CN111811650A - C-T structure imaging system based on holographic concave grating - Google Patents
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Abstract
本发明提出了一种基于全息凹面光栅的C‑T型结构成像系统,解决现有C‑T光学系统存在结构复杂、体积较大、成本较高、能量利用率低的问题。该系统包括前置光学望远单元、衍射单元、探测单元和数据采集控制单元;前置光学望远单元包括前置镜组、光阑和准直镜;衍射单元包括全息凹面光栅;光阑位于前置镜组的像方焦面上,并且与准直镜的物方焦面重合;准直镜用于对入射光进行准直矫正;全息凹面光栅位于准直镜的反射光路上,用于对入射的平行光进行分光,并将分光光束中相同波长的光聚焦至探测单元表面;探测单元包括探测器,探测器位于全息凹面光栅的像方焦面上,用于接收入射方向目标分光后的光信号,并将光信号传输给数据采集控制单元进行处理。
The invention proposes a C-T structure imaging system based on a holographic concave grating, which solves the problems of complex structure, large volume, high cost and low energy utilization rate of the existing C-T optical system. The system includes a front optical telephoto unit, a diffraction unit, a detection unit and a data acquisition control unit; the front optical telephoto unit includes a front mirror group, a diaphragm and a collimating mirror; the diffraction unit includes a holographic concave grating; the diaphragm is located in The image-side focal plane of the front mirror group is coincident with the object-side focal plane of the collimating mirror; the collimating mirror is used to collimate and correct the incident light; the holographic concave grating is located on the reflected light path of the collimating mirror and is used for The incident parallel light is split, and the light of the same wavelength in the split beam is focused on the surface of the detection unit; the detection unit includes a detector, and the detector is located on the focal plane of the image side of the holographic concave grating, and is used to receive the target beam in the incident direction after splitting. The optical signal is transmitted to the data acquisition control unit for processing.
Description
技术领域technical field
本发明属于成像领域,具体涉及一种基于全息凹面光栅的C-T型结构成像系统。The invention belongs to the field of imaging, in particular to a C-T structure imaging system based on a holographic concave grating.
背景技术Background technique
成像光谱技术是一种集图像信息和光谱信息于一体的探测技术,通过获得“图谱数据立方体”对探测目标进行分析,被誉为光学仪器发展史中的一次飞跃,已远超传统全色光学相机(仅能获取目标轮廓和灰度特征)。由于成像光谱技术获取的数据量大,使得其广泛应用于众多领域,例如航天航空、环境监测、海洋环境探测等。光学系统作为成像光谱仪的核心部分,决定了光谱仪的光谱范围、色散率和分辨率等性能。传统的交叉式切尼-特纳(Czerny-Turner,简称C-T)光路和基本型C-T光路(M型光路),因其光路结构紧凑、灵敏度较高和分辨率较高等特点,成为众多小型光谱仪光学系统的首选。Imaging spectroscopy is a detection technology that integrates image information and spectral information. It analyzes the detection target by obtaining a "atlas data cube". Camera (can only acquire target contour and grayscale features). Due to the large amount of data obtained by imaging spectroscopy, it is widely used in many fields, such as aerospace, environmental monitoring, and marine environment detection. As the core part of the imaging spectrometer, the optical system determines the spectral range, dispersion rate and resolution of the spectrometer. The traditional cross-type Czerny-Turner (Czerny-Turner, referred to as C-T) optical path and the basic C-T optical path (M-type optical path) have become the optical path of many small spectrometers due to their compact optical path structure, high sensitivity and high resolution. The system's first choice.
目前,在C-T光路中,分光元件主要为反射式光栅,根据面型可以分为中阶梯光栅、平面光栅和凹面光栅光路:At present, in the C-T optical path, the light splitting element is mainly a reflection grating, which can be divided into echelle grating, plane grating and concave grating optical path according to the surface type:
1.以中阶梯光栅作为分光元件的C-T光学系统1. C-T optical system with echelle grating as beam splitting element
中阶梯光栅具有高色散率和分辨率,符合光谱仪对分辨率的性能要求,且衍射级次高,可以实现全谱闪耀。但是,中阶梯光栅自由光谱范围小,高光谱级次严重重叠,需要横向色散元件对光谱进行二次色散,使得C-T光学系统的结构复杂,加工工艺复杂,成本较高;The echelle grating has high dispersion rate and resolution, which meets the performance requirements of spectrometers for resolution, and has a high diffraction order, which can achieve full-spectrum blaze. However, the free spectral range of the echelle grating is small, the hyperspectral order is seriously overlapped, and the lateral dispersion element is required to perform secondary dispersion of the spectrum, which makes the structure of the C-T optical system complex, the processing technology is complex, and the cost is high;
2.以平面光栅作为分光元件的C-T光学系统2. C-T optical system with plane grating as beam splitting element
C-T光学系统中,作为分光原件的平面光栅主要有两种:闪耀光栅和平面衍射光栅。以闪耀光栅作为例,入射光通过闪耀光栅,接收端的衍射光谱中没有色散的零级包含的光能量总是占总光能的很大一部分,其余光能分散在各级光谱中,而实际使用光栅时往往只利用它的某一级,其能量利用率低、体积较大,不能满足小型化的需求。In the C-T optical system, there are two main types of plane gratings as light splitting elements: blazed gratings and plane diffraction gratings. Taking the blazed grating as an example, the incident light passes through the blazed grating, and the light energy contained in the zero-order without dispersion in the diffraction spectrum at the receiving end always accounts for a large part of the total light energy, and the rest of the light energy is dispersed in the spectrum of each level. The grating often only uses a certain level of it, and its energy utilization rate is low and the volume is large, which cannot meet the needs of miniaturization.
3.以凹面光栅作为分光原件的光学系统3. Optical system with concave grating as beam splitting element
传统的凹面光栅光谱仪中,凹面光栅具有像差修正功能,使得光路极大简化,无需进行其他形式的光路优化,即可自动得到宽光谱范围内具有较高分辨率且保持平直的谱面,但是,光栅衍射效率最高仅为25%~28%,系统总能量利用率也仅为25%~28%。In the traditional concave grating spectrometer, the concave grating has the function of aberration correction, which greatly simplifies the optical path. Without other forms of optical path optimization, it can automatically obtain a wide spectral range with high resolution and maintain a flat spectral surface. However, the diffraction efficiency of the grating is only 25% to 28% at the highest, and the total energy utilization rate of the system is only 25% to 28%.
发明内容SUMMARY OF THE INVENTION
本发明的目的是解决现有C-T光学系统存在结构相对复杂、体积相对较大、成本相对较高、能量利用率较低的问题,提出了一种基于全息凹面光栅的C-T型结构成像系统,本发明对现有的C-T光学系统进一步简化其结构、缩小体积、降低小型光谱仪成本,并提高其能量利用率。The purpose of the present invention is to solve the problems of relatively complex structure, relatively large volume, relatively high cost and low energy utilization rate in the existing C-T optical system, and proposes a C-T structure imaging system based on holographic concave grating. The invention further simplifies the structure of the existing C-T optical system, reduces the volume, reduces the cost of the small spectrometer, and improves its energy utilization rate.
为实现以上发明目的,本发明的技术方案为:For realizing the above purpose of the invention, the technical scheme of the present invention is:
一种基于全息凹面光栅的C-T型结构成像系统,包括前置光学望远单元、衍射单元、探测单元和数据采集控制单元;所述前置光学望远单元包括沿光路依次设置的前置镜组、光阑和准直镜;所述衍射单元包括全息凹面光栅;所述光阑位于前置镜组的像方焦面上,并且与准直镜的物方焦面重合,用于调节入瞳的光通量,使光纤中通过被测介质的光进入C-T光路;所述准直镜用于对入射光进行准直矫正,使入射光变为平行光,并将平行光反射至全息凹面光栅;所述全息凹面光栅位于准直镜的反射光路上,用于对入射的平行光进行分光,并将分光光束中相同波长的光聚焦至探测单元表面;所述探测单元包括探测器,所述探测器位于全息凹面光栅的像方焦面上,用于接收入射方向目标分光后的光信号,并将光信号传输给数据采集控制单元进行处理。A C-T structure imaging system based on a holographic concave grating, comprising a front optical telephoto unit, a diffraction unit, a detection unit and a data acquisition control unit; the front optical telephoto unit includes a front mirror group arranged in sequence along an optical path , a diaphragm and a collimating mirror; the diffraction unit includes a holographic concave grating; the diaphragm is located on the image-side focal plane of the front mirror group, and coincides with the object-side focal plane of the collimating mirror, and is used to adjust the entrance pupil The light flux in the fiber through the measured medium enters the C-T optical path; the collimating lens is used to collimate and correct the incident light, so that the incident light becomes parallel light, and the parallel light is reflected to the holographic concave grating; The holographic concave grating is located on the reflection light path of the collimating mirror, and is used to split the incident parallel light and focus the light of the same wavelength in the split beam to the surface of the detection unit; the detection unit includes a detector, and the detector It is located on the focal plane of the image side of the holographic concave grating, and is used to receive the optical signal after the target beam splitting in the incident direction, and transmit the optical signal to the data acquisition control unit for processing.
进一步地,所述准直镜为离轴抛物镜,离轴角不超过5°Further, the collimating mirror is an off-axis parabolic mirror, and the off-axis angle does not exceed 5°
进一步地,所述全息凹面光栅的出射光线相对于入射光线的倾斜角不超过5°。Further, the inclination angle of the outgoing light of the holographic concave grating with respect to the incident light does not exceed 5°.
进一步地,所述全息凹面光栅的光栅频率为0.3lines/μm。Further, the grating frequency of the holographic concave grating is 0.3 lines/μm.
进一步地,所述探测单元接受衍射级次为+1级的衍射光。Further, the detection unit receives diffracted light whose diffracted order is +1.
进一步地,所述前置光学望远单元选用的玻璃型号为HERAEUS.AGF系列玻璃。Further, the glass model selected for the front optical telephoto unit is HERAEUS.AGF series glass.
进一步地,所述探测单元为CCD图像探测器。Further, the detection unit is a CCD image detector.
与现有技术相比,本发明技术方案的有益效果为:Compared with the prior art, the beneficial effects of the technical solution of the present invention are:
1.本发明基于全息凹面光栅的C-T型结构成像系统采用全息凹面光栅取代传统的交叉式切尼-特纳中的光栅和聚焦球面反射镜,将这两种功能结合,极大简化光路,进一步实现小型化,使得该成像系统结构简单、体积较小、成本较低,可用于远紫外光谱及远红外光谱区域和微型光谱仪中。1. The C-T structure imaging system based on the holographic concave grating of the present invention adopts the holographic concave grating to replace the grating and the focusing spherical mirror in the traditional crossed Cheney-Turner, and combines these two functions to greatly simplify the optical path and further The realization of miniaturization makes the imaging system simple in structure, small in size and low in cost, and can be used in far-ultraviolet and far-infrared spectral regions and miniature spectrometers.
2.本发明基于全息凹面光栅的C-T型结构成像系统使用全息凹面光栅作为色散元件,可减少吸收现象,该光路中只存在准直面和光栅面两次反射的光损失,且无色差,应用于光谱仪极大提高了能量利用率。2. The C-T structure imaging system based on the holographic concave grating of the present invention uses the holographic concave grating as the dispersive element, which can reduce the absorption phenomenon. In this optical path, there is only light loss due to the two reflections of the collimating surface and the grating surface, and there is no chromatic aberration. The spectrometer greatly improves energy utilization.
3.本发明基于全息凹面光栅的C-T型结构成像系统中,由于全息凹面光栅本身具有反射聚焦能力,因此可以简化交叉式切尼-特纳光路,使结构中省去用于反射聚焦的平面镜,使得成像系统光路的稳定性较好,进而使得光谱仪具有非常好的稳定性。3. In the C-T structure imaging system based on the holographic concave grating of the present invention, since the holographic concave grating itself has the ability to reflect and focus, the crossed Cheney-Turner optical path can be simplified, so that the plane mirror used for reflection and focusing is omitted in the structure, The stability of the optical path of the imaging system is better, so that the spectrometer has very good stability.
4.本发明基于全息凹面光栅的C-T型结构成像系统中,全息凹面光栅因其特殊的加工工艺消除了鬼线的影响,具有像差修正功能,无需进行其他形式的光路优化,即自动得到宽光谱范围内的具有高分辨率的平直谱面。4. In the C-T structure imaging system based on the holographic concave grating of the present invention, the holographic concave grating eliminates the influence of ghost lines due to its special processing technology, has aberration correction function, and does not need to perform other forms of optical path optimization. Flat spectral surface with high resolution in the spectral range.
附图说明Description of drawings
图1为本发明基于全息凹面光栅的C-T型结构成像系统的光路原理图;1 is a schematic diagram of the optical path of a C-T structure imaging system based on a holographic concave grating of the present invention;
图2为本发明基于全息凹面光栅的C-T型结构成像系统光路仿真图;Fig. 2 is the light path simulation diagram of the C-T structure imaging system based on the holographic concave grating of the present invention;
图3为本发明基于全息凹面光栅的C-T型结构成像系统的像质评价图;3 is an image quality evaluation diagram of the C-T structure imaging system based on the holographic concave grating of the present invention;
图4为现有交叉式C-T光路的像质评价图。FIG. 4 is an image quality evaluation diagram of a conventional cross-type C-T optical path.
附图标记:1-前置光学望远单元,2-衍射单元,3-探测单元,4-数据采集控制单元,11-前置镜组,12-光阑,13-准直镜,21-全息凹面光栅。Reference signs: 1-front optical telephoto unit, 2-diffraction unit, 3-detection unit, 4-data acquisition control unit, 11-front mirror group, 12-diaphragm, 13-collimating mirror, 21- Holographic concave grating.
具体实施方式Detailed ways
以下结合附图和具体实施例对本发明的内容作进一步详细描述:Below in conjunction with accompanying drawing and specific embodiment, the content of the present invention is described in further detail:
本发明提出一种基于全息凹面光栅的C-T型结构成像系统,该系统中,全息凹面光栅取代传统的交叉式切尼-特纳中的光栅和聚焦球面反射镜,将这两种功能结合,极大简化光路,进一步实现小型化,保留C-T光路优势的同时,结合全息凹面光栅无鬼线、修正像差的优势,提高了光谱仪的能量利用率,同时具有更好的修正像差。The invention proposes a C-T structure imaging system based on a holographic concave grating. In the system, the holographic concave grating replaces the grating and focusing spherical mirror in the traditional crossed Cheney-Turner. The optical path is greatly simplified, and miniaturization is further realized. While retaining the advantages of the C-T optical path, combined with the advantages of no ghost lines and correction of aberrations of the holographic concave grating, the energy utilization rate of the spectrometer is improved, and it has better correction of aberrations.
如图1所示,本发明基于全息凹面光栅的C-T型结构成像系统主要由前置光学望远单元1、衍射单元2,探测单元3与数据采集控制单元4组成。其中,前置光学望远单元1包括沿光路依次设置的前置镜组11、光阑12和准直镜13,衍射单元2包括全息凹面光栅21,探测单元3包括探测器,数据采集控制单元4即传输和用户端。光阑12位于前置镜组11的像方焦面上,且与准直镜13的物方焦面重合,其作用是调节入瞳的光通量,使光纤中通过被测介质的光进入C-T光路;准直镜13的作用是对入射光进行准直矫正,使以同心圆入射的入射光变为平行光,并将平行光打到全息凹面光栅21上;全息凹面光栅21位于准直镜13的反射光路上,有两种作用,一是对入射光分光,二是使分光后的光束中相同波长的光聚焦到探测器表面;探测器位于全息凹面光栅21的像方焦面上,用于接收入射方向目标分光后的光信号,并将光信号传输给数据采集控制单元4进行处理。As shown in FIG. 1 , the C-T structure imaging system based on the holographic concave grating of the present invention is mainly composed of a front
如图2所示,基于全息凹面光栅的C-T型结构成像系统的工作原理如下:入射光通过光阑12进入C-T光路,经由准直镜13反射,以平面光波传播到全息凹面光栅21上,全息凹面光栅21将打到栅面上的复色光进行衍射分光,反射出发散光束,由于全息凹面光栅21本身起到聚焦作用,因此,同波长的单色光将聚集到位于全息凹面光栅21焦面的探测器上,探测器进行光谱数据收集。As shown in Figure 2, the working principle of the C-T structure imaging system based on the holographic concave grating is as follows: the incident light enters the C-T optical path through the
本发明成像系统中,准直镜13具体可采用离轴抛物镜,实现离轴光束的无像差聚焦,离轴角不超过5°。全息凹面光栅21选用全反射全息凹面光栅,出射光线相对于入射光线的倾斜角不超过5°。探测器选用CCD图像探测器,利用其具有高敏感度,低光度的入射光也能侦测到的优点,使其可以应用于低光度环境中,提高了能量利用率。In the imaging system of the present invention, the collimating mirror 13 can be specifically an off-axis parabolic mirror to realize aberration-free focusing of the off-axis light beam, and the off-axis angle does not exceed 5°. The holographic
在本发明实施例中,全息凹面光栅21的离轴角具体可为5度,用于接收经准直镜13反射后的平行光束,其光栅频率可为0.3lines/μm,且探测器接受衍射级次为+1级的衍射光,全息凹面光栅21决定了入瞳直径,经计算入瞳直径为21.76mm。探测器位于全息凹面光栅21的像方焦面上。定义Z轴为光轴方向,沿Z轴正方向逆时针旋转90度即为Y方向,与面ZOY垂直的轴即为X轴。探测器相对于X轴的表面倾斜可为12度,为使探测器位于像面上,探测器在Y轴正方向上有一定的偏心,通过调整角度与位置,使得不同波长的像方焦点处于同一个面上并落于探测器上。In the embodiment of the present invention, the off-axis angle of the holographic
基于上述结构设置,本发明基于全息凹面光栅的C-T型结构成像系统具有以下特点。Based on the above structural settings, the imaging system of the C-T structure based on the holographic concave grating of the present invention has the following characteristics.
本发明基于全息凹面光栅的C-T型结构成像系统使用全息凹面光栅21作为色散元件,可减少吸收现象,该光路中只存在准直面和光栅面两次反射的光损失,且无色差,应用于光谱仪极大提高了能量利用率。The C-T structure imaging system based on the holographic concave grating of the present invention uses the holographic
本发明基于全息凹面光栅的C-T型结构成像系统中,由于全息凹面光栅21本身具有反射聚焦能力,因此可以简化交叉式切尼-特纳光路,使结构中省去用于反射聚焦的平面镜,光路的稳定性使得光谱仪具有非常好的稳定性;同时,该系统结构更加紧凑,可适用于微型光谱仪中。In the C-T structure imaging system based on the holographic concave grating of the present invention, since the holographic
本发明基于全息凹面光栅的C-T型结构成像系统中,全息凹面光栅21因其特殊的加工工艺消除了鬼线的影响,具有像差修正功能,无需进行其他形式的光路优化,即自动得到宽光谱范围内的具有高分辨率的平直谱面。In the C-T structure imaging system based on the holographic concave grating of the present invention, the holographic
本发明基于全息凹面光栅的C-T型结构成像系统可用于远紫外光谱及远红外光谱区域。该全息凹面光栅21的光栅常数可为3.3μm,从而实现精细分光,前置光学望远单元1选用的玻璃型号为HERAEUS.AGF系列下的玻璃,可通光波长范围横跨极远真空紫外到远红外波段,通过仿真可以得到其像差符合评价标准。以点列图为例,如图4所示,可以得出现有交叉式C-T光路的弥散斑半径为6299.15~6299.61μm。如图3所示,本发明基于全息凹面光栅的C-T型结构成像系统的弥散斑半径为3234.96~3235.34μm,由此可知本发明基于全息凹面光栅的C-T型结构成像系统的光谱分辨率更高。The C-T structure imaging system based on the holographic concave grating of the present invention can be used in the far-ultraviolet spectrum and the far-infrared spectrum region. The grating constant of the holographic
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