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CN1360394A - Standing-wave ultrasonic motor rotating bidirectionally - Google Patents

Standing-wave ultrasonic motor rotating bidirectionally Download PDF

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CN1360394A
CN1360394A CN 01138137 CN01138137A CN1360394A CN 1360394 A CN1360394 A CN 1360394A CN 01138137 CN01138137 CN 01138137 CN 01138137 A CN01138137 A CN 01138137A CN 1360394 A CN1360394 A CN 1360394A
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stator
central shaft
teeth
ring
ultrasonic motor
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CN1141781C (en
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严仁博
褚祥诚
李龙土
桂治轮
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Tsinghua University
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Abstract

可双向旋转的驻波超声马达属于压电驱动器技术领域,其特征在于,它含有:由下端面上各区极化方向一致、间距相等、分割数是波长数4倍而上端面为统一电极的压电陶瓷环片以及和它相连且有驱动齿在周向等间距排列其中心位于极化区中央齿数为波长数二倍的金属环组成的定子,由和上述驱动齿紧密接触的摩擦环片以及和它相连的金属环组成的转子,中心轴,由中心轴调整螺钉、弹性调整件组成的预紧调整机构,内壁有中心轴定位用的环形轴套和球轴承的底座以及壳体,其中,定子在中心处与底座固定,压电陶瓷环片整片通电且在彼此紧邻的两个分割区片段中,每两对分割区各外接不同极性的电源。它具有陶瓷极化工艺简便,驱动方式简单,安装调整方便,转动平稳,输出力矩大等优点。

Figure 01138137

The bidirectionally rotatable standing wave ultrasonic motor belongs to the technical field of piezoelectric actuators, and is characterized in that it contains: a piezoelectric motor with the same polarization direction and equal spacing in each area on the lower end surface, the number of divisions is 4 times the number of wavelengths, and the upper end surface is a unified electrode. The electric ceramic ring piece and the stator composed of a metal ring connected with it and having driving teeth arranged at equal intervals in the circumferential direction, the center of which is located in the center of the polarization zone, and the number of teeth is twice the number of wavelengths, consists of a friction ring piece in close contact with the driving teeth and The rotor composed of the metal ring connected to it, the central shaft, the preload adjustment mechanism composed of the central shaft adjustment screw and the elastic adjustment piece, the inner wall has the ring bushing for the positioning of the central shaft, the base of the ball bearing and the housing, wherein, The stator is fixed to the base at the center, the piezoelectric ceramic ring slices are energized as a whole, and in the two adjacent partition segments, every two pairs of partitions are externally connected with power supplies of different polarities. It has the advantages of simple ceramic polarization process, simple driving method, convenient installation and adjustment, stable rotation, and large output torque.

Figure 01138137

Description

可双向旋转的驻波超声马达Standing wave ultrasonic motor with bidirectional rotation

技术领域technical field

一种可双向旋转的驻波超声马达属于压电驱动器领域。A standing wave ultrasonic motor capable of bidirectional rotation belongs to the field of piezoelectric drivers.

背景技术Background technique

压电超声波马达由于自身响应速度快、断电自锁,无电磁扰动,低速运转等特点作为精密仪器的驱动元件有着十分广泛的应用,尤其是可双向旋转的驻波压电超声波马达更具有市场竞争力。1998年日本“应用物理”杂志(Jpn.J.Appl.Phys)第37期p2966~2969页、名称为“Effect of Pressing Force Applied to a Rotor on Disk-Type Ultrasonic Motor”(盘形超声波马达转子的受压效应)中提出了一种驻波压电超声波马达,其结构如图1~图2所示。它包括预紧调整机构11、转子12和定子13三大部分。其中,预紧调整机构包括螺母110、弹簧111、轴承112和中间的定位螺杆113;转子12由开槽的金属圆片120和圆摩擦片121组成;定子13由铣有齿1310的金属圆板131、传感陶瓷132和驱动压电陶瓷片133组成,驱动压电陶瓷片133采用不同分割区间的交替正、反向极化,齿位于相邻两个同极性极化区的交界线上。分别给引线1和2加交流电便可在定子的不同位置激发出同一振动模态,实现双向旋转。但它具有以下缺点:1、驱动压电陶瓷片133由于不同的分割区间的极化方向不一致,给陶瓷极化工艺带来难度,极化后很难保证正、反方向电参数的一致性,而且在陶瓷正、反极化的分界线处有极化形成的内应力,会影响马达定子激发出纯净的振动模态,一般会有一些杂波干扰;2、马达定子采用板状结构,激发的模态是(1、3)模式,即在定子的圆周有一条节圆。一般这种模态的定子固定在节圆处,但该马达在中心定位螺杆处固定,会形成对马达定子振动的抑制,影响转子力矩的输出;3、马达定子驱动齿的个数少,增大了定、转子之间的摩擦损耗,影响马达使用寿命。Piezoelectric ultrasonic motors have a wide range of applications as driving components of precision instruments due to their fast response speed, self-locking when power is off, no electromagnetic disturbance, and low-speed operation, especially bidirectional standing wave piezoelectric ultrasonic motors. Competitiveness. In 1998, Japan's "Applied Physics" magazine (Jpn.J.Appl.Phys) No. 37 p2966-2969 pages, the name is "Effect of Pressing Force Applied to a Rotor on Disk-Type Ultrasonic Motor" (disc-shaped ultrasonic motor rotor) A standing wave piezoelectric ultrasonic motor is proposed in the paper, the structure of which is shown in Fig. 1-Fig. 2. It includes preload adjustment mechanism 11, rotor 12 and stator 13 three parts. Among them, the preload adjustment mechanism includes a nut 110, a spring 111, a bearing 112 and a positioning screw 113 in the middle; the rotor 12 is composed of a slotted metal disc 120 and a circular friction plate 121; 131. Composed of sensing ceramics 132 and driving piezoelectric ceramics 133, the driving piezoelectric ceramics 133 adopts alternate forward and reverse polarizations of different division intervals, and the teeth are located on the boundary line between two adjacent polarized areas of the same polarity . Applying alternating current to lead wires 1 and 2 respectively can excite the same vibration mode at different positions of the stator to realize bidirectional rotation. But it has the following disadvantages: 1. Due to the inconsistent polarization directions of the different divisions of the driving piezoelectric ceramic sheet 133, it brings difficulties to the ceramic polarization process, and it is difficult to ensure the consistency of the electrical parameters in the forward and reverse directions after polarization. Moreover, there is internal stress formed by polarization at the dividing line between the positive and negative polarization of ceramics, which will affect the pure vibration mode excited by the motor stator, and generally there will be some clutter interference; 2. The motor stator adopts a plate structure, which excites The mode of is (1,3) mode, that is, there is a pitch circle around the circumference of the stator. Generally, the stator of this mode is fixed at the pitch circle, but the motor is fixed at the central positioning screw, which will suppress the vibration of the motor stator and affect the output of the rotor torque; 3. The number of driving teeth of the motor stator is small, increasing The friction loss between the stator and the rotor is increased, which affects the service life of the motor.

发明内容Contents of the invention

本发明的目的在于提供一种陶瓷极化工艺简便,驱动方式简单,调整方便,转子转动平稳,输出力矩大和寿命长的可双向旋转的驻波超声马达。The object of the present invention is to provide a standing wave ultrasonic motor capable of bidirectional rotation with simple ceramic polarization process, simple driving mode, convenient adjustment, stable rotor rotation, large output torque and long service life.

本发明的特征在于,它含有:由下端面上每分割区的极化方向一致,间距相等且分割数是波长数的四倍,而上端面为统一电极的压电陶瓷环片以及和它相连且驱动齿在圆周方向等间距排列而齿的中心位于极化区中央齿数为波长数二倍的金属环组成的定子,由和上述驱动齿紧密接触的摩擦环片以及和它相连的金属环片组成的转子,中心轴,由中心轴调节螺钉、弹性调整件组成的预紧调整机构,内壁有中心轴定位用环形轴套和标准球轴承且在中心处与定子固定的底座以及与它相连的壳体;其中,在每分割区均处于通电工作状态的同时,在依次由相邻两对分割区组成且彼此紧邻的二个分割区片段中,两对分割区各自接用于控制马达正反转的不同极性的单路高频交流信号。压电陶瓷环片上每相邻两个极化区分别外接用于控制马达正、反转的单路高频交流信号。分割区的分割数是波长数的4倍。The present invention is characterized in that it contains: the polarization direction of each division area on the lower end surface is consistent, the spacing is equal and the number of divisions is four times the number of wavelengths, and the upper end surface is a piezoelectric ceramic ring piece with a unified electrode and connected to it. And the driving teeth are arranged at equal intervals in the circumferential direction and the center of the teeth is located in the center of the polarized area. The stator is composed of a metal ring whose number of teeth is twice the number of wavelengths. The rotor, the central shaft, the preload adjustment mechanism composed of the central shaft adjusting screw and the elastic adjustment piece, the inner wall has an annular bushing for positioning the central shaft and a standard ball bearing, and the base fixed to the stator at the center and the base connected to it The casing; wherein, while each partition is in an energized working state, in the two partition segments which are sequentially composed of two adjacent pairs of partitions and are adjacent to each other, the two pairs of partitions are respectively connected to control the positive and negative directions of the motor. Single-channel high-frequency AC signals of different polarities. Every two adjacent polarized areas on the piezoelectric ceramic ring piece are externally connected with a single-channel high-frequency AC signal for controlling forward and reverse rotation of the motor. The number of divisions in the division area is four times the number of wavelengths.

使用证明:它可实现预期目的。Proof of Use: It performs its intended purpose.

附图说明Description of drawings

图1:现有的可双向旋转的驻波超声马达的立体装配图。Figure 1: A three-dimensional assembly diagram of an existing standing wave ultrasonic motor that can rotate in both directions.

图2:图1中驱动压电陶瓷片的电极分割区俯视图。Figure 2: Top view of the electrode division area driving the piezoelectric ceramic sheet in Figure 1.

图3:本发明提出的可双向旋转的驻波超声马达的剖视图。Fig. 3: A cross-sectional view of the bidirectionally rotatable standing wave ultrasonic motor proposed by the present invention.

图4:本发明提出的可双向旋转的驻波超声马达的原理示意图。Fig. 4: Schematic diagram of the principle of the bidirectionally rotating standing wave ultrasonic motor proposed by the present invention.

图5:本发明提出的可双向旋转的驻波超声马达中压电陶瓷环片下端面上分割区a、b、c、d的分布及其与单路高频交流信号的连接示意图。Fig. 5: Schematic diagram of the distribution of the partitions a, b, c, and d on the lower end surface of the piezoelectric ceramic ring in the bidirectionally rotatable standing wave ultrasonic motor proposed by the present invention and its connection with a single high-frequency AC signal.

图6:图5中的压电陶瓷环片的上端面示意图。Fig. 6: A schematic diagram of the upper end face of the piezoelectric ceramic ring piece in Fig. 5 .

具体实施方式Detailed ways

在图2中,"+"、"-"表示电畴即极化方向,1、2分别表示正、反转时接单路高频交流信号的引线,1310是驱动齿。In Fig. 2, "+" and "-" represent electric domains, that is, polarization directions, 1 and 2 respectively represent lead wires connected to a single high-frequency AC signal during forward and reverse rotation, and 1310 is a driving tooth.

在图3-图4中,定子21由上端面是统一电极,下端各极化区电畴方向一致、间距相等、采用电极分隔且分割数是波长数4倍的压电陶瓷环片212以及与其相粘接的金属环211组成。电畴方向一致使陶瓷极化工艺简化且极化区间不会产生内应力。金属环211上有8个驱动齿2110,每个齿的空间间距相差半个波长。各齿2110的外齿侧与内齿侧采用斜角设计,内齿侧的齿槽比外齿侧的齿槽深,其目的是使当驱动齿2110变形时可基本相当于直梁的变形,比较接近于理想的弹性变形,也有利于马达的大力矩输出。转子20由与驱动齿2110紧密接触的摩擦环片202和与其粘接的金属环片201组成。其驱动原理请见图4。图中的符号、代表所加电压的极性,当按图5所示使所有分割区都处于通电工作状态,而且在驻波A和B相差1/4波长的条件下,使如图5所示,分割区a即a1~a4和分割区b即b1~b4处于正极性,而分割区c即c1~c4和d即d1~d4处于负极性,即可得图4(b)所示振动模式,若使分割区b、c处于负极性a,d处于正极性,则如图4(a)所示,马达旋转方向相反。如图4(b)所示,定子21始终在实线与虚线的范围内往复振动,P点是超声振动的波腹点,N点是振幅始终为零的波节处,由于此时的驱动齿2110在P点的左1/4波长的范围内,造成齿2110摆动的曲线斜向左,则转子20的移动方向向左,图中的箭头表示各驱动齿2110顶端的移动方向和距离的示意图。预紧即预应力调整机构23由中心轴22靠近转子20一端的螺钉230、垫片231、蝶形弹簧232、橡胶环片233以及靠近中心轴22另一侧的定位用预应力调整垫片234、标准轴用卡环235组成。螺钉230的作用在于当马达使用时通过螺钉230对中心轴22的位置进行调整,从而为马达在使用中对中心轴22与外接件的位置对正带来方便。底座24的内壁有中心轴22定位用的环形轴套241和标准球轴承242,定子21在中心处与马达的底座24用螺钉固定,因本发明采用环形结构,振动集中在定子21的外边缘,故不会影响定子21的振动;而且定子上不存在节圆,振动基本集中在驱动齿2110处,也有利于马达大力矩输出。In Fig. 3-Fig. 4, the upper end surface of the stator 21 is a unified electrode, and the electric domains in the polarized regions at the lower end have the same direction and the same spacing, and are separated by electrodes, and the piezoelectric ceramic ring piece 212 with the number of divisions four times the number of wavelengths and its Metal rings 211 bonded together. The consistent electric domain direction simplifies the ceramic polarization process and no internal stress will be generated in the polarization region. There are 8 driving teeth 2110 on the metal ring 211, and the spacing between each tooth differs by half a wavelength. The outer tooth side and the inner tooth side of each tooth 2110 adopt oblique angle design, and the tooth groove of the inner tooth side is deeper than the tooth groove of the outer tooth side. It is relatively close to ideal elastic deformation, which is also conducive to the high torque output of the motor. The rotor 20 is composed of a friction ring piece 202 in close contact with the driving teeth 2110 and a metal ring piece 201 bonded thereto. See Figure 4 for its driving principle. The symbols  and  in the figure represent the polarity of the applied voltage. When all the divisions are in the energized working state as shown in Figure 5, and under the condition that the standing waves A and B differ by 1/4 wavelength, the As shown in 5, partition a, i.e. a 1 ~ a 4 and partition b, i.e. b 1 ~ b 4 are in positive polarity, while partition c, i.e. c 1 ~ c 4 and d, i.e. d 1 ~ d 4 are in negative polarity, namely The vibration mode shown in Figure 4(b) can be obtained. If the divisions b and c are in the negative polarity a, and d is in the positive polarity, as shown in Figure 4(a), the motor rotation direction is opposite. As shown in Figure 4(b), the stator 21 always reciprocates within the range of the solid line and the dotted line, the P point is the antinode point of the ultrasonic vibration, and the N point is the node where the amplitude is always zero. The teeth 2110 are within the range of the left 1/4 wavelength of point P, causing the curve of the swing of the teeth 2110 to be oblique to the left, and then the moving direction of the rotor 20 is left. The arrows in the figure indicate the moving direction and distance of the tops of the driving teeth 2110 schematic diagram. The pre-tightening or pre-stress adjustment mechanism 23 is composed of a screw 230, a washer 231, a disc spring 232, a rubber ring 233 near the end of the central shaft 22 near the rotor 20, and a pre-stress adjustment washer 234 for positioning near the other side of the central shaft 22. , The standard shaft is made up of snap ring 235. The function of the screw 230 is to adjust the position of the central shaft 22 through the screw 230 when the motor is in use, so as to facilitate the alignment of the central shaft 22 and the external parts during the use of the motor. The inner wall of the base 24 has an annular shaft sleeve 241 and a standard ball bearing 242 for the positioning of the central shaft 22, and the stator 21 is fixed with the base 24 of the motor at the center, because the present invention adopts a ring structure, and the vibration is concentrated on the outer edge of the stator 21 , so it will not affect the vibration of the stator 21; moreover, there is no pitch circle on the stator, and the vibration is basically concentrated at the driving teeth 2110, which is also conducive to the high torque output of the motor.

此外,转子20的金属环片202和定子21的金属环211用的材料分别是铝和青铜。In addition, the materials used for the metal ring piece 202 of the rotor 20 and the metal ring 211 of the stator 21 are aluminum and bronze, respectively.

由此可见,本发明具有陶瓷极化工艺简便,驱动方式简单,转子转动平稳,输出力矩大、调整安装方便等一系列优点。It can be seen that the present invention has a series of advantages such as simple ceramic polarization process, simple driving method, stable rotor rotation, large output torque, and convenient adjustment and installation.

Claims (4)

1、一种可双向旋转的驻波超声马达,含有定子、转子和预紧调整机构,其特征在于,它含有:由下端面上每分割区的极化方向一致,间距相等且分割数是波长数四倍,而上端面为统一电极的压电陶瓷环片以及和它相连且驱动齿在圆周方向等间距排列而齿的中心位于极化区中央齿数为波长数二倍的金属环组成的定子,由和上述驱动齿紧密接触的摩擦环片以及和它相连的金属环片组成的转子,中心轴,由中心轴调节螺钉、弹性调整件组成的预紧调整机构,内壁有中心轴定位用环形轴套和标准球轴承且在中心处与定子固定的底座以及与它相连的壳体;其中,在每分割区均处于通电工作状态的同时,在依次由相邻两对分割区组成且彼此紧邻的二个分割区片段中,两对分割区各自接用于控制马达正反转的不同极性的单路高频交流信号。压电陶瓷环片上每相邻两个极化区分别外接用于控制马达正、反转的单路高频交流信号。1. A standing wave ultrasonic motor capable of bidirectional rotation, comprising a stator, a rotor and a preload adjustment mechanism, characterized in that it contains: the polarization direction of each division on the lower end surface is consistent, the spacing is equal and the division number is the wavelength The stator is composed of a piezoelectric ceramic ring sheet with four times the number, and the upper end surface is a unified electrode, and a metal ring connected to it and the driving teeth are arranged at equal intervals in the circumferential direction, and the center of the teeth is located in the center of the polarization zone. The number of teeth is twice the number of wavelengths , a rotor composed of a friction ring in close contact with the above-mentioned driving teeth and a metal ring connected to it, a central shaft, a preload adjustment mechanism composed of a central shaft adjusting screw and an elastic adjustment member, and the inner wall has a ring for positioning the central shaft A shaft sleeve and a standard ball bearing and a base fixed to the stator at the center and a casing connected to it; wherein, while each partition is in an energized working state, it is composed of two adjacent pairs of partitions in sequence and next to each other In the two partition sections, the two pairs of partitions are respectively connected to single-channel high-frequency AC signals of different polarities used to control the forward and reverse rotation of the motor. Every two adjacent polarized areas on the piezoelectric ceramic ring piece are externally connected with a single-channel high-frequency AC signal for controlling forward and reverse rotation of the motor. 2、据权利要求1的可双向旋转的驻波超声马达,其特征在于,各驱动齿的空间间距相差半个波长。2. The bidirectionally rotatable standing wave ultrasonic motor according to claim 1, characterized in that the spatial distances of the drive teeth differ by half a wavelength. 3、根据权利要求1的可双向旋转的驻波超声马达,其特征在于:所述的分割区的分割数是波长数的4倍。3. The bidirectionally rotatable standing wave ultrasonic motor according to claim 1, characterized in that the number of divisions in said division area is four times the number of wavelengths. 4、根据权利要求1的可双向旋转的驻波超声马达,其特征在于:所述的压电陶瓷环片的一侧采用统一的电极,而另一侧是采用电极等间隔式分割的,极化方向沿陶瓷厚度方向。4. The standing wave ultrasonic motor capable of bidirectional rotation according to claim 1, characterized in that: one side of the piezoelectric ceramic ring adopts uniform electrodes, while the other side is divided by electrodes at equal intervals. The chemicalization direction is along the thickness direction of the ceramic.
CNB01138137XA 2001-12-31 2001-12-31 standing-wave ultrasonic motor rotating bidirectionally Expired - Fee Related CN1141781C (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100459403C (en) * 2005-04-18 2009-02-04 南京航空航天大学 Standing wave frequency conversion stepping ultrasonic motor
CN101719733A (en) * 2010-01-14 2010-06-02 马海英 piezoelectric ceramic motor
CN1832325B (en) * 2006-03-16 2012-02-08 中国科学技术大学 Self-locking high-precision rotary drive motor
CN103107736A (en) * 2013-02-01 2013-05-15 东南大学 Positive and negative transfer phase control method of three-power-supply circular traveling wave ultrasonic motor
CN103753603A (en) * 2014-01-29 2014-04-30 哈尔滨工业大学 Single-freedom-degree rotating mechanical arm driven by piezoelectric ultrasonic vibrator
CN104506075A (en) * 2014-10-16 2015-04-08 南京航空航天大学 Constant precompression ultrasonic motor capable of bearing axial force
CN106899227A (en) * 2017-03-30 2017-06-27 东北林业大学 A kind of enhanced intelligent-driving motor

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100459403C (en) * 2005-04-18 2009-02-04 南京航空航天大学 Standing wave frequency conversion stepping ultrasonic motor
CN1832325B (en) * 2006-03-16 2012-02-08 中国科学技术大学 Self-locking high-precision rotary drive motor
CN101719733A (en) * 2010-01-14 2010-06-02 马海英 piezoelectric ceramic motor
CN103107736A (en) * 2013-02-01 2013-05-15 东南大学 Positive and negative transfer phase control method of three-power-supply circular traveling wave ultrasonic motor
CN103107736B (en) * 2013-02-01 2015-07-01 东南大学 Positive and negative transfer phase control method of three-power-supply circular traveling wave ultrasonic motor
CN103753603A (en) * 2014-01-29 2014-04-30 哈尔滨工业大学 Single-freedom-degree rotating mechanical arm driven by piezoelectric ultrasonic vibrator
CN104506075A (en) * 2014-10-16 2015-04-08 南京航空航天大学 Constant precompression ultrasonic motor capable of bearing axial force
CN106899227A (en) * 2017-03-30 2017-06-27 东北林业大学 A kind of enhanced intelligent-driving motor

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