capable of generating active radicals by irradiation with light.
作为三嗪系化合物,可以列举例如2,4-二(三氯甲基)-6-(4-甲氧基苯基)-1,3,5-三嗪、2,4-二(三氯甲基)-6-(4-甲氧基萘基)-1,3,5-三嗪、2,4-二(三氯甲基)-6-(4-甲氧基苯乙烯基)-1,3,5-三嗪、2,4-二(三氯甲基)-6-〔2-(5-甲基呋喃-2-基)乙烯基〕-1,3,5-三嗪、2,4-二(三氯甲基)-6-〔2-(呋喃-2-基)乙烯基〕-1,3,5-三嗪、2,4-二(三氯甲基)-6-〔2-(4-二乙胺基-2-甲基苯基)乙烯基〕-1,3,5-三嗪、2,4-二(三氯甲基)-6-〔2-(3,4-二甲氧基苯基)乙烯基〕-1,3,5-三嗪等。Examples of triazine compounds include 2,4-bis(trichloromethyl)-6-(4-methoxyphenyl)-1,3,5-triazine, 2,4-bis(trichloromethyl) Methyl)-6-(4-methoxynaphthyl)-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-(4-methoxystyryl)- 1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(5-methylfuran-2-yl)vinyl]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(furan-2-yl)vinyl]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6 -[2-(4-diethylamino-2-methylphenyl)vinyl]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-( 3,4-dimethoxyphenyl)vinyl]-1,3,5-triazine, etc.
作为联咪唑化合物,可以列举2,2′-二(邻氯苯基)-4,4′,5,5′-四苯基联咪唑、2,2′-二(邻氯苯基)-4,4′,5,5′-四(对乙氧羰基苯基)联咪唑、2,2′-二(邻氯苯基)-4,4′,5,5′-四(对溴苯基)联咪唑、2,2′-二(邻氯苯基)-4,4′,5,5′-四(邻,对-二氯苯基)联咪唑、2,2′-二(邻溴苯基)-4,4′,5,5′-四苯基联咪唑、2,2′-二(邻,对-二氯苯基)-4,4′,5,5′-四苯基联咪唑、2,2′-二(邻氯苯基)-4,4′,5,5′-四(间甲氧基苯基)联咪唑、2,2′-二(邻,邻′-二氯苯基)-4,4′,5,5′-四苯基联咪唑、2,2′-二(邻硝基苯基)-4,4′,5,5′-四苯基联咪唑、2,2′-二(邻甲基苯基)-4,4′,5,5′-四苯基联咪唑等。Examples of biimidazole compounds include 2,2'-bis(o-chlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(o-chlorophenyl)-4 , 4',5,5'-tetrakis(p-ethoxycarbonylphenyl)biimidazole, 2,2'-bis(o-chlorophenyl)-4,4',5,5'-tetrakis(p-bromophenyl) ) biimidazole, 2,2'-bis(o-chlorophenyl)-4,4',5,5'-tetrakis(o, p-dichlorophenyl)biimidazole, 2,2'-bis(o-bromo Phenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(o,p-dichlorophenyl)-4,4',5,5'-tetraphenyl Biimidazole, 2,2'-bis(o-chlorophenyl)-4,4',5,5'-tetrakis(m-methoxyphenyl)biimidazole, 2,2'-bis(o,o'- Dichlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(o-nitrophenyl)-4,4',5,5'-tetraphenylbiimidazole Imidazole, 2,2'-bis(o-methylphenyl)-4,4',5,5'-tetraphenylbiimidazole, etc.
作为肟化合物,可以列举O-酰基肟系化合物,作为其具体例,可以列举1-(4-苯磺胺基苯基)丁-1,2-二酮2-肟-O-苯甲酸盐、1-(4-苯磺胺基苯基)辛-1,2-二酮2-肟-O-苯甲酸盐、1-(4-苯磺胺基苯基)辛-1-酮肟-O-乙酸盐、1-(4-苯磺胺基苯基)丁-1-酮肟-O-乙酸盐等。O-acyl oxime compounds can be mentioned as oxime compounds, and specific examples thereof include 1-(4-benzenesulfonylaminophenyl)butan-1,2-dione 2-oxime-O-benzoate, 1-(4-Benzenesulfonylaminophenyl)oct-1,2-dione 2-oxime-O-benzoate, 1-(4-benzenesulfonylaminophenyl)oct-1-one oxime-O- Acetate, 1-(4-benzenesulfonylaminophenyl)butan-1-one oxime-O-acetate, etc.
作为活性自由基发生剂,可以列举例如苯偶姻系化合物、二苯酮系化合物、噻吨酮系化合物、三嗪系化合物。Examples of active radical generators include benzoin-based compounds, benzophenone-based compounds, thioxanthone-based compounds, and triazine-based compounds.
作为苯偶姻系化合物,可以列举例如苯偶姻、苯偶姻甲醚、苯偶姻乙醚、苯偶姻丙醚、苯偶姻丁醚等。Examples of the benzoin-based compound include benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin propyl ether, and benzoin butyl ether.
作为二苯酮系化合物,可以列举例如二苯酮、邻苯甲酰苯甲酸甲酯、4-苯基二苯酮、亚硫酸4-苯甲酰-4′-甲基二苯酯、3,3′,4,4′-四(叔丁基过氧羰基)二苯酮、2,4,6-三甲基二苯酮等。Examples of benzophenone-based compounds include benzophenone, methyl o-benzoylbenzoate, 4-phenylbenzophenone, 4-benzoyl-4'-methyldiphenylsulfite, 3, 3',4,4'-Tetrakis(tert-butylperoxycarbonyl)benzophenone, 2,4,6-trimethylbenzophenone and the like.
作为噻吨酮系化合物,可以列举例如2-异丙基噻吨酮、4-异丙基噻吨酮、2,4-二乙基噻吨酮、2,4-二氯噻吨酮、1-氯-4-丙氧基噻吨酮等。Examples of thioxanthone-based compounds include 2-isopropylthioxanthone, 4-isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, 1 -Chloro-4-propoxythioxanthone, etc.
作为三嗪系化合物,可以列举与上述相同的那些。Examples of the triazine-based compound include the same ones as those described above.
作为上述以外的活性自由基发生剂,可以列举例如2,4,6-三甲基苯甲酰二苯膦氧化物、2,2′-二(邻氯苯基)-4,4′,5,5′-四苯基-1,2′-联咪唑、10-丁基-2-氯吖啶酮、2-乙基蒽醌、苯偶酰、9,10-菲醌、莰醌、苯乙醛酸甲酯、二茂钛化合物等。Examples of active radical generators other than those mentioned above include 2,4,6-trimethylbenzoyldiphenylphosphine oxide, 2,2'-bis(o-chlorophenyl)-4,4',5 , 5′-tetraphenyl-1,2′-biimidazole, 10-butyl-2-chloroacridone, 2-ethylanthraquinone, benzil, 9,10-phenanthrenequinone, camphorquinone, benzene Methyl glyoxylate, titanocene compounds, etc.
作为酸发生剂,可以列举例如对甲苯磺酸4-羟基苯基二甲基锍、六氟锑酸4-羟基苯基二甲基锍、对甲苯磺酸4-乙酰氧基苯基二甲基锍、六氟锑酸4-乙酰氧基苯基·甲基·苄基锍、对甲苯磺酸三苯锍、六氟锑酸三苯锍、对甲苯磺酸二苯基碘鎓、六氟锑酸二苯基碘鎓等鎓盐类、或硝基苄基甲苯磺酸盐类、苯偶姻甲苯磺酸盐类等。Examples of the acid generator include 4-hydroxyphenyldimethylsulfonium p-toluenesulfonate, 4-hydroxyphenyldimethylsulfonium hexafluoroantimonate, 4-acetoxyphenyldimethylsulfonium p-toluenesulfonate Sulphonium, 4-acetoxyphenylmethylbenzylsulfonium hexafluoroantimonate, triphenylsulfonium p-toluenesulfonate, triphenylsulfonium hexafluoroantimonate, diphenyliodonium p-toluenesulfonate, hexafluoroantimony onium salts such as diphenyliodonium acid, nitrobenzyl tosylate, benzoin tosylate, etc.
进而,在作为活性自由基发生剂的上述化合物中,也有在发生自由基的同时发生酸的化合物,例如,三嗪系光聚合引发剂也可以作为酸发生剂使用。Furthermore, among the above-mentioned compounds that are active radical generators, there are compounds that generate radicals and simultaneously generate acids. For example, triazine-based photopolymerization initiators can also be used as acid generators.
所述光聚合引发剂(D)的含有量,相对于粘结剂树脂(B)和光聚合性化合物(C)的合计量100质量份而言,通常是0.1质量份以上~30质量份以下、较好1质量份以上~25质量份以下。若光聚合引发剂的含有量在0.1质量份以上~30质量份以下,则敏感度提高、曝光时间缩短、生产率提高,而且有不因敏感度过高而使解像度变得不良的倾向,因而较好。The content of the photopolymerization initiator (D) is usually not less than 0.1 parts by mass and not more than 30 parts by mass based on 100 parts by mass of the total amount of the binder resin (B) and the photopolymerizable compound (C). Preferably, it is 1 mass part or more - 25 mass parts or less. If the content of the photopolymerization initiator is more than 0.1 parts by mass and less than 30 parts by mass, the sensitivity is improved, the exposure time is shortened, and the productivity is improved, and there is a tendency not to cause poor resolution due to excessive sensitivity. good.
作为光聚合引发剂(D),较好使用2-甲基-2-吗啉代-1-(4-甲硫基苯基)丙-1-酮、2-苄基-2-二甲胺基-1-(4-吗啉代苯基)丁-1-酮、2,4-二(三氯甲基)-6-胡椒基-1,3,5-三嗪。As the photopolymerization initiator (D), it is preferable to use 2-methyl-2-morpholino-1-(4-methylthiophenyl)propan-1-one, 2-benzyl-2-dimethylamine 1-(4-morpholinophenyl)butan-1-one, 2,4-bis(trichloromethyl)-6-piperonyl-1,3,5-triazine.
本发明中也可以使用光聚合引发助剂。光聚合引发助剂较好是与光聚合引发剂组合使用的,是用来促进由光聚合引发剂引发聚合的光聚合性化合物的聚合的化合物。作为光聚合引发助剂,可以列举胺系化合物、烷氧基蒽系化合物、噻吨酮系化合物等。In the present invention, a photopolymerization initiation adjuvant can also be used. The photopolymerization initiation adjuvant is preferably used in combination with a photopolymerization initiator, and is a compound for promoting polymerization of a photopolymerizable compound that is polymerized by the photopolymerization initiator. As a photopolymerization start adjuvant, an amine compound, an alkoxy anthracene compound, a thioxanthone compound, etc. are mentioned.
作为胺系化合物,可以列举例如三乙醇胺、甲基二乙醇胺、三异丙醇胺、4-二甲胺基苯甲酸甲酯、4-二甲胺基苯甲酸乙酯、4-二甲胺基苯甲酸异戊酯、苯甲酸2-二甲胺基乙酯、4-二甲胺基苯甲酸2-乙基己酯、N,N-二甲基对甲苯胺、4,4′-二(二甲胺基)二苯酮(通称米蚩酮)、4,4′-二(二乙胺基)二苯酮、4,4′-二(乙基甲胺基)二苯酮等。这些当中,较好使用4,4′-二(二乙胺基)二苯酮。Examples of amine compounds include triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, 4-dimethylaminobenzoate, Isoamyl benzoate, 2-dimethylaminoethyl benzoate, 2-ethylhexyl 4-dimethylaminobenzoate, N,N-dimethyl-p-toluidine, 4,4'-di( Dimethylamino)benzophenone (commonly known as Michler's ketone), 4,4'-bis(diethylamino)benzophenone, 4,4'-bis(ethylmethylamino)benzophenone, etc. Among these, 4,4'-bis(diethylamino)benzophenone is preferably used.
作为烷氧基蒽系化合物,可以列举例如9,10-二甲氧基蒽、2-乙基-9,10-二甲氧基蒽、9,10-二乙氧基蒽、2-乙基-9,10-二乙氧基蒽等。Examples of alkoxyanthracene compounds include 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, 2-ethyl - 9,10-diethoxyanthracene, etc.
作为噻吨酮系化合物,可以列举与上述相同的那些。Examples of the thioxanthone-based compound include the same ones as those described above.
光聚合引发助剂既可以单独使用也可以多种组合使用。进而,也可以使用作为光聚合引发助剂市售的那些,而作为市售的光聚合引发助剂,可以列举例如商品名“EAB-F”(保土谷化学工业公司制)等。A photopolymerization start adjuvant may be used individually or in combination of multiple types. Furthermore, what is marketed as a photopolymerization start adjuvant can also be used, and as a commercially available photopolymerization start adjuvant, a brand name "EAB-F" (made by Hodogaya Chemical Industry Co., Ltd.) etc. are mentioned, for example.
作为本发明的着色感光性树脂组合物中光聚合引发剂与光聚合引发助剂的组合,可以列举例如二乙氧基乙酰苯/4,4′-二(二乙胺基)二苯酮、2-甲基-2-吗啉代-1-(4-甲硫基苯基)丙-1-酮/4,4′-二(二乙胺基)二苯酮、2-羟基-2-甲基-1-苯基丙-1-酮/4,4′-二(二乙胺基)二苯酮、苄基二甲醛缩苯乙酮/4,4′-二(二乙胺基)二苯酮、2-羟基-2-甲基-1-〔4-(2-羟基乙氧基)苯基〕丙-1-酮/4,4′-二(二乙胺基)二苯酮、1-羟基环己基苯基酮/4,4′-二(二乙胺基)二苯酮、2-羟基-2-甲基-1-〔4-(1-甲基乙烯基)苯基〕丙-1-酮的低聚物/4,4′-二(二乙胺基)二苯酮、2-苄基-2-二甲胺基-1-(4-吗啉代苯基)丁-1-酮/4,4′-二(二乙胺基)二苯酮等。这些当中,较好使用2-甲基-2-吗啉代-1-(4-甲硫基苯基)丙-1-酮/4,4′-二(二乙胺基)二苯酮。Examples of the combination of the photopolymerization initiator and the photopolymerization initiation aid in the colored photosensitive resin composition of the present invention include diethoxyacetophenone/4,4'-bis(diethylamino)benzophenone, 2-Methyl-2-morpholino-1-(4-methylthiophenyl)propan-1-one/4,4′-bis(diethylamino)benzophenone, 2-hydroxy-2- Methyl-1-phenylpropan-1-one/4,4′-bis(diethylamino)benzophenone, benzyl dimethylacetacetal/4,4′-bis(diethylamino) Benzophenone, 2-hydroxy-2-methyl-1-[4-(2-hydroxyethoxy)phenyl]propan-1-one/4,4'-bis(diethylamino)benzophenone , 1-hydroxycyclohexyl phenyl ketone/4,4'-di(diethylamino)benzophenone, 2-hydroxy-2-methyl-1-[4-(1-methylvinyl)phenyl ] Propan-1-one oligomer/4,4'-bis(diethylamino)benzophenone, 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl) Butan-1-one/4,4'-bis(diethylamino)benzophenone, etc. Among these, 2-methyl-2-morpholino-1-(4-methylthiophenyl)propan-1-one/4,4'-bis(diethylamino)benzophenone is preferably used.
在使用这些光聚合引发助剂的情况下,其使用量相对于光聚合引发剂每1摩尔而言通常在10摩尔以下、较好在0.01摩尔以上~5摩尔以下。When using these photopolymerization start adjuvants, the usage-amount is 10 mol or less normally with respect to 1 mol of photopolymerization initiators, Preferably it is 0.01 mol or more - 5 mol or less.
作为本发明中使用的溶剂(F),可以列举例如醚类、芳香族烃类、酮类、醇类、酯类、酰胺类等。Examples of the solvent (F) used in the present invention include ethers, aromatic hydrocarbons, ketones, alcohols, esters, amides and the like.
作为醚类,可以列举例如四氢呋喃、四氢吡喃、1,4-二噁烷、乙二醇一甲醚、乙二醇一乙醚、乙二醇一丙醚、乙二醇一丁醚、二甘醇一甲醚、二甘醇一乙醚、二甘醇一丁醚、二甘醇二甲醚、二甘醇二乙醚、二甘醇二丙醚、二甘醇二丁醚、乙酸丙二醇一甲醚酯、乙酸丙二醇一乙醚酯、乙酸丙二醇一丙醚酯、乙酸甲基溶纤剂酯、乙酸乙基溶纤剂酯、乙酸乙基卡必醇酯、乙酸丁基卡必醇酯、乙酸丙二醇甲醚酯、乙酸甲氧基丁酯、乙酸甲氧基戊酯、茴香醚、苯乙醚、甲基茴香醚等。Examples of ethers include tetrahydrofuran, tetrahydropyran, 1,4-dioxane, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, Glycol monomethyl ether, Diethylene glycol monoethyl ether, Diethylene glycol monobutyl ether, Diethylene glycol dimethyl ether, Diethylene glycol diethyl ether, Diethylene glycol dipropyl ether, Diethylene glycol dibutyl ether, Propylene glycol monomethyl acetate Ether ester, propylene glycol acetate monoethyl ether, propylene glycol acetate monopropyl ether, methyl cellosolve acetate, ethyl cellosolve acetate, ethyl carbitol acetate, butyl carbitol acetate, propylene glycol acetate Methyl ether ester, methoxybutyl acetate, methoxypentyl acetate, anisole, phenetole, methyl anisole, etc.
作为芳香族烃类,可以列举例如苯、甲苯、二甲苯、等。Examples of aromatic hydrocarbons include benzene, toluene, xylene, mesitylene and the like.
作为酮类,可以列举例如丙酮、2-丁酮、2-庚酮、3-庚酮、4-庚酮、4-甲基-2-戊酮、环戊酮、环己酮等。Examples of ketones include acetone, 2-butanone, 2-heptanone, 3-heptanone, 4-heptanone, 4-methyl-2-pentanone, cyclopentanone, and cyclohexanone.
作为醇类,可以列举例如甲醇、乙醇、丙醇、丁醇、己醇、环己醇、乙二醇、甘油等。Examples of alcohols include methanol, ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, glycerin and the like.
作为酯类,可以列举例如乙酸乙酯、乙酸正丁酯、乙酸异丁酯、甲酸戊酯、乙酸异戊酯、乙酸异丁酯、丙酸丁酯、丁酸异丙酯、丁酸乙酯、丁酸丁酯、烷基酯类、乳酸甲酯、乳酸乙酯、羟基乙酸甲酯、羟基乙酸乙酯、羟基乙酸丁酯、甲氧基乙酸甲酯、甲氧基乙酸乙酯、甲氧基乙酸丁酯、乙氧基乙酸甲酯、乙氧基乙酸乙酯、3-羟基丙酸甲酯、3-羟基丙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、2-羟基丙酸甲酯、2-羟基丙酸乙酯、2-羟基丙酸丙酯、2-甲氧基丙酸甲酯、2-甲氧基丙酸乙酯、2-甲氧基丙酸丙酯、2-乙氧基丙酸甲酯、2-乙氧基丙酸乙酯、2-羟基-2-甲基丙酸甲酯、2-羟基-2-甲基丙酸乙酯、2-甲氧基-2-甲基丙酸甲酯、2-乙氧基-2-甲基丙酸乙酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸丙酯、乙酰乙酸甲酯、乙酰乙酸乙酯、2-氧代丁酸甲酯、2-氧代丁酸乙酯、乙酸3-甲氧基丁酯、乙酸3-甲基-3-甲氧基丁酯、γ-丁内酯等。Examples of esters include ethyl acetate, n-butyl acetate, isobutyl acetate, amyl formate, isopentyl acetate, isobutyl acetate, butyl propionate, isopropyl butyrate, ethyl butyrate , butyl butyrate, alkyl esters, methyl lactate, ethyl lactate, methyl glycolate, ethyl glycolate, butyl glycolate, methyl methoxyacetate, ethyl methoxyacetate, methoxy butyl acetate, methyl ethoxy acetate, ethyl ethoxy acetate, methyl 3-hydroxypropionate, ethyl 3-hydroxypropionate, methyl 3-methoxypropionate, 3-methoxy Ethyl propionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate, propyl 2-hydroxypropionate, 2 - Methyl methoxypropionate, ethyl 2-methoxypropionate, propyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate, 2 -Methyl 2-hydroxy-2-methylpropionate, ethyl 2-hydroxy-2-methylpropionate, methyl 2-methoxy-2-methylpropionate, 2-ethoxy-2-methyl Ethyl propionate, methyl pyruvate, ethyl pyruvate, propyl pyruvate, methyl acetoacetate, ethyl acetoacetate, methyl 2-oxobutyrate, ethyl 2-oxobutyrate, acetate 3 - Methoxybutyl, 3-methyl-3-methoxybutyl acetate, γ-butyrolactone and the like.
作为酰胺类,可以列举例如N,N-二甲基甲酰胺、N,N-二甲基乙酰胺等。As amides, N,N-dimethylformamide, N,N-dimethylacetamide, etc. are mentioned, for example.
作为其它溶剂,可以列举例如N-甲基吡咯烷酮、二甲基亚砜等。As another solvent, N-methylpyrrolidone, dimethylsulfoxide, etc. are mentioned, for example.
上述溶剂既可以各自单独使用也可以2种以上组合使用。在着色感光性树脂组合物中的含有量,按质量分率计,通常是70质量%以上~95质量%以下、较好75质量%以上~90质量%以下。若溶剂(F)的含有量在所述范围内,则涂布时平坦性良好、而且形成彩色滤光器时显示特性良好,因而较好。The above solvents may be used alone or in combination of two or more. The content in the colored photosensitive resin composition is usually not less than 70% by mass and not more than 95% by mass, preferably not less than 75% by mass and not more than 90% by mass, in terms of mass fraction. When the content of the solvent (F) is within the above range, the flatness at the time of coating is good, and the display characteristics are good when forming a color filter, which is preferable.
溶剂(F)较好含有从乙酸丙二醇一甲醚酯和3-乙氧基丙酸乙酯组成的一组中选择的至少1种。在并用从乙酸丙二醇一甲醚酯和3-乙氧基丙酸乙酯组成的一组中选择的至少1种溶剂与其它溶剂的情况下,其混合比率,按质量分率计,相对于总溶剂使用量而言,从乙酸丙二醇一甲醚酯和3-乙氧基丙酸乙酯组成的一组中选择的至少1种通常较好是50~100质量%、更好是60~100质量%。从乙酸丙二醇一甲醚酯和3-乙氧基丙酸乙酯组成的一组中选择的至少1种溶剂相对于总溶剂而言按质量分率计若是50~100质量%,则有平坦性变得良好的倾向,因而较好。The solvent (F) preferably contains at least one selected from the group consisting of propylene glycol monomethyl ether acetate and ethyl 3-ethoxypropionate. In the case of using at least one solvent selected from the group consisting of propylene glycol monomethyl ether and 3-ethoxy ethyl propionate together with other solvents, the mixing ratio, in terms of mass fraction, relative to the total In terms of the amount of solvent used, at least one selected from the group consisting of propylene glycol monomethyl ether acetate and ethyl 3-ethoxypropionate is usually preferably from 50 to 100% by mass, more preferably from 60 to 100% by mass. %. At least one solvent selected from the group consisting of propylene glycol monomethyl ether acetate and ethyl 3-ethoxypropionate has flatness if the mass fraction is 50 to 100% by mass relative to the total solvents Tendency to be good, and therefore better.
在本发明所使用的着色感光性树脂组合物中,也可以含有环氧化合物。作为环氧化合物,可以列举例如在显像后着色图案的后烘干处理(加热处理)中能使粘结剂树脂交联的环氧化合物。进而,也可以是能通过加热而使其单独聚合的环氧化合物。由于该环氧化合物通过要么使粘结剂树脂交联要么使其自身聚合来使着色图案硬化,因而在所述后烘干中来自着色图案的升华物难以产生,从而较好使用它。In the colored photosensitive resin composition used in this invention, you may contain an epoxy compound. Examples of the epoxy compound include epoxy compounds capable of crosslinking the binder resin in the post-baking treatment (heat treatment) of the colored pattern after development. Furthermore, an epoxy compound which can be polymerized independently by heating may also be used. Since the epoxy compound hardens the colored pattern by either crosslinking the binder resin or polymerizing itself, sublimation from the colored pattern is hardly generated in the post-baking, so it is preferably used.
作为所述环氧化合物,可以列举例如双酚A型环氧树脂、氢化双酚A型环氧树脂、双酚F型环氧树脂、氢化双酚F型环氧树脂、可溶可熔酚醛树脂型环氧树脂等芳香族系环氧树脂;Examples of the epoxy compound include bisphenol A epoxy resin, hydrogenated bisphenol A epoxy resin, bisphenol F epoxy resin, hydrogenated bisphenol F epoxy resin, novolak resin Aromatic epoxy resins such as type epoxy resins;
脂环式环氧树脂、多环式环氧树脂、缩水甘油酯型树脂、缩水甘油胺型树脂、环氧化油等环氧树脂;Alicyclic epoxy resin, polycyclic epoxy resin, glycidyl ester resin, glycidyl amine resin, epoxidized oil and other epoxy resins;
所述环氧树脂的溴化衍生物;Brominated derivatives of said epoxy resins;
脂肪族化合物的环氧化物、脂环族化合物的环氧化物、芳香族化合物的环氧化物、丁二烯(共)聚合物的环氧化物、异戊二烯(共)聚合物的环氧化物、(甲基)丙烯酸缩水甘油酯(共)聚合物、异氰脲酸三缩水甘油酯等。Epoxides of aliphatic compounds, epoxides of cycloaliphatic compounds, epoxides of aromatic compounds, epoxides of butadiene (co)polymers, epoxides of isoprene (co)polymers compound, glycidyl (meth)acrylate (co)polymer, triglycidyl isocyanurate, etc.
着色感光性树脂组合物中环氧化合物的含有量,相对于着色感光性树脂组合物的固形分而言,按质量分率计,通常在15%以下、较好在0.5%以上~12%以下、更好在1%以上~10%以下。若所述环氧化合物的含有量在15质量%以下、硬化就能充分发生而使残膜率提高,因而较好。The content of the epoxy compound in the colored photosensitive resin composition is usually 15% or less, preferably 0.5% or more to 12% or less, in terms of mass fraction relative to the solid content of the colored photosensitive resin composition , more preferably at least 1% to at most 10%. When the content of the epoxy compound is at most 15% by mass, hardening can sufficiently occur and the residual film rate can be increased, which is preferable.
本发明的着色感光性树脂组合物中也可以含有表面活性剂、填充剂、粘结剂树脂以外的高分子化合物、粘合促进剂、抗氧剂、紫外线吸收剂、抗凝集剂、有机酸、有机胺化合物、硬化剂等添加剂。The colored photosensitive resin composition of the present invention may contain surfactants, fillers, polymer compounds other than binder resins, adhesion promoters, antioxidants, ultraviolet absorbers, anti-coagulation agents, organic acids, etc. , organic amine compounds, hardeners and other additives.
作为表面活性剂,可以使用从硅酮系表面活性剂、氟系表面活性剂和有氟原子的硅酮系表面活性剂组成的一组中选择的至少1种。As the surfactant, at least one selected from the group consisting of silicone-based surfactants, fluorine-based surfactants, and silicone-based surfactants having fluorine atoms can be used.
作为硅酮系表面活性剂,可以列举有硅氧烷键的表面活性剂。具体地说,可以列举Toray Silicone DC3PA、同SH7PA、同DC11PA、同SH21PA、同SH28PA、同SH29PA、同SH30PA、聚醚改性硅油SH8400(商品名,Toraysilicone公司制),KP321、KP322、KP323、KP324、KP326、KP340、KP341(信越Silicone公司制),TSF400、TSF401、TSF410、TSF4300、TSF4440、TSF4445、TSF-4446、TSF4452、TSF4460(ジ-イ-东芝シリコ-公司制)等。Examples of silicone-based surfactants include surfactants having a siloxane bond. Specifically, Toray Silicone DC3PA, same SH7PA, same DC11PA, same SH21PA, same SH28PA, same SH29PA, same SH30PA, polyether modified silicone oil SH8400 (trade name, manufactured by Toraysilicone Co.), KP321, KP322, KP323, KP324 , KP326, KP340, KP341 (manufactured by Shin-Etsu Silicone Co., Ltd.), TSF400, TSF401, TSF410, TSF4300, TSF4440, TSF4445, TSF-4446, TSF4452, TSF4460 (manufactured by Toshiba Silicone Co., Ltd.), etc.
作为氟系表面活性剂,可以列举有氟碳链的表面活性剂。具体地说,可以列举フロリナ-ト(商品名)FC430、同FC431(住友スリ-エム公司制),メガフアック(商品名)F142D、同F171、同F172、同F173、同F177、同F183、同R30(大日本Ink化学工业公司制),エフトップ(商品名)EF310、同EF303、同EF351、同EF352(新秋田化成公司制)、サ-フロン(商品名)S381、同S382、同SC101、同SC105(旭硝子公司制),E5844(大金精细化学品研究所(公司)制),BM-1000、BM-1100(均为商品名,BM Chemie公司制)等。Examples of the fluorine-based surfactant include surfactants having a fluorocarbon chain. Specifically, examples include Florina-to (trade name) FC430, TO FC431 (manufactured by Sumitomo Suri-Em Co., Ltd.), Megaface (trade name) F142D, TO F171, TO F172, TO F173, TO F177, TO F183, TO R30 (manufactured by Dainippon Ink Chemical Industry Co., Ltd.), Eftop (trade name) EF310, same as EF303, same as EF351, same as EF352 (manufactured by Shin Akita Chemical Co., Ltd.), Sa-Fron (trade name) S381, same as S382, same as SC101, same as SC105 (manufactured by Asahi Glass Co., Ltd.), E5844 (manufactured by Daikin Research Institute of Fine Chemicals (Co., Ltd.), BM-1000, BM-1100 (both trade names, manufactured by BM Chemie Co., Ltd.), etc.
作为有氟原子的硅酮系表面活性剂,可以列举有硅氧烷键和氟碳链的表面活性剂。具体地说,可以列举メガフアック(商品名)R08、同BL20、同F475、同F477、同F443(大日本Ink化学工业公司制成)等。Examples of the silicone-based surfactant having a fluorine atom include a surfactant having a siloxane bond and a fluorocarbon chain. Specifically, Megafac (trade name) R08, DON BL20, DON F475, DON F477, DON F443 (manufactured by Dainippon Ink Chemical Industry Co., Ltd.) and the like are exemplified.
这些表面活性剂既可以各自单独使用,也可以2种以上组合使用。These surfactants may be used alone or in combination of two or more.
这些表面活性剂,相对于除表面活性剂外的着色感光性树脂组合物100质量份而言,可以在0.6质量份以下、较好在0.001质量份以上~0.5质量份的范围内使用。若表面活性剂的含有量在0.6质量份以下,则有平坦性变得良好的倾向,因而较好。These surfactants can be used in an amount of at most 0.6 parts by mass, preferably at least 0.001 parts by mass to 0.5 parts by mass with respect to 100 parts by mass of the colored photosensitive resin composition excluding the surfactant. Since flatness tends to become favorable that the content of surfactant is 0.6 mass part or less, it is preferable.
作为填充剂,可以列举例如玻璃、氧化铝等的微粒。Examples of fillers include fine particles of glass and alumina.
作为粘结剂树脂以外的高分子化合物,可以列举例如聚乙烯醇、聚丙烯酸、聚乙二醇一烷基醚、聚丙烯酸氟烷酯等。Examples of polymer compounds other than the binder resin include polyvinyl alcohol, polyacrylic acid, polyethylene glycol monoalkyl ether, and polyfluoroalkyl acrylate.
作为粘合促进剂,可以列举例如乙烯基三甲氧基甲硅烷、乙烯基三乙氧基甲硅烷、乙烯基三(2-甲氧基乙氧基)甲硅烷、N-(2-氨基乙基)-3-氨基丙基甲基二甲氧基甲硅烷、N-(2-氨基乙基)-3-氨基丙基三甲氧基甲硅烷、3-氨基丙基三乙氧基甲硅烷、3-环氧丙氧基丙基三甲氧基甲硅烷、3-环氧丙氧基丙基甲基二甲氧基甲硅烷、2-(3,4-环氧环己基)乙基三甲氧基甲硅烷、3-氯丙基甲基二甲氧基甲硅烷、3-氯丙基三甲氧基甲硅烷、3-甲基丙烯酰氧基丙基三甲氧基甲硅烷、3-巯基丙基三甲氧基甲硅烷等。Examples of adhesion promoters include vinyltrimethoxysilane, vinyltriethoxysilane, vinyltris(2-methoxyethoxy)silane, N-(2-aminoethyl )-3-aminopropylmethyldimethoxysilane, N-(2-aminoethyl)-3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3 -Glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxymethyl Silane, 3-Chloropropylmethyldimethoxysilane, 3-Chloropropyltrimethoxysilane, 3-Methacryloxypropyltrimethoxysilane, 3-Mercaptopropyltrimethoxy Methyl silane, etc.
作为抗氧剂,可以列举例如4,4′-硫二(6-叔丁基-3-甲基苯酚)、2,6-二叔丁基-4-甲基苯酚等。Examples of antioxidants include 4,4'-thiobis(6-tert-butyl-3-methylphenol), 2,6-di-tert-butyl-4-methylphenol, and the like.
作为紫外线吸收剂,可以列举例如2-(2-羟基-3-叔丁基-5-甲基苯基)-5-氯苯并三唑等苯并三唑系,2-羟基-4-辛氧基二苯酮等二苯酮系,3,5-二叔丁基-4-羟基苯甲酸2,4-二叔丁基苯酯等苯甲酸酯系,2-(4,6-二苯基-1,3,5-三嗪-2-基)-5-己氧基苯酚等三嗪系等。Examples of ultraviolet absorbers include benzotriazoles such as 2-(2-hydroxy-3-tert-butyl-5-methylphenyl)-5-chlorobenzotriazole, 2-hydroxy-4-octyl Benzophenone series such as oxybenzophenone, benzoate series such as 2,4-di-tert-butylphenyl 3,5-di-tert-butyl-4-hydroxybenzoate, 2-(4,6-di Triazine series such as phenyl-1,3,5-triazin-2-yl)-5-hexyloxyphenol, and the like.
作为抗凝集剂,可以列举例如聚丙烯酸钠等。As an anti-aggregation agent, sodium polyacrylate etc. are mentioned, for example.
作为有机酸,可以列举例如:Examples of organic acids include:
甲酸、乙酸、丙酸、丁酸、戊酸、新戊酸、己酸、二乙基乙酸、庚酸、辛酸等脂肪族一羧酸类;Formic acid, acetic acid, propionic acid, butyric acid, valeric acid, pivalic acid, hexanoic acid, diethylacetic acid, heptanoic acid, octanoic acid and other aliphatic monocarboxylic acids;
草酸、丙二酸、琥珀酸、戊二酸、己二酸、庚二酸、辛二酸、壬二酸、癸二酸、十三烷二酸、甲基丙二酸、乙基丙二酸、二甲基丙二酸、甲基琥珀酸、四甲基琥珀酸、环己烷二羧酸、衣康酸、柠康酸、马来酸、富马酸、中康酸等脂肪族二羧酸类;Oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, tridecanedioic acid, methylmalonic acid, ethylmalonic acid , Dimethylmalonic acid, methyl succinic acid, tetramethyl succinic acid, cyclohexane dicarboxylic acid, itaconic acid, citraconic acid, maleic acid, fumaric acid, mesaconic acid and other aliphatic dicarboxylic acids acids;
丙三羧酸、乌头酸、樟脑三酸等脂肪族三羧酸类;Aliphatic tricarboxylic acids such as propanetricarboxylic acid, aconitic acid, and camphortricarboxylic acid;
苯甲酸、甲苯酸、枯茗酸、2,3-二甲基苯甲酸、林酸等芳香族一羧酸类;Aromatic monocarboxylic acids such as benzoic acid, toluic acid, cuminic acid, 2,3-dimethylbenzoic acid, and linoleic acid;
邻苯二甲酸、间苯二甲酸、对苯二甲酸等芳香族二羧酸类;Aromatic dicarboxylic acids such as phthalic acid, isophthalic acid, and terephthalic acid;
偏苯三甲酸、均苯三甲酸、偏苯四甲酸、均苯四甲酸等芳香族多羧酸类等。Aromatic polycarboxylic acids such as trimellitic acid, trimellitic acid, trimellitic acid, pyromellitic acid, etc.
作为有机胺化合物,可以列举例如:Examples of organic amine compounds include:
正丙胺、异丙胺、正丁胺、异丁胺、仲丁胺、叔丁胺、正戊胺、正己胺、正庚胺、正辛胺、正壬胺、正癸胺、正十一烷胺、正十二烷胺等一烷基胺类;N-propylamine, isopropylamine, n-butylamine, isobutylamine, sec-butylamine, tert-butylamine, n-pentylamine, n-hexylamine, n-heptylamine, n-octylamine, n-nonylamine, n-decylamine, n-undecylamine, n- Monoalkylamines such as dodecylamine;
环己基胺、2-甲基环己基胺、3-甲基环己基胺、4-甲基环己基胺等一环烷基胺类;Cycloalkylamines such as cyclohexylamine, 2-methylcyclohexylamine, 3-methylcyclohexylamine, 4-methylcyclohexylamine, etc.;
甲基乙基胺、二乙基胺、甲基正丙基胺、乙基正丙基胺、二正丙基胺、二异丙基胺、二正丁基胺、二异丁基胺、二仲丁基胺、二叔丁基胺、二正戊基胺、二正己基胺等二烷基胺类;Methylethylamine, diethylamine, methyl-n-propylamine, ethyl-n-propylamine, di-n-propylamine, diisopropylamine, di-n-butylamine, diisobutylamine, di Dialkylamines such as sec-butylamine, di-tert-butylamine, di-n-pentylamine, and di-n-hexylamine;
甲基环己基胺、乙基环己基胺等一烷基一环烷基胺类;Alkyl-cycloalkylamines such as methylcyclohexylamine and ethylcyclohexylamine;
二环己基胺等二环烷基胺类;Dicyclohexylamine and other dicycloalkylamines;
二甲基乙基胺、甲基二乙基胺、三乙基胺、二甲基正丙基胺、二乙基正丙基胺、甲基二正丙基胺、乙基二正丙基胺、三正丙基胺、三异丙基胺、三正丁基胺、三异丁基胺、三仲丁基胺、三叔丁基胺、三正戊基胺、三正己基胺等三烷基胺类;Dimethylethylamine, methyldiethylamine, triethylamine, dimethyl-n-propylamine, diethyl-n-propylamine, methyldi-n-propylamine, ethyldi-n-propylamine , tri-n-propylamine, tri-isopropylamine, tri-n-butylamine, tri-isobutylamine, tri-sec-butylamine, tri-tert-butylamine, tri-n-pentylamine, tri-n-hexylamine, etc. Base amines;
二甲基环己基胺、二乙基环己基胺等二烷基一环烷基胺类;Dialkyl-cycloalkylamines such as dimethylcyclohexylamine and diethylcyclohexylamine;
甲基二环烷基胺、乙基二环烷基胺、三环己基胺等一烷基二环烷基胺类;Monoalkyldicycloalkylamines such as methyldicycloalkylamine, ethyldicycloalkylamine, tricyclohexylamine, etc.;
2-氨基乙醇、3-氨基-1-丙醇、1-氨基-2-丙醇、4-氨基-1-丁醇、5-氨基-1-戊醇、6-氨基-1-己醇等一烷醇胺类;2-aminoethanol, 3-amino-1-propanol, 1-amino-2-propanol, 4-amino-1-butanol, 5-amino-1-pentanol, 6-amino-1-hexanol, etc. Monoalkanolamines;
4-氨基-1-环己醇等一环烷醇胺类;Cycloalkanolamines such as 4-amino-1-cyclohexanol;
二乙醇胺、二正丙醇胺、二异丙醇胺、二正丁醇胺、二异丁醇胺、二正戊醇胺、二正己醇胺等二烷醇胺类;Diethanolamine, di-n-propanolamine, diisopropanolamine, di-n-butanolamine, diisobutanolamine, di-n-pentanolamine, di-n-hexanolamine and other dialkanolamines;
二(4-环己醇)胺等二环烷醇胺类;Bicycloalkanolamines such as bis(4-cyclohexanol)amine;
三乙醇胺、三正丙醇胺、三异丙醇胺、三正丁醇胺、三异丁醇胺、三正戊醇胺、三正己醇胺等三烷醇胺类;Trialkanolamines such as triethanolamine, tri-n-propanolamine, triisopropanolamine, tri-n-butanolamine, triisobutanolamine, tri-n-pentanolamine, and tri-n-hexanolamine;
三(4-环己醇)胺等三环烷醇胺类;Tricycloalkanolamines such as tris(4-cyclohexanol)amine;
3-氨基-1,2-丙二醇、2-氨基-1,3-丙二醇、4-氨基-1,2-丁二醇、4-氨基-1,3-丁二醇、3-二甲胺基-1,2-丙二醇、3-二乙胺基-1,2-丙二醇、2-二甲胺基-1,3-丙二醇、2-二乙胺基-1,3-丙二醇等氨基烷二醇类;3-amino-1,2-propanediol, 2-amino-1,3-propanediol, 4-amino-1,2-butanediol, 4-amino-1,3-butanediol, 3-dimethylamino -1,2-propanediol, 3-diethylamino-1,2-propanediol, 2-dimethylamino-1,3-propanediol, 2-diethylamino-1,3-propanediol and other aminoalkanediols kind;
4-氨基-1,2-环己烷二醇、4-氨基-1,3-环己烷二醇等氨基环烷二醇类;Aminocycloalkanediols such as 4-amino-1,2-cyclohexanediol and 4-amino-1,3-cyclohexanediol;
1-氨基环戊酮甲醇、4-氨基环戊酮甲醇等含有氨基的环烷酮甲醇类;1-aminocyclopentanonemethanol, 4-aminocyclopentanonemethanol and other cycloalkanonemethanols containing amino groups;
1-氨基环己酮甲醇、4-氨基环己酮甲醇、4-二甲胺基环戊烷甲醇、4-二乙胺基环戊烷甲醇、4-二甲胺基环己烷甲醇、4-二乙胺基环己烷甲醇等含有氨基的环烷甲醇类;1-Aminocyclohexanone Methanol, 4-Aminocyclohexanone Methanol, 4-Dimethylaminocyclopentane Methanol, 4-Diethylaminocyclopentane Methanol, 4-Dimethylaminocyclohexane Methanol, 4 - Naphthenic alcohols containing amino groups such as diethylaminocyclohexanemethanol;
β-丙氨酸、2-氨基丁酸、3-氨基丁酸、4-氨基丁酸、2-氨基异丁酸、3-氨基异丁酸、2-氨基戊酸、5-氨基戊酸、6-氨基己酸、1-氨基环丙烷羧酸、1-氨基环己烷羧酸、4-氨基环己烷羧酸等氨基羧酸类;β-alanine, 2-aminobutyric acid, 3-aminobutyric acid, 4-aminobutyric acid, 2-aminoisobutyric acid, 3-aminoisobutyric acid, 2-aminovaleric acid, 5-aminovaleric acid, 6-aminocaproic acid, 1-aminocyclopropanecarboxylic acid, 1-aminocyclohexanecarboxylic acid, 4-aminocyclohexanecarboxylic acid and other aminocarboxylic acids;
苯胺、邻甲基苯胺、间甲基苯胺、对甲基苯胺、对乙基苯胺、对正丙基苯胺、对异丙基苯胺、对正丁基苯胺、对叔丁基苯胺、N,N-二甲基苯胺、N,N-二乙基苯胺、对甲基-N,N-二甲基苯胺等芳香族胺类;Aniline, o-methylaniline, m-methylaniline, p-methylaniline, p-ethylaniline, p-n-propylaniline, p-isopropylaniline, p-n-butylaniline, p-tert-butylaniline, N, N- Aromatic amines such as dimethylaniline, N, N-diethylaniline, p-methyl-N, N-dimethylaniline;
邻氨基苄醇、间氨基苄醇、对氨基苄醇、对二甲胺基苄醇、对二乙胺基苄醇等氨基苄醇类;Aminobenzyl alcohols such as o-aminobenzyl alcohol, m-aminobenzyl alcohol, p-aminobenzyl alcohol, p-dimethylaminobenzyl alcohol, and p-diethylaminobenzyl alcohol;
邻氨基苯酚、间氨基苯酚、对氨基苯酚、对二甲胺基苯酚、对二乙胺基苯酚等氨基苯酚类;Aminophenols such as o-aminophenol, m-aminophenol, p-aminophenol, p-dimethylaminophenol, p-diethylaminophenol;
间氨基苯甲酸、对氨基苯甲酸、对二甲胺基苯甲酸、对二乙胺基苯甲酸等氨基苯甲酸类等。Aminobenzoic acids such as m-aminobenzoic acid, p-aminobenzoic acid, p-dimethylaminobenzoic acid, p-diethylaminobenzoic acid, etc.
作为硬化剂,可以列举例如可以通过加热而与粘结剂树脂中的羧基反应从而使粘结剂树脂交联的化合物。进而,也可以列举本身会单独聚合从而使着色图案硬化的化合物。作为所述化合物,可以列举例如环氧化合物、氧杂环丁烷化合物等。Examples of the curing agent include compounds capable of crosslinking the binder resin by reacting with carboxyl groups in the binder resin by heating. Furthermore, a compound which itself polymerizes and hardens a colored pattern can also be mentioned. As said compound, an epoxy compound, an oxetane compound, etc. are mentioned, for example.
作为环氧化合物,可以列举例如双酚A型环氧树脂、氢化双酚A型环氧树脂、双酚F型环氧树脂、氢化双酚F型环氧树脂、可溶可熔酚醛树脂型环氧树脂、其它芳香族系环氧树脂、脂环式环氧树脂、多环式环氧树脂、缩水甘油酯型树脂、缩水甘油胺型树脂、环氧化油等环氧树脂、或这些环氧树脂的溴化衍生物、环氧树脂及其溴化衍生物以外的脂肪族、脂环族或芳香族环氧化物、丁二烯(共)聚合物的环氧化物、异戊二烯(共)聚合物的环氧化物、(甲基)丙烯酸缩水甘油酯(共)聚合物、异氰脲酸三缩水甘油酯等。Examples of epoxy compounds include bisphenol A epoxy resins, hydrogenated bisphenol A epoxy resins, bisphenol F epoxy resins, hydrogenated bisphenol F epoxy resins, novolak resins, Epoxy resins, other aromatic epoxy resins, alicyclic epoxy resins, polycyclic epoxy resins, glycidyl ester type resins, glycidyl amine type resins, epoxy resins such as epoxidized oils, or these epoxy resins Brominated derivatives of resins, aliphatic, cycloaliphatic or aromatic epoxides other than epoxy resins and their brominated derivatives, epoxides of butadiene (co)polymers, isoprene (co) ) polymer epoxy, glycidyl (meth)acrylate (co)polymer, triglycidyl isocyanurate, etc.
作为氧杂环丁烷化合物,可以列举例如碳酸二氧杂环丁酯、亚二甲苯二氧杂环丁烷、己二酸二氧杂环丁酯、对苯二甲酸二氧杂环丁酯、环己烷二羧酸二氧杂环丁酯等。Examples of the oxetane compound include dioxetane carbonate, dioxetane xylylene, dioxetane adipate, dioxetane terephthalate, Dioxetanyl cyclohexanedicarboxylate, etc.
本发明的着色感光性树脂组合物在含有作为硬化剂的环氧化合物或氧杂环丁烷化合物等的情况下也可以含有能使环氧化合物的环氧基或氧杂环丁烷化合物的氧杂环丁烷骨架开环聚合的化合物。作为所述化合物,可以列举例如多元羧酸类、多元羧酸酐类、酸发生剂等。When the colored photosensitive resin composition of the present invention contains an epoxy compound or an oxetane compound as a curing agent, it may also contain an oxygen group capable of making the epoxy group of the epoxy compound or the A compound formed by ring-opening polymerization of a heterocyclobutane skeleton. As said compound, polyhydric carboxylic acid, polyhydric carboxylic anhydride, an acid generator etc. are mentioned, for example.
作为多元羧酸类,可以列举例如Examples of polycarboxylic acids include
邻苯二甲酸、3,4-二甲基邻苯二甲酸、间苯二甲酸、对苯二甲酸、均苯四甲酸、偏苯三甲酸、1,4,5,8-萘四羧酸、3,3′,4,4′-二苯酮四羧酸等芳香族多元羧酸类;Phthalic acid, 3,4-dimethylphthalic acid, isophthalic acid, terephthalic acid, pyromellitic acid, trimellitic acid, 1,4,5,8-naphthalene tetracarboxylic acid, 3,3',4,4'-benzophenone tetracarboxylic acid and other aromatic polycarboxylic acids;
琥珀酸、戊二酸、己二酸、1,2,3,4-丁烷四羧酸、马来酸、富马酸、衣康酸等脂肪族多元羧酸类;Succinic acid, glutaric acid, adipic acid, 1,2,3,4-butanetetracarboxylic acid, maleic acid, fumaric acid, itaconic acid and other aliphatic polycarboxylic acids;
六氢邻苯二甲酸、3,4-二甲基四氢邻苯二甲酸、六氢间苯二甲酸、六氢对苯二甲酸、1,2,4-环戊烷三羧酸、1,2,4-环己烷三羧酸、环戊烷四羧酸、 1,2,4,5-环己烷四羧酸等脂环族多元羧酸类。Hexahydrophthalic acid, 3,4-dimethyltetrahydrophthalic acid, hexahydroisophthalic acid, hexahydroterephthalic acid, 1,2,4-cyclopentanetricarboxylic acid, 1, Alicyclic polycarboxylic acids such as 2,4-cyclohexanetricarboxylic acid, cyclopentanetetracarboxylic acid, and 1,2,4,5-cyclohexanetetracarboxylic acid.
作为多元羧酸酐类,可以列举例如Examples of polyvalent carboxylic acid anhydrides include
邻苯二甲酸酐、均苯四甲酸酐、偏苯三甲酸酐、3,3′,4,4′-二苯酮四羧酸二酐等芳香族多元羧酸酐类;Aromatic polycarboxylic acid anhydrides such as phthalic anhydride, pyromellitic anhydride, trimellitic anhydride, 3,3',4,4'-benzophenone tetracarboxylic dianhydride;
衣康酸酐、琥珀酸酐、柠康酸酐、十二碳烯基琥珀酸酐、丙三羧酸酐、马来酸酐、1,2,3,4-丁烷四羧酸二酐等脂肪族多元羧酸酐类;Itaconic anhydride, succinic anhydride, citraconic anhydride, dodecenyl succinic anhydride, tricarboxylic anhydride, maleic anhydride, 1,2,3,4-butanetetracarboxylic dianhydride and other aliphatic polycarboxylic acid anhydrides ;
六氢邻苯二甲酸酐、3,4-二甲基四氢邻苯二甲酸酐、1,2,4-环戊烷三羧酸酐、1,2,4-环己烷三羧酸酐、环戊烷四羧酸二酐、1,2,4,5-环己烷四羧酸二酐、海密克(ハイミック)酸酐、4-降冰片烯-1,2-二羧酸酐等脂环族多元羧酸酐类;Hexahydrophthalic anhydride, 3,4-dimethyltetrahydrophthalic anhydride, 1,2,4-cyclopentanetricarboxylic anhydride, 1,2,4-cyclohexanetricarboxylic anhydride, cyclic Alicyclic anhydrides such as pentanetetracarboxylic dianhydride, 1,2,4,5-cyclohexanetetracarboxylic dianhydride, Haimic anhydride, 4-norbornene-1,2-dicarboxylic anhydride, etc. Polycarboxylic acid anhydrides;
乙二醇二偏苯三甲酸酯酐、甘油三偏苯三甲酸酯酐等含有酯基的羧酸酐类等。Ester group-containing carboxylic acid anhydrides such as ethylene glycol trimellitic anhydride, glycerin trimellitic anhydride, and the like.
作为多元羧酸酐类,也可以使用作为环氧树脂硬化剂市售的那些。作为所述环氧树脂硬化剂,可以列举例如商品名“アデカハ-ドナ-EH-700”(旭电化工业公司制)、商品名“リカシッドHH”(新日本理化公司制)、商品名“MH-700”(新日本理化公司制)等。As the polyvalent carboxylic acid anhydrides, those commercially available as epoxy resin hardeners can also be used. Examples of the epoxy resin hardener include “Adekaha-Dona-EH-700” (manufactured by Asahi Denka Kogyo Co., Ltd.), “Rikasid HH” (manufactured by Shinnippon Chemical Co., Ltd.), and “MH- 700" (manufactured by Nippon Chemical Co., Ltd.), etc.
作为酸发生剂,可以列举与上述相同的那些。As the acid generator, there may be mentioned the same ones as above.
所述硬化剂既可以各自单独使用也可以2种以上组合使用。These curing agents may be used alone or in combination of two or more.
作为用本发明的着色感光性树脂组合物形成彩色滤光器的方法,可以列举将本发明的着色感光性树脂组合物涂布在基板或在基板上先形成的固体的其它着色感光性树脂组合物层(以下称其为基板等)上、将涂布的树脂层预烘干除去溶剂等挥发成分、经由光掩膜使除去了挥发成分的树脂层曝光、然后用碱水溶液等显像液显像、进行后烘干以形成硬化树脂层,以所述步骤为1个步骤,用含有其它颜色的着色感光性树脂组合物重复该步骤,最终形成有红绿蓝(RGB)3色的彩色滤光器的方法等。As a method of forming a color filter using the colored photosensitive resin composition of the present invention, other colored photosensitive resin combinations in which the colored photosensitive resin composition of the present invention is applied to a substrate or a solid formed on the substrate are mentioned. On the object layer (hereinafter referred to as the substrate, etc.), pre-dry the coated resin layer to remove volatile components such as solvents, expose the resin layer from which volatile components have been removed through a photomask, and then develop with a developing solution such as an aqueous alkali solution. Like, post-drying to form a hardened resin layer, taking the above step as a step, repeating this step with a colored photosensitive resin composition containing other colors, and finally forming a color filter with three colors of red, green and blue (RGB). Optical methods, etc.
作为基板,可以列举例如玻璃基板、硅基板、聚碳酸酯基板、聚酯基板、芳香族聚酰胺基板、聚酰胺酰亚胺基板、聚酰亚胺基板、Al基板、GaAs基板等表面平坦的基板。在这些基板上也可以实施采用甲硅烷偶合剂等药品的药品处理、等离子体处理、离子镀处理、喷镀处理、气相反应处理、真空蒸气沉积处理等前处理。进而,也可以在所述基板的表面上形成TFT(薄膜晶体管)、CCD(电荷结合元件)等。Examples of the substrate include flat-surfaced substrates such as glass substrates, silicon substrates, polycarbonate substrates, polyester substrates, aramid substrates, polyamideimide substrates, polyimide substrates, Al substrates, and GaAs substrates. . Pretreatments such as chemical treatment using chemicals such as silane coupling agents, plasma treatment, ion plating treatment, sputtering treatment, gas phase reaction treatment, and vacuum vapor deposition treatment can also be performed on these substrates. Furthermore, a TFT (Thin Film Transistor), a CCD (Charge Coupled Device), or the like may be formed on the surface of the substrate.
为了在所述基板上涂布着色感光性树脂组合物,例如,只要将本发明的着色感光性树脂组合物用旋涂法(spincoat法)、浇铸法、辊涂法、缝隙与旋涂法、缝隙涂布法等通常涂布方法在基板等上涂布、然后通过加热使溶剂等挥发成分挥发(预烘干)即可。这样就可以在基板等上形成由着色感光性树脂组合物的固形分组成的树脂层。In order to coat the colored photosensitive resin composition on the substrate, for example, the colored photosensitive resin composition of the present invention may be applied by spin coating, casting, roll coating, slot and spin coating, What is necessary is just to coat on a board|substrate etc. by a common coating method, such as a slot coating method, and to volatilize a volatile component, such as a solvent, by heating (pre-baking). In this manner, a resin layer composed of the solid content of the colored photosensitive resin composition can be formed on a substrate or the like.
然后,使由着色感光性树脂组合物的固形分组成的树脂层曝光。曝光只要采用经由光掩膜照射光线的方法等进行即可。作为所使用的光线,可以列举通常称为g线(波长436nm)、i线(波长365nm)的紫外线等。虽然光线经由光掩膜照射,但这里的光掩膜是诸如在玻璃板表面上设置了遮蔽光线的遮光层的那种。玻璃板上没有设置遮光层的部分是能透射光线的透光部,以按照这种透光部图案的图案使着色感光性树脂组合物层曝光,便产生了没有照射光线的未照射区域和照射了光线的照射区域。照射区域的光线照射量可以根据粘结剂树脂的重均分子量、单体比、含有量、光聚合性化合物的种类或含有量、光聚合引发剂的种类或含有量、光聚合引发助剂的种类或含有量等适当选择。Then, the resin layer composed of the solid content of the colored photosensitive resin composition is exposed to light. Exposure may be performed by a method of irradiating light through a photomask, or the like. Examples of the light to be used include ultraviolet rays generally called g-line (wavelength: 436 nm) and i-line (wavelength: 365 nm). Although light is irradiated through a photomask, the photomask here is, for example, a light-shielding layer provided on the surface of a glass plate to shield light. The part of the glass plate that is not provided with a light-shielding layer is a light-transmitting part that can transmit light, so that the colored photosensitive resin composition layer is exposed according to the pattern of this light-transmitting part pattern, and the unirradiated area and the irradiated area that does not irradiate light are produced. irradiated area of the light. The amount of light irradiation in the irradiated area can be determined according to the weight average molecular weight of the binder resin, the monomer ratio, the content, the type or content of the photopolymerizable compound, the type or content of the photopolymerization initiator, and the content of the photopolymerization initiation adjuvant. Appropriate selection such as type and content.
曝光后显像。为了显像,只要诸如使曝光后的树脂层与显像液接触即可,具体地说,只要将在其表面上形成了树脂层的状态的基板浸渍于显像液中即可。Developed after exposure. For image development, for example, it is only necessary to bring the exposed resin layer into contact with a developing solution. Specifically, it is only necessary to immerse the substrate with the resin layer formed on the surface in the developing solution.
作为显像液,可以列举例如碳酸钠、碳酸钾、氢氧化钠、氢氧化钾、氢氧化四甲铵等碱性化合物的水溶液等。通过显像,使树脂层中没有照射到光线的未照射区域除去。另一方面,光线照射区域以其原样残留下来,形成了图案。Examples of the developer include aqueous solutions of basic compounds such as sodium carbonate, potassium carbonate, sodium hydroxide, potassium hydroxide, and tetramethylammonium hydroxide. By developing, the non-irradiated area which was not irradiated with light in the resin layer was removed. On the other hand, the light-irradiated area remained as it was, forming a pattern.
显像后通常进行水洗、干燥,就可以得到目标图案。进而,显像、干燥之后,还可以置于烘干炉等装置内进行后烘干来形成硬化树脂层。通过后烘干,提高了图案的机械强度。在使用进一步含有硬化剂者作为着色感光性树脂组合物的情况下,着色图案进一步硬化,其机械强度可以进一步提高。后烘干的温度通常在180℃以上~250℃以下、较好在200℃以上~230℃以下。若后烘干温度在所述范围内,则硬化充分进行,因而较好。此外,后烘干的时间通常是5~40分钟、较好10~36分钟、更好在15~30分钟。若后烘干时间在所述范围内,则硬化充分进行,因而较好。After developing, it is usually washed with water and dried to obtain the target pattern. Furthermore, after image development and drying, post-drying may be performed in a drying furnace or the like to form a cured resin layer. By post-drying, the mechanical strength of the pattern is improved. When using what further contains a hardening|curing agent as a colored photosensitive resin composition, a colored pattern can harden|cure further, and can improve the mechanical strength further. The post-drying temperature is usually above 180°C to below 250°C, preferably above 200°C to below 230°C. If the post-baking temperature is within the above-mentioned range, curing will proceed sufficiently, which is preferable. In addition, the post-drying time is usually 5 to 40 minutes, preferably 10 to 36 minutes, more preferably 15 to 30 minutes. If the post-baking time is within the above-mentioned range, curing will proceed sufficiently, which is preferable.
这样,形成了目标着色图案,但更换着色感光性树脂组合物中含有的着色剂的颜色,同上述一样进行,再次在基板上形成树脂层、使所述树脂层曝光后、显像、然后进行后烘干,可以进一步形成着色图案。更换着色感光性树脂组合物中含有的着色剂的颜色并重复进行上述操作,就可以进一步形成着色图案,从而可以制造目标彩色滤光器。In this way, the target colored pattern is formed, but the color of the coloring agent contained in the colored photosensitive resin composition is replaced, and the same as above is performed, and the resin layer is formed on the substrate again, after exposing the resin layer, developing, and then performing After drying, the coloring pattern can be further formed. By changing the color of the colorant contained in the colored photosensitive resin composition and repeating the above operation, a colored pattern can be further formed, and a desired color filter can be manufactured.
然后,在所得到的彩色滤光器上,进行ITO膜蒸汽沉积处理。这样得到的彩色滤光器含有上述着色图案,通过使用各该彩色滤光器,就使制造适用液晶显示装置成为可能。Then, on the obtained color filter, an ITO film vapor deposition process was performed. The color filters obtained in this way contain the above-mentioned colored patterns, and by using each of the color filters, it becomes possible to manufacture a suitable liquid crystal display device.
本发明的着色感光性树脂组合物由于残渣水平良好而显像性优异、可以形成高表面硬度的硬化树脂层、而且该硬化树脂层也是耐溶剂性优异的,可以形成断面形状为顺锥状乃至矩形状、表面无粗糙的硬化树脂层,可以较好地用于形成彩色液晶显示装置或摄像元件等中使用的着色图案和使用该图案的彩色滤光器。The colored photosensitive resin composition of the present invention has excellent developability due to its good residue level, can form a cured resin layer with high surface hardness, and the cured resin layer is also excellent in solvent resistance, and can be formed into a tapered cross-sectional shape. A cured resin layer having a rectangular shape and no roughness on the surface can be preferably used to form a coloring pattern used in a color liquid crystal display device or an imaging element, and a color filter using the pattern.
实施例Example
以下基于实施例更详细地说明本发明,但本发明当然不限定于这些实施例。Hereinafter, the present invention will be described in more detail based on examples, but the present invention is of course not limited to these examples.
实施例1Example 1
〔着色感光性树脂组合物1的制备〕[Preparation of Colored Photosensitive Resin Composition 1]
将(A)C.I.颜料蓝15:6(1.967质量份)(A) C.I. Pigment Blue 15:6 (1.967 parts by mass)
(A)C.I.颜料紫23(0.030质量份)(A) C.I. Pigment Violet 23 (0.030 parts by mass)
(E)聚酯系分散剂(0.599质量份)(E) Polyester-based dispersant (0.599 parts by mass)
(B)甲基丙烯酸与甲基丙烯酸苄酯的共聚物〔甲基丙烯酸单元与甲基丙烯酸苄酯单元的组成比按物质量比(摩尔比)计是3∶7,重均分子量(Mw)是25,000〕(1.764质量份)(B) Copolymer of methacrylic acid and benzyl methacrylate [the compositional ratio of methacrylic acid unit and benzyl methacrylate unit is 3:7 by mass ratio (molar ratio), weight average molecular weight (Mw) 25,000〕(1.764 parts by mass)
(C)六丙烯酸二聚季戊四醇酯(“KAYARAD DPHA”,日本化药公司制)(1.176质量份),(C) Dipentaerythritol hexaacrylate ("KAYARAD DPHA", manufactured by Nippon Kayaku Co., Ltd.) (1.176 parts by mass),
(D)2-苄基-2-二甲胺基-1-(4-吗啉代苯基)丁-1-酮(0.353质量份),(D) 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl)butan-1-one (0.353 parts by mass),
(D2)4,4′-二(二乙胺基)二苯酮(“EAB-F”(保土谷化学工业公司制))(0.118质量份)、(D2) 4,4'-bis(diethylamino)benzophenone ("EAB-F" (manufactured by Hodogaya Chemical Industry Co., Ltd.)) (0.118 parts by mass),
环氧化合物〔邻甲苯酚可溶可熔酚醛树脂型环氧树脂,“スミエポキシESCN-195XL-80”(住友化学工业公司制)〕(0.294质量份)和Epoxy compound [o-cresol novolac type epoxy resin, "Sumiepokishi ESCN-195XL-80" (manufactured by Sumitomo Chemical Industries, Ltd.)] (0.294 parts by mass) and
(F)乙酸丙二醇-甲醚酯(23.700质量份)混合,得到着色感光性树脂组合物1。(F) Propylene glycol acetate-methyl ether ester (23.700 parts by mass) was mixed to obtain colored photosensitive resin composition 1 .
〔着色层的形成〕〔Formation of colored layer〕
在玻璃基板(コ-ニンゲ公司制,“#1737”)的表面上用旋涂法涂布上述得到的着色感光性树脂组合物1,然后在100℃使挥发成分挥发3分钟,形成着色感光性树脂组合物层1A。冷却后,这种着色感光性树脂组合物层不经由光掩膜就全面地照射i线〔波长365nm〕。i线的光源采用超高压汞灯,照射光量为150mJ/cm2。然后,在25℃的显像液(按质量分率计,分别含有氢氧化钾0.05%、丁基萘磺酸钠0.2%的水溶液)中浸渍120秒钟进行显像,用纯水洗涤后,得到在整个玻璃基板表面上形成的蓝色着色层。该涂膜基板在220℃烘干20分钟,形成着色感光性树脂组合物层1B。此外,在层1A冷却后,这种着色感光性树脂组合物层经由光掩膜照射i线〔波长365nm〕进行曝光。i线的光源采用超高压汞灯,以平行光方式照射。照射光量为150mJ/cm2。作为光掩膜,采用的是用来形成线幅3μm、4μm、5μm、6μm、7μm、8μm、9μm、10μm、20μm、30μm、40μm、50μm和100μm的线状色像素的光掩膜。然后,将曝光后的玻璃基板〔表面上形成了着色感光性树脂组合物层〕在25℃的显像液(按质量分率计,分别含有氢氧化钾0.05%、丁基萘磺酸钠0.2%的水溶液)中浸渍120秒钟进行显像,用纯水洗涤后,在220℃加热20分钟,形成蓝色像素1C。The colored photosensitive resin composition 1 obtained above was coated on the surface of a glass substrate (manufactured by Corning Co., Ltd., "#1737") by the spin coating method, and then the volatile components were volatilized at 100° C. for 3 minutes to form a colored photosensitive resin composition. Resin composition layer 1A. After cooling, the entire surface of this colored photosensitive resin composition layer was irradiated with i-rays [wavelength 365 nm] without passing through a photomask. The light source of the i-line is an ultra-high pressure mercury lamp, and the irradiated light amount is 150mJ/cm 2 . Then, develop by immersing in a developing solution at 25° C. (an aqueous solution containing 0.05% potassium hydroxide and 0.2% sodium butylnaphthalene sulfonate by mass fraction, respectively) for 120 seconds, and wash with pure water. A blue colored layer formed on the entire surface of the glass substrate was obtained. The coated substrate was dried at 220° C. for 20 minutes to form a colored photosensitive resin composition layer 1B. Moreover, after layer 1A was cooled, this colored photosensitive resin composition layer was irradiated with i-ray [wavelength 365 nm] through a photomask for exposure. The light source of the i-line adopts ultra-high pressure mercury lamp, which is irradiated in the way of parallel light. The amount of irradiated light was 150 mJ/cm 2 . As the photomask, photomasks for forming linear color pixels with a line width of 3 μm, 4 μm, 5 μm, 6 μm, 7 μm, 8 μm, 9 μm, 10 μm, 20 μm, 30 μm, 40 μm, 50 μm, and 100 μm were used. Then, put the exposed glass substrate [the colored photosensitive resin composition layer is formed on the surface] at 25°C in a developing solution (by mass fraction, containing 0.05% of potassium hydroxide and 0.2% of sodium butylnaphthalenesulfonate respectively). % aqueous solution) for 120 seconds for image development, washed with pure water, and heated at 220° C. for 20 minutes to form a blue pixel 1C.
〔评价〕〔evaluate〕
1A层在搅拌下的25℃显像液(按质量分率计,分别含有氢氧化钾0.05%、丁基萘磺酸钠0.2%的水溶液)中浸渍120秒钟进行显像,用纯水洗涤后,显像液中未观察到块状物,涂膜层溶解。溶解了所述涂膜层的显像液的粒度分布用マイクロトラック粒径测定装置〔UPA150、9230UPA(LEED & NORTHRUP公司制)〕按光散射法测定时,最大粒径在1.0μm以下。进而,涂膜层溶解后的玻璃部透射率(400nm~780nm的平均值)在98%以上。Layer 1A was developed by immersing in a stirred 25°C developing solution (aqueous solution containing 0.05% potassium hydroxide and 0.2% sodium butylnaphthalene sulfonate respectively by mass fraction) for 120 seconds and washed with pure water. After that, no lumps were observed in the developing solution, and the coating layer was dissolved. When the particle size distribution of the developer in which the coating layer is dissolved is measured by the light scattering method using a Microtrac particle size measuring device [UPA150, 9230UPA (manufactured by LEED & NORTHRUP)], the maximum particle size is 1.0 μm or less. Furthermore, the transmittance (average value of 400nm to 780nm) of the glass portion after the coating film layer is dissolved is 98% or more.
然后,按照JIS K 5400记载的试验方法,在铅笔硬度试验机上,用铅笔“三菱ハイユニ”加荷重9.8N时不使涂膜损伤的最高硬度作为测定值求出。先形成的涂膜的1B层的铅笔强度按所述方法测定的结果,其铅笔强度是4H。Then, according to the test method described in JIS K 5400, on a pencil hardness testing machine, the maximum hardness that does not damage the coating film when the pencil "Mitsubishi Hiuni" is loaded with a load of 9.8N is obtained as a measured value. As a result of measuring the pencil strength of the 1B layer of the coating film formed earlier by the above method, the pencil strength was 4H.
进而,在所形成的蓝色像素1C中,其断面形状为顺锥状,表面无粗糙,着色感光性树脂组合物1的性能良好。Furthermore, in the formed blue pixel 1C, the cross-sectional shape was a conical shape, the surface was not rough, and the performance of the colored photosensitive resin composition 1 was favorable.
实施例2Example 2
〔着色感光性树脂组合物2的制备〕[Preparation of Colored Photosensitive Resin Composition 2]
除用聚乙烯亚胺系分散剂代替实施例1使用的聚酯系分散剂外,同实施例1一样混合,得到着色感光性树脂组合物2。Except having used the polyethyleneimine type dispersant instead of the polyester type dispersant used in Example 1, it mixed similarly to Example 1, and obtained the colored photosensitive resin composition 2.
〔评价〕〔evaluate〕
除用上述得到的着色感光性树脂组合物2代替实施例1得到的着色感光性树脂组合物1外,同实施例1一样操作,使2A层在搅拌下的25℃显像液中浸渍120秒钟进行显像、用纯水洗涤后,显像液中未观察到块状物,涂膜层溶解。测定显像液中溶解的涂膜层成分的粒度分布时,其最大粒径在1.0μm以下。此外,涂膜层溶解后的玻璃部透射率(400nm~780nm的平均值)在98%以上。Except that the colored photosensitive resin composition 2 obtained above is used instead of the colored photosensitive resin composition 1 obtained in Example 1, the operation is the same as in Example 1, and the 2A layer is immersed in the developing solution at 25°C under stirring for 120 seconds. After developing and washing with pure water, no lumps were observed in the developing solution, and the coating layer was dissolved. When measuring the particle size distribution of the coating layer components dissolved in the developer, the maximum particle size is 1.0 μm or less. In addition, the transmittance (average value of 400nm to 780nm) of the glass part after the coating film layer was dissolved was 98% or more.
然后,同实施例1一样,测定2B层的铅笔强度的结果,铅笔强度是4H。在所形成的蓝色像素2C中,其断面形状是顺锥状的,表面上无粗糙,着色感光性树脂组合物2的性能是良好的。Then, as a result of measuring the pencil strength of the 2B layer in the same manner as in Example 1, the pencil strength was 4H. In the formed blue pixel 2C, the cross-sectional shape is forward-tapered, there is no roughness on the surface, and the performance of the colored photosensitive resin composition 2 is good.
实施例3Example 3
〔着色感光性树脂组合物3的制备〕[Preparation of Colored Photosensitive Resin Composition 3]
除用聚氨酯系分散剂代替实施例1使用的聚酯系分散剂外,同实施例1一样混合,得到着色感光性树脂组合物3。Except that the polyester-based dispersant used in Example 1 was replaced with a polyurethane-based dispersant, it was mixed in the same manner as in Example 1 to obtain a colored photosensitive resin composition 3 .
〔评价〕〔evaluate〕
除用上述得到的着色感光性树脂组合物3代替实施例1得到的着色感光性树脂组合物1外,同实施例1一样操作,使3A层在搅拌下的25℃显像液中浸渍120秒钟进行显像、用纯水洗涤后,显像液中未观察到块状物,涂膜层溶解。测定显像液中溶解的涂膜层成分的粒度分布时,其最大粒径在1.0μm以下。此外,涂膜层溶解后的玻璃部透射率(400nm~780nm的平均值)在98%以上。Except that the colored photosensitive resin composition 3 obtained above was used instead of the colored photosensitive resin composition 1 obtained in Example 1, the operation was the same as in Example 1, and the 3A layer was immersed in the developing solution at 25°C under stirring for 120 seconds. After developing and washing with pure water, no lumps were observed in the developing solution, and the coating layer was dissolved. When measuring the particle size distribution of the coating layer components dissolved in the developer, the maximum particle size is 1.0 μm or less. In addition, the transmittance (average value of 400nm to 780nm) of the glass part after the coating film layer was dissolved was 98% or more.
然后,同实施例1一样,测定3B层的铅笔强度的结果,铅笔强度是4H。此外,在所形成的蓝色像素3C中,其断面形状是顺锥状的,而且表面上无粗糙,着色感光性树脂组合物3的性能是良好的。Then, as a result of measuring the pencil strength of the 3B layer in the same manner as in Example 1, the pencil strength was 4H. In addition, in the formed blue pixel 3C, its cross-sectional shape is forward-tapered, and there is no roughness on the surface, and the performance of the colored photosensitive resin composition 3 is good.
比较例1Comparative example 1
〔着色感光性树脂组合物4的制备〕[Preparation of Colored Photosensitive Resin Composition 4]
除用甲基丙烯酸与甲基丙烯酸苄酯的共聚物〔甲基丙烯酸单元与甲基丙烯酸苄酯单元的组成比按物质量比(摩尔比)计为3∶7,重均分子量(Mw)为36,000〕(1.764质量份)代替实施例1使用的粘结剂树脂(B)外,同实施例1一样混合,得到着色感光性树脂组合物4。[The composition ratio of methacrylic acid unit and benzyl methacrylate unit is calculated as 3: 7 by mass ratio (molar ratio) of the copolymer of methacrylic acid and benzyl methacrylate, and the weight average molecular weight (Mw) is 36,000] (1.764 parts by mass) in place of the binder resin (B) used in Example 1, and mixed in the same manner as in Example 1 to obtain colored photosensitive resin composition 4 .
〔评价〕〔evaluate〕
除用上述得到的着色感光性树脂组合物4代替实施例1得到的着色感光性树脂组合物1外,同实施例1一样操作,使4A层在搅拌下的25℃显像液中浸渍120秒钟进行显像、用纯水洗涤后,显像液中未观察到块状物,涂膜层溶解。测定显像液中溶解的涂膜层成分的粒度分布时,其最大粒径在1.0μm以下。此外,涂膜层溶解后的玻璃部透射率(400nm~780nm的平均值)在95%~98%。Except that the colored photosensitive resin composition 4 obtained above was used instead of the colored photosensitive resin composition 1 obtained in Example 1, the operation was the same as in Example 1, and the 4A layer was immersed in the developing solution at 25°C under stirring for 120 seconds. After developing and washing with pure water, no lumps were observed in the developing solution, and the coating layer was dissolved. When measuring the particle size distribution of the coating layer components dissolved in the developer, the maximum particle size is 1.0 μm or less. In addition, the transmittance (average value of 400nm to 780nm) of the glass portion after the coating film layer is dissolved is 95% to 98%.
然后,同实施例1一样,测定4B层的铅笔强度的结果,铅笔强度是5H。此外,在所得到的蓝色像素4C中,其断面形状是顺锥状但可以观察到摆边,着色感光性树脂组合物4的性能是不良的。Then, as a result of measuring the pencil strength of the 4B layer in the same manner as in Example 1, the pencil strength was 5H. In addition, in the obtained blue pixel 4C, although the cross-sectional shape was a forward taper shape, fringing was observed, and the performance of the colored photosensitive resin composition 4 was poor.
比较例2Comparative example 2
〔着色感光性树脂组合物5的制备〕[Preparation of Colored Photosensitive Resin Composition 5]
除用甲基丙烯酸与甲基丙烯酸苄酯的共聚物〔甲基丙烯酸单元与甲基丙烯酸苄酯单元的组成比按物质量比(摩尔比)为3∶7,重均分子量(Mw)是4,800〕代替实施例1使用的粘结剂树脂(B)外,同实施例1一样混合,得到着色感光性树脂组合物5。In addition to the copolymer of methacrylic acid and benzyl methacrylate [the composition ratio of methacrylic acid unit and benzyl methacrylate unit is 3: 7 by mass ratio (molar ratio), and the weight average molecular weight (Mw) is 4,800 ] Except that the binder resin (B) used in Example 1 was replaced, it mixed like Example 1, and the colored photosensitive resin composition 5 was obtained.
〔评价〕〔evaluate〕
除用上述得到的着色感光性树脂组合物5代替实施例1得到的着色感光性树脂组合物1外,同实施例1一样操作,使5A层在搅拌下的25℃显像液中浸渍120秒钟进行显像、用纯水洗涤后,显像液中未观察到块状物,涂膜层溶解。测定显像液中溶解的涂膜层成分的粒度分布时,其最大粒径在1.0μm以下。此外,涂膜层溶解后的玻璃部透射率(400nm~780nm的平均值)在98%以上。Except that the colored photosensitive resin composition 5 obtained above was used instead of the colored photosensitive resin composition 1 obtained in Example 1, the operation was the same as in Example 1, and the 5A layer was immersed in the developing solution at 25°C under stirring for 120 seconds. After developing and washing with pure water, no lumps were observed in the developing solution, and the coating layer was dissolved. When measuring the particle size distribution of the coating layer components dissolved in the developer, the maximum particle size is 1.0 μm or less. In addition, the transmittance (average value of 400nm to 780nm) of the glass part after the coating film layer was dissolved was 98% or more.
然后,同实施例1一样,测定5B层的铅笔强度的结果,铅笔强度是1H。此外,所形成的蓝色像素5C的断面形状是顺锥状的,但可以看到表面粗糙。而且残膜率也低,着色感光性树脂组合物5的性能不良。Then, as a result of measuring the pencil strength of the 5B layer in the same manner as in Example 1, the pencil strength was 1H. In addition, the cross-sectional shape of the formed blue pixel 5C is conical, but the surface roughness can be seen. Furthermore, the residual film rate was also low, and the performance of the colored photosensitive resin composition 5 was poor.
实施例4Example 4
〔着色感光性树脂组合物6的制备〕[Preparation of Colored Photosensitive Resin Composition 6]
除用丙烯酸系分散剂代替实施例1使用的聚酯系分散剂、把粘结剂树脂(B)换成甲基丙烯酸与甲基丙烯酸苄酯的共聚物〔甲基丙烯酸单元与甲基丙烯酸苄酯单元的组成比按物质量比(摩尔比)为35∶65,重均分子量(Mw)为10,000〕、而且不添加环氧化合物外,同实施例1一样混合,得到着色感光性树脂组合物6。In addition to replacing the polyester-based dispersant used in Example 1 with an acrylic dispersant, the binder resin (B) is replaced by a copolymer of methacrylic acid and benzyl methacrylate [methacrylic acid unit and benzyl methacrylate The composition ratio of the ester unit is 35:65 according to the mass ratio (molar ratio), and the weight-average molecular weight (Mw) is 10,000], and no epoxy compound is added, mixed as in Example 1 to obtain a colored photosensitive resin composition 6.
〔评价〕〔evaluate〕
除用上述得到的着色感光性树脂组合物6代替实施例1得到的着色感光性树脂组合物1外,同实施例1一样操作,使6A层在搅拌下的25℃显像液中浸渍120秒钟进行显像、用纯水洗涤后,显像液中未观察到块状物,涂膜层溶解。测定显像液中溶解的涂膜层成分的粒度分布时,其最大粒径在1.0μm以下。此外,涂膜层溶解后的玻璃部透射率(400nm~780nm的平均值)在98%以上。Except that the colored photosensitive resin composition 6 obtained above was used instead of the colored photosensitive resin composition 1 obtained in Example 1, the operation was the same as in Example 1, and the 6A layer was immersed in the developing solution at 25°C under stirring for 120 seconds. After developing and washing with pure water, no lumps were observed in the developing solution, and the coating layer was dissolved. When measuring the particle size distribution of the coating layer components dissolved in the developer, the maximum particle size is 1.0 μm or less. In addition, the transmittance (average value of 400nm to 780nm) of the glass part after the coating film layer was dissolved was 98% or more.
然后,同实施例1一样,测定6B层的铅笔强度的结果,铅笔强度是9H。此外,在所形成的蓝色像素6C中,其断面形状是顺锥状的,表面无粗糙,着色感光性树脂组合物6的性能是良好的。Then, as a result of measuring the pencil strength of the 6B layer in the same manner as in Example 1, the pencil strength was 9H. In addition, in the formed blue pixel 6C, the cross-sectional shape is forward-tapered, the surface is not rough, and the performance of the colored photosensitive resin composition 6 is good.
实施例5Example 5
〔着色感光性树脂组合物7的制备〕[Preparation of Colored Photosensitive Resin Composition 7]
除用甲基丙烯酸、甲基丙烯酸苄酯和式(I)〔式(I)中,R1表示甲基,R2表示氢原子〕所示成分的共聚物〔甲基丙烯酸单元与甲基丙烯酸苄酯单元与所述式(I)所示成分的组成比按物质量比(摩尔比)计是25∶60∶15,聚苯乙烯换算重均分子量(Mw)为9,000〕代替实施例4使用的粘结剂树脂(B)、而且不添加环氧化合物外,同实施例1一样混合,得到着色感光性树脂组合物7。In addition to using methacrylic acid, benzyl methacrylate and formula (I) [in formula (I), R 1 represents a methyl group, R 2 represents a hydrogen atom] The copolymer [methacrylic acid unit and methacrylic acid unit] The composition ratio of the benzyl ester unit to the component represented by the formula (I) is 25:60:15 in terms of mass ratio (molar ratio), and the weight average molecular weight (Mw) in terms of polystyrene is 9,000] instead of Example 4. The binder resin (B) was mixed in the same manner as in Example 1 except that no epoxy compound was added to obtain a colored photosensitive resin composition 7.
〔评价〕〔evaluate〕
除用上述得到的着色感光性树脂组合物7代替实施例1得到的着色感光性树脂组合物1外,同实施例1一样操作,使7A层在搅拌下的25℃显像液中浸渍120秒钟进行显像、用纯水洗涤后,显像液中未观察到块状物,涂膜层溶解。测定显像液中溶解的涂膜层成分的粒度分布时,其最大粒径在1.0μm以下。此外,涂膜层溶解后的玻璃部透射率(400nm~780nm的平均值)在98%以上。Except that the colored photosensitive resin composition 7 obtained above was used instead of the colored photosensitive resin composition 1 obtained in Example 1, the operation was the same as in Example 1, and the 7A layer was immersed in the developing solution at 25°C under stirring for 120 seconds. After developing and washing with pure water, no lumps were observed in the developing solution, and the coating layer was dissolved. When measuring the particle size distribution of the coating layer components dissolved in the developer, the maximum particle size is 1.0 μm or less. In addition, the transmittance (average value of 400nm to 780nm) of the glass part after the coating film layer was dissolved was 98% or more.
然后,同实施例1一样测定7B层的铅笔强度时,铅笔强度是9H。进而,所形成的蓝色像素7C中,其断面形状是顺锥状的,表面上无粗糙,着色感光性树脂组合物7的性能是良好的。Then, when the pencil strength of the 7B layer was measured in the same manner as in Example 1, the pencil strength was 9H. Furthermore, in the formed blue pixel 7C, the cross-sectional shape is forward-tapered, the surface is not rough, and the performance of the colored photosensitive resin composition 7 is good.
实施例6Example 6
〔着色感光性树脂组合物8的制备〕[Preparation of Colored Photosensitive Resin Composition 8]
除实施例4的粘结剂树脂(B)换成实施例5使用的粘结剂树脂(B)、而且不添加环氧化合物外,同实施例1一样混合,得到着色感光性树脂组合物8。Except that the binder resin (B) of embodiment 4 is changed into the binder resin (B) used in embodiment 5, and no epoxy compound is added, the same mixing as in example 1 is obtained to obtain colored photosensitive resin composition 8 .
〔评价〕〔evaluate〕
除用上述得到的着色感光性树脂组合物8代替实施例1得到的着色感光性树脂组合物1外,同实施例1一样操作,使8A层在搅拌下的25℃显像液中浸渍120秒钟进行显像、用纯水洗涤后,显像液中未观察到块状物,涂膜层溶解。测定显像液中溶解的涂膜层成分的粒度分布时,其最大粒径在1.0μm以下。此外,涂膜层溶解后的玻璃部透射率(400nm~780nm的平均值)在98%以上。Except that the colored photosensitive resin composition 8 obtained above was used instead of the colored photosensitive resin composition 1 obtained in Example 1, the operation was the same as in Example 1, and the 8A layer was immersed in the developing solution at 25°C under stirring for 120 seconds. After developing and washing with pure water, no lumps were observed in the developing solution, and the coating layer was dissolved. When measuring the particle size distribution of the coating layer components dissolved in the developer, the maximum particle size is 1.0 μm or less. In addition, the transmittance (average value of 400nm to 780nm) of the glass part after the coating film layer was dissolved was 98% or more.
然后,同实施例1一样,测定8B层的铅笔强度时铅笔强度是9H。此外,在所形成的蓝色像素8C中,其断面形状是顺锥状的,表面上无粗糙,着色感光性树脂组合物8的性能是良好的。Then, as in Example 1, when the pencil strength of the 8B layer was measured, the pencil strength was 9H. In addition, in the formed blue pixel 8C, its cross-sectional shape is forward-tapered, there is no roughness on the surface, and the performance of the colored photosensitive resin composition 8 is good.
实施例7Example 7
〔着色感光性树脂组合物9的制备〕[Preparation of Colored Photosensitive Resin Composition 9]
除用甲基丙烯酸、甲基丙烯酸苄酯和苯乙烯的共聚物〔甲基丙烯酸单元、甲基丙烯酸苄酯单元和苯乙烯单元的组成比按物质量比(摩尔比)计是30∶60∶10,聚苯乙烯换算重均分子量(Mw)为16,000〕代替实施例1的粘结剂树脂(B)外,同实施例1一样混合,得到着色感光性树脂组合物9。Except the copolymer [methacrylic acid unit, benzyl methacrylate unit and the composition ratio of styrene unit with methacrylic acid, benzyl methacrylate and styrene unit are 30: 60 by substance mass ratio (molar ratio): 10. The polystyrene-equivalent weight average molecular weight (Mw) is 16,000] except that the binder resin (B) in Example 1 was replaced, and mixed in the same manner as in Example 1 to obtain a colored photosensitive resin composition 9 .
〔评价〕〔evaluate〕
除用上述得到的着色感光性树脂组合物9代替实施例1得到的着色感光性树脂组合物1外,同实施例1一样操作,使9A层在搅拌下的25℃显像液中浸渍120秒钟进行显像、用纯水洗涤后,显像液中未观察到块状物,涂膜层溶解。测定显像液中溶解的涂膜层成分的粒度分布时,其最大粒径在1.0μm以下。此外,涂膜层溶解后的玻璃部透射率(400nm~780nm的平均值)在98%以上。Except that the colored photosensitive resin composition 9 obtained above was used instead of the colored photosensitive resin composition 1 obtained in Example 1, the operation was the same as in Example 1, and the 9A layer was immersed in the developing solution at 25°C under stirring for 120 seconds. After developing and washing with pure water, no lumps were observed in the developing solution, and the coating layer was dissolved. When measuring the particle size distribution of the coating layer components dissolved in the developer, the maximum particle size is 1.0 μm or less. In addition, the transmittance (average value of 400nm to 780nm) of the glass part after the coating film layer was dissolved was 98% or more.
然后,同实施例1一样测定9B层的铅笔强度时,铅笔强度是6H。进而,在所形成的蓝色像素9C中,其断面形状是顺锥状的,表面无粗糙,着色感光性树脂组合物9的性能是良好的。Then, when the pencil strength of the 9B layer was measured in the same manner as in Example 1, the pencil strength was 6H. Furthermore, in the formed blue pixel 9C, the cross-sectional shape is forward-tapered, the surface is not rough, and the performance of the colored photosensitive resin composition 9 is good.
实施例8Example 8
〔着色感光性树脂组合物10的制备〕[Preparation of Colored Photosensitive Resin Composition 10]
除用甲基丙烯酸、甲基丙烯酸苄酯和甲基丙烯酸异降冰片酯的共聚物〔甲基丙烯酸单元、甲基丙烯酸苄酯单元和甲基丙烯酸异降冰片酯单元的组成比按物质量比(摩尔比)计是30∶60∶10,聚苯乙烯换算重均分子量(Mw)为16,000〕代替实施例1的粘结剂树脂(B)外,同实施例1一样混合,得到着色感光性树脂组合物10。[The composition ratio of methacrylic acid unit, benzyl methacrylate unit and isonorbornyl methacrylate unit is based on the mass ratio of The (molar ratio) is 30:60:10, and the polystyrene-equivalent weight average molecular weight (Mw) is 16,000] except that the binder resin (B) in Example 1 is replaced, and mixed in the same manner as in Example 1 to obtain a colored photosensitive Resin composition 10.
〔评价〕〔evaluate〕
除用上述得到的着色感光性树脂组合物10代替实施例1得到的着色感光性树脂组合物1外,同实施例1一样操作,使10A层在搅拌下的25℃显像液中浸渍120秒钟进行显像、用纯水洗涤后,显像液中未观察到块状物,涂膜层溶解。测定显像液中溶解的涂膜层成分的粒度分布时,其最大粒径在1.0μm以下。此外,涂膜层溶解后的玻璃部透射率(400nm~780nm的平均值)在98%以上。Except that the colored photosensitive resin composition 10 obtained above is used instead of the colored photosensitive resin composition 1 obtained in Example 1, the operation is the same as in Example 1, and the layer 10A is immersed in the developing solution at 25°C under stirring for 120 seconds. After developing and washing with pure water, no lumps were observed in the developing solution, and the coating layer was dissolved. When measuring the particle size distribution of the coating layer components dissolved in the developer, the maximum particle size is 1.0 μm or less. In addition, the transmittance (average value of 400nm to 780nm) of the glass part after the coating film layer was dissolved was 98% or more.
然后,同实施例1一样测定10B层的铅笔强度时,铅笔强度是7H。进而,在所形成的蓝色像素10C中,其断面形状是顺锥状的,表面上无粗糙,着色感光性树脂组合物10的性能是良好的。Then, when the pencil strength of the 10B layer was measured in the same manner as in Example 1, the pencil strength was 7H. Furthermore, in the formed blue pixel 10C, the cross-sectional shape is forward-tapered, the surface is not rough, and the performance of the colored photosensitive resin composition 10 is good.
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| CN103543605A (en) * | 2012-07-10 | 2014-01-29 | 东友Fine-Chem股份有限公司 | Colored photosensitive resin composition and color filter using the same |
| CN105842986A (en) * | 2015-01-30 | 2016-08-10 | 住友化学株式会社 | Coloring photosensitive resin composition |
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| KR100655044B1 (en) * | 2005-12-30 | 2006-12-06 | 제일모직주식회사 | Photosensitive resin composition for color filter having excellent electrical properties and color filter using the same |
| KR100655047B1 (en) * | 2005-12-30 | 2006-12-06 | 제일모직주식회사 | Photosensitive resin composition and black matrix using the same |
| JP4954647B2 (en) * | 2006-09-11 | 2012-06-20 | 太陽ホールディングス株式会社 | Plasma display panel having photosensitive paste and fired product pattern formed from the photosensitive paste |
| KR100938446B1 (en) * | 2007-12-18 | 2010-01-25 | 제일모직주식회사 | Green pigment composition for color filter |
| KR101599955B1 (en) * | 2012-12-21 | 2016-03-04 | 제일모직 주식회사 | Photosensitive resin composition for color filter and color filter using the same |
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| JP3546687B2 (en) * | 1998-03-26 | 2004-07-28 | 住友化学工業株式会社 | Photoresist composition |
| JP2001013313A (en) * | 1999-06-29 | 2001-01-19 | Jsr Corp | Radiation-sensitive composition for color filter and color filter |
| JP2002031713A (en) * | 2000-02-01 | 2002-01-31 | Mitsubishi Chemicals Corp | Composition for color filter and color filter |
| JP2002072475A (en) | 2000-08-28 | 2002-03-12 | Mitsubishi Chemicals Corp | Photopolymerizable composition and color filter using the same |
| TW538316B (en) * | 2001-01-19 | 2003-06-21 | Sumitomo Chemical Co | Chemical amplifying type positive resist composition |
| JP2003035815A (en) | 2001-07-25 | 2003-02-07 | Mitsubishi Chemicals Corp | Composition for color filter and color filter |
| JP3849486B2 (en) * | 2001-10-19 | 2006-11-22 | 住友化学株式会社 | Chemically amplified positive resist composition |
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2004
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103543605A (en) * | 2012-07-10 | 2014-01-29 | 东友Fine-Chem股份有限公司 | Colored photosensitive resin composition and color filter using the same |
| CN103543605B (en) * | 2012-07-10 | 2016-08-31 | 东友精细化工有限公司 | Photosensitive composition and the colored filter of use said composition |
| CN105842986A (en) * | 2015-01-30 | 2016-08-10 | 住友化学株式会社 | Coloring photosensitive resin composition |
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| KR20040100965A (en) | 2004-12-02 |
| KR101129962B1 (en) | 2012-03-28 |
| CN1573542B (en) | 2011-07-06 |
| TW200502684A (en) | 2005-01-16 |
| TWI361948B (en) | 2012-04-11 |
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