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CN1337665A - Plasma display panel and manufacturing method thereof - Google Patents

Plasma display panel and manufacturing method thereof Download PDF

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CN1337665A
CN1337665A CN00122500A CN00122500A CN1337665A CN 1337665 A CN1337665 A CN 1337665A CN 00122500 A CN00122500 A CN 00122500A CN 00122500 A CN00122500 A CN 00122500A CN 1337665 A CN1337665 A CN 1337665A
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layer
substrate
elongated
strip
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CN1171189C (en
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林钜山
何斌明
江滋邦
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AUO Corp
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Acer Display Technology Inc
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Abstract

一种等离子体显示面板及其制造方法,在等离子体显示面板的后基板上直接形成方格网状的阻隔壁、及在等离子体显示面板的前基板上形成对应于阻隔壁上凹陷缺口的柱状凸块,不仅制作工艺简单,而且前、后基板的对准也不困难。另外,在制作过程中依应用的所需,可轻易地调整方格阻隔壁的开口大小,以及凹陷缺口的尺寸。

Figure 00122500

A plasma display panel and a manufacturing method thereof, wherein a grid-shaped barrier wall is directly formed on the rear substrate of the plasma display panel, and a columnar protrusion corresponding to a recessed notch on the barrier wall is formed on the front substrate of the plasma display panel, not only the manufacturing process is simple, but also the alignment of the front and rear substrates is not difficult. In addition, during the manufacturing process, the opening size of the grid barrier wall and the size of the recessed notch can be easily adjusted according to the application requirements.

Figure 00122500

Description

等离子体显示面板 及其制造方法Plasma display panel and manufacturing method thereof

本发明涉及一种等离子体显示面板及其制造方法,特别是涉及一种其方格网状阻隔壁的结构及制造方法。The invention relates to a plasma display panel and a manufacturing method thereof, in particular to a structure and a manufacturing method of a grid-shaped barrier wall thereof.

等离子体显示面板(Plasma Display Panel;以下简称为PDP)的阻隔壁(rib),一般多使用长条状(strip)的结构。目前也有采用方格网状结构的,如NEC公司在其美国专利(US 5701056)中所揭露的。然而,NEC所揭示的结构,是在PDP的后基板上形成长条状阻隔壁,并在前基板上形成方格网状的阻隔壁,再将前、后两基板组合后而构成;如图1所示。仔细考虑NEC所揭露的结构,仍然有如下四项缺点有待克服。The barrier rib (rib) of a plasma display panel (Plasma Display Panel; hereinafter referred to as PDP) generally adopts a strip structure. At present, there are also those that adopt a grid structure, as disclosed by NEC Corporation in its U.S. Patent (US 5701056). However, the structure disclosed by NEC is formed by forming a strip-shaped barrier wall on the rear substrate of the PDP, and forming a grid-shaped barrier wall on the front substrate, and then combining the front and rear substrates; as shown in the figure 1. Considering carefully the structure disclosed by NEC, there are still four shortcomings to be overcome as follows.

NEC的结构,由于前基板多了一道阻隔壁的制作工艺,所以成本相对而言较高。The structure of NEC, because the front substrate has an extra barrier rib manufacturing process, so the cost is relatively high.

在前、后基板组合时,两者对准的精度要求相当严格,因此加深制作工艺的困难度。When the front and rear substrates are combined, the alignment accuracy of the two is very strict, which increases the difficulty of the manufacturing process.

为了确保前、后基板能够精确对准,常需加大后基板、或是前基板阻隔壁的厚度。因此,也牺牲PDP的开口率。In order to ensure accurate alignment of the front and rear substrates, it is often necessary to increase the thickness of the rear substrate or the barrier wall of the front substrate. Therefore, the aperture ratio of the PDP is also sacrificed.

由于阻隔壁的厚度,连带使得涂布萤光体的有效面积变小。Due to the thickness of the barrier wall, the effective area of the coated phosphor is reduced.

本发明的目的在于提出一种等离子体显示面板的结构及其制造方法,其方格网状阻隔壁不仅制作工艺简单,且可以克服NEC所遭遇的问题。The object of the present invention is to provide a plasma display panel structure and a manufacturing method thereof, the grid-shaped barrier ribs of which not only have a simple manufacturing process, but also can overcome the problems encountered by NEC.

本发明的另一目的为提出PDP方格网状阻隔壁的制造方法,可通过简单的步骤来限定所需要的凹陷缺口的大小。Another object of the present invention is to provide a method for manufacturing PDP grid-shaped barrier ribs, which can define the required size of the recessed gaps through simple steps.

本发明的目的是这样实现的,即提供一种等离子体显示面板,该等离子体显示面板包括:一第一基板;一第二基板,与该第一基板彼此平行地配置,使该第一基板与该第二基板之间形成一放电空间;及一方格网状阻隔壁形成在该第一基板上,该方格网状阻隔壁包括有多个第一长条区域,该多个第一长条区域将该放电空间限定成多个列放电空间;多个第二长条区域,每一上述第二长条区域交错于每一上述第一长条区域,且在每一上述列放电空间内,每一上述第二长条区域具有一凹陷缺口,使气体可通过该凹陷缺口而在该列放电空间中流通。The purpose of the present invention is achieved by providing a plasma display panel, which includes: a first substrate; a second substrate, arranged parallel to the first substrate, so that the first substrate A discharge space is formed between the second substrate; and a grid-shaped barrier wall is formed on the first substrate, and the grid-shaped barrier wall includes a plurality of first strip regions, and the plurality of first long strips The strip area defines the discharge space into a plurality of column discharge spaces; a plurality of second strip areas, each of the above-mentioned second strip areas is interlaced with each of the above-mentioned first strip areas, and in each of the above-mentioned column discharge spaces Each of the above-mentioned second elongated regions has a recessed gap, so that the gas can pass through the recessed gap to circulate in the row of discharge spaces.

本发明还提供一种等离子体显示面板的制造方法,包括:提供一第一基板,该第一基板上设置有一抽气孔;在该第一基板上形成多个长条状电极,每一上述长条状电极平行于一第一方向;在上述长条状电极和上述第一基板上形成一覆盖层;提供一第二基板,与该第一基板彼此平行地配置,使该第一基板与该第二基板之间形成一放电空间,该放电空间与该抽气孔导通;在该第一基板上形成一方格网状阻隔壁,该方格网状阻隔壁包括有多个第一长条区域,该多个第一长条区域将该放电空间限定成多个列放电空间,多个第二长条区域,每一上述第二长条区域交错在每一上述第一长条区域,且在每一上述列放电空间内,每一上述第二长条区域具有一凹陷缺口,使气体可通过该凹陷缺口而在该列放电空间中流通;将该第一基板的周缘与该第二基板的周缘结合,以密封该放电空间;通过该抽气孔对该放电空间进行抽气,使在该列放电空间中气体通过该凹陷缺口而自该抽气口抽出。The present invention also provides a method for manufacturing a plasma display panel, including: providing a first substrate, on which an air extraction hole is provided; forming a plurality of strip-shaped electrodes on the first substrate, and each The strip-shaped electrodes are parallel to a first direction; a covering layer is formed on the above-mentioned strip-shaped electrodes and the above-mentioned first substrate; a second substrate is provided, arranged parallel to the first substrate, so that the first substrate and the first substrate A discharge space is formed between the second substrates, and the discharge space is connected to the air extraction hole; a grid-shaped barrier wall is formed on the first substrate, and the grid-shaped barrier wall includes a plurality of first strip regions , the plurality of first strip areas define the discharge space into a plurality of column discharge spaces, a plurality of second strip areas, each of the above-mentioned second strip areas is interlaced with each of the above-mentioned first strip areas, and in In each of the above-mentioned row discharge spaces, each of the above-mentioned second elongated regions has a recessed gap, so that the gas can pass through the recessed gap and circulate in the row discharge space; the periphery of the first substrate and the edge of the second substrate The peripheral edge is combined to seal the discharge space; the discharge space is pumped through the air pumping hole, so that the gas in the row of discharge spaces passes through the concave gap and is drawn out from the gas pumping port.

下面结合附图,详细说明本发明的实施例,其中:Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, wherein:

图1为NEC所揭露的PDP阻隔壁的结构图;Figure 1 is a structural diagram of the PDP barrier disclosed by NEC;

图2A至图2E为形成方格网状阻隔壁第一种制造方法的立体剖面流程图;2A to 2E are three-dimensional cross-sectional flow charts of the first manufacturing method for forming a grid-like barrier wall;

图3A为PDP前后基板部分结构的组合示意图;3A is a combined schematic diagram of the partial structure of the front and rear substrates of the PDP;

图3B为图3A组合完成后,沿A-A′方向的剖视图;Figure 3B is a cross-sectional view along the A-A' direction after the combination of Figure 3A is completed;

图4A至图4B为形成方格网状阻隔壁第二种制造方法的立体剖面流程图;4A to 4B are three-dimensional cross-sectional flow charts of the second manufacturing method for forming a grid-like barrier wall;

图5A至图5C为形成方格网状阻隔壁第三种制造方法的立体剖面流程图;5A to 5C are three-dimensional cross-sectional flowcharts of a third manufacturing method for forming a grid-like barrier wall;

图6A至图6D为形成方格网状阻隔壁第四种制造方法的立体剖面流程图。6A to 6D are three-dimensional cross-sectional flow charts of a fourth manufacturing method for forming grid-like barrier ribs.

参照图3A、图3B,图3A显示PDP前后基板部分结构的组合示意图;图3B显示图3A组合完成后,沿A-A′方向的剖视图。本发明所揭露的等离子体显示面板,包括:一第一基板300;一第二基板304,与上述第一基板300彼此平行地配置,以此使上述第一基板300与上述第二基板304之间形成一放电空间。其中,上述第一基板300上,形成有方格网状阻隔壁302;上述第二基板304上,形成有多柱状凸块312,以及一抽气孔316。Referring to FIG. 3A and FIG. 3B , FIG. 3A shows a schematic diagram of the assembly of the front and rear substrate structures of the PDP; FIG. 3B shows a cross-sectional view along the A-A' direction after the assembly of FIG. 3A is completed. The plasma display panel disclosed in the present invention includes: a first substrate 300; a second substrate 304 arranged parallel to the first substrate 300, so that the relationship between the first substrate 300 and the second substrate 304 A discharge space is formed between them. Wherein, on the above-mentioned first substrate 300 , a grid-shaped barrier wall 302 is formed; on the above-mentioned second substrate 304 , a multi-column bump 312 and an air extraction hole 316 are formed.

上述第一基板300上的方格网状阻隔壁302包括有:The grid-shaped barrier ribs 302 on the first substrate 300 include:

多个第一长条区域3021,该多个第一长条区域3021将该放电空间限定成多个列放电空间308;A plurality of first strip regions 302 1 , the plurality of first strip regions 302 1 define the discharge space into a plurality of column discharge spaces 308;

多个第二长条区域3022,每一上述第二长条区域3022交错于每一上述第一长条区域3021,且在每一上述列放电空间308内,每一上述第二长条区域3022具有一凹陷缺口306,使气体可通过该凹陷缺口306而在该列放电空间中流通。A plurality of second strip regions 302 2 , each of the above-mentioned second strip regions 302 2 is interlaced with each of the above-mentioned first strip regions 302 1 , and in each of the above-mentioned row discharge spaces 308, each of the above-mentioned second strip regions The strip region 302 2 has a recessed notch 306 , so that the gas can flow through the recessed notch 306 in the column discharge space.

上述第二基板304上的多个柱状凸块312,形成相对于上述第一基板300上凹陷缺口306的位置;而且,上述柱状凸块的突出高度为H2小于上述凹陷缺口306的深度H1A plurality of columnar bumps 312 on the second substrate 304 form a position relative to the concave notch 306 on the first substrate 300; moreover, the protruding height of the columnar bumps is H 2 less than the depth H 1 of the concave notch 306 .

因此(参照图3B),当上述第一基板300与上述第二基板304组合时,上述第二基板304上的柱状凸块312在嵌入上述第一基板300上的凹陷缺口306内时,会在上述凹陷缺口306中保留一通道314,使气体仍可通过该通道314而在该列放电空间中流通。Therefore (see FIG. 3B ), when the above-mentioned first substrate 300 is combined with the above-mentioned second substrate 304, when the stud bump 312 on the above-mentioned second substrate 304 is embedded in the recessed notch 306 on the above-mentioned first substrate 300, it will A channel 314 remains in the above-mentioned recessed gap 306, so that the gas can still pass through the channel 314 and circulate in the row of discharge spaces.

本发明提出的等离子体显示面板的制造方法,则包括下列步骤:The manufacturing method of the plasma display panel that the present invention proposes, then comprises the following steps:

(9)提供第一基板300,该第一基板300上设置有一抽气孔316。(9) The first substrate 300 is provided, and the first substrate 300 is provided with an air extraction hole 316 .

(10)在该第一基板300上形成多个长条状电极(未图示于图3A~3B),每一上述长条状电极平行于一第一方向。(10) Forming a plurality of strip-shaped electrodes (not shown in FIGS. 3A-3B ) on the first substrate 300 , each of the strip-shaped electrodes being parallel to a first direction.

(11))在上述长条状电极和上述第一基板300上形成一覆盖层(未图示于图3A~3B)。(11)) A covering layer (not shown in FIGS. 3A-3B ) is formed on the elongated electrodes and the first substrate 300 .

(12)提供一第二基板304,该第二基板与该第一基板300互相平行地设置;该第一基板300与该第二基板304之间形成一放电空间,该放电空间与该抽气孔316导通。(12) A second substrate 304 is provided, and the second substrate and the first substrate 300 are arranged parallel to each other; a discharge space is formed between the first substrate 300 and the second substrate 304, and the discharge space and the air extraction hole 316 is turned on.

(13)在该第一基板300上形成一方格网状阻隔壁302,该方格网状阻隔壁302包括有多个第一长条区域3021与多个第二长条区域3022,该多个第一长条区域3021将该放电空间限定成多个列放电空间308,每一上述第二长条区域3022交错于每一上述第一长条区域3021;且在每一上述列放电空间308内,每一上述第二长条区域3022具有一凹陷缺口306,该第二长条区域3022的该凹陷缺口306具有一凹陷深度H1,使气体可通过该凹陷缺口306而在该列放电空间308中流通。(13) A grid-like barrier wall 302 is formed on the first substrate 300, and the grid-like barrier wall 302 includes a plurality of first elongated regions 302 1 and a plurality of second elongated regions 302 2 . A plurality of first strip regions 302 1 define the discharge space into a plurality of column discharge spaces 308, each of the above-mentioned second strip regions 302 2 is interlaced with each of the above-mentioned first strip regions 302 1 ; and in each of the above-mentioned In the column discharge space 308, each of the above-mentioned second elongated regions 3022 has a recessed notch 306, and the recessed notch 306 of the second elongated region 30222 has a recessed depth H1 , so that the gas can pass through the recessed notch 306 And flow in the column discharge space 308 .

(14)在该第二基板304上形成多个柱状凸块312,该柱状凸块312形成在相对应该第一基板300上该凹陷缺口306的位置,该柱状凸块312具有一突出高度H2,且该突出高度H2小于该凹陷深度H1(14) A plurality of columnar bumps 312 are formed on the second substrate 304, the columnar bumps 312 are formed at positions corresponding to the recessed notches 306 on the first substrate 300, and the columnar bumps 312 have a protruding height H2 , and the protrusion height H 2 is smaller than the depression depth H 1 .

(15)将该第一基板300的周缘与该第二基板304的周缘结合,以密封该放电空间,使该第二基板304上的该柱状凸块312会嵌入该第一基板300上的部分该凹陷缺口306,且在该凹陷缺口306中保留一通道314,使气体仍可通过该通道314而在该列放电空间308中流通。(15) Combining the peripheral edge of the first substrate 300 with the peripheral edge of the second substrate 304 to seal the discharge space, so that the stud bump 312 on the second substrate 304 will be embedded in the first substrate 300 The notch 306 is recessed, and a channel 314 is reserved in the notch 306 , so that the gas can still circulate in the row of discharge spaces 308 through the channel 314 .

(16)通过该抽气孔316对该放电空间进行抽气,使在该列放电空间308中气体通过该通道314并从该抽气口316被抽出该放电空间之外。(16) Pump the discharge space through the pump hole 316 , so that the gas in the row of discharge spaces 308 passes through the channel 314 and is drawn out of the discharge space from the pump port 316 .

上述柱状凸块312的制作工艺可为:在第二基板304涂布表面保护层(MgO)的前,先利用网印或光学蚀刻制作工艺在第二基板304半成品表面上生成若干柱状突出物;最后一道MgO涂布后,在对应柱状突出物处即会形成该柱状凸块312。The manufacturing process of the columnar bump 312 can be: before the surface protection layer (MgO) is coated on the second substrate 304, a number of columnar protrusions are formed on the semi-finished surface of the second substrate 304 by using a screen printing or optical etching process; After the last MgO coating, the stud bumps 312 are formed at the corresponding stud protrusions.

本实施例中,各像素放电空间由第一长条区域3021与第二长条区域3022加以隔离,只有通道314连接属于同一列放电空间308的各像素放电空间,且通过该柱状凸块312高度H2的限制,使该通道314距离前基板304表面至少有H2距离。因为各像素放电空间在紧邻前基板304表面处有柱状凸块312加以阻隔,如此可减少在驱动信号维持周期(Sustain Period)中,前板X-Y电极往复驱动电离气体时,不同像素间的干涉(cross talk)现象。但该柱状凸块312为一可省略的结构,各像素放电空间也可仅依靠第一长条区域3021与第二长条区域3022来加以隔绝,如此也有减低像素间干扰的效果。In this embodiment, each pixel discharge space is isolated by the first strip region 3021 and the second strip region 3022 , and only the channel 314 is connected to each pixel discharge space belonging to the same row of discharge spaces 308, and passes through the columnar bump The height H 2 of 312 is limited such that the channel 314 is at least H 2 away from the surface of the front substrate 304 . Because the discharge space of each pixel is blocked by the columnar bump 312 adjacent to the surface of the front substrate 304, this can reduce the interference between different pixels when the XY electrodes on the front board drive the ionized gas back and forth during the sustain period of the driving signal (Sustain Period). cross talk) phenomenon. However, the stud bump 312 is a structure that can be omitted, and the discharge space of each pixel can also be isolated only by the first strip region 302 1 and the second strip region 302 2 , which also has the effect of reducing the interference between pixels.

在上述第一基板(后基板)上形成方格网状阻隔壁,有如下四种制造方法。【第一方法】There are four manufacturing methods for forming grid-like barrier ribs on the above-mentioned first substrate (rear substrate). 【First method】

图2A至图2E显示本发明形成方格网状阻隔壁第一种制造方法的立体剖面流程图。2A to FIG. 2E show a three-dimensional cross-sectional flow chart of the first manufacturing method for forming a grid-like barrier wall according to the present invention.

首先,提供一基板200;其中,在上述基板200上设置有多个长条状电极202,每一上述长条状电极200平行于一第一方向(以箭头D表示)。在此实施例中为简洁起见,仅图示两个长条状电极。First, a substrate 200 is provided; wherein, a plurality of strip-shaped electrodes 202 are disposed on the substrate 200 , and each of the strip-shaped electrodes 200 is parallel to a first direction (indicated by an arrow D). In this embodiment, for the sake of brevity, only two strip-shaped electrodes are shown.

接着在上述长条状电极202和上述基板200上形成覆盖层(overcoatlayer)204;如图2A所示。Next, an overcoat layer 204 is formed on the elongated electrodes 202 and the substrate 200 ; as shown in FIG. 2A .

在上述覆盖层204上再形成塑形层206。如图2B所示,上述塑形层206的表面形成有多个长条状凸出部分206a;每一上述凸出部分206a位于每两个上述长条状电极202间区域的中央,且平行于上述第一方向。A shaping layer 206 is further formed on the covering layer 204 . As shown in Figure 2B, the surface of the above-mentioned plastic layer 206 is formed with a plurality of strip-shaped protruding parts 206a; each of the above-mentioned protruding parts 206a is located in the center of the area between every two above-mentioned strip-shaped electrodes 202, and is parallel to the first direction above.

在此实施例中,图2B所示的塑形层206有如下两种可能的制作方式。In this embodiment, the shaping layer 206 shown in FIG. 2B has two possible fabrication methods as follows.

(1)第一种方式:先以整面印刷(solid print),在上述覆盖层204上印制多层(例如7~8层)浆料,烘烤(baking)后即形成平台部分206b。接着,再使用网版印刷(pattern print),印制1~3层浆料,烘烤(baking)后形成上述长条状凸出部分206a。(1) The first method: First, print a solid print on the cover layer 204 to print multiple layers (for example, 7-8 layers) of paste, and form the platform part 206b after baking. Next, use pattern printing to print 1-3 layers of paste, and form the above-mentioned elongated protruding portion 206a after baking.

(2)第二种方式:先使用网版印刷,印制1~3层浆料;烘烤后,沿上述第一方向形成多个长条状凸出区,以此作为长条状凸出部分206a的底部。再进行整面印刷,在上述覆盖层204上和上述长条状凸出区上印制多层(例如7~8层)浆料,烘烤(baking)后即形成如图2B所示的上述塑形层206。(2) The second method: first use screen printing to print 1 to 3 layers of paste; after baking, form a plurality of strip-shaped protruding areas along the above-mentioned first direction, and use them as strip-shaped protruding areas. the bottom of portion 206a. Then perform full-surface printing, and print multiple layers (for example, 7 to 8 layers) of paste on the above-mentioned covering layer 204 and on the above-mentioned elongated protruding area, and after baking (baking), the above-mentioned Shaping layer 206 .

完成上述塑形层206后,以压膜的方式在上述塑形层上形成干膜光致抗蚀剂层。After the shaping layer 206 is completed, a dry film photoresist layer is formed on the shaping layer by pressing a film.

接着,曝光、显影上述干膜光致抗蚀剂层,而在上述塑形层206上形成限定遮罩208。上述限定遮罩208,如图2C所示,具有方格网状的结构,包括多个第一长条区2081,以及多个第二长条区2082;每一上述第一长条区2081平行于该第一方向并形成在一上述长条状凸出部分206a上;每一上述第二长条区2082垂直于上述第一方向并在多个长条状凸出部分206a与平台部分206b上形成交错。Next, exposing and developing the above-mentioned dry film photoresist layer to form a limited mask 208 on the above-mentioned shaping layer 206 . The above-mentioned limiting mask 208, as shown in FIG. 2C, has a grid-like structure, including a plurality of first strip regions 208 1 , and a plurality of second strip regions 208 2 ; each of the above-mentioned first strip regions 208 1 is parallel to the first direction and formed on one of the elongated protruding portions 206a; each of the above-mentioned second elongated regions 208 2 is perpendicular to the first direction and formed between a plurality of elongated protruding portions 206a and A stagger is formed on the land portion 206b.

进行喷砂(sand blast)程序,去除露出于上述限定遮罩208外的塑形层206,直到露出上述覆盖层204,而形成方格网状阻隔壁212(包括:多个第一长条壁区2121和多个第二长条壁区2122);如图2D所示。Carry out sandblasting (sand blast) process, remove the plastic layer 206 that is exposed outside the above-mentioned limiting mask 208, until the above-mentioned cover layer 204 is exposed, and form grid-like barrier walls 212 (comprising: a plurality of first elongated walls region 212 1 and a plurality of second elongated wall regions 212 2 ); as shown in FIG. 2D .

在完成阻隔壁后,将上述限定遮罩208(即显影后的干膜光致抗蚀剂)去除,再印上萤光体210,即作为PDP的后基板;如图2E所示。应注意的是:在阻隔壁212中的每一个第二长条壁区2122上,形成有凹陷缺口209。After the barrier ribs are completed, the above-mentioned limiting mask 208 (that is, the developed dry film photoresist) is removed, and then the phosphor 210 is printed on, that is, the rear substrate of the PDP; as shown in FIG. 2E . It should be noted that: on each of the second elongated wall regions 212 2 in the barrier walls 212, a recessed notch 209 is formed.

最后,上述后基板,与一前基板组合后,即可以进行后续程序。Finally, after the above-mentioned rear substrate is combined with a front substrate, subsequent procedures can be performed.

依据本发明的方法,参照图2C、图2E可知,分别变化(上述遮罩层208)第一长条区2081的宽度L1和上述第二长条区2082的宽度L2,可调整阻隔壁的厚度,从而影响每一个像素方格大小,而获得适当的开口率。According to the method of the present invention, referring to Fig. 2C and Fig. 2E, it can be seen that the barrier can be adjusted by changing the width L 1 of the first elongated region 2081 and the width L 2 of the second elongated region 2082 (the mask layer 208) respectively . The thickness of the wall, thereby affecting the size of each pixel grid, and obtaining an appropriate aperture ratio.

另外,参照图2C、图2E可知,分别变化上述塑形层206的平台部分206b的宽度L3和高度L4,即可以控制上述凹陷缺口209的宽度和深度。【第二方法】In addition, referring to FIG. 2C and FIG. 2E , changing the width L 3 and the height L 4 of the platform portion 206 b of the shaping layer 206 respectively can control the width and depth of the concave notch 209 . 【Second Method】

图4A至图4B显示本发明形成方格网状阻隔壁第二种制造方法的立体剖面流程图。4A to 4B show a three-dimensional cross-sectional flowchart of a second manufacturing method for forming a grid-like barrier wall according to the present invention.

首先,提供一基板400;其中,在上述基板400上设置有多个长条状电极402,每一上述长条状电极402平行于一第一方向(以箭头D表示)。在此实施例中为简洁起见,仅图示两个长条状电极。First, a substrate 400 is provided; wherein, a plurality of strip-shaped electrodes 402 are disposed on the substrate 400 , and each of the strip-shaped electrodes 402 is parallel to a first direction (indicated by an arrow D). In this embodiment, for the sake of brevity, only two strip-shaped electrodes are shown.

在上述长条状电极402和上述基板400上形成覆盖层404。A covering layer 404 is formed on the elongated electrodes 402 and the substrate 400 .

接着,使用网版印刷(pattern print),以在上述覆盖层404上形成方格网状的塑形层406,即构成PDP的方格网状阻隔壁。如图4A所示,上述塑形层406包括多个第一长条区406a,以及多个第二长条区406b。每一上述第一长条区406a位于每两个上述长条状电极402间的上述覆盖层404上,且平行于上述第一方向;每一上述第二长条区406b平行于第一方向,并垂直于上述第一方向,与多个条长条状电极402交错。Next, pattern printing is used to form a grid-shaped shaping layer 406 on the covering layer 404, that is, the grid-shaped barrier walls of the PDP are formed. As shown in FIG. 4A , the shaping layer 406 includes a plurality of first elongated regions 406 a and a plurality of second elongated regions 406 b. Each of the first elongated regions 406a is located on the covering layer 404 between every two elongated electrodes 402 and is parallel to the first direction; each of the second elongated regions 406b is parallel to the first direction, And perpendicular to the above-mentioned first direction, intersecting with a plurality of strip-shaped electrodes 402 .

上述塑形层406以网版印刷,在上述覆盖层404上印制多层(例如7~8层)浆料,经烘烤后而形成。由于该多个长条状电极402高度较低,因此网印多层后,该塑形层第二长条区406b顶部仍接近为一平坦表面。The shaping layer 406 is screen-printed, and multiple layers (for example, 7-8 layers) of paste are printed on the covering layer 404, and then formed after being baked. Since the plurality of elongated electrodes 402 are relatively low in height, after multi-layer screen printing, the top of the second elongated region 406b of the shaping layer is still close to a flat surface.

最后,使用网版印刷,形成多个第三长条区407分别形成在每一上述第一长条区406a上。完成烘烤后,第三长条区407即成为第一长条区406a的顶部壁部分。又,每两个第三长条区407和任一第二长条区406b,构成凹陷缺口;以此,当前、后基板组合后,气体可通过该凹陷缺口并在每个列放电空间中流通。Finally, a plurality of third elongated regions 407 are formed on each of the above-mentioned first elongated regions 406a by screen printing. After the baking is completed, the third elongated area 407 becomes the top wall portion of the first elongated area 406a. Also, every two third elongated regions 407 and any second elongated region 406b form a recessed gap; thus, after the front and rear substrates are combined, the gas can pass through the recessed gap and circulate in each column discharge space .

上述第三长条区407,使用网版印刷,印制多层长条状浆料层,经烘烤后而形成。【第三方法】The above-mentioned third elongated area 407 is formed by printing multiple elongated paste layers by screen printing and baking. 【Third method】

图5A至图5C显示本发明形成方格网状阻隔壁第三种制造方法的立体剖面流程图。5A to FIG. 5C show a three-dimensional cross-sectional flowchart of a third manufacturing method for forming a grid-like barrier wall according to the present invention.

首先,提供一基板500;其中,在上述基板500上设置有多个长条状电极502,每一上述长条状电极502平行于一第一方向(以箭头D表示)。在此实施例中为简明起见,仅图示两个长条状电极。First, a substrate 500 is provided; wherein, a plurality of strip-shaped electrodes 502 are disposed on the substrate 500 , and each of the strip-shaped electrodes 502 is parallel to a first direction (indicated by an arrow D). In this embodiment, for simplicity, only two strip-shaped electrodes are shown.

在上述多长条状电极502和上述基板500上形成覆盖层504。在上述覆盖层504上再形成塑形层506;如图5A所示。在此实施例中,上述塑形层506的制作,是以整面印刷(solid print)的方式,在上述覆盖层504上印制多层(例如7~8层)浆料,经烘烤后而完成。A covering layer 504 is formed on the multi-strip electrodes 502 and the substrate 500 . A shaping layer 506 is then formed on the covering layer 504; as shown in FIG. 5A. In this embodiment, the above-mentioned plastic layer 506 is made by printing multiple layers (for example, 7-8 layers) of paste on the above-mentioned covering layer 504 by means of solid printing, and after baking And done.

在上述塑形层506上形成干膜光致抗蚀剂层。A dry film photoresist layer is formed on the above-mentioned shaping layer 506 .

曝光、显影上述干膜光致抗蚀剂层,并在上述塑形层506上形成限定遮罩508。如图5B所示,上述限定遮罩508包括多个第一长条区5081,以及多第二长条区5082。每一上述第一长条区5081平行于上述第一方向,位于每两个上述长条状电极502间上述塑形层506上。每一上述第二长条区5082沿第二方向延伸,并垂直于每一上述第一长条区5081;每一上述第二长条区5082在介于每两个第一长条区5081之间处形成有断开区CR,以露出上述塑形层506。exposing and developing the dry film photoresist layer, and forming a limited mask 508 on the shaping layer 506 . As shown in FIG. 5B , the definition mask 508 includes a plurality of first strip regions 508 1 and a plurality of second strip regions 508 2 . Each of the above-mentioned first elongated regions 508 1 is parallel to the above-mentioned first direction and located on the above-mentioned plastic layer 506 between every two of the above-mentioned elongated electrodes 502 . Each of the above-mentioned second strip regions 508 2 extends along the second direction and is perpendicular to each of the above-mentioned first strip regions 508 1 ; each of the above-mentioned second strip regions 508 2 is between every two first strip regions A disconnection region CR is formed between the regions 5081 to expose the above-mentioned shaping layer 506 .

最后,进行喷砂程序,去除露出于上述限定遮罩508外的塑形层506,露出覆盖层504,而形成方格网状的阻隔壁512(包括多个第一长条壁区5121和多个第二长条壁区5122);如图5C所示。其中,因为断开区CR的宽度L7远小于方格网状开口的尺寸,因此其喷砂时所侵蚀的深度将远小于方格网状开口区域所被侵蚀的深度;因此在每一断开区CR内仍残留有部分塑形层506;通过断开区CR的限定,而在阻隔壁上形成凹陷缺口510。Finally, a sandblasting process is performed to remove the shaping layer 506 exposed outside the above-mentioned limiting mask 508, exposing the covering layer 504, and forming a grid-like barrier wall 512 (including a plurality of first elongated wall regions 5121 and A plurality of second elongated wall regions 512 2 ); as shown in FIG. 5C . Wherein, because the width L 7 of the disconnected area CR is much smaller than the size of the grid-shaped opening, the depth of erosion during sandblasting will be much smaller than the eroded depth of the grid-shaped opening area; A part of the plastic layer 506 remains in the open region CR; a recessed gap 510 is formed on the barrier wall by the boundary of the disconnected region CR.

依据本发明的方法,参照图5B、图5C可知,分别变化上述第一长条区5081的宽度L5和上述第二长条区5082的宽度L6,可调整阻隔壁512的方格大小,而获得适当的开口率。According to the method of the present invention, referring to FIG. 5B and FIG. 5C, it can be seen that the grid of the barrier wall 512 can be adjusted by changing the width L 5 of the first elongated region 508 1 and the width L 6 of the second elongated region 508 2 respectively. size to obtain an appropriate aperture ratio.

通过变化上述断开区的宽度L7,即可调整凹陷缺口510的宽度尺寸。【第四方法】By changing the width L 7 of the disconnected area, the width of the recessed notch 510 can be adjusted. 【Fourth method】

图6A至图6D显示本发明形成方格网状阻隔壁第四种制造方法的立体剖面流程图。6A to FIG. 6D show a three-dimensional cross-sectional flowchart of a fourth manufacturing method for forming a grid-like barrier wall according to the present invention.

首先,提供一基板600;其中,在上述基板600上设置有多个长条状电极602,每一上述长条状电极平行于一第一方向(以箭头D表示)。在此实施例中为简明起见,仅图示两个长条状电极。Firstly, a substrate 600 is provided; wherein, a plurality of strip-shaped electrodes 602 are disposed on the substrate 600 , and each of the strip-shaped electrodes is parallel to a first direction (indicated by an arrow D). In this embodiment, for simplicity, only two strip-shaped electrodes are shown.

在上述长条状电极602和上述基板600上形成覆盖层604。A covering layer 604 is formed on the elongated electrodes 602 and the substrate 600 .

在上述覆盖层604上形成塑形层606;如图6A所示。在此实施例中,上述塑形层606的制作,以整面印刷的方式,在上述覆盖层604上印制多层(例如7~8层)浆料,经烘烤后而完成。A shaping layer 606 is formed on the covering layer 604; as shown in FIG. 6A. In this embodiment, the shaping layer 606 is fabricated by printing multiple layers (for example, 7-8 layers) of paste on the cover layer 604 in a full-surface printing manner, and then it is completed after being baked.

接着,在上述塑形层606上形成方格网状的感光限定层608。如图6B所示,上述感光限定层608包括多个第一长条区6081,以及多个第二长条区6082。每一上述第一长条区6081位于每两个上述长条状电极602间的上述塑形层606上,且平行于上述第一方向。每一上述第二长条区6082平行于一第二方向,并垂直于上述第一方向。上述第一长条区6081的高度大于上述第二长条区6082的高度。Next, a grid-like photosensitive limiting layer 608 is formed on the above-mentioned shaping layer 606 . As shown in FIG. 6B , the photosensitive defined layer 608 includes a plurality of first elongated regions 608 1 and a plurality of second elongated regions 608 2 . Each of the first elongated regions 608 1 is located on the shaping layer 606 between every two elongated electrodes 602 and is parallel to the first direction. Each of the above-mentioned second elongated regions 608 2 is parallel to a second direction and perpendicular to the above-mentioned first direction. The height of the first elongated area 608 1 is greater than the height of the second elongated area 608 2 .

上述感光限定层608的材质,由感光物质和浆料混合而构成。另外,在此实施例中,感光限定层608有如下两种可能的制作方式。The material of the photosensitive defined layer 608 is formed by mixing photosensitive material and slurry. In addition, in this embodiment, the photosensitive limiting layer 608 has the following two possible fabrication methods.

(1)第一种方式:先使用网版印刷(pattern print),在上述塑形层606上印制多层方格网状的第一感光限定层,使成为第二长条区6082与第一长条区6081底部;接着再使用网版印刷,沿上述第一方向在上述第一感光限定层上印制条状的第二感光限定层,使成为第一长条区6081的顶部,如此而形成如图6B所示的感光限定层608。(1) The first method: use screen printing (pattern print) first, and print a multi-layer grid-like first photosensitive limiting layer on the above-mentioned plastic layer 606, so that it becomes the second strip area 608 2 and The bottom of the first elongated area 608 1 ; then use screen printing to print a strip-shaped second photosensitive defined layer on the first photosensitive defined layer along the first direction, so that the first elongated area 608 1 The top, thus forming a photosensitive limiting layer 608 as shown in FIG. 6B.

(2)第二种方式:使用网版印刷,沿上述第一方向在上述塑形层606上印制多层条状的第二感光限定层,使成为第一长条区6081底部;再使用网版印刷,在上述第二感光限定层上印制多层的方格网状的第一感光限定层,并形成如图6B所示的感光限定层608。(2) The second method: use screen printing to print a multi-layer strip-shaped second photosensitive limiting layer on the above-mentioned plastic layer 606 along the above-mentioned first direction, so that it becomes the bottom of the first strip area 6081 ; Using screen printing, a multi-layer grid-shaped first photosensitive defined layer is printed on the above-mentioned second photosensitive defined layer to form a photosensitive defined layer 608 as shown in FIG. 6B .

接着,以紫外线UV对上述感光限定层608进行曝光,在上述塑形层606上以形成限定遮罩610;如图6C所示。Next, the photosensitive defined layer 608 is exposed with ultraviolet rays to form a defined mask 610 on the shaped layer 606 ; as shown in FIG. 6C .

最后,进行喷砂程序,去除露出于上述限定遮罩610外的塑形层606,以露出上述覆盖层604,并形成方格网状的阻隔壁;如图6D所示。Finally, a sandblasting process is performed to remove the shaping layer 606 exposed outside the limiting mask 610 to expose the covering layer 604 and form a grid-like barrier wall; as shown in FIG. 6D .

综上所述,本发明所揭露的等离子体显示面板,包括:一第一基板(后基板);一第二基板(前基板),与上述第一基板彼此平行地配置,以此使上述第一基板与上述第二基板之间形成一放电空间。其中,上述第一基板上,形成有方格网状阻隔壁;上述第二基板上,形成有多柱状凸块,以及一抽气孔。To sum up, the plasma display panel disclosed by the present invention includes: a first substrate (rear substrate); a second substrate (front substrate), arranged parallel to the first substrate, so that the first substrate A discharge space is formed between a substrate and the second substrate. Wherein, on the above-mentioned first substrate, a grid-shaped barrier wall is formed; on the above-mentioned second substrate, there are formed a multi-column bump and an air extraction hole.

上述第一基板上的方格网状阻隔壁包括有:多个第一长条区域,该多个第一长条区域将该放电空间限定成多个列放电空间;多个第二长条区域,每一上述第二长条区域交错于每一上述第一长条区域,且于每一上述列放电空间内,每一上述第二长条区域具有一凹陷缺口,使气体可通过该凹陷缺口而在该列放电空间中流通。The grid-shaped barrier walls on the first substrate include: a plurality of first strip regions, and the plurality of first strip regions define the discharge space into a plurality of column discharge spaces; a plurality of second strip regions , each of the above-mentioned second elongated regions is interlaced with each of the above-mentioned first elongated regions, and in each of the above-mentioned row discharge spaces, each of the above-mentioned second elongated regions has a recessed gap, so that the gas can pass through the recessed gap And flow in the column discharge space.

上述第二基板上的多个柱状凸块,形成相对于上述第一基板上凹陷缺口的位置;而且,上述柱状凸块的突出高度为H2小于上述凹陷缺口的深度H1The plurality of columnar bumps on the second substrate are formed relative to the position of the recess on the first substrate; moreover, the protruding height H 2 of the columnar bump is smaller than the depth H 1 of the recess.

本发明提出的等离子体显示面板的制造方法,包括下列步骤:(1)提供第一基板,该第一基板上设置有一抽气孔。(2)形成多个长条状电极在该第一基板上,每一上述长条状电极平行于一第一方向。(3)形成一覆盖层在上述长条状电极和上述第一基板上。(4)提供一第二基板,该第二基板与该第一基板互相平行地设置;该第一基板与该第二基板之间形成一放电空间,该放电空间与该抽气孔导通。(5)形成一方格网状阻隔壁在该第一基板上,该方格网状阻隔壁包括有多个第一长条区域与多个第二长条区域,该多个第一长条区域将该放电空间限定成多个列放电空间,每一上述第二长条区域交错于每一上述第一长条区域;且在每一上述列放电空间内,每一上述第二长条区域具有一凹陷缺口,该第二长条区域的该凹陷缺口具有一凹陷深度H1,使气体可通过该凹陷缺口而在该列放电空间中流通。(6)在该第二基板上形成多个柱状凸块,该柱状凸块形成于相对应该第一基板上该凹陷缺口的位置,该柱状凸块具有一突出高度H2,且该突出高度H2小于该凹陷深度H1。(7)将该第一基板的周缘与该第二基板的周缘结合,以密封该放电空间,使该第二基板上的该柱状凸块会嵌入该第一基板上的部分该凹陷缺口,且在该凹陷缺口中保留一通道,使气体仍可通过该通道而在该列放电空间中流通。(8)通过该抽气孔对该放电空间进行抽气,使在该列放电空间中气体通过该通道而自该抽气口被抽出该放电空间外。The manufacturing method of the plasma display panel proposed by the present invention includes the following steps: (1) providing a first substrate, and a gas extraction hole is arranged on the first substrate. (2) Forming a plurality of strip-shaped electrodes on the first substrate, each of the strip-shaped electrodes being parallel to a first direction. (3) Forming a covering layer on the elongated electrodes and the first substrate. (4) A second substrate is provided, the second substrate and the first substrate are arranged parallel to each other; a discharge space is formed between the first substrate and the second substrate, and the discharge space is connected to the air extraction hole. (5) Forming a grid-shaped barrier wall on the first substrate, the grid-shaped barrier wall includes a plurality of first strip regions and a plurality of second strip regions, and the plurality of first strip regions The discharge space is defined as a plurality of row discharge spaces, each of the above-mentioned second strip regions is interlaced with each of the above-mentioned first strip regions; and in each of the above-mentioned column discharge spaces, each of the above-mentioned second strip regions has A recessed notch, the recessed notch of the second elongated region has a recessed depth H 1 , so that the gas can flow through the recessed notch in the row of discharge spaces. (6) A plurality of stud bumps are formed on the second substrate, the stud bumps are formed at positions corresponding to the recesses on the first substrate, the stud bumps have a protruding height H 2 , and the protruding height H 2 is smaller than the recess depth H 1 . (7) Combining the peripheral edge of the first substrate with the peripheral edge of the second substrate to seal the discharge space, so that the columnar bump on the second substrate will be embedded in part of the recessed notch on the first substrate, and A channel is reserved in the recess, so that the gas can still pass through the channel and circulate in the row of discharge spaces. (8) The discharge space is pumped through the pump hole, so that the gas in the row of discharge spaces passes through the channel and is pumped out of the discharge space from the pump port.

依据本发明,在上述第一基板(后基板)上形成方格网状阻隔壁,有如下四种制造方法。According to the present invention, there are four manufacturing methods for forming grid-like barrier ribs on the first substrate (rear substrate) as follows.

依据本发明制造阻隔壁的第一方法,包括如下步骤。(a)首先,提供一基板,其中,在上述基板上设置有多长条状电极,每一上述长条状电极平行于一第一方向。(b)在上述长条状电极和上述基板上形成覆盖层。(c)在上述覆盖层上形成塑形层;其中,上述塑形层的表面形成有多长条状凸出部分;每一上述凸出部分位于每两个上述长条状电极间的上述塑形层上,且平行于上述第一方向。(d)接着,在上述塑形层上形成干膜光致抗蚀剂层。(e)再曝光、显影上述干膜光致抗蚀剂层,而形成限定遮罩在上述塑形层之上;其中,上述限定遮罩包括多个第一长条区,以及多个第二长条区;每一上述第一长条区形成于每一上述长条状凸出部分上;每一上述第二长条区平行于一第二方向,并垂直于上述第一方向。(f)最后,进行喷砂程序,去除露出于上述限定遮罩外的塑形层,以露出上述覆盖层,并形成上述方格网状阻隔壁。The first method of manufacturing barrier ribs according to the present invention includes the following steps. (a) First, a substrate is provided, wherein a plurality of strip-shaped electrodes are disposed on the substrate, and each of the strip-shaped electrodes is parallel to a first direction. (b) Forming a covering layer on the elongated electrode and the substrate. (c) forming a plastic layer on the above-mentioned covering layer; wherein, the surface of the above-mentioned plastic layer is formed with a plurality of strip-shaped protrusions; shape layer, and parallel to the above-mentioned first direction. (d) Next, a dry film photoresist layer is formed on the above-mentioned shaping layer. (e) re-exposing and developing the above-mentioned dry film photoresist layer to form a limited mask on the above-mentioned plastic layer; wherein, the above-mentioned limited mask includes a plurality of first strip regions, and a plurality of second Elongated areas; each of the above-mentioned first elongated areas is formed on each of the above-mentioned elongated protruding parts; each of the above-mentioned second elongated areas is parallel to a second direction and perpendicular to the above-mentioned first direction. (f) Finally, perform a sandblasting process to remove the shaping layer exposed outside the above-mentioned limiting mask, so as to expose the above-mentioned covering layer, and form the above-mentioned grid-like barrier walls.

依据本发明制造阻隔壁的第二方法,包括如下步骤。(a)首先,提供一基板;其中,在上述基板上设置有多个长条状电极,每一上述长条状电极平行于一第一方向。(b)形成覆盖层在上述长条状电极和上述基板上。(c)使用网版印刷,以在上述覆盖层上形成方格网状的塑形层。其中,上述塑形层包括多个第一长条区,以及多个第二长条区;每一上述第一长条区位于每两个上述长条状电极间的上述覆盖层上,且平行于上述第一方向;每一上述第二长条区平行于第二方向,并垂直于上述第一方向。(d)最后,使用网版印刷,在上述塑形层上形成多个第三长条区;其中,每一上述第三长条层分别形成在第一上述第一长条层上,以此形成上述方格网状阻隔壁。The second method of manufacturing barrier ribs according to the present invention includes the following steps. (a) Firstly, a substrate is provided; wherein, a plurality of strip-shaped electrodes are disposed on the substrate, and each of the strip-shaped electrodes is parallel to a first direction. (b) Forming a covering layer on the above-mentioned elongated electrodes and the above-mentioned substrate. (c) Screen printing is used to form a grid-shaped shaping layer on the cover layer. Wherein, the above-mentioned plastic layer includes a plurality of first strip regions, and a plurality of second strip regions; each of the above-mentioned first strip regions is located on the above-mentioned covering layer between every two above-mentioned strip-shaped electrodes, and is parallel to In the first direction; each of the second elongated regions is parallel to the second direction and perpendicular to the first direction. (d) Finally, use screen printing to form a plurality of third elongated regions on the above-mentioned shaping layer; wherein, each of the above-mentioned third elongated layers is respectively formed on the first above-mentioned first elongated layer, thereby The aforementioned grid-like barrier walls are formed.

依据本发明制造阻隔壁的第三方法,包括如下步骤。(a)首先,提供一基板;其中,在上述基板上设置有多个长条状电极,每一上述长条状电极平行于一第一方向。(b)在上述多长条状电极和上述基板之上形成覆盖层。(c)在上述覆盖层上形成塑形层。(d)在上述塑形层上形成干膜光致抗蚀剂层。(e)曝光、显影上述干膜光致抗蚀剂层,并在上述塑形层上形成限定遮罩。其中,上述限定遮罩包括多个第一长条区,以及多个第二长条区;每一上述第一长条区平行于上述第一方向,位于每两个上述长条状电极间的上述塑形层上;每一上述第二长条区沿第二方向延伸,并垂直于每一上述第一长条区;每一上述第二长条区在与每一上述长条形电极的交差处形成有断开区,以露出上述塑形层。(f)最后,进行喷砂程序,去除露出于上述限定遮罩外的塑形层,露出上述覆盖层,并形成上述方格网状阻隔壁;其中,在每一上述断开区内仍残留有上述塑形层。The third method of manufacturing barrier ribs according to the present invention includes the following steps. (a) Firstly, a substrate is provided; wherein, a plurality of strip-shaped electrodes are disposed on the substrate, and each of the strip-shaped electrodes is parallel to a first direction. (b) Forming a covering layer on the multi-strip electrodes and the substrate. (c) Forming a shaping layer on the above-mentioned covering layer. (d) forming a dry film photoresist layer on the above-mentioned shaping layer. (e) exposing and developing the above-mentioned dry film photoresist layer, and forming a limited mask on the above-mentioned shaping layer. Wherein, the above-mentioned limiting mask includes a plurality of first strip regions, and a plurality of second strip regions; each of the above-mentioned first strip regions is parallel to the above-mentioned first direction, and is located between every two of the above-mentioned strip-shaped electrodes. On the above-mentioned plastic layer; each of the above-mentioned second elongated regions extends along the second direction and is perpendicular to each of the above-mentioned first elongated regions; each of the above-mentioned second elongated regions is in contact with each of the above-mentioned elongated electrodes A disconnection area is formed at the intersection to expose the above-mentioned shaping layer. (f) Finally, perform a sandblasting process to remove the plastic layer exposed outside the above-mentioned limiting mask, expose the above-mentioned covering layer, and form the above-mentioned grid-like barrier wall; There is the aforementioned shaping layer.

依据本发明,制造阻隔壁的第四方法,包括如下步骤。(a)首先,提供一基板;其中,在上述基板上设置有多个长条状电极,每一上述长条状电极平行于一第一方向。(b)在上述长条状电极和上述基板上形成覆盖层。(c)在上述覆盖层上形成塑形层。(d)在上述塑形层上形成方格网状的感光限定层。其中,上述感光限定层包括多个第一长条区,以及多个第二长条区;每一上述第一长条区位于每两个上述长条状电极间的上述塑形层上,且平行于上述第一方向;每一上述第二长条区平行于一第二方向,并垂直于上述第一方向;上述第一长条区的高度大于上述第二长条区的高度。(e)曝光、显影上述感光限定层,并在上述塑形层上形成限定遮罩。(f)最后,进行喷砂程序,去除露出于上述限定遮罩外的塑形层,以露出上述覆盖层,并形成上述方格网状的阻隔壁。According to the present invention, the fourth method of manufacturing barrier ribs includes the following steps. (a) Firstly, a substrate is provided; wherein, a plurality of strip-shaped electrodes are disposed on the substrate, and each of the strip-shaped electrodes is parallel to a first direction. (b) Forming a covering layer on the elongated electrode and the substrate. (c) Forming a shaping layer on the above-mentioned covering layer. (d) Forming a grid-like photosensitive limiting layer on the above-mentioned shaping layer. Wherein, the photosensitive defined layer includes a plurality of first elongated regions, and a plurality of second elongated regions; each of the above-mentioned first elongated regions is located on the above-mentioned shaping layer between every two elongated electrodes, and parallel to the first direction; each second elongated area is parallel to a second direction and perpendicular to the first direction; the height of the first elongated area is greater than the height of the second elongated area. (e) exposing and developing the photosensitive defined layer, and forming a defined mask on the shaped layer. (f) Finally, perform a sandblasting process to remove the shaping layer exposed outside the above-mentioned limiting mask, so as to expose the above-mentioned covering layer, and form the above-mentioned grid-like barrier walls.

由以上四种阻隔壁的制造方法可知,本发明的制作工艺有如下的优点:It can be seen from the above four manufacturing methods of barrier ribs that the manufacturing process of the present invention has the following advantages:

①本发明的制作工艺,仅在后基板上制作阻隔壁,所以在PDP进行组合时,前、后基板的对准明显地比NEC所公开的简单。① In the manufacturing process of the present invention, the barrier ribs are only fabricated on the rear substrate, so when the PDP is combined, the alignment of the front and rear substrates is obviously simpler than that disclosed by NEC.

②阻隔壁的开口区域,可轻易地调整以获得较佳的开口率,并增加萤光体的涂布面积,故可得到较佳的明视度(luminance)。② The opening area of the barrier wall can be easily adjusted to obtain a better opening ratio and increase the coating area of the phosphor, so better luminance can be obtained.

③在阻隔壁上均形成有凹陷缺口,所以很容易在封装时,进行真空程序(vacuum process)和气体充填(fill gas)。③ There are recesses and gaps formed on the barrier walls, so it is easy to perform vacuum process and gas filling during packaging.

虽然结合以上较佳实施例揭露了本发明,然而其并非用以限定本发明,任何本领域技术人员在不脱离本发明的精神和范围内,可做少许的更动和润饰,因此本发明的保护范围应当以所附权利要求所界定的为准。Although the present invention has been disclosed in conjunction with the above preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the present invention The scope of protection should be defined by the appended claims.

Claims (16)

1.一种等离子体显示面板,该等离子体显示面板包括:1. A plasma display panel, comprising: 一第一基板;a first substrate; 一第二基板,与该第一基板彼此平行地配置,使该第一基板与该第二基板之间形成一放电空间;及a second substrate arranged parallel to the first substrate so that a discharge space is formed between the first substrate and the second substrate; and 一方格网状阻隔壁形成在该第一基板上,该方格网状阻隔壁包括有A grid-shaped barrier wall is formed on the first substrate, and the grid-shaped barrier wall includes 多个第一长条区域,该多个第一长条区域将该放电空间限定成多个列放电空间;a plurality of first strip regions, the plurality of first strip regions define the discharge space into a plurality of row discharge spaces; 多个第二长条区域,每一上述第二长条区域交错于每一上述第一长条区域,且在每一上述列放电空间内,每一上述第二长条区域具有一凹陷缺口,使气体可通过该凹陷缺口而在该列放电空间中流通。a plurality of second strip regions, each of the above-mentioned second strip regions is interlaced with each of the above-mentioned first strip regions, and in each of the above-mentioned column discharge spaces, each of the above-mentioned second strip regions has a recessed gap, The gas can pass through the recessed gap to circulate in the column discharge space. 2.如权利要求1所述的等离子体显示面板,其中该等离子体显示面板还包括有多个柱状凸块形成在该第二基板上,该柱状凸块形成相对于该第一基板上该凹陷缺口的位置,该柱状凸块具有一突出高度H2,该第二长条区域的该凹陷缺口具有一凹陷深度H1,且该突出高度H2小于该凹陷深度H1,当该第一基板与该第二基板结合时,该第二基板上的该柱状凸块会嵌入该第一基板上的部分该凹陷缺口,且在该凹陷缺口中保留一通道,使气体仍可通过该通道而在该列放电空间中流通。2. The plasma display panel as claimed in claim 1, wherein the plasma display panel further comprises a plurality of stud bumps formed on the second substrate, and the stud bumps are formed relative to the recesses on the first substrate The position of the notch, the stud bump has a protruding height H 2 , the recessed notch in the second elongated region has a recessed depth H 1 , and the protruding height H 2 is smaller than the recessed depth H 1 , when the first substrate When combined with the second substrate, the stud bump on the second substrate will be embedded in part of the recessed notch on the first substrate, and a channel will be reserved in the recessed notch, so that the gas can still pass through the channel to flow in the column discharge space. 3.一种等离子体显示面板的制造方法,包括:3. A method of manufacturing a plasma display panel, comprising: 提供一第一基板,该第一基板上设置有一抽气孔;A first substrate is provided, and an air extraction hole is provided on the first substrate; 在该第一基板上形成多个长条状电板,每一上述长条状电极平行于一第一方向;A plurality of strip-shaped electric plates are formed on the first substrate, and each strip-shaped electrode is parallel to a first direction; 在上述长条状电极和上述第一基板上形成一覆盖层;forming a covering layer on the elongated electrodes and the first substrate; 提供一第二基板,与该第一基板彼此平行地配置,使该第一基板与该第二基板之间形成一放电空间,该放电空间与该抽气孔导通;providing a second substrate, arranged in parallel with the first substrate, so that a discharge space is formed between the first substrate and the second substrate, and the discharge space is connected to the air extraction hole; 在该第一基板上形成一方格网状阻隔壁,该方格网状阻隔壁包括有多个第一长条区域,该多个第一长条区域将该放电空间限定成多个列放电空间,多个第二长条区域,每一上述第二长条区域交错在每一上述第一长条区域,且在每一上述列放电空间内,每一上述第二长条区域具有一凹陷缺口,使气体可通过该凹陷缺口而在该列放电空间中流通;A grid-like barrier wall is formed on the first substrate, and the grid-like barrier wall includes a plurality of first strip regions, and the plurality of first strip regions define the discharge space into a plurality of row discharge spaces , a plurality of second strip regions, each of the above-mentioned second strip regions is interlaced with each of the above-mentioned first strip regions, and in each of the above-mentioned row discharge spaces, each of the above-mentioned second strip regions has a recessed gap , so that the gas can pass through the recessed gap and circulate in the column discharge space; 将该第一基板的周缘与该第二基板的周缘结合,以密封该放电空间;combining the periphery of the first substrate with the periphery of the second substrate to seal the discharge space; 通过该抽气孔对该放电空间进行抽气,使在该列放电空间中气体通过该凹陷缺口而自该抽气口抽出。The discharge space is pumped through the pump hole, so that the gas in the row of discharge spaces passes through the recessed gap and is sucked out from the pump port. 4.如权利要求3所述的等离子体显示面板制造方法,其步骤还包括:在该第二基板上形成多个柱状凸块,该柱状凸块形成在相对应于该第一基板上该凹陷缺口的位置,该柱状凸块具有一突出高度H2,该第二长条区域的该凹陷缺口具有一凹陷深度H1,且该突出高度H2小于该凹陷深度H1,当该第一基板与该第二基板结合后,该第二基板上的该柱状凸块会嵌入该第一基板上的部分该凹陷缺口,且在该凹陷缺口中保留一通道,使气体仍可通过该通道而在该列放电空间中流通。4. The method for manufacturing a plasma display panel as claimed in claim 3, further comprising: forming a plurality of stud bumps on the second substrate, the stud bumps being formed corresponding to the recesses on the first substrate The position of the notch, the stud bump has a protruding height H 2 , the recessed notch in the second elongated region has a recessed depth H 1 , and the protruding height H 2 is smaller than the recessed depth H 1 , when the first substrate After being combined with the second substrate, the stud bump on the second substrate will be embedded in part of the recessed notch on the first substrate, and a channel will be reserved in the recessed notch, so that the gas can still pass through the channel to flow in the column discharge space. 5.如权利要求3所述的等离子体显示面板制造方法,其步骤还包括下列该方格网状阻隔壁的制造方法,包括:5. The manufacturing method of the plasma display panel as claimed in claim 3, wherein the steps further comprise the following manufacturing method of the grid barrier ribs, comprising: 在上述覆盖层上形成塑形层;其中,上述塑形层的表面形成有多个长条状凸出部分;每一上述凸出部分位于每两个上述长条状电极间的上述塑形层上,且平行于上述第一方向;A plastic layer is formed on the above-mentioned covering layer; wherein, the surface of the above-mentioned plastic layer is formed with a plurality of elongated protruding parts; each of the above-mentioned protruding parts is located on the above-mentioned plastic layer between every two elongated electrodes on, and parallel to the above-mentioned first direction; 在上述塑形层上形成干膜光致抗蚀剂层;forming a dry film photoresist layer on the above-mentioned shaping layer; 曝光、显影上述干膜光致抗蚀剂层,并在上述塑形层上形成限定遮罩;其中,上述限定遮罩包括多个第一长条区,以及多个第二长条区;每一上述第一长条区形成在每一上述长条状凸出部分上;每一上述第二长条区平行于一第二方向,并垂直于上述第一方向;exposing and developing the above-mentioned dry film photoresist layer, and forming a limited mask on the above-mentioned plastic layer; wherein, the above-mentioned limited mask includes a plurality of first strip regions and a plurality of second strip regions; each One above-mentioned first elongated area is formed on each of the above-mentioned elongated protruding parts; each of the above-mentioned second elongated areas is parallel to a second direction and perpendicular to the above-mentioned first direction; 进行喷砂程序,去除露出于上述限定遮罩外的塑形层,以露出上述覆盖层,并形成上述方格网状阻隔壁。A sandblasting process is performed to remove the shaping layer exposed outside the above-mentioned limiting mask to expose the above-mentioned covering layer and form the above-mentioned grid-like barrier walls. 6.如权利要求5所述的等离子体显示面板制造方法,其中,制作上述塑形层包括如下步骤:先以整面印刷的方式,在上述覆盖层上印制多层第一浆料层;对上述第一浆料层进行烘烤;使用网版印刷,印制多层长条状的第二浆料层,在上述第一浆料层上;以及对上述第二浆料层进行烘烤。6. The method for manufacturing a plasma display panel as claimed in claim 5, wherein making the above-mentioned shaping layer comprises the following steps: first printing multiple layers of the first paste layer on the above-mentioned cover layer in the manner of full-surface printing; Baking the above-mentioned first paste layer; using screen printing, printing a multi-layer strip-shaped second paste layer on the above-mentioned first paste layer; and baking the above-mentioned second paste layer . 7.如权利要求5所述的等离子体显示面板制造方法,其中,制作上述塑形层包括如下步骤:先使用网版印刷,在上述覆盖层上印制多层长条状的第二浆料层;对上述第一浆料层进行烘烤;再使用整面印刷的方式,在上述第二浆料层上印制多层第一浆料层;对上述第二浆料层进行烘烤。7. The method for manufacturing a plasma display panel as claimed in claim 5, wherein making the above-mentioned shaping layer comprises the following steps: first printing a multi-layer strip-shaped second paste on the above-mentioned covering layer by screen printing layer; bake the above-mentioned first paste layer; then print multiple layers of the first paste layer on the above-mentioned second paste layer by using full-surface printing; and bake the above-mentioned second paste layer. 8.如权利要求3所述的等离子体显示面板制造方法,其步骤还包括下列该方格网状阻隔壁的制造方法,包括:8. The manufacturing method of the plasma display panel as claimed in claim 3, wherein the steps further comprise the following manufacturing method of the grid-shaped barrier ribs, comprising: 使用网版印刷,以形成方格网状的塑形层在上述覆盖层上;其中,上述塑形层包括多个第一长条区,以及多个第二长条区;每一上述第一长条区位于每两个上述长条状电极间的上述覆盖层上,且平行于上述第一方向;每一上述第二长条区平行于一第二方向,并垂直于上述第一方向;Use screen printing to form a grid-shaped plastic layer on the above-mentioned cover layer; wherein, the above-mentioned plastic layer includes a plurality of first strip regions, and a plurality of second strip regions; each of the above-mentioned first strips The elongated area is located on the covering layer between every two elongated electrodes and is parallel to the first direction; each of the second elongated areas is parallel to a second direction and perpendicular to the first direction; 使用网版印刷,在上述塑形层上形成多个第三长条区;其中,每一上述第三长条区分别形成于每一上述第一长条层上,以此形成上述方格网状阻隔壁。Using screen printing, a plurality of third elongated areas are formed on the above-mentioned shaping layer; wherein, each of the above-mentioned third elongated areas is respectively formed on each of the above-mentioned first elongated layers, thereby forming the above-mentioned square grid shaped barrier wall. 9.如权利要求8所述的等离子体显示面板制造方法,其中,上述塑形层使用网版印刷,在上述覆盖层上印制多层浆料,经烘烤后而形成。9. The method for manufacturing a plasma display panel as claimed in claim 8, wherein the shaping layer is formed by screen printing, printing multiple layers of paste on the covering layer, and baking. 10.如权利要求8所述的等离子体显示面板制造方法,其中,上述第三长条区使用网版印刷,印制多层长条状浆料层,经烘烤后而形成。10 . The method for manufacturing a plasma display panel as claimed in claim 8 , wherein the third elongated area is formed by printing multiple elongated paste layers by screen printing and baking. 11 . 11.如权利要求3所述的等离子体显示面板制造方法,其步骤还包括下列该方格网状阻隔壁的制造方法,包括:11. The method for manufacturing a plasma display panel as claimed in claim 3, wherein the steps further include the following method for manufacturing the grid barrier ribs, comprising: 在上述覆盖层上形成塑形层;forming a shaping layer on the above-mentioned covering layer; 在上述塑形层上形成干膜光致抗蚀剂层;forming a dry film photoresist layer on the above-mentioned shaping layer; 曝光、显影上述干膜光致抗蚀剂层,而在上述塑形层上形成限定遮罩;其中,上述限定遮罩包括多个第一长条区,以及多个第二长条区;每一上述第一长条区平行于上述第一方向,位于每两个上述长条状电极间的上述塑形层上;每一上述第二长条区沿第二方向延伸,而垂直于每一上述第一长条区;每一上述第二长条区在与每一上述长条形电极的交差处形成有断开区,以露出上述塑形层;exposing and developing the above-mentioned dry film photoresist layer, and forming a limited mask on the above-mentioned plastic layer; wherein, the above-mentioned limited mask includes a plurality of first strip regions and a plurality of second strip regions; each One of the above-mentioned first elongated regions is parallel to the above-mentioned first direction, and is located on the above-mentioned plastic layer between every two of the above-mentioned elongated electrodes; each of the above-mentioned second elongated regions extends along the second direction, and is perpendicular to each The above-mentioned first elongated area; each of the above-mentioned second elongated areas is formed with a disconnection area at the intersection with each of the above-mentioned elongated electrodes, so as to expose the above-mentioned shaping layer; 进行喷砂程序,去除露出于上述限定遮罩外的塑形层,以露出上述覆盖层,而形成上述方格网状的阻隔壁;其中,在每一上述断开区内仍残留有上述塑形层。Performing a sandblasting process to remove the plastic layer exposed outside the above-mentioned limiting mask to expose the above-mentioned covering layer to form the above-mentioned grid-like barrier walls; wherein, the above-mentioned plastic layer still remains in each of the above-mentioned disconnected regions. shape layer. 12.如权利要求11所述的等离子体显示面板制造方法,其中,上述塑形层的制作,以整面印刷的方式,在上述覆盖层上印制多层浆料,经烘烤而完成。12 . The method for manufacturing a plasma display panel as claimed in claim 11 , wherein the forming of the shaping layer is completed by printing multiple layers of paste on the covering layer and then baking. 13 . 13.如权利要求3所述的等离子体显示面板制造方法,其步骤还包括下列该方格网状阻隔壁的制造方法,包括:13. The method for manufacturing a plasma display panel as claimed in claim 3, wherein the steps further include the following method for manufacturing the grid barrier ribs, comprising: 提供一基板;其中,在上述基板上设置有多长条状电极,每一上述长条状电极平行于一第一方向;A substrate is provided; wherein, a plurality of strip-shaped electrodes are arranged on the above-mentioned substrate, and each of the above-mentioned strip-shaped electrodes is parallel to a first direction; 在上述长条状电极和上述基板上形成覆盖层;forming a covering layer on the elongated electrode and the substrate; 在上述覆盖层上形成塑形层;forming a shaping layer on the above-mentioned covering layer; 在上述塑形层上形成方格网状的感光限定层;其中,上述感光限定层包括多个第一长条区,以及多个第二长条区;每一上述第一长条区位于每两个上述长条状电极间的上述塑形层上,且平行于上述第一方向;每一上述第二长条区平行于一第二方向,并垂直于上述第一方向;上述第一长条区的高度大于上述第二长条区的高度;A grid-like photosensitive defined layer is formed on the above-mentioned plastic layer; wherein, the above-mentioned photosensitive defined layer includes a plurality of first elongated regions and a plurality of second elongated regions; each of the above-mentioned first elongated regions is located in each On the above-mentioned plastic layer between the two above-mentioned elongated electrodes, and parallel to the above-mentioned first direction; each of the above-mentioned second elongated regions is parallel to a second direction, and perpendicular to the above-mentioned first direction; the above-mentioned first elongated The height of the strip area is greater than the height of the above-mentioned second strip area; 曝光上述感光限定层,而在上述塑形层上形成限定层遮罩;exposing the photosensitive defined layer to form a defined layer mask on the shaped layer; 进行喷砂程序,去除露出于上述限定遮罩外的塑形层,以露出上述覆盖层,而形成上述方格网状的阻隔壁。A sandblasting process is performed to remove the shaping layer exposed outside the above-mentioned limiting mask to expose the above-mentioned covering layer, so as to form the above-mentioned grid-like barrier walls. 14.如权利要求13所述的等离子体显示面板制造方法,其中,上述感光限定层的材质,是由感光物质和浆料混合而构成。14. The method for manufacturing a plasma display panel as claimed in claim 13, wherein the photosensitive limiting layer is made of a mixture of photosensitive material and paste. 15.如权利要求13所述的等离子体显示面板制造方法,其中,上述感光限定层的制作步骤包括:先使用网版印刷,在上述塑形层上印制多层的方格网状的第一感光限定层;再使用网版印刷,沿上述第一方向在上述第一感光限定层上印制条状的第二感光限定层。15. The method for manufacturing a plasma display panel as claimed in claim 13, wherein the manufacturing step of the photosensitive limiting layer comprises: using screen printing first to print a multi-layer grid-like first layer on the shaping layer. a photosensitive defined layer; and screen printing is used to print a stripe-shaped second photosensitive defined layer on the first photosensitive defined layer along the aforementioned first direction. 16.如权利要求13所述的等离子体显示面板制造方法,其中,上述感光限定层的制作步骤包括:使用网版印刷,沿上述第一方向在上述塑形层上印制多层条状的第二感光限定层;再使用网版印刷,在上述第二感光限定层上印制多层的方格网状的第一感光限定层。16. The method for manufacturing a plasma display panel as claimed in claim 13, wherein the manufacturing step of the photosensitive limiting layer comprises: using screen printing to print a multi-layer stripe on the shaping layer along the first direction. The second photosensitive defined layer; using screen printing again, a multi-layer grid-like first photosensitive defined layer is printed on the above-mentioned second photosensitive defined layer.
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