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CN1077018A - Sputtered selective absorption coating for solar energy vacuum tube - Google Patents

Sputtered selective absorption coating for solar energy vacuum tube Download PDF

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Publication number
CN1077018A
CN1077018A CN 93110184 CN93110184A CN1077018A CN 1077018 A CN1077018 A CN 1077018A CN 93110184 CN93110184 CN 93110184 CN 93110184 A CN93110184 A CN 93110184A CN 1077018 A CN1077018 A CN 1077018A
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CN
China
Prior art keywords
aluminium
sputtering
coating
solar energy
film
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Pending
Application number
CN 93110184
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Chinese (zh)
Inventor
战余英
王德荣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TAIYANG SOLAR ENERGY CO Ltd SHENYANG CITY
Original Assignee
TAIYANG SOLAR ENERGY CO Ltd SHENYANG CITY
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Application filed by TAIYANG SOLAR ENERGY CO Ltd SHENYANG CITY filed Critical TAIYANG SOLAR ENERGY CO Ltd SHENYANG CITY
Priority to CN 93110184 priority Critical patent/CN1077018A/en
Publication of CN1077018A publication Critical patent/CN1077018A/en
Pending legal-status Critical Current

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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/40Solar thermal energy, e.g. solar towers

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Abstract

The present invention relates to the heat absorbing coating that utilizes solar energy, promptly be used for the solar selectively absorbing coating of vacuum heat collection pipe.It is characterized in that: the absorbed layer in the coating is aluminium-carbon film, and the top layer is the aluminium-nitrogen paper tinsel of homogeneous.Its advantage is: (1) sputtering technology only needs single negative electrode, and sputter equipment is simple, and the sputtering yield height is saved material.(2) can adopt active high acetylene gas in sputtering technology, pressure and sputtering voltage all change not quite in the vacuum chamber, and technological parameter is simple, and control easily.

Description

Sputtered selective absorption coating for solar energy vacuum tube
The present invention relates to a kind of heat absorbing coating that utilizes solar energy, promptly be used for the solar selectively absorbing coating of vacuum heat collection pipe.
Vacuum heat collection pipe is a structure of efficiently utilizing solar energy, is industry and domestic heating, extracts the surface water, the key element of generating, air-conditioning and refrigeration.Wherein importantly deposit coating for selective absorption at the inner tube outer surface of thermal-collecting tube.This coating is made up of bottom and two basic layers of absorbed layer, its bottom is to be made of the metal material with high infrared reflectivity, absorbed layer is that the thin-film material by and strong absorption solar spectrum transparent at infrared band constitutes, promptly form by two basic layers of absorption-reflection, the transformation of the resonance spectrum by metal and fine particle, generation is to the absorption of visible light, and then is converted to heat energy.
This coating can be with electroplating or the evaporation acquisition, and most typical is to utilize sputtering method, the copper/stainless steel that is coated with-carbon selectivity absorber coatings (United States Patent (USP) NO4.339.484), its α=0.92, ε=0.05(100 ℃).But sputter is coated with copper/stainless steel-carbon coating following problem is arranged: the one, sputter equipment needs two negative electrodes, be copper and stainless steel cathode, two negative electrodes need to carry out respectively sputter in argon gas, wherein stainless steel cathode needs sputter twice a plated film cycle, supplies with acetylene gas and carry out reactive sputtering when second time sputter.In order to prevent that two negative electrodes from polluting mutually during sputter respectively, then install baffle plate betwixt, so just make the structure and the electrical apparatus control system complexity of sputter equipment, the baffle plate between the negative electrode can be tackled considerable sputter again simultaneously, therefore waste material, prolonged the plated film cycle.
Another coating is the aluminium/metal-nitrogen selectivity absorber coatings of sputter, this coating is containing the condition of nitrogen gas deposit, its grading structure requires the nitrogen amount of input to increase gradually, but because the nitrogen activity is low, with the metallic cathode reactive sputtering time, along with the increase of input nitrogen amount, pressure in the vacuum chamber also increases, sputtering voltage has bigger variation, therefore can not control under metastable process conditions, and quality assurance is difficulty relatively.
The purpose of this invention is to provide the coating for selective absorption of a kind of aluminium/aluminium-carbon film for the basis, its sputtering technology only needs the aluminium negative electrode, has simplified sputter equipment, and it can also adopt active high gas, makes technological parameter simple, and control easily.
The object of the present invention is achieved like this: it is with single aluminium negative electrode (cylindrical target or flat target), and the aluminium film of sputter high reflectance is made bottom in pure argon, and thickness is greater than 0.1 * 10 -3Mm adds reactive sputtering in active high acetylene (or methane) air-flow then in argon gas, generate aluminium-carbon film and make absorbed layer, and thickness is 0.05 * 10 -3-0.3 * 10 -3Mm, this absorbed layer begins increase along with thickness from the bottom layer of aluminum upper surface, and carbon increases gradually to the ratio of aluminium atomicity, so that be the carbon of insulation fully on the absorbed layer surface.For improving its combination property, on absorbed layer, add the aluminium-nitrogen film of one deck homogeneous again, as the top layer, thickness is 0.01 * 10 -3-0.1 * 10 -3Mm.Aluminium-nitrogen film is to obtain under single atmospheric condition.
Solar absorptance α of the present invention=0.92-0.95, ε=0.05-0.07(80 ℃).
The present invention and United States Patent (USP) NO4,339,484 coatings that provide are compared, its sputtering technology only needs single negative electrode, thus have its sputter equipment and technology simple, the sputtering yield height is saved advantages such as material; Compare with metal-nitrogen coating, in sputtering technology, can adopt active high gas, as acetylene or methane, though therefore this gas flow increases gradually in reaction, pressure does not change in the vacuum chamber, and sputtering voltage also changes not quite, technological parameter is simple, easily control.In a word, one aspect of the present invention has the characteristics of the atmosphere easy control of process conditions of copper/metal-carbon compound coat, has the advantage that single cathode sputtering device is simple in structure, sputtering yield is high on the other hand again.
Further specify the present invention below in conjunction with accompanying drawing.
Fig. 1 is the front view of glass heat-collecting vacuum tube.
Fig. 2 is the cutaway view of Fig. 1 along A-A.
Matrix can be a glass tube, also can be metal tube or the metal tube that contains metal fin, and the matrix of present embodiment is a glass tube 3, i.e. glass heat-collecting vacuum tube, and the sputter pure aluminium film is made bottom 5 in pure argon, and its thickness is 0.2 * 10 -3Mm adds reactive sputtering in the acetylene air-flow then in argon gas, generate aluminium-carbon film and make absorbed layer 6, and thickness is 0.1 * 10 -3Mm, this absorbed layer begins increase along with thickness from the bottom layer of aluminum upper surface, and carbon increases gradually to the ratio of aluminium atomicity, so that be the carbon of insulation fully on the absorbed layer surface.For improving absorptivity and heat endurance, on absorbed layer, add the aluminium-nitrogen film of one deck homogeneous again, as top layer 7, thickness is 0.05 * 10 -3Mm.After measured, the absorptivity α of present embodiment=0.94, emissivity=0.06(80 ℃).
Referring to Fig. 1, the 1st, outer glass pipe, the 2nd, coating, the 3rd, inner glass tube, the 4th, vacuum.

Claims (4)

1, a kind of solar selectively absorbing coating that is used for vacuum heat collection pipe, it is made up of bottom, absorbed layer and top layer, and wherein bottom is the aluminium film, and feature of the present invention is: described absorbed layer is aluminium-carbon film, and the top layer is the aluminium-nitrogen film of homogeneous.
2, absorber coatings according to claim 1 is characterized in that: bottom is that the thickness of aluminium film is greater than 0.1 * 10 -3Mm, infrared emittance is lower than 0.04.
3, absorber coatings according to claim 1 is characterized in that: absorbed layer is that the thickness of aluminium-carbon film is 0.05 * 10 -3-0.3 * 10 -3Mm.
4, absorber coatings according to claim 1 is characterized in that: the top layer is that aluminium-nitrogen film is a homosphere, and thickness is 0.01 * 10 -3-0.1 * 10 -3Mm.
CN 93110184 1993-03-19 1993-03-19 Sputtered selective absorption coating for solar energy vacuum tube Pending CN1077018A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 93110184 CN1077018A (en) 1993-03-19 1993-03-19 Sputtered selective absorption coating for solar energy vacuum tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 93110184 CN1077018A (en) 1993-03-19 1993-03-19 Sputtered selective absorption coating for solar energy vacuum tube

Publications (1)

Publication Number Publication Date
CN1077018A true CN1077018A (en) 1993-10-06

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN 93110184 Pending CN1077018A (en) 1993-03-19 1993-03-19 Sputtered selective absorption coating for solar energy vacuum tube

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CN (1) CN1077018A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102362130A (en) * 2009-04-16 2012-02-22 三鹰光器株式会社 solar concentrating system
CN101793437B (en) * 2009-12-31 2012-05-23 沈阳百乐真空技术有限公司 Multipurpose solar spectrum selective absorption coating and preparation method thereof
CN108917210A (en) * 2018-04-28 2018-11-30 陕西科技大学 A kind of nano combined photothermal conversion coating of auto-dope and preparation method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102362130A (en) * 2009-04-16 2012-02-22 三鹰光器株式会社 solar concentrating system
CN101793437B (en) * 2009-12-31 2012-05-23 沈阳百乐真空技术有限公司 Multipurpose solar spectrum selective absorption coating and preparation method thereof
CN108917210A (en) * 2018-04-28 2018-11-30 陕西科技大学 A kind of nano combined photothermal conversion coating of auto-dope and preparation method thereof

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C01 Deemed withdrawal of patent application (patent law 1993)
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