CN118814138A - A preparation system for silicon-oxygen negative electrode materials for lithium batteries - Google Patents
A preparation system for silicon-oxygen negative electrode materials for lithium batteries Download PDFInfo
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- OBNDGIHQAIXEAO-UHFFFAOYSA-N [O].[Si] Chemical compound [O].[Si] OBNDGIHQAIXEAO-UHFFFAOYSA-N 0.000 title claims abstract description 32
- 238000002360 preparation method Methods 0.000 title claims abstract description 30
- 229910052744 lithium Inorganic materials 0.000 title claims abstract description 22
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 title claims abstract description 21
- 239000007773 negative electrode material Substances 0.000 title description 8
- 238000001179 sorption measurement Methods 0.000 claims abstract description 72
- 238000009413 insulation Methods 0.000 claims abstract description 57
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 43
- 238000003860 storage Methods 0.000 claims abstract description 34
- 230000002093 peripheral effect Effects 0.000 claims abstract description 27
- 239000012495 reaction gas Substances 0.000 claims abstract description 24
- 238000004140 cleaning Methods 0.000 claims abstract description 19
- 239000010405 anode material Substances 0.000 claims abstract 8
- 239000007789 gas Substances 0.000 claims description 34
- 238000007789 sealing Methods 0.000 claims description 23
- 239000012159 carrier gas Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 10
- 238000000605 extraction Methods 0.000 claims description 7
- 238000005086 pumping Methods 0.000 claims description 6
- 238000005485 electric heating Methods 0.000 claims description 4
- 230000003197 catalytic effect Effects 0.000 claims description 3
- 239000003999 initiator Substances 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims 3
- 230000000149 penetrating effect Effects 0.000 claims 3
- 239000010406 cathode material Substances 0.000 claims 1
- 238000007790 scraping Methods 0.000 claims 1
- 239000002994 raw material Substances 0.000 abstract description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 13
- 150000001875 compounds Chemical class 0.000 abstract description 9
- 230000001360 synchronised effect Effects 0.000 abstract description 4
- 239000000377 silicon dioxide Substances 0.000 abstract 4
- 238000000151 deposition Methods 0.000 description 24
- 230000008021 deposition Effects 0.000 description 24
- 239000000463 material Substances 0.000 description 15
- 238000010586 diagram Methods 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- 239000002131 composite material Substances 0.000 description 7
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 239000002912 waste gas Substances 0.000 description 5
- 238000009434 installation Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 230000002687 intercalation Effects 0.000 description 2
- 238000009830 intercalation Methods 0.000 description 2
- 229910001416 lithium ion Inorganic materials 0.000 description 2
- FUJCRWPEOMXPAD-UHFFFAOYSA-N Li2O Inorganic materials [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 1
- 229910018557 Si O Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000009831 deintercalation Methods 0.000 description 1
- XUCJHNOBJLKZNU-UHFFFAOYSA-M dilithium;hydroxide Chemical compound [Li+].[Li+].[OH-] XUCJHNOBJLKZNU-UHFFFAOYSA-M 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000004146 energy storage Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- -1 lithium silicates Chemical class 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4407—Cleaning of reactor or reactor parts by using wet or mechanical methods
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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Abstract
Description
技术领域Technical Field
本发明涉及锂电子电池制备技术领域,更具体地说,它涉及一种锂电池硅氧负极材料的制备系统。The present invention relates to the technical field of lithium electronic battery preparation, and more specifically, to a preparation system for lithium battery silicon oxygen negative electrode material.
背景技术Background Art
锂离子电池因高能量密度、优异的循环寿命、高工作电压、较低的自放电率、环境友好等突出优势,在当下便携式电子设备电源领域占据着主导地位,也是电动汽车和储能领域的理想电源。Lithium-ion batteries occupy a dominant position in the field of power supply for portable electronic devices due to their outstanding advantages such as high energy density, excellent cycle life, high operating voltage, low self-discharge rate, and environmental friendliness. They are also an ideal power source for electric vehicles and energy storage.
一氧化硅(SiO)也具有良好脱嵌锂能力,它在嵌锂状态下体积膨胀较晶体硅小(约200 %),具有较好的循环稳定性和较高的可逆容量。单质Si作为活性材料与锂离子进一步发生电化学反应。反应生成的Si决定了硅基材料的电化学储锂容量;Li2O与锂硅酸盐不参与反应,但是能够作为缓冲介质抑制硅的体积膨胀,从而提升材料循环性能。Silicon monoxide (SiO) also has good lithium intercalation and deintercalation capabilities. Its volume expansion in the lithium intercalation state is smaller than that of crystalline silicon (about 200%), and it has good cycle stability and high reversible capacity. As an active material, single Si further reacts electrochemically with lithium ions. The Si generated by the reaction determines the electrochemical lithium storage capacity of silicon-based materials; Li2O and lithium silicates do not participate in the reaction, but can act as a buffer medium to inhibit the volume expansion of silicon, thereby improving the material's cycle performance.
目前锂电池Si-O负极材料的制备多采用化学气相沉积(CVD)工艺,然而,由于沉积受体碳基体在CVD反应室内只能静态沉积,仅在沉积受体表面附着有一层沉积物,沉积复合物在沉积受体表面覆盖不均匀,无法彻底解决沉积复合物的分散问题。At present, the preparation of Si-O negative electrode materials for lithium batteries mostly adopts chemical vapor deposition (CVD) process. However, since the deposition acceptor carbon matrix can only be statically deposited in the CVD reaction chamber, only a layer of sediment is attached to the surface of the deposition acceptor, and the deposition composite is unevenly covered on the surface of the deposition acceptor, and the dispersion problem of the deposition composite cannot be completely solved.
发明内容Summary of the invention
针对现有技术存在的不足,本发明的目的在于提供一种锂电池硅氧负极材料的制备系统,通过将粉碎后的硅氧原材料堆积到锥形储料罐中,吸附部内部负压将硅氧原材料吸附在吸附槽中,使得吸附筒周侧面形成包裹层,通过控制各组吸附部的同步升降,将定量的硅氧原材料送进制备腔中,反应气体在化学气相沉积炉反应产生沉积复合物通过载气引入制备腔中,与包裹层反应形成含碳薄膜,代替传统反应气体直接与堆积在一起的硅氧原材料反应的方式,增加了硅氧原材料与反应气体的接触面积,提高沉积复合物在沉积受体表面覆盖的均匀性。In view of the shortcomings of the prior art, the purpose of the present invention is to provide a preparation system for silicon oxygen negative electrode materials for lithium batteries. The crushed silicon oxygen raw materials are piled up in a conical storage tank, and the negative pressure inside the adsorption part adsorbs the silicon oxygen raw materials in the adsorption groove, so that a wrapping layer is formed on the side surface of the adsorption cylinder. By controlling the synchronous lifting and lowering of each group of adsorption parts, a certain amount of silicon oxygen raw materials are delivered to the preparation chamber. The reaction gas reacts in the chemical vapor deposition furnace to produce a deposition composite, which is introduced into the preparation chamber through the carrier gas and reacts with the wrapping layer to form a carbon-containing film, replacing the traditional method of directly reacting the reaction gas with the stacked silicon oxygen raw materials, thereby increasing the contact area between the silicon oxygen raw materials and the reaction gas, and improving the uniformity of the deposition composite on the surface of the deposition receptor.
为实现上述目的,本发明提供了如下技术方案:To achieve the above object, the present invention provides the following technical solutions:
一种锂电池硅氧负极材料的制备系统,包括化学气相沉积装置;所述化学气相沉积装置包括相互平行的上隔热板以及下隔热板;所述上隔热板以及下隔热板之间同轴心固定有化学气相沉积炉以及环形隔热板;所述上隔热板、下隔热板以及环形隔热板之间形成制备腔。A preparation system for silicon-oxygen negative electrode materials for lithium batteries, comprising a chemical vapor deposition device; the chemical vapor deposition device comprises an upper insulation plate and a lower insulation plate parallel to each other; a chemical vapor deposition furnace and an annular insulation plate are coaxially fixed between the upper insulation plate and the lower insulation plate; a preparation cavity is formed between the upper insulation plate, the lower insulation plate and the annular insulation plate.
所述上隔热板顶部固定有锥形储料罐;所述锥形储料罐内底面均匀开设有导向槽;所述导向槽内部滑动设置有吸附部;所述吸附部周侧面滑动设置有清理部;所述上隔热板内顶部均匀固定有若干与对应清理部相适配的导向部。A conical storage tank is fixed on the top of the upper insulation board; guide grooves are evenly arranged on the inner bottom surface of the conical storage tank; an adsorption part is slidably arranged inside the guide groove; a cleaning part is slidably arranged on the peripheral side of the adsorption part; and a plurality of guide parts matching the corresponding cleaning parts are evenly fixed on the inner top of the upper insulation board.
所述上隔热板与下隔热板之间均匀贯穿转动设置有若干转轴;所述清理部包括套环;所述套环周侧面固定有U形板;所述U形板侧面固定有延伸杆;所述延伸杆端部固定有第一球头;所述转轴周侧面开设有与对应第一球头相适配的螺旋槽。A number of rotating shafts are evenly penetrated and rotated between the upper insulation plate and the lower insulation plate; the cleaning part includes a collar; a U-shaped plate is fixed to the side surface of the collar; an extension rod is fixed to the side surface of the U-shaped plate; a first ball head is fixed to the end of the extension rod; a spiral groove matching the corresponding first ball head is opened on the side surface of the rotating shaft.
相邻所述转轴周侧面分别固定有第一收纳盘、第二收纳盘;所述第一收纳盘置于第二收纳盘下方;所述环形隔热板内周侧面、化学气相沉积炉外周侧面均匀开设有若干与对应第一收纳盘、第二收纳盘相适配的弧形槽。The adjacent side surfaces of the rotating shaft are respectively fixed with a first storage tray and a second storage tray; the first storage tray is placed below the second storage tray; the inner side surface of the annular heat insulation plate and the outer side surface of the chemical vapor deposition furnace are evenly provided with a number of arc grooves matching the corresponding first storage tray and the second storage tray.
本发明进一步设置为:所述锥形储料罐顶部通过紧固螺栓固定有密封盖;所述密封盖顶部依次安装有控制器以及电动推杆;所述电动推杆伸缩端固定有挡板;所述挡板底面固定有竖杆。The present invention is further configured as follows: a sealing cover is fixed to the top of the conical storage tank by fastening bolts; a controller and an electric push rod are installed on the top of the sealing cover in sequence; a baffle is fixed to the telescopic end of the electric push rod; and a vertical rod is fixed to the bottom surface of the baffle.
所述密封盖表面对称固定有滑杆;所述竖杆底端固定有与两滑杆滑动配合的集气环;所述集气环周侧面对称固定有耳板;所述耳板表面开设有与滑杆滑动配合的滑孔。Slide rods are symmetrically fixed on the surface of the sealing cover; a gas collecting ring that slidably cooperates with the two slide rods is fixed at the bottom end of the vertical rod; ear plates are symmetrically fixed on the circumferential side of the gas collecting ring; and sliding holes that slidably cooperate with the slide rods are opened on the surface of the ear plates.
所述集气环周侧面连通设置有抽气管;所述抽气管与外部真空泵通过软管连接;所述控制器输出端分别与电动推杆以及外部真空泵通过电性连接。An exhaust pipe is provided on the circumferential side of the gas collecting ring; the exhaust pipe is connected to an external vacuum pump through a hose; and the output end of the controller is electrically connected to the electric push rod and the external vacuum pump respectively.
本发明进一步设置为:所述吸附部包括吸附筒;所述吸附筒周侧面固定有与U形板滑动配合的滑轨,且其顶端与集气环底面之间连通设置有输气管。The present invention is further configured as follows: the adsorption portion includes an adsorption cylinder; a slide rail that slidably cooperates with the U-shaped plate is fixed to the circumferential side of the adsorption cylinder, and an air supply pipe is provided between the top end thereof and the bottom surface of the gas collecting ring.
所述密封盖顶部均匀开设有若干与输气管滑动配合的限位孔;所述导向槽内壁开设有与滑轨滑动配合的滑槽。A plurality of limiting holes which are slidably matched with the gas delivery pipe are evenly arranged on the top of the sealing cover; a sliding groove which is slidably matched with the sliding rail is arranged on the inner wall of the guide groove.
所述吸附筒周侧面均匀开设有若干吸附槽;所述吸附槽内壁均匀开设有若干吸附孔。A plurality of adsorption grooves are evenly arranged on the side surface of the adsorption cylinder; and a plurality of adsorption holes are evenly arranged on the inner wall of the adsorption groove.
本发明进一步设置为:所述延伸杆内部滑动设置有转环;所述转环两相对侧面均固定有与延伸杆内部滑动配合的环形轨;所述转环内周侧面均匀固定有若干与延伸杆内部滑动配合的曲面导板。The present invention is further configured as follows: a rotating ring is slidably arranged inside the extension rod; annular rails that slide with the extension rod are fixed on two opposite sides of the rotating ring; and a plurality of curved guide plates that slide with the extension rod are evenly fixed on the inner side of the rotating ring.
所述套环与吸附筒滑动配合;所述套环周侧面均匀贯穿滑动设置有若干导杆;所述导杆一端固定有与吸附槽滑动配合的刮板,且其另一端固定有第二球头;所述第二球头与套环外周侧面之间固定有套设在对应导杆上的复位弹簧。The collar is in sliding cooperation with the adsorption cylinder; a plurality of guide rods are evenly and slidably arranged on the circumferential side of the collar; a scraper which is in sliding cooperation with the adsorption groove is fixed on one end of the guide rod, and a second ball head is fixed on the other end; a return spring which is sleeved on the corresponding guide rod is fixed between the second ball head and the outer circumferential side of the collar.
本发明进一步设置为:所述延伸杆周侧面固定有与套环同轴心的弧形杆;所述弧形杆端部固定有挡块;所述转环外周侧面固定有与弧形杆滑动配合的连接板;所述连接板端部固定有第三球头。The present invention is further configured as follows: an arc-shaped rod coaxial with the ring is fixed on the peripheral side of the extension rod; a stopper is fixed on the end of the arc-shaped rod; a connecting plate slidingly matched with the arc-shaped rod is fixed on the outer peripheral side of the rotating ring; and a third ball head is fixed on the end of the connecting plate.
所述导向部包括从上往下与套环同轴心的弧形固定板、斜弧形导板以及直弧形导板;所述连接板与延伸杆之间固定有套设在弧形杆上的弧形弹簧。The guide part comprises an arc-shaped fixing plate, an oblique arc-shaped guide plate and a straight arc-shaped guide plate which are coaxial with the collar from top to bottom; an arc-shaped spring sleeved on the arc-shaped rod is fixed between the connecting plate and the extension rod.
本发明进一步设置为:所述转轴顶部固定有从动齿轮;所述上隔热板顶部转动设置有环形板;所述环形板内周侧面固定有与各从动齿轮啮合配合的内齿圈。The present invention is further configured as follows: a driven gear is fixed on the top of the rotating shaft; an annular plate is rotatably arranged on the top of the upper heat insulation plate; an inner gear ring meshing with each driven gear is fixed on the inner circumferential side of the annular plate.
所述上隔热板顶部安装有与控制器输出端通过电性连接的伺服电机;所述伺服电机输出端固定有驱动齿轮;所述环形板外周侧面固定有与驱动齿轮啮合配合的外齿圈。A servo motor electrically connected to the output end of the controller is installed on the top of the upper heat insulation plate; a driving gear is fixed to the output end of the servo motor; and an outer gear ring meshing with the driving gear is fixed to the outer peripheral side of the annular plate.
本发明进一步设置为:所述化学气相沉积炉内部安装有与控制器通过输出端通过电性连接的电加热丝,且其内部安装有与控制器输入端通过电性连接的温度传感器;所述化学气相沉积炉内部放置有催化引发剂。The present invention is further configured as follows: an electric heating wire electrically connected to the controller via an output end is installed inside the chemical vapor deposition furnace, and a temperature sensor electrically connected to the controller input end is installed inside the chemical vapor deposition furnace; a catalytic initiator is placed inside the chemical vapor deposition furnace.
所述化学气相沉积炉内周侧面均匀贯穿设置有排气管;所述上隔热板顶部贯穿连通设置有废气输气管;所述废气输气管与外部废气抽气泵抽气端通过输气管相连。Exhaust pipes are evenly arranged on the inner side of the chemical vapor deposition furnace; an exhaust gas pipeline is arranged on the top of the upper insulation board; the exhaust gas pipeline is connected to the exhaust end of the external exhaust gas extraction pump through the pipeline.
所述环形隔热板外周侧面均匀贯穿设置有若干抽料管;所述抽料管与外部抽料泵通过输料管相连。A plurality of pumping pipes are evenly arranged through the outer peripheral side of the annular heat insulation plate; the pumping pipes are connected to an external pumping pump through a feed pipe.
本发明进一步设置为:所述上隔热板顶部开设有与化学气相沉积炉连通的安装口;所述安装口通过紧固螺栓固定安装有气体供给装置。The present invention is further configured as follows: a mounting opening connected to the chemical vapor deposition furnace is provided on the top of the upper heat insulation plate; and a gas supply device is fixedly installed on the mounting opening by fastening bolts.
所述气体供给装置包括盖合在安装口中的密封板;所述密封板表面固定有支撑板;所述支撑板顶部依次固定有反应气体供应罐、载体气体供应罐;所述反应气体供应罐、载体气体供应罐上均设置有贯穿密封板的送气管;两所述送气管上均设置有与控制器通过电性连接的电磁阀。The gas supply device includes a sealing plate covering the mounting opening; a support plate is fixed on the surface of the sealing plate; a reaction gas supply tank and a carrier gas supply tank are fixed on the top of the support plate in sequence; the reaction gas supply tank and the carrier gas supply tank are both provided with air supply pipes passing through the sealing plate; and both air supply pipes are provided with solenoid valves electrically connected to the controller.
本发明的优点是:The advantages of the present invention are:
1、本发明通过将粉碎后的硅氧原材料堆积到锥形储料罐中,吸附部内部负压将硅氧原材料吸附在吸附槽中,使得吸附筒周侧面形成包裹层,通过控制各组吸附部的同步升降,将定量的硅氧原材料送进制备腔中,反应气体在化学气相沉积炉反应产生沉积复合物通过载气引入制备腔中,与包裹层反应形成含碳薄膜,代替传统反应气体直接与堆积在一起的硅氧原材料反应的方式,增加了硅氧原材料与反应气体的接触面积,提高沉积复合物在沉积受体表面覆盖的均匀性。1. The present invention accumulates the crushed silicon-oxygen raw materials into a conical storage tank, and the negative pressure inside the adsorption part adsorbs the silicon-oxygen raw materials into the adsorption groove, so that a wrapping layer is formed on the side surface of the adsorption cylinder. A fixed amount of silicon-oxygen raw materials is delivered into the preparation chamber by controlling the synchronous lifting and lowering of each group of adsorption parts. The reaction gas reacts in the chemical vapor deposition furnace to produce a deposition compound, which is introduced into the preparation chamber through the carrier gas and reacts with the wrapping layer to form a carbon-containing film, thereby replacing the traditional method in which the reaction gas directly reacts with the accumulated silicon-oxygen raw materials, thereby increasing the contact area between the silicon-oxygen raw materials and the reaction gas, and improving the uniformity of the deposition compound covering the surface of the deposition receptor.
2、本发明形成含碳薄膜后,控制驱动齿轮转动,带动各组从动齿轮转动,从而带动各组转轴连同其上的螺旋槽转动,转动的螺旋槽带动第一球头下降,从而带动清理部中的刮板对吸附槽中的物料进行刮除,此过程中,各组收纳盘同步转动,使得被刮下来的物料均匀地铺设在对应的收纳盘表面继续与沉积复合物反应,进一步地提高沉积复合物在沉积受体表面覆盖的均匀性。2. After the carbon-containing film is formed in the present invention, the driving gear is controlled to rotate, driving each group of driven gears to rotate, thereby driving each group of rotating shafts together with the spiral grooves thereon to rotate. The rotating spiral grooves drive the first ball head to descend, thereby driving the scraper in the cleaning part to scrape the material in the adsorption tank. During this process, each group of storage trays rotate synchronously, so that the scraped material is evenly laid on the surface of the corresponding storage tray to continue to react with the deposition compound, further improving the uniformity of the deposition compound covering the surface of the deposition receptor.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为本发明的一种锂电池硅氧负极材料的制备系统的结构示意图。FIG. 1 is a schematic structural diagram of a system for preparing silicon-oxygen negative electrode materials for lithium batteries according to the present invention.
图2为本发明的图1的正视视角下的结构示意图。FIG. 2 is a schematic diagram of the structure of FIG. 1 of the present invention from a front view perspective.
图3为本发明的图2的A区域放大图。FIG. 3 is an enlarged view of the A region of FIG. 2 according to the present invention.
图4为本发明的图1的另一角度下的结构示意图。FIG. 4 is a schematic structural diagram of FIG. 1 at another angle of the present invention.
图5为本发明的化学气相沉积装置的结构示意图。FIG. 5 is a schematic structural diagram of a chemical vapor deposition device according to the present invention.
图6为本发明的吸附部的结构示意图。FIG. 6 is a schematic structural diagram of the adsorption portion of the present invention.
图7为本发明的清理部的结构示意图。FIG. 7 is a schematic structural diagram of a cleaning unit of the present invention.
图8为本发明的导向部的结构示意图。FIG. 8 is a schematic structural diagram of a guide portion of the present invention.
图9为本发明的吸附部、清理部以及导向部装配体的结构示意图。FIG. 9 is a schematic structural diagram of the adsorption part, cleaning part and guide part assembly of the present invention.
图10为本发明的气体供给装置的结构示意图。FIG. 10 is a schematic structural diagram of a gas supply device according to the present invention.
图11为本发明的集气环的结构示意图。FIG. 11 is a schematic structural diagram of the gas collecting ring of the present invention.
图中:1、化学气相沉积装置;2、上隔热板;3、下隔热板;4、化学气相沉积炉;5、环形隔热板;6、锥形储料罐;7、导向槽;8、吸附部;9、清理部;10、导向部;11、转轴;12、套环;13、U形板;14、延伸杆;15、第一球头;16、螺旋槽;17、第一收纳盘;18、第二收纳盘;19、密封盖;20、控制器;21、电动推杆;22、挡板;23、竖杆;24、滑杆;25、集气环;26、耳板;27、滑孔;28、抽气管;29、吸附筒;30、滑轨;31、输气管;32、限位孔;33、弧形槽;34、滑槽;35、吸附槽;36、吸附孔;37、转环;38、环形轨;39、曲面导板;40、导杆;41、刮板;42、第二球头;43、复位弹簧;44、弧形杆;45、挡块;46、连接板;47、第三球头;48、弧形固定板;49、斜弧形导板;50、直弧形导板;51、弧形弹簧;52、从动齿轮;53、环形板;54、伺服电机;55、驱动齿轮;56、送气管;57、载体气体供应罐;58、排气管;59、抽料管;60、安装口;61、气体供给装置;62、密封板;63、支撑板;64、反应气体供应罐;65、废气输气管。In the figure: 1. chemical vapor deposition device; 2. upper heat insulation board; 3. lower heat insulation board; 4. chemical vapor deposition furnace; 5. annular heat insulation board; 6. conical storage tank; 7. guide groove; 8. adsorption part; 9. cleaning part; 10. guide part; 11. rotating shaft; 12. sleeve ring; 13. U-shaped plate; 14. extension rod; 15. first ball head; 16. spiral groove; 17. first storage tray; 18. second storage tray; 19. sealing cover; 20. controller; 21. electric push rod; 22. baffle; 23. vertical rod; 24. slide rod; 25. gas collecting ring; 26. ear plate; 27. slide hole; 28. exhaust pipe; 29. adsorption cylinder; 30. slide rail; 31. gas pipe; 32. limit hole; 33. arc groove; 34. slide Groove; 35, adsorption groove; 36, adsorption hole; 37, swivel; 38, annular rail; 39, curved guide plate; 40, guide rod; 41, scraper; 42, second ball head; 43, return spring; 44, arc rod; 45, stopper; 46, connecting plate; 47, third ball head; 48, arc fixing plate; 49, oblique arc guide plate; 50, straight arc guide plate; 51, arc spring; 52, driven gear; 53, annular plate; 54, servo motor; 55, driving gear; 56, air supply pipe; 57, carrier gas supply tank; 58, exhaust pipe; 59, extraction pipe; 60, installation port; 61, gas supply device; 62, sealing plate; 63, support plate; 64, reaction gas supply tank; 65, exhaust gas pipeline.
具体实施方式DETAILED DESCRIPTION
需要说明的是,在不冲突的情况下,本申请中的实施例及实施例中的特征可以相互结合。下面将参考附图并结合实施例来详细说明本发明。It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application may be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.
需要指出的是,除非另有指明,本申请使用的所有技术和科学术语具有与本申请所属技术领域的普通技术人员通常理解的相同含义。It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meanings as commonly understood by ordinary technicians in the technical field to which this application belongs.
本发明中,在未作相反说明的情况下,使用的方位如“上、下”通常是针对附图所示的方向而言,或者是针对竖直、垂直或重力方向上而言的;同样地,为便于理解和描述,“左、右”通常是针对附图所示的左、右;“内、外”是指相对于各部件本身的轮廓的内、外,但上述方位词并不用于限制本发明。In the present invention, unless otherwise specified, the directions used, such as "up" and "down", usually refer to the directions shown in the drawings, or to the vertical, perpendicular or gravity directions; similarly, for ease of understanding and description, "left" and "right" usually refer to the left and right shown in the drawings; "inside" and "outside" refer to the inside and outside relative to the outline of each component itself, but the above-mentioned directions are not used to limit the present invention.
实施例一,请参阅图1-11,本发明提供以下技术方案:Embodiment 1, please refer to Figures 1-11, the present invention provides the following technical solutions:
一种锂电池硅氧负极材料的制备系统,具体地,包括化学气相沉积装置1;化学气相沉积装置1包括相互平行的上隔热板2以及下隔热板3;上隔热板2以及下隔热板3之间同轴心固定有化学气相沉积炉4以及环形隔热板5;上隔热板2、下隔热板3以及环形隔热板5之间形成制备腔;上隔热板2顶部固定有锥形储料罐6;锥形储料罐6内底面均匀开设有导向槽7;导向槽7内部滑动设置有吸附部8;吸附部8周侧面滑动设置有清理部9;上隔热板2内顶部均匀固定有若干与对应清理部9相适配的导向部10;上隔热板2与下隔热板3之间均匀贯穿转动设置有若干转轴11;清理部9包括套环12;套环12周侧面固定有U形板13;U形板13侧面固定有延伸杆14;延伸杆14端部固定有第一球头15;转轴11周侧面开设有与对应第一球头15相适配的螺旋槽16;相邻转轴11周侧面分别固定有第一收纳盘17、第二收纳盘18;第一收纳盘17置于第二收纳盘18下方;环形隔热板5内周侧面、化学气相沉积炉4外周侧面均匀开设有若干与对应第一收纳盘17、第二收纳盘18相适配的弧形槽33。A preparation system for silicon-oxygen negative electrode materials for lithium batteries, specifically, comprises a chemical vapor deposition device 1; the chemical vapor deposition device 1 comprises an upper insulation board 2 and a lower insulation board 3 which are parallel to each other; a chemical vapor deposition furnace 4 and an annular insulation board 5 are coaxially fixed between the upper insulation board 2 and the lower insulation board 3; a preparation chamber is formed between the upper insulation board 2, the lower insulation board 3 and the annular insulation board 5; a conical material storage tank 6 is fixed on the top of the upper insulation board 2; guide grooves 7 are evenly provided on the inner bottom surface of the conical material storage tank 6; an adsorption portion 8 is slidably provided inside the guide groove 7; a cleaning portion 9 is slidably provided on the side surface around the adsorption portion 8; a plurality of guide portions 10 which are compatible with the corresponding cleaning portions 9 are evenly fixed on the inner top of the upper insulation board 2 A number of rotating shafts 11 are evenly arranged to penetrate and rotate between the upper insulation plate 2 and the lower insulation plate 3; the cleaning part 9 includes a collar 12; a U-shaped plate 13 is fixed to the side surface of the collar 12; an extension rod 14 is fixed to the side surface of the U-shaped plate 13; a first ball head 15 is fixed to the end of the extension rod 14; a spiral groove 16 matching the corresponding first ball head 15 is opened on the side surface of the rotating shaft 11; a first receiving tray 17 and a second receiving tray 18 are respectively fixed to the side surfaces of adjacent rotating shafts 11; the first receiving tray 17 is placed below the second receiving tray 18; a number of arc grooves 33 matching the corresponding first receiving tray 17 and the second receiving tray 18 are evenly arranged on the inner side surface of the annular insulation plate 5 and the outer side surface of the chemical vapor deposition furnace 4.
本实施例一工作原理:Working principle of the first embodiment:
通过将粉碎后的硅氧原材料堆积到锥形储料罐6中,吸附部8内部负压将硅氧原材料吸附住,通过控制各组吸附部8的同步升降,将定量的硅氧原材料送进制备腔中,反应气体在化学气相沉积炉4反应产生沉积复合物通过载气引入制备腔中,与包裹层反应形成含碳薄膜,代替传统反应气体直接与堆积在一起的硅氧原材料反应的方式,增加了硅氧原材料与反应气体的接触面积,提高沉积复合物在沉积受体表面覆盖的均匀性。The crushed silicon-oxygen raw materials are piled into a conical storage tank 6, and the negative pressure inside the adsorption part 8 adsorbs the silicon-oxygen raw materials. A certain amount of silicon-oxygen raw materials are delivered into the preparation chamber by controlling the synchronous lifting and lowering of each group of adsorption parts 8. The reaction gas reacts in the chemical vapor deposition furnace 4 to produce a deposition composite, which is introduced into the preparation chamber through the carrier gas and reacts with the encapsulation layer to form a carbon-containing film, thereby replacing the traditional method in which the reaction gas directly reacts with the stacked silicon-oxygen raw materials, thereby increasing the contact area between the silicon-oxygen raw materials and the reaction gas, and improving the uniformity of the deposition composite on the surface of the deposition receptor.
形成含碳薄膜后,控制各组从动齿轮转动,带动各组转轴11连同其上的螺旋槽16转动,转动的螺旋槽16带动第一球头15下降,从而带动清理部9中对物料进行刮除,此过程中,各组收纳盘同步转动,使得被刮下来的物料均匀地铺设在对应的收纳盘表面继续与反应气体反应,进一步抵提高沉积复合物在沉积受体表面覆盖的均匀性。After the carbon-containing film is formed, each group of driven gears is controlled to rotate, driving each group of rotating shafts 11 together with the spiral grooves 16 thereon to rotate. The rotating spiral grooves 16 drive the first ball head 15 to descend, thereby driving the cleaning part 9 to scrape the material. During this process, each group of storage trays rotates synchronously, so that the scraped material is evenly laid on the surface of the corresponding storage tray to continue to react with the reaction gas, further improving the uniformity of the deposition composite on the surface of the deposition receptor.
实施例二,请参阅图1-11,本实施例二在实施例一的基础上作如下改进,具体地,锥形储料罐6顶部通过紧固螺栓固定有密封盖19;密封盖19顶部依次安装有控制器20以及电动推杆21;电动推杆21伸缩端固定有挡板22;挡板22底面固定有竖杆23;密封盖19表面对称固定有滑杆24;竖杆23底端固定有与两滑杆24滑动配合的集气环25;集气环25周侧面对称固定有耳板26;耳板26表面开设有与滑杆24滑动配合的滑孔27;集气环25周侧面连通设置有抽气管28;抽气管28与外部真空泵通过软管连接;控制器20输出端分别与电动推杆21以及外部真空泵通过电性连接。Embodiment 2, please refer to Figures 1-11. Embodiment 2 is improved on the basis of Embodiment 1 as follows. Specifically, a sealing cover 19 is fixed to the top of the conical storage tank 6 by fastening bolts; a controller 20 and an electric push rod 21 are installed on the top of the sealing cover 19 in sequence; a baffle 22 is fixed to the telescopic end of the electric push rod 21; a vertical rod 23 is fixed to the bottom surface of the baffle 22; sliding rods 24 are symmetrically fixed to the surface of the sealing cover 19; an air collecting ring 25 that slides with the two sliding rods 24 is fixed to the bottom end of the vertical rod 23; ear plates 26 are symmetrically fixed to the side surfaces of the air collecting ring 25; sliding holes 27 that slide with the sliding rods 24 are opened on the surface of the ear plates 26; an exhaust pipe 28 is connected to the side surfaces of the air collecting ring 25; the exhaust pipe 28 is connected to the external vacuum pump through a hose; the output end of the controller 20 is electrically connected to the electric push rod 21 and the external vacuum pump respectively.
吸附部8包括吸附筒29;吸附筒29周侧面固定有与U形板13滑动配合的滑轨30,且其顶端与集气环25底面之间连通设置有输气管31;密封盖19顶部均匀开设有若干与输气管31滑动配合的限位孔32;导向槽7内壁开设有与滑轨30滑动配合的滑槽34;吸附筒29周侧面均匀开设有若干吸附槽35;吸附槽35内壁均匀开设有若干吸附孔36。The adsorption part 8 includes an adsorption cylinder 29; a slide rail 30 that slides with the U-shaped plate 13 is fixed on the side surface of the adsorption cylinder 29, and a gas pipe 31 is connected between the top of the adsorption cylinder 29 and the bottom surface of the gas collecting ring 25; a plurality of limit holes 32 that slide with the gas pipe 31 are evenly provided on the top of the sealing cover 19; a slide groove 34 that slides with the slide rail 30 is provided on the inner wall of the guide groove 7; a plurality of adsorption grooves 35 are evenly provided on the side surface of the adsorption cylinder 29; a plurality of adsorption holes 36 are evenly provided on the inner wall of the adsorption groove 35.
本实施例二工作原理:Working principle of the second embodiment:
初始状态下,各组吸附筒29均置于锥形储料罐6中,控制启动外部真空泵,对集气环25以及各组吸附筒29内部进行抽真空,使得各组吸附筒29内部形成负压环境,从而将锥形储料罐6中的硅氧材料吸附在吸附槽35中,使得吸附筒29外周侧面的各组吸附槽35形成包裹层。In the initial state, each group of adsorption cylinders 29 is placed in the conical storage tank 6, and the external vacuum pump is controlled to start and evacuate the air collecting ring 25 and the inside of each group of adsorption cylinders 29, so that a negative pressure environment is formed inside each group of adsorption cylinders 29, thereby adsorbing the silicon oxide material in the conical storage tank 6 in the adsorption groove 35, so that a wrapping layer is formed for each group of adsorption grooves 35 on the outer peripheral side of the adsorption cylinder 29.
控制启动电动推杆21使其收缩,带动集气环25沿着滑杆24下降,从而带动各组吸附筒29从锥形储料罐6中下降进入制备腔中,此时,各组吸附筒29顶端堵住对应的导向槽7,完成对硅氧材料的定量吸附,提高了后续硅氧材料与反应气体的接触面积。The electric push rod 21 is controlled to start and retract, driving the gas collecting ring 25 to descend along the slide rod 24, thereby driving each group of adsorption cylinders 29 to descend from the conical storage tank 6 into the preparation chamber. At this time, the top of each group of adsorption cylinders 29 blocks the corresponding guide groove 7 to complete the quantitative adsorption of the silicon-oxygen material, thereby increasing the contact area between the subsequent silicon-oxygen material and the reaction gas.
实施例三,请参阅图1-11,本实施例三在实施例二的基础上作如下改进,具体地,延伸杆14内部滑动设置有转环37;转环37两相对侧面均固定有与延伸杆14内部滑动配合的环形轨38;转环37内周侧面均匀固定有若干与延伸杆14内部滑动配合的曲面导板39;套环12与吸附筒29滑动配合;套环12周侧面均匀贯穿滑动设置有若干导杆40;导杆40一端固定有与吸附槽35滑动配合的刮板41,且其另一端固定有第二球头42;第二球头42与套环12外周侧面之间固定有套设在对应导杆40上的复位弹簧43。Embodiment 3, please refer to Figures 1-11. Embodiment 3 makes the following improvements on the basis of Embodiment 2. Specifically, a swivel 37 is slidably provided inside the extension rod 14; annular rails 38 that slide with the extension rod 14 are fixed on both opposite sides of the swivel 37; a number of curved guide plates 39 that slide with the extension rod 14 are evenly fixed on the inner side of the swivel 37; the collar 12 slides with the adsorption cylinder 29; a number of guide rods 40 are evenly penetrated and slidably provided on the side of the collar 12; a scraper 41 that slides with the adsorption groove 35 is fixed at one end of the guide rod 40, and a second ball head 42 is fixed at the other end; a reset spring 43 mounted on the corresponding guide rod 40 is fixed between the second ball head 42 and the outer side of the collar 12.
延伸杆14周侧面固定有与套环12同轴心的弧形杆44;弧形杆44端部固定有挡块45;转环37外周侧面固定有与弧形杆44滑动配合的连接板46;连接板46端部固定有第三球头47;导向部10包括从上往下与套环12同轴心的弧形固定板48、斜弧形导板49以及直弧形导板50;连接板46与延伸杆14之间固定有套设在弧形杆44上的弧形弹簧51。An arc-shaped rod 44 coaxial with the collar 12 is fixed to the side surface of the extension rod 14; a stopper 45 is fixed to the end of the arc-shaped rod 44; a connecting plate 46 slidingly matched with the arc-shaped rod 44 is fixed to the outer side surface of the rotating ring 37; a third ball head 47 is fixed to the end of the connecting plate 46; the guide part 10 includes an arc-shaped fixing plate 48 coaxial with the collar 12 from top to bottom, an oblique arc-shaped guide plate 49 and a straight arc-shaped guide plate 50; an arc-shaped spring 51 mounted on the arc-shaped rod 44 is fixed between the connecting plate 46 and the extension rod 14.
转轴11顶部固定有从动齿轮52;上隔热板2顶部转动设置有环形板53;环形板53内周侧面固定有与各从动齿轮52啮合配合的内齿圈;上隔热板2顶部安装有与控制器20输出端通过电性连接的伺服电机54;伺服电机54输出端固定有驱动齿轮55;环形板53外周侧面固定有与驱动齿轮55啮合配合的外齿圈。A driven gear 52 is fixed to the top of the rotating shaft 11; an annular plate 53 is rotatably provided on the top of the upper heat insulation plate 2; an inner gear ring is fixed to the inner peripheral side of the annular plate 53 and meshes with each driven gear 52; a servo motor 54 electrically connected to the output end of the controller 20 is installed on the top of the upper heat insulation plate 2; a driving gear 55 is fixed to the output end of the servo motor 54; an outer gear ring is fixed to the outer peripheral side of the annular plate 53 and meshes with the driving gear 55.
化学气相沉积炉4内部安装有与控制器20通过输出端通过电性连接的电加热丝,且其内部安装有与控制器20输入端通过电性连接的温度传感器;化学气相沉积炉4内部放置有催化引发剂;化学气相沉积炉4内周侧面均匀贯穿设置有排气管58;上隔热板2顶部贯穿连通设置有废气输气管65;废气输气管65与外部废气抽气泵抽气端通过输气管相连;环形隔热板5外周侧面均匀贯穿设置有若干抽料管59;抽料管59与外部抽料泵通过输料管相连。An electric heating wire electrically connected to the controller 20 through the output end is installed inside the chemical vapor deposition furnace 4, and a temperature sensor electrically connected to the input end of the controller 20 is installed inside the chemical vapor deposition furnace 4; a catalytic initiator is placed inside the chemical vapor deposition furnace 4; an exhaust pipe 58 is evenly penetrated through the inner side of the chemical vapor deposition furnace 4; a waste gas pipe 65 is penetrated and connected to the top of the upper insulation board 2; the waste gas pipe 65 is connected to the exhaust end of the external waste gas extraction pump through a pipe; a number of extraction pipes 59 are evenly penetrated through the outer side of the annular insulation board 5; the extraction pipe 59 is connected to the external extraction pump through a delivery pipe.
上隔热板2顶部开设有与化学气相沉积炉4连通的安装口60;安装口60通过紧固螺栓固定安装有气体供给装置61;气体供给装置61包括盖合在安装口60中的密封板62;密封板62表面固定有支撑板63;支撑板63顶部依次固定有反应气体供应罐64、载体气体供应罐57;反应气体供应罐64、载体气体供应罐57上均设置有贯穿密封板62的送气管56;两送气管56上均设置有与控制器20通过电性连接的电磁阀。An installation port 60 connected to the chemical vapor deposition furnace 4 is provided on the top of the upper insulation plate 2; a gas supply device 61 is fixedly installed on the installation port 60 by fastening bolts; the gas supply device 61 includes a sealing plate 62 covering the installation port 60; a support plate 63 is fixed on the surface of the sealing plate 62; a reaction gas supply tank 64 and a carrier gas supply tank 57 are fixed on the top of the support plate 63 in sequence; the reaction gas supply tank 64 and the carrier gas supply tank 57 are both provided with an air supply pipe 56 passing through the sealing plate 62; both air supply pipes 56 are provided with an electromagnetic valve electrically connected to the controller 20.
本实施例三工作原理:Working principle of the third embodiment:
硅氧材料的定量吸附进入制备腔前,打开载体气体供应罐57上送气管56对应的电磁阀,控制载气先依次通入化学气相沉积炉4以及制备腔,同时控制外部抽气泵,将化学气相沉积炉4以及制备腔中的空气通过废气输气管65排出;控制启动电加热丝,通过温度传感器实时监测化学气相沉积炉4内部温度,当其内部温度到达设定的反应温度后,控制打开反应气体供应罐64上送气管56对应的电磁阀,使得反应气体进入化学气相沉积炉4中,反应气体在化学气相沉积炉4内反应产生沉积复合物,通过载气的运输通过各组排气管58送入到制备腔中,提高了沉积复合物在制备腔中的均匀混合效率,与各组包裹层反应使得硅氧材料表面形成含碳薄膜,提高了制备的效率。Before the quantitative adsorption of the silicon oxide material into the preparation chamber, the solenoid valve corresponding to the air delivery pipe 56 on the carrier gas supply tank 57 is opened, and the carrier gas is controlled to first be passed into the chemical vapor deposition furnace 4 and the preparation chamber in sequence, and at the same time, the external vacuum pump is controlled to discharge the air in the chemical vapor deposition furnace 4 and the preparation chamber through the exhaust gas delivery pipe 65; the electric heating wire is controlled to start, and the internal temperature of the chemical vapor deposition furnace 4 is monitored in real time through the temperature sensor. When the internal temperature reaches the set reaction temperature, the solenoid valve corresponding to the air delivery pipe 56 on the reaction gas supply tank 64 is controlled to open, so that the reaction gas enters the chemical vapor deposition furnace 4. The reaction gas reacts in the chemical vapor deposition furnace 4 to produce a deposition compound, which is transported into the preparation chamber through each group of exhaust pipes 58 by the carrier gas, thereby improving the uniform mixing efficiency of the deposition compound in the preparation chamber, and reacts with each group of encapsulation layers to form a carbon-containing film on the surface of the silicon oxide material, thereby improving the preparation efficiency.
各组吸附筒29在下降的过程中,各组刮板41均收纳进套环12内部,第三球头47贴合在斜弧形导板49斜侧面,当各组吸附筒29置于制备腔中时,控制启动伺服电机54,带动驱动齿轮55转动,从而带动外齿圈连同环形板53同步转动,进而带动内齿圈转动,使得各组从动齿轮52同步转动,从而带动各组转轴11连同其上的螺旋槽16转动,使得第一球头15沿着螺旋槽16内部滑动,带动清理部9沿着滑轨30滑动下降,清理部9下降的过程中,第三球头47由斜弧形导板49滑动到直弧形导板50侧面,此过程中,带动第三球头47连同连接板46沿着弧形杆44滑动,弧形弹簧51被压缩,从而使得第二球头42由转环37内周侧面滑动到曲面导板39上,对应的复位弹簧43被压缩,各组刮板41朝着靠近吸附筒29的方向通过移动,至刮板41贴紧吸附槽35,清理部9持续下降的过程中带动刮板41对吸附槽35内壁吸附的物料进行刮除,此过程中,对应的第一收纳盘17以及对应的第二收纳盘18同步转动,使得落下的物料均匀地被铺设在对应的收纳盘上,与沉积复合物进一步地反应没从而进一步地提高了沉积复合物在沉积受体表面覆盖的均匀性。During the descent of each group of adsorption cylinders 29, each group of scrapers 41 is stored in the sleeve ring 12, and the third ball head 47 is attached to the oblique side of the oblique arc guide plate 49. When each group of adsorption cylinders 29 is placed in the preparation chamber, the servo motor 54 is controlled to start, driving the driving gear 55 to rotate, thereby driving the outer gear ring together with the annular plate 53 to rotate synchronously, and then driving the inner gear ring to rotate, so that each group of driven gears 52 rotate synchronously, thereby driving each group of rotating shafts 11 together with the spiral groove 16 thereon to rotate, so that the first ball head 15 slides along the inside of the spiral groove 16, driving the cleaning part 9 to slide and descend along the slide rail 30. During the descent of the cleaning part 9, the third ball head 47 slides from the oblique arc guide plate 49 to the side of the straight arc guide plate 50. In this process, the third ball head 47 is driven The ball head 47 together with the connecting plate 46 slide along the arc rod 44, and the arc spring 51 is compressed, so that the second ball head 42 slides from the inner side of the rotating ring 37 to the curved guide plate 39, and the corresponding return spring 43 is compressed. Each group of scrapers 41 moves toward the direction close to the adsorption cylinder 29 until the scraper 41 is close to the adsorption groove 35. During the continuous descending process of the cleaning part 9, the scraper 41 is driven to scrape the material adsorbed on the inner wall of the adsorption groove 35. During this process, the corresponding first receiving tray 17 and the corresponding second receiving tray 18 rotate synchronously, so that the fallen material is evenly laid on the corresponding receiving tray, and further reacts with the deposition compound, thereby further improving the uniformity of the deposition compound covering the surface of the deposition receptor.
完成硅氧材料表面附膜后,通过外部抽气泵将制备腔中对于的废气通过废气输气管65抽走,通过控制启动外部抽料泵将硅氧负极材料从对应的收纳盘中抽走,提高了制备效率。After the film is formed on the surface of the silicon oxide material, the corresponding waste gas in the preparation chamber is extracted through the waste gas pipe 65 by an external vacuum pump, and the silicon oxide negative electrode material is extracted from the corresponding storage tray by controlling and starting the external vacuum pump, thereby improving the preparation efficiency.
显然,上述所描述的实施例仅仅是本发明一部分的实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都应当属于本发明保护的范围。Obviously, the above-described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.
需要注意的是,这里所使用的术语仅是为了描述具体实施方式,而非意图限制根据本申请的示例性实施方式。如在这里所使用的,除非上下文另外明确指出,否则单数形式也意图包括复数形式,此外,还应当理解的是,当在本说明书中使用术语“包含”和/或“包括”时,其指明存在特征、步骤、工作、器件、组件和/或它们的组合。It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and/or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and/or combinations thereof.
需要说明的是,本申请的说明书和权利要求书及上述附图中的术语“第一”、“第二”等是用于区别类似的对象,而不必用于描述特定的顺序或先后次序。应该理解这样使用的数据在适当情况下可以互换,以便这里描述的本申请的实施方式能够以除了在这里图示或描述的那些以外的顺序实施。It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein.
以上所述仅为本发明的优选实施例而已,并不用于限制本发明,对于本领域的技术人员来说,本发明可以有各种更改和变化。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.
以上所述仅是本发明的优选实施方式,本发明的保护范围并不仅局限于上述实施例,凡属于本发明思路下的技术方案均属于本发明的保护范围。应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理前提下的若干改进和润饰,这些改进和润饰也应视为本发明的保护范围。The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.
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