CN115739801A - Cleaning equipment - Google Patents

Abstract

An embodiment of the present invention provides a cleaning device including: a cleaning tank, a pipeline and a controller; the pipeline includes a converging pipeline, a first drainage pipeline and a second drainage pipeline; the converging pipeline is provided with a first valve ; The first liquid discharge pipeline is provided with a second valve; the second liquid discharge pipeline is provided with a third valve; the controller is used to control the second valve to open and the third valve to close when the first liquid is injected; When a liquid discharge command is issued, the first valve is controlled to open, so that the first liquid is discharged from the first liquid discharge pipeline; when the second liquid is injected, the second valve is controlled to be closed, and the third valve is opened; when the second liquid is received, the discharge When commanded, the first valve is controlled to open, so that the first liquid is discharged from the second liquid discharge pipeline. By controlling the acid discharge valve and the drain valve not to be opened at the same time, the discharge of liquid is determined by the valve on the converging pipeline, which effectively isolates the dissolution and collapse of the factory pipeline caused by human error discharge, eliminates potential safety hazards, and protects the safety of the system and personnel.

Description

a cleaning device

technical field

The invention relates to the technical field of cleaning, in particular to a cleaning device.

Background technique

Cleaning technology is an important part of wafer processing in the semiconductor industry. During the entire wafer processing process, this process uses sulfuric acid hydrogen peroxide mixture (Surfuric/Peroxide Mi, SPM) to remove polymers, organic matter, and engine oil residues. Wet cleaning technology is a main cleaning technology, and tank cleaning equipment is a kind of wet cleaning equipment commonly used at present. SPM cleaning solution is the most common cleaning solution in the cleaning industry at present. Its main components are concentrated sulfuric acid and hydrogen peroxide. When it encounters water, it can undergo a huge chemical reaction. High-temperature SPM and residual deionized water (DIW) generate a lot of heat, causing factory The pipeline dissolves and collapses, so it is particularly important to design a safe and effective SPM drainage circuit.

In the prior art, acid discharge and drainage are controlled through two circulation pipeline discharge valves respectively. In actual operation, the two circulation pipeline discharge valves correspond to two buttons respectively, and the user controls the switch of the circulation pipeline discharge valve through the buttons, which is easy There is an operation error or a circuit error, for example, when draining acid, the user accidentally presses the drain button, or accidentally presses the acid drain button during draining, so that the acid is discharged into the sink, or the water is discharged into the acid tank , and a large amount of heat is generated, causing the factory pipes to dissolve and collapse.

Contents of the invention

In view of the above problems, embodiments of the present invention are proposed to provide a cleaning device that overcomes the above problems or at least partially solves the above problems.

In order to solve the above problems, the embodiment of the present invention discloses a cleaning device, including: a cleaning tank, a pipeline and a controller;

The lines include a converging line, a first discharge line for discharging the first liquid, and a second discharge line for discharging the second liquid;

One end of the converging pipeline collects the liquid to be discharged, and the other end is connected to the first liquid drainage pipeline and the second liquid drainage pipeline;

The converging pipeline is provided with a first valve for controlling the on-off of the converging pipeline;

The first liquid discharge pipeline is provided with a second valve, which is used to control the on-off of the first liquid discharge pipeline;

The second liquid discharge pipeline is provided with a third valve, which is used to control the on-off of the second liquid discharge pipeline;

The controller is used to control the second valve to open and the third valve to close when injecting the first liquid into the cleaning tank; and control the first valve when receiving the first liquid discharge command opening to allow the first liquid to drain from the first drain line;

The controller is used to control the second valve to close and the third valve to open when injecting the second liquid into the cleaning tank; when receiving the second liquid discharge command, control the first valve open to allow the first liquid to drain from the second drain line.

Optionally, it also includes: a valve control circuit;

The valve control circuit includes: a first liquid discharge control circuit and a second liquid discharge control circuit;

The first liquid discharge control circuit is used to control the on-off of the second valve;

The second liquid discharge control circuit is used to control the on-off of the third valve;

The controller is used to control the first liquid discharge control circuit to be turned on to open the second valve in response to the first liquid discharge command, and the second liquid discharge control circuit to be turned off to make the third valve open. closure;

The controller is configured to control the first liquid discharge control circuit to be turned off to close the second valve in response to the second liquid discharge command, and the second liquid discharge control circuit to be turned on to make the third valve Open.

Optionally,

The first liquid discharge control circuit includes: a first relay, a first liquid discharge switch, and a second liquid discharge switch;

The second liquid discharge control circuit includes: a second relay, a third liquid discharge switch, and a fourth liquid discharge switch;

The first liquid discharge switch and the second liquid discharge switch are used to control the on-off of the first liquid discharge control circuit; the first relay is used to control the first liquid discharge switch and the second liquid discharge switch Three discharge switches;

The third liquid discharge switch and the fourth liquid discharge switch are used to control the on-off of the second liquid discharge control circuit; the second relay is used to control the second liquid discharge switch and the first liquid discharge switch. Four drain switches;

The controller is configured to control the first relay to be turned on and the second relay to be de-energized in response to the first liquid discharge command, so that the first relay controls the first liquid discharge switch to be closed, and the second relay The third liquid discharge switch is turned off, the second relay controls the second liquid discharge switch to be closed, and the fourth liquid discharge switch is turned off;

The controller is configured to control the first relay to be powered off and the second relay to be turned on in response to the second liquid discharge command, so that the first relay controls the first liquid discharge switch to be turned off, and the The third liquid discharge switch is closed, the second relay controls the second liquid discharge switch to be turned off, and the fourth liquid discharge switch is closed.

Optionally, the cleaning tank includes an inner tank and an outer tank; a first liquid level gauge is provided in the inner tank, and the first liquid level gauge is used to detect whether there is liquid in the inner tank; There is a second liquid level gauge, and the second liquid level gauge is used to detect whether there is liquid in the outer tank;

During the discharge of the first liquid or the second liquid, when the first liquid level gauge detects that the inner tank is empty, and the second liquid level gauge detects that the outer tank is empty , the controller controls the first valve to close.

Optionally, the pipeline further includes: a first liquid inlet pipeline for injecting the first liquid and a second liquid inlet pipeline for injecting the second liquid;

The first liquid inlet pipeline is provided with a fourth valve, which is used to control the on-off of the first liquid inlet pipeline;

The second liquid inlet pipeline is provided with a fifth valve, which is used to control the on-off of the second liquid inlet pipeline;

The controller is configured to control the fourth valve to open and the fifth valve to close in response to a first liquid injection instruction, so that the first liquid is injected into the cleaning tank from the first liquid inlet pipeline;

The controller is configured to control the fourth valve to close and the fifth valve to open in response to a second liquid injection instruction, so that the second liquid is injected into the cleaning tank from the second liquid inlet pipeline.

Optionally, the valve control circuit further includes: a first liquid inlet control circuit and a second liquid inlet control circuit;

The first liquid inlet control circuit is used to control the on-off of the fourth valve;

The second liquid inlet control circuit is used to control the on-off of the fifth valve;

The controller is configured to, in response to the first liquid injection instruction, control the first liquid inlet control circuit to be turned on to open the fourth valve, and the second liquid inlet control circuit to be turned off to make the first liquid inlet control circuit open. Five valves closed;

The controller is configured to control the first liquid inlet control circuit to be turned off to close the fourth valve in response to the second liquid injection instruction, and the second liquid inlet control circuit to be turned on to make the first liquid inlet control circuit turn on. Five valves open.

Optionally,

The first liquid inlet control circuit includes: a third relay, a first liquid discharge switch, and a second liquid discharge switch;

The second liquid inlet control circuit includes: a fourth relay, a third liquid inlet switch, and a fourth liquid inlet switch;

The first liquid inlet switch and the second liquid inlet switch are used to control the on-off of the first liquid inlet control circuit; the third relay is used to control the first liquid inlet switch and the second liquid inlet switch. Three liquid inlet switches;

The third liquid inlet switch and the fourth liquid inlet switch are used to control the on-off of the second liquid inlet control circuit; the fourth relay is used to control the second liquid inlet switch and the first liquid inlet switch. Four liquid inlet switches;

The controller is configured to control the third relay to be turned on and the fourth relay to be turned off in response to the first liquid discharge command, so that the third relay controls the first liquid inlet switch to be closed, and the first liquid inlet switch is controlled to be closed. The third liquid inlet switch is turned off, the fourth relay controls the second liquid inlet switch to be closed, and the fourth liquid inlet switch is turned off;

The controller is configured to control the third relay to be powered off and the second relay to be turned on in response to the second liquid discharge command, so that the third relay controls the first liquid inlet switch to be turned off, and the The third liquid inlet switch is closed, the fourth relay controls the second liquid inlet switch to be turned off, and the fourth liquid inlet switch is closed.

Optionally, a third liquid level gauge is provided in the outer tank, and the third liquid level gauge is used to detect whether the liquid in the outer tank reaches a preset liquid level;

During the process of injecting the first liquid, when the third liquid level gauge detects that the liquid in the outer tank reaches a preset liquid level, the controller controls the fourth valve to close to stop injecting the first liquid;

In the process of injecting the second liquid, when the third liquid level gauge detects that the liquid in the outer tank reaches a preset liquid level, the controller controls the fifth valve to close to stop injecting the second liquid. second liquid.

Optionally, the pipeline further includes: a circulation pipeline and at least one connecting pipeline connected to the circulation pipeline;

The circulation pipeline is used to circulate and inject the liquid flowing out from the cleaning tank into the cleaning tank;

One end of the converging pipeline is connected to the at least one connecting pipeline to collect the liquid that needs to be discharged from the circulation pipeline, and the other end is connected to the first liquid drainage pipeline and the second liquid drainage pipeline.

Optionally, the first liquid inlet pipeline includes an inner tank liquid inlet pipeline and an outer tank liquid inlet pipeline;

The inner tank liquid inlet pipeline is inserted into the inner tank of the cleaning tank for injecting the first liquid into the inner tank, the inner tank liquid inlet pipeline is provided with the fourth valve, the first Four valves are used to control the on-off of the liquid inlet pipeline of the inner tank; the first liquid inlet pipeline also includes;

The outer tank liquid inlet pipeline is inserted into the outer tank of the cleaning tank for injecting the first liquid into the outer tank, and the outer tank liquid inlet pipeline is provided with a sixth valve;

The controller is configured to control the fourth valve to open and the sixth valve to close in response to the first liquid injection instruction, so that the first liquid is injected into the inner tank;

The controller is used for when the first liquid in the outer tank flows into the circulation pipeline, so that the third liquid level gauge detects that the liquid level of the outer tank drops from the preset liquid level to a stable When the liquid level is lower than the liquid level, the sixth valve is controlled to open, and the fourth valve is closed, so that the first liquid is injected into the outer tank, and when the third liquid level gauge detects that the liquid in the outer tank When the preset liquid level is reached again, the sixth valve is controlled to be closed.

Optionally, the circulation pipeline includes an inner tank output pipeline connected to the inner tank and an outer tank output pipeline connected to the outer tank;

The output pipeline of the inner tank is provided with a seventh valve, which is used to control the on-off of the output pipeline of the inner tank;

The output pipeline of the outer tank is provided with an eighth valve, which is used to control the on-off of the output pipeline of the outer tank;

The controller is used to control the eighth valve to open and the seventh valve to close when the third liquid level gauge detects that the liquid in the outer tank reaches a preset liquid level, so that the outer tank The first liquid in flows into the circulation pipeline;

The controller is configured to control the opening of the seventh valve and the eighth valve in response to the first liquid discharge command or the second liquid discharge command;

The controller is used to control the seventh valve and the first tank when the first liquid level gauge detects that the inner tank is empty and the second liquid level gauge detects that the outer tank is empty. Eight valves are closed.

Optionally, it also includes: a liquid injection power supply circuit and a liquid injection control circuit;

The liquid injection power supply circuit is used to supply power to the fifth valve;

The liquid injection control circuit is used to control the on-off of the liquid injection power supply circuit;

The liquid injection control circuit includes a fifth relay, a first liquid injection switch, a second liquid injection switch, a third liquid injection switch, and a fourth liquid injection switch; the third liquid injection switch and the fourth liquid injection switch In series, the first liquid injection switch is connected in series with the second liquid injection switch, and the series circuit of the first liquid injection switch and the second liquid injection switch is connected in parallel with the fourth liquid injection switch;

The liquid injection power supply circuit includes a fifth liquid injection switch;

The fifth relay is used to control the fourth filling switch and the fifth filling switch;

When the first liquid level gauge detects that the inner tank is empty and the second liquid level gauge detects that the outer tank is empty, the controller controls the first liquid injection switch, the second liquid injection switch and the third liquid injection switch are closed, so that the liquid injection control circuit is turned on; when the liquid injection control circuit is turned on, the fifth relay is turned on and controls the fourth liquid injection The switch and the fifth liquid injection switch are closed, so that the liquid injection control circuit remains turned on, and the liquid injection power supply circuit is turned on;

When the third liquid level gauge detects that the liquid in the outer tank reaches the preset liquid level, the controller controls the third liquid injection switch to be turned off, so that the liquid injection control circuit and the injection The liquid control circuit is disconnected.

Optionally, the circulation pipeline is provided with a circulation pump and a filter;

The circulation pump is used to pump the liquid flowing out from the cleaning tank into the filter;

The filter is used to filter the liquid, and output the filtered liquid to the cleaning tank;

The controller is used for controlling the circulation pump to be turned on in response to a cleaning instruction.

Embodiments of the present invention include the following advantages:

In an embodiment of the present invention, the cleaning equipment includes: a cleaning tank, a pipeline, and a controller; the pipeline includes a converging pipeline, a first liquid discharge pipeline for discharging the first liquid, and a discharge pipeline for discharging the second liquid. The second discharge pipeline; one end of the converging pipeline collects the liquid to be discharged, and the other end is connected to the first liquid discharge pipeline and the second liquid discharge pipeline; the converging pipeline is provided with a first valve for controlling the flow of the converging pipeline on-off; the first liquid discharge pipeline is provided with a second valve, which is used to control the on-off of the first liquid discharge pipeline; the second liquid discharge pipeline is provided with a third valve, which is used to control the opening and closing of the second liquid discharge pipeline On-off; the controller is used to control the second valve to open and the third valve to close when injecting the first liquid into the cleaning tank; A discharge line is discharged; the controller is used to control the second valve to close and the third valve to open when the second liquid is injected into the cleaning tank; when receiving the second liquid discharge instruction, control the first valve to open so that the first A liquid is discharged from the second liquid discharge line. Through the T-shaped pipeline formed by the converging pipeline, the first liquid drainage pipeline and the second liquid drainage pipeline, the valve for acid discharge and the valve for drainage on the T-shaped pipeline are mutually exclusive, so that the valve for acid discharge and drainage All valves cannot be opened at the same time, and the discharge of liquid is determined by the valve on the converging pipeline, which effectively isolates the dissolution and collapse of the factory pipeline caused by human error discharge, eliminates potential safety hazards, and protects the safety of the system and personnel.

Description of drawings

Fig. 1 is a structural diagram of a cleaning device provided by an embodiment of the present invention;

Fig. 2 is a structural diagram of another cleaning device provided by an embodiment of the present invention;

Fig. 3 is a principle diagram of acid discharge/drain mutual exclusion provided by an embodiment of the present invention;

Fig. 4 is a schematic diagram of mutual exclusion of acid feed/water feed provided by an embodiment of the present invention;

Fig. 5 is a schematic diagram of a liquid injection control provided by an embodiment of the present invention.

Detailed ways

In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

The embodiment of the present invention is described by taking the cleaning of the semiconductor wafer with the SPM tank chemical solution as an example.

In the existing SPM process pipeline design, the SPM tank does not do any treatment when discharging the concentrated H ₂ SO ₄ and DIW, and directly discharges the acid through the acid discharge pipeline, and the drainage pipeline drains water. It is necessary to manually judge the corresponding discharge of the acid discharge pipeline. The acid valve and the drain valve corresponding to the drain pipeline have the risk of causing the operator to discharge incorrectly, which will cause the mixing of H ₂ SO ₄ and DIW to generate a lot of heat, dissolve the plant service pipeline, and cause H ₂ SO ₄ to drip onto the plant floor , leaving a serious safety hazard for pedestrians.

One of the core ideas of the embodiment of the present invention is that the T-shaped pipeline formed by the converging pipeline, the first liquid drainage pipeline and the second liquid drainage pipeline uses the valve for acid discharge and the drainage valve on the T-shaped pipeline The valves are mutually exclusive, so that the acid discharge valve and the drainage valve cannot be opened at the same time, and the discharge of the liquid is determined by the valve on the converging pipeline, which effectively isolates the dissolution and collapse of the factory pipeline caused by human error discharge, eliminates potential safety hazards, and protects the system and Personnel safety.

Referring to Figure 1, it shows a structural diagram of a cleaning device provided by an embodiment of the present invention, including: a cleaning tank 101, a pipeline and a controller (not shown in the figure); the pipeline includes a converging pipeline 102 , a first liquid discharge pipeline 103 for discharging the first liquid and a second liquid discharge pipeline 104 for discharging the second liquid; one end of the converging pipeline 102 collects the liquid to be discharged, and the other end is connected to the first liquid A discharge pipeline 103 and the second discharge pipeline 104; the converging pipeline 102 is provided with a first valve 1021 for controlling the on-off of the converging pipeline 102; the first discharge pipe The road 103 is provided with a second valve 1031 for controlling the on-off of the first liquid discharge pipeline 103; the second liquid discharge pipeline 104 is provided with a third valve 1041 for controlling the on-off of the second liquid discharge pipeline 104. On-off of pipeline 104.

In the embodiment of the present invention, the first liquid may be concentrated sulfuric acid, which is used to clean polymers, small molecular organic substances, etc. remaining on the surface of the wafer, and the first liquid discharge pipeline 103 may be used to discharge the waste acid liquid after cleaning; The second liquid may be deionized water, which is used to further clean the wafer and inorganic impurities in the pipeline, and the second liquid discharge pipeline 104 may be used to discharge the cleaned waste water.

As an example, after cleaning with the first liquid, the waste acid liquid can be discharged from the cleaning tank 101 and gathered in the converging pipeline, and the waste acid can be discharged to the first liquid discharge pipeline 103 through the converging pipeline, through The first liquid discharge pipeline 103 discharges the waste acid into the acid discharge tank for storing the waste acid.

As an example, after cleaning with the second liquid, the discarded water can be discharged from the cleaning tank 101 and collected in the converging pipeline, and the waste water is discharged to the second liquid discharge pipeline 104 through the converging pipeline, and passed through the second The drain line 104 discharges waste water into a drain tank for storing waste water.

The controller is used to control the second valve 1031 to open and the third valve 1041 to close when injecting the first liquid into the cleaning tank 101; The first valve 1021 is opened so that the first liquid is discharged from the first liquid discharge pipeline 103; the controller is used to control the second valve 1031 when injecting the second liquid into the cleaning tank 101 closed, the third valve 1041 is opened; when the second liquid discharge instruction is received, the first valve 1021 is controlled to open, so that the first liquid is discharged from the second liquid discharge pipeline 104 .

In the embodiment of the present invention, the second valve 1031 and the third valve 1041 can be set as mutually exclusive valves, when the second valve 1031 is controlled to open, the third valve 1041 is controlled to be closed; when the third valve 1041 is controlled to be opened, Control the second valve 1031 to close.

As an example, the controller may control the second valve 1031 to open and the third valve 1041 to close when injecting the first liquid into the cleaning tank 101, so that the first liquid discharge pipeline 103 for acid discharge is opened and used The second liquid discharge pipeline 104 for drainage is closed. When the first liquid discharge command is received and the first liquid needs to be discharged, only the first valve 1021 needs to be controlled to open, and the waste acid liquid can be accurately discharged from the used for discharge. A first drain line 103 for acid is drained.

As an example, when the controller injects the second liquid into the cleaning tank 101, the controller can control the second valve 1031 to close, and control the third valve 1041 to open, so that the second liquid drainage pipeline 104 for draining water is opened and used for The first liquid discharge pipeline 103 for acid discharge is closed. When the second liquid discharge instruction is received and the second liquid needs to be discharged, it is only necessary to control the opening of the first valve 1021 to accurately discharge the waste water from the discharge pipe. The second drain line 104 is drained.

On the software interface of the host computer in the embodiment of the present invention, only need to open the first valve 1021, the controller can discharge the acid or drain the instruction, automatically discharge the waste acid to the corresponding acid discharge pipeline, and automatically discharge the waste water to the corresponding drainage pipeline , No need for human judgment on acid discharge or drainage, avoiding the dissolution and collapse of plant service pipelines caused by human operation errors that cause acid liquid to be discharged from the drain pipe to the acid discharge tank or water to be discharged from the acid discharge pipe to the drain tank to generate a large amount of heat.

It should be noted that the above-mentioned use of sulfuric acid as the first chemical solution is only an example of the present invention. The first chemical solution of the present invention is not limited to sulfuric acid, and any chemical solution that generates heat when it encounters water is applicable. The embodiment of the present invention is in This is not limited.

As shown in FIG. 2 , it is a structural diagram of another cleaning device provided by an embodiment of the present invention.

In one embodiment of the present invention, the pipeline further includes: a circulation pipeline 105 and at least one connection pipeline 106 connected to the circulation pipeline; The liquid flowing out of the tank 101 is circulated and injected into the cleaning tank 101; one end of the converging pipeline 102 is connected to the at least one connecting pipeline to collect the liquid that needs to be discharged from the circulation pipeline 105, and the other end is connected to the first The drain line 103 and the second drain line 104 .

As an example, during the cleaning process of the wafer, the liquid in the cleaning tank 101 can be circulated into the cleaning tank 101 through the circulation pipeline. To the converging pipeline 102. According to the discharge command, the controller controls the opening of the first valve 1021 on the converging pipeline 102 to discharge the liquid to be discharged to the corresponding discharge pipeline. For example, according to the acid discharge instruction, the first valve 1021 is opened to discharge the acid liquid to the first liquid discharge pipeline 103 for acid discharge, and the acid liquid can be accurately discharged through the first liquid discharge pipeline 103 for acid discharge To the acid discharge tank 109; according to the drainage command, the water is discharged to the second drainage pipeline 104 for drainage, and the water can be accurately discharged to the drainage tank 110 through the first drainage pipeline 103 for drainage.

As an example, a redundant valve 1032 is also provided on the first liquid discharge pipeline 103. When the second valve 1031 fails, the on-off of the first liquid discharge pipeline 103 can be controlled by the redundant valve 1032; When the second valve 1031 is not faulty, the redundant valve 1032 is open, and the first liquid discharge pipeline 103 is turned on and off by the second valve 1031 .

As an example, the waste acid in the acid discharge tank 109 contains a large amount of concentrated acid, and the temperature of the waste acid discharged into the acid discharge tank 109 is high, and a cooling function can be set in the acid discharge tank 109, and then discharged when the waste acid is cooled to room temperature ; The wastewater in the drainage tank 110 does not contain concentrated acid, the temperature of the wastewater in the drainage tank 110 is room temperature, and can be directly discharged to the factory service end.

In one embodiment of the present invention, the cleaning tank 101 includes an inner tank 1011 and an outer tank 1012; the inner tank 1011 is provided with a first liquid level gauge 1013, and the first liquid level gauge 1013 is used to detect Whether there is liquid in the inner tank 1011; a second liquid level gauge 1014 is arranged in the outer tank 1012, and the second liquid level gauge 1014 is used to detect whether there is liquid in the outer tank 1012; when discharging the first liquid or During the process of the second liquid, when the first liquid level gauge detects that the inner tank 1011 is empty, and the second liquid level gauge detects that the outer tank 1012 is empty, the controller Control the first valve 1021 to close.

As an example, the semiconductor wafer can be cleaned in the inner tank 1011 , and the outer tank 1012 can be used to store the liquid overflowed from the inner tank 1011 and the liquid injected in circulation. The first liquid level gauge can be arranged at the bottom of the inner tank 1011, so that it can be detected sensitively when there is liquid in the inner tank 1011; the second liquid level gauge can be set at the bottom of the outer tank 1012, so that when the outer tank When there is liquid in 1012, it can be detected sensitively. In the process of discharging the first liquid or the second liquid, when the first liquid level gauge 1013 in the inner tank 1011 detects that the inner tank 1011 is empty, and the second liquid level gauge detects that the outer tank 1012 is empty, it means cleaning the tank The liquid in 101 has been emptied, and the controller can control the first valve 1021 to close.

In one embodiment of the present invention, the circulation pipeline 105 is provided with a circulation pump 1053 and a filter 1054; the circulation pump 1053 is used to pump the liquid flowing out from the cleaning tank 101 into the filter 1054; The filter 1054 is used to filter the liquid and output the filtered liquid to the cleaning tank 101; the controller is used to control the circulation pump 1053 to start in response to the cleaning instruction.

As an example, in the process of cleaning the wafer, the liquid in the cleaning tank 101 can be pumped into the circulation pipeline through the circulation pump, and then the liquid can be injected into the cleaning tank 101, so that the liquid circulates in the pipeline, which can last Clean the wafer. A filter may also be provided in the circulation pipeline, which can filter impurities in the liquid discharged from the cleaning tank 101 to the circulation pipeline, and reduce impurities in the liquid circulating into the cleaning tank 101 .

In an embodiment of the present invention, the connecting pipeline 106 may include a first connecting pipeline 1061 and a second connecting pipeline 1062, one end of the first connecting pipeline 1061 is connected to the circulation pipeline 105, and the other One end is connected to the converging pipeline 102, and the first connecting pipeline 1061 is provided with a first connecting pipeline valve 10611 for controlling the on-off of the first connecting pipeline 1061; the second connecting pipeline 1062, One end is connected to the filter 1054 , the other end is connected to the converging pipeline 102 , and the second connecting pipeline 1062 is provided with a second connecting pipeline valve 10621 for controlling the opening and closing of the second connecting pipeline 1062 .

As an example, when it is necessary to discharge acid, the first connection pipeline valve 10611 can be opened to discharge the acid liquid in the circulation pipeline 105 to the converging pipeline 102, and at the same time, the second connection pipeline valve 10621 can be opened to drain the The acid in the filter 1054 is discharged to the converging pipeline 102; when drainage is required, the first connecting pipeline valve 10611 can be opened to discharge the water in the circulation pipeline 105 to the converging pipeline 102, and at the same time, the second connecting pipeline can be opened. Connect the pipeline valve 10621 to discharge the water in the filter 1054 to the collection pipeline 102.

In one embodiment of the present invention, the pipeline further includes: a first liquid inlet pipeline 107 for injecting the first liquid and a second liquid inlet pipeline 108 for injecting the second liquid The first liquid inlet pipeline 107 is provided with a fourth valve 1071 for controlling the on-off of the first liquid inlet pipeline 107; the second liquid inlet pipeline 108 is provided with a fifth valve 1081 for The controller is used to control the opening and closing of the second liquid inlet pipeline 108; the controller is used to control the opening of the fourth valve 1071 and the closing of the fifth valve 1081 in response to the first liquid injection command, so that the first A liquid is injected into the cleaning tank 101 from the first liquid inlet pipeline 107; the controller is used to control the closing of the fourth valve 1071 and the opening of the fifth valve 1081 in response to the second liquid injection command, so as to The second liquid is injected into the cleaning tank 101 from the second liquid inlet pipeline 108 .

In the embodiment of the present invention, the pipeline may also include a liquid inlet pipeline. As shown in FIG. Line 108.

As an example, the first liquid inlet pipeline 107 can be a pipeline for acid inlet, one end is connected to the acid storage tank 111, and the other end is inserted into the cleaning tank 101; the second liquid inlet pipeline 108 can be a pipeline for water inlet. One end of the pipeline is connected to the water storage tank 112 , and the other end is inserted into the cleaning tank 101 .

As an example, when the controller receives an acid injection instruction, it can control the fourth valve 1071 to open and the fifth valve 1081 to close, so that the acid in the acid storage tank 111 is injected into the cleaning tank from the first liquid inlet pipeline 107 101 : When the controller receives the water injection instruction, control the fourth valve 1071 to close and the fifth valve 1081 to open, so that the water in the water storage tank 112 is injected into the cleaning tank 101 from the second liquid inlet pipeline 108 .

In one embodiment of the present invention, a third liquid level gauge is provided in the outer tank 1012, and the third liquid level gauge is used to detect whether the liquid in the outer tank reaches a preset liquid level; During the liquid process, when the second liquid level gauge detects that there is liquid in the outer tank 1012, the controller controls the fourth valve to close to stop injecting the first liquid; During the process of the second liquid, when the third liquid level gauge detects that the liquid in the outer tank reaches a preset liquid level, the controller controls the fifth valve to close to stop injecting the second liquid.

As an example, the third liquid level gauge can be arranged on the upper part of the second liquid level gauge in the outer tank 1012, and can be used to detect whether the liquid in the outer tank reaches a preset liquid level, so as to prevent the liquid from overflowing from the outer tank 1012 to the outside of the cleaning tank 101 .

As an example, during acid injection, when the second liquid level gauge detects that there is liquid in the outer tank 1012, that is, when the acid liquid injected into the inner tank 1011 overflows to the outer tank 1012, the controller can control the fourth The valve is closed to stop the injection of acid solution.

As an example, in the process of water injection, when the third liquid level gauge detects that the liquid in the outer tank reaches the preset liquid level, that is, the water overflowing from the inner tank 1011 to the outer tank 1012 reaches the preset liquid level in the outer tank 1012 , the controller can control the fifth valve to close, stop injecting the second liquid, and prevent water from overflowing from the outer tank 1012 to the outside of the cleaning tank 101.

It should be noted that in the process of cleaning the wafer, it is necessary to perform pickling first, and then wash with water. In the embodiment of the present invention, when it is detected that the acid liquid injected into the inner tank 1011 overflows to the outer tank during the acid injection process At 1012, the acid injection is stopped, which can save the use of acid and reduce environmental pollution; in the process of water injection, when it is detected that the water overflowing from the inner tank 1011 to the outer tank 1012 reaches the preset liquid level of the outer tank 1012, stop the water injection In the process of water washing, the wafer and the entire pipeline can be fully cleaned, and at the same time, water can be prevented from overflowing from the outer tank 1012 to the outside of the cleaning tank 101 .

In one embodiment of the present invention, the first liquid inlet pipeline includes an inner tank liquid inlet pipeline 1072 and an outer tank liquid inlet pipeline 1073; the inner tank liquid inlet pipeline 1072 is inserted into the cleaning tank The inner tank is used to inject the first liquid into the inner tank, the inner tank liquid inlet pipeline 1072 is provided with the fourth valve, and the fourth valve is used to control the inner tank liquid inlet pipeline 1072 on and off; the first liquid inlet pipeline also includes; the outer tank liquid inlet pipeline 1073 is inserted into the outer tank of the cleaning tank, and is used to inject the first liquid into the outer tank, the The outer tank liquid inlet pipeline 1073 is provided with a sixth valve; the controller is used to control the fourth valve to open and the sixth valve to close in response to the first liquid injection command, so that the first liquid Inject into the inner tank; the controller is used for when the first liquid in the outer tank flows into the circulation pipeline, so that the third liquid level gauge detects that the liquid level of the outer tank has changed from the preset When the liquid level drops to a stable liquid level, the sixth valve is controlled to open, and the fourth valve is closed, so that the first liquid is injected into the outer tank, and the third liquid level gauge When it is detected that the liquid in the outer tank reaches the preset liquid level again, the sixth valve is controlled to be closed.

In the embodiment of the present invention, the first liquid inlet pipeline may include two: the inner tank liquid inlet pipeline 1072 and the outer tank liquid inlet pipeline 1073 . Among them, the inner tank liquid inlet pipeline 1072 is provided with a fourth valve for controlling the on-off of the inner tank liquid inlet pipeline 1072, and the outer tank liquid inlet pipeline 1073 is provided with a sixth valve 1074 for controlling the outer tank liquid inlet pipeline 1073. On-off of pipeline 1073.

As an example, when the controller receives the first liquid injection instruction, it may control the fourth valve 1071 to open, so that the first liquid is injected into the inner tank 1011 of the cleaning tank 101 through the inner tank liquid inlet pipeline 1072 . As the liquid injection progresses, the first liquid injected into the inner tank 1011 overflows to the outer tank 1012, and when the level of the overflowing first liquid reaches the preset liquid level of the outer tank, the controller can control the fourth valve 1071 to close , to stop the injection.

As an example, when the first liquid in the outer tank 1012 flows into the circulation pipeline 105, and the third liquid level gauge 1015 detects that the liquid level in the outer tank drops from a preset level to a stable level, the controller can By controlling the opening of the sixth valve 1074 and closing of the fourth valve 1071, the first liquid is injected into the outer tank 1012 to replenish the liquid in the outer tank, and when the third liquid level gauge 1015 detects that the liquid in the outer tank reaches the preset level again When , control the sixth valve 1074 to close to stop the liquid infusion.

For example, when injecting acid, the fourth valve 1071 can be opened first, and the sixth valve 1074 can be closed, so that the acid liquid can be injected into the inner tank 1011 through the inner tank liquid inlet pipeline 1072. As the acid injection is carried out, the acid in the inner tank 1011 The liquid overflows into the outer tank 1012, and when the overflowing acid liquid reaches the preset liquid level, the fourth valve 1071 can be controlled to close, so as to avoid injecting too much acid liquid and overflowing to the outside of the cleaning tank.

When the overflowing acid liquid reaches the preset liquid level, it can enter the liquid circulation stage, and the acid liquid in the outer tank flows into the circulation pipeline for circulation. At this time, the liquid level in the outer tank drops to a height lower than the preset liquid level of the outer tank, and the liquid in the outer tank needs to be replenished. With the fourth valve 1071 kept closed, the sixth valve 1074 can be opened to inject the acid solution into the outer tank through the outer tank liquid inlet pipeline 1073 for replenishment. When the injected acid solution reaches the preset liquid level of the outer tank again , to control the sixth valve 1074 to close.

In one embodiment of the present invention, the circulation pipeline 105 includes an inner tank output pipeline 1051 connected to the inner tank 1011 and an outer tank output pipeline 1052 connected to the outer tank 1012; the inner tank output pipeline 1051 is provided with a seventh valve 10511 for controlling the on-off of the inner tank output pipeline 1051; the outer tank output pipeline 1052 is provided with an eighth valve 10521 for controlling the outer tank output pipeline 1052 on and off; the controller is used to control the opening of the seventh valve and the eighth valve in response to the first liquid discharge instruction or the second liquid discharge instruction; When the liquid level gauge detects that the inner tank 1011 is empty and the second liquid level gauge detects that the outer tank is empty, the seventh valve 10511 and the eighth valve 10521 are controlled to close.

As an example, the controller can control the seventh valve and the eighth valve to open when receiving the first liquid discharge instruction or the second liquid discharge instruction; when the first liquid level gauge detects that the inner tank 1011 is empty, and When the second liquid level gauge detects that the outer tank is empty, it can control the seventh valve and the eighth valve to close.

In one embodiment of the present invention, it also includes: a valve control circuit; the valve control circuit includes: a first liquid discharge control circuit 301 and a second liquid discharge control circuit 302; the first liquid discharge control circuit 301 is used for is used to control the on-off of the second valve 1031; the second liquid discharge control circuit 302 is used to control the on-off of the third valve 1041; the controller is used to control the first The discharge control circuit 301 is turned on to open the second valve 1031, and the second discharge control circuit 302 is disconnected to close the third valve 1041; the controller is used to respond to the second liquid The discharge command controls the first liquid discharge control circuit 301 to be turned off to close the second valve 1031 , and the second liquid discharge control circuit 302 to be turned on to open the third valve 1041 .

As an example, FIG. 3 is a principle diagram of acid discharge/drain mutual exclusion provided by an embodiment of the present invention. When receiving the acid discharge instruction, the controller can control the first liquid discharge control circuit 301 to be turned on, and the second liquid discharge control circuit 302 to be disconnected, so that the second valve 1031 for acid discharge is opened, and the second valve 1031 for discharge of acid is opened. The third valve 1041 of the valve is closed; when receiving the drainage instruction, the controller can control the first drainage control circuit 301 to be disconnected, and the second drainage control circuit 302 is turned on, so that the second valve 1031 used for acid drainage closed, and the third valve 1041 for draining is open.

In one embodiment of the present invention, the first liquid discharge control circuit 301 includes: a first relay 3011, a first liquid discharge switch 3012, and a second liquid discharge switch 3013; the second liquid discharge control circuit 302 includes : the second relay 3021, the third liquid discharge switch 3022, the fourth liquid discharge switch 3023; the first liquid discharge switch 3012 and the second liquid discharge switch 3013 are used to control the first liquid discharge control circuit 301 The first relay 3011 is used to control the first liquid discharge switch 3012 and the third liquid discharge switch 3022; the third liquid discharge switch 3022 and the fourth liquid discharge switch 3023 are used is used to control the on-off of the second liquid discharge control circuit 302; the second relay 3021 is used to control the second liquid discharge switch 3013 and the fourth liquid discharge switch 3023; the controller is used to respond to the first A liquid discharge command, controlling the first relay 3011 to be turned on and the second relay 3021 to be de-energized, so that the first relay 3011 controls the first liquid discharge switch 3012 to be closed, and the third liquid discharge switch 3022 is open, the second relay 3021 controls the second liquid discharge switch 3013 to close, and the fourth liquid discharge switch 3023 is open; the controller is used to control the first The relay 3011 is powered off, and the second relay 3021 is turned on, so that the first relay 3011 controls the first liquid discharge switch 3012 to be turned off, the third liquid discharge switch 3022 is closed, and the second relay 3021 The second liquid discharge switch 3013 is controlled to be turned off, and the fourth liquid discharge switch 3023 is controlled to be closed.

As an example, as shown in FIG. 3, it is a principle diagram of mutual exclusion of acid discharge/drainage provided by the embodiment of the present invention. The first drain switch 3012 can be a normally open switch of the first relay 3011, and the third drain switch 3022 may be a normally closed switch of the first relay 3011; when the first relay 3011 is turned on, the first relay 3011 may control the first liquid discharge switch 3012 to close, and control the third liquid discharge switch 3022 to open.

The second liquid discharge switch 3013 can be a normally closed switch of the second relay 3021, and the fourth liquid discharge switch 3023 can be a normally open switch of the second relay 3021; when the second relay 3021 is turned on, the second relay 3021 can control the The second liquid discharge switch 3013 is turned off, and the fourth liquid discharge switch 3023 is controlled to be closed.

As an example, when receiving an acid discharge instruction, the controller may control the first relay 3011 to be turned on, while the second relay 3021 is turned off, the first relay 3011 controls the first liquid discharge switch 3012 to be closed, and the second relay 3021 controls The second liquid discharge switch 3013 remains closed, so that the first liquid discharge control circuit 301 controlled by the first liquid discharge switch 3012 and the second liquid discharge switch 3013 is turned on, so that the second valve 1031 for acid discharge is opened; Simultaneously, the first relay 3011 controls the third liquid discharge switch 3022 to be disconnected, the second relay 3021 controls the fourth liquid discharge switch 3023 to remain disconnected, and the second row of fluids controlled by the third liquid discharge switch 3022 and the fourth liquid discharge switch 3023 The liquid control circuit 302 is disconnected, so that the third valve 1041 for draining is closed.

As an example, when a drainage instruction is received during acid discharge, the first relay 3011 and the second relay 3021 are turned on simultaneously, and the second relay 3021 controls the second discharge in the first discharge control circuit 301 The switch 3013 is turned off, so that the first liquid discharge control circuit 301 is turned off, so that the second valve 1031 for acid discharge is closed.

As an example, when receiving a drainage command during acid discharge, the controller may control the first liquid discharge control circuit 301 to be disconnected, so that the third valve 1041 for acid discharge is closed, and at the same time, control the second drain The liquid control circuit 302 is disconnected, so that the third valve 1041 for draining is closed, so as to avoid accidentally opening the drain valve during acid discharge.

As an example, after the controller controls the closing of the third valve 1041 for acid discharge and the third valve 1041 for water drainage, it may also generate an error message for requesting acid discharge to inform the user of an error in acid discharge.

As an example, when receiving a drainage instruction, the controller may control the second relay 3021 to be turned on, and the first relay 3011 to be turned off. The second relay 3021 controls the fourth liquid discharge switch 3023 to close, and the first relay 3011 controls the third liquid discharge switch 3022 to remain closed, so that the second liquid discharge controlled by the third liquid discharge switch 3022 and the fourth liquid discharge switch 3023 is controlled. The circuit 302 is turned on, so that the third valve 1041 for draining is opened; at the same time, the first relay 3011 controls the first drain switch 3012 to be turned off, and the second relay 3021 controls the second drain switch 3013 to be turned off, so that The first liquid discharge control circuit 301 controlled by a liquid discharge switch 3012 and the second liquid discharge switch 3013 is disconnected, so that the second valve 1031 for acid discharge is closed.

As an example, when an acid discharge command is received during the draining process, the first relay 3011 and the second relay 3021 are turned on simultaneously, and the first relay 3011 controls the third drain in the second drain control circuit 302 The switch 3022 is turned off, so that the second drainage control circuit 302 is turned off, so that the third valve 1041 for drainage is closed.

As an example, when receiving an acid discharge command during the drainage process, the controller may control the first discharge control circuit 301 to be disconnected, so that the third valve 1041 used for acid discharge is closed, and at the same time, control the second discharge control circuit 301 to be closed. The liquid control circuit 302 is disconnected, so that the third valve 1041 for draining is closed, so as to avoid accidentally opening the drain valve during the draining process.

As an example, after the controller controls the closing of the third valve 1041 for draining water and the third valve 1041 for discharging acid, it may also generate an error prompt for a draining request to inform the user of a draining error.

Fig. 4 is a schematic diagram of mutual exclusion of acid feed/water feed provided by the embodiment of the present invention.

In an embodiment of the present invention, the valve control circuit further includes: a first liquid inlet control circuit 401 and a second liquid inlet control circuit 402; the first liquid inlet control circuit 401 is used to control the fourth The on-off of the valve 1071; the second liquid inlet control circuit 402 is used to control the on-off of the fifth valve 1081; the controller is used to control the first liquid inlet in response to the first liquid injection instruction The control circuit 401 is turned on to open the fourth valve 1071, and the second liquid inlet control circuit 402 is turned off to close the fifth valve 1081; the controller is used to respond to the second liquid injection command , control the first liquid inlet control circuit 401 to be disconnected so that the fourth valve 1071 is closed, and the second liquid inlet control circuit 402 is turned on to make the fifth valve 1081 open.

As an example, when an acid feeding instruction is received, the controller may control the first liquid feeding control circuit 401 to be turned on, and the second liquid feeding control circuit 402 to be turned off, so that the fourth valve 1071 for acid feeding is opened , while the fifth valve 1081 for water intake is closed; when the water intake command is received, the controller can control the first liquid intake control circuit 401 to be disconnected, and the second liquid intake control circuit 402 to be turned on, so that the The fourth valve 1071 for acid feed is closed and the fifth valve 1081 for water feed is opened.

In one embodiment of the present invention, the first liquid inlet control circuit 401 includes: a third relay 4011, a first liquid inlet switch 4012, and a second liquid inlet switch 4013; the second liquid inlet control circuit 402 includes : the fourth relay 4021, the third liquid inlet switch 4022, the fourth liquid inlet switch 4023; the first liquid inlet switch 4012 and the second liquid inlet switch 4013 are used to control the first liquid inlet control circuit 401 The third relay 4011 is used to control the first liquid inlet switch 4012 and the third liquid inlet switch 4022; the third liquid inlet switch 4022 and the fourth liquid inlet switch 4023 are used is used to control the on-off of the second liquid inlet control circuit 402; the fourth relay 4021 is used to control the second liquid inlet switch 4013 and the fourth liquid inlet switch 4023; the controller is used to respond to the first A liquid discharge instruction, controlling the third relay 4011 to be turned on and the fourth relay 4021 to be de-energized, so that the third relay 4011 controls the first liquid inlet switch 4012 to be closed, and the third liquid inlet switch 4022 is turned off, the fourth relay 4021 controls the second liquid inlet switch 4013 to be closed, and the fourth liquid inlet switch 4023 is turned off; the controller is used to control the third liquid in response to the second liquid discharge command. The relay 4011 is powered off, and the second relay 4021 is turned on, so that the third relay 4011 controls the first liquid inlet switch 4012 to be turned off, the third liquid inlet switch 4022 is closed, and the fourth relay 4021 The second liquid inlet switch 4013 is controlled to be turned off, and the fourth liquid inlet switch 4023 is turned on.

As an example, as shown in Fig. 4, it is a schematic diagram of acid/water mutual exclusion provided by the embodiment of the present invention, the first liquid inlet switch 4012 can be a normally open switch of the third relay 4011, the third liquid inlet The switch 4022 may be a normally closed switch of the third relay 4011; when the third relay 4011 is turned on, the third relay 4011 may control the first liquid inlet switch 4012 to be closed and the third liquid inlet switch 4022 to be turned off.

The second liquid inlet switch 4013 can be a normally closed switch of the fourth relay 4021, and the fourth liquid inlet switch 4023 can be a normally open switch of the fourth relay 4021; when the fourth relay 4021 is turned on, the fourth relay 4021 can control the The second liquid inlet switch 4013 is turned off, and the fourth liquid inlet switch 4023 is controlled to be closed.

As an example, when receiving an acid feeding instruction, the controller can control the third relay 4011 to be turned on, while the fourth relay 4021 is turned off, the third relay 4011 controls the first liquid inlet switch 4012 to be closed, and the fourth relay 4021 controls The second liquid inlet switch 4013 remains closed, so that the first liquid inlet control circuit 401 controlled by the first liquid inlet switch 4012 and the second liquid inlet switch 4013 is turned on, so that the fourth valve 1071 for acid feeding is opened; At the same time, the third relay 4011 controls the third liquid inlet switch 4022 to turn off, the fourth relay 4021 controls the fourth liquid inlet switch 4023 to keep off, and the second liquid inlet switch 4023 controlled by the third liquid inlet switch 4022 and the fourth liquid inlet switch The liquid control circuit 402 is disconnected, so that the fifth valve 1081 for water intake is closed.

As an example, when a water intake command is received during the acid intake process, the third relay 4011 and the fourth relay 4021 are simultaneously turned on, and the fourth relay 4021 controls the second feed in the first liquid intake control circuit 401. The liquid switch 4013 is turned off, so that the first liquid inlet control circuit 401 is turned off, and the fourth valve 1071 for acid inlet is closed.

As an example, when receiving a water intake command during acid intake, the controller may control the first liquid intake control circuit 401 to be disconnected, so that the fifth valve 1081 for acid intake is closed, and at the same time, control the second The liquid inlet control circuit 402 is disconnected, so that the fifth valve 1081 for water inlet is closed, so as to avoid accidentally opening the water inlet valve during the acid inlet process.

As an example, after the controller controls the closing of the fifth valve 1081 for acid feeding and the fifth valve 1081 for water feeding, it may also generate an error message for requesting acid feeding to inform the user of an error in acid feeding.

As an example, when receiving a water inflow instruction, the controller may control the fourth relay 4021 to be turned on, and the third relay 4011 to be turned off. The fourth relay 4021 controls the fourth liquid inlet switch 4023 to close, and the third relay 4011 controls the third liquid inlet switch 4022 to remain closed, so that the second liquid inlet controlled by the third liquid inlet switch 4022 and the fourth liquid inlet switch 4023 is controlled. The circuit 402 is turned on, so that the fifth valve 1081 for water inlet is opened; at the same time, the third relay 4011 controls the first liquid inlet switch 4012 to be turned off, and the fourth relay 4021 controls the second liquid inlet switch 4013 to be turned off, so that the The first liquid inlet control circuit 401 controlled by the first liquid inlet switch 4012 and the second liquid inlet switch 4013 is disconnected, so that the fourth valve 1071 for acid inlet is closed.

As an example, when an acid feed command is received during the water feed process, the third relay 4011 and the fourth relay 4021 are simultaneously turned on, and the third relay 4011 controls the third feed valve in the second liquid feed control circuit 402. The liquid switch 4022 is turned off, so that the second liquid inlet control circuit 402 is turned off, so that the fifth valve 1081 for water inlet is closed.

As an example, when receiving an acid feeding instruction during water feeding, the controller may control the first liquid feeding control circuit 401 to be disconnected, so that the fifth valve 1081 for acid feeding is closed, and at the same time, control the second The liquid inlet control circuit 402 is disconnected, so that the fifth valve 1081 for water inlet is closed, so as to avoid opening the water inlet valve accidentally during the water inlet process.

As an example, after the controller controls the closing of the fifth valve 1081 for water intake and the fifth valve 1081 for acid intake, it may also generate a water intake request error report to inform the user of an error in water intake.

FIG. 5 is a schematic diagram of a liquid injection control provided by an embodiment of the present invention.

In one embodiment of the present invention, it further includes: a liquid injection power supply circuit 501 and a liquid injection control circuit 502; the liquid injection power supply circuit 501 is used to supply power to the fifth valve 1081; the liquid injection control circuit 502 Used to control the on-off of the liquid injection power supply circuit 501; the liquid injection control circuit 502 includes a fifth relay 5021, a first liquid injection switch 5022, a second liquid injection switch 5023, a third liquid injection switch 5024, and a fourth liquid injection switch 5024. Liquid injection switch 5025; the third liquid injection switch 5024 is connected in series with the fourth liquid injection switch 5025, the first liquid injection switch 5022 is connected in series with the second liquid injection switch 5023, and the first liquid injection switch 5025 is connected in series with the second liquid injection switch 5023. The series circuit of the switch 5022 and the second liquid injection switch 5023 is connected in parallel with the fourth liquid injection switch 5025; the liquid injection power supply circuit 501 includes a fifth liquid injection switch 5011; the fifth relay 5021 is used to control the The fourth liquid injection switch 5025 and the fifth liquid injection switch 5011; when the first liquid level gauge 1013 detects that the inner tank 1011 is empty, and the second liquid level gauge 1014 detects that the outer tank 1012 is empty , the controller controls the first liquid injection switch 5022, the second liquid injection switch 5023 and the third liquid injection switch 5024 to close, so that the liquid injection control circuit 502 is turned on; When the liquid injection control circuit 502 is turned on, the fifth relay 5021 is turned on and controls the fourth liquid injection switch 5024 and the fifth liquid injection switch 5025 to be closed, so that the liquid injection control circuit 502 maintains is turned on, the liquid injection power supply circuit 501 is turned on; when the third liquid level gauge 1015 detects that the liquid in the outer tank 1012 reaches a preset liquid level, the controller controls the third liquid injection switch 5024 is disconnected, so that the liquid injection control circuit 502 and the liquid injection power supply circuit 501 are disconnected.

In the embodiment of the present invention, if there is residual acid liquid in the cleaning tank 101 during water injection, the water injected into the cleaning tank 101 will not only fail to obtain pure water but also react with the remaining acid liquid to generate a large amount of heat, causing the pipeline to dissolve , collapsed. Therefore, it is necessary to ensure that the liquid in the cleaning tank 101 is drained before continuing to inject water.

As an example, the controller can control the liquid injection power supply circuit 501 to supply power by turning on the liquid injection control circuit 502, and then control the fifth valve 1081 for water injection to open; the controller can control the liquid injection by disconnecting the liquid injection control circuit 502. The power supply circuit 501 is disconnected, and then the fifth valve 1081 for water injection is controlled to be closed.

As an example, the first liquid injection switch 5022, the second liquid injection switch 5023, and the third liquid injection switch 5024 in the liquid injection control circuit 502 can be controlled by the first liquid level gauge 1013 and the second liquid level gauge 1014 respectively. , The third liquid level gauge 1015. When the first liquid level gauge 1013 detects that the liquid in the inner tank is empty, the controller can control the first liquid injection switch 5022 to close; when the second liquid level gauge 1014 detects that the liquid in the outer tank is empty (the third liquid level The meter 1015 detects that the preset liquid level is empty), the controller can control the second liquid injection switch 5023 to close,

As an example, the third liquid level gauge can be arranged on the upper part of the second liquid level gauge 1014 in the outer tank 1012. When the second liquid level gauge 1014 detects that the liquid in the outer tank is empty, the second liquid level in the outer tank will There is no liquid above the liquid level of the meter 1014, and the third liquid level meter 1015 detects that the preset liquid level is empty, thereby triggering the third liquid injection switch 5024 to close.

As an example, the first liquid injection switch 5022, the second liquid injection switch 5023 and the third liquid injection switch 5024 can be connected in series, and only when the first liquid injection switch 5022, the second liquid injection switch 5023 and the third liquid injection switch The liquid injection control circuit 502 could be turned on when 5024 were closed at the same time. Thereby new liquid can be injected under the condition that the liquid in the inner tank and the liquid in the outer tank are empty at the same time.

As an example, after both the liquid in the inner tank and the liquid in the outer tank are emptied, the liquid injection control circuit 502 and the liquid injection power supply circuit 501 are turned on, and the controller can inject water into the cleaning tank 101 according to the water injection command, and control the first liquid injection The switch 5022 and the second filling switch 5023 are disconnected.

As an example, when the liquid injection control circuit 502 is turned on, the fifth liquid injection switch 5025 remains closed, the fifth relay 5021 is turned on and controls the fourth liquid injection switch 5024 to be closed, so that the liquid injection control circuit 502 and The liquid injection power supply circuit 501 remains on; when the third liquid level gauge 1015 detects that the liquid in the outer tank 1012 reaches the preset liquid level, the controller can control the third liquid injection switch 5024 to be disconnected, so that the liquid injection The control circuit 502 is disconnected, and when the liquid injection control circuit is disconnected, the fifth relay is powered off and controls the fourth liquid injection switch 5024 and the fifth liquid injection switch 5011 to be disconnected, and the liquid injection control circuit is disconnected, so that the user can The fifth valve 1081 for water injection is closed.

In an embodiment of the present invention, the cleaning equipment includes: a cleaning tank, a pipeline, and a controller; the pipeline includes a converging pipeline, a first liquid discharge pipeline for discharging the first liquid, and a discharge pipeline for discharging the second liquid. The second discharge pipeline; one end of the converging pipeline collects the liquid to be discharged, and the other end is connected to the first liquid discharge pipeline and the second liquid discharge pipeline; the converging pipeline is provided with a first valve for controlling the flow of the converging pipeline on-off; the first liquid discharge pipeline is provided with a second valve, which is used to control the on-off of the first liquid discharge pipeline; the second liquid discharge pipeline is provided with a third valve, which is used to control the opening and closing of the second liquid discharge pipeline On-off; the controller is used to control the second valve to open and the third valve to close when injecting the first liquid into the cleaning tank; A discharge line is discharged; the controller is used to control the second valve to close and the third valve to open when the second liquid is injected into the cleaning tank; when receiving the second liquid discharge instruction, control the first valve to open so that the first A liquid is discharged from the second liquid discharge line. Through the T-shaped pipeline formed by the converging pipeline, the first liquid drainage pipeline and the second liquid drainage pipeline, the valve for acid discharge and the valve for drainage on the T-shaped pipeline are mutually exclusive, so that the valve for acid discharge and drainage All valves cannot be opened at the same time, and the discharge of liquid is determined by the valve on the converging pipeline, which effectively isolates the dissolution and collapse of the factory pipeline caused by human error discharge, eliminates potential safety hazards, and protects the safety of the system and personnel.

Having described preferred embodiments of embodiments of the present invention, additional changes and modifications to these embodiments can be made by those skilled in the art once the basic inventive concept is appreciated. Therefore, the appended claims are intended to be construed to cover the preferred embodiment and all changes and modifications which fall within the scope of the embodiments of the present invention.

Finally, it should also be noted that in this text, relational terms such as first and second etc. are only used to distinguish one entity or operation from another, and do not necessarily require or imply that these entities or operations, any such actual relationship or order exists. Furthermore, the term "comprises", "comprises" or any other variation thereof is intended to cover a non-exclusive inclusion such that a process, method, article, or terminal equipment comprising a set of elements includes not only those elements, but also includes elements not expressly listed. other elements identified, or also include elements inherent in such a process, method, article, or end-equipment. Without further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article or terminal device comprising said element.

Above, a kind of cleaning equipment provided by the present invention has been introduced in detail. In this paper, specific examples have been used to illustrate the principle and implementation of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its implementation. core idea; at the same time, for those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific implementation and scope of application. In summary, the content of this specification should not be construed as limiting the present invention .

Claims (13)

1. A cleaning device, characterized in that, comprising: a cleaning tank, a pipeline and a controller; The lines include a converging line, a first discharge line for discharging the first liquid, and a second discharge line for discharging the second liquid; One end of the converging pipeline collects the liquid to be discharged, and the other end is connected to the first liquid drainage pipeline and the second liquid drainage pipeline; The converging pipeline is provided with a first valve for controlling the on-off of the converging pipeline; The first liquid discharge pipeline is provided with a second valve, which is used to control the on-off of the first liquid discharge pipeline; The second liquid discharge pipeline is provided with a third valve, which is used to control the on-off of the second liquid discharge pipeline; The controller is used to control the second valve to open and the third valve to close when injecting the first liquid into the cleaning tank; and control the first valve when receiving the first liquid discharge command opening to allow the first liquid to drain from the first drain line; The controller is used to control the second valve to close and the third valve to open when injecting the second liquid into the cleaning tank; when receiving the second liquid discharge command, control the first valve open to allow the first liquid to drain from the second drain line. 2. The cleaning device according to claim 1, further comprising: a valve control circuit; The valve control circuit includes: a first liquid discharge control circuit and a second liquid discharge control circuit; The first liquid discharge control circuit is used to control the on-off of the second valve; The second liquid discharge control circuit is used to control the on-off of the third valve; The controller is used to control the first liquid discharge control circuit to be turned on to open the second valve in response to the first liquid discharge command, and the second liquid discharge control circuit to be turned off to make the third valve open. closure; The controller is configured to control the first liquid discharge control circuit to be turned off to close the second valve in response to the second liquid discharge command, and the second liquid discharge control circuit to be turned on to make the third valve Open. 3. The cleaning device according to claim 2, characterized in that, The first liquid discharge control circuit includes: a first relay, a first liquid discharge switch, and a second liquid discharge switch; The second liquid discharge control circuit includes: a second relay, a third liquid discharge switch, and a fourth liquid discharge switch; The first liquid discharge switch and the second liquid discharge switch are used to control the on-off of the first liquid discharge control circuit; the first relay is used to control the first liquid discharge switch and the second liquid discharge switch Three discharge switches; The third liquid discharge switch and the fourth liquid discharge switch are used to control the on-off of the second liquid discharge control circuit; the second relay is used to control the second liquid discharge switch and the first liquid discharge switch. Four drain switches; The controller is configured to control the first relay to be turned on and the second relay to be de-energized in response to the first liquid discharge command, so that the first relay controls the first liquid discharge switch to be closed, and the second relay The third liquid discharge switch is turned off, the second relay controls the second liquid discharge switch to be closed, and the fourth liquid discharge switch is turned off; The controller is configured to control the first relay to be powered off and the second relay to be turned on in response to the second liquid discharge command, so that the first relay controls the first liquid discharge switch to be turned off, and the The third liquid discharge switch is closed, the second relay controls the second liquid discharge switch to be turned off, and the fourth liquid discharge switch is closed. 4. The cleaning equipment according to claim 3, wherein the cleaning tank comprises an inner tank and an outer tank; a first liquid level gauge is arranged in the inner tank, and the first liquid level gauge is used to detect Whether there is liquid in the inner tank; a second liquid level gauge is provided in the outer tank, and the second liquid level gauge is used to detect whether there is liquid in the outer tank; During the discharge of the first liquid or the second liquid, when the first liquid level gauge detects that the inner tank is empty, and the second liquid level gauge detects that the outer tank is empty , the controller controls the first valve to close. 5. The cleaning device according to claim 4, wherein the pipeline further comprises: a first liquid inlet pipeline for injecting the first liquid and a second liquid inlet pipeline for injecting the second liquid. Inlet pipeline; The first liquid inlet pipeline is provided with a fourth valve, which is used to control the on-off of the first liquid inlet pipeline; The second liquid inlet pipeline is provided with a fifth valve, which is used to control the on-off of the second liquid inlet pipeline; The controller is configured to control the fourth valve to open and the fifth valve to close in response to a first liquid injection instruction, so that the first liquid is injected into the cleaning tank from the first liquid inlet pipeline; The controller is configured to control the fourth valve to close and the fifth valve to open in response to a second liquid injection instruction, so that the second liquid is injected into the cleaning tank from the second liquid inlet pipeline. 6. The cleaning device according to claim 5, wherein the valve control circuit further comprises: a first liquid inlet control circuit and a second liquid inlet control circuit; The first liquid inlet control circuit is used to control the on-off of the fourth valve; The second liquid inlet control circuit is used to control the on-off of the fifth valve; The controller is configured to, in response to the first liquid injection instruction, control the first liquid inlet control circuit to be turned on to open the fourth valve, and the second liquid inlet control circuit to be turned off to make the first liquid inlet control circuit open. Five valves closed; The controller is configured to control the first liquid inlet control circuit to be turned off to close the fourth valve in response to the second liquid injection instruction, and the second liquid inlet control circuit to be turned on to make the first liquid inlet control circuit turn on. Five valves open. 7. The cleaning device according to claim 6, characterized in that, The first liquid inlet control circuit includes: a third relay, a first liquid discharge switch, and a second liquid discharge switch; The second liquid inlet control circuit includes: a fourth relay, a third liquid inlet switch, and a fourth liquid inlet switch; The first liquid inlet switch and the second liquid inlet switch are used to control the on-off of the first liquid inlet control circuit; the third relay is used to control the first liquid inlet switch and the second liquid inlet switch. Three liquid inlet switches; The third liquid inlet switch and the fourth liquid inlet switch are used to control the on-off of the second liquid inlet control circuit; the fourth relay is used to control the second liquid inlet switch and the first liquid inlet switch. Four liquid inlet switches; The controller is configured to control the third relay to be turned on and the fourth relay to be turned off in response to the first liquid discharge command, so that the third relay controls the first liquid inlet switch to be closed, and the first liquid inlet switch is controlled to be closed. The third liquid inlet switch is turned off, the fourth relay controls the second liquid inlet switch to be closed, and the fourth liquid inlet switch is turned off; The controller is configured to control the third relay to be powered off and the second relay to be turned on in response to the second liquid discharge command, so that the third relay controls the first liquid inlet switch to be turned off, and the The third liquid inlet switch is closed, the fourth relay controls the second liquid inlet switch to be turned off, and the fourth liquid inlet switch is closed. 8. The cleaning device according to claim 5, wherein a third liquid level gauge is provided in the outer tank, and the third liquid level gauge is used to detect whether the liquid in the outer tank reaches a preset liquid level; During the process of injecting the first liquid, when the third liquid level gauge detects that the liquid in the outer tank reaches a preset liquid level, the controller controls the fourth valve to close to stop injecting the first liquid; In the process of injecting the second liquid, when the third liquid level gauge detects that the liquid in the outer tank reaches a preset liquid level, the controller controls the fifth valve to close to stop injecting the second liquid. second liquid. 9. The cleaning device according to claim 8, wherein the pipeline further comprises: a circulation pipeline and at least one connecting pipeline connected to the circulation pipeline; The circulation pipeline is used to circulate and inject the liquid flowing out from the cleaning tank into the cleaning tank; One end of the converging pipeline is connected to the at least one connecting pipeline to collect the liquid that needs to be discharged from the circulation pipeline, and the other end is connected to the first liquid drainage pipeline and the second liquid drainage pipeline. 10. The cleaning device according to claim 9, wherein the first liquid inlet pipeline comprises an inner tank liquid inlet pipeline and an outer tank liquid inlet pipeline; The inner tank liquid inlet pipeline is inserted into the inner tank of the cleaning tank for injecting the first liquid into the inner tank, the inner tank liquid inlet pipeline is provided with the fourth valve, the first Four valves are used to control the on-off of the liquid inlet pipeline of the inner tank; the first liquid inlet pipeline also includes; The outer tank liquid inlet pipeline is inserted into the outer tank of the cleaning tank for injecting the first liquid into the outer tank, and the outer tank liquid inlet pipeline is provided with a sixth valve; The controller is configured to control the fourth valve to open and the sixth valve to close in response to the first liquid injection instruction, so that the first liquid is injected into the inner tank; The controller is used for when the first liquid in the outer tank flows into the circulation pipeline, so that the third liquid level gauge detects that the liquid level of the outer tank drops from the preset liquid level to a stable When the liquid level is lower than the liquid level, the sixth valve is controlled to open, and the fourth valve is closed, so that the first liquid is injected into the outer tank, and when the third liquid level gauge detects that the liquid in the outer tank When the preset liquid level is reached again, the sixth valve is controlled to be closed. 11. The cleaning device according to claim 10, characterized in that, The circulation pipeline includes an inner tank output pipeline connected to the inner tank and an outer tank output pipeline connected to the outer tank; The output pipeline of the inner tank is provided with a seventh valve, which is used to control the on-off of the output pipeline of the inner tank; The output pipeline of the outer tank is provided with an eighth valve, which is used to control the on-off of the output pipeline of the outer tank; The controller is used to control the eighth valve to open and the seventh valve to close when the third liquid level gauge detects that the liquid in the outer tank reaches a preset liquid level, so that the outer tank The first liquid in flows into the circulation pipeline; The controller is configured to control the opening of the seventh valve and the eighth valve in response to the first liquid discharge command or the second liquid discharge command; The controller is used to control the seventh valve and the first tank when the first liquid level gauge detects that the inner tank is empty and the second liquid level gauge detects that the outer tank is empty. Eight valves are closed. 12. The cleaning device according to claim 8, further comprising: a liquid injection power supply circuit and a liquid injection control circuit; The liquid injection power supply circuit is used to supply power to the fifth valve; The liquid injection control circuit is used to control the on-off of the liquid injection power supply circuit; The liquid injection control circuit includes a fifth relay, a first liquid injection switch, a second liquid injection switch, a third liquid injection switch, and a fourth liquid injection switch; the third liquid injection switch and the fourth liquid injection switch In series, the first liquid injection switch is connected in series with the second liquid injection switch, and the series circuit of the first liquid injection switch and the second liquid injection switch is connected in parallel with the fourth liquid injection switch; The liquid injection power supply circuit includes a fifth liquid injection switch; The fifth relay is used to control the fourth filling switch and the fifth filling switch; When the first liquid level gauge detects that the inner tank is empty and the second liquid level gauge detects that the outer tank is empty, the controller controls the first liquid injection switch, the second liquid injection switch and the third liquid injection switch are closed, so that the liquid injection control circuit is turned on; when the liquid injection control circuit is turned on, the fifth relay is turned on and controls the fourth liquid injection The switch and the fifth liquid injection switch are closed, so that the liquid injection control circuit remains turned on, and the liquid injection power supply circuit is turned on; When the third liquid level gauge detects that the liquid in the outer tank reaches the preset liquid level, the controller controls the third liquid injection switch to be turned off, so that the liquid injection control circuit and the injection The liquid control circuit is disconnected. 13. The cleaning equipment according to claim 9, characterized in that, the circulation pipeline is provided with a circulation pump and a filter; The circulation pump is used to pump the liquid flowing out from the cleaning tank into the filter; The filter is used to filter the liquid, and output the filtered liquid to the cleaning tank; The controller is used for controlling the circulation pump to be turned on in response to a cleaning instruction.

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