CN110081976A - A kind of big visual field grating prism spectrum imaging system - Google Patents
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Abstract
Description
技术领域technical field
本发明涉及光谱成像技术领域,尤其涉及一种大视场光栅棱镜光谱成像系统。The invention relates to the technical field of spectral imaging, in particular to a large field of view grating prism spectral imaging system.
背景技术Background technique
光谱成像技术是一类将成像技术和光谱技术相结合的新型多维信息获取技术,它能够获得被探测目标的二维空间信息和一维光谱信息,形成数据立方体。光谱成像技术在军事侦察及农、林、水、土、矿灯资源调查等方面有着广阔的应用前景。Spectral imaging technology is a new type of multi-dimensional information acquisition technology that combines imaging technology and spectral technology. It can obtain two-dimensional spatial information and one-dimensional spectral information of the detected target to form a data cube. Spectral imaging technology has broad application prospects in military reconnaissance and investigation of agriculture, forestry, water, soil and miner's lamp resources.
现有技术中常见的高光谱成像技术的分光方式主要有棱镜和光栅分光等,例如,Fery棱镜型、Offner光栅型、Czerny-Turner光栅型和Dyson光栅型等,但这类光谱仪均为离轴结构,存在着结构复杂和研制成本高等不足等缺陷,无法满足当前高光谱仪器大视场、宽光谱范围的发展要求。The common spectroscopic methods of hyperspectral imaging technology in the prior art mainly include prism and grating splitting, for example, Fery prism type, Offner grating type, Czerny-Turner grating type and Dyson grating type, etc., but these spectrometers are all off-axis. The structure has the defects of complex structure and high development cost, which cannot meet the development requirements of the current hyperspectral instruments with a large field of view and a wide spectral range.
发明内容SUMMARY OF THE INVENTION
本发明的目的是提供一种大视场光栅棱镜光谱成像系统,该系统整体大小紧凑、重量轻、结构简单,像面未发生倾斜,有利于系统的装调,能满足当前光谱成像技术发展需求。The purpose of the present invention is to provide a large field-of-view grating prism spectral imaging system, which is compact in overall size, light in weight, simple in structure, and has no inclination of the image plane, which is beneficial to the installation and adjustment of the system, and can meet the development requirements of current spectral imaging technology. .
本发明的目的是通过以下技术方案实现的:The purpose of this invention is to realize through the following technical solutions:
一种大视场光栅棱镜光谱成像系统,所述系统包括狭缝、球面反射镜、平面反射镜、光栅棱镜模块、聚焦镜组、二级滤光片和探测器,其中:A large field of view grating prism spectral imaging system, the system comprises a slit, a spherical mirror, a plane mirror, a grating prism module, a focusing mirror group, a secondary filter and a detector, wherein:
经过所述狭缝的光束入射到所述球面反射镜后发生反射;The light beam passing through the slit is incident on the spherical mirror and is reflected;
经过反射后的光束入射到所述平面反射镜;The reflected light beam is incident on the plane mirror;
经所述平面反射镜反射后的光束入射到所述光栅棱镜模块,在所述光栅棱镜模块处发生衍射,其中:不同波长的一级衍射光入射所述聚焦镜组,再经过所述二级滤光片后到达所述探测器,完成成像过程;The light beam reflected by the plane mirror is incident on the grating prism module, and diffracted at the grating prism module, wherein: the first-order diffracted light of different wavelengths enters the focusing mirror group, and then passes through the second-stage diffracted light. After the filter reaches the detector, the imaging process is completed;
所述光栅棱镜模块的前表面作为整个系统的孔径光阑,该孔径光阑位于所述球面反射镜的球心C处,且和所述光栅棱镜模块的入射面重合。The front surface of the grating prism module serves as an aperture stop of the entire system, and the aperture stop is located at the spherical center C of the spherical mirror and coincides with the incident surface of the grating prism module.
在所述平面反射镜的中间开有矩形孔,利用该矩形孔使所述平面反射镜不遮挡从狭缝出射的光束。A rectangular hole is opened in the middle of the flat reflection mirror, and the flat reflection mirror does not block the light beam emitted from the slit by using the rectangular hole.
所述光栅棱镜模块由光栅基底、光栅、保护玻璃和棱镜胶合而成,其中:The grating prism module is formed by gluing a grating substrate, a grating, a protective glass and a prism, wherein:
所述光栅基底、保护玻璃和棱镜均采用同一种材料;The grating substrate, protective glass and prism are all made of the same material;
所述光栅棱镜模块的光轴与模组底面平行,中心波长主光线以α1角入射光栅基底平面,发生折射后以入射角α2入射光栅,光线以衍射角α3出射,并以α4入射角到达棱镜斜面;The optical axis of the grating prism module is parallel to the bottom surface of the module, and the central wavelength chief ray enters the grating base plane at an angle of α1, and enters the grating at an angle of incidence α2 after being refracted . Reach the prism slope;
所述棱镜的斜面顶角为β,最后光线以α5出射角出射。 The apex angle of the inclined plane of the prism is β, and finally the light exits at an exit angle of α5.
在所述二级滤光片靠近所述探测器的表面镀制有长波通截止滤光膜,短波截止波长为550nm,并将所述二级滤光片靠近所述探测器的表面。A long-wave-pass cut-off filter film is plated on the surface of the secondary filter close to the detector, and the short-wave cut-off wavelength is 550 nm, and the secondary filter is placed close to the surface of the detector.
所述系统的狭缝长度能达到29.4mm,光谱范围为420-1000nm,F数2.4。The slit length of the system can reach 29.4 mm, the spectral range is 420-1000 nm, and the F number is 2.4.
所述系统采用同轴设计,能避免离轴系统引入的很难矫正的离轴像差。The system adopts an on-axis design, which can avoid off-axis aberrations introduced by off-axis systems that are difficult to correct.
由上述本发明提供的技术方案可以看出,上述系统整体大小紧凑、重量轻、结构简单,像面未发生倾斜,有利于系统的装调,能满足当前光谱成像技术发展需求。It can be seen from the technical solutions provided by the present invention that the overall size of the system is compact, light in weight, simple in structure, and the image plane is not tilted, which is beneficial to the installation and adjustment of the system, and can meet the development requirements of current spectral imaging technology.
附图说明Description of drawings
为了更清楚地说明本发明实施例的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域的普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他附图。In order to illustrate the technical solutions of the embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings used in the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained from these drawings without any creative effort.
图1为本发明实施例提供的大视场光栅棱镜光谱成像系统整体结构示意图;1 is a schematic diagram of the overall structure of a large-field grating prism spectral imaging system provided by an embodiment of the present invention;
图2为本发明实施例所提供的光栅棱镜模块的结构示意图;2 is a schematic structural diagram of a grating prism module provided by an embodiment of the present invention;
图3为本发明实施例所提供球面反射镜的结构示意图。FIG. 3 is a schematic structural diagram of a spherical mirror provided by an embodiment of the present invention.
具体实施方式Detailed ways
下面结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明的保护范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present invention.
下面将结合附图对本发明实施例作进一步地详细描述,如图1所示为本发明实施例提供的大视场光栅棱镜光谱成像系统整体结构示意图,所述系统主要包括狭缝101,球面反射镜102、平面反射镜103、光栅棱镜模块104、聚焦镜组105、二级滤光片106和探测器107,其中:The embodiments of the present invention will be described in further detail below with reference to the accompanying drawings. FIG. 1 is a schematic diagram of the overall structure of a large-field grating prism spectral imaging system provided by an embodiment of the present invention. The system mainly includes a slit 101, a spherical reflection Mirror 102, plane mirror 103, grating prism module 104, focusing lens group 105, secondary filter 106 and detector 107, wherein:
经过所述狭缝101的光束入射到所述球面反射镜102后发生反射;The light beam passing through the slit 101 is incident on the spherical mirror 102 and then reflected;
经过反射后的光束入射到所述平面反射镜103;具体实现中,在所述平面反射镜103的中间还开有矩形孔,利用该矩形孔使所述平面反射镜103不遮挡从狭缝101出射的光束;The reflected light beam is incident on the plane mirror 103; in the specific implementation, a rectangular hole is opened in the middle of the plane mirror 103, and the plane mirror 103 is not blocked from the slit 101 by the rectangular hole. outgoing beam;
经所述平面反射镜103反射后的光束入射到所述光栅棱镜模块104,在所述光栅棱镜模块104处发生衍射,其中:不同波长的一级衍射光入射所述聚焦镜组105,再经过所述二级滤光片106后到达所述探测器107,完成成像过程;The light beam reflected by the plane mirror 103 is incident on the grating prism module 104, and diffracted at the grating prism module 104, wherein: the first-order diffracted light of different wavelengths is incident on the focusing mirror group 105, and then passes through the grating prism module 104. The secondary filter 106 reaches the detector 107 to complete the imaging process;
所述光栅棱镜模块104的前表面作为整个系统的孔径光阑,该孔径光阑位于所述球面反射镜102的球心C处,且和所述光栅棱镜模块104的入射面重合。The front surface of the grating prism module 104 serves as an aperture stop of the entire system. The aperture stop is located at the spherical center C of the spherical mirror 102 and coincides with the incident surface of the grating prism module 104 .
如图2所示为本发明实施例所提供的光栅棱镜模块的结构示意图,所述光栅棱镜模块104由光栅基底、光栅、保护玻璃和棱镜胶合而成,其中:FIG. 2 is a schematic structural diagram of a grating prism module provided by an embodiment of the present invention. The grating prism module 104 is formed by gluing a grating substrate, a grating, a protective glass and a prism, wherein:
所述光栅基底、保护玻璃和棱镜均采用同一种材料,如H-K9L;The grating substrate, protective glass and prism are all made of the same material, such as H-K9L;
所述光栅棱镜模块104的光轴OO’与模组底面平行,中心波长主光线以α1角入射光栅基底平面,发生折射后以入射角α2入射光栅,光线以衍射角α3出射,并以α4入射角到达棱镜斜面;The optical axis OO' of the grating prism module 104 is parallel to the bottom surface of the module, the central wavelength principal ray is incident on the grating base plane at an angle of α1, and is incident on the grating at an angle of incidence α2 after refraction, and the light exits at an angle of diffraction α3, and is emitted at an angle of α. 4 The angle of incidence reaches the slope of the prism;
所述棱镜的斜面顶角为β,最后光线以α5出射角出射。 The apex angle of the inclined plane of the prism is β, and finally the light exits at an exit angle of α5.
进一步的,为了使中心波长出射光线与光轴OO’平行,根据几何关系可知需要Further, in order to make the central wavelength outgoing ray parallel to the optical axis OO', according to the geometric relationship, it can be known that the
β=α5(1)β=α 5 (1)
当光线入射体全息光栅基底的入射角满足布拉格衍射角时,衍射效率最高,此时入射角和衍射角相等,即:When the incident angle of the light incident on the volume holographic grating substrate satisfies the Bragg diffraction angle, the diffraction efficiency is the highest, and the incident angle and the diffraction angle are equal, namely:
其中,λB是布拉格衍射波长,d是光栅常数。根据菲涅尔折射定律,中心波长光束入射光栅的角度为:where λ B is the Bragg diffraction wavelength and d is the grating constant. According to Fresnel's law of refraction, the angle at which the central wavelength beam enters the grating is:
其中,nC是中心波长在棱镜内部的折射率。光束经过光栅发生衍射,其遵循衍射定律,则中心波长的衍射角为:where n C is the refractive index of the center wavelength inside the prism. The light beam is diffracted by the grating, which follows the diffraction law, then the diffraction angle of the central wavelength is:
α3C=arcsin(λC/(d·nC)-sin(α2C)) (4)α 3C =arcsin(λ C /(d·n C )-sin(α 2C )) (4)
根据几何关系可知According to the geometric relationship
β=α3C+α4C (5)β=α 3C +α 4C (5)
而根据菲涅尔折射定律有According to Fresnel's law of refraction, we have
nC·sinα4C=sinα5C (6)n C ·sinα 4C =sinα 5C (6)
将上述(1)、(4)和(6)式带入(5)式可求得棱镜顶角The prism vertex angle can be obtained by substituting the above equations (1), (4) and (6) into equation (5)
如图3所示为本发明实施例所提供球面反射镜的结构示意图,所述系统采用球面反射镜作为准直结构,狭缝物点光束入射球面反射镜,然后准直入射光栅棱镜。如图3所示,C点是球面反射镜的球心,F’为球面反射镜的焦点,和狭缝位置重合,根据光路可逆原理,准直光路可以看作无穷远物体成像,即物距l=-∞,此时球面反射镜的初级像差系数为:FIG. 3 is a schematic structural diagram of a spherical reflector provided by an embodiment of the present invention. The system adopts a spherical reflector as a collimating structure, and the slit object point beam enters the spherical reflector, and then is collimated into the grating prism. As shown in Figure 3, point C is the spherical center of the spherical mirror, F' is the focal point of the spherical mirror, which coincides with the position of the slit. According to the principle of reversibility of the optical path, the collimated optical path can be regarded as the imaging of an infinitely distant object, that is, the object distance l=-∞, the primary aberration coefficient of the spherical mirror is:
上式中SⅠ,SⅡ,SⅢ,SⅣ和SⅤ分别为球面反射镜的初级球差系数、慧差系数、象散系数、场曲系数和畸变系数。r为球面曲率半径,h为近轴光线在表面的入射高度,i为光线在球面的入射角度,入射iz为主光线入射光阑角度,J为拉赫不变量。由于是反射镜,所以不存在色差。In the above formula, S I , S II , S III , S IV and S V are the primary spherical aberration coefficient, coma coefficient, astigmatism coefficient, field curvature coefficient and distortion coefficient of the spherical mirror, respectively. r is the radius of curvature of the spherical surface, h is the incident height of the paraxial light on the surface, i is the incident angle of the light on the spherical surface, the incident iz is the incident aperture angle of the main light ray, and J is the Lach invariant. Since it is a mirror, there is no chromatic aberration.
上述系统的孔径光阑位于球面反射镜球心C处,和光栅棱镜分光原件的入射面重合,此时iz=0,则(8)式中SⅡ=SⅢ=SⅤ=0,对于焦面的物点该球面反射镜系统不存在慧差、像散、畸变和色差,只存在球差和场曲。由于所述系统使用一定长度的狭缝,视场较大,这样的引入的和视场相关的像差可以和准直镜的残余像差相互补偿。The aperture diaphragm of the above system is located at the spherical center C of the spherical mirror, which is coincident with the incident surface of the grating prism beam splitting element. At this time, i z =0, then S Ⅱ =S Ⅲ =S Ⅴ =0 in formula (8), for The object point of the focal plane This spherical mirror system has no coma, astigmatism, distortion and chromatic aberration, only spherical aberration and field curvature. Since the system uses a slit of a certain length, the field of view is larger, such introduced field-dependent aberrations can be mutually compensated with the residual aberration of the collimating mirror.
另外,由于所述系统的色散元件是透射光栅,会存在着二级光谱,即400-500nm的二级衍射光线会重叠到像面800-1000nm的光谱区,为了避免光谱混叠在像面前放置二级滤光片,在所述二级滤光片106靠近所述探测器107的表面镀制有长波通截止滤光膜,短波截止波长为550nm,并将所述二级滤光片106靠近所述探测器107的表面。In addition, since the dispersive element of the system is a transmission grating, there will be a second-order spectrum, that is, the second-order diffracted light at 400-500nm will overlap to the spectral region of 800-1000nm on the image plane. In order to avoid spectral aliasing, it is placed in front of the image. A secondary filter, the surface of the secondary filter 106 close to the detector 107 is coated with a long-wave-pass cut-off filter film, and the short-wave cut-off wavelength is 550 nm, and the secondary filter 106 is close to the surface of the detector 107 .
最终,上述系统的狭缝长度能达到29.4mm,光谱范围为420-1000nm,能覆盖可见光到近红外波段,F数2.4,光谱分辨率达到1.2nm,满足当前光谱成像技术发展需求。Finally, the slit length of the above system can reach 29.4mm, the spectral range is 420-1000nm, can cover the visible light to the near-infrared band, the F number is 2.4, and the spectral resolution can reach 1.2nm, which meets the current development needs of spectral imaging technology.
另外,该系统采用同轴设计,能避免离轴系统引入的很难矫正的离轴像差。In addition, the system uses an on-axis design to avoid off-axis aberrations introduced by off-axis systems that are difficult to correct.
下面以具体的实例对上述系统的工作过程进行仿真实验,在该实例中:系统一阶参数为:光谱范围达到420-1000nm,覆盖可见光到近红外波段,狭缝长度29.4mm,F数为2.4,像元大小为11μm,光栅线对数的为170lines/mm。The working process of the above-mentioned system is simulated with a specific example below. In this example, the first-order parameters of the system are: the spectral range reaches 420-1000 nm, covering the visible light to near-infrared band, the slit length is 29.4 mm, and the F number is 2.4 , the pixel size is 11 μm, and the raster line logarithm is 170 lines/mm.
基于系统在420nm,550nm,700nm和1000nm的调制传递函数MTF结果图,在截止频率46lines/mm时,在整个波段范围内,成像光谱仪所有视场的传递函数虽然受到系统遮拦的影响有所下降,但MTF在奈奎斯特频率均大于0.6。Based on the MTF results of the system at 420nm, 550nm, 700nm and 1000nm, when the cut-off frequency is 46lines/mm, the transfer functions of all fields of view of the imaging spectrometer are reduced in the entire wavelength range, although they are affected by the system occlusion. But the MTF is greater than 0.6 at the Nyquist frequency.
另外,点列图是通过光线追迹图给出了系统在不同波长下的点列图的均方根半径数值,从仿真得到的点列图中可知:在探测器上的点像较好的落在一个像素内。In addition, the spot diagram gives the root mean square radius value of the spot diagram of the system at different wavelengths through the ray trace diagram. From the point diagram obtained from the simulation, it can be known that the spot image on the detector is better. falls within one pixel.
所述系统最终获取的数据信息包括两维图像信息和一维光谱信息,对于光谱维成像质量评价的标准一般使用谱线弯弯曲(Smile)和色畸变,这些畸变会造成光谱复原的误差,造成目标特征成分识别的误差。两者弯曲均会给后续数据处理带来很大的麻烦,需要在光学系统设计时给予有效控制,在光学设计软件中对5个波长420nm,500nm,700nm,800nm和1000nm,及5个视场(0,0)、(0,0.3)、(0,0.5)、(0,0.7)和(0,1)视场的主光线进行追迹,结果表明在所有波段的最大谱线弯曲和色畸变均小于3μm(0.32pixel),满足了光谱成像系统的技术要求,保证了光谱复原的准确性。The data information finally obtained by the system includes two-dimensional image information and one-dimensional spectral information. The standard for spectral-dimensional imaging quality evaluation generally uses spectral line bending (Smile) and color distortion. These distortions will cause errors in spectral restoration and cause The error of target feature component recognition. Both bending will bring a lot of trouble to subsequent data processing, and it needs to be effectively controlled in the optical system design. (0,0), (0,0.3), (0,0.5), (0,0.7) and (0,1) field of view chief rays were traced and the results showed the maximum spectral line bending and chromaticity in all bands The distortion is less than 3μm (0.32pixel), which meets the technical requirements of the spectral imaging system and ensures the accuracy of spectral restoration.
值得注意的是,本发明实施例中未作详细描述的内容属于本领域专业技术人员公知的现有技术。It should be noted that the content not described in detail in the embodiments of the present invention belongs to the prior art known to those skilled in the art.
综上所述,本发明实施例所提供的系统整体大小紧凑、重量轻、结构简单,像面未发生倾斜,利于系统的装调;且最终狭缝长度能达到29.4mm,光谱范围为420-1000nm,能覆盖可见光到近红外波段,F数2.4,光谱分辨率达到1.2nm,满足当前光谱成像技术发展需求。To sum up, the overall size of the system provided by the embodiment of the present invention is compact, light in weight, simple in structure, and the image plane is not tilted, which is conducive to the installation and adjustment of the system; and the final slit length can reach 29.4 mm, and the spectral range is 420- 1000nm, can cover visible light to near-infrared band, F number 2.4, spectral resolution of 1.2nm, to meet the current development needs of spectral imaging technology.
以上所述,仅为本发明较佳的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明披露的技术范围内,可轻易想到的变化或替换,都应涵盖在本发明的保护范围之内。因此,本发明的保护范围应该以权利要求书的保护范围为准。The above is only a preferred embodiment of the present invention, but the protection scope of the present invention is not limited to this. Any person skilled in the art can easily think of changes or Substitutions should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.
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