CN1212287C - Firing clamp for electronic element - Google Patents
Firing clamp for electronic element Download PDFInfo
- Publication number
- CN1212287C CN1212287C CNB021058253A CN02105825A CN1212287C CN 1212287 C CN1212287 C CN 1212287C CN B021058253 A CNB021058253 A CN B021058253A CN 02105825 A CN02105825 A CN 02105825A CN 1212287 C CN1212287 C CN 1212287C
- Authority
- CN
- China
- Prior art keywords
- trichroite
- mentioned
- oxide
- aluminum oxide
- electronic component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010304 firing Methods 0.000 title claims description 74
- 239000000463 material Substances 0.000 claims abstract description 121
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 claims abstract description 49
- 229910052863 mullite Inorganic materials 0.000 claims abstract description 48
- 238000005507 spraying Methods 0.000 claims description 116
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 78
- 239000012535 impurity Substances 0.000 claims description 52
- 238000000034 method Methods 0.000 claims description 46
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 42
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N iron oxide Inorganic materials [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 29
- NDLPOXTZKUMGOV-UHFFFAOYSA-N oxo(oxoferriooxy)iron hydrate Chemical compound O.O=[Fe]O[Fe]=O NDLPOXTZKUMGOV-UHFFFAOYSA-N 0.000 claims description 29
- 238000007750 plasma spraying Methods 0.000 claims description 25
- KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 claims description 24
- 238000004544 sputter deposition Methods 0.000 claims description 20
- 239000000203 mixture Substances 0.000 claims description 18
- 230000005496 eutectics Effects 0.000 claims description 17
- 238000003672 processing method Methods 0.000 claims description 10
- CHWRSCGUEQEHOH-UHFFFAOYSA-N potassium oxide Chemical compound [O-2].[K+].[K+] CHWRSCGUEQEHOH-UHFFFAOYSA-N 0.000 claims 2
- 229910001950 potassium oxide Inorganic materials 0.000 claims 2
- 229910001948 sodium oxide Inorganic materials 0.000 claims 2
- 239000010410 layer Substances 0.000 abstract description 136
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 24
- 229910052878 cordierite Inorganic materials 0.000 abstract description 8
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 abstract description 8
- 239000000919 ceramic Substances 0.000 abstract description 6
- 230000009257 reactivity Effects 0.000 abstract description 2
- 238000010030 laminating Methods 0.000 abstract 1
- 239000002344 surface layer Substances 0.000 abstract 1
- 238000007747 plating Methods 0.000 description 58
- 230000000052 comparative effect Effects 0.000 description 33
- FZFYOUJTOSBFPQ-UHFFFAOYSA-M dipotassium;hydroxide Chemical compound [OH-].[K+].[K+] FZFYOUJTOSBFPQ-UHFFFAOYSA-M 0.000 description 22
- 238000005452 bending Methods 0.000 description 17
- 238000011156 evaluation Methods 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000011159 matrix material Substances 0.000 description 10
- 239000002994 raw material Substances 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 230000005611 electricity Effects 0.000 description 8
- 239000000155 melt Substances 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 230000006641 stabilisation Effects 0.000 description 5
- 238000011105 stabilization Methods 0.000 description 5
- 238000002156 mixing Methods 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 3
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 3
- 229910002113 barium titanate Inorganic materials 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 3
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 3
- 229910052726 zirconium Inorganic materials 0.000 description 3
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 2
- SDXDHLDNCJPIJZ-UHFFFAOYSA-N [Zr].[Zr] Chemical compound [Zr].[Zr] SDXDHLDNCJPIJZ-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 239000005995 Aluminium silicate Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- OROGDHXUMAAXPF-UHFFFAOYSA-N [O-2].[Al+3].[O-2].[Al+3].[O-2].[Al+3].[O-2].[Al+3].[O-2].[Al+3].[O-2].[Al+3] Chemical compound [O-2].[Al+3].[O-2].[Al+3].[O-2].[Al+3].[O-2].[Al+3].[O-2].[Al+3].[O-2].[Al+3] OROGDHXUMAAXPF-UHFFFAOYSA-N 0.000 description 1
- RQTFYYZAKXXZOL-UHFFFAOYSA-N [O-2].[O-2].[Al+3].[Al+3] Chemical compound [O-2].[O-2].[Al+3].[Al+3] RQTFYYZAKXXZOL-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 235000012211 aluminium silicate Nutrition 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 229910052570 clay Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- 235000014380 magnesium carbonate Nutrition 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000002294 plasma sputter deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002352 surface water Substances 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 238000003805 vibration mixing Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/16—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
- C04B35/18—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay rich in aluminium oxide
- C04B35/185—Mullite 3Al2O3-2SiO2
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/12—Travelling or movable supports or containers for the charge
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
- C04B41/4535—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application applied as a solution, emulsion, dispersion or suspension
- C04B41/4543—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application applied as a solution, emulsion, dispersion or suspension by spraying, e.g. by atomising
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Furnace Charging Or Discharging (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
A burning tool for electronic parts is provided, which can reduce the burning time for a body to be burnt, and has a long service life. The burning tool for electronic parts is used for producing electronic parts by laminating the body to be burnt consisting of ceramic thereon, and burning the body to be sintered. The tool consists of a base material containing cordierite, or cordierite and alumina, and/or mullite, and at least one intermediate layer and a surface layer consisting of a material having low reactivity with the above body to be burnt.
Description
Technical field
The present invention relates to be used for the firing clamp (back also is called " firing clamp " simply) of electronic component, more particularly, relate to and to shorten by the firing time of sintered body and the long firing clamp that is used for electronic component of life-span.
Background technology
In the past, burning till of the electronic component that is made of pottery such as ceramic condenser, thermistor, ferrite was electronic component to be placed on the firing clamp (for example steady arm, saggar(-ger), flat board) of aluminum oxide material carry out.Thisly burn till a plurality of firing clamps and be deposited in together and carry out, and firing clamp repeatedly uses.
This firing clamp is made of the body material and the zirconium white material top layer of alumina silica material and/or silicon carbide material, perhaps constitutes (seeing the open communique of flat 10-158081 number special permission, the flat 11-263671 number open communique of special permission etc.) by the body material of alumina silica material and/or zirconium white material, the middle layer of alumina silica material and the top layer of zirconium white material.
In these firing clamps because body material uses alumina silica material, silicon carbide material, and the material of zirconium white material, the speed of burning till to former electronic component has holding capacity very much, if shorten the firing time of electronic component, intensification and cooling rate are than improving in the past, just exist splitting resistance not enough, firing clamp generation problem of cracks.
The present invention proposed at former this problem.The purpose of this invention is to provide a kind of firing clamp that is used for electronic component, splitting resistance is than former improve, and the firing time and the life-span that can shorten electronic component are long.
Summary of the invention
Promptly, according to the present invention, a kind of firing clamp that is used for electronic component is provided, be used for by pottery constitute be loaded in by sintered body above, burn till this and made electronic component, it is characterized in that: by the body material that contains trichroite or trichroite and aluminum oxide and/or mullite, be at least 1 layer middle layer and constitute with the above-mentioned top layer that is formed by the reactive low material of sintered body by sintered body.
At this moment, it is desirable to account for trichroite or the impurity level of quality below 2.5% and account for trichroite and the body material of aluminum oxide and/or mullite of quality below 2.5%, be at least 1 layer middle layer and constitute with the top layer that is formed by the reactive low material of sintered body by containing impurity level.Containing impurity is ferric oxide (Fe
2O
3) time, the ferric oxide (Fe that it is desirable to contain in the trichroite
2O
3) amount account for quality below 1%.And containing impurity is ferric oxide (Fe
2O
3), sodium oxide (Na
2O) and potassium oxide (K
2O) time, the ferric oxide (Fe that it is desirable to contain in the trichroite
2O
3), sodium oxide (Na
2O) and potassium oxide (K
2O) amount accounts for quality below 2%.
At this moment, it is desirable to the above-mentioned trichroite that body material contains and account for quality more than 50%; It is desirable to the middle layer contain be selected from aluminum oxide, mullite, aluminum oxide and zirconic eutectic thing, and the group that mixture constituted of aluminum oxide and mullite in more than one; Zirconium white is contained on the top layer.And, it is desirable to the middle layer and form by sputtering process or spraying method; It is desirable to the top layer forms by sputtering process or spraying method.It is desirable to sputtering process is water-stable plasma spraying method.
Embodiment
The firing clamp that is used for electronic component of the present invention, be used for by pottery constitute be loaded in by sintered body above, burn till this and made electronic component, by the body material that contains trichroite or trichroite and aluminum oxide and/or mullite, be at least 1 layer middle layer and constitute with the above-mentioned top layer that is formed by the reactive low material of sintered body by sintered body.
At this moment, it is desirable to account for trichroite or the impurity level of quality below 2.5% and account for trichroite and the body material of aluminum oxide and/or mullite of quality below 2.5%, be at least 1 layer middle layer and constitute with the above-mentioned top layer that is formed by the reactive low material of sintered body by containing impurity level.Firing clamp of the present invention is characterised in that body material uses highly purified trichroite.Trichroite purity height, just become the strong body material of temperature variation and load-bearing property, use the firing clamp of the present invention of this high purity trichroite matrix material, with former comparison, have the anti-strong splitting resistance that is rapidly heated, lowers the temperature, can shorten the firing time of electronic component.And, firing clamp of the present invention, resistance to bending is strong when tolerance is burnt till rapidly, owing to can suppress the distortion that the pressurization of firing temperature and electronic component produces, and owing to can prevent firing clamp bending and sur-face peeling, so the life-span is long.
Here, the chemical constitution of trichroite is 2MgO-2Al
2O
3-5SiO
2, have that thermal expansion is little, thermal-shock resistance is strong, height acid resistance, alkali resistance, high temperature and high-frequency electrical insulativity advantages of higher.Mix synthetic materials such as natural matter such as kaolin, magnesite, clay or aluminum oxide, magnesium oxide, silica and burn till making at 1300 ℃ to 1400 ℃.
And " bending " is meant if firing clamp uses repeatedly, owing to firing temperature with by the sagging saying easily of the pressurization firing clamp of sintered body distortion.If this bendability is big,, be that goods deform by sintered body because the firing clamp distortion is big.And firing clamp is piled up and is used usually, but becomes and can not stack, and promptly allows to stack, and it is unstable that firing clamp becomes, and occurs in the accident of caving in the firing furnace easily.
The present invention is described in more detail below, but the present invention is not limited to the following examples.
(1) is used for the firing clamp of electronic component
In this manual, the parts that use when being meant the electronic component that Low fire ceramic electric capacity, thermistor, ferrite etc. are made of pottery when talking about " firing clamp that is used for electronic component " specifically are to comprise being used to place by the steady arm of sintered body, saggar(-ger), flat board etc.
(2) body material
Firing clamp of the present invention is by the body material that contains trichroite or trichroite and aluminum oxide and/or mullite, be at least 1 layer middle layer and constitute with the above-mentioned top layer that is formed by the reactive low material of sintered body.
At this moment, it is desirable to body material accounts for trichroite or the impurity level of quality below 2.5% and accounts for trichroite and aluminum oxide and/or the mullite of quality below 2.5% and constitute by containing impurity level.Impurity is ferric oxide (Fe
2O
3) time, the ferric oxide (Fe that it is desirable to contain in the trichroite
2O
3) amount account for quality below 1%.If ferric oxide (Fe
2O
3) measure above more than 1% of quality, the generation grow of glass ingredient, this is the reason that the anti-separability in top layer descends.And, as impurity, it is desirable to contain in the trichroite ferric oxide (Fe
2O
3), sodium oxide (Na
2O) and potassium oxide (K
2O) amount accounts for quality below 2%.
The impurity that contains in the trichroite mainly is ferric oxide (Fe
2O
3), sodium oxide (Na
2O) and potassium oxide (K
2O), though contain calcium oxide (CaO), titanium oxide (TiO in addition
2), but be called AL as impurity in the present invention
2O
3, SiO
2, the composition beyond the MgO.Such composition forms easily to hang down and melts thing, generates liquid phase when burning till easily in firing clamp.If it is many to contain such impurity in the trichroite, the stripper-resistance of the resistance to bending of body material and middle layer and body material descends, and is brought detrimentally affect by the characteristic of sintered body.
Therefore, must use the few trichroite of this impurity, relatively resistance to bending is strong for high purity trichroite and low-purity trichroite, and, with aluminum oxide and relatively splitting resistance raising of mullite, can improve splitting resistance and resistance to bending.Impurity level in the trichroite is as shown in the embodiment of back, and total impurities accounts for quality below 2.5%, as the ferric oxide (Fe of major impurity
2O
3), sodium oxide (Na
2O) and potassium oxide (K
2O) it is just passable below 2% to account for quality.
And the mensuration of described impurity uses general wet analysis etc. just can finish, and it is just passable for example to be with the R2212 of Japanese Industrial Standards (1991) that standard is carried out.
And, among the present invention, it is desirable to the above-mentioned trichroite that body material contains and account for quality more than 50%.Splitting resistance and resistance to bending are strong, if body material contain total impurities account for quality below 2.5%, as the ferric oxide (Fe of major impurity
2O
3), sodium oxide (Na
2O) and potassium oxide (K
2O) trichroite that accounts for quality 2% accounts for quality more than 50%, and shown in the embodiment of back, the splitting resistance of body material significantly improves, and also is not easy to take place the crack even burn till repeatedly, can realize that the firing clamp life-span is long.
(3) middle layer
Said middle layer among the present invention is the layer between body material and top layer, and its coefficient of thermal expansion is between the coefficient of thermal expansion on the coefficient of thermal expansion of body material and top layer.
If the formation middle layer, the thermal expansion rate variance between body material and the top layer is alleviated, and has the advantage that can prevent that the top layer from peeling off.
In the firing clamp among the present invention, it is desirable to the middle layer contain be selected from aluminum oxide, mullite, aluminum oxide and zirconic eutectic thing, and the group that mixture constituted of aluminum oxide and mullite in more than one.
And, if consider by the influence of the characteristic of sintered body, it is desirable to the SiO in the middle layer that links to each other with the top layer
2Amount accounts for quality below 20%.
If the middle layer among the present invention uses above-claimed cpd as material, sputtering process or spraying method before using are layered on the substrate material surface just passable.For example, if using gas plasma spraying method, preferably the thickness in middle layer is 50 μ m～100 μ m levels, if use water-stable plasma spraying method, preferably the thickness in middle layer is 100 μ m～150 μ m levels.
And if use spraying method, the thickness that it is desirable to the middle layer is 50 μ m～500 μ m levels.
And among the present invention, to constitute the middle layer be multilayer, make the slow variation of coefficient of thermal expansion also passable.For example, coefficient of thermal expansion in the time of 1000C °, trichroite is 0.2%, mullite is 0.4%, aluminum oxide is 0.8%, and zirconium white is 0.9%, if firing clamp is stacked in this order, can be suppressed at the difference of coefficient of thermal expansion in the inferior limit, can relief layer when burning till and layer between peel stress.
Here, so-called eutectic thing is meant the mixture of the material more than 2 kinds of separating out simultaneously from molten mass.Its various moietys form trickle mixed structure.The eutectic thing as other pure things just solidify, fluxing point is different with mixture, have fusing point and in the mixing system of each constituent, be minimum advantage.
For example, the spraying plating overlay film that contains the eutectic thing can be facing to the surface in body material and middle layer, utilize the method that spraying plating contains the depositing materials of eutectic thing to form, but relatively fusing point is low for eutectic thing and each constituent, dissolving easily, when spraying plating, further immerse the convex-concave place of body material and interlayer surfaces.Therefore, contain the spraying plating overlay film of eutectic thing and the associativity in body material and middle layer and improve, be difficult to peel off.
Among the present invention, though use aluminum oxide and zirconic eutectic thing, aluminum oxide (mp, 2015 ℃) and zirconium white (mp, 2677 ℃, zirconium white in the eutectic thing is meant the zirconium white that does not have stabilization) be to obtain 1710 ℃ of minimum fusing points, near (40: 60～80: 20 levels) eutectic thing conversion this mass ratio at 57.4: 42.6 o'clock at its mass ratio.
(4) top layer
Top layer among the present invention, be meant the layer that forms on the surface in the surface of body material or middle layer, constitute with conduct by the contact surface of the electronic component of sintered body.If the formation top layer prevents that the reactive materials that contains in body material and the middle layer from contacting with materials of electronic components.In the firing clamp of the present invention, be to contain in the top layer and ideally by reactive low material oxidation zirconium between the sintered body.
Though the top layer must be and by reactive low material between the sintered body, according to its material difference of kind of electronic component.For example being used for the ceramic condenser that is made of barium titanate, is to select the zirconium white reactive low with barium titanate ideally.
Zirconium white in the top layer also includes by calcium oxide (CaO), yttrium oxide (Y except the zirconium white of stabilization not
2O
3) etc. the stabilized zirconia of stabilization.Therefore, suitably the only zirconium white of selection is just passable to consider above-mentioned reactivity.
And, according to the kind of electronic component, also can use the spraying plating overlay film that contains aluminum oxide and zirconic eutectic thing as the top layer.
Top layer among the present invention, as material, spraying plating before utilizing or spraying method are stacked just passable on the surface in the surface of body material or middle layer with above-mentioned compound.Among the present invention, be not limited to the top layer thickness that to guarantee above-mentioned effect especially.
As mentioned above, firing clamp of the present invention is that the above-mentioned trichroite that body material contains accounts for quality more than 50% especially ideally; More than one in the group that mixture constituted that is selected from aluminum oxide, mullite, aluminum oxide and zirconic eutectic thing, reaches aluminum oxide and mullite are contained in the middle layer; Zirconium white is contained on the top layer.
(5) manufacture method
Firing clamp of the present invention can be made in the following way, promptly utilizes sputtering process or spraying method, forms the middle layer on the substrate material surface of desired shape, forms the top layer then.
So-called sputtering process is that metal or ceramic fine-powder (below call " depositing materials ") are heated into the semi-melting state, and spraying plating forms the method for spraying plating overlay film on the surface of plated film object.There are the gas sputtering process of using the burning flame, the whole bag of tricks such as arc spraying method that use electric arc according to heating means are different, but preferably form the spraying plating overlay film among the present invention by the plasma spraying method of using plasma nozzle.
Among the present invention, the water-stable plasma spraying method in the plasma spraying method is even more ideal.Utilize the gaseous plasma sputtering process, the minimum thickness of spraying plating overlay film is 20 μ m～50 μ m levels, but utilizes water-stable plasma spraying method can form the thick overlay film that minimum thickness is 100 μ m levels.And water-stable plasma spraying method can form coarse overlay film comparing porous surface, is preferred improving aspect the surface bonding power of interlayer surfaces therefore.
So-called spraying method, be meant ceramic powder make the slurry spraying plating on the matrix surface, slurry flows on matrix surface and burns the method that forms the spraying overlay film then.Spraying method is easier to form thick film with the sputtering process ratio, and can use in the sputtering process material of granularity in 100 μ m to 200 μ m levels, spraying method can use granularity at several microns to the 500 μ m material of wide region more.Therefore, spraying method and sputtering process compare, and described overlay film can obtain excellent characteristic such as void content, hardness and surfaceness.And spraying method and sputtering process relatively also have the not high advantage of cost.
Below, utilize embodiment to illustrate in greater detail according to firing clamp of the present invention.
(embodiment 1～3, comparative example 1～3)
Estimate.Body material in embodiment 1～3 and the comparative example 1～3 is made: use (a) and (b) as raw material, (a) contain (Fe in the following way
2O
3) account for quality 0.1%, sodium oxide (Na
2O) and potassium oxide (K
2O) account for the trichroite that quality 0.3%, other foreign matter contents account for quality 0.3%; (b) contain (Fe
2O
3) amount accounts for quality 2.7%, contains sodium oxide (Na
2O) and potassium oxide (K
2O) amount accounts for the trichroite that quality 1.4%, other foreign matter contents account for quality 1.7%, they are mixed, behind mixing on the wheel roller, by oil press at 1 ton/cm
2Form long 150mm * wide 150mm * thick 4mm under the pressure, burn till at 1300 ℃ and made in 3 hours.And the impurity level that contains in the trichroite matrix material is adjusted by the above-mentioned (a) and (b) raw material of suitable mixing.
According to the evaluation result of embodiment 1～3 and 1～3 pair of splitting resistance of comparative example and resistance to bending shown in the table 1.The evaluation of splitting resistance is to carry out as follows, promptly placing size at the body material middle body of making is the firing clamp of the zirconium white material of described body material 65% size, be placed on then in the small-sized electric furnace, since 350 ℃ of each intensifications 50 ℃, up to 1000 ℃, observing then has leakless when placing at normal temperatures.Under each temperature, heated 1 hour.In the table 1, generation is fissured when being discontented with 600 ℃ is *, taking place fissured in the scope during since 600 ℃ to discontented 700 ℃ is △, taking place fissured when 700 ℃ extremely are discontented with 800 ℃ is zero, and the fissured ◎ that is does not take place in the time of 800 ℃.
The evaluation of resistance to bending is finished in the following way, promptly loads 4kg/cm at the body material middle body of making
2Kept 5 hours down at 1200 ℃, remove then when loading, observe the amount of bow that begins to take place before load.In the table 1 amount of bow greater than 1.5mm be *, amount of bow less than 1.5mm greater than 1.0mm be △, amount of bow less than 1.0mm greater than 0.5mm be zero, amount of bow is ◎ less than 0.5mm's.
Table 1
| Body material | Splitting resistance | Resistance to bending | ||||||
| Material | Impurity level (%) | |||||||
| A* | B* | A*+B* | Other | Add up to | ||||
| Embodiment 1 embodiment 2 embodiment 3 | Trichroite trichroite trichroite | 0.9 0.4 0.1 | 0.7 0.4 0.3 | 1.6 0.8 0.4 | 0.7 0.4 0.3 | 2.3 1.2 0.7 | ◎ ◎ ◎ | ○ ○ ○ |
| Comparative example 1 comparative example 2 comparative examples 3 | Trichroite trichroite trichroite | 1.2 1.9 2.7 | 0.9 1.0 1.4 | 2.1 2.9 4.1 | 0.9 1.1 1.7 | 3.0 4.0 5.8 | ◎ ◎ ◎ | △ × × |
* A: ferric oxide (Fe
2O
3)
* B: sodium oxide (Na
2O)+potassium oxide (K
2O)
(evaluation)
Can know that total impurities accounts for quality more than 2.5% from 1, and as the ferric oxide (Fe of major impurity
2O
3), sodium oxide (Na
2O) and potassium oxide (K
2O) account for the trichroite matrix material of quality more than 2%, the crack is not taking place below 800 ℃, splitting resistance is good, but amount of bow shows that greater than 1.0 mm resistance to bending is not enough.Total impurities accounts for quality below 2.5%, and as the ferric oxide (Fe of major impurity
2O
3), sodium oxide (Na
2O) and potassium oxide (K
2O) account for the trichroite matrix material of quality below 2%, splitting resistance and resistance to bending are all fine as a result.And, in embodiment 1 ~ 3 and the comparative example 1 ~ 3, even obtain in the time of 1000 ℃, also not take place fissured result.
(embodiment 4～9, comparative example 4,5)
Embodiment 4～9 is the same with embodiment 1～3 with comparative example 4,5, and the body material according to firing clamp of the present invention is estimated.The body material of embodiment 4～9, make in the following way: use the trichroite of above-mentioned (a) and (b) and (c), (d), (e) be as raw material, (c) maximum particle dia is that to melt the maximum particle dia of aluminum oxide (d) be that to melt mullite (e) average particle diameter be that the Calcined polishing aluminum oxide of 3 μ m is a raw material for the electricity of 150 μ m and 44 μ m for the electricity of 250 μ m and 44 μ m, be shaped to the shape identical, burn till at 1450 ℃ and made in 5 hours with embodiment 1～3.And the alumina amount that contains in the body material, mullite amount and impurity level are adjusted by suitably mixing above-mentioned (a) ~ (e) raw material.The body material of comparative example 4,5 except being the raw material with above-mentioned (c), (d), (e), is made with embodiment 1～3 same way as.According to the evaluation result of embodiment 4～9 and 4,5 pairs of splitting resistances of comparative example and resistance to bending shown in the table 2.The evaluation of splitting resistance and resistance to bending is to finish with embodiment 1～3 same way as.
Table 2
| Body material | Splitting resistance | Resistance to bending | ||||||
| Material | Impurity level (%) | |||||||
| A* | B* | A*+B* | Other | Add up to | ||||
| Embodiment 4 embodiment 5 embodiment 6 embodiment 7 embodiment 8 embodiment 9 | Cordierite (90%)+aluminium oxide (10%) cordierite (70%)+aluminium oxide (30%) cordierite (50%)+aluminium oxide (50%) cordierite (90%)+aluminium oxide (10%) cordierite (70%)+aluminium oxide (30%) cordierite (50%)+aluminium oxide (50%) | 0.2 0.25 0.3 0.2 0.3 0.4 | 0.3 0.35 0.4 0.3 0.35 0.4 | 0.5 0.6 0.7 0.5 0.65 0.8 | 0.4 0.45 0.5 0.4 0.4 0.45 | 0.9 1.05 1.2 0.9 1.05 1.25 | ◎ ○ ○ ◎ ◎ ◎ | ○ ○ ○ ○ ○ ○ |
| Comparative example 4 comparative examples 5 | Aluminum oxide+mullite (Al 2O 3Composition 80%) trichroite+mullite (Al 2O 3Composition 90%) | 0.5 0.5 | 0.3 0.3 | 0.8 0.8 | 0.5 0.5 | 1.3 1.3 | △ × | ◎ ○ |
* A: ferric oxide (Fe
2O
3)
* B: sodium oxide (Na
2O)+potassium oxide (K
2O)
(evaluation)
As shown in table 2, can know that total impurities accounts for quality below 2.5%, and as the ferric oxide (Fe of major impurity
2O
3), sodium oxide (Na
2O) and potassium oxide (K
2O) account for the trichroite content of quality below 2% at the body material more than 50%, splitting resistance and resistance to bending obtain good result simultaneously.Though the body material resistance to bending that aluminum oxide and mullite constitute is good, and the crack is just taking place below 600 ℃, therefore can know that splitting resistance is not enough.
(embodiment 10～19, comparative example 6～8)
By embodiment 10～19, comparative example 6～8 is estimated firing clamp according to the present invention.Embodiment 10～19 and comparative example 6～8th on the surface of the body material made from embodiment 1～3 same way as, form the middle layer, form the top layer then and make firing clamp by water-stable plasma spraying method or spraying method.The thickness on middle layer and top layer is 100 μ m.
The material use granularity of water in intermediate layer stabilization plasma spraying method is that the electricity of 75 μ m～150 μ m melts aluminum oxide and electricity melts mullite, and mould is adjusted by the spraying plating number of times.And the spray material in middle layer uses easy-sintering aluminum oxide, the following electricity of 45 μ m to melt aluminum oxide and the following electricity of 45 μ m melts mullite, burns 5 hours down at 1400 ℃.
The material use granularity of surface water stabilization plasma spraying is that the electricity of 75 μ m～150 μ m melts the yttrium oxide stabilized zirconia, and mould is adjusted by the spraying plating number of times.And the spray material on top layer uses the following yttrium oxide stabilized zirconia of 44 μ m, burns 5 hours down at 1400 ℃.
And in embodiment 12～15, the material in middle layer uses the mixture of aluminum oxide and mullite.Use among the embodiment 14～15 of sputtering process in the described middle layer that is blended in, and is granularity that the aluminum oxide of 150 μ m～75 μ m and mullite mix on the vibration mixing machine and finished in 5 minutes.And, use among the embodiment 12,13 of spraying method in the middle layer, be granularity that mullite powders, easy-sintering aluminum oxide and granularity below the 45 μ m is that electricity below the 45 μ m melts the aluminum oxide just compromise, when slurrying, mix.
Intermediate layer material among the embodiment 19 uses aluminum oxide and zirconic eutectic thing.This eutectic thing utilizes aluminum oxide and zirconium white with 1: 1 mixed, is mixed structure's material of grain.
According to embodiment 10～19 and 6～8 pairs of stripper-resistances of comparative example and anti-reactive evaluation result shown in the table 3.The evaluation of stripper-resistance is to carry out as follows, promptly after smearing as dielectric barium titanate solution on the firing clamp of making, under 1400 ℃, 2 hours conditions,, measure up to middle layer or the top layer number of times when body material is peeled off takes place repeatedly at the small electrical kiln roasting.In the table 3, peel off in the time of discontented 3 times for *, since the △ that is that peels off to discontented 5 underranges for 3 times, be zero since extremely being discontented with what peel off for 8 times for 5 times, be ◎ to what for 8 times to peel off.
Anti-reactive evaluation when not heating, is observed the deflection of firing clamp beginning before heating then by burning till repeatedly with stripper-resistance the same manner.In the table 3, deflection greater than 2mm be *, less than 2mm greater than 1mm be △, less than 1mm greater than 0.5mm be zero, less than 0.5mm is ◎.
Table 3
| Body material | The middle layer | The top layer | Stripper-resistance | Anti-reactive | ||||||||
| Material | Impurity (%) | Material | Constructional method | Material | Constructional method | |||||||
| A* | B* | A*+B* | Other | Add up to | ||||||||
| Embodiment 10 | Trichroite | 0.9 | 0.7 | 1.6 | 0.7 | 2.3 | Aluminum oxide | Spraying | Zirconium white | Spraying plating | ○ | ○ |
| Embodiment 11 | Trichroite | 0.4 | 0.4 | 0.8 | 0.4 | 1.2 | Aluminum oxide | Spraying | Zirconium white | Spraying plating | ○ | ○ |
| Embodiment 12 | Trichroite | 0.1 | 0.3 | 0.4 | 0.3 | 0.7 | Aluminum oxide (50%)+mullite (50%) | Spraying | Zirconium white | Spraying plating | ○ | ○ |
| Embodiment 13 | Trichroite | 0.1 | 0.3 | 0.4 | 0.3 | 0.7 | Aluminum oxide (15%)+mullite (85%) | Spraying | Zirconium white | Spraying plating | ○ | ○ |
| Embodiment 14 | Trichroite | 0.1 | 0.3 | 0.4 | 0.3 | 0.7 | Aluminum oxide (50%)+mullite (50%) | Spraying plating | Zirconium white | Spraying plating | ○ | ○ |
| Embodiment 15 | Trichroite | 0.1 | 0.3 | 0.4 | 0.3 | 0.7 | Aluminum oxide (15%)+mullite (85%) | Spraying plating | Zirconium white | Spraying plating | ○ | ○ |
| Embodiment 16 | Trichroite | 0.1 | 0.3 | 0.4 | 0.3 | 0.7 | Aluminum oxide | Spraying | Zirconium white | Spraying plating | ○ | ○ |
| Embodiment 17 | Trichroite | 0.1 | 0.3 | 0.4 | 0.3 | 0.7 | Aluminum oxide | Spraying plating | Zirconium white | Spraying plating | ○ | ○ |
| Embodiment 18 | Trichroite | 0.1 | 0.3 | 0.4 | 0.3 | 0.7 | Aluminum oxide | Spraying plating | Zirconium white | Spraying | ◎ | ◎ |
| Embodiment 19 | Trichroite | 0.1 | 0.3 | 0.4 | 0.3 | 0.7 | Aluminum oxide and zirconic eutectic | Spraying plating | Zirconium white | Spraying plating | ○ | ○ |
| Comparative example 6 | Trichroite | 1.2 | 0.9 | 2.1 | 0.9 | 3.0 | Aluminum oxide | Spraying | Zirconium white | Spraying plating | △ | ○ |
| Comparative example 7 | Trichroite | 1.9 | 1.0 | 2.9 | 1.1 | 4.0 | Aluminum oxide | Spraying | Zirconium white | Spraying plating | × | △ |
| Comparative example 8 | Trichroite | 2.7 | 1.4 | 4.1 | 1.7 | 5.8 | Aluminum oxide | Spraying | Zirconium white | Spraying plating | × | △ |
* A: ferric oxide (Fe
2O
3)
* B: sodium oxide (Na
2O)+potassium oxide (K
2O)
(notes) spraying: spraying method
(notes) spraying plating: water-stable plasma spraying method
(evaluation)
As shown in table 3, can know and use total impurities to account for quality more than 2.5%, and as the ferric oxide (Fe of major impurity
2O
3), sodium oxide (Na
2O) and potassium oxide (K
2O) account for the firing clamp of the trichroite matrix material of quality more than 2%, stripper-resistance and anti-reactivity are all not enough, if particularly impurity level for a long time, the interlayer in body material and middle layer is peeled off easily as a result.
Use total impurities to account for quality below 2.5%, and as the ferric oxide (Fe of major impurity
2O
3), sodium oxide (Na
2O) and potassium oxide (K
2O) account for the firing clamp of the trichroite matrix material of quality below 2%, stripper-resistance and anti-reactivity are all good as a result, the mixture and the aluminum oxide of aluminum oxide, aluminum oxide and mullite used in the middle layer respectively and zirconic crystallisate passes through water-stable plasma spraying method or spraying method forms, and the top layer uses zirconium white to pass through water-stable plasma spraying method or spraying method forms, and also can bring into play good performance.Particularly, under the situation of top layer by spraying method formation, stripper-resistance and the anti-reactive good results that obtains.Here, relatively contain more tiny pore by spraying method layer that forms and the layer that forms by water-stable plasma spraying method, this pore can absorb residual expansion, thinks that therefore this is the little reason of top layer thermal expansion that forms by spraying method outwardly.
(embodiment 20～25, comparative example 9,10)
By embodiment 20～25, comparative example 9,10 is estimated firing clamp according to the present invention.Embodiment 20 ~ 25th, on the surface of the body material made from embodiment 4～9 same way as, with the aluminum oxide is that raw material forms the middle layer by spraying method, be that raw material passes through water-stable plasma spraying method formation top layer then with the zirconium white, make firing clamp.The formation on middle layer and top layer and embodiment 10～19 same way as are finished.Comparative example the 9, the 10th on the surface of the body material made from embodiment 4,5 same way as, by forming middle layer and top layer with embodiment 20～25 same way as, is made firing clamp.The thickness on middle layer and top layer is 100 μ m.According to embodiment 20～25 and 9,10 pairs of stripper-resistances of comparative example and anti-reactive evaluation result shown in the table 4.Stripper-resistance and anti-reactive evaluation are to carry out with embodiment 10～19 the same manners.
Table 4
| Body material | The middle layer | The top layer | Stripper-resistance | Anti-reactive | ||||||
| Material | Impurity level (%) | Material | Constructional method | Material | Constructional method | |||||
| A* | B* | Add up to | ||||||||
| Embodiment 20 embodiment 21 embodiment 22 embodiment 23 embodiment 24 embodiment 25 | Trichroite+aluminum oxide, (10%) trichroite+aluminum oxide, (30%) trichroite+aluminum oxide, (50%) trichroite+aluminum oxide, (10%) trichroite+aluminum oxide, (30%) trichroite+aluminum oxide, (50%) | 0.2 0.2 5 0.3 0.2 0.3 0.4 | 0.3 0.35 0.4 0.3 0.35 0.4 | 0.5 0.6 0.7 0.5 0.65 0.8 | Aluminum oxide aluminum oxide aluminum oxide aluminum oxide aluminum oxide aluminum oxide | Spraying spraying spraying spraying spraying spraying | Zirconium white oxidation zirconium zirconium white oxidation zirconium zirconium white oxidation zirconium | Spraying plating spraying plating spraying plating spraying plating spraying plating spraying plating | ○ ◎ ◎ ◎ ◎ ◎ | ○ ◎ ◎ ○ ○ ○ |
| Comparative example 9 comparative examples 10 | Aluminum oxide+mullite (Al 2O 3Composition 80%) aluminum oxide+mullite (Al 2O 3Composition 90%) | 0.5 0.5 | 0.3 0.3 | 0.8 0.8 | The aluminum oxide aluminum oxide | The spraying spraying | Zirconium white oxidation zirconium | The spraying plating spraying plating | ◎ ◎ | ◎ ○ |
* A: ferric oxide (Fe
2O
3)
* B: sodium oxide (Na
2O)+potassium oxide (K
2O)
(notes) spraying: spraying method
(notes) spraying plating: water-stable plasma spraying method
(evaluation)
As shown in table 4, can know and use total impurities to account for quality below 2.5%, and as the ferric oxide (Fe of major impurity
2O
3), sodium oxide (Na
2O) and potassium oxide (K
2O) accounting for the trichroite content of quality below 2% is the firing clamp of the body material of quality more than 50%, and stripper-resistance and anti-reactive result are good.In the firing clamp of the body material that uses aluminum oxide and mullite to constitute, same stripper-resistance and anti-reactive result are good., as shown in the table 2, there is the not enough shortcoming of splitting resistance in this body material.
(embodiment 26～29, comparative example 11,12)
Embodiment 26,27 and comparative example 11 are on the surface of the body material made from embodiment 1～3 same way as, use material as shown in table 5, form 2 layers middle layer by water-stable plasma spraying method or spraying method, be that raw material passes through water-stable plasma spraying method or spraying method forms the top layer then with the zirconium white, make firing clamp.Embodiment 28,29 and be on the surface of the body material that embodiment 4 ~ 9 same way as are made uses material as shown in table 5, by with embodiment 26,27 same way as formation middle layer and top layer, make firing clamp.Comparative example 12 is on the surface of the body material made from comparative example 4 same way as, uses material as shown in table 5, by with embodiment 26,27 same way as formation middle layer and top layer, make firing clamp.
And the middle layer forms 2 layers by water-stable plasma spraying method, is that the material spraying plating on the surface of the first layer that directly changes the second layer after the first layer spraying plating is finished into forms.In addition, the middle layer forms two layers by spraying method, after the first layer spraying is finished, at 80 ℃ of dry down moisture that removed sprayed coating in 5 hours, sprays the material of the second layer then on the surface of the first layer, the surface of burning till the second layer.
And the formation on top layer and embodiment 10～19 same way as are finished.The thickness in first middle layer is 50 μ m, and the thickness in second middle layer is 100 μ m, and the thickness on top layer is 100 μ m.According to embodiment 26～29 and comparative example 11,12, estimate stripper-resistance, anti-reactive result shown in the table 5.Stripper-resistance, anti-reactive evaluation are to carry out with embodiment 10～19 the same manners.
Table 5
| Body material | Middle layer (the first layer and the second layer) | The top layer | Stripper-resistance | Anti-reactive | |||
| Material | Impurity level (%) | Material | Constructional method | ||||
| Embodiment 26 | Trichroite | 0.4 | Mullite sprays 50 aluminum oxide spraying 100 | Zirconium white | Spraying | ◎ | ○ |
| Embodiment 27 | Trichroite | 0.4 | Mullite spraying plating 50 aluminum oxide spraying platings 100 | Zirconium white | Spraying plating | ○ | ○ |
| Embodiment 28 | Trichroite (70%)+aluminum oxide (30%) | 0.6 | Mullite spraying plating 50 aluminum oxide spraying platings 100 | Zirconium white | Spraying plating | ◎ | ◎ |
| Embodiment 29 | Trichroite (70%)+mullite (30%) | 0.65 | Mullite spraying plating 50 aluminum oxide spraying platings 100 | Zirconium white | Spraying plating | ◎ | ○ |
| Comparative example 11 | Trichroite | 3.3 | Mullite spraying plating 50 aluminum oxide spraying platings 100 | Zirconium white | Spraying plating | × | △ |
| Comparative example 12 | Aluminum oxide+mullite (Al 2O 3Composition 80%) | 0.8 | Mullite spraying plating 50 aluminum oxide spraying platings 100 | Zirconium white | Spraying plating | ◎ | ◎ |
(notes) spraying: spraying method
(notes) spraying plating: water-stable plasma spraying method
* middle layer (the first layer and the second layer)
The body material of lastrow (in order) the first layer, constructional method, thickness (μ m) from a left side
The body material of next line (in order) second layer, constructional method, thickness (μ m) from a left side
(evaluation)
As shown in table 5, can know and use total impurities to account for quality below 2.5%, and as the ferric oxide (Fe of major impurity
2O
3), sodium oxide (Na
2O) and potassium oxide (K
2O) account for trichroite matrix material, the middle layer of quality below 2% and form two-layer firing clamp, stripper-resistance and anti-reactive result are good.The middle layer uses aluminum oxide, mullite to form by water-stable plasma spraying method or spraying method respectively, and the top layer uses zirconium white to pass through water-stable plasma spraying method or spraying method forms, and also can bring into play good performance.
Use total impurities to account for quality below 2.5%, and as the ferric oxide (Fe of major impurity
2O
3), sodium oxide (Na
2O) and potassium oxide (K
2O) account for the trichroite content of quality below 2% and account for body material, the middle layer of quality more than 50% and form two-layer firing clamp, same stripper-resistance and anti-reactive result are good.
Can know and use total impurities to account for quality more than 2.5%, and as the ferric oxide (Fe of major impurity
2O
3), sodium oxide (Na
2O) and potassium oxide (K
2O) account for trichroite matrix material, the middle layer of quality more than 2% and form two-layer firing clamp, stripper-resistance and anti-reactive result are good inadequately.Account for quality more than 2.5% in total impurities, and as the ferric oxide (Fe of major impurity
2O
3), sodium oxide (Na
2O) and potassium oxide (K
2O) even accounting under the quality 2% above situation middle layer forms two-layerly, can not obtain superperformance.
And body material, the middle layer of using aluminum oxide and mullite to constitute form two-layer firing clamp, and stripper-resistance and anti-reactive result are good.But as shown in table 2, there is the not enough shortcoming of splitting resistance in this body material.
As mentioned above, the firing clamp that is used for electronic component of the present invention by improving splitting resistance, can shorten the firing time of electronic component, simultaneously can prolongs life.
Claims (11)
1. firing clamp that is used for electronic component, be used for constitute by pottery be loaded in by sintered body above, burn till this and made electronic component by sintered body, it is characterized in that:
By the body material that contains trichroite or trichroite and aluminum oxide or trichroite and mullite or trichroite and aluminum oxide and mullite, be at least 1 layer middle layer and constitute with the above-mentioned top layer that is formed by the reactive low material of sintered body, more than one in the group that mixture constituted that is selected from aluminum oxide, mullite, aluminum oxide and zirconic eutectic thing, reaches aluminum oxide and mullite are contained in above-mentioned middle layer, and zirconium white is contained on above-mentioned top layer.
2. the firing clamp that is used for electronic component according to claim 1 is characterized in that accounting for trichroite or the impurity level of quality below 2.5% and accounting for trichroite and the body material of aluminum oxide and/or mullite of quality below 2.5%, be at least 1 layer middle layer and form with the above-mentioned top layer that is formed by the reactive low material of sintered body by containing impurity level.
3. the firing clamp that is used for electronic component according to claim 2 is characterized in that containing ferric oxide in the above-mentioned impurity, and the ferric oxide amount that contains in the above-mentioned trichroite accounts for quality below 1%.
4. according to any one described firing clamp that is used for electronic component in the claim 2 to 3, it is characterized in that above-mentioned impurity contains ferric oxide, sodium oxide and potassium oxide, the ferric oxide that contains in the above-mentioned trichroite, sodium oxide and potassium oxide amount account for quality below 2%.
5. according to any one described firing clamp that is used for electronic component in the claim 1,2,3, it is characterized in that the above-mentioned trichroite that above-mentioned body material contains accounts for quality more than 50%.
6. the firing clamp that is used for electronic component according to claim 4 is characterized in that the above-mentioned trichroite that above-mentioned body material contains accounts for quality more than 50%.
7. according to any one described firing clamp that is used for electronic component in the claim 1,2,3,6, it is characterized in that above-mentioned middle layer forms by sputtering process or spraying method, above-mentioned top layer forms by sputtering process or spraying method.
8. the firing clamp that is used for electronic component according to claim 4 is characterized in that above-mentioned middle layer forms by sputtering process or spraying method, and above-mentioned top layer forms by sputtering process or spraying method.
9. the firing clamp that is used for electronic component according to claim 5 is characterized in that above-mentioned middle layer forms by sputtering process or spraying method, and above-mentioned top layer forms by sputtering process or spraying method.
10. the firing clamp that is used for electronic component according to claim 7 is characterized in that above-mentioned sputtering process is a water-stable plasma spraying method.
11. according to Claim 8, any one described firing clamp that is used for electronic component in 9, it is characterized in that above-mentioned sputtering process is a water-stable plasma spraying method.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001115650A JP2002316877A (en) | 2001-04-13 | 2001-04-13 | Burning tool for electronic parts |
| JP2001115650 | 2001-04-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1381424A CN1381424A (en) | 2002-11-27 |
| CN1212287C true CN1212287C (en) | 2005-07-27 |
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ID=18966514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021058253A Expired - Lifetime CN1212287C (en) | 2001-04-13 | 2002-04-10 | Firing clamp for electronic element |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2002316877A (en) |
| KR (1) | KR100439075B1 (en) |
| CN (1) | CN1212287C (en) |
| TW (1) | TW543051B (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006183972A (en) * | 2004-12-28 | 2006-07-13 | Ngk Insulators Ltd | Baking fixture for electronic component |
| KR100810969B1 (en) | 2006-06-26 | 2008-03-10 | 이익수 | Coating method of ultra high pressure crimping jig plate for manufacturing multilayer ceramic capacitor |
| JP4685814B2 (en) * | 2007-02-23 | 2011-05-18 | 日本碍子株式会社 | Ceramic firing method |
| KR100820094B1 (en) | 2007-09-06 | 2008-04-08 | 이익수 | Coating composition of ultra-high pressure crimping jig plate for manufacturing multilayer ceramic capacitor |
| JP5154276B2 (en) * | 2008-03-26 | 2013-02-27 | コバレントマテリアル株式会社 | Tools for firing electronic components |
| JP5465216B2 (en) * | 2010-08-11 | 2014-04-09 | 日本碍子株式会社 | Setter for firing |
| CN116848074A (en) * | 2021-03-05 | 2023-10-03 | Ａｇｃ株式会社 | Cordierite sintered body and method for producing same |
| JP2023160735A (en) * | 2022-04-22 | 2023-11-02 | クアーズテック株式会社 | Tool material for firing |
-
2001
- 2001-04-13 JP JP2001115650A patent/JP2002316877A/en active Pending
-
2002
- 2002-04-09 KR KR10-2002-0019139A patent/KR100439075B1/en not_active Expired - Lifetime
- 2002-04-10 CN CNB021058253A patent/CN1212287C/en not_active Expired - Lifetime
- 2002-04-11 TW TW091107368A patent/TW543051B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| CN1381424A (en) | 2002-11-27 |
| KR20020079523A (en) | 2002-10-19 |
| JP2002316877A (en) | 2002-10-31 |
| TW543051B (en) | 2003-07-21 |
| KR100439075B1 (en) | 2004-07-05 |
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| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20050727 |
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| CX01 | Expiry of patent term |