CN1320385C - Coaxial rotation rapid positioning system and method with power drive - Google Patents
Coaxial rotation rapid positioning system and method with power drive Download PDFInfo
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- CN1320385C CN1320385C CNB031429513A CN03142951A CN1320385C CN 1320385 C CN1320385 C CN 1320385C CN B031429513 A CNB031429513 A CN B031429513A CN 03142951 A CN03142951 A CN 03142951A CN 1320385 C CN1320385 C CN 1320385C
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- 238000000034 method Methods 0.000 title claims abstract description 21
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 7
- 239000010409 thin film Substances 0.000 claims abstract description 7
- 230000005540 biological transmission Effects 0.000 claims abstract 6
- 239000011159 matrix material Substances 0.000 claims description 4
- 238000004458 analytical method Methods 0.000 description 13
- 230000002950 deficient Effects 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 238000002372 labelling Methods 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000004807 localization Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
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Abstract
A coaxial rotary positioning system with power drive and a positioning method. The positioning system comprises a moving platform, an X-axis electric motor transmission device, a Y-axis electric motor transmission device, a coaxial rotating device, a coordinate display and a fixed microscope. The transmission system drives the mobile platform to move in the X-axis and Y-axis directions; the coaxial rotating device is used for bearing a display panel and carrying out coordinate axis alignment on the display panel; the coordinate display is used for displaying the numerical values of the X axis and the Y axis when the mobile platform moves and the coordinates of a calibration target point so as to position the calibration target point; and a cross mark of the fixed microscope, which is used as a reference coordinate of the coaxial rotating device for adjusting the orientation of the display panel and searching a gate line and a signal line mark corresponding to the target point on the display panel. By the coaxial rotary positioning system with power drive, a rapid and accurate positioning method is provided when a sample of a thin film transistor liquid crystal display panel is analyzed.
Description
Technical field
The present invention relates to a kind of positioning system and method, particularly a kind of when carrying out the sample analysis of liquid crystal display panel of thin film transistor, can promote the power-actuated coaxial rotation quick positioning system of tool (power driven coaxial-rotating fast-orientation system) and the method for location efficiency.
Background technology
Along with thin film transistor (TFT) (thin one film transistors; TFTs) the quick progress of manufacturing technology has possessed frivolous, power saving and has not had LCD (the liquid crystal display of advantages such as width of cloth ray; LCD), a large amount of being applied in the various electronic products such as computing machine, personal digital aid (PDA) (PDA), wrist-watch, notebook computer, digital camera, LCD and mobile phone.Add the positive input research and development of industry and adopt the production equipment that maximizes, the production cost of LCD is constantly descended, more make the demand of LCD heighten.
Carrying out sample analysis at the product to present TFT processing procedure, when for example electrically analyzing, is that gate line (Gate-line) on this TFT panel and signal wire (Signa1-line) go to detect that it is electrical.Has defective if find certain the bar gate line (Gate-line) and the TFT of certain signal line (Signal-line) confluce, be earlier with the numbering of this gate line of being indicated on this TFT panel, G for example, detected this whole TFT panel and after all defect place all writes down on it, (G100 for example, S100), (G100, S200) and (G200, S300), mark around these fault locations with laser annotation equipment (laser marker) again, so that follow up scan formula electron microscope (Scanner Electron Microscopy; SEM) analysis or focused ion beam microscope (Focused Ion Beam; FIB) the carrying out of Fen Xiing.
At present desire is carried out sem analysis or FIB analysis to the fault location on this TFT panel before, be to pass through manual type earlier, by operating personnel according to the gate line of previous all tool defectives that write down and the numbering of signal wire, (G100 for example, S100), (G100, S200) and (G200, S300), microscopically at board, those defect points on this TFT panel are sought out one by one and marked with the laser annotation equipment immediately in regular turn, so not only to spend many looking for the time, time of not waiting from 30 minutes to 3 hours approximately, the position of looking closely those defect points be the position at the edge of this TFT panel or middle place and decide, and can can't reach 100% accuracy owing to the human error factor.
Therefore, the locator meams of needing badly the impact point of existing liquid crystal display panel of thin film transistor when carrying out sample analysis proposes to improve, and looks for the time and increases accuracy rate so that can effectively save target.
Summary of the invention
Technical matters to be solved by this invention is, above-mentioned deficiency at prior art, power-actuated coaxial rotation quick positioning system of a kind of tool (power driven coaxial-rotatingfast-orientation system) and method are provided, look for the time and increase locating accuracy so that effectively save target.
Power-actuated coaxial rotation quick positioning system of tool provided by the present invention and method are realized by following technical scheme.
The power-actuated coaxial rotation quick positioning system of a kind of tool, it is to be used for the target point of a display panel is positioned, and has the gate line of matrix form and the label of signal wire on this display panel, it is characterized in that comprising:
One mobile platform;
One X-axis and Y-axis electro-motor gearing, it is to be connected in this mobile platform, does moving of X-axis and Y direction to drive this mobile platform;
Shaft rotating device together, it is to be arranged on this mobile platform, in order to carry a display panel and this display panel is carried out the coordinate axis contraposition;
One coordinate display, it is to be connected in this mobile platform, the X-axis when showing that this mobile platform moves and the numerical value of Y-axis and demarcate the coordinate of this target point by this target point a corresponding gate line and signal wire label on this display panel are so that orient this target point; And
One fixing microscope, it is the top that is arranged at this mobile platform, in this microscopical visual field, indicate a cross mark, in order to be registered to this target point corresponding this gate line and this signal wire label on this display panel as this reference coordinate and searching of adjusting this display panel orientation with shaft rotating device.
The power-actuated coaxial rotation quick positioning system of described tool is characterized in that: wherein should comprise with shaft rotating device:
The flat board of one tool graticule line, it is to be used for carrying this display panel, and at least three corners at this flat board respectively form an arc chute, the glide direction of these at least three arc chutes is to be positioned on the same circumference, and the graticule line on should flat board is the reference coordinate that carries out coarse adjustment as a pair of this display panel coordinates axle contraposition; With
At least three reference columns, it is respectively to be arranged in corresponding these at least three arc chutes, and the end of this reference column is to be fixed on this mobile platform, one of these at least three reference columns are fine setting gears, this fine setting gear have a tooth bar that matches with this fine setting gear on the sidewall of corresponding this arc chute, the diameter of remaining reference column is and the bore of its corresponding arc chute fit mutually, rotate this this tooth bar of fine setting gear driven, make this flat board make angular movement by this along this circumference.
The power-actuated coaxial rotation quick positioning system of described tool, it is characterized in that: wherein this fine setting gear has a graduation apparatus chi, through being converted into this dull and stereotyped move angle, so that carry out the fine setting to this display panel coordinates axle contraposition.
The power-actuated coaxial rotation quick positioning system of described tool, it is characterized in that: wherein this display panel is the liquid crystal display panel of thin film transistor of an analysis to be marked.
The method that the present invention also provides the power-actuated coaxial rotation quick positioning system of a kind of apparatus to come the target point to display panel to position has the gate line of matrix form and the label of signal wire on this display panel, it is characterized in that comprising:
This display panel is seated on the mobile platform:
By the cross mark of establishing of marking in the fixing microscopical visual field that is arranged at this mobile platform top, this display panel is carried out the coordinate axis contraposition, make gate line and signal wire on this display panel be parallel to this cross mark fully;
By an X-axis that is connected in this mobile platform and Y-axis electro-motor kinematic train, move this display panel on this mobile platform, and by fixing microscopical cross mark, searching is registered to the corresponding gate line label of this target point on this display panel:
The X-axis that will be when showing that this mobile platform moves and the numerical value of Y-axis and demarcate in order to the Y-axis numerical value of a coordinate display of the coordinate of demarcating this target point and to be y1;
Move this display panel on this mobile platform by this kinematic train, and, seek and be registered to the corresponding signal wire label of this target point on this display panel by should fixing microscopical cross mark;
It is x1 that the X-axis numerical value of this coordinate display is demarcated; And
This mobile platform is moved to this coordinate display displaing coordinate for (x1 y1) locates, and correspond to the plotted point on this display panel this moment under this fixing microscopical cross mark, is the position of this target point.
The method that the power-actuated coaxial rotation quick positioning system of described apparatus comes the target point to display panel to position, it is characterized in that: the step of this display panel being carried out the coordinate axis contraposition, be to reach by the together shaft rotating device that is arranged on this mobile platform, this comprises with shaft rotating device:
The flat board of one tool graticule line, it is to be used for carrying this display panel, and at least three corners at this flat board respectively form an arc chute, the glide direction of these at least three arc chutes is positioned on the same circumference, and the graticule line on should flat board is the reference coordinate that carries out coarse adjustment as to this display panel coordinates axle contraposition;
At least three reference columns, it is respectively to be arranged in corresponding these at least three arc chutes, and the end of this reference column is to be fixed on this mobile platform, one of these at least three reference columns are fine setting gears, this fine setting gear have a tooth bar that matches with this fine setting gear on the sidewall of corresponding this arc chute, the diameter of remaining reference column is and the bore of its corresponding arc chute fit mutually, wherein, rotate this this tooth bar of fine setting gear driven, make this flat board make angular movement by this along this circumference.
The method that the power-actuated coaxial rotation quick positioning system of described apparatus comes the target point to display panel to position, it is characterized in that: when this display panel is carried out coordinate axis contraposition coarse steps, cross mark on four corners of this display panel is aimed at the x axle and the y axle of this dull and stereotyped graticule line, makes the level of this display panel and x axle and the y axle that vertical direction roughly respectively is parallel to this graticule line.
The method that the power-actuated coaxial rotation quick positioning system of described apparatus comes the target point to display panel to position, it is characterized in that: wherein this fine setting gear has a graduation apparatus chi, through being converted into this dull and stereotyped move angle, so that carry out fine setting to this display panel coordinates axle contraposition.
The first enforcement aspect of the present invention is to disclose the power-actuated coaxial rotation quick positioning system of a kind of tool, and it is to be used for the target point of a display panel is positioned, and wherein has the gate line of matrix form and the label of signal wire on this display panel.This positioning system comprises a mobile platform, an X-axis and Y-axis electro-motor gearing, the fixing microscope of shaft rotating device, a coordinate display and together.This kinematic train is to be connected in this mobile platform, does moving of X-axis and Y direction to drive this mobile platform; Should be to be arranged on this mobile platform with shaft rotating device, in order to carry a display panel and this display panel is carried out the coordinate axis contraposition; This coordinate display is to be connected in this mobile platform, the X-axis when showing that this mobile platform moves and the numerical value of Y-axis and demarcate the coordinate of this target point by this target point a corresponding gate line and signal wire label on this display panel are so that orient this target point; And fixedly microscope is the top that is arranged at this mobile platform, should indicate a cross mark in the fixing microscopical visual field, in order to as being registered to this target point corresponding this gate line and this signal wire label on this display panel with reference coordinate and the searching that shaft rotating device is adjusted this display panel orientation.
Of the present invention second to implement aspect be to disclose the method that a kind of target point that is used for to a display panel positions.At first, this localization method is that this display panel is seated on the mobile platform, and by the cross mark of establishing of marking in the fixing microscopical visual field that is arranged at this mobile platform top, this display panel is carried out the coordinate axis contraposition, make gate line and signal wire on this display panel be parallel to this cross mark fully; Afterwards, by an X-axis that is connected in this mobile platform and Y-axis electro-motor kinematic train, move this display panel on this mobile platform, and by fixing microscopical cross mark, searching is registered to this target point behind the corresponding gate line label on this display panel, the X-axis that will be when showing that this mobile platform moves and the numerical value of Y-axis and demarcate in order to the Y-axis numerical value of a coordinate display of the coordinate of demarcating this target point and to be y1; Then, move this display panel on this mobile platform by this kinematic train, and by fixing microscopical cross mark, seek and be registered to this target point behind the corresponding signal wire label on this display panel, orientate the X-axis numerical value of this coordinate display as x1; At last, this mobile platform is moved to this coordinate display displaing coordinate for (x1 y1) locates, and correspond to the plotted point on this display panel this moment under this fixing microscopical cross mark, is the position of this target point.
The invention has the advantages that:
Utilize coaxial rotation quick positioning system of the present invention to seek out those defect points, so that make laser labelling and carry out sem analysis or the FIB analysis, as long as the time of looking for that it spent is approximately 3-5 minute, with respect to passing through the artificial mode of seeking at present, can significantly reduce 10-60 looking for the time doubly, and the accuracy rate of positioning system of the present invention can reach 100%.Moreover positioning system of the present invention is applicable to the panel of various sizes, and is suitable for off-line (off-line) and uses for example lab analysis.Therefore,, not only can effectively save target and look for the time, and increase locating accuracy by power-actuated coaxial rotation quick positioning system of tool of the present invention and localization method.
In conjunction with appended graphic, can understand above-mentioned technology contents and plurality of advantages of the present invention by following detailed description easily.
Description of drawings
Fig. 1 is the configuration schematic diagram of a preferable enforcement aspect of the power-actuated coaxial rotation quick positioning system of tool of the present invention;
Fig. 2 A is the vertical view of the same shaft rotating device of Fig. 1; And
Fig. 2 B is the schematic perspective view of fine setting gear of the same shaft rotating device of Fig. 1.
Embodiment
Seeing also Fig. 1, is the configuration schematic diagram of a preferable enforcement aspect of power-actuated coaxial rotation quick positioning system 10 of the present invention.This positioning system 10 comprises a mobile platform 11, an X-axis and Y-axis electro-motor gearing 12, the fixing microscope 15 of shaft rotating device 13, a coordinate display 14 and together.Wherein, this mobile platform 11 is connected with Y-axis electro-motor gearing 12 with this X-axis, and in order to carrying and drive to be provided with thereon should be with shaft rotating device 13.This coordinate display 14 is connected in this mobile platform 11, and the numerical value of X-axis when showing that this gearing 12 moves and Y-axis and in order to the monitoring and the coordinate points of demarcating a target point.The flat board 131 that should comprise a tool graticule line with shaft rotating device 13 (seeing also the vertical view of the same shaft rotating device 13 shown in Fig. 2 A), three reference columns 132 and one have the fine setting gear 133 of scale rear sight a, wherein, the flat board 131 of this tool graticule line is the liquid crystal display panel of thin film transistor 16 that is used for carrying an analysis to be marked, and four corners at this flat board respectively form an arc chute 134, so that insert this three reference columns 132 and this fine setting gear 133 respectively, the glide direction of these four arc chutes is to be positioned on the same circumference, and the end of these three reference columns 132 and this fine setting gear 133 is to be fixed on (not shown) on this mobile platform 11, as Fig. 2 B this fine setting gear 133 schematic perspective view shown in, on the sidewall of the arc chute 134 at these fine setting gear 133 places, has the tooth bar 135 that corresponds to this fine setting gear 133, can when this fine setting gear 133 of rotation, drive this tooth bar 135, and make this flat board 131 in this arc chute, make angular movement, and the scale rear sight a on this fine setting gear 133 can be through being converted into the move angle of this flat board 131, so that the adjustment of coordinate axis contraposition.Fixedly microscope 15 is the tops that are arranged at this mobile platform 11, has a cross mark (not shown) in it, in order to be adjusted at the reference coordinate in these display panel 16 orientation on this flat board as this fine setting gear.
The power-actuated coaxial rotation quick positioning system 10 of tool of the present invention, as shown in Figure 1, can provide one fast and the accurate localization method, make the operator can follow the gate line on this display panel 16 and the numbering of signal wire, search out the TFT target point of intersection fast, to finish the work of laser labelling.
At first, carry out coordinate axis contraposition step, the display panel 16 of an analysis to be marked is seated on this flat board with this tool graticule line of shaft rotating device 13.Afterwards, all aim at the x axle and the y axle of this dull and stereotyped graticule line earlier with the cross mark (mark) on 16 4 corners of this display panel, do four jiaos of contraposition coarse adjustment, make the level of this display panel 16 and x axle and the y axle that vertical direction roughly respectively is parallel to this graticule line.Then, rotate the fine setting gear 133 that this has scale rear sight a, by at this fixing reference coordinate of the cross mark in the microscope 15, make gate line (horizontal line) on this display panel 16 and signal wire (perpendicular line) fully respectively be parallel to this fixedly cross mark in the microscope 15.At this moment, gate line and signal wire on this display panel 16, promptly parallel with the shown X-axis of this coordinate display 14 respectively (that is when same gate line moves, Y-axis show be always certain value) with Y-axis.
Then, according to the gate line of previous all tool defectives that write down and the numbering of signal wire, carry out the coordinate points positioning step.Move this display panel 16 that is seated on this mobile platform 11 by this gearing 12, and by this fixedly the cross mark of microscope 15 seek and to be registered to the gate line that indicates G100 at this display panel 16 upper side edges, orientate the Y-axis numerical value of this coordinate display 14 as y1 this moment, move this display panel 16 on this mobile platform 11 afterwards again, the signal wire that these display panel 16 upper side edges is indicated S100 is registered to this fixedly cross mark of microscope 15, and orientate the X-axis numerical value of this coordinate display 14 as x1 this moment.So, by this coordinate display 14, this mobile platform 11 is moved to these coordinate display 14 displaing coordinates, and (x1 y1) locates, this moment this fixedly under the cross mark of microscope 15 institute correspond to plotted point on this display panel 16, be first defective TFT target point of institute's desire searching.Just locate to mark around this first defective TFT with the laser annotation equipment afterwards.Then, be positioned to be same as above-mentioned coordinate points positioning step, to find out that (G100, second defective TFT target point S200) also finished laser labelling.When other defect point is all sought out one by one and immediately with laser labelling after, this display panel 16 that will finish mark more carries out sem analysis or FIB analyzes.
The above is to utilize preferred embodiment to describe the present invention in detail, but not limits the scope of the invention, all can understand and know this type of skill personage, suitably do slightly change and adjustment, will not lose main idea of the present invention place, also do not break away from the spirit and scope of the present invention.
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031429513A CN1320385C (en) | 2003-06-11 | 2003-06-11 | Coaxial rotation rapid positioning system and method with power drive |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031429513A CN1320385C (en) | 2003-06-11 | 2003-06-11 | Coaxial rotation rapid positioning system and method with power drive |
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| Publication Number | Publication Date |
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| CN1566971A CN1566971A (en) | 2005-01-19 |
| CN1320385C true CN1320385C (en) | 2007-06-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB031429513A Expired - Fee Related CN1320385C (en) | 2003-06-11 | 2003-06-11 | Coaxial rotation rapid positioning system and method with power drive |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108267871A (en) * | 2017-01-04 | 2018-07-10 | 京东方科技集团股份有限公司 | A kind of angle adjusts jig |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102393576A (en) * | 2011-08-03 | 2012-03-28 | 深圳市华星光电技术有限公司 | Visual checking machine of glass baseplate in liquid crystal display and checking method thereof |
| US8854616B2 (en) | 2011-08-03 | 2014-10-07 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Visual inspection apparatus for glass substrate of liquid crystal display and inspection method thereof |
| CN109283708B (en) * | 2017-07-20 | 2021-12-21 | 合肥欣奕华智能机器有限公司 | Reference corrector, detection device and coordinate conversion method of detection device |
| JP7372311B2 (en) * | 2018-04-17 | 2023-10-31 | トーテムス・ポジション・ソシエテ・ア・レスポンサビリテ・リミテ | Part positioning device and positioning method |
| CN116295194B (en) * | 2023-04-28 | 2023-09-05 | 沈阳和研科技股份有限公司 | Coordinate determination method and device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5745513A (en) * | 1980-07-19 | 1982-03-15 | Leitz Ernst Gmbh | Device for displacing tray of optical machine |
| JPH11119114A (en) * | 1997-08-16 | 1999-04-30 | Carl Zeiss Jena Gmbh | Coaxial drive for microscope stage |
| JP2002196248A (en) * | 2000-12-27 | 2002-07-12 | Runakkusu Kk | Tv imaging device |
| JP5520204B2 (en) * | 2010-12-02 | 2014-06-11 | 日立アロカメディカル株式会社 | Probe cover mounting device |
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2003
- 2003-06-11 CN CNB031429513A patent/CN1320385C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5745513A (en) * | 1980-07-19 | 1982-03-15 | Leitz Ernst Gmbh | Device for displacing tray of optical machine |
| JPH11119114A (en) * | 1997-08-16 | 1999-04-30 | Carl Zeiss Jena Gmbh | Coaxial drive for microscope stage |
| JP2002196248A (en) * | 2000-12-27 | 2002-07-12 | Runakkusu Kk | Tv imaging device |
| JP5520204B2 (en) * | 2010-12-02 | 2014-06-11 | 日立アロカメディカル株式会社 | Probe cover mounting device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108267871A (en) * | 2017-01-04 | 2018-07-10 | 京东方科技集团股份有限公司 | A kind of angle adjusts jig |
| WO2018126637A1 (en) * | 2017-01-04 | 2018-07-12 | 京东方科技集团股份有限公司 | Angle-adjustable jig, angle-adjustable system and method of defect analysis for liquid crystal display |
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| CN1566971A (en) | 2005-01-19 |
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