CN1108749A - Sputter selective-absorption coating for solar vacuum thermal arrest tube - Google Patents
Sputter selective-absorption coating for solar vacuum thermal arrest tube Download PDFInfo
- Publication number
- CN1108749A CN1108749A CN94112593A CN94112593A CN1108749A CN 1108749 A CN1108749 A CN 1108749A CN 94112593 A CN94112593 A CN 94112593A CN 94112593 A CN94112593 A CN 94112593A CN 1108749 A CN1108749 A CN 1108749A
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- CN
- China
- Prior art keywords
- aluminium
- film
- nitrogen
- coating
- sputter
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- Pending
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- 238000000576 coating method Methods 0.000 title claims abstract description 35
- 239000011248 coating agent Substances 0.000 title claims abstract description 32
- 238000010521 absorption reaction Methods 0.000 title abstract description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 21
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000007789 gas Substances 0.000 claims abstract description 19
- 239000004411 aluminium Substances 0.000 claims abstract description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000006117 anti-reflective coating Substances 0.000 claims abstract description 11
- 229910052786 argon Inorganic materials 0.000 claims abstract description 10
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 9
- 229910003481 amorphous carbon Inorganic materials 0.000 claims abstract description 6
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims abstract description 5
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims abstract description 5
- IWBUYGUPYWKAMK-UHFFFAOYSA-N [AlH3].[N] Chemical compound [AlH3].[N] IWBUYGUPYWKAMK-UHFFFAOYSA-N 0.000 claims description 10
- 238000005546 reactive sputtering Methods 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 6
- -1 aluminum nitrogen-carbon Chemical group 0.000 claims description 4
- 239000011159 matrix material Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 5
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 2
- 239000000203 mixture Substances 0.000 abstract 2
- 229910018509 Al—N Inorganic materials 0.000 abstract 1
- 238000007747 plating Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 12
- 238000004544 sputter deposition Methods 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- CKUAXEQHGKSLHN-UHFFFAOYSA-N [C].[N] Chemical compound [C].[N] CKUAXEQHGKSLHN-UHFFFAOYSA-N 0.000 description 3
- 239000006096 absorbing agent Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004062 sedimentation Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002352 surface water Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
- Y02E10/44—Heat exchange systems
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- Physical Vapour Deposition (AREA)
Abstract
The characteristic lies in that single cylindrical (or planar) aluminium cathode is adopted, the aluminium film is splashed in argon gas as bottom layer, the progressively varied Al-N absorption film is formed by reactive splashing in gas mixture of argon and nitrogen, then in the mixture of argon and acetylene (or methane) to reactively splash into no metal containing amorphous carbon as antireflective coating. Said coating features absorptivity>0.94, emissivity=0.06, possessing the general advantages of single cathode splashing device, specially the time of reactive splashing is very short, so that the film plating efficiency is high, gas and power consumption is low, and the technological process is easily controlled.
Description
The present invention relates to a kind of heat-absorbing material that utilizes solar energy, promptly be used for the solar selectively absorbing coating of vacuum heat collection pipe.
Vacuum glass heat collection tube is a structure of efficiently utilizing solar energy, is industry and domestic heating, the critical component that extracts the surface water, generating, refrigeration and air-conditioning, and its main cause is the inner tube outer surface at thermal-collecting tube, deposits the absorber coatings of high selectivity.This coating is made up of two basic layers of bottom and top layer, and bottom is made of the metal film with high infrared reflectivity, and the top layer is made of the film of and strong absorption solar spectrum transparent at infrared band, and this top layer is divided into absorbed layer and antireflection layer again.By the resonance spectrum transformation of metal and fine particle, produce strong absorption, and then be converted to heat energy visible light.
This coating can utilize galvanoplastic or evaporation to obtain, most typical is to utilize sputtering method, wherein famous is copper/stainless steel one carbon coating (United States Patent (USP) NO4.339.484) that utilizes magnetron sputtering technique to be coated with, but the sputter equipment of sputter copper/stainless steel-carbon coating needs two target cathodes, be copper and stainless steel cathode, two negative electrodes need carry out sputter respectively in argon gas, wherein stainless steel cathode needs sputter twice a plated film cycle.Two negative electrodes during sputter, must be provided with plate washer in order to prevent mutual pollution separately betwixt, so just make the structure of device, electrical apparatus control system and complicated operating processization.Plate washer can be tackled considerable sputter stream simultaneously, therefore wastes many materials, has prolonged the plated film cycle, has reduced production efficiency.
Another kind of coating is sputtered aluminum/aluminium-nitrogen selectivity absorber coatings, this coating can be with single aluminium target cathode sputtering system, therefore overcome the shortcoming of twin cathode sputtering equipment and sputter procedure, but the top layer of this coating, its last reactive sputtering stage carries out in nitrogen, therefore generating aluminium nitrogen film makes antireflective coating, but the reactive sputtering speed of aluminium nitrogen antireflective coating is very slow, therefore the suitable length of time of deposition.
The present invention is directed to the deficiency of above-mentioned two kinds of situations, a kind of aluminium/aluminium nitrogen-carbon selectivity absorber coatings of sputter is provided, this coating sputtering technology only needs an aluminium negative electrode, with nitrogen and two kinds of gases of acetylene (or methane) gas, carries out reactive sputtering respectively.
The object of the present invention is achieved like this, at first uses aluminium negative electrode (cylindrical target or flat target), and the aluminium film of deposition high reflectance is made bottom on matrix in argon gas, and thickness is greater than 0.1 * 10
-3Mm adds the nitrogen reactive sputtering then and generates aluminium nitrogen absorbed layer in argon gas, thickness is 0.05 * 10
-3Mm～0.2 * 10
-3Mm, this absorbed layer begins increase along with thickness from the bottom layer of aluminum upper surface, and nitrogen increases gradually to the ratio of aluminium atomicity, but the last reactive sputtering stage is to carry out in argon gas adds the gas of acetylene (or methane), generate amorphous carbon and make antireflective coating, thickness is 0.03 * 10
-3Mm～0.09 * 10
-3Mm.
Sputtered aluminum of the present invention/aluminium nitrogen-carbon coating, its aluminium nitrogen-carbon top layer is made up of two parts, a part is that aluminium nitrogen film is made absorbed layer, another part is to make antireflective coating with metal-free amorphous carbon, because adding the sputter of acetylene (or methane) solid/liquid/gas reactions by argon gas, this antireflective coating generates, therefore reaction speed is very fast, the sedimentation time of this invention coating is shortened greatly, as the coating reaction sputter phase deposition time ratio aluminium/aluminium-nitrogen coating reaction sputter phase deposition time decreased about 60% of this invention, reduce about 40% than copper/stainless steel-carbon coating.
Magnetron sputtering technology, in the sputter stage, cathodic discharge power is very big, and the power consumption height also has various auxiliary equipment to move simultaneously during plated film, electricity consumption simultaneously, so the shortening of coating sputtering time of the present invention will significantly reduce the consumption of electric energy and gas, reduce the wearing and tearing of equipment, help boosting productivity, reduce production costs.
Coating of the present invention is compared with copper/stainless steel-carbon coating that United States Patent (USP) NO.4.339.484 provides, its sputtering technology only needs a negative electrode, thereby sputter equipment and technology are simple, the sputtering yield height, save material, do not contain the gas that the catalytic action because of chromium in the stainless steel and iron produces; Compare with the coating of making antireflective coating of aluminium-nitrogen, the sputter coating time shortens greatly, and gas consumption reduces, and power consumption reduces, and production efficiency improves, and the absorptivity of coating also has raising, and technical process is easy to control.
The solar absorptance of aluminium of the present invention/aluminium nitrogen-carbon coating is generally 0.94, reaches 0.95 in the time of high, and emissivity is that 0.06(AERD method emissivity or hemisphere are 0.09 to emissivity), can be in a vacuum 400 ℃～toast under 500 ℃.
According to diagram, of the present invention theing contents are as follows: Fig. 1 is the overall structure of vacuum heat collection pipe, present embodiment constitutes double-deck concentric enclosure space 4 by outer glass pipe 1 and inner glass tube 3, the openend of interior outer glass pipe is welded together, enclosure space is pumped into high vacuum, before interior outer glass pipe sealing-in, at the outer surface sputtering sedimentation coating for selective absorption 2 of inner glass tube, 5 is standoff getter, is used for absorbing the various active gases of heat-collecting pipe vacuum space generation (as H
2, CO etc.).
Fig. 2 is the structure of present embodiment coating, and wherein 6 is glass basis of interior glass 3, the 7th, and aluminum metal bottom, thickness are 0.2 * 10
-3Mm, the 8th, aluminium nitrogen absorbing film, thickness are 0.09 * 10
-3Mm, the 9th, amorphous state carbon antireflective coating, thickness are 0.07 * 10
-3Mm, present embodiment absorptivity α=0.94, emissivity=0.06.
Marginal data
Fig. 1, the all-glass vacuum thermal-collecting tube structure chart
1, outer glass pipe; 2, coating for selective absorption
3, inner glass tube; 4, enclosure space
5, standoff getter
Fig. 2, the coating for selective absorption structure chart
6, glass basis; 7, aluminum metal film
8, aluminium nitrogen absorbing film; 9, amorphous carbon antireflective coating
Claims (5)
1, a kind of sputtered coating absorbing solar energy selectively that is used for vacuum heat collection pipe is characterized in that: adopt single aluminium negative electrode, deposition of aluminum film is a bottom on matrix, and deposition of aluminum nitrogen-carbon film is the top layer.
2, by the described sputtered coating absorbing solar energy selectively of claim 1, it is characterized in that bottom aluminium film is non-reactive sputter-deposition, top layer aluminium nitrogen-carbon film is a reactive sputter-deposition.
3, by the described sputtered coating absorbing solar energy selectively of claim 1, it is characterized in that the aluminium film thickness is not less than 0.1 * 10
-3Mm, infrared emittance is lower than 0.04.
4,, it is characterized in that aluminium nitrogen-carbon top layer is made up of aluminium nitrogen absorbing film and metal-free amorphous carbon antireflective coating of alternation by the described sputtered coating absorbing solar energy selectively of claim 1.
5, by the described sputtered coating absorbing solar energy selectively of claim 4, the aluminium nitrogen absorbing film that it is characterized in that alternation is in argon gas behind the non-reactive sputtering aluminium film, the nitrogen that reinjects, and increase gradually along with the increase of deposit thickness, then generate aluminium nitrogen absorbing film, thickness is 0.05 * 1.0
-3Mm.Stop nitrogen is used acetylene (or methane) gas instead then, continues sputter in argon gas, the metal-free amorphous carbon antireflective coating of the most surperficial generation then, and thickness is 0.03 * 10
-3Mm～0.2 * 1.0
-3Mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN94112593A CN1108749A (en) | 1994-11-03 | 1994-11-03 | Sputter selective-absorption coating for solar vacuum thermal arrest tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN94112593A CN1108749A (en) | 1994-11-03 | 1994-11-03 | Sputter selective-absorption coating for solar vacuum thermal arrest tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1108749A true CN1108749A (en) | 1995-09-20 |
Family
ID=5036265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN94112593A Pending CN1108749A (en) | 1994-11-03 | 1994-11-03 | Sputter selective-absorption coating for solar vacuum thermal arrest tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1108749A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101650091B (en) * | 2009-09-08 | 2010-12-29 | 山东桑乐太阳能有限公司 | Vacuum collector tube and manufacturing method thereof |
| CN103499149A (en) * | 2013-09-28 | 2014-01-08 | 无锡环特太阳能科技有限公司 | Novel separation membrane layer type vacuum tube of solar water heater |
| TWI500897B (en) * | 2012-12-10 | 2015-09-21 | Univ Nat Cheng Kung | Manufacturing method for heat collection element film |
| CN120252171A (en) * | 2025-06-05 | 2025-07-04 | 西安石油大学 | A planetary gear system solar thermal reactor for methane reforming reaction |
-
1994
- 1994-11-03 CN CN94112593A patent/CN1108749A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101650091B (en) * | 2009-09-08 | 2010-12-29 | 山东桑乐太阳能有限公司 | Vacuum collector tube and manufacturing method thereof |
| TWI500897B (en) * | 2012-12-10 | 2015-09-21 | Univ Nat Cheng Kung | Manufacturing method for heat collection element film |
| CN103499149A (en) * | 2013-09-28 | 2014-01-08 | 无锡环特太阳能科技有限公司 | Novel separation membrane layer type vacuum tube of solar water heater |
| CN103499149B (en) * | 2013-09-28 | 2017-01-25 | 无锡环特太阳能科技有限公司 | Separation membrane layer type vacuum tube of solar water heater |
| CN120252171A (en) * | 2025-06-05 | 2025-07-04 | 西安石油大学 | A planetary gear system solar thermal reactor for methane reforming reaction |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C01 | Deemed withdrawal of patent application (patent law 1993) | ||
| WD01 | Invention patent application deemed withdrawn after publication |