CN110566814A - Pipeline valve box and groove type wet processing equipment - Google Patents
Pipeline valve box and groove type wet processing equipment Download PDFInfo
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- CN110566814A CN110566814A CN201910910635.8A CN201910910635A CN110566814A CN 110566814 A CN110566814 A CN 110566814A CN 201910910635 A CN201910910635 A CN 201910910635A CN 110566814 A CN110566814 A CN 110566814A
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- 238000012545 processing Methods 0.000 title claims abstract description 33
- 239000007788 liquid Substances 0.000 claims abstract description 73
- 239000003814 drug Substances 0.000 claims description 27
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 18
- 238000001514 detection method Methods 0.000 claims description 17
- 238000004140 cleaning Methods 0.000 claims description 14
- 229940079593 drug Drugs 0.000 claims description 5
- 238000012423 maintenance Methods 0.000 abstract description 19
- 238000004519 manufacturing process Methods 0.000 abstract description 14
- 238000004806 packaging method and process Methods 0.000 abstract 1
- 239000000126 substance Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 230000008439 repair process Effects 0.000 description 5
- 239000002585 base Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000012546 transfer Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005554 pickling Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000000739 chaotic effect Effects 0.000 description 1
- 239000013043 chemical agent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012377 drug delivery Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/08—Pipe-line systems for liquids or viscous products
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D3/00—Arrangements for supervising or controlling working operations
- F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
- F17D5/02—Preventing, monitoring, or locating loss
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/121—The active layers comprising only Group IV materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Public Health (AREA)
- Water Supply & Treatment (AREA)
- Valve Housings (AREA)
Abstract
Description
技术领域technical field
本发明涉及药剂供给领域,具体而言,涉及一种管道阀箱及一种槽式湿法处理设备。The invention relates to the field of medicament supply, in particular to a pipeline valve box and a trough-type wet processing equipment.
背景技术Background technique
在化工、机械设备制造、矿产资源利用等领域中,在加工工艺中通常需要进行药剂供给,但是传统的药剂供给中纯水管路与药剂管路设置在一起,控制纯水管路与药剂管路的阀门设置分散,管理不便。例如在太阳能硅片的槽式清洗设备和槽式湿法处理设备中,需要对各个工艺槽输送药液,通过管道将外围药液接至药液槽,但目前药液管路和纯水管路混合在一起,且药液管路为开放式,药液阀分布分散,出现漏液情况时,需要逐一关闭分散在工艺中的药液阀,操作不便;不能及时关闭管道,漏液现象不能及时终止,导致检修速度慢影响生产的顺利进行;漏液量较多污染环境且造成药剂的浪费,甚至有毒有害药剂容易对操作人员造成伤害。In the fields of chemical industry, mechanical equipment manufacturing, mineral resources utilization, etc., chemical supply is usually required in the processing technology, but in the traditional chemical supply, the pure water pipeline and the chemical pipeline are set together, and the pure water pipeline and the chemical pipeline are controlled. The valve setting of the road is scattered, which is inconvenient to manage. For example, in the tank-type cleaning equipment and tank-type wet processing equipment of solar silicon wafers, it is necessary to transport the chemical solution to each process tank, and connect the peripheral chemical solution to the chemical solution tank through the pipeline, but the current chemical solution pipeline and pure water pipe The liquid medicine pipelines are mixed together, and the liquid medicine pipelines are open, and the liquid medicine valves are scattered. When leakage occurs, the liquid medicine valves scattered in the process need to be closed one by one, which is inconvenient to operate; if the pipeline cannot be closed in time, the leakage phenomenon cannot be solved. Timely termination will lead to slow maintenance and affect the smooth progress of production; more leakage will pollute the environment and cause waste of chemicals, and even toxic and harmful chemicals will easily cause harm to operators.
发明内容Contents of the invention
本发明旨在至少解决现有技术中存在的技术问题之一。The present invention aims to solve at least one of the technical problems existing in the prior art.
为此,本发明第一方面提供了一种管道阀箱。Therefore, the first aspect of the present invention provides a pipeline valve box.
本发明第二方面提供了一种槽式湿法处理设备。The second aspect of the present invention provides a tank type wet processing equipment.
有鉴于此,根据本发明的第一个方面,提供了一种管道阀箱,包括:管道,管道包括至少一个供给管道,每个供给管道连通于至少一个分支管道;手动阀,设置在供给管道上;气动阀,设置在分支管道上;箱体,罩设在供给管道及分支管道上,手动阀及气动阀处于箱体内。In view of this, according to the first aspect of the present invention, a pipeline valve box is provided, including: a pipeline, the pipeline includes at least one supply pipeline, and each supply pipeline is connected to at least one branch pipeline; a manual valve is arranged on the supply pipeline Above; the pneumatic valve is set on the branch pipeline; the box is covered on the supply pipeline and the branch pipeline, and the manual valve and the pneumatic valve are in the box.
本发明通过管道、手动阀、气动阀及箱体的设置,将供给管道及分支管道设置在箱体内,手动阀设置在供给管道上,气动阀设置在分支管道上,将控制供给管路与分支管路开启的手动阀及气动阀进行统一封装管理,当出现漏液现象时便于及时关闭供给管道及分支管道,进行维修,降低漏液造成的危害。进一步地,通过手动阀的设置,当分支管道或供给管道出现漏液时,通过关闭供给管道上的手动阀可直接关闭连通于该供给管道的所有分支管道,进一步提高管道关闭的速度,防止漏液的持续进行,降低漏液危害,便于及时维修便于生产加工的顺利进行。The present invention arranges the supply pipeline and the branch pipeline in the box through the pipeline, the manual valve, the pneumatic valve and the box body, the manual valve is set on the supply pipeline, the pneumatic valve is set on the branch pipeline, and the control supply pipeline and branch pipeline The manual valves and pneumatic valves that are opened by the pipelines are packaged and managed in a unified way. When there is a leakage, it is convenient to close the supply pipeline and branch pipelines in time for maintenance and reduce the damage caused by the leakage. Further, through the setting of the manual valve, when there is leakage in the branch pipeline or the supply pipeline, all the branch pipelines connected to the supply pipeline can be directly closed by closing the manual valve on the supply pipeline, further improving the speed of pipeline closing and preventing leakage. Continuous operation of liquid, reducing the hazard of liquid leakage, convenient for timely maintenance and smooth production and processing.
再进一步地,设置在箱体内的供给管道可全部用于供给药剂,纯水供给管道设置在箱体外侧,实现将工艺中药剂供给与水路供给隔离设置,当位于箱体内的供给管道或分支管道出现漏液时,操作人员可直接判断漏液为药剂,降低操作人员在不清楚漏液种类的情况下贸然去处理漏液被酸碱药液溅到的风险,使供给管道及分支管道的维护与维修更为安全。Furthermore, all the supply pipes arranged in the box can be used for supplying chemicals, and the pure water supply pipes are arranged on the outside of the box to realize the isolation of the supply of chemicals in the process from the water supply. When the supply pipes or branch pipes located in the box When a liquid leak occurs, the operator can directly judge that the leaked liquid is a drug, reducing the risk of the operator rushing to deal with the leaked liquid and being splashed by the acid-base liquid without knowing the type of the leaked liquid, and making the maintenance of the supply pipeline and branch pipelines easier. Safer with maintenance.
另外,根据本发明提供的上述技术方案中的管道阀箱,还可以具有如下附加技术特征:In addition, according to the pipeline valve box in the above technical solution provided by the present invention, it can also have the following additional technical features:
在上述技术方案中,进一步地,管道阀箱还包括:漏液检测开关,设置在分支管道、供给管道及箱体中的至少一处。In the above technical solution, further, the pipeline valve box further includes: a liquid leakage detection switch disposed on at least one of the branch pipeline, the supply pipeline and the box body.
在该技术方案中,由于生产工艺中漏液具有偶发性,因此通常不会设置专职人员观测管道是否有漏液现象发生,往往会导致漏液不能被技术发现。该技术方案中漏液检测开关可以设置在分支管道及供给管道的管道壁上,也可以设置在箱体的侧壁或底板上,当管道出现漏液时,能够及时被漏液检测开关获知,提醒作业人员及时处理,进一步提高发现漏液的速度,能够尽快对漏液现象进行终止。In this technical solution, due to the sporadic nature of liquid leakage in the production process, full-time personnel are usually not set up to observe whether there is liquid leakage in the pipeline, which often leads to the fact that the liquid leakage cannot be discovered by technology. In this technical solution, the liquid leakage detection switch can be arranged on the pipe wall of the branch pipe and the supply pipe, or on the side wall or bottom plate of the box body. When liquid leakage occurs in the pipe, it can be known by the liquid leakage detection switch in time. Remind the operators to deal with it in time, further increase the speed of finding the leakage, and terminate the leakage as soon as possible.
在上述任一技术方案中,进一步地,管道阀箱还包括:控制器,连接于漏液检测开关;报警器,连接于控制器。In any of the above technical solutions, further, the pipeline valve box further includes: a controller connected to the liquid leakage detection switch; and an alarm connected to the controller.
在该技术方案中,通过控制器及报警器的设置,控制器获知漏液检测开关检测到漏液现象时,控制报警器报警,通过报警器报警的方式提醒作业人员及时对漏液管道进行维修,进一步漏液管道维修速度,防止漏液的持续进行,降低漏液危害,便于及时维修便于生产加工的顺利进行。In this technical scheme, through the setting of the controller and the alarm, the controller will control the alarm to alarm when the liquid leakage detection switch detects the liquid leakage, and remind the operator to repair the leakage pipeline in time through the alarm. , further speed up the maintenance of leaking pipelines, prevent the continuation of leaking, reduce the hazards of leaking, facilitate timely maintenance and facilitate the smooth progress of production and processing.
在上述任一技术方案中,进一步地,箱体包括:箱体本体;顶板,铰接在箱体本体顶部,分支管道通过箱体本体与顶板之间的缝隙伸出箱体本体;底板,连接于箱体本体,位于箱体本体底部;管道固定板,供给管道及分支管道通过管道固定板固定在箱体本体的内壁上;观察窗,设置在箱体本体上。In any of the above technical solutions, further, the box body includes: a box body; a top plate hinged on the top of the box body body, and branch pipes protrude from the box body body through the gap between the box body body and the top plate; a bottom plate connected to The box body is located at the bottom of the box body; the pipeline fixing plate, the supply pipeline and the branch pipeline are fixed on the inner wall of the box body through the pipeline fixing plate; the observation window is arranged on the box body.
在该技术方案中,箱体包括箱体本体、顶板及底板,当管道发生漏液时会滴落在箱体内,能够防止漏液外溢;分支管道通过箱体本体与顶板之间的缝隙伸出箱体本体,分支管道采用经由箱体顶部伸出的方式,当分支管道发生漏液时仍会滴落在箱体内同样能够防止漏液外溢,避免漏液对人或环境产生危害;通过观察窗的设置,便于观察箱体内管道、手动阀及气动阀的工作状态,如若出现问题可以及时发现。In this technical solution, the box body includes the box body, the top plate and the bottom plate. When the pipeline leaks, it will drip into the box body, which can prevent the leakage liquid from overflowing; the branch pipeline protrudes through the gap between the box body and the top plate. The main body of the box and the branch pipes protrude through the top of the box. When the branch pipe leaks, it will still drip into the box, which can also prevent the leakage from overflowing and avoid the leakage from causing harm to people or the environment; through the observation window The setting is convenient for observing the working status of the pipes, manual valves and pneumatic valves in the box, and if there is a problem, it can be found in time.
在上述任一技术方案中,进一步地,管道阀箱还包括:转接口,设置在供给管道的入口端及分支管道的出口端。In any of the above technical solutions, further, the pipeline valve box further includes: an adapter provided at the inlet end of the supply pipeline and the outlet end of the branch pipeline.
在该技术方案中,漏液通常会发生在管道的转接处或阀门处,在供给管道的入口端及分支管道的出口端设置转接口,转接口同样位于箱体内,将药液供给过程中容易发送漏液的转接处及阀门都设置在箱体内,对易漏点进行统一封装,统一管理,当漏液发生时提高漏液管道维修速度,便于及时维修便于生产加工的顺利进行。In this technical solution, the liquid leakage usually occurs at the transition of the pipeline or at the valve, and a transition interface is provided at the inlet end of the supply pipeline and the outlet end of the branch pipeline. The transfer points and valves that are easy to send and leak are set in the box, and the easy-to-leak points are uniformly packaged and managed in a unified manner. When the leakage occurs, the maintenance speed of the leakage pipeline is improved, which is convenient for timely maintenance and smooth production and processing.
在上述任一技术方案中,进一步地,管道阀箱还包括:药剂种类标签,药剂种类标签设置在分支管道和/或箱体的内壁上。In any of the above technical solutions, further, the pipeline valve box further includes: a drug type label, which is arranged on the branch pipeline and/or the inner wall of the box body.
在该技术方案中,通过药剂种类标签的设置,当发生漏液时能够尽快发现漏液的种类,一方面,作业人员可以穿戴相应的防护用具防止药剂对人体造成危害,另一方面,可以针对漏液种类向箱体内投放相应的化学物质对漏液进行无害化处理,降低漏液造成的危害。In this technical solution, through the setting of the chemical type label, the type of liquid leakage can be found as soon as possible when a liquid leakage occurs. On the one hand, the operator can wear corresponding protective equipment to prevent the chemical agent from harming the human body. Types of leaking liquid Putting corresponding chemical substances into the tank for harmless treatment of the leaking liquid, reducing the harm caused by the leaking liquid.
在上述任一技术方案中,进一步地,管道阀箱还包括:水路供给管道,设置在箱体外侧;其中,供给管道及分支管道为药剂供给管路。In any of the above technical solutions, further, the pipeline valve box further includes: a water supply pipeline arranged outside the box body; wherein, the supply pipeline and the branch pipeline are drug supply pipelines.
在该技术方案中,通过水路管道的设置为生产工艺中输送纯水,设置在箱体外侧与药剂供给管路分离设置,当位于箱体内的供给管道或分支管道出现漏液时,操作人员可直接判断漏液为药剂,降低操作人员在不清楚漏液种类的情况下贸然去处理漏液被酸碱药液溅到的风险,使供给管道及分支管道的维护与维修更为安全。In this technical solution, the pure water is transported in the production process through the setting of the water pipeline, which is set outside the box body and separated from the pharmaceutical supply pipeline. When the supply pipeline or branch pipeline in the box leaks, the operator can Directly judge that the leaked liquid is a chemical, reduce the risk of the operator rushing to deal with the leaked liquid being splashed by the acid-base liquid without knowing the type of the leaked liquid, and make the maintenance and repair of the supply pipeline and branch pipelines safer.
根据本发明的第二方面,还提出了一种槽式湿法处理设备,包括:According to the second aspect of the present invention, a kind of tank type wet processing equipment is also proposed, comprising:
上述任一技术方案提出的管道阀箱。The pipeline valve box proposed by any one of the above technical solutions.
本发明第二方面提供的槽式湿法处理设备,因包括如上述任一技术方案提出的管道阀箱,因此具有管道阀箱的全部有益效果。The trough-type wet processing equipment provided by the second aspect of the present invention has all the beneficial effects of the pipeline valve box because it includes the pipeline valve box proposed by any of the above technical solutions.
另外,根据本发明提供的上述技术方案中的槽式湿法处理设备,还可以具有如下附加技术特征:In addition, according to the tank-type wet processing equipment in the above technical solution provided by the present invention, it can also have the following additional technical features:
在上述技术方案中,进一步地,槽式湿法处理设备还包括:处理槽,管道阀箱设置在处理槽的一侧,管道阀箱的分支管道连通至处理槽。In the above technical solution, further, the tank-type wet treatment equipment further includes: a treatment tank, a pipeline valve box is arranged on one side of the treatment tank, and a branch pipeline of the pipeline valve box is connected to the treatment tank.
在该技术方案中,通过分支管道向处理槽内输送药剂,通过处理槽对工件进行处理。In this technical solution, the medicine is delivered into the processing tank through the branch pipeline, and the workpiece is processed through the processing tank.
具体地,处理槽可以为任何能够对供给进行湿法处理的槽体,例如酸洗槽、水洗槽、碱洗槽、湿法镀膜槽等。Specifically, the treatment tank may be any tank capable of performing wet treatment on the supply, such as an acid pickling tank, a water washing tank, an alkali cleaning tank, a wet coating tank, and the like.
在上述任一技术方案中,进一步地,处理槽为多个,多个处理槽中的至少一个为清洗槽。In any of the above technical solutions, further, there are multiple treatment tanks, and at least one of the multiple treatment tanks is a cleaning tank.
在该技术方案中,通过清洗槽的设置对工件进行清洗,通过分支管道向清洗槽供给清洗液。In this technical solution, the workpiece is cleaned through the setting of the cleaning tank, and the cleaning liquid is supplied to the cleaning tank through the branch pipeline.
本发明的附加方面和优点将在下面的描述部分中变得明显,或通过本发明的实践了解到。Additional aspects and advantages of the invention will become apparent in the description which follows, or may be learned by practice of the invention.
附图说明Description of drawings
本发明的上述和/或附加的方面和优点从结合下面附图对实施例的描述中将变得明显和容易理解,其中:The above and/or additional aspects and advantages of the present invention will become apparent and comprehensible from the description of the embodiments in conjunction with the following drawings, wherein:
图1是本发明一个实施例的管道阀箱的内部结构示意图;Fig. 1 is a schematic diagram of the internal structure of a pipeline valve box according to an embodiment of the present invention;
图2为图1所示实施例的管道阀箱内部结构的侧视图;Fig. 2 is a side view of the internal structure of the pipeline valve box of the embodiment shown in Fig. 1;
图3为图1所示实施例的管道阀箱内部结构的俯视图;Fig. 3 is the plan view of the internal structure of the pipeline valve box of the embodiment shown in Fig. 1;
图4为图1所示实施例的管道阀箱内部结构的立体图;Fig. 4 is a perspective view of the internal structure of the pipeline valve box of the embodiment shown in Fig. 1;
图5是本发明一个实施例的槽式湿法处理设备的结构示意图;Fig. 5 is a schematic structural view of a tank-type wet processing device according to an embodiment of the present invention;
图6为图5所示实施例的槽式湿法处理设备的主视图;Fig. 6 is the front view of the tank type wet processing equipment of the embodiment shown in Fig. 5;
图7是本发明另一个实施例的槽式湿法处理设备的结构示意图。Fig. 7 is a schematic structural view of a tank-type wet processing device according to another embodiment of the present invention.
其中,图1至图7中附图标记与部件名称之间的对应关系为:Wherein, the corresponding relationship between reference numerals and component names in Fig. 1 to Fig. 7 is:
2供给管道,4分支管道,6手动阀,8气动阀,10箱体,12箱体本体, 14顶板,16底板,18观察窗,20转接口,22药剂种类标签,24管道固定板, 26支架,28处理槽。2 supply pipes, 4 branch pipes, 6 manual valves, 8 pneumatic valves, 10 box body, 12 box body, 14 top plate, 16 bottom plate, 18 observation window, 20 transfer port, 22 drug type label, 24 pipe fixing plate, 26 Stand, 28 processing slots.
具体实施方式Detailed ways
为了能够更清楚地理解本发明的上述目的、特征和优点,下面结合附图和具体实施方式对本发明进行进一步的详细描述。需要说明的是,在不冲突的情况下,本申请的实施例及实施例中的特征可以相互组合。In order to understand the above-mentioned purpose, features and advantages of the present invention more clearly, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that, in the case of no conflict, the embodiments of the present application and the features in the embodiments can be combined with each other.
在下面的描述中阐述了很多具体细节以便于充分理解本发明,但是,本发明还可以采用其他不同于在此描述的方式来实施,因此,本发明的保护范围并不受下面公开的具体实施例的限制。In the following description, many specific details are set forth in order to fully understand the present invention. However, the present invention can also be implemented in other ways than described here. Therefore, the protection scope of the present invention is not limited by the specific implementation disclosed below. Example limitations.
下面参照图1至图7来描述根据本发明一些实施例提供的管道阀箱及槽式湿法处理设备。The pipeline valve box and tank type wet processing equipment provided according to some embodiments of the present invention are described below with reference to FIGS. 1 to 7 .
实施例一Embodiment one
如图1至图4所示,本发明的第一个实施例提供了一种管道阀箱包括:管道、手动阀6、气动阀8及箱体10。As shown in FIGS. 1 to 4 , the first embodiment of the present invention provides a pipeline valve box including: a pipeline, a manual valve 6 , a pneumatic valve 8 and a box body 10 .
其中,管道包括至少一个供给管道2,每个供给管道2连通于至少一个分支管道4;手动阀6设置在供给管道2上;气动阀8设置在分支管道4上;箱体10罩设在供给管道2及分支管道4上,手动阀6及气动阀8处于箱体10 内。Wherein, the pipeline includes at least one supply pipeline 2, and each supply pipeline 2 communicates with at least one branch pipeline 4; the manual valve 6 is arranged on the supply pipeline 2; the pneumatic valve 8 is arranged on the branch pipeline 4; On the pipeline 2 and the branch pipeline 4 , the manual valve 6 and the pneumatic valve 8 are located in the box body 10 .
本发明通过管道、手动阀6、气动阀8及箱体10的设置,将供给管道2 及分支管道4设置在箱体10内,手动阀6设置在供给管道2上,气动阀8设置在分支管道4上,将控制供给管路与分支管路开启的手动阀6及气动阀8 进行统一封装管理,当出现漏液现象时便于及时关闭供给管道2及分支管道4 进行维修,降低漏液造成的危害。进一步地,通过手动阀6的设置,当分支管道4或供给管道2出现漏液时,通过关闭供给管道2上的手动阀6可直接关闭连通于该供给管道2的所有分支管道4,进一步提高管道关闭的速度,防止漏液的持续进行,降低漏液危害,便于及时维修便于生产加工的顺利进行。The present invention arranges the supply pipeline 2 and the branch pipeline 4 in the box body 10 through the arrangement of the pipeline, the manual valve 6, the pneumatic valve 8 and the box body 10, the manual valve 6 is arranged on the supply pipeline 2, and the pneumatic valve 8 is arranged on the branch pipeline. On the pipeline 4, the manual valve 6 and the pneumatic valve 8 that control the opening of the supply pipeline and the branch pipeline are packaged and managed in a unified way. When there is a liquid leakage, it is convenient to close the supply pipeline 2 and the branch pipeline 4 in time for maintenance, and reduce the leakage caused by leakage. hazards. Further, through the setting of the manual valve 6, when the branch pipeline 4 or the supply pipeline 2 leaks, all the branch pipelines 4 connected to the supply pipeline 2 can be directly closed by closing the manual valve 6 on the supply pipeline 2, further improving The speed of pipeline closing prevents the continuous leakage of liquid, reduces the hazard of liquid leakage, facilitates timely maintenance and facilitates smooth production and processing.
具体地,设置在箱体10内的供给管道2全部用于供给药剂,纯水供给管道设置在箱体10外侧,实现将工艺中药剂供给与水路供给隔离设置,当位于箱体10内的供给管道2或分支管道4出现漏液时,操作人员可直接判断漏液为药剂,降低操作人员在不清楚漏液种类的情况下贸然去处理漏液被酸碱药液溅到的风险,使供给管道2及分支管道4的维护与维修更为安全。Specifically, the supply pipelines 2 arranged in the box body 10 are all used for supplying chemicals, and the pure water supply pipelines are arranged outside the box body 10, so as to realize the separation of the medicine supply and the waterway supply in the process. When there is leakage in pipeline 2 or branch pipeline 4, the operator can directly judge that the leakage is medicine, which reduces the risk of the operator rushing to deal with the leakage without knowing the type of the leakage and being splashed by the acid-base liquid, so that the supply The maintenance and repair of the pipeline 2 and the branch pipeline 4 are safer.
实施例二Embodiment two
如图1至图4所示,本发明的第一个实施例提供了一种管道阀箱包括:管道、手动阀6、气动阀8及箱体10。As shown in FIGS. 1 to 4 , the first embodiment of the present invention provides a pipeline valve box including: a pipeline, a manual valve 6 , a pneumatic valve 8 and a box body 10 .
其中,管道包括至少一个供给管道2,每个供给管道2连通于至少一个分支管道4;手动阀6设置在供给管道2上;气动阀8设置在分支管道4上;箱体10罩设在供给管道2及分支管道4上,手动阀6及气动阀8处于箱体10 内。Wherein, the pipeline includes at least one supply pipeline 2, and each supply pipeline 2 communicates with at least one branch pipeline 4; the manual valve 6 is arranged on the supply pipeline 2; the pneumatic valve 8 is arranged on the branch pipeline 4; On the pipeline 2 and the branch pipeline 4 , the manual valve 6 and the pneumatic valve 8 are located in the box body 10 .
进一步地,管道阀箱还包括:漏液检测开关,设置在分支管道4、供给管道2及箱体10中的至少一处。Further, the pipeline valve box further includes: a liquid leakage detection switch, which is arranged on at least one of the branch pipeline 4 , the supply pipeline 2 and the box body 10 .
在该实施例中,由于生产工艺中漏液具有偶发性,因此通常不会设置专职人员观测管道是否有漏液现象发生,往往会导致漏液不能被技术发现。该技术方案中漏液检测开关可以设置在分支管道4及供给管道2的管道壁上,也可以设置在箱体10的侧壁或底板16上,当管道出现漏液时,能够及时被漏液检测开关获知,提醒作业人员及时处理,进一步提高发现漏液的速度,能够尽快对漏液现象进行终止。In this embodiment, due to the sporadic nature of liquid leakage in the production process, there are usually no full-time personnel to observe whether there is liquid leakage in the pipeline, which often leads to the fact that the liquid leakage cannot be discovered by technology. In this technical scheme, the liquid leakage detection switch can be arranged on the pipe wall of the branch pipe 4 and the supply pipe 2, or can be arranged on the side wall or the bottom plate 16 of the box body 10. When the pipe leaks, it can be detected in time. When the detection switch is informed, the operator is reminded to deal with it in time, and the speed of discovering the leakage is further improved, and the leakage phenomenon can be terminated as soon as possible.
进一步地,管道阀箱还包括:控制器,连接于漏液检测开关;报警器,连接于控制器。Further, the pipeline valve box further includes: a controller connected to the liquid leakage detection switch; an alarm connected to the controller.
在该实施例中,通过控制器及报警器的设置,控制器获知漏液检测开关检测到漏液现象时,控制报警器报警,通过报警器报警的方式提醒作业人员及时对漏液管道进行维修,进一步漏液管道维修速度,防止漏液的持续进行,降低漏液危害,便于及时维修便于生产加工的顺利进行。In this embodiment, through the setting of the controller and the alarm, when the controller learns that the liquid leakage detection switch detects a liquid leakage phenomenon, it controls the alarm to alarm, and reminds the operator to repair the leaking pipeline in time through the alarm. , to further speed up the maintenance of leaking pipelines, prevent the continuation of leaking, reduce the hazards of leaking, facilitate timely maintenance and facilitate smooth production and processing.
实施例三Embodiment three
如图1至图7所示,本发明的第一个实施例提供了一种管道阀箱包括:管道、手动阀6、气动阀8及箱体10。As shown in FIG. 1 to FIG. 7 , the first embodiment of the present invention provides a pipeline valve box including: pipeline, manual valve 6 , pneumatic valve 8 and box body 10 .
其中,管道包括至少一个供给管道2,每个供给管道2连通于至少一个分支管道4;手动阀6设置在供给管道2上;气动阀8设置在分支管道4上;箱体10罩设在供给管道2及分支管道4上,手动阀6及气动阀8处于箱体10 内。Wherein, the pipeline includes at least one supply pipeline 2, and each supply pipeline 2 communicates with at least one branch pipeline 4; the manual valve 6 is arranged on the supply pipeline 2; the pneumatic valve 8 is arranged on the branch pipeline 4; On the pipeline 2 and the branch pipeline 4 , the manual valve 6 and the pneumatic valve 8 are located in the box body 10 .
进一步地,如图5所示,箱体10包括:箱体本体12;顶板14,铰接在箱体本体12顶部,分支管道4通过箱体本体12与顶板14之间的缝隙伸出箱体本体12;底板16,连接于箱体本体12,位于箱体本体12底部;管道固定板24,供给管道2及分支管道4通过管道固定板24固定在箱体本体12的内壁上;观察窗18,设置在箱体本体12上。Further, as shown in FIG. 5 , the box 10 includes: a box body 12 ; a top plate 14 hinged on the top of the box body 12 , and the branch pipe 4 extends out of the box body through the gap between the box body 12 and the top plate 14 12; the bottom plate 16 is connected to the box body 12 and is located at the bottom of the box body 12; the pipeline fixing plate 24, the supply pipeline 2 and the branch pipeline 4 are fixed on the inner wall of the box body 12 through the pipeline fixing plate 24; the observation window 18, Set on the box body 12.
在该实施例中,箱体10包括箱体本体12、顶板14及底板16,当管道发生漏液时会滴落在箱体10内,能够防止漏液外溢;分支管道4通过箱体本体 12与顶板14之间的缝隙伸出箱体本体12,分支管道4采用经由箱体10顶部伸出的方式,当分支管道4发生漏液时仍会滴落在箱体10内同样能够防止漏液外溢,避免漏液对人或环境产生危害;通过观察窗18的设置,便于观察箱体10内管道、手动阀6及气动阀8的工作状态,如若出现问题可以及时发现。In this embodiment, the box body 10 includes a box body body 12, a top plate 14 and a bottom plate 16. When the pipeline leaks, it will drip into the box body 10, which can prevent the leakage liquid from overflowing; the branch pipeline 4 passes through the box body body 12 The gap between the top plate 14 extends out of the box body 12, and the branch pipe 4 protrudes through the top of the box body 10. When the branch pipe 4 leaks, it will still drip into the box body 10, which can also prevent leakage Spill, to avoid leakage to people or the environment; through the setting of the observation window 18, it is convenient to observe the working status of the pipeline in the box body 10, the manual valve 6 and the pneumatic valve 8, and if there is a problem, it can be found in time.
进一步地,管道阀箱还包括:转接口20,设置在供给管道2的入口端及分支管道4的出口端。Further, the pipeline valve box further includes: an adapter 20 arranged at the inlet end of the supply pipeline 2 and the outlet end of the branch pipeline 4 .
在该实施例中,漏液通常会发生在管道的转接处或阀门处,在供给管道2 的入口端及分支管道4的出口端设置转接口20,转接口20同样位于箱体10 内,将药液供给过程中容易发送漏液的转接处及阀门都设置在箱体10内,对易漏点进行统一封装,统一管理,当漏液发生时提高漏液管道维修速度,便于及时维修便于生产加工的顺利进行。In this embodiment, liquid leakage usually occurs at the junction of the pipeline or at the valve, and an adapter 20 is provided at the inlet end of the supply pipeline 2 and the outlet end of the branch pipeline 4, and the adapter 20 is also located in the box body 10. The transfer points and valves that are prone to leakage during the liquid medicine supply process are set in the box 10, and the leakage points are uniformly packaged and managed in a unified manner. When the leakage occurs, the maintenance speed of the leakage pipeline is improved to facilitate timely maintenance. Facilitate the smooth progress of production and processing.
进一步地,管道阀箱还包括:药剂种类标签22,药剂种类标签22设置在分支管道4和/或箱体10的内壁上。Further, the pipeline valve box further includes: a medicine type label 22 , which is arranged on the branch pipeline 4 and/or the inner wall of the box body 10 .
在该实施例中,通过药剂种类标签22的设置,当发生漏液时能够尽快发现漏液的种类,一方面,作业人员可以穿戴相应的防护用具防止药剂对人体造成危害,另一方面,可以针对漏液种类向箱体10内投放相应的化学物质对漏液进行无害化处理,降低漏液造成的危害。In this embodiment, through the setting of the medicine type label 22, when a liquid leakage occurs, the type of the liquid leakage can be found as soon as possible. On the one hand, the operator can wear corresponding protective equipment to prevent the medicine from causing harm to the human body; Corresponding chemical substances are put into the tank 10 according to the type of the leaked liquid to perform harmless treatment on the leaked liquid, so as to reduce the harm caused by the leaked liquid.
进一步地,管道阀箱还包括:水路供给管道,设置在箱体10外侧;其中,供给管道2及分支管道4为药剂供给管路。Further, the pipeline valve box also includes: a water supply pipeline, which is arranged outside the box body 10; wherein, the supply pipeline 2 and the branch pipeline 4 are medicine supply pipelines.
在该实施例中,通过水路管道的设置为生产工艺中输送纯水,设置在箱体 10外侧与药剂供给管路分离设置,当位于箱体10内的供给管道2或分支管道 4出现漏液时,操作人员可直接判断漏液为药剂,降低操作人员在不清楚漏液种类的情况下贸然去处理漏液被酸碱药液溅到的风险,使供给管道2及分支管道4的维护与维修更为安全。In this embodiment, pure water is transported in the production process through the setting of the water pipeline, which is installed outside the box body 10 and separated from the medicine supply pipeline. When the supply pipeline 2 or the branch pipeline 4 in the box body 10 leaks In this case, the operator can directly judge that the leaked liquid is medicine, reducing the risk of the operator rushing to deal with the leaked liquid being splashed by the acid-base liquid without knowing the type of the leaked liquid, so that the maintenance of the supply pipeline 2 and the branch pipeline 4 is closely related to Repairs are safer.
实施例四Embodiment four
如图1至图7所示,本发明的第一个实施例提供了一种槽式湿法处理设备,包括:As shown in Fig. 1 to Fig. 7, the first embodiment of the present invention provides a kind of tank type wet processing equipment, comprising:
上述任一实施例提出的管道阀箱。The pipeline valve box provided by any one of the above-mentioned embodiments.
本发明第二方面提供的槽式湿法处理设备,因包括如上述任一技术方案提出的管道阀箱,因此具有管道阀箱的全部有益效果。The trough-type wet processing equipment provided by the second aspect of the present invention has all the beneficial effects of the pipeline valve box because it includes the pipeline valve box proposed by any of the above technical solutions.
实施例五Embodiment five
如图1至图7所示,本发明的第一个实施例提供了一种槽式湿法处理设备,包括:As shown in Fig. 1 to Fig. 7, the first embodiment of the present invention provides a kind of tank type wet processing equipment, comprising:
上述任一实施例提出的管道阀箱。The pipeline valve box provided by any one of the above-mentioned embodiments.
进一步地,槽式湿法处理设备还包括:处理槽28,管道阀箱设置在处理槽28的一侧,管道阀箱的分支管道4连通至处理槽28。Further, the tank-type wet treatment equipment further includes: a treatment tank 28 , a pipeline valve box is arranged on one side of the treatment tank 28 , and the branch pipeline 4 of the pipeline valve box is connected to the treatment tank 28 .
在该实施例中,通过分支管道4向处理槽28内输送药剂,通过处理槽28 对工件进行处理。In this embodiment, the medicine is delivered into the treatment tank 28 through the branch pipe 4 , and the workpiece is treated through the treatment tank 28 .
具体地,处理槽28可以为任何能够对供给进行湿法处理的槽体,例如酸洗槽、水洗槽、碱洗槽、湿法镀膜槽等。Specifically, the treatment tank 28 may be any tank capable of performing wet treatment on the supply, such as an acid pickling tank, a water washing tank, an alkali cleaning tank, a wet coating tank, and the like.
进一步地,处理槽28为多个,多个处理槽28中的至少一个为清洗槽。Further, there are multiple processing tanks 28, and at least one of the multiple processing tanks 28 is a cleaning tank.
在该实施例中,通过清洗槽的设置对工件进行清洗,通过分支管道4向清洗槽供给清洗液。In this embodiment, the workpiece is cleaned by setting the cleaning tank, and the cleaning liquid is supplied to the cleaning tank through the branch pipe 4 .
进一步地,如图7所示,管道阀箱可以设置在支架26上。Further, as shown in FIG. 7 , the pipeline valve box can be arranged on the bracket 26 .
通过支架26的设置,能够使管道阀箱的固定更为稳固,降低漏液机率,药剂输送更为安全。Through the setting of the bracket 26, the fixing of the valve box of the pipeline can be made more stable, the probability of liquid leakage is reduced, and the drug delivery is safer.
本发明的附加方面和优点将在下面的描述部分中变得明显,或通过本发明的实践了解到。Additional aspects and advantages of the invention will become apparent in the description which follows, or may be learned by practice of the invention.
如图1至图7所示,该实施例的管道阀箱包括:管道、手动阀6、气动阀8、箱体10、漏液检测开关、报警器、控制器及水路供给管道。As shown in Figures 1 to 7, the pipeline valve box of this embodiment includes: pipeline, manual valve 6, pneumatic valve 8, box body 10, liquid leakage detection switch, alarm, controller and water supply pipeline.
其中,管道包括至少一个供给管道2,每个供给管道2连通于至少一个分支管道4;手动阀6设置在供给管道2上;气动阀8设置在分支管道4上;箱体10罩设在供给管道2及分支管道4上,手动阀6及气动阀8处于箱体10 内。为了将药液阀集中便于操作人员管理,漏液检测开关,设置在分支管道4、供给管道2及箱体10中的至少一处,控制器,连接于漏液检测开关;报警器,连接于控制器。Wherein, the pipeline includes at least one supply pipeline 2, and each supply pipeline 2 communicates with at least one branch pipeline 4; the manual valve 6 is arranged on the supply pipeline 2; the pneumatic valve 8 is arranged on the branch pipeline 4; On the pipeline 2 and the branch pipeline 4 , the manual valve 6 and the pneumatic valve 8 are located in the box body 10 . In order to centralize the liquid medicine valves to facilitate the management of operators, the liquid leakage detection switch is arranged on at least one of the branch pipe 4, the supply pipe 2 and the box body 10, the controller is connected to the liquid leakage detection switch; the alarm is connected to the controller.
其中,供给管道2及分支管道4为药剂供给管道,水路供给管道设置在箱体10外侧。Wherein, the supply pipeline 2 and the branch pipeline 4 are medicine supply pipelines, and the water supply pipeline is arranged outside the box body 10 .
该实施例方便作业人员观察及管理设置在管道上的药液阀,出现紧急情况可在第一时间将管道关闭,避免出现漏液造成更大的事故。This embodiment is convenient for the operator to observe and manage the liquid medicine valve arranged on the pipeline, and the pipeline can be closed at the first time in case of an emergency, so as to avoid bigger accidents caused by leakage.
该实施例对设备所有的药剂供给管道与其他电器机械元件及水路供给管道通过箱体10分隔开并做封闭式管理,当出现漏液不会腐蚀到其他元件,在箱体10内装有漏液检测开关,当出现漏液第一时间报警。In this embodiment, all the medicament supply pipelines of the equipment are separated from other electrical mechanical components and water supply pipelines through the box body 10 and are managed in a closed manner. When leakage occurs, other components will not be corroded. Liquid detection switch, when there is liquid leakage, the alarm will be given immediately.
该实施例对原本混乱的管路重新进行排布不在错综复杂,使得现有的管路布局一目了然。In this embodiment, the rearrangement of the originally chaotic pipelines is not complicated, so that the existing pipeline layout is clear at a glance.
该实施例的管道阀箱可在设备外部完成组装,打破传统的安装流程(传统技术中需要在设备封板完成铣板及焊接才可在封板上安装阀及布局管路)节省设备制作时间。The pipeline valve box of this embodiment can be assembled outside the equipment, breaking the traditional installation process (in the traditional technology, it is necessary to complete milling and welding on the equipment sealing plate before installing valves and laying out pipelines on the sealing plate) to save equipment manufacturing time .
如图1至图7所示,该实施例的管道阀箱供给应用在太阳能硅片的槽式清洗设备和湿法处理设备中,管道上设置有手动阀6,手动阀6控制该供给管道2所有分支管道4的开合,当出现紧急情况可在此处第一时间关闭所有手动阀6,对管道进行关闭;分支管道4上设置有气动阀8,气动阀8通过控制分支管道4的开闭控制各个工艺槽管路的闭合,气动阀8可以通过整根PFA管连接至槽式清洗设备和湿法处理设备各个工艺槽降低漏液风险。箱体10、供给管道2及分支管道4上均装有漏液检测开关,当出现漏液情况及时报警,方便作业人员及时处理。As shown in Figures 1 to 7, the pipeline valve box supply of this embodiment is applied in the trough cleaning equipment and wet processing equipment of solar silicon wafers, and a manual valve 6 is arranged on the pipeline, and the manual valve 6 controls the supply pipeline 2 The opening and closing of all branch pipelines 4, when an emergency occurs, all manual valves 6 can be closed here at the first time to close the pipelines; Control the closing of each process tank pipeline, and the pneumatic valve 8 can be connected to each process tank of the tank cleaning equipment and wet processing equipment through the entire PFA pipe to reduce the risk of liquid leakage. The casing 10, the supply pipeline 2 and the branch pipeline 4 are all equipped with a liquid leakage detection switch, which will alarm in time when there is a liquid leakage, so that the operators can handle it in time.
在本发明的描述中,术语“多个”则指两个或两个以上,除非另有明确的限定,术语“上”、“下”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制;术语“连接”、“安装”、“固定”等均应做广义理解,例如,“连接”可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是直接相连,也可以通过中间媒介间接相连。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, the term "plurality" refers to two or more than two. Unless otherwise clearly defined, the orientation or positional relationship indicated by the terms "upper", "lower" and so on is based on the orientation shown in the accompanying drawings. Orientation or positional relationship is only for the convenience of describing the present invention and simplifying the description, but does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as limiting the present invention; The terms "connection", "installation" and "fixation" should be understood in a broad sense, for example, "connection" can be fixed connection, detachable connection, or integral connection; it can be directly connected or through an intermediate The medium is indirectly connected. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.
在本说明书的描述中,术语“一个实施例”、“一些实施例”、“具体实施例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或特点包含于本发明的至少一个实施例或示例中。在本说明书中,对上述术语的示意性表述不一定指的是相同的实施例或实例。而且,描述的具体特征、结构、材料或特点可以在任何的一个或多个实施例或示例中以合适的方式结合。In the description of this specification, descriptions of the terms "one embodiment", "some embodiments", "specific embodiments" and the like mean that specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in the present invention In at least one embodiment or example of . In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
以上仅为本发明的优选实施例而已,并不用于限制本发明,对于本领域的技术人员来说,本发明可以有各种更改和变化。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above are only preferred embodiments of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.
Claims (10)
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| CN201910910635.8A CN110566814A (en) | 2019-09-25 | 2019-09-25 | Pipeline valve box and groove type wet processing equipment |
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