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CN1412150A - Self-lubricating ceramic composite material and its preparation process - Google Patents

Self-lubricating ceramic composite material and its preparation process Download PDF

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CN1412150A
CN1412150A CN 02150057 CN02150057A CN1412150A CN 1412150 A CN1412150 A CN 1412150A CN 02150057 CN02150057 CN 02150057 CN 02150057 A CN02150057 A CN 02150057A CN 1412150 A CN1412150 A CN 1412150A
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composite material
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molybdenum disulfide
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梁宏勋
吕晋军
刘维民
薛群基
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Lanzhou Institute of Chemical Physics LICP of CAS
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Abstract

本发明公开了一种自润滑陶瓷复合材料及制备工艺。本发明制备的陶瓷复合材料是由氧化钇、氧化锆和二硫化钼组成。其工艺过程是将MoS2粉体加入到硝酸钇和ZrOCl2·8H2O的醇-水溶液并加热,然后通过过滤、洗涤、煅烧等工艺过程制备的氧化钇稳定四方相氧化锆包裹二硫化钼的复合粉体。通过热压烧结工艺,制备出氧化钇稳定四方相氧化锆和二硫化钼复合材料。该发明制备的氧化钇稳定四方相氧化锆和二硫化钼复合粉体具有团聚少,烧结活性高,均匀性好等优点,使用这种复合粉体制备的氧化钇稳定四方相氧化锆和二硫化钼陶瓷材料具有小的摩擦系数和磨损系数。The invention discloses a self-lubricating ceramic composite material and a preparation process. The ceramic composite material prepared by the invention is composed of yttrium oxide, zirconium oxide and molybdenum disulfide. The process is to add MoS 2 powder to the alcohol-water solution of yttrium nitrate and ZrOCl 2 8H 2 O and heat it, and then prepare the yttria-stabilized tetragonal zirconia-coated molybdenum disulfide through filtration, washing, calcination and other processes. composite powder. A composite material of yttria-stabilized tetragonal zirconia and molybdenum disulfide was prepared by hot-pressing sintering process. The yttria-stabilized tetragonal zirconia and molybdenum disulfide composite powder prepared by the invention has the advantages of less agglomeration, high sintering activity, and good uniformity. Molybdenum ceramic materials have a small coefficient of friction and wear.

Description

自润滑陶瓷复合材料及制备工艺Self-lubricating ceramic composite material and its preparation process

技术领域technical field

本发明涉及一种陶瓷复合材料及制备工艺,特别涉及到一种自润滑陶瓷复合材料及制备工艺。The invention relates to a ceramic composite material and a preparation process, in particular to a self-lubricating ceramic composite material and a preparation process.

背景技术Background technique

精密陶瓷由于具有高熔点、高硬度、耐磨损、化学性质稳定等特点,使它在石油、化工、汽车、机械工业等领域充当无润滑介质下的耐磨材料,诸如轴承、滚珠、内衬、活塞环、密封环等,因此陶瓷材料的摩擦学性能是需要考虑的一个重要方面。而在研究中发现,陶瓷材料虽然具有高的硬度和抗剪切强度,但当与陶瓷件配副时,其摩擦系数一般为0.7~0.9,并且发生严重磨损而失效,在实际的工程应用中受到限制。因此,改善陶瓷材料的摩擦学性能使其能够被成功应用的关键先决条件之一。改善陶瓷摩擦副摩擦学性能的一种方法就是使材料滑动表面具有自润滑性能,即在干摩擦条件下,使摩擦系数和磨损系数降低到所要求的范围内。实现材料自润滑的另一个意义在于:省掉润滑系统,可减少重量、体积,提高设备可靠性与延长寿命(不必考虑润滑剂的补充)。氧化钇(Y2O3)稳定四方相氧化锆(ZrO2)陶瓷(Y-TZP)具有很高的强度和断裂韧性,因而在工程中被广泛的应用。二硫化钼为一类金属层状结构的化合物,即在两层S原子中间夹一层Mo原子,形成三明治夹心结构,这种板层在晶体中上下堆积,使一个板层的S原子层与另一个板层的S原子层相邻,其间靠弱范德华力结合。层状结构中的Mo原子周围排布6个S原子,它们之间以强共价键结合。由于二硫化钼(MoS2)材料独特的层状结构,而使其具有优良的自润滑。因此,二硫化钼与氧化锆复合可得到性能互补的自润滑复合材料。Due to its high melting point, high hardness, wear resistance, and stable chemical properties, precision ceramics are used as wear-resistant materials in non-lubricating media in the fields of petroleum, chemical industry, automobiles, and machinery industries, such as bearings, balls, linings, etc. , Piston rings, sealing rings, etc., so the tribological properties of ceramic materials are an important aspect to be considered. In the research, it was found that although ceramic materials have high hardness and shear strength, when paired with ceramic parts, their friction coefficient is generally 0.7 to 0.9, and severe wear and failure occur. In practical engineering applications restricted. Therefore, improving the tribological properties of ceramic materials is one of the key prerequisites for their successful application. One way to improve the tribological properties of ceramic friction pairs is to make the sliding surface of the material have self-lubricating properties, that is, to reduce the friction coefficient and wear coefficient to the required range under dry friction conditions. Another significance of realizing self-lubrication of materials is that: eliminating the lubrication system can reduce weight and volume, improve equipment reliability and prolong life (no need to consider the supplement of lubricant). Yttrium oxide (Y 2 O 3 ) stabilized tetragonal zirconia (ZrO 2 ) ceramics (Y-TZP) are widely used in engineering because of their high strength and fracture toughness. Molybdenum disulfide is a compound with a metal layer structure, that is, a layer of Mo atoms is sandwiched between two layers of S atoms to form a sandwich structure. The S atomic layers of the other plate are adjacent to each other, and they are combined by weak van der Waals force. Six S atoms are arranged around Mo atoms in the layered structure, and they are bonded by strong covalent bonds. Due to the unique layered structure of molybdenum disulfide (MoS 2 ), it has excellent self-lubrication. Therefore, molybdenum disulfide and zirconia can be combined to obtain self-lubricating composite materials with complementary properties.

材料的力学性能和摩擦学性能与其显微结构和工艺过程有着密切的关系;同时,在材料的组成一定时,工艺过程对材料的显微结构有着决定作用。而已有的制备自润滑陶瓷复合材料的工艺是将陶瓷粉体和润滑相粉体直接混合后,通过一定成型和烧结工艺,制备出大块材料。上述的工艺过程很难保证陶瓷粉体和润滑相粉体的均匀分散,从而决定了制备的自润滑陶瓷材料在显微结构上的不均一性。因此,该工艺制备出的陶瓷复合材料难以保证润滑性与力学性能两者的统一。故合成分散均匀、团聚少、活性高的陶瓷复合粉体是制备高性能自润滑陶瓷复合材料的关键技术之一,这样才能保证制备显微结构均匀和宏观性能优良的陶瓷复合材料。The mechanical properties and tribological properties of materials are closely related to their microstructure and process; at the same time, when the composition of the material is constant, the process has a decisive effect on the microstructure of the material. However, the existing process for preparing self-lubricating ceramic composite materials is to directly mix ceramic powder and lubricating phase powder, and then prepare bulk materials through certain molding and sintering processes. It is difficult to ensure the uniform dispersion of ceramic powder and lubricating phase powder in the above process, which determines the inhomogeneity of the microstructure of the prepared self-lubricating ceramic material. Therefore, it is difficult to ensure the unity of lubricity and mechanical properties of the ceramic composite prepared by this process. Therefore, the synthesis of ceramic composite powders with uniform dispersion, less agglomeration and high activity is one of the key technologies for preparing high-performance self-lubricating ceramic composite materials, so as to ensure the preparation of ceramic composite materials with uniform microstructure and excellent macroscopic properties.

发明内容Contents of the invention

本发明的目的在于提供一种自润滑复合陶瓷材料及制备工艺,所制备的该复合陶瓷材料具有优良的力学性能和摩擦学性能。The object of the present invention is to provide a self-lubricating composite ceramic material and its preparation process. The prepared composite ceramic material has excellent mechanical properties and tribological properties.

一种自润滑陶瓷复合材料,其特征在于材料的重量份数由氧化钇2~8份,氧化锆100份,二硫化钼50~100份组成。A self-lubricating ceramic composite material is characterized in that the material consists of 2-8 parts by weight of yttrium oxide, 100 parts of zirconium oxide and 50-100 parts of molybdenum disulfide.

由于氧化钇(Y2O3)稳定四方相氧化锆(ZrO2)陶瓷(Y-TZP)具有很高的强度和断裂韧性,而二硫化钼(MoS2)材料具有优良的自润滑,因此,通过特殊的工艺手段,制备Y-TZP包裹MoS2的复合粉体,在通过高温热压烧结制备具有特殊显微结构的复合陶瓷材料。该材料的显微结构特征是:Y-TZP为连续相,MoS2自润滑相均匀分散在Y-TZP中。这种显微结构可以将Y-TZP高的强度和断裂韧性以及MoS2优良的自润滑性能有机的结合,故该复合材料具有优良力学性能和摩擦学性能。同时,MoS2被Y-TZP所包裹,有利于阻止MoS2的高温氧化,从而提高了这种复合材料使用温度。Because yttrium oxide (Y 2 O 3 ) stabilized tetragonal zirconia (ZrO 2 ) ceramics (Y-TZP) have high strength and fracture toughness, and molybdenum disulfide (MoS 2 ) materials have excellent self-lubrication, therefore, Through special process means, the composite powder of Y-TZP wrapped MoS2 is prepared, and the composite ceramic material with special microstructure is prepared by high temperature hot pressing and sintering. The microstructural characteristics of the material are: Y-TZP is a continuous phase, and MoS 2 self-lubricating phase is uniformly dispersed in Y-TZP. This microstructure can organically combine the high strength and fracture toughness of Y-TZP and the excellent self-lubricating properties of MoS 2 , so the composite material has excellent mechanical properties and tribological properties. At the same time, MoS 2 is wrapped by Y-TZP, which is beneficial to prevent the high-temperature oxidation of MoS 2 , thereby increasing the use temperature of this composite material.

醇-水溶液加热法是一种制备团聚少,活性高的ZrO2粉体的方法,其基本原理是:当ZrOCl2·8H2O在醇-水溶液加热时,溶液的介电常数迅速的下降,导致溶液的溶剂化能下降、溶剂的溶解力下降,溶液达到饱和状态而产生沉淀。利用这一原理,可以制备烧结性能良好的ZrO2粉体。而本发明利用上述原理,在硝酸钇和ZrOCl2·8H2O的醇-水溶液中加入MoS2粉体,并加热,使ZrOCl2·8H2O形成的Zr(OH)4在MoS2颗粒表面异相成核;当调节溶液的PH值至大于9时,硝酸钇转变成Y(OH)3并从溶液中析出,最终形成Y(OH)3和Zr(OH)4包裹MoS2粉体颗粒,然后在氮气保护下煅烧,使Y(OH)3和Zr(OH)4分解并形成Y-TZP,通过上述工艺过程可以制备出烧结性能良好的Y-TZP包裹MoS2粉体颗粒。在一定的温度、压力下烧结,最终制得摩擦学和力学性能优良的氧化钇稳定四方相氧化锆和二硫化钼复合材料。The alcohol-water solution heating method is a method for preparing ZrO 2 powder with less agglomeration and high activity. The basic principle is: when ZrOCl 2 8H 2 O is heated in alcohol-water solution, the dielectric constant of the solution drops rapidly, As a result, the solvation energy of the solution decreases, the solvency of the solvent decreases, and the solution reaches a saturated state, resulting in precipitation. Using this principle, ZrO2 powder with good sintering performance can be prepared. And the present invention utilizes the above-mentioned principle, adds MoS 2 powder in the alcohol-water solution of yttrium nitrate and ZrOCl 2 8H 2 O, and heats, makes the Zr(OH) 4 that ZrOCl 2 8H 2 O forms on the surface of MoS 2 particles Heterogeneous nucleation; when the pH value of the solution is adjusted to greater than 9, yttrium nitrate turns into Y(OH) 3 and precipitates out of the solution, finally forming Y(OH) 3 and Zr(OH) 4 wrapped MoS 2 powder particles , and then calcined under the protection of nitrogen to decompose Y(OH) 3 and Zr(OH) 4 and form Y-TZP. Through the above process, Y-TZP wrapped MoS 2 powder particles with good sintering performance can be prepared. Sintering at a certain temperature and pressure, the yttria-stabilized tetragonal zirconia and molybdenum disulfide composite material with excellent tribological and mechanical properties is finally obtained.

本发明所用的原料为工业原料,硝酸钇,ZrOCl2·8H2O,MoS2的纯度大于99%,其中MoS2的粒度为1~5μm,乙醇的含水量小于1%,水为蒸馏水。氧化钇稳定四方相氧化锆和二硫化钼复合材料的原料组成为:硝酸钇为6~15份,ZrOCl2·8H2O为100份,MoS2为50~100份。The raw materials used in the present invention are industrial raw materials, yttrium nitrate, ZrOCl 2 ·8H 2 O, the purity of MoS 2 is greater than 99%, wherein the particle size of MoS 2 is 1-5 μm, the water content of ethanol is less than 1%, and the water is distilled water. The raw material composition of the yttria-stabilized tetragonal phase zirconia and molybdenum disulfide composite material is: 6-15 parts of yttrium nitrate, 100 parts of ZrOCl 2 ·8H 2 O, and 50-100 parts of MoS 2 .

氧化钇稳定四方相氧化锆和二硫化钼复合材料的制备方法是按下列顺序步骤进行的:The preparation method of the yttrium oxide stabilized tetragonal phase zirconia and molybdenum disulfide composite material is carried out according to the following sequential steps:

(1)6~15份的硝酸钇和100份ZrOCl2·8H2O加入到乙醇和水的混合溶液中,在搅拌条件下,将50~100份的MoS2粉体颗粒加入到上述溶液内,直到MoS2在溶液中分散均匀;(1) Add 6-15 parts of yttrium nitrate and 100 parts of ZrOCl 2 ·8H 2 O into the mixed solution of ethanol and water, and add 50-100 parts of MoS 2 powder particles into the above solution under stirring conditions , until MoS 2 is uniformly dispersed in the solution;

(2)在搅拌条件下,将混合溶液加热到70~80℃,保温4~8小时,冷却到室温,调节溶液的PH值大于9;(2) Under stirring conditions, heat the mixed solution to 70-80°C, keep it warm for 4-8 hours, cool to room temperature, and adjust the pH value of the solution to be greater than 9;

(3)将混合液进行过滤,并对过滤产物进行洗涤,干燥和煅烧;(3) filtering the mixed solution, and washing, drying and calcining the filtered product;

(4)将制备的粉料,用模压成型,压力100~200MPa后,成型后的坯体放入到热压炉进行烧结。(4) The prepared powder is molded with a pressure of 100-200 MPa, and the formed green body is put into a hot-press furnace for sintering.

本发明的制备方法中,硝酸钇,ZrOCl2·8H2O,MoS2的纯度大于99%,其中MoS2的粒度为1~5μm。In the preparation method of the present invention, the purity of yttrium nitrate, ZrOCl 2 ·8H 2 O and MoS 2 is greater than 99%, wherein the particle size of MoS 2 is 1-5 μm.

本发明的制备方法中乙醇和水的混合溶液中,乙醇的体积浓度为20~95%。In the mixed solution of ethanol and water in the preparation method of the present invention, the volume concentration of ethanol is 20-95%.

本发明的制备方法中ZrOCl2·8H2O在乙醇和水的混合液中的浓度0.1~0.5摩尔/升。In the preparation method of the present invention, the concentration of ZrOCl 2 ·8H 2 O in the mixed solution of ethanol and water is 0.1-0.5 mol/liter.

本发明的制备方法中干燥产物在氮气保护下煅烧、温度为700~900℃,保温1~5小时。In the preparation method of the present invention, the dry product is calcined under the protection of nitrogen at a temperature of 700-900° C. and kept for 1-5 hours.

本发明的制备方法中,复合材料的烧结温度为1200~1400℃,压力为20~40MPa,保温时间为0.5~2小时。In the preparation method of the present invention, the sintering temperature of the composite material is 1200-1400° C., the pressure is 20-40 MPa, and the holding time is 0.5-2 hours.

实施例1制备的氧化钇稳定四方相氧化锆和二硫化钼复合材料的性能参数: 相对理论密度 90~99% 硬度 2~5GPa 摩擦系数(摩擦副为氧化锆) 不大于0.25 磨损系数(摩擦副为氧化锆) 小于1×10-6mm3/Nm The performance parameters of the yttria-stabilized tetragonal zirconia and molybdenum disulfide composite material prepared in Example 1: relative theoretical density 90-99% hardness 2~5GPa Coefficient of friction (the friction pair is zirconia) not greater than 0.25 Wear coefficient (friction pair is zirconia) Less than 1×10 -6 mm 3 /Nm

本发明制备的氧化钇稳定四方相氧化锆和二硫化钼复合材料具有以下特点:The yttria-stabilized tetragonal zirconia and molybdenum disulfide composite material prepared by the present invention has the following characteristics:

(1)制备出的氧化钇稳定四方相氧化锆包裹二硫化钼粉体颗粒具有团聚少,烧结活性高,均匀性好,等特点;(1) The prepared yttria-stabilized tetragonal zirconia-coated molybdenum disulfide powder particles have the characteristics of less agglomeration, high sintering activity, and good uniformity;

(2)二硫化钼的颗粒外面包裹氧化钇稳定四方相氧化锆,有利阻止高温下二硫化钼的氧化,从而提高了二硫化钼的高温氧化温度;(2) The particles of molybdenum disulfide are wrapped with yttria-stabilized tetragonal zirconia, which is beneficial to prevent the oxidation of molybdenum disulfide at high temperature, thereby increasing the high-temperature oxidation temperature of molybdenum disulfide;

(3)二硫化钼的颗粒表面包裹氧化钇稳定四方相氧化锆,通过高温烧结使氧化钇稳定四方相氧化锆形成连续相,最终制备的陶瓷材料具有良好的力学性能;(3) The surface of the particles of molybdenum disulfide is coated with yttria-stabilized tetragonal zirconia, and the yttria-stabilized tetragonal zirconia forms a continuous phase through high-temperature sintering, and the final prepared ceramic material has good mechanical properties;

(4)复合材料中存在二硫化钼自润滑相,使其具有小的摩擦系数和磨损系数,可以达到固体润滑材料的要求。(4) The self-lubricating phase of molybdenum disulfide exists in the composite material, which makes it have a small friction coefficient and wear coefficient, which can meet the requirements of solid lubricating materials.

附图说明Description of drawings

图1为实施例1中,在氮气保护下,煅烧后粉体的X射线衍射图。从粉体的X射线衍射图,可以看出通过本发明制备的复合粉体仅含有四方氧化锆(t-ZrO2)和MoS2两相。Figure 1 is the X-ray diffraction pattern of the calcined powder in Example 1 under the protection of nitrogen. From the X-ray diffraction pattern of the powder, it can be seen that the composite powder prepared by the present invention only contains two phases of tetragonal zirconia (t-ZrO 2 ) and MoS 2 .

图2为实施例1,氧化钇稳定四方相氧化锆和二硫化钼复合材料的断面扫描电镜照片。从复合材料的断面扫描电镜照片中可以观察到,氧化钇稳定四方相氧化锆为连续相,包裹在片状二硫化钼颗粒的周围,二硫化钼由于受到压力,发生定向排列,其滑移面垂直于压力方向。Fig. 2 is a scanning electron micrograph of a section of the yttria-stabilized tetragonal zirconia and molybdenum disulfide composite material in Example 1. From the cross-sectional scanning electron microscope photos of the composite material, it can be observed that the yttria-stabilized tetragonal zirconia is a continuous phase, wrapped around the flake-shaped molybdenum disulfide particles, and the molybdenum disulfide is oriented due to pressure, and its slip surface perpendicular to the direction of pressure.

具体实施方式Detailed ways

实施例1Example 1

将2克的硝酸钇和26克ZrOCl2·8H2O加入到乙醇和水体积比为10~6∶1的混合溶液中,ZrOCl2·8H2O的溶液浓度为0.1~0.3摩尔/升,搅拌均匀。在搅拌条件下,将11.82克的MoS2粉体颗粒加入到上述溶液内,直到MoS2在溶液中分散均匀。在搅拌条件下,将混合溶液加热到70~80℃,保温2~4小时,自然冷却到室温,调节溶液的PH值到大于9。混合液进行过滤、洗涤,干燥。将干燥产物在氮气保护下煅烧、温度为700~900℃,保温1~4小时,自然冷却。将制备的粉料,用模压成型,压力200MPa后,放入到热压炉进行烧结。烧结温度为1200~1300℃,保温时间为1小时。2 grams of yttrium nitrate and 26 grams of ZrOCl 2 ·8H 2 O are added to the mixed solution of ethanol and water with a volume ratio of 10-6:1, the solution concentration of ZrOCl 2 ·8H 2 O is 0.1-0.3 mol/liter, Stir well. Under stirring conditions, 11.82 g of MoS 2 powder particles were added into the above solution until MoS 2 was uniformly dispersed in the solution. Under the condition of stirring, the mixed solution is heated to 70-80° C., kept for 2-4 hours, cooled naturally to room temperature, and the pH value of the solution is adjusted to be greater than 9. The mixture was filtered, washed and dried. The dried product is calcined under the protection of nitrogen at a temperature of 700-900° C., kept for 1-4 hours, and cooled naturally. The prepared powder is molded with a pressure of 200 MPa, and put into a hot-press furnace for sintering. The sintering temperature is 1200-1300°C, and the holding time is 1 hour.

实施例2Example 2

将3克的硝酸钇和52克ZrOCl2·8H2O加入到乙醇和水的混合溶液,在搅拌条件下,将20克的MoS2粉体颗粒混合溶液内,按实施例1的工艺过程制备氧化钇稳定四方相氧化锆和二硫化钼复合材料。3 grams of yttrium nitrate and 52 grams of ZrOCl 2 8H 2 O are added to the mixed solution of ethanol and water, and under stirring conditions, 20 grams of MoS 2 powder particles are mixed in the solution, prepared according to the process of Example 1 Yttria stabilized tetragonal zirconia and molybdenum disulfide composites.

Claims (8)

1.一种自润滑陶瓷复合材料,其特征在于材料的重量份数由氧化钇2~8份,氧化锆100份,二硫化钼50~100份组成。1. A self-lubricating ceramic composite material, characterized in that the parts by weight of the material are composed of 2 to 8 parts of yttrium oxide, 100 parts of zirconia, and 50 to 100 parts of molybdenum disulfide. 2.一种自润滑陶瓷复合材料,其特征在于材料的显微结构:氧化钇稳定四方相氧化锆为连续相,二硫化钼自润滑相分散在氧化钇稳定四方相氧化锆中。2. A self-lubricating ceramic composite material, characterized in that the microstructure of the material: the yttria-stabilized tetragonal zirconia is the continuous phase, and the molybdenum disulfide self-lubricating phase is dispersed in the yttria-stabilized tetragonal zirconia. 3.如权利要求1所述材料的制备工艺,该工艺按下列顺序步骤进行:3. the preparation technology of material as claimed in claim 1, this technology is carried out in the following sequential steps: (1)将6~15份的硝酸钇和100份ZrOCl2·8H2O加入到乙醇和水的混合溶液中,在搅拌条件下,将50~100份的MoS2粉体颗粒加入到上述溶液内,直到MoS2在溶液中分散均匀;(1) Add 6-15 parts of yttrium nitrate and 100 parts of ZrOCl 2 ·8H 2 O into the mixed solution of ethanol and water, and add 50-100 parts of MoS 2 powder particles into the above solution under stirring conditions within until the MoS 2 is uniformly dispersed in the solution; (2)在搅拌条件下,将混合溶液加热到70~80℃,保温4~8小时,冷却到室温,调节溶液的PH值大于9;(2) Under stirring conditions, heat the mixed solution to 70-80°C, keep it warm for 4-8 hours, cool to room temperature, and adjust the pH value of the solution to be greater than 9; (3)将混合液进行过滤,并对过滤产物进行洗涤,干燥和煅烧;(3) filtering the mixed solution, and washing, drying and calcining the filtered product; (4)将制备的粉料,用模压成型,压力100~200MPa后,成型后的坯体放入到热压炉进行烧结。(4) The prepared powder is molded with a pressure of 100-200 MPa, and the formed green body is put into a hot-press furnace for sintering. 4.如权利要求3所述的制备工艺,其特征在于硝酸钇,ZrOCl2·8H2O,MoS2的纯度大于99%,其中MoS2的粒度为1~5μm。4. The preparation process according to claim 3, characterized in that the purity of yttrium nitrate, ZrOCl 2 ·8H 2 O, and MoS 2 is greater than 99%, and the particle size of MoS 2 is 1-5 μm. 5.如权利要求3所述的制备工艺,其特征在于乙醇和水的混合溶液中,乙醇的体积浓度为20~95%。5. The preparation process according to claim 3, characterized in that in the mixed solution of ethanol and water, the volume concentration of ethanol is 20-95%. 6.如权利要求3所述的制备工艺,其特征在于ZrOCl2·8H2O在乙醇和水的混合液中的浓度0.1~0.5摩尔/升。6. The preparation process according to claim 3, characterized in that the concentration of ZrOCl 2 ·8H 2 O in the mixture of ethanol and water is 0.1-0.5 mol/liter. 7.如权利要求3所述的制备工艺,其特征在于干燥产物在氮气保护下煅烧、温度为700~900℃,保温1~5小时。7. The preparation process according to claim 3, characterized in that the dried product is calcined under the protection of nitrogen at a temperature of 700-900° C. and kept for 1-5 hours. 8.如权利要求3所述的制备工艺,其特征在于复合材料的烧结温度为1200~1400℃,压力为20~40MPa,保温时间为0.5~2小时。8. The preparation process according to claim 3, characterized in that the sintering temperature of the composite material is 1200-1400° C., the pressure is 20-40 MPa, and the holding time is 0.5-2 hours.
CN 02150057 2002-11-19 2002-11-19 Self-lubricating ceramic composite material and its preparation process Pending CN1412150A (en)

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CN107082639A (en) * 2017-04-23 2017-08-22 南京云启金锐新材料有限公司 High-purity high-strength high-ductility zirconium oxide tungsten disulfide composite self-lubricating ceramics and preparation method thereof
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CN101293771B (en) * 2007-04-27 2013-06-26 应用材料公司 Apparatus and method for reducing the rate of corrosion of surfaces exposed to halogen-containing plasmas
CN103102157A (en) * 2007-04-27 2013-05-15 应用材料公司 Apparatus and method which reduce the erosion rate of surfaces exposed to halogen-containing plasmas
US11373882B2 (en) 2007-04-27 2022-06-28 Applied Materials, Inc. Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide
US10622194B2 (en) 2007-04-27 2020-04-14 Applied Materials, Inc. Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance
US10840112B2 (en) 2007-04-27 2020-11-17 Applied Materials, Inc. Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide
US10840113B2 (en) 2007-04-27 2020-11-17 Applied Materials, Inc. Method of forming a coated article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide
CN105294099A (en) * 2014-07-22 2016-02-03 中国科学院兰州化学物理研究所 A ZrO2–MoS2–CaF2 high temperature self-lubricating wear-resistant material
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US11014853B2 (en) 2018-03-07 2021-05-25 Applied Materials, Inc. Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments
US11667577B2 (en) 2018-03-07 2023-06-06 Applied Materials, Inc. Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments
CN108395246A (en) * 2018-05-15 2018-08-14 钱兴 A kind of preparation method of high tenacity oral cavity Nano ceramic powder material
CN115677385A (en) * 2022-10-25 2023-02-03 哈尔滨工业大学 Preparation method of abradable composite coating with ceramic matrix composite surface capable of resisting temperature up to 1300 DEG C
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