CN111873199A - Device for slotting quartz rods and using method thereof - Google Patents
Device for slotting quartz rods and using method thereof Download PDFInfo
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- CN111873199A CN111873199A CN202010791767.6A CN202010791767A CN111873199A CN 111873199 A CN111873199 A CN 111873199A CN 202010791767 A CN202010791767 A CN 202010791767A CN 111873199 A CN111873199 A CN 111873199A
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- quartz
- lead screw
- rod
- grooving
- push rod
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
- B28D1/24—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising with cutting discs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/02—Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/04—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work
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- Mechanical Engineering (AREA)
- Mining & Mineral Resources (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention discloses a device for slotting a quartz rod and a using method thereof, belonging to the technical field of slotting of quartz rods, comprising a workbench, the bottom end of the workbench is symmetrically provided with support legs at the left and right, the support legs are provided with idler wheels, the top end of the workbench is symmetrically provided with vertical beams at the left and right, the top ends of the vertical beams at the two sides are provided with cross beams, the vertical beam at the left side is provided with a control cabinet, the middle part of the top surface of the workbench is provided with the first push rod, the movable end at the top of the first push rod is provided with the support bracket, the invention can open the groove at different angle positions on the quartz bar without clamping for many times, thereby saving labor and time, the dust removing mechanism can absorb and purify the dust generated in the slotting process in time, is favorable for protecting the health and the sanitation of the working environment, simultaneously, the left and right clamping mechanisms can be independently loosened and moved, so that the device can open the groove on the end part of the quartz bar more conveniently.
Description
Technical Field
The invention relates to the technical field of quartz rod slotting, in particular to equipment for slotting a quartz rod and a using method thereof.
Background
It is well known that quartz rods are special technical glass made of silica, a very good base material (silicon content 9999). Quartz glass has a series of excellent physical and chemical properties, such as: and (4) high temperature resistance. The softening point temperature of the quartz glass is about 1730 ℃, the quartz glass can be used for a long time at 1100 ℃, the maximum service temperature in a short time can reach 1450 ℃, and the quartz glass is corrosion resistant. Except hydrofluoric acid, quartz glass hardly reacts with other acid substances, the acid resistance of the quartz glass is 30 times that of ceramic and 140 times that of stainless steel, and the chemical stability of the quartz glass at high temperature is incomparable to that of any other engineering materials, so that the quartz glass has good thermal stability. The quartz glass has extremely low thermal expansion coefficient, can bear severe temperature change, can not crack when being placed in normal temperature water after being heated to about 1100 ℃, and has good light transmission performance. At present, in the semiconductor product manufacturing industry, a quartz boat is widely used as a wafer carrier in the semiconductor oxidation diffusion process, a plurality of wafers can be inserted into a groove of a groove rod for diffusion processing, and the shape structure, the groove opening precision, the distance between grooves and the like of the quartz boat have great influence on the semiconductor silicon quality. Therefore, when the quartz boat is processed, the slotting of the quartz groove rods is undoubtedly the most critical step. For a long quartz boat, the length of a quartz groove rod is long, and how to position and fix the quartz groove rod is a difficult point during grooving, which directly influences the quality and precision of the grooved quartz groove rod.
The existing slotting equipment is generally used for slotting the quartz rods through the wheel disc saw, the quartz rods need to be fixedly clamped during slotting, the existing equipment is complex in clamping process, multiple groups of slots are often required to be manufactured on one quartz rod, the prior art needs to frequently clamp and position the rods, the use is inconvenient, labor is wasted, the existing equipment is generally used for clamping two end portions of the rods, the existing quartz rods are slotted, the slots are often required to penetrate through two ends of the rods, therefore, in the prior art, the clamping mechanism can obstruct the slots, and inconvenience is caused.
Based on the above, the invention designs a device for slotting a quartz rod and a using method thereof, so as to solve the problems.
Disclosure of Invention
The present invention is directed to a device for grooving quartz rods and a method for using the same to solve the above-mentioned problems in the background art.
In order to achieve the purpose, the invention provides the following technical scheme: the equipment for slotting the quartz rods comprises a workbench, wherein support legs are symmetrically arranged at the left and right sides of the bottom end of the workbench, idler wheels are mounted on the support legs, vertical beams are symmetrically arranged at the left and right sides of the top end of the workbench, cross beams are mounted at the top ends of the vertical beams, a control cabinet is mounted at the left side of the vertical beams, a first push rod is arranged in the middle of the top surface of the workbench, a bearing bracket is mounted at the movable end of the top of the first push rod, clamping mechanisms are correspondingly arranged at the left side and the right side of the first push rod, the quartz rods are mounted between the two groups of clamping mechanisms, a first lead screw is rotatably arranged between the vertical beams at two sides and positioned above the quartz rods, a first motor is connected with the right end of the first lead screw, a limiting polished rod is arranged in parallel at the upper side of the first lead screw, a first sliding block is connected on the, the bottom rigid coupling of first slider has the mounting panel, the bottom of mounting panel is provided with the second push rod, the bottom of second push rod is provided with the cutting machine.
Preferably, the bottom left side of mounting panel is provided with the dust absorption mouth, the dust inlet of dust absorption mouth sets up towards the cutting machine, the crossbeam top is provided with dust absorption clarification plant, dust absorption clarification plant passes through soft pipe connection dust absorption mouth, dust absorption clarification plant contains aspiration pump and dust purification case.
Preferably, the support bracket comprises a V-shaped block body, a groove is formed in the V-shaped surface of the V-shaped block body, a roller is rotatably arranged in the groove, and the upper portion of the roller is higher than the top surface of the groove.
Preferably, fixture is including controlling two sets of lead screw seats, the lead screw seat is fixed to be established on the workstation, rotates between two sets of lead screw seats and is equipped with the second lead screw, second lead screw right-hand member is provided with the second motor, be equipped with the slide rail on the mesa of second lead screw downside, it has the second slider to run through the spiro union on the second lead screw, the setting is slided on the slide rail in second slider bottom, second slider top is provided with the riser, the riser right side is provided with the third motor, the output shaft end of third motor runs through the riser left surface and is connected with the grip block.
Preferably, the grip block is including the square plate, the square groove has been seted up in the front of square plate, the bilateral symmetry is provided with V type grip block about the square groove is interior, the square groove upside is provided with the bar mouth, it has the intercommunication mouth to open between square groove top surface and the bar mouth, horizontal rotation is provided with bispin to the lead screw in the bar mouth, bispin is connected with the fourth motor to the lead screw left end, the bilateral symmetry is provided with the third slider on the bispin to the lead screw, the V type grip block rigid coupling that intercommunication mouth and downside correspond is passed to the bottom of third slider.
Preferably, the first push rod and the second push rod are both electric telescopic rods.
A method of using an apparatus for grooving quartz rods comprising the steps of:
s1, placing the quartz bar on a support bracket in the middle, moving the clamping mechanisms on the two sides to enable the clamping mechanisms to approach each other to be close to the quartz bar, and adjusting the first push rod to enable the quartz bar to be located in the middle of the clamping mechanisms;
s2, the clamping mechanism continues to approach, so that the clamping plate lightly abuts against two ends of the quartz bar, then the fourth motor is started, the V-shaped clamping blocks on two sides perform centering clamping on the quartz bar through the transmission of the double-rotation-direction screw rod, and then the first push rod stretches out and draws back in an adaptive manner, so that the support bracket abuts against the bottom surface of the quartz bar;
s3, adjusting a second push rod and a first motor to enable a cutting disc of the cutting machine to abut against an initial point of a grooving surface of the quartz bar, setting grooving depth through a control cabinet, receiving a command by the second push rod to extend for a specified distance, driving the rotating cutting machine to vertically groove the quartz bar, setting grooving length through the control cabinet, continuously starting the first motor to drive the cutting machine to transversely move for a set distance, and completing a grooving process;
and S4, removing the quartz rod and starting the next slotting operation.
Wherein, in S3, when the tip that the fluting needs to pass through the quartz rod, the fourth motor that the control corresponds the tip starts in the reverse direction, loosens the centre gripping to the corresponding position of quartz rod, starts the second motor of this side simultaneously for the fixture of this side is kept away from the quartz rod, and the cutting machine can carry out the connectivity fluting to the tip of quartz rod this moment.
In S3, when the quartz bar needs to be slotted at different angles, a third motor is started to drive the clamping plate to rotate for a set angle, so that the next slotting position is opposite to the cutting machine, and the steps are repeated to complete slotting.
Compared with the prior art, the invention has the beneficial effects that: the invention can slot on different angle positions of the quartz bar without clamping for many times, saves labor and time, can absorb and purify dust generated in the slotting process in time through the arranged dust removing mechanism, is favorable for protecting the health and sanitation of a working environment, and simultaneously, the left clamping mechanism and the right clamping mechanism can independently loosen and move, thereby leading the device to more conveniently slot on the end part of the quartz bar.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of a support bracket according to the present invention;
FIG. 3 is a schematic view of a clamping mechanism according to the present invention;
FIG. 4 is a schematic diagram of a clamping plate structure according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 to 4, the present invention provides a technical solution: a device for grooving quartz rods comprises a workbench 1, supporting legs 2 are symmetrically arranged at the bottom end of the workbench 1 in the left-right direction, rollers 3 are mounted on the supporting legs 2, vertical beams 4 are symmetrically arranged at the top end of the workbench 1 in the left-right direction, cross beams 5 are mounted at the top ends of the vertical beams 4 at two sides, a control cabinet 6 is mounted on the vertical beam 4 at the left side, a first push rod 7 is arranged in the middle of the top surface of the workbench 1, a bearing bracket 8 is mounted at the movable end of the top of the first push rod 7, clamping mechanisms 9 are correspondingly arranged at the left side and the right side of the first push rod 7, a quartz rod 10 is mounted between the two groups of clamping mechanisms 9, a first lead screw 11 is rotatably arranged between the vertical beams 4 at two sides, the first lead screw 11 is positioned above the quartz rod 10, a first motor 12 is connected to the right end of the first lead screw 11, a limiting polished rod 13 is arranged on the upper side of the, the bottom end of the first sliding block 14 is fixedly connected with an installation plate 15, a second push rod 16 is arranged at the bottom end of the installation plate 15, and a cutting machine 17 is arranged at the bottom end of the second push rod 16.
Furthermore, a dust suction nozzle 18 is arranged on the left side of the bottom end of the mounting plate 15, a dust inlet of the dust suction nozzle 18 is arranged towards the cutting machine 17, a dust suction purification device 19 is arranged at the top end of the cross beam 5, the dust suction purification device 19 is connected with the dust suction nozzle 18 through a soft pipeline, and the dust suction purification device 19 comprises a suction pump and a dust purification box.
Further, the support bracket 8 comprises a V-shaped block 81, a groove 82 is formed in the V-shaped surface of the V-shaped block 81, a roller 83 is rotatably arranged in the groove 82, and the upper portion of the roller 83 is higher than the top surface of the groove 82.
Further, the fixture 9 includes left and right two sets of screw rod seats 91, the screw rod seat 91 is fixed to be established on the workstation 1, it is equipped with the second lead screw 92 to rotate between two sets of screw rod seats 91, the second lead screw 92 right-hand member is provided with the second motor 93, be equipped with the slide rail 94 on the mesa of second lead screw 92 downside, it has the second slider 95 to run through the spiro union on the second lead screw 92, the setting is slided on slide rail 94 in second slider 95 bottom, the 95 top of second slider is provided with riser 96, the 96 right side of riser is provided with the third motor 97, the output shaft end of third motor 97 runs through the 96 left side of riser and is connected with grip block 98.
Further, the grip block 98 is including square plate 981, square groove 982 has been seted up in the front of square plate 981, the bilateral symmetry is provided with V type grip block 983 in the square groove 982, square groove 982 upside is provided with bar mouth 984, it has the intercommunication mouth to open between square groove 982 top surface and the bar mouth 983, horizontal rotation is provided with bispin to lead screw 985 in the bar mouth 984, bispin is connected with fourth motor 987 to the lead screw 985 left end, bilateral symmetry is provided with third slider 986 on the bispin lead screw 985, the bottom of third slider 986 passes the intercommunication mouth and the V type grip block 983 rigid coupling that the downside corresponds.
Furthermore, the first push rod 8 and the second push rod 16 are both electric telescopic rods.
The working principle is as follows: firstly, placing a quartz bar 10 on a support bracket 8 at the middle part, then moving clamping mechanisms 9 at two sides to enable the clamping mechanisms to approach to the quartz bar 10, and enabling the quartz bar 10 to be located at the middle part of the clamping mechanisms 9 by adjusting a first push rod 7;
secondly, the clamping mechanism 9 continues to approach to enable the clamping plates 98 to slightly abut against two ends of the quartz bar 10, then a fourth motor 987 is started, the V-shaped clamping blocks 983 on two sides conduct centering clamping on the quartz bar 10 through double-rotation-direction lead screw transmission, and then the first push rod 7 stretches out and draws back in an adaptive manner to enable the supporting bracket 8 to abut against the bottom surface of the quartz bar 10;
thirdly, by adjusting the second push rod 16 and the first motor 12, a cutting disc of the cutting machine 17 is abutted against an initial point of a grooving surface of the quartz bar 10, the grooving depth is set through the control cabinet 6, the second push rod 16 receives a command to extend for a specified distance, the rotating cutting machine 17 is driven to vertically groove the quartz bar 10, the grooving length is set through the control cabinet 6, the first motor 12 is continuously started, the cutting machine 17 is driven to transversely move for a set distance, and the grooving process is completed;
and fourthly, taking down the quartz bar and starting the next grooving operation.
In addition, when the end of the quartz bar 10 needs to be passed through in the slotting, the fourth motor 987 corresponding to the end is controlled to be started reversely, the clamping of the corresponding position of the quartz bar 10 is released, and meanwhile, the second motor 93 on the side is started, so that the clamping mechanism 9 on the side is far away from the quartz bar 10, and at this time, the end of the quartz bar 10 can be pierced through by the cutter 17.
In addition, when the quartz rod 10 needs to be grooved at different angles, the third motor 97 is started to drive the clamping plate 98 to rotate for a set angle, so that the next grooving position is opposite to the cutting machine 17, and the steps are repeated to complete grooving.
In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above disclosure of further embodiments of the invention is intended only to facilitate the explanation of the invention. Further examples are not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.
Claims (9)
1. The utility model provides an equipment for quartz rod fluting, including workstation (1), workstation (1) bottom bilateral symmetry is provided with landing leg (2), its characterized in that: the supporting legs (2) are provided with idler wheels (3), the top end of the workbench (1) is provided with vertical beams (4) in a bilateral symmetry mode, the two sides of each vertical beam (4) are provided with a crossbeam (5), the left side of each vertical beam (4) is provided with a control cabinet (6), the middle of the top surface of the workbench (1) is provided with a first push rod (7), a bearing bracket (8) is installed at the movable end of the top of the first push rod (7), the left side and the right side of the first push rod (7) are correspondingly provided with clamping mechanisms (9), a quartz bar (10) is installed between the two groups of clamping mechanisms (9), the two sides of each vertical beam (4) are rotatably provided with a first lead screw (11), the first lead screw (11) is positioned above the quartz bar (10), the right end of the first lead screw (11) is connected with a first motor (12), and the upper side of the first lead screw (11) is, run through the spiro union on first lead screw (11) and have first slider (14), and first slider (14) are run through in spacing polished rod (13) activity, the bottom rigid coupling of first slider (14) has mounting panel (15), the bottom of mounting panel (15) is provided with second push rod (16), the bottom of second push rod (16) is provided with cutting machine (17).
2. An apparatus for grooving a quartz rod as set forth in claim 1 wherein: the bottom left side of mounting panel (15) is provided with dust absorption mouth (18), the dust inlet of dust absorption mouth (18) sets up towards cutting machine (17), crossbeam (5) top is provided with dust absorption clarification plant (19), dust absorption clarification plant (19) are through soft pipe connection dust absorption mouth (18), dust absorption clarification plant (19) contain aspiration pump and dust purification case.
3. An apparatus for grooving a quartz rod as set forth in claim 1 wherein: the supporting bracket (8) comprises a V-shaped surface block body (81), a groove (82) is formed in the V-shaped surface of the V-shaped surface block body (81), a roller (83) is rotatably arranged in the groove (82), and the upper portion of the roller (83) is higher than the top surface of the groove (82).
4. An apparatus for grooving a quartz rod as set forth in claim 1 wherein: clamping mechanism (9) are including controlling two sets of lead screw seats (91), lead screw seat (91) are fixed to be established on workstation (1), rotate between two sets of lead screw seats (91) and are equipped with second lead screw (92), second lead screw (92) right-hand member is provided with second motor (93), be equipped with slide rail (94) on the mesa of second lead screw (92) downside, it has second slider (95) to run through the spiro union on second lead screw (92), second slider (95) bottom slides and sets up on slide rail (94), second slider (95) top is provided with riser (96), riser (96) right side is provided with third motor (97), the output axle head of third motor (97) runs through riser (96) left surface and is connected with grip block (98).
5. An apparatus for grooving a quartz rod as set forth in claim 4 wherein: grip block (98) including square plate (981), square groove (982) have been seted up in the front of square plate (981), the bilateral symmetry is provided with V type grip block (983) about in square groove (982), square groove (982) upside is provided with bar mouth (984), it has the intercommunication mouth to open between square groove (982) top surface and bar mouth (983), horizontal rotation is provided with bispin to lead screw (985) in bar mouth (984), bispin is connected with fourth motor (987) to lead screw (985) left end, bispin is provided with third slider (986) to the bilateral symmetry on lead screw (985), V type grip block (983) rigid coupling that the intercommunication mouth corresponds with the downside is passed to the bottom of third slider (986).
6. An apparatus for grooving a quartz rod as set forth in claim 1 wherein: the first push rod (8) and the second push rod (16) are both electric telescopic rods.
7. The use method of the equipment for grooving the quartz rod is characterized by comprising the following steps:
s1, placing the quartz bar 10 on a support bracket 8 in the middle, then moving the clamping mechanisms 9 on the two sides to enable the clamping mechanisms to approach to the quartz bar 10, and adjusting the first push rod 7 to enable the quartz bar 10 to be located in the middle of the clamping mechanisms 9;
s2, the clamping mechanism 9 continues to approach, so that the clamping plates 98 slightly abut against two ends of the quartz bar 10, then the fourth motor 987 is started, the V-shaped clamping blocks 983 on two sides perform centering clamping on the quartz bar 10 through the transmission of the double-rotation-direction screw rod, and then the first push rod 7 stretches and retracts adaptively, so that the supporting bracket 8 abuts against the bottom surface of the quartz bar 10;
s3, by adjusting the second push rod 16 and the first motor 12, the cutting disc of the cutting machine 17 is abutted against the initial point of the grooving surface of the quartz bar 10, the grooving depth is set through the control cabinet 6, the second push rod 16 receives a command to extend for a specified distance, the rotating cutting machine 17 is driven to vertically groove the quartz bar 10, the grooving length is set through the control cabinet 6, the first motor 12 is continuously started, the cutting machine 17 is driven to transversely move for a set distance, and the grooving process is completed;
and S4, removing the quartz rod and starting the next slotting operation.
8. The use method of the apparatus for grooving quartz rods according to claim 7, wherein: in S3, when the end of the quartz rod 10 needs to be slotted, the fourth motor 987 corresponding to the end is controlled to be started reversely, the clamping of the corresponding position of the quartz rod 10 is released, and the second motor 93 on the side is started at the same time, so that the clamping mechanism 9 on the side is far away from the quartz rod 10, and at this time, the cutting machine 17 can slot the end of the quartz rod 10 in a penetrating manner.
9. The use method of the apparatus for grooving quartz rods according to claim 7, wherein: in S3, when it is necessary to perform slotting on the quartz rod 10 at different angles, the third motor 97 is started to drive the clamping plate 98 to rotate for a set angle, so that the next slotting position is opposite to the cutting machine 17, and the aforementioned steps are repeated to complete slotting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010791767.6A CN111873199A (en) | 2020-08-08 | 2020-08-08 | Device for slotting quartz rods and using method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010791767.6A CN111873199A (en) | 2020-08-08 | 2020-08-08 | Device for slotting quartz rods and using method thereof |
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| CN111873199A true CN111873199A (en) | 2020-11-03 |
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| CN202010791767.6A Pending CN111873199A (en) | 2020-08-08 | 2020-08-08 | Device for slotting quartz rods and using method thereof |
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Cited By (7)
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| CN114559198A (en) * | 2022-01-06 | 2022-05-31 | 杭州大和热磁电子有限公司 | False connection jig for quartz boat and use method thereof |
| CN116081514A (en) * | 2022-12-29 | 2023-05-09 | 江苏弘扬石英制品有限公司 | Special quartz glass substrate transfer device and method with corner protection |
| CN116638154A (en) * | 2023-07-21 | 2023-08-25 | 四川省第一建筑工程有限公司 | A construction pipeline slotting device |
| CN116714117A (en) * | 2023-07-26 | 2023-09-08 | 湖北石创半导体科技有限公司 | Double-cutter grooving mechanism for quartz boat |
| CN117359809A (en) * | 2023-10-17 | 2024-01-09 | 合肥玖福半导体技术有限公司 | Cutting equipment for semiconductor processing |
| CN117817869A (en) * | 2024-01-26 | 2024-04-05 | 上海强华实业股份有限公司 | A quartz boat slot rod slotting device and slotting process thereof |
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Application publication date: 20201103 |