CN1568101A - Organic light-emitting device defect repair device - Google Patents
Organic light-emitting device defect repair device Download PDFInfo
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Abstract
Description
技术领域technical field
本发明关于一种有机发光元件缺陷修复装置,特别是一种能够修复实质短路处的有机发光元件缺陷修复装置。The present invention relates to a defect repairing device for an organic light-emitting element, in particular to a defect repairing device for an organic light-emitting element capable of repairing a substantial short circuit.
背景技术Background technique
在有机发光元件以及有机电致发光显示器的制作流程中,需经过光刻法(photolithography)定义出导电阳极与辅助阳极,接着于真空腔体内进行有机材料以及无机材料(阴极层)的镀膜。其中,无机材料包括阴极层。由于有机发光元件对水气与氧气等环境因素敏感且会影响其寿命,故需经过封装制程以维持元件的正常运作。In the manufacturing process of organic light-emitting devices and organic electroluminescent displays, it is necessary to define a conductive anode and an auxiliary anode through photolithography, and then perform coating of organic materials and inorganic materials (cathode layer) in a vacuum chamber. Wherein the inorganic material includes the cathode layer. Since organic light-emitting devices are sensitive to environmental factors such as moisture and oxygen and will affect their lifespan, they need to go through a packaging process to maintain the normal operation of the device.
在有机发光元件的制程过程中,常由于无尘室的洁净度不足,使得杂质(如气泡或微粒)掉入有机发光元件中,而产生实质短路的现象。同样地,由于阳极基板的表面粗糙度过大,加上有机电致发光元件结构本身薄弱,亦可能造成实质短路的现象。在此,实质短路的产生使得电流仅由缺陷处通过,而无法驱动所有像素,进而影响了元件的发光效率以及画面显示效果。若能以一有机发光元件缺陷修复装置制作新颖结构以改进原本结构的不佳的装置,直接提高产品良率与信赖性,则有助于量产技术的提升,大幅降低制造的成本。During the manufacturing process of the organic light-emitting device, impurities (such as air bubbles or particles) often fall into the organic light-emitting device due to insufficient cleanliness of the clean room, resulting in a substantial short circuit. Similarly, due to the excessive surface roughness of the anode substrate and the weak structure of the organic electroluminescence element itself, a substantial short circuit may also be caused. Here, the occurrence of a substantial short circuit makes the current pass only through the defect, and cannot drive all the pixels, thereby affecting the luminous efficiency of the element and the display effect of the screen. If a device for repairing defects of organic light-emitting elements can be used to make a novel structure to improve devices with poor original structures and directly improve product yield and reliability, it will help improve mass production technology and greatly reduce manufacturing costs.
如图1所示,现有技术中有机发光元件缺陷测量装置3包括一传输室31、一电气测试室32。有机发光元件在进行封装制程之后,亦即盖上封合盖并以光固胶粘着且照光后,再利用裂片机裂片成小面积的成品,接着经由传输室31中的机器手臂311传送至电气测试室32中进行电气测试。元件在经过板面测试之后,挑选出具有短路现象的有机发光元件。由于元件外层已经进行封装,无法对于内部的个别像素进行缺陷的修补,亦即无重工(Re-work)的可能,所以在经过面板测试而发现其元件具有短路现象时,则必须直接淘汰整个元件。基于此原因,不但会造成产品良率以及信赖度的下降,更会增加制造成本。As shown in FIG. 1 , the organic light-emitting device defect measurement device 3 in the prior art includes a transmission chamber 31 and an electrical testing chamber 32 . After the organic light-emitting element undergoes the encapsulation process, that is, after the sealing cover is covered, adhered with light-curing adhesive and illuminated, it is split into small-area finished products by a splitter, and then transferred to the Electrical tests are performed in the electrical test chamber 32 . After the components are tested on the board surface, the organic light-emitting components with short-circuit phenomenon are selected. Since the outer layer of the component has been encapsulated, it is impossible to repair the defect of individual pixels inside, that is, there is no possibility of rework (Re-work), so when the component is found to have a short circuit after the panel test, the entire pixel must be eliminated directly. element. For this reason, it will not only cause a decline in product yield and reliability, but also increase manufacturing costs.
发明人本着积极创新的精神,亟思一种可以解决上述问题的「有机发光元件缺陷修复装置」,几经研究实验终至完成此发明。In the spirit of active innovation, the inventor thought hard about a "organic light-emitting element defect repair device" that could solve the above-mentioned problems, and finally completed the invention after several researches and experiments.
发明内容Contents of the invention
本发明的目的提供一种能修补像素缺陷、减少制造成本以及增加产品良率与信赖度的有机发光元件缺陷修复装置。The object of the present invention is to provide a defect repairing device for organic light-emitting elements that can repair pixel defects, reduce manufacturing costs, and increase product yield and reliability.
为达上述目的,本发明提供一种有机发光元件缺陷修复装置,用以修复具有实质短路现象的有机发光元件,此有机发光元件缺陷修复装置包含一传输室、一电气测试室以及一隔绝层形成室。其中,传输室用以进行有机发光元件的传递;电气测试室设有一电源端,电源端提供一电流或电压于有机发光元件中,以使有机发光元件的实质短路处形成断路;隔绝层形成室于有机发光元件的断路处形成一隔绝层。本发明亦提供上述有机发光元件缺陷修复装置的另一实施例,该实施例与上述有机发光元件缺陷修复装置的不同之处,在于更包含一光电性检测室;其中,光电性检测室为检测电气室中有机发光元件亮度的强度和均匀度、色纯度和短路程度,当所检测的短路处的比例少于一定值时或是漏电流低于一定值时,于后续的隔绝层形成室中,在断路处形成一隔绝层。In order to achieve the above purpose, the present invention provides a defect repairing device for organic light-emitting elements, which is used to repair organic light-emitting elements with substantial short-circuit phenomenon. room. Among them, the transfer chamber is used for the transfer of organic light-emitting elements; the electrical test chamber is provided with a power supply terminal, which provides a current or voltage in the organic light-emitting elements, so that the actual short circuit of the organic light-emitting elements forms an open circuit; the insulating layer forming chamber An isolation layer is formed on the disconnection of the organic light-emitting element. The present invention also provides another embodiment of the device for repairing defects of organic light-emitting elements. The difference between this embodiment and the device for repairing defects of organic light-emitting elements is that it further includes a photoelectric detection chamber; The intensity and uniformity of brightness, color purity and short circuit degree of the organic light-emitting element in the electrical room, when the proportion of the detected short circuit is less than a certain value or the leakage current is lower than a certain value, in the subsequent insulating layer forming room, An insulating layer is formed at the break.
与现有技术相比,在本发明中提供一种有机发光元件缺陷修复装置,此装置能够在进行封装步骤之前,修复有机发光元件中具有像素缺陷的部分。修复的方法使具有像素缺陷的部分丧失其导电性质,让原本具有缺陷处的像素能够与相邻无缺陷的像素具有同等的发光能力。本发明能够修复具有缺陷的有机发光元件,并无需直接淘汰整个面板,进而降低了产品的制造成本,更进一步增加了产品的良率以及信赖度。Compared with the prior art, the present invention provides a defect repairing device for an organic light-emitting element, which can repair the portion of the organic light-emitting element that has pixel defects before the packaging step. The repair method makes the part with pixel defect lose its conductive properties, so that the pixel with the original defect can have the same luminous ability as the adjacent non-defective pixel. The invention can repair defective organic light-emitting elements without directly eliminating the entire panel, thereby reducing the manufacturing cost of the product and further increasing the yield rate and reliability of the product.
附图说明Description of drawings
图1现有技术中的有机发光元件缺陷量测装置的示意图。FIG. 1 is a schematic diagram of an organic light-emitting device defect measurement device in the prior art.
图2本实施例的有机发光元件缺陷修复装置的示意图。FIG. 2 is a schematic diagram of the device for repairing organic light-emitting element defects in this embodiment.
图3为本发明另一实施例的有机发光元件缺陷修复装置的示意图。FIG. 3 is a schematic diagram of an organic light emitting device defect repairing device according to another embodiment of the present invention.
图中符号说明Explanation of symbols in the figure
1 有机发光元件缺陷修复装置1 Organic light-emitting element defect repair device
11 传输室11 transfer room
12 电气测试室12 Electrical test room
13 隔绝层形成室13 Insulation layer formation chamber
14 固胶涂布室14 Solid glue coating room
15 封合盖设置室15 Sealing lid setting chamber
16 光照室或加热室16 light room or heating room
21 传输室21 transfer room
22 电气测试室22 Electrical testing room
23 光电性检测室23 photoelectric detection room
24 隔绝层形成室24 Insulation layer formation chamber
25 固胶涂布室25 glue coating room
26 封合盖设置室26 Sealing lid setting chamber
27 光照室或加热室27 Light room or heating room
3 有机发光元件缺陷量测装置3 Organic light-emitting element defect measurement device
31 传输室31 transfer room
311 机器手臂311 robot arm
32 电气测试室32 Electrical testing room
具体实施方式Detailed ways
以下将参照相关附图,说明依据本发明实施例的一种有机发光元件缺陷修复装置。An organic light emitting device defect repairing device according to an embodiment of the present invention will be described below with reference to related drawings.
如图2所示,本发明提供一种有机发光元件缺陷修复装置1,用以修复具有实质短路现象的一有机发光元件,有机发光元件包含一基板、一第一电极、一有机发光层以及一第二电极,此有机发光元件缺陷修复装置1包含一传输室11、一电气测试室12以及一隔绝层形成室13。As shown in FIG. 2, the present invention provides a defect repairing device 1 for an organic light-emitting element, which is used to repair an organic light-emitting element with a substantial short circuit phenomenon. The organic light-emitting element includes a substrate, a first electrode, an organic light-emitting layer, and an organic light-emitting element. The second electrode, the organic light emitting device defect repairing device 1 includes a transmission chamber 11 , an electrical testing chamber 12 and an isolation layer forming chamber 13 .
其中,传输室11用以进行有机发光元件的传递;电气测试室12设有一电源端(未显示图中),电源端提供一电流或电压于有机发光元件的第一电极与第二电极,以使有机发光元件的实质短路处形成断路;隔绝层形成室13于有机发光元件的断路处形成一隔绝层。Wherein, the transmission chamber 11 is used for the transmission of the organic light-emitting element; the electrical test chamber 12 is provided with a power supply terminal (not shown in the figure), and the power supply terminal provides a current or voltage to the first electrode and the second electrode of the organic light-emitting element, so as to The substantially short circuit of the organic light-emitting element is formed as an open circuit; the insulating layer forming chamber 13 forms an insulating layer at the open circuit of the organic light-emitting element.
本实施例的传输室11为一多边形的配置构造(于图2中为六边形),且设有一机器手臂111。在进行有机发光元件缺陷修复使,利用手臂111连续地将有机发光元件搬送至于电气测试室12或是隔绝层形成室13中,用以进行电气测试步骤或是隔绝层形成步骤。The transfer chamber 11 of this embodiment has a polygonal configuration (hexagonal in FIG. 2 ), and is provided with a robotic arm 111 . When repairing the defect of the organic light-emitting element, the organic light-emitting element is continuously transported to the electrical testing chamber 12 or the insulating layer forming chamber 13 by the arm 111 for performing the electrical testing step or the insulating layer forming step.
由于有机发光元件的材料对于水分非常敏感,在与大气接触后容易产生暗点(Dark Spot),所以传输室11能进行排气而成真空状态,让制程在真空环境下进行,减少暗点的产生。传输室11中的排气系统(未显示图中)可由油回转泵、机械式泵、涡轮分子泵(Turbo molecularpump)、低温泵所构成,使传输室11能在短时间内达到真空的状态。Since the material of the organic light-emitting element is very sensitive to moisture, dark spots (Dark Spot) are likely to occur after contact with the atmosphere, so the transfer chamber 11 can be exhausted to form a vacuum state, so that the process can be carried out in a vacuum environment, reducing the occurrence of dark spots. produce. The exhaust system (not shown in the figure) in the transfer chamber 11 can be composed of an oil rotary pump, a mechanical pump, a turbo molecular pump (Turbo molecular pump), and a cryopump, so that the transfer chamber 11 can reach a vacuum state in a short time.
为减少有机发光元件暗点的产生,亦可将传输室11中充填惰性气体(例如氮气等),使制程在惰性气氛下进行。In order to reduce the occurrence of dark spots in the organic light-emitting device, the transfer chamber 11 may also be filled with an inert gas (such as nitrogen, etc.), so that the manufacturing process is performed under an inert atmosphere.
首先,机器手臂111将有机发光元件搬至电气测试室12中。在此,电气测试室12设有一电源端,电源端提供一电流或电压于有机发光元件的第一电极与第二电极,亦即在第一电极与第二电极间分别施以一正电压及一负电压,以使有机发光元件的实质短路处形成断路。相同地,在第一电极与第二电极间亦可分别施以一负电压以及一正电压。Firstly, the robot arm 111 moves the organic light emitting device to the electrical testing room 12 . Here, the electrical test chamber 12 is provided with a power supply terminal, which provides a current or voltage to the first electrode and the second electrode of the organic light-emitting element, that is, a positive voltage and a positive voltage are respectively applied between the first electrode and the second electrode. A negative voltage, so that the organic light-emitting element is actually short-circuited to form an open circuit. Similarly, a negative voltage and a positive voltage can also be applied between the first electrode and the second electrode respectively.
电气测试室为一缓冲腔体(buffer chamber)或是单一腔体(singlechamber)的环境,其内部为真空,同时亦能充填(vent)惰性气氛。The electrical test chamber is a buffer chamber or a single chamber environment, the interior of which is vacuum, and can also be filled with an inert atmosphere.
在有机发光元件中,实质断路会造成漏电流、耗电以及像素不良的情形。在此,实质短路指真正短路或是接近短路的情况。造成有机发光元件实质短路的情况主要有二:其一于有机发光元件的制程中,不管如何控制无尘室环境的洁净度,总会有少量的杂质(如气泡或微粒)掉入有机发光元件中,而使在形成第二电极时,导致第二电极接触或实质接触第一电极,进而造成有机发光元件的实质短路。另外,当第一电极表面的粗糙度过大时,例如在第一电极的表面上形成有尖端时,亦有可能产生实质短路的情况。In organic light-emitting devices, substantial disconnection will cause leakage current, power consumption, and defective pixels. Here, a substantial short circuit refers to a real short circuit or a near short circuit. There are two main causes of short-circuit of organic light-emitting elements: First, in the process of organic light-emitting elements, no matter how the cleanliness of the clean room environment is controlled, there will always be a small amount of impurities (such as air bubbles or particles) falling into the organic light-emitting elements In this way, when the second electrode is formed, the second electrode contacts or substantially contacts the first electrode, thereby causing a substantial short circuit of the organic light-emitting element. In addition, when the roughness of the surface of the first electrode is too large, for example, when a sharp point is formed on the surface of the first electrode, a substantial short circuit may also occur.
在电气测试室中,因为施加定电压不定电流时,有缺陷的面板在正向电压下所耗用的电流会比正常电流值为高,而在负向电压下,有缺陷的面板则会产生较高的漏电流。而施加正向的定电流不定电压时,面板的亮度会比较低或不均匀,如果配合光电二极管(photodiode)转换成电压值或图像来比对,误差值会增加。In the electrical testing room, due to the application of constant voltage and variable current, the current consumed by the defective panel will be higher than the normal current value under the positive voltage, and the defective panel will produce higher leakage current. When applying a constant current and a constant voltage in the forward direction, the brightness of the panel will be relatively low or uneven. If the photodiode (photodiode) is used to convert the voltage value or image for comparison, the error value will increase.
接着,机器手臂111将形成断路的有机发光元件搬至隔绝层形成室13中,在有机发光元件的断路处以真空镀膜方式形成一隔绝层。由于在电气测试室12中,短路处因为含有杂质而产生气爆的情形,使得有机发光元件的有机发光层与第二电极形成向外翘曲的情形;或是短路处因第一电极表面的尖端受热融化,使得有机发光层与第二电极同样形成翘曲。由于在有机发光元件制程步骤中,基板镀膜面多为向下,因此,断路处若不即时形成一隔绝层,在往后的制作步骤中,只要基板镀膜面有机会被翻转向上,翘曲的第二电极可能又接触到第一电极而再次形成短路。Next, the robotic arm 111 moves the organic light-emitting element with the disconnection to the isolation layer forming chamber 13 , and forms an isolation layer at the disconnection of the organic light-emitting element by vacuum coating. In the electrical test chamber 12, the gas explosion occurs at the short-circuit due to impurities, causing the organic light-emitting layer of the organic light-emitting element and the second electrode to warp outward; or the short-circuit is caused by the surface of the first electrode The tip is melted by heat, so that the organic light-emitting layer and the second electrode are also warped. Since the coating surface of the substrate is mostly downward in the process steps of the organic light-emitting element, if an insulating layer is not formed immediately at the disconnection, in the subsequent manufacturing steps, as long as the coating surface of the substrate has a chance to be turned upward, the warped The second electrode may contact the first electrode again and form a short circuit again.
在此,隔绝层的材料可为构成有机发光层的有机材料,例如:空穴注入层、空穴传递层、发光层、电子传递层以及电子注入层的材料,或是具有高电阻的无机材料如氮化硅、氧化硅以及氮氧化硅。另外,与钝化保护层镀膜系统(passivation coating system)连结时,更可用具有高电阻的高分子当作隔绝层材料,如氟化树脂、Parylene。此外,隔绝层亦可于在一不含水气的含氧气氛中氧化第二电极而形成,亦即隔绝层为一金属氧化层物。Here, the material of the insulating layer may be an organic material constituting an organic light-emitting layer, such as a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer, and an electron injection layer, or an inorganic material with high resistance. Such as silicon nitride, silicon oxide and silicon oxynitride. In addition, when connected with the passivation coating system, high-resistance polymers can be used as insulating layer materials, such as fluorinated resin and Parylene. In addition, the isolation layer can also be formed by oxidizing the second electrode in a moisture-free oxygen-containing atmosphere, that is, the isolation layer is a metal oxide layer.
有机发光元件缺陷修复装置1更包含一个胶涂布室14,其依照预定的图案将一光固胶或热固胶形成于具有隔绝层的有机发光元件基板上。其中,光固胶为一紫外光胶,照射紫外光可将光固胶固化。另外,光固胶或热固胶需已进行气泡脱泡的处理,确定已无水分的存在。The organic light emitting device defect repairing device 1 further includes a glue coating chamber 14, which forms a photocurable or thermosetting glue on the organic light emitting device substrate with the insulating layer according to a predetermined pattern. Wherein, the light-curing glue is an ultraviolet light glue, and the light-curing glue can be cured by irradiating ultraviolet light. In addition, the light-curing adhesive or thermosetting adhesive needs to be degassed to ensure that there is no moisture.
接着,有机发光元件缺陷修复装置1更包含一封合盖设置室15,将一封合盖设置于形成有固胶的基板上。封合盖内注有一干燥剂,亦用以去除封合后有机发光元件内的水分,增长元件的使用寿命。Next, the organic light emitting device defect repairing device 1 further includes a cover setting chamber 15 for setting a cover on the substrate on which the glue is formed. A desiccant is injected into the sealing cover, which is also used to remove moisture in the sealed organic light-emitting element and prolong the service life of the element.
再者,有机发光元件缺陷修复装置1更包含一光照室或加热室16,照射紫外光于光固胶用以固化光固胶,或对热固胶加热用以固化热固胶,而将封合盖封合。Furthermore, the organic light-emitting device defect repairing device 1 further includes a light chamber or a heating chamber 16, which irradiates ultraviolet light on the photocurable adhesive to cure the photocurable adhesive, or heats the thermosetting adhesive to cure the thermosetting adhesive. Close lid to seal.
如图3所示,本发明提供的另一实施例的一种有机发光元件缺陷修复装置,用以修复具有实质短路现象的一有机发光元件,该有机发光元件包含一基板、一第一电极、一有机发光层以及一第二电极,此有机发光元件缺陷修复装置1包含一传输室21、一电气测试室22、一光电性检测室23以及一隔绝层形成室24。As shown in FIG. 3 , another embodiment of the present invention provides an organic light-emitting element defect repairing device, which is used to repair an organic light-emitting element with a substantial short circuit phenomenon. The organic light-emitting element includes a substrate, a first electrode, An organic light-emitting layer and a second electrode. The organic light-emitting device defect repairing device 1 includes a transmission chamber 21 , an electrical test chamber 22 , a photoelectricity detection chamber 23 and an isolation layer forming chamber 24 .
其中,不同于上述实施例,光电性检测室23检测于电气测试室22中有机发光元件的短路程度。在此,短路程度为短路处除以断路处的比例,或是漏电流的程度。当光电性检测室23中所检测短路程度为短路处除以断路处的比例少于一定值时,或是漏电流低于一定值时,则于隔绝层形成室24中在断路处形成一隔绝层。Wherein, different from the above-mentioned embodiments, the photoelectricity detection chamber 23 detects the short circuit degree of the organic light emitting element in the electrical test chamber 22 . Here, the short circuit degree is the ratio of the short circuit divided by the open circuit, or the degree of leakage current. When the degree of short circuit detected in the photoelectric detection chamber 23 is that the ratio of the short circuit divided by the open circuit is less than a certain value, or when the leakage current is lower than a certain value, an isolation layer is formed at the open circuit in the insulating layer forming chamber 24. layer.
在光电性检测室23中,当有机发光元件的短路程度大于一定值,亦即利用漏电流平均值或亮度检测所得的误差结果大于可接受值时,在隔绝层形成室24中,将不在有机发光元件的断路处形成一隔绝层。而当有机发光元件的短路程度少于一定值时,在隔绝层形成室24中,将在有机发光元件的断路处形成一隔绝层。当光电性检测室23中进行的检测步骤能够减少隔绝层材料的损失,而只让需要修补的有机发光元件继续进行隔绝层形成步骤。In the photoelectric detection chamber 23, when the short-circuit degree of the organic light-emitting element is greater than a certain value, that is, when the error result obtained by using the average value of the leakage current or the brightness detection is greater than an acceptable value, in the insulating layer forming chamber 24, no organic light will be detected. An isolation layer is formed at the disconnection of the light-emitting element. And when the short circuit degree of the organic light emitting element is less than a certain value, in the insulating layer forming chamber 24, an insulating layer will be formed at the open circuit of the organic light emitting element. The detection step performed in the photoelectric detection chamber 23 can reduce the loss of the material of the isolation layer, and only the organic light-emitting elements that need to be repaired are allowed to continue the step of forming the isolation layer.
本实施例的有机发光元件缺陷修复装置更包含一固胶涂布室25、一封合盖设置室26,以及一光照室或加热室27。在本实施例中,除了光电性检测室23与隔绝层形成室24与第一实施例不同之外,其余的元件以及特征皆与第一实施例相同。The device for repairing organic light-emitting device defects in this embodiment further includes a glue coating chamber 25 , a sealing lid setting chamber 26 , and a lighting chamber or heating chamber 27 . In this embodiment, except that the photoelectric detection chamber 23 and the isolation layer forming chamber 24 are different from those of the first embodiment, other components and features are the same as those of the first embodiment.
本发明所提供的有机发光元件缺陷修复装置,是将有机发光元件中具有实质短路缺陷处加以修复,使得原本因实质短路而无法驱动的像素能够与相邻无缺陷的像素具有相等的发光能力,如效率、亮度以及色纯度等。与现有技术中相比,本装置解决了因实质短路而造成的漏电流、耗电以及画质不佳的现象。再者,在封装步骤之前即测试出短路的现象并加以修补,而无须负担如现有技术中在封装步骤之后虽发现实质短路却无法修补而只能淘汰的有机发光元件面板成品的制造成本,降低了制造成本,更进一步提高了产品良率以及信赖度。The device for repairing defects in organic light-emitting elements provided by the present invention is to repair the substantially short-circuit defect in the organic light-emitting element, so that the pixels that cannot be driven due to the substantial short-circuit can have the same luminous ability as the adjacent non-defective pixels, Such as efficiency, brightness and color purity. Compared with the prior art, the device solves the phenomenon of leakage current, power consumption and poor image quality caused by the substantial short circuit. Furthermore, the phenomenon of short circuit is tested and repaired before the packaging step, without having to bear the manufacturing cost of the finished organic light-emitting element panel that cannot be repaired and can only be eliminated as in the prior art after the packaging step, although a substantial short circuit is found, The manufacturing cost is reduced, and the product yield and reliability are further improved.
上述仅为举例的实施例,而非为限制性。任何未脱离本发明的精神与范围,而对其进行的等效修改或变更,均应包含于所述的权利要求范围中。The foregoing are exemplary embodiments only, and are not intended to be limiting. Any equivalent modification or change without departing from the spirit and scope of the present invention shall be included in the scope of the claims.
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