CN1328133C - Handling and managing device - Google Patents
Handling and managing device Download PDFInfo
- Publication number
- CN1328133C CN1328133C CNB2004100003379A CN200410000337A CN1328133C CN 1328133 C CN1328133 C CN 1328133C CN B2004100003379 A CNB2004100003379 A CN B2004100003379A CN 200410000337 A CN200410000337 A CN 200410000337A CN 1328133 C CN1328133 C CN 1328133C
- Authority
- CN
- China
- Prior art keywords
- shelf
- processing equipment
- boxlike case
- warehouse
- walking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000007246 mechanism Effects 0.000 claims description 26
- 239000000758 substrate Substances 0.000 description 13
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000007598 dipping method Methods 0.000 description 5
- 230000033001 locomotion Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000470 constituent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0235—Containers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
To improve a processing and storage facility formed of article processing devices and an automatic warehouse for storing the articles before and after processing the articles. The automatic warehouse is provided with a crane for storage and delivery for transferring cassette cases K between a shelf and a shelf respectively provided with a three-dimensional housing blocks for storage. The processing devices are arranged with an appropriate space along the shelf on a side opposite to a side provided with the crane for storage and delivery in relation to the shelves of the automatic warehouse. A carrying device is formed of a self-travelling carriage, which can travel on a travelling route formed along the shelf on a side provided with the processing devices in relation to the shelves of the automatic warehouse and which is provided with a material-to-be-carried transferring means for transferring the cassette cases K between each of the processing device. An entrance and an exit for storage and delivery of the cassette cases K by the self-travelling carriage are provided in the automatic warehouse.
Description
Technical field
The present invention relates to handle and safedeposit, it is that the automated warehouse of the article before and after being handled by the processing equipment of article and keeping constitutes.
Background technology
In the manufacturing line of liquid crystal with the various slim substrate for display of glass substrate etc., each substrate on processing equipment carries out the front and back of various processing, is many pieces substrate is kept at automated warehouse with the state that is accommodated in the boxlike case.Just prepared an automated warehouse for a plurality of processing equipment, when processing equipment is vacant when getting off, to the boxlike case of keeping at automated warehouse supplied with in the position of processing equipment that should be vacant, each substrate in processing equipment is handled the boxlike case in turn, when having finished all processing substrate, the boxlike case of taking in the substrate that disposes is taken care of in automated warehouse once more.
Use processing and safedeposit in the past as described above, for example the open communique of Japanese application for a patent for invention put down in writing for 2001-44261 number like that, be that automated warehouse and each processing equipment direct connection.Though like this processing in the past and safedeposit can suppress the cost at initial stage, but because the change of manufacturing planning etc., and number or when configuration of change processing equipment, also must change automated warehouse side for each processing equipment go out warehouse-in mouthful, require a great deal of time like this and expense.In addition, the gangway in the automated warehouse is strengthened with the needed load of Jack, so need to be competent at the Jack of this load.
Summary of the invention
The objective of the invention is to solve existing in the past problem, the reference marks of giving in the embodiment according to the formation of processing of the present invention described later and safedeposit, processing of the present invention and safedeposit comprise: automated warehouse, a plurality of processing equipment and between described automated warehouse and a plurality of processing equipment conveyance take in the carrying device of the boxlike case of processed workpiece, it is characterized in that described automated warehouse comprises: the shelf of compartment is taken in the keeping with three-dimensional described boxlike case of supporting; Bottom at described shelf forms, puts in storage mouth; Can along the walking of described shelf, between keeping is being taken in compartment and is being gone out, put mouthful the Jack that goes out to put in storage usefulness of mobile described boxlike case; Each processing equipment, the shelf of described relatively automated warehouse disposes with proper spacing along described shelf at the described opposition side that goes out to put in storage Jack walking path one side of usefulness; Described processing equipment comprises: boxlike case support and workpiece travel mechanism, this workpiece travel mechanism takes out the interior workpiece of boxlike case on this boxlike case support,, the workpiece of handling is got back in the boxlike case on this boxlike case support when handling the position in conveyance; Described carrying device comprises: between the row of the above-mentioned shelf of described automated warehouse and above-mentioned a plurality of processing equipment, and the chassis of the automatic walking that can walk automatically on the ground of the walking path that forms along this shelf; And be arranged on this automatically on chassis of walking, in going out between warehouse-in mouthful and the boxlike case support of the shelf bottom of a side of walking path at each processing equipment of the opposite side of walking path, transfer boxlike case by the transport object transfer mechanism; The warehouse-in that goes out of described automated warehouse becomes four row with walking path and above-mentioned a plurality of processing equipment of the chassis of the automatic walking of the walking path of Jack, described shelf, described carrying device according to this serial arrangement.
Processing of the present invention and safedeposit according to above-mentioned formation, not automated warehouse and a plurality of processing equipment as in the past, directly connect by the warehouse-in mouth that goes out that is arranged on this automated warehouse, have the carrying device of conveyance but insert along the walking of automated warehouse shelf with running body between the two, by this carrying device, the automated warehouse side form the warehouse-in mouthful and each processing equipment between the handing-over by the structure of transport object, so because the changes of manufacturing planning etc. are when change processing equipment number or configuration, also do not need to increase and decrease the number or the change of location that the warehouse-in mouth of automated warehouse side, can cut down necessary time and expense this moment.In addition, the load that goes out to put in storage with Jack in the automated warehouse also reduces, and implements easier.
When implementing above-mentioned formation of the present invention, the conveyance running body of walking above-mentioned carrying device 3 certainly is to be made of the chassis 17 that can walk automatically on ground, above-mentioned automated warehouse 1 go out bottom in the above-mentioned shelf 5A that warehouse-in mouthfuls 10,11 can be formed on this automated warehouse 1.According to such formation, the conveyance that goes out warehouse-in mouthful and carrying device that is arranged on the automated warehouse shelf with between running body (automatic walking carriage) and each processing equipment can low about horizontal path, constituent ratio ground by the transfer path of transport object, become simple by the transfer path of transport object, be the mode of implementing easily, and can carry out by the transfer of transport object on the efficient highland.
In addition, above-mentioned is when having taken in the boxlike case K of a plurality of workpiece W that above-mentioned processing equipment 2A～2G handled (for example liquid crystal with the various slim substrate for display of glass substrate etc.) by transport object, each processing equipment 2A～2G is last can be provided with workpiece transfer mechanism 15, this transfer mechanism 15 is the workpiece W that are used for taking out in the boxlike case K of above-mentioned carrying device 3 transfers, conveyance it's time to handle position 14, and the workpiece W that handles is got back in the boxlike case K.According to such formation, can constitute the suitable device of liquid crystal with the processing and the keeping of the various slim substrate for display of glass substrate etc.
Description of drawings
Fig. 1 shows the approximate vertical view of all equipment.
The front view that Fig. 2 is above-mentioned.
The specific embodiment
Following with reference to description of drawings suitable embodiment of the present invention, the 1st, automated warehouse, 2A～2G are arranged on a plurality of processing equipment, the 3rd of automated warehouse 1 one sides, are configured in the carrying device between automated warehouse 1 and processing equipment row.Automated warehouse 1 is to take care of the 2 row shelf 5A that use compartment 4 by having the difference solid, 5B and this shelf 5A, and the path 6 interior Jacks 7 that go out to put in storage to use that dispose between 5B constitute.This goes out warehouse-in is known with Jack 7, is carrying transfer mechanism (work fork etc.) 8 on its lifting tray 9, and it is to be used for being received in two shelf 5A, and the keeping of 5B is with taking in 4 boxlike case K as transport object of compartment.In addition, be provided with on the shelf 5A of adjacency carrying device 3 sides and the outbound mouth 10 of 3 of carrying devices and warehouse-in mouthfuls 11, it is to utilize keeping with taking in the compartment 4, and 2 on the appropriate location of hypomere Jack direction of travel certainly with taking in compartment 4.
In addition, boxlike case K, workpiece W is being taken in its inside, and for example liquid crystal is with the various slim substrate for display of glass substrate etc., and multilayer is taken in up and down, and these workpiece W can take out and put into by on even keel for boxlike case K.
Though not expression among the figure, but the warehouse-in of the boxlike case K of automated warehouse 1 is an end left and right sides that is set up in parallel path 6 between shelf with load-transfer device and outbound load-transfer device, the boxlike case K that moves into load-transfer device with warehouse-in accepts with the transfer mechanism 8 of Jack 7 by going out warehouse-in, take in keeping at shelf 5A, any keeping in the 5B is taken in the compartment 4.In addition, the boxlike case K that compartment 4 is taken in is taken in any keeping in the shelf 5A, 5B, just, take in the boxlike case K of the workpiece W that handles, with transfer mechanism 8 taking-ups of the Jack 7 that goes out to put in storage usefulness, with on the load-transfer device, conveyance is to the place that needs to above-mentioned outbound in conveyance.
In the drawings, just to shelf 5A, the shelf 5A of the side in the 5B is set up in parallel processing equipment 2A～2G and carrying device 3, but also can be set up in parallel processing equipment 2A～2G and carrying device 3 to the opposing party's shelf 5B.At this moment, also can be provided with and the outbound mouth 10 of 3 of carrying devices and warehouse-in mouthfuls 11 at this shelf 5B.Certainly, be that the automated warehouse that is provided with shelf 5A also is fine with a side of the path 6 of Jack 7 just going out warehouse-in.
Each processing equipment 2A～2G, the boxlike case support 13 and the workpiece transfer mechanism (mechanical hand) 15 that are positioned at carrying device 3 sides can be set, it is to be used in by the boxlike case K of boxlike case support 13 supporting and to handle 14 handing-over in position workpiece W and use, so can automatically carry out predetermined process for supplying with the workpiece W that handles position 14.
In the processing and safedeposit of above-mentioned formation, when processing equipment 2A～2G was vacant, then to the shelf 5A of keeping at automated warehouse 1, the outbound instruction that the boxlike case K that takes in untreated workpiece that takes in compartment 4 in the 5B sends passed to warehouse-in Jack 7.Its result, the walking by going out to put in storage Jack 7 and the lifting of lifting tray 9, after transfer mechanism 8 moves to the position of taking in compartment 4 of corresponding outbound object, the action launching of accepting the boxlike case of this transfer mechanism 8, when for example transfer mechanism 8 is the work fork, the advance and retreat motion of dipping and heaving by lifting tray 9 and work fork constitute take up the boxlike case, from the compartment 4 of taking in of outbound object the boxlike case K of manipulating object is pulled out on the lifting tray 9, then, the walking by going out to put in storage Jack 7 and the lifting of lifting tray 9, this lifting tray 9 is moved in abutting connection with the position of outbound mouth 10, and, transfer mechanism 8 is sent the action launching of boxlike case, for example the combination of the advance and retreat motion of dipping and heaving by lifting tray 9 and transfer mechanism 8 (work fork) descends boxlike case K, with the boxlike case K transfer on the lifting tray 9 to outbound mouth 10.
Conveyance is then arrived the processing equipment of handling the vacant state in device 2A～2G, for example processing equipment 2B by automatic chassis 17 conveyances of carrying device 3 to the boxlike case K of the manipulating object of outbound mouth 10.Just, by walking certainly when walking chassis 17 certainly and move to the position of corresponding outbound mouth 10, when the acceptance action of the boxlike case of transfer mechanism 18, for example transfer mechanism 18 are the work fork, the action of taking up the boxlike case by the combination of dipping and heaving and advance and retreat motions, the boxlike case K transfer of outbound mouth 10 is being walked on the chassis 17 certainly, then this is being walked certainly the processing equipment 2B that chassis 17 moves to purpose.When walking chassis 17 and stop at the position of processing equipment 2B of corresponding purpose, the action launching of sending the boxlike case of transfer mechanism 18, for example the dipping and heaving of transfer mechanism 18 (work fork) and the combination of advance and retreat motion are unloaded the boxlike case, on the boxlike case support 13 of boxlike case K transfer in processing equipment 2B on the automatic chassis 17.In processing equipment 2B, untreated workpiece W in the boxlike case K moves to by workpiece transfer mechanism (mechanical hand) 15 and handles position 14, after disposing, the workpiece W after the processing is moved back in the boxlike case K of standby on boxlike case support 13 by workpiece transfer mechanical hand 15.
In above-mentioned processing equipment 2B, after disposing for all workpiece W in the boxlike case K, take in the boxlike case K of the workpiece W that disposes, by with from the operation opposite order of outbound mouth 10, with the warehouse-in mouth 11 of carrying device 3 from processing equipment 2B conveyance to automated warehouse 1 to the conveyance boxlike case K of processing equipment 2B.Transfer to the boxlike case K of warehouse-in mouthfuls 11 by go out warehouse-in with Jack 7 warehouse-in keepings at shelf 5A, the selected vacant state that goes out takes in the compartment 4 in the 5B.This input work be with to outbound mouth 10 with boxlike case K carry out the outbound operation time opposite order carry out.
In addition, when outbound mouth 10 is vacant states, even processing equipment 2A～2G is not vacant state, also can be with the boxlike case K that descends to go on foot the processing operation object from shelf 5A, the 5B outbound is to outbound mouth 10.In addition, be arranged in the shelf 5A go out warehouse-in mouthfuls 10,11 also can and go out to put in storage the transfer position between the Jack 7 and walk the transport mechanism that has conveyance boxlike case K between the transfer position of chassis 17 certainly.And then, also can use the top to go up the carrying device of walking carriage form as carrying device 3.At this moment, be arranged on going out warehouse-in mouthfuls 10,11 and also will being arranged to the height that the walking path of walking carriage is gone up on corresponding top of automated warehouse 1 side, but each processing equipment 2A～2G to be arranged on the top go up walking carriage walking path under ground on, the dress thing platform that the walking carriage side has a transfer mechanism on the top will be from this top be gone up walking carriage and liftably be hung, by this lifting dress thing platform, manage throughout on the boxlike case support 13 of device 2A～2G and the top above it and hang down the mechanism that boxlike case K carries out the lifting transfer between (on the head) walking carriage.
In addition, be arranged on the example that expression outbound mouth 10 and warehouse-in mouth were arranged in 11 minutes among warehouse-in mouthful 10,11 figure that of automated warehouse 1 side, but a mouth that goes out to put in storage dual-purpose also can be set, perhaps outbound mouth 10 and warehouse-in mouth 11 are provided with a plurality of respectively.In addition, when the number of processing equipment increases, that can dispose many carrying devices 3 walks chassis 17 (comprising walking carriage on the above-mentioned top) certainly, but, this moment, each path of each walking carriage 17 will separate, the specific processing equipment of accepting also is fine, perhaps the structure that can freely walk on common mutually walking path.During the former situation, need set out warehouse-in mouthfuls 10,11 in automated warehouse 1 side, during the latter, the common warehouse-in mouthfuls 10,11 that goes out can be set walking chassis 17 separately the walking path of walking carriage 17 separately.
Claims (1)
1. handle and safedeposit, it comprises: automated warehouse (1), a plurality of processing equipment (2A～2G) and at described automated warehouse (1) and a plurality of processing equipment (carrying device (3) of the boxlike case (K) of processed workpiece (W) is taken in conveyance between the 2A～2G), it is characterized in that described automated warehouse (1) comprising:
The shelf (5A) of compartment (4) is taken in keeping with three-dimensional described boxlike case of supporting (K);
Form, put in storage in the bottom of described shelf (5A) mouthful (10,11);
Can along described shelf (5A) walking, taking in compartment (4) and going out, put the Jack that goes out to put in storage usefulness (7) of mobile described boxlike case (K) between mouthful (10,11) in keeping;
(2A～2G), the shelf (5A) of described relatively automated warehouse (1) disposes with proper spacing along described shelf (5A) at the described opposition side that goes out to put in storage Jack (7) walking path (6) one sides of usefulness each processing equipment;
Described processing equipment (2A～2G) comprising:
Boxlike case support (13) and workpiece travel mechanism (15), this workpiece travel mechanism (15) takes out the interior workpiece (W) of boxlike case (K) on this boxlike case support (13),, the workpiece of handling (W) is got back in the boxlike case (K) on this boxlike case support (13) when handling position (14) in conveyance;
Described carrying device (3) comprising:
Between the row of the above-mentioned shelf (5A) of described automated warehouse (1) and above-mentioned a plurality of processing equipment (2A-2G), the chassis (17) of the automatic walking that can walk automatically on the ground of the walking path (16) that forms along this shelf (5A); And be arranged on this chassis (17) of walking automatically, be positioned at walking path (16) a side shelf (5A) bottom go out warehouse-in mouthfuls (10,11) and be positioned between the boxlike case support (13) of each processing equipment (2A-2G) of opposite side of walking path (16), transfer boxlike case (K) by the transport object transfer mechanism;
The warehouse-in that goes out of described automated warehouse (1) becomes four row with walking path (16) and above-mentioned a plurality of processing equipment (2A-2G) of the chassis (17) of the automatic walking of the walking path (6) of Jack (7), described shelf (5A), described carrying device (3) according to this serial arrangement.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003007790A JP4036097B2 (en) | 2003-01-16 | 2003-01-16 | Processing and storage facilities |
| JP007790/03 | 2003-01-16 | ||
| JP007790/2003 | 2003-01-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1517747A CN1517747A (en) | 2004-08-04 |
| CN1328133C true CN1328133C (en) | 2007-07-25 |
Family
ID=32897782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100003379A Expired - Fee Related CN1328133C (en) | 2003-01-16 | 2004-01-07 | Handling and managing device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4036097B2 (en) |
| KR (1) | KR20040065984A (en) |
| CN (1) | CN1328133C (en) |
| TW (1) | TWI236999B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101492118B (en) * | 2009-02-10 | 2012-02-08 | 友达光电股份有限公司 | Method for reducing dust in clean room, storage system and transfer device thereof |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100392841C (en) * | 2004-08-12 | 2008-06-04 | 友达光电股份有限公司 | Automatic material handling system |
| JP4502127B2 (en) * | 2005-04-01 | 2010-07-14 | 株式会社ダイフク | Cassette storage and processing plate processing equipment |
| WO2007132535A1 (en) * | 2006-05-15 | 2007-11-22 | Hirata Corporation | Overhead transfer/storage system and overhead transfer/storage method |
| WO2008038393A1 (en) * | 2006-09-28 | 2008-04-03 | Hirata Corporation | Automatic warehouse |
| JP4378659B2 (en) * | 2007-06-28 | 2009-12-09 | 株式会社ダイフク | Goods storage facilities and goods storage facilities for clean rooms |
| JP2009147236A (en) * | 2007-12-17 | 2009-07-02 | Mitsubishi Heavy Ind Ltd | Vacuum processing apparatus |
| CN103274215A (en) * | 2013-05-09 | 2013-09-04 | 上海集成电路研发中心有限公司 | Equipment front end device and storage and transportation method for silicon chip box |
| TWI551530B (en) * | 2014-06-09 | 2016-10-01 | All Ring Tech Co Ltd | Material handling methods and devices |
| CN107380876B (en) * | 2017-07-10 | 2021-07-09 | 格力电器（郑州）有限公司 | Material storage device |
| CN111566023B (en) * | 2018-01-10 | 2021-10-22 | 村田机械株式会社 | Control method of conveying system, conveying system and management device |
| CN108792399B (en) * | 2018-08-21 | 2024-08-06 | 国网甘肃省电力公司检修公司 | Asset visualization intelligent storage equipment used in electric power material supply chain |
| CN109110497B (en) * | 2018-08-31 | 2021-06-11 | 惠科股份有限公司 | Conveying system and conveying method for display panel |
| CN109484816B (en) * | 2018-11-14 | 2021-04-02 | 慕贝尔汽车部件（太仓）有限公司 | Distribution system for products to be processed |
| CN109573429B (en) * | 2018-11-23 | 2020-10-23 | 楚天科技股份有限公司 | Double-layer combined double-station RGV (reduced gauge volume) trolley and automatic three-dimensional warehousing system |
| CN113146196B (en) * | 2021-05-06 | 2022-06-28 | 长春工程学院 | A production line for rail train intelligent wheelset press-fitting three-dimensional warehouse |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000226105A (en) * | 1999-02-05 | 2000-08-15 | Hitachi Kiden Kogyo Ltd | Liquid crystal glass substrate storage device |
| JP2001044261A (en) * | 1999-07-23 | 2001-02-16 | Kisho Koden Kofun Yugenkoshi | Stocker carrying system |
-
2003
- 2003-01-16 JP JP2003007790A patent/JP4036097B2/en not_active Expired - Fee Related
- 2003-12-30 KR KR1020030099589A patent/KR20040065984A/en not_active Ceased
-
2004
- 2004-01-07 CN CNB2004100003379A patent/CN1328133C/en not_active Expired - Fee Related
- 2004-01-15 TW TW093100976A patent/TWI236999B/en not_active IP Right Cessation
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000226105A (en) * | 1999-02-05 | 2000-08-15 | Hitachi Kiden Kogyo Ltd | Liquid crystal glass substrate storage device |
| JP2001044261A (en) * | 1999-07-23 | 2001-02-16 | Kisho Koden Kofun Yugenkoshi | Stocker carrying system |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101492118B (en) * | 2009-02-10 | 2012-02-08 | 友达光电股份有限公司 | Method for reducing dust in clean room, storage system and transfer device thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20040065984A (en) | 2004-07-23 |
| JP4036097B2 (en) | 2008-01-23 |
| TW200418697A (en) | 2004-10-01 |
| TWI236999B (en) | 2005-08-01 |
| JP2004217379A (en) | 2004-08-05 |
| CN1517747A (en) | 2004-08-04 |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
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| CF01 | Termination of patent right due to non-payment of annual fee |