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CN117026200A - Device and method for producing nano silicon-carbon negative electrode material - Google Patents

Device and method for producing nano silicon-carbon negative electrode material Download PDF

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CN117026200A
CN117026200A CN202311004100.7A CN202311004100A CN117026200A CN 117026200 A CN117026200 A CN 117026200A CN 202311004100 A CN202311004100 A CN 202311004100A CN 117026200 A CN117026200 A CN 117026200A
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张华芹
程佳彪
李广敏
张冬翔
吴海龙
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Shanghai Rhyme New Energy Technology Co ltd
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    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
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    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4417Methods specially adapted for coating powder
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    • H01M2004/027Negative electrodes

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Abstract

The application relates to the technical field of silicon-carbon negative electrode materials of lithium batteries, in particular to a nano silicon-carbon negative electrode material production device and a silicon-carbon negative electrode material production method. The nano silicon-carbon negative electrode material production device comprises a deposition furnace, wherein a sublimation chamber, a deposition chamber and a dust collection chamber are arranged in the deposition furnace, the sublimation chamber and the dust collection chamber are respectively communicated with the deposition chamber, and a heating assembly for respectively heating the sublimation chamber and the deposition chamber is arranged in a furnace body. The nano silicon-carbon negative electrode material production device can integrate the two procedures of preparation of silicon-based particles and carbon coating deposition, so that agglomeration of the silicon-based particles is reduced, and the obtained silicon-carbon negative electrode material is uniform in coating of a carbon layer, uniform in particle size and smaller in particle size.

Description

纳米硅碳负极材料生产装置以及硅碳负极材料的生产方法Nano silicon carbon negative electrode material production device and silicon carbon negative electrode material production method

技术领域Technical field

本申请涉及锂电池硅碳负极材料技术领域,更具体地说,它涉及一种纳米硅碳负极材料生产装置以及硅碳负极材料的生产方法。The present application relates to the technical field of silicon carbon negative electrode materials for lithium batteries, and more specifically, it relates to a production device for nano silicon carbon negative electrode materials and a production method of silicon carbon negative electrode materials.

背景技术Background technique

随着新型便携式电子产品、电动汽车和大型储能系统对能量的需求逐渐增加,对锂离子电池的能量密度提出了更高的要求。硅基材料由于具有极高的能量密度、较低的脱锂电位以及相对出色的安全性能,因此成为下一代负极材料研发的主流方向。As the energy demand for new portable electronic products, electric vehicles and large-scale energy storage systems gradually increases, higher requirements are placed on the energy density of lithium-ion batteries. Silicon-based materials have become the mainstream direction for the development of next-generation anode materials due to their extremely high energy density, low delithiation potential and relatively excellent safety performance.

由于硅基材料本身并不导电,不能直接作为负极材料使用,并且硅基材料在充放电过程中,体积膨胀率接近300%,导致硅基负极材料的可逆容量低,循环性能差。因此,为了提高硅基负极材料的电化学性能和容量,通常会采用导电率高、膨胀率低的碳材料对硅基材料进行表面改性,得到电化学性能好和容量高的硅碳负极材料。Since the silicon-based material itself is not conductive, it cannot be used directly as an anode material. During the charge and discharge process, the volume expansion rate of the silicon-based material is close to 300%, resulting in a low reversible capacity and poor cycle performance of the silicon-based anode material. Therefore, in order to improve the electrochemical performance and capacity of silicon-based anode materials, carbon materials with high conductivity and low expansion rate are usually used to surface modify the silicon-based materials to obtain silicon-carbon anode materials with good electrochemical performance and high capacity. .

目前,硅碳负极材料的制备方法,包括机械球磨法、高温热解法、CVD(化学气相沉积法)法和溶胶凝胶等方法进行制备,其中,CVD法是将碳源气体通入纳米级的硅基材料粉体中,碳源气体发生化学反应,然后沉积形成沉积碳包覆在纳米级的硅基材料粉体表面,从而获得硅碳负极材料。然而,纳米级的硅基材料粉体粒径较小,比表面较大,纳米级的硅基材料粉体容易团聚到一起,使得沉积碳不能均匀的包覆在纳米级的硅基材料粉体表面。At present, the preparation methods of silicon-carbon negative electrode materials include mechanical ball milling, high-temperature pyrolysis, CVD (chemical vapor deposition) and sol-gel. Among them, the CVD method is to pass carbon source gas into nanometer-scale In the silicon-based material powder, the carbon source gas reacts chemically, and then deposits to form deposited carbon coating on the surface of the nano-scale silicon-based material powder, thereby obtaining the silicon-carbon negative electrode material. However, the particle size of nano-scale silicon-based material powder is small and the specific surface area is large. The nano-scale silicon-based material powder is easy to agglomerate together, so that the deposited carbon cannot evenly coat the nano-scale silicon-based material powder. surface.

发明内容Contents of the invention

为了提高沉积碳包覆纳米级的硅基材料粉体的均匀性,本申请提供一纳米硅碳负极材料生产装置以及硅碳负极材料的生产方法。In order to improve the uniformity of deposited carbon-coated nanometer-sized silicon-based material powder, this application provides a nanometer silicon-carbon negative electrode material production device and a production method of silicon-carbon negative electrode material.

第一方面,本申请提供一种纳米硅碳负极材料生产装置,采用如下的技术方案:In the first aspect, this application provides a nano-silicon carbon negative electrode material production device, adopting the following technical solution:

一种纳米硅碳负极材料生产装置,包括:A nano silicon carbon negative electrode material production device, including:

沉积炉,所述沉积炉内设置有升华室、沉积室和收尘室,所述升华室、收尘室分别与沉积室连通,所述炉体内设置有分别对升华室、沉积室进行加热的加热组件;Deposition furnace, the deposition furnace is provided with a sublimation chamber, a deposition chamber and a dust collection chamber. The sublimation chamber and the dust collection chamber are respectively connected with the deposition chamber. The furnace body is provided with means for heating the sublimation chamber and the deposition chamber respectively. heating components;

所述升华室用于采用加热组件对硅基材料粉体加热生成硅源气体;The sublimation chamber is used to use a heating component to heat silicon-based material powder to generate silicon source gas;

所述沉积室用于采用加热组件将碳源气体和硅源气体进行加热发生化学气相沉积生成硅碳负极材料;The deposition chamber is used to use a heating component to heat the carbon source gas and the silicon source gas to produce chemical vapor deposition to generate silicon carbon anode material;

所述收尘室用于收集硅碳负极材料;The dust collection room is used to collect silicon carbon negative electrode materials;

进气系统,所述进气系统用于向沉积室内通入碳源气体和还原性气体;An air intake system, which is used to introduce carbon source gas and reducing gas into the deposition chamber;

载气系统,所述载气系统用于向升华室内通入惰性气体;A carrier gas system, which is used to introduce inert gas into the sublimation chamber;

真空系统,所述真空系统用于对升华室、沉积室和收尘室进行抽真空;Vacuum system, the vacuum system is used to evacuate the sublimation chamber, deposition chamber and dust collection chamber;

冷却系统,所述冷却系统用于对升华室、沉积室和收尘室进行降温。Cooling system, the cooling system is used to cool down the sublimation chamber, deposition chamber and dust collection chamber.

本申请纳米硅碳负极材料生产装置的工作原理为:首先,将含有金属硅粉、一氧化硅、二氧化硅的混合粉体作为硅基材料粉体放置在升华室中;然后通过真空系统保持升华室、沉积室和收尘室内具有一定的真空度,并通过载气系统将惰性气体通入升华室中,使得升华室、沉积室和收尘室中充满惰性气体。其次,通过采用加热组件对升华室内的硅基材料粉体进行加热,升华出含有硅蒸汽的硅源气体。在惰性气体气流的作用下,促进升华室内的硅源气体进入一定温度的沉积室内,冷凝形成硅基颗粒粘附在沉积室内。再次,通过进气系统将碳源气体和还原性气体通入沉积室内,碳源气体与硅基颗粒混合,并在加热组件的加热条件下受热分解,然后直接在硅基颗粒表面包覆一层沉积碳,形成硅碳负极材料。最后,沉积室在冷却系统的冷却作用下冷却至室温,促使硅碳负极材料从沉积室内剥落,便于收集硅碳负极材料。The working principle of the nano silicon carbon negative electrode material production device of this application is: first, the mixed powder containing metal silicon powder, silicon monoxide, and silicon dioxide is placed in the sublimation chamber as silicon-based material powder; and then maintained by the vacuum system The sublimation chamber, deposition chamber and dust collection chamber have a certain degree of vacuum, and inert gas is introduced into the sublimation chamber through the carrier gas system, so that the sublimation chamber, deposition chamber and dust collection chamber are filled with inert gas. Secondly, a heating component is used to heat the silicon-based material powder in the sublimation chamber to sublime the silicon source gas containing silicon vapor. Under the action of the inert gas flow, the silicon source gas in the sublimation chamber is promoted to enter the deposition chamber of a certain temperature, and condenses to form silicon-based particles that adhere to the deposition chamber. Third, the carbon source gas and reducing gas are introduced into the deposition chamber through the air inlet system. The carbon source gas is mixed with the silicon-based particles, and is thermally decomposed under the heating conditions of the heating component, and then is directly coated with a layer on the surface of the silicon-based particles. Carbon is deposited to form a silicon-carbon negative electrode material. Finally, the deposition chamber is cooled to room temperature under the cooling effect of the cooling system, causing the silicon carbon anode material to peel off from the deposition chamber, making it easier to collect the silicon carbon anode material.

同时,部分未反应的碳源气体、硅源气体、还原性气体可以进入收尘室内,继续进行反应生成硅碳负极材料并分散在收尘室内。At the same time, some unreacted carbon source gas, silicon source gas, and reducing gas can enter the dust collection chamber, continue to react, generate silicon carbon anode materials, and disperse in the dust collection chamber.

通过采用上述技术方案,由于本申请纳米硅碳负极材料生产装置,可将硅基颗粒的制备与沉积碳包覆这两道工序合二为一,集中在一台装置中进行,一方面,由于硅源气体可直接冷凝形成硅基颗粒粘附在沉积室内,并且形成的硅碳负极材料需要冷凝降温才能从沉积室内剥离出,不仅减少了相邻硅基颗粒之间的相互作用力,还不需要机械强化分散硅基颗粒;因此,有利于减少硅基颗粒之间的团聚,提高沉积碳在硅基颗粒表面包覆的均匀性,得到包覆均匀、颗粒大小均一、一致性高、粒径在30nm以下的硅碳负极材料。另一方面,向升华室内冲入的惰性气体,可促进升华室内的硅源气体进入沉积室内进行冷凝沉积,提高沉积室内硅基颗粒的产量,进一步提高了最终所得硅碳负极材料的产量。同时,本申请纳米硅碳负极材料生产装置,避免了前后道工序中间,因原料的转运,人员操作等一系列原因造成原料的浪费,杂质带入等不利因素。By adopting the above technical solution, the nano-silicon carbon negative electrode material production device of the present application can combine the two processes of silicon-based particle preparation and carbon deposition into one device, and on the one hand, because The silicon source gas can be directly condensed to form silicon-based particles that adhere to the deposition chamber, and the formed silicon-carbon negative electrode material needs to be condensed and cooled before being peeled off from the deposition chamber. This not only reduces the interaction force between adjacent silicon-based particles, but also It is necessary to mechanically strengthen the dispersed silicon-based particles; therefore, it is beneficial to reduce the agglomeration between silicon-based particles, improve the uniformity of the coating of the deposited carbon on the surface of the silicon-based particles, and obtain uniform coating, uniform particle size, high consistency, and good particle size. Silicon carbon anode materials below 30nm. On the other hand, the inert gas rushed into the sublimation chamber can promote the silicon source gas in the sublimation chamber to enter the deposition chamber for condensation deposition, increase the yield of silicon-based particles in the deposition chamber, and further increase the yield of the final silicon-carbon anode material. At the same time, the nano silicon carbon negative electrode material production device of this application avoids the waste of raw materials, the introduction of impurities and other unfavorable factors in the front and rear processes due to a series of reasons such as the transportation of raw materials and personnel operations.

优选的,所述载气系统包括载气罐和输气管,所述载气罐内含有惰性气体,所述输气管和载气罐连通,所述输气管远离载气罐的一端贯穿收尘室和沉积室并与升华室连通;Preferably, the carrier gas system includes a carrier gas tank and a gas delivery pipe. The carrier gas tank contains inert gas. The gas delivery pipe is connected to the carrier gas tank. One end of the gas delivery pipe away from the carrier gas tank runs through the dust collection chamber. and a deposition chamber connected to the sublimation chamber;

所述进气系统包括碳源气体罐、还原性气体罐和进气管,所述碳源气体罐、还原性气体罐分别与进气管连通,所述进气管远离碳源气体罐、还原性气体罐的一端贯穿升华室并与沉积室连通。The air intake system includes a carbon source gas tank, a reducing gas tank and an air intake pipe. The carbon source gas tank and the reducing gas tank are respectively connected with the air intake pipe. The air intake pipe is far away from the carbon source gas tank and the reducing gas tank. One end runs through the sublimation chamber and is connected with the deposition chamber.

优选的,所述载气系统包括载气罐和输气管,所述载气罐内含有惰性气体,所述输气管和载气罐连通,所述输气管远离载气罐的一端与升华室连通;Preferably, the carrier gas system includes a carrier gas tank and a gas delivery pipe, the carrier gas tank contains inert gas, the gas delivery pipe is connected to the carrier gas tank, and one end of the gas delivery pipe away from the carrier gas tank is connected to the sublimation chamber. ;

所述进气系统包括碳源气体罐、还原性气体罐和进气管,所述碳源气体罐、还原性气体罐分别与进气管连通,所述进气管远离碳源气体罐、还原性气体罐的一端贯穿收尘室并与沉积室连通。The air intake system includes a carbon source gas tank, a reducing gas tank and an air intake pipe. The carbon source gas tank and the reducing gas tank are respectively connected with the air intake pipe. The air intake pipe is far away from the carbon source gas tank and the reducing gas tank. One end runs through the dust collection chamber and is connected with the sedimentation chamber.

通过采用上述技术方案,控制惰性气体、碳源气体和还原性气体在沉积炉内的进气方式,在惰性气体的气流作用下,促进硅源气体进入沉积室中进行冷凝,有利于提高硅基材料的产量。By adopting the above technical solution, the inlet mode of inert gas, carbon source gas and reducing gas in the deposition furnace is controlled. Under the action of the flow of inert gas, the silicon source gas is promoted to enter the deposition chamber for condensation, which is beneficial to improving the silicon base. Material yield.

优选的,所述炉体内设置有位于升华室和沉积室之间的石墨板,所述石墨板表面开设有通气孔。Preferably, the furnace body is provided with a graphite plate located between the sublimation chamber and the deposition chamber, and a vent hole is provided on the surface of the graphite plate.

通过采用上述技术方案,升华室内升华出的硅源气体可沿通气孔进入沉积室中进行冷凝。同时,石墨板是良好的耐火绝热材料,可有效隔绝升华室和沉积室热量的传递,提高硅源气体在沉积室内的冷凝效果,以及提高碳源气体在沉积室内分解的效果。By adopting the above technical solution, the silicon source gas sublimated out of the sublimation chamber can enter the deposition chamber along the vent hole for condensation. At the same time, the graphite plate is a good refractory and insulating material, which can effectively isolate the heat transfer between the sublimation chamber and the deposition chamber, improve the condensation effect of silicon source gas in the deposition chamber, and improve the decomposition effect of carbon source gas in the deposition chamber.

优选的,所述沉积室内设置有用于收集硅碳负极材料的沉积件,所述沉积件与石墨板或沉积室顶部可拆卸连接。Preferably, a deposition part for collecting silicon carbon negative electrode material is provided in the deposition chamber, and the deposition part is detachably connected to the graphite plate or the top of the deposition chamber.

通过采用上述技术方案,可将沉积件垂直固定或悬挂在沉积室内,有利于沉积件与硅源气体或碳源气体充分接触,减少硅基颗粒团聚,得到包覆均匀、颗粒大小均一、一致性高的硅碳负极材料。By adopting the above technical solution, the deposition parts can be vertically fixed or suspended in the deposition chamber, which is conducive to full contact between the deposition parts and the silicon source gas or carbon source gas, reducing the agglomeration of silicon-based particles, and obtaining uniform coating, uniform particle size, and consistency. High silicon carbon anode material.

优选的,所述沉积件为沉积板或沉积管。Preferably, the deposition member is a deposition plate or a deposition tube.

通过采用上述技术方案,沉积板和沉积管的体积较小,便于在沉积室内拆装。By adopting the above technical solution, the deposition plate and the deposition tube are smaller in size and can be easily disassembled and assembled in the deposition chamber.

优选的,所述沉积炉包括炉体、上炉盖和下炉盖,所述上炉盖可拆卸设置在上炉体顶部,所述下炉盖可拆卸设置在炉体底部;Preferably, the deposition furnace includes a furnace body, an upper furnace cover and a lower furnace cover, the upper furnace cover is detachably provided at the top of the upper furnace body, and the lower furnace cover is detachably provided at the bottom of the furnace body;

所述纳米硅碳负极材料生产装置,还包括升降系统,所述升降系统固定设置在下炉盖上,用于驱动下炉盖和升华室与炉体进行脱离或结合。The nano silicon carbon negative electrode material production device also includes a lifting system, which is fixedly installed on the lower furnace cover and used to drive the lower furnace cover and sublimation chamber to separate or combine with the furnace body.

通过采用上述技术方案,升降系统可驱动下炉盖、升华室与炉体分离,便于在升华室内进行上下料,提高装置上下料的便捷性。By adopting the above technical solution, the lifting system can drive the lower furnace cover, sublimation chamber and furnace body to separate, making it easier to load and unload materials in the sublimation chamber, and improving the convenience of loading and unloading the device.

优选的,所述升降系统包括支撑架和多块滑移块,所述支撑架架设在下炉盖周侧,多块所述滑移块与下炉盖可拆卸设置,所述支撑架上设置有驱动滑移块在支撑架上滑移升降的驱动件。Preferably, the lifting system includes a support frame and a plurality of sliding blocks. The support frame is erected around the lower furnace cover. The plurality of sliding blocks and the lower furnace cover are detachably arranged. The support frame is provided with a The driving member that drives the sliding block to slide up and down on the support frame.

通过采用上述技术方案,多块滑移块可提高下炉盖和升华室在支撑架上升降的稳定性,提高装置上下料的安全性。By adopting the above technical solution, multiple sliding blocks can improve the stability of the lower furnace cover and sublimation chamber when the support frame is raised and lowered, and improve the safety of loading and unloading of the device.

第二方面,本申请提供一种硅碳负极材料生产装置的生产方法,采用如下的技术方案:In the second aspect, this application provides a production method of a silicon carbon negative electrode material production device, adopting the following technical solution:

一种硅碳负极材料生产装置的生产方法,包括以下步骤:A production method of a silicon carbon negative electrode material production device, including the following steps:

S1:将硅基材料放置在升华室中,先采用真空系统控制升华室、沉积室和收尘室的真空度,再采用载气系统将惰性气体通入升华室内;S1: Place the silicon-based material in the sublimation chamber, first use a vacuum system to control the vacuum degree of the sublimation chamber, deposition chamber and dust collection chamber, and then use a carrier gas system to pass inert gas into the sublimation chamber;

S2:采用加热组件对升华室加热,使得升华室中升华出硅源气体,并且惰性气体可将硅源气体携带至沉积室中;再采用冷却系统调节沉积室温度,使得硅源气体冷凝形成硅基颗粒;S2: Use a heating component to heat the sublimation chamber so that the silicon source gas sublimates out of the sublimation chamber, and the inert gas can carry the silicon source gas to the deposition chamber; then use a cooling system to adjust the temperature of the deposition chamber so that the silicon source gas condenses to form silicon base particles;

S3:采用加热组件对沉积室加热,并将碳源气体和还原性气体沿进气管通入沉积室内,保温,碳源气体在硅基颗粒表面发生气相化学沉积,形成硅碳负极材料;S3: Use a heating component to heat the deposition chamber, and pass the carbon source gas and reducing gas into the deposition chamber along the air inlet pipe to maintain heat. The carbon source gas will undergo vapor-phase chemical deposition on the surface of the silicon-based particles to form a silicon-carbon anode material;

S4:采用冷却系统调节沉积室温度,使得沉积室内的硅碳负极材料剥落,收集硅碳负极材料;S4: Use a cooling system to adjust the temperature of the deposition chamber to peel off the silicon carbon anode material in the deposition chamber and collect the silicon carbon anode material;

其中,惰性气体的流量为15-24L/min,压力为1-10kPa;Among them, the flow rate of inert gas is 15-24L/min, and the pressure is 1-10kPa;

碳源气体的流量为1-10L/min,压力为2-5kPa;The flow rate of carbon source gas is 1-10L/min, and the pressure is 2-5kPa;

还原性气体的流量为1-10L/min,压力为2-5kPa。The flow rate of reducing gas is 1-10L/min, and the pressure is 2-5kPa.

通过采用上述技术方案,惰性气体作为保护气体和携带气体进入升华室中,携带升华后的硅源气体进入到沉积室内,冷凝形成大量的硅基颗粒;同时,碳源气体直接进入到沉积室内,受热分解并发生气相化学沉积反应,在硅基颗粒表面包覆一层沉积碳,冷凝剥落后,即可得到包覆均匀、颗粒大小均一、一致性高、粒径在30nm以下的硅碳负极材料。By adopting the above technical solution, the inert gas enters the sublimation chamber as a protective gas and a carrying gas, carrying the sublimated silicon source gas into the deposition chamber, where it condenses to form a large number of silicon-based particles; at the same time, the carbon source gas directly enters the deposition chamber, It is thermally decomposed and undergoes a vapor-phase chemical deposition reaction. A layer of deposited carbon is coated on the surface of the silicon-based particles. After condensation and peeling, a silicon-carbon anode material with uniform coating, uniform particle size, high consistency, and a particle size of less than 30nm can be obtained. .

综上所述,本申请具有以下有益效果:To sum up, this application has the following beneficial effects:

本申请纳米硅碳负极材料生产装置,可将硅基颗粒的制备与沉积碳包覆这两道工序合二为一,集中在一台装置中进行,一方面,不需要机械强化分散硅基颗粒,避免了分散硅基颗粒时硅基颗粒团聚,提高了纳米硅碳负极材料表面碳层的包覆均匀性;另一方面,惰性气体可作为携带气体,携带升华室内的硅源气体进入沉积室冷凝沉积,增加沉积室内硅基颗粒的数量,有利于提高最终所得硅碳负极材料的产量。The nano-silicon carbon anode material production device of this application can combine the two processes of silicon-based particle preparation and carbon deposition into one device. On the one hand, there is no need to mechanically strengthen the dispersed silicon-based particles. , avoiding the agglomeration of silicon-based particles when dispersing silicon-based particles, and improving the coating uniformity of the carbon layer on the surface of the nano-silicon carbon negative electrode material; on the other hand, the inert gas can be used as a carrying gas to carry the silicon source gas in the sublimation chamber into the deposition chamber Condensation deposition increases the number of silicon-based particles in the deposition chamber, which is beneficial to increasing the yield of the final silicon-carbon anode material.

附图说明Description of the drawings

图1是本申请实施例1纳米硅碳负极材料生产装置的整体结构示意图;Figure 1 is a schematic diagram of the overall structure of a nano-silicon carbon negative electrode material production device in Example 1 of the present application;

图2是本申请实施例1中沉积炉的剖面结构示意图;Figure 2 is a schematic cross-sectional structural diagram of the deposition furnace in Embodiment 1 of the present application;

图3是本申请实施例1中炉体、上炉盖、下炉盖的部分剖面结构示意图;Figure 3 is a partial cross-sectional structural diagram of the furnace body, upper furnace cover, and lower furnace cover in Embodiment 1 of the present application;

图4是本申请实施例1中沉积炉的部分剖面结构示意图;Figure 4 is a partial cross-sectional structural schematic diagram of the deposition furnace in Embodiment 1 of the present application;

图5是本申请实施例1中升降系统的整体结构示意图;Figure 5 is a schematic diagram of the overall structure of the lifting system in Embodiment 1 of the present application;

图6是本申请实施例2中沉积炉的部分剖面结构示意图。Figure 6 is a partial cross-sectional structural diagram of the deposition furnace in Embodiment 2 of the present application.

附图标记:1、沉积炉;101、炉体;102、上炉盖;103、下炉盖;2、升华室;3、沉积室;4、收尘室;5、加热组件;6、进气系统;601、碳源气体罐;602、还原性气体罐;603、进气管;7、载气系统;701载气罐;702、输气管;8、真空系统;801、真空泵;802、吸气管;9、冷却系统;901、回水箱;902、输水管;903、回水管;10、石墨板;11、通气孔;12、沉积件;13、升降系统;1301、支撑架;1302、滑移块;1303、驱动件;14、尾气系统;1401、尾气燃烧器;1402、布袋除尘器;15、空腔;16、底板;17、坩埚;18、固定板;19、套筒;20、支撑块;21、保温层;22、收料盒;23、盒盖;24、通孔;25、隔板;26、收尘盒;27、避让筒;28、丝杆;29、限位杆;30、连接板。Reference signs: 1. Deposition furnace; 101. Furnace body; 102. Upper furnace cover; 103. Lower furnace cover; 2. Sublimation chamber; 3. Deposition chamber; 4. Dust collection chamber; 5. Heating component; 6. Inlet gas system; 601, carbon source gas tank; 602, reducing gas tank; 603, air inlet pipe; 7, carrier gas system; 701 carrier gas tank; 702, gas pipe; 8, vacuum system; 801, vacuum pump; 802, suction Air pipe; 9. Cooling system; 901. Return water tank; 902. Water pipe; 903. Return pipe; 10. Graphite plate; 11. Ventilation hole; 12. Deposition parts; 13. Lifting system; 1301. Support frame; 1302. Sliding block; 1303, driving parts; 14, exhaust system; 1401, exhaust burner; 1402, bag dust collector; 15, cavity; 16, bottom plate; 17, crucible; 18, fixed plate; 19, sleeve; 20 , support block; 21. Insulation layer; 22. Receiving box; 23. Box cover; 24. Through hole; 25. Partition plate; 26. Dust collection box; 27. Avoidance tube; 28. Screw; 29. Limit Rod; 30. Connecting plate.

具体实施方式Detailed ways

以下结合附图和实施例对本申请作进一步详细说明。The present application will be further described in detail below in conjunction with the accompanying drawings and examples.

实施例Example

实施例1Example 1

一种纳米硅碳负极材料生产装置,参照图1和图2,包括沉积炉1、进气系统6、载气系统7、真空系统8、尾气系统14、冷却系统9和升降系统13。沉积炉1内设置有相互连通的升华室2、沉积室3和收尘室4。将硅基材料粉体放置在升华室2后,对升华室2进行加热,升华出的硅源气体。由于进气系统6可向沉积室3内通入碳源气体和还原性气体;载气系统7可向升华室2内通入惰性气体。因此,硅源气体在惰性气体的气流作用下,可快速进入沉积室3中,冷凝形成硅基颗粒粘附在沉积室3内,减少了硅基颗粒团聚,有利于被在沉积室3内受热分解的碳源气体进行包覆,得到颗粒大小均匀、一致性高、碳包覆层厚度均匀的硅碳负极材料。A nano silicon carbon negative electrode material production device, with reference to Figures 1 and 2, includes a deposition furnace 1, an air intake system 6, a carrier gas system 7, a vacuum system 8, an exhaust system 14, a cooling system 9 and a lifting system 13. The deposition furnace 1 is provided with a sublimation chamber 2, a deposition chamber 3 and a dust collection chamber 4 that are interconnected. After the silicon-based material powder is placed in the sublimation chamber 2, the sublimation chamber 2 is heated to sublimate the silicon source gas. The gas inlet system 6 can introduce carbon source gas and reducing gas into the deposition chamber 3; the carrier gas system 7 can introduce inert gas into the sublimation chamber 2. Therefore, the silicon source gas can quickly enter the deposition chamber 3 under the action of the inert gas flow, and condense to form silicon-based particles that adhere to the deposition chamber 3, which reduces the agglomeration of the silicon-based particles and is conducive to being heated in the deposition chamber 3. The decomposed carbon source gas is coated to obtain a silicon-carbon negative electrode material with uniform particle size, high consistency, and uniform carbon coating layer thickness.

参照图1和图2,沉积炉1包括炉体101、上炉盖102和下炉盖103,上炉盖102通过法兰密封在上炉体101顶部,下炉盖103通过法兰密封在炉体101底部。炉体101、上炉盖102和下炉盖103中均开设有空腔15,炉体101、上炉盖102和下炉盖103上均设置有与空腔15相互连通的进水管和出水管。Referring to Figures 1 and 2, the deposition furnace 1 includes a furnace body 101, an upper furnace cover 102 and a lower furnace cover 103. The upper furnace cover 102 is sealed on the top of the upper furnace body 101 through flanges, and the lower furnace cover 103 is sealed on the top of the furnace through flanges. Body 101 bottom. The furnace body 101, the upper furnace cover 102 and the lower furnace cover 103 are all provided with cavities 15. The furnace body 101, the upper furnace cover 102 and the lower furnace cover 103 are all provided with water inlet pipes and water outlet pipes interconnected with the cavity 15. .

参照图2和图3,下炉盖103上固定设置有位于炉体101内的底板16,底板16与炉体101的中心轴线相互垂直,并且底板16上放置有坩埚17。炉体101内固定设置有固定板18,固定板18上通过螺栓固定设置有位于坩埚17顶部的石墨板10,石墨板10与坩埚17的顶部抵接并形成升华室2,石墨板10表面开设有多个通气孔11。硅基材料粉体可放置在坩埚17内进行高温加热,升华出碳源气体。Referring to Figures 2 and 3, a bottom plate 16 located in the furnace body 101 is fixed on the lower furnace cover 103. The bottom plate 16 is perpendicular to the central axis of the furnace body 101, and a crucible 17 is placed on the bottom plate 16. A fixed plate 18 is fixedly provided in the furnace body 101. A graphite plate 10 located on the top of the crucible 17 is fixed on the fixed plate 18 with bolts. The graphite plate 10 abuts the top of the crucible 17 and forms a sublimation chamber 2. There are openings on the surface of the graphite plate 10. There are multiple ventilation holes 11. The silicon-based material powder can be placed in the crucible 17 for high-temperature heating to sublimate the carbon source gas.

参照图4,石墨板10远离固定板18的一侧上垂直固定设置有套筒19,石墨板10和套筒19形成沉积室3。石墨板10上设置有位于沉积室3内的沉积件12,本申请实施例中,沉积件12为沉积板,沉积板底部固定设置有支撑块20,支撑块20通过螺栓垂直固定设置在石墨板10上。升华室2中升华出的碳源气体沿通气孔11进入沉积室3内,冷凝形成硅基颗粒粘附在沉积板表面,有利于减少硅基颗粒团聚。Referring to FIG. 4 , a sleeve 19 is vertically fixed on the side of the graphite plate 10 away from the fixed plate 18 . The graphite plate 10 and the sleeve 19 form the deposition chamber 3 . The graphite plate 10 is provided with a deposition part 12 located in the deposition chamber 3. In the embodiment of the present application, the deposition part 12 is a deposition plate, and a support block 20 is fixed at the bottom of the deposition plate. The support block 20 is vertically fixed on the graphite plate through bolts. 10 on. The carbon source gas sublimated in the sublimation chamber 2 enters the deposition chamber 3 along the vent hole 11 and condenses to form silicon-based particles that adhere to the surface of the deposition plate, which is beneficial to reducing the agglomeration of the silicon-based particles.

坩埚17和套筒19上均套设有独立的加热组件5,本申请实施例中,加热组件5为感应线圈。坩埚17和套筒19上套设的感应线圈,是用异形紫铜管绕制而成,可在通电条件下,分别控制升华室2和沉积室3的温度,有利于硅基材料粉体在升华室2内升华,碳源气体在沉积室3内受热分解,得到包覆均匀、颗粒大小均一、一致性高的硅碳负极材料。The crucible 17 and the sleeve 19 are each equipped with an independent heating component 5. In the embodiment of the present application, the heating component 5 is an induction coil. The induction coils set on the crucible 17 and the sleeve 19 are made of special-shaped copper tubes. They can control the temperatures of the sublimation chamber 2 and the deposition chamber 3 respectively under energized conditions, which is beneficial to the deposition of silicon-based material powder. Sublimation occurs in the sublimation chamber 2, and the carbon source gas is thermally decomposed in the deposition chamber 3 to obtain a silicon carbon anode material with uniform coating, uniform particle size, and high consistency.

炉体101、上炉盖102和下炉盖103的内壁,均固定设置有保温层21,本申请实施例中,保温层21为保温毡。保温毡可减少坩埚17和套筒19内的热量散失,节约能耗。The inner walls of the furnace body 101, the upper furnace cover 102 and the lower furnace cover 103 are all fixed with an insulation layer 21. In the embodiment of the present application, the insulation layer 21 is an insulation felt. The thermal insulation felt can reduce heat loss in the crucible 17 and the sleeve 19 and save energy consumption.

套筒19远离石墨板10的一端通过螺栓固定设置有收料盒22,收料盒22顶部通过法兰密封有盒盖23,收料盒22和盒盖23形成收尘室4。收料盒22底部开设有与沉积室3相互连通的通孔24。部分沉积室3内的硅源气体可沿通孔24进入收尘室4中,冷凝成硅基颗粒粘附在收尘室4内。沉积室3内部分受热分解的碳源气体可沿通孔24进入收尘室4内,并在硅基颗粒表面包覆一层沉积碳,形成硅碳负极材料,有利于提高原料的利用率。The end of the sleeve 19 away from the graphite plate 10 is fixed with a collection box 22 through bolts. The top of the collection box 22 is sealed with a box cover 23 through a flange. The collection box 22 and the box cover 23 form a dust collection chamber 4 . The bottom of the material receiving box 22 is provided with a through hole 24 interconnected with the deposition chamber 3 . Part of the silicon source gas in the deposition chamber 3 can enter the dust collection chamber 4 along the through hole 24 and condense into silicon-based particles that adhere to the dust collection chamber 4 . Part of the thermally decomposed carbon source gas in the deposition chamber 3 can enter the dust collection chamber 4 along the through hole 24, and coat the surface of the silicon-based particles with a layer of deposited carbon to form a silicon-carbon negative electrode material, which is beneficial to improving the utilization rate of raw materials.

收料盒22内固定设置有隔板25并且隔板25与收料盒22的底部相互平行。收料盒22内通过螺栓固定设置有收尘盒26,收尘盒26与收尘室4相互连通。收尘盒26位于隔板25下方并与收料盒22的底部相互垂直。收尘盒26可增大收尘室4的面积,便于容纳硅碳负极材料和/或硅基颗粒。A partition 25 is fixedly installed in the material collection box 22 and the partition 25 and the bottom of the material collection box 22 are parallel to each other. A dust collecting box 26 is fixed inside the material collecting box 22 by bolts, and the dust collecting box 26 and the dust collecting chamber 4 are connected with each other. The dust collection box 26 is located below the partition 25 and is perpendicular to the bottom of the material collection box 22 . The dust collection box 26 can increase the area of the dust collection chamber 4 to accommodate silicon carbon negative electrode materials and/or silicon-based particles.

参照图1和图4,载气系统7包括载气罐701和输气管702,输气管702与载气罐701连通。载气罐701内含有惰性气体,惰性气体可选为氮气或氩气,本申请实施例中,惰性气体为氮气。输气管702远离载气罐701的一端贯穿上炉盖102、盒盖23、隔板25、收料盒22,并与升华室2连通。打开载气罐701上的阀门,惰性气体通过输气管702沿升华室2通入沉积室3和收尘室4中,保持升华室2、沉积室3和收尘室4中为惰性气体环境。Referring to Figures 1 and 4, the carrier gas system 7 includes a carrier gas tank 701 and a gas delivery pipe 702. The gas delivery pipe 702 is connected to the carrier gas tank 701. The carrier gas tank 701 contains an inert gas, which may be nitrogen or argon. In the embodiment of the present application, the inert gas is nitrogen. The end of the gas transmission pipe 702 away from the carrier gas tank 701 penetrates the upper furnace cover 102, the box cover 23, the partition 25, the material receiving box 22, and is connected with the sublimation chamber 2. Open the valve on the carrier gas tank 701, and the inert gas flows into the deposition chamber 3 and the dust collection chamber 4 through the gas pipe 702 along the sublimation chamber 2, maintaining the inert gas environment in the sublimation chamber 2, the deposition chamber 3 and the dust collection chamber 4.

参照图1和图4,进气系统6包括碳源气体罐601、还原性气体罐602和进气管603,碳源气体罐601、还原性气体罐602分别与进气管603相连通。坩埚17中部固定设置有避让筒27。进气管603远离碳源气体罐601、还原性气体罐602的一端贯穿上下炉盖103、底板16和避让筒27,并与沉积室3连通。碳源气体和还原性气体进入混气罐中混合后,沿进气管603通入沉积室3中,并与沉积室3内粘附的硅基颗粒进行气相化学沉积,生成硅碳负极材料。Referring to FIGS. 1 and 4 , the air intake system 6 includes a carbon source gas tank 601 , a reducing gas tank 602 and an air intake pipe 603 . The carbon source gas tank 601 and the reducing gas tank 602 are respectively connected with the air intake pipe 603 . An escape tube 27 is fixedly provided in the middle of the crucible 17 . The air inlet pipe 603 is away from the carbon source gas tank 601 and one end of the reducing gas tank 602 penetrates the upper and lower furnace covers 103, the bottom plate 16 and the escape tube 27, and is connected to the deposition chamber 3. After the carbon source gas and the reducing gas enter the gas mixing tank and are mixed, they are passed into the deposition chamber 3 along the air inlet pipe 603, and undergo vapor-phase chemical deposition with the silicon-based particles adhered in the deposition chamber 3 to generate silicon-carbon negative electrode materials.

本申请中,碳源气体罐601中的碳源气体可以是天然气、丙烯气、丙烷气、乙炔气等碳氢气体中的一种或多种;还原性气体罐602中的还原性气体可以是氢气、一氧化碳气中的一种。本申请实施例中,碳源气体是天然气,还原性气体是氢气。In this application, the carbon source gas in the carbon source gas tank 601 may be one or more hydrocarbon gases such as natural gas, propylene gas, propane gas, acetylene gas, etc.; the reducing gas in the reducing gas tank 602 may be One of hydrogen and carbon monoxide. In the embodiment of the present application, the carbon source gas is natural gas and the reducing gas is hydrogen.

参照图1和图4,真空系统8包括真空泵801和吸气管802,吸气管802和真空泵801的进气口连通。吸气管802贯穿上炉盖102、盒盖23、隔板25并位于收尘盒26上方。Referring to Figures 1 and 4, the vacuum system 8 includes a vacuum pump 801 and a suction pipe 802. The suction pipe 802 is connected with the air inlet of the vacuum pump 801. The suction pipe 802 penetrates the upper furnace cover 102, the box cover 23, the partition 25 and is located above the dust collection box 26.

参照图1,尾气系统14包括尾气燃烧器1401和布袋除尘器1402,尾气燃烧器1401分别与真空泵801的出气口和布袋除尘器1402连通。燃烧器将真空泵801中抽出的可燃气体进行燃烧后,经布袋除尘器1402去除粉尘后直接排放。Referring to Figure 1, the exhaust system 14 includes an exhaust burner 1401 and a bag dust collector 1402. The exhaust burner 1401 is connected to the air outlet of the vacuum pump 801 and the bag dust collector 1402 respectively. After the burner burns the combustible gas extracted from the vacuum pump 801, the dust is removed by the bag dust collector 1402 and then directly discharged.

参照图1和图3,冷却系统9包括回水箱901、输水管902和回水管903,回水箱901分别与输水管902和回水管903连通。回水箱901中设置有驱动冷却水进行循环的驱动装置。回水箱901通过输水管902分别与进水管和异形紫铜管的管口连通,回水箱901通过回水管903分别与出水管和异形紫铜管的另一管口连通。对感应线圈断电后,在回水箱901驱动装置的驱动下,输水管902将回水箱901中的冷却水通入空腔15和异形紫铜管中进行换热冷却,回水管903再将空腔15和异形紫铜管中进行换热冷却的水回流至回水箱901中,使得回水箱901分别与空腔15和异形紫铜管中的冷却水形成循环回流,可分别对上炉盖102、炉体101、下炉盖103和感应线圈进行降温,便于冷凝硅源气体以及剥落硅碳负极材料。Referring to Figures 1 and 3, the cooling system 9 includes a return water tank 901, a water delivery pipe 902 and a return water pipe 903. The return water tank 901 is connected to the water delivery pipe 902 and the return water pipe 903 respectively. The return tank 901 is provided with a driving device that drives the cooling water to circulate. The return water tank 901 is connected to the water inlet pipe and the nozzle of the special-shaped copper pipe respectively through the water delivery pipe 902, and the return water tank 901 is connected to the water outlet pipe and the other nozzle of the special-shaped copper pipe respectively through the return pipe 903. After the induction coil is powered off, driven by the driving device of the return water tank 901, the water delivery pipe 902 passes the cooling water in the return water tank 901 into the cavity 15 and the special-shaped copper tube for heat exchange and cooling. The return water pipe 903 then passes the empty The water used for heat exchange and cooling in the cavity 15 and the special-shaped copper tube flows back into the return water tank 901, so that the return water tank 901 forms a circulating return flow with the cooling water in the cavity 15 and the special-shaped copper tube, respectively, and can be connected to the upper furnace cover 102 respectively. , the furnace body 101, the lower furnace cover 103 and the induction coil are cooled down to facilitate the condensation of the silicon source gas and the peeling off of the silicon carbon negative electrode material.

参照图4和图5,升降系统13包括支撑架1301、丝杆28、滑移块1302和驱动件1303,本申请实施例中,驱动件1303为电机,电机固定设置在支撑架1301顶部,丝杆28一端固定设置在电机的输出轴上,丝杆28远离电机的一端通过轴承固定设置在支撑架1301底部。支撑架1301上固定设置有与丝杆28相互平行的限位杆29,滑移块1302分别套设在丝杆28和限位杆29上,并通过丝杆28螺母与丝杆28连接。滑移块1302上通过螺栓固定设置有连接板30,连接板30远离滑移块1302的一端与下炉盖103通过螺栓连接。打开电机,电机可驱动丝杆28转动,使得滑移块1302在丝杆28和限位杆29上滑动,可将下炉盖103、升华室2与炉体101进行脱离或结合,便于在升华室2中上下料。Referring to Figures 4 and 5, the lifting system 13 includes a support frame 1301, a screw rod 28, a sliding block 1302 and a driving member 1303. In the embodiment of the present application, the driving member 1303 is a motor, and the motor is fixedly installed on the top of the support frame 1301, and the wire One end of the rod 28 is fixed on the output shaft of the motor, and the end of the screw rod 28 away from the motor is fixed on the bottom of the support frame 1301 through a bearing. The support frame 1301 is fixed with a limiting rod 29 that is parallel to the screw rod 28 . The sliding block 1302 is respectively sleeved on the screw rod 28 and the limiting rod 29 , and is connected to the screw rod 28 through the screw rod 28 nut. The sliding block 1302 is provided with a connecting plate 30 fixed by bolts, and the end of the connecting plate 30 away from the sliding block 1302 is connected to the lower furnace cover 103 by bolts. Turn on the motor, and the motor can drive the screw rod 28 to rotate, so that the sliding block 1302 slides on the screw rod 28 and the limit rod 29, and the lower furnace cover 103, the sublimation chamber 2 and the furnace body 101 can be separated or combined to facilitate sublimation. Loading and unloading materials in room 2.

本申请实施例一种纳米硅碳负极材料生产装置的实施原理为:首先,通过电机驱动下炉盖103和坩埚17脱离炉体101,将硅基材料粉体放置在坩埚17中,再驱动下炉盖103和坩埚17与炉体101相结合后密封;然后采用真空泵801抽真空,并通过输气管702将氮气通入升华室2中。其次,采用感应线圈对坩埚17进行加热,升华出含有硅蒸汽的硅源气体;硅源气体在氮气的气流作用下沿通气孔11进入沉积室3中,冷凝并粘附在沉积板上。再次,采用感应线圈对套筒19进行加热,并将碳源气体和还原性气体沿进气管603通入沉积室3内,使得碳源气体分解并在硅基颗粒表面包覆一层沉积碳,形成硅碳负极材料。最后,回水箱901内的冷却水在炉体101、上炉盖102、下炉盖103和异形紫铜管中循环,降低沉积室3内的温度,促使硅碳负极材料从沉积板上剥落,便于收集硅碳负极材料。The implementation principle of a nano-silicon carbon negative electrode material production device in the embodiment of the present application is as follows: first, the lower furnace cover 103 and the crucible 17 are separated from the furnace body 101 by driving the motor, and the silicon-based material powder is placed in the crucible 17, and then the lower furnace lid 103 and the crucible 17 are driven by the motor. The furnace cover 103 and the crucible 17 are combined with the furnace body 101 and sealed; then a vacuum pump 801 is used to evacuate, and nitrogen is introduced into the sublimation chamber 2 through a gas pipe 702. Secondly, an induction coil is used to heat the crucible 17 to sublimate the silicon source gas containing silicon vapor; the silicon source gas enters the deposition chamber 3 along the vent hole 11 under the action of nitrogen gas flow, condenses and adheres to the deposition plate. Again, an induction coil is used to heat the sleeve 19, and the carbon source gas and the reducing gas are introduced into the deposition chamber 3 along the inlet pipe 603, so that the carbon source gas decomposes and coats the surface of the silicon-based particles with a layer of deposited carbon. Form silicon carbon negative electrode material. Finally, the cooling water in the return water tank 901 circulates in the furnace body 101, the upper furnace cover 102, the lower furnace cover 103 and the special-shaped copper tube, reducing the temperature in the deposition chamber 3, causing the silicon carbon anode material to peel off from the deposition plate. Convenient to collect silicon carbon anode materials.

实施例2Example 2

一种纳米硅碳负极材料生产装置,与实施例1的不同之处在于,参照图6,沉积件12为沉积管,沉积管表面开设有透气孔,沉积管固定设置在支撑块20上,支撑块20通过螺栓固定设置在收料盒22底部,使得沉积管悬挂在沉积室3内,有利于硅源气体和碳源气体在沉积管表面充分接触反应,得到颗粒大小均匀、一致性高、碳包覆层厚度均匀的硅碳负极材料。同时,本申请实施例中,硅源气体不仅可凝结在沉积管表面,还可穿过透气孔凝结在沉积管内壁,有利于提高硅基颗粒的产率。A nano-silicon carbon negative electrode material production device is different from Embodiment 1 in that, referring to Figure 6, the deposition part 12 is a deposition tube. There are ventilation holes on the surface of the deposition tube. The deposition tube is fixedly arranged on the support block 20. The support The block 20 is fixed at the bottom of the receiving box 22 by bolts, so that the deposition tube is suspended in the deposition chamber 3, which is conducive to the full contact reaction of the silicon source gas and the carbon source gas on the surface of the deposition tube to obtain uniform particle size, high consistency, and carbon Silicon carbon anode material with uniform coating thickness. At the same time, in the embodiments of the present application, the silicon source gas can not only condense on the surface of the deposition tube, but also condense on the inner wall of the deposition tube through the ventilation holes, which is beneficial to improving the yield of silicon-based particles.

载气系统7中,输气管702远离载气罐701的一端贯穿下炉盖103、底板16和避让筒27,并与升华室2连通。进气系统6中,进气管603远离混气罐的一端贯穿上炉盖102、盒盖23、隔板25和收料盒22,并与沉积室3连通。输气管702中冲出的惰性气体可将升华室2中的硅源气体冲至沉积室3中,有利于提高硅基颗粒的产率。In the carrier gas system 7 , the end of the gas delivery pipe 702 away from the carrier gas tank 701 penetrates the lower furnace cover 103 , the bottom plate 16 and the escape tube 27 , and is connected to the sublimation chamber 2 . In the air inlet system 6 , the end of the air inlet pipe 603 away from the gas mixing tank penetrates the upper furnace cover 102 , the box cover 23 , the partition 25 and the material receiving box 22 , and is connected to the deposition chamber 3 . The inert gas flushed out of the gas pipe 702 can flush the silicon source gas in the sublimation chamber 2 into the deposition chamber 3, which is beneficial to improving the yield of silicon-based particles.

实施例3Example 3

一种纳米硅碳负极材料生产装置,与实施例2的不同之处在于,沉积件12为沉积板。A nano-silicon carbon negative electrode material production device is different from Embodiment 2 in that the deposition part 12 is a deposition plate.

实施例4Example 4

一种纳米硅碳负极材料生产装置,与实施例1的不同之处在于,沉积件12为沉积管。A nano-silicon carbon negative electrode material production device is different from Embodiment 1 in that the deposition part 12 is a deposition tube.

实施例5Example 5

一种纳米硅碳负极材料生产装置,与实施例1的不同之处在于,进气管603远离碳源气体罐601、还原性气体罐602的一端贯穿上贯穿上炉盖102、盒盖23、隔板25、收料盒22,并与升华室2连通。A nano silicon carbon negative electrode material production device is different from Embodiment 1 in that the air inlet pipe 603 is far away from the carbon source gas tank 601 and one end of the reducing gas tank 602 penetrates through the upper furnace cover 102, the box cover 23, the partition The plate 25 and the receiving box 22 are connected with the sublimation chamber 2.

实施例6Example 6

一种纳米硅碳负极材料生产装置生产硅碳负极材料的生产方法,采用实施例1的纳米硅碳负极材料生产装置生产。A production method for producing silicon carbon negative electrode material by a nanometer silicon carbon negative electrode material production device, which is produced by using the nanometer silicon carbon negative electrode material production device of Embodiment 1.

上述生产方法,参照图1、图2和图5,包括以下步骤:The above production method, with reference to Figure 1, Figure 2 and Figure 5, includes the following steps:

S1:打开电机,驱动滑移块1302在丝杆28和限位杆29上滑动,使得下炉盖103和坩埚17脱离炉体101;将硅基材料粉体放置在坩埚17中,再通过电机驱动下炉盖103和坩埚17与炉体101相结合后采用法兰密封;打开真空泵801,通过吸气管802控制升华室2、沉积室3和收尘室4的真空度为5000-1000Pa(本申请实施例为5000Pa),然后通过输气管702将流量为15-24L/min(本申请实施例为15L/min)、压力为1-10kPa(本申请实施例为1kPa)的氮气通入升华室2中。S1: Turn on the motor, drive the sliding block 1302 to slide on the screw rod 28 and the limit rod 29, so that the lower furnace cover 103 and the crucible 17 are separated from the furnace body 101; place the silicon-based material powder in the crucible 17, and then pass the motor Drive the lower furnace cover 103 and crucible 17 to combine with the furnace body 101 and use flange sealing; turn on the vacuum pump 801, and control the vacuum degree of the sublimation chamber 2, deposition chamber 3 and dust collection chamber 4 through the suction pipe 802 to 5000-1000Pa ( 5000Pa in the embodiment of the present application), and then pass nitrogen with a flow rate of 15-24L/min (15L/min in the embodiment of the present application) and a pressure of 1-10kPa (1kPa in the embodiment of the present application) through the gas pipe 702 into the sublimation Room 2.

S2:采用感应线圈对坩埚17加热至1000-1400℃(本申请实施例为1000℃),其中,加热时间为1-3h(本申请实施例为1h),使得升华室2中升华出含有硅蒸汽的硅源气体;硅源气体在氮气的气流作用下沿通气孔11进入沉积室3中;驱动回水箱901内的冷却水在炉体101、上炉盖102、下炉盖103和套筒19外侧的异形紫铜管中循环,其中,冷却水的温度为20-25℃,冷却水循环时间为1-5h(本申请实施例为4h),降低沉积室3内的温度,使得沉积室3中的硅源气体冷凝形成硅基颗粒并粘附在沉积板上。S2: Use an induction coil to heat the crucible 17 to 1000-1400°C (1000°C in this embodiment), where the heating time is 1-3h (1h in this embodiment), so that the silicon contained in the sublimation chamber 2 is sublimated. The silicon source gas of steam; the silicon source gas enters the deposition chamber 3 along the vent hole 11 under the action of the nitrogen gas flow; the cooling water in the return water tank 901 is driven to circulate in the furnace body 101, the upper furnace cover 102, the lower furnace cover 103 and the sleeve 19 circulates in the special-shaped copper tube outside, where the temperature of the cooling water is 20-25°C, the cooling water circulation time is 1-5h (4h in the embodiment of this application), and the temperature in the deposition chamber 3 is reduced, so that the deposition chamber 3 The silicon source gas in the vapor condenses to form silicon-based particles and adhere to the deposition plate.

S3:采用感应线圈对套筒19加热至600-1300℃(本申请实施例为1200℃),并将流量为1-10L/min(本申请实施例为5L/min),压力为2-5kPa(本申请实施例为2kPa)的碳源气体,流量为1-10L/min(本申请实施例为5L/min),压力为2-5kPa(本申请实施例为2kPa)的还原性气体,沿进气管603通入沉积室3内,保温1-48h(本申请实施例为5h),使得碳源气体分解并在硅基颗粒表面包覆一层沉积碳,形成硅碳负极材料。S3: Use an induction coil to heat the sleeve 19 to 600-1300°C (1200°C in the embodiment of this application), set the flow rate to 1-10L/min (5L/min in the embodiment of this application), and set the pressure to 2-5kPa (The embodiment of the present application is 2kPa) carbon source gas, the flow rate is 1-10L/min (the embodiment of the present application is 5L/min), the pressure is 2-5kPa (the embodiment of the present application is 2kPa) reducing gas, along the The air inlet pipe 603 is led into the deposition chamber 3 and kept warm for 1-48 hours (5 hours in the embodiment of this application), so that the carbon source gas decomposes and coats the surface of the silicon-based particles with a layer of deposited carbon to form a silicon-carbon negative electrode material.

S4:驱动回水箱901内的冷却水在炉体101、上炉盖102、下炉盖103和套筒19外侧的异形紫铜管中循环,其中,冷却水的温度为20-25℃,冷却水循环时间为1-5h(本申请实施例为4h),降低沉积室3内的温度,促使硅碳负极材料从沉积板上剥落,收集硅碳负极材料。S4: The cooling water in the drive return tank 901 circulates in the furnace body 101, the upper furnace cover 102, the lower furnace cover 103 and the special-shaped copper tube outside the sleeve 19. The temperature of the cooling water is 20-25°C. The water circulation time is 1-5 hours (4 hours in the embodiment of this application). The temperature in the deposition chamber 3 is lowered to promote the silicon carbon negative electrode material to peel off from the deposition plate, and the silicon carbon negative electrode material is collected.

对硅碳负极材料进行拉曼光谱(Raman spectra)检测。检测结果显示,两者峰强度之比ID/IG为 2,由此表明,本申请的硅碳负极材料,具有较高的致密性。Conduct Raman spectra detection on silicon carbon anode materials. The test results show that the ratio of the two peak intensities, ID/IG, is 2, which shows that the silicon carbon anode material of the present application has high density.

通过N2物理吸附及Brunauer-EmmetteTeller(BET)方法对硅碳负极材料的测比表面(specific surface area,SSA)进行检测。检测结果显示,本申请实施例的硅碳负极材料满足商用产品对于SSA小于2 m2/g 这一要求,由此表明本申请实施例中,硅碳负极材料的碳层包覆致密。The specific surface area (SSA) of the silicon carbon anode material was detected through N 2 physical adsorption and the Brunauer-Emmette Teller (BET) method. The test results show that the silicon carbon anode material in the embodiment of the present application meets the requirement for commercial products that the SSA is less than 2 m 2 /g, which shows that the carbon layer of the silicon carbon anode material in the embodiment of the present application is densely coated.

本申请纳米硅碳负极材料生产装置生产硅碳负极材料的生产方法中,温度、时间、真空度和气体流量在上述范围内时,硅碳负极材料的性能与实施例5相同。因此,本申请仅以请实施例5的温度、时间、真空度和气体流量举例作简要说明,但并不影响本申请请求保护的其他温度、时间、真空度和气体流量在本申请中的应用。In the production method of silicon carbon negative electrode material produced by the nano silicon carbon negative electrode material production device of the present application, when the temperature, time, vacuum degree and gas flow are within the above range, the performance of the silicon carbon negative electrode material is the same as that in Example 5. Therefore, this application only briefly describes the temperature, time, vacuum degree and gas flow rate of Example 5 as examples, but this does not affect the application of other temperatures, times, vacuum degrees and gas flow rates claimed in this application in this application. .

对比例1Comparative example 1

一种硅碳负极材料生产装置生产硅碳负极材料的生产方法,与实施例6的不同之处在于,采用实施例5的纳米硅碳负极材料生产装置生产。A method for producing silicon carbon negative electrode material using a silicon carbon negative electrode material production device. The difference from Example 6 is that the nanometer silicon carbon negative electrode material production device of Example 5 is used for production.

对硅碳负极材料进行拉曼光谱(Raman spectra)检测。检测结果显示,两者峰强度之比ID/IG为1.5,由此表明,本申请对比例的硅碳负极材料,具有较低的致密性。Conduct Raman spectra detection on silicon carbon anode materials. The test results show that the ratio of the two peak intensities, ID/IG, is 1.5, which shows that the silicon carbon anode material in the comparative example of the present application has low density.

通过N2物理吸附及Brunauer-EmmetteTeller(BET)方法对硅碳负极材料的测比表面(specific surface area,SSA)进行检测。检测结果显示,本申请实施例的硅碳负极材料不满足商用产品对于SSA小于2 m2/g这一要求,由此表明,硅碳负极材料的碳层包覆致密性低。The specific surface area (SSA) of the silicon carbon anode material was detected through N 2 physical adsorption and the Brunauer-Emmette Teller (BET) method. The test results show that the silicon carbon anode material in the embodiment of the present application does not meet the requirement of commercial products that the SSA is less than 2 m 2 /g, which shows that the carbon layer coating density of the silicon carbon anode material is low.

本具体实施例仅仅是对本申请的解释,其并不是对本申请的限制,本领域技术人员在阅读完本说明书后可以根据需要对本实施例做出没有创造性贡献的修改,但只要在本申请的权利要求范围内都受到专利法的保护。This specific embodiment is only an explanation of the present application, and it is not a limitation of the present application. After reading this specification, those skilled in the art can make modifications to this embodiment without creative contribution as needed, but as long as the rights of this application are All requirements are protected by patent law.

Claims (9)

1.一种纳米硅碳负极材料生产装置,其特征在于,包括:1. A nano-silicon carbon negative electrode material production device, characterized in that it includes: 沉积炉(1),所述沉积炉(1)内设置有升华室(2)、沉积室(3)和收尘室(4),所述升华室(2)、收尘室(4)分别与沉积室(3)连通,所述炉体(101)内设置有分别对升华室(2)、沉积室(3)进行加热的加热组件(5);Deposition furnace (1). The deposition furnace (1) is provided with a sublimation chamber (2), a deposition chamber (3) and a dust collection chamber (4). The sublimation chamber (2) and dust collection chamber (4) are respectively Communicated with the deposition chamber (3), the furnace body (101) is provided with heating components (5) for heating the sublimation chamber (2) and the deposition chamber (3) respectively; 所述升华室(2)用于采用加热组件(5)对硅基材料粉体加热生成硅源气体;The sublimation chamber (2) is used to heat silicon-based material powder using a heating component (5) to generate silicon source gas; 所述沉积室(3)用于采用加热组件(5)将碳源气体和硅源气体进行加热发生化学气相沉积生成硅碳负极材料;The deposition chamber (3) is used to use a heating assembly (5) to heat the carbon source gas and the silicon source gas to cause chemical vapor deposition to generate silicon carbon anode material; 所述收尘室(4)用于收集硅碳负极材料;The dust collection chamber (4) is used to collect silicon carbon negative electrode materials; 进气系统(6),所述进气系统(6)用于向沉积室(3)内通入碳源气体和还原性气体;An air intake system (6), which is used to introduce carbon source gas and reducing gas into the deposition chamber (3); 载气系统(7),所述载气系统(7)用于向升华室(2)内通入惰性气体;Carrier gas system (7), the carrier gas system (7) is used to introduce inert gas into the sublimation chamber (2); 真空系统(8),所述真空系统(8)用于对升华室(2)、沉积室(3)和收尘室(4)进行抽真空;Vacuum system (8), the vacuum system (8) is used to evacuate the sublimation chamber (2), deposition chamber (3) and dust collection chamber (4); 冷却系统(9),所述冷却系统(9)用于对升华室(2)、沉积室(3)和收尘室(4)进行降温。Cooling system (9), the cooling system (9) is used to cool down the sublimation chamber (2), the deposition chamber (3) and the dust collection chamber (4). 2.根据权利要求1所述的纳米硅碳负极材料生产装置,其特征在于,所述载气系统(7)包括载气罐(701)和输气管(702),所述载气罐(701)内含有惰性气体,所述输气管(702)和载气罐(701)连通,所述输气管(702)远离载气罐(701)的一端贯穿收尘室(4)和沉积室(3)并与升华室(2)连通;2. The nano silicon carbon negative electrode material production device according to claim 1, characterized in that the carrier gas system (7) includes a carrier gas tank (701) and a gas delivery pipe (702), and the carrier gas tank (701 ) contains inert gas, the gas pipe (702) is connected with the carrier gas tank (701), and the end of the gas pipe (702) away from the carrier gas tank (701) runs through the dust collection chamber (4) and the deposition chamber (3 ) and connected with the sublimation chamber (2); 所述进气系统(6)包括碳源气体罐(601)、还原性气体罐(602)和进气管(603),所述碳源气体罐(601)、还原性气体罐(602)分别与进气管(603)连通,所述进气管(603)远离碳源气体罐(601)、还原性气体罐(602)的一端贯穿升华室(2)并与沉积室(3)连通。The air intake system (6) includes a carbon source gas tank (601), a reducing gas tank (602) and an air intake pipe (603). The carbon source gas tank (601) and the reducing gas tank (602) are respectively connected with The air inlet pipe (603) is connected. One end of the air inlet pipe (603) away from the carbon source gas tank (601) and the reducing gas tank (602) penetrates the sublimation chamber (2) and is connected with the deposition chamber (3). 3.根据权利要求1所述的纳米硅碳负极材料生产装置,其特征在于,所述载气系统(7)包括载气罐(701)和输气管(702),所述载气罐(701)内含有惰性气体,所述输气管(702)和载气罐(701)连通,所述输气管(702)远离载气罐(701)的一端与升华室(2)连通;3. The nano silicon carbon anode material production device according to claim 1, characterized in that the carrier gas system (7) includes a carrier gas tank (701) and a gas delivery pipe (702), and the carrier gas tank (701 ) contains inert gas, the gas pipe (702) is connected to the carrier gas tank (701), and the end of the gas pipe (702) away from the carrier gas tank (701) is connected to the sublimation chamber (2); 所述进气系统(6)包括碳源气体罐(601)、还原性气体罐(602)和进气管(603),所述碳源气体罐(601)、还原性气体罐(602)分别与进气管(603)连通,所述进气管(603)远离碳源气体罐(601)、还原性气体罐(602)的一端贯穿收尘室(4)并与沉积室(3)连通。The air intake system (6) includes a carbon source gas tank (601), a reducing gas tank (602) and an air intake pipe (603). The carbon source gas tank (601) and the reducing gas tank (602) are respectively connected with The air inlet pipe (603) is connected. One end of the air inlet pipe (603) away from the carbon source gas tank (601) and the reducing gas tank (602) penetrates the dust collection chamber (4) and is connected with the deposition chamber (3). 4.根据权利要求1所述的纳米硅碳负极材料生产装置,其特征在于,所述炉体(101)内设置有位于升华室(2)和沉积室(3)之间的石墨板(10),所述石墨板(10)表面开设有通气孔(11)。4. The nano-silicon carbon negative electrode material production device according to claim 1, characterized in that a graphite plate (10) located between the sublimation chamber (2) and the deposition chamber (3) is provided in the furnace body (101). ), and ventilation holes (11) are provided on the surface of the graphite plate (10). 5.根据权利要求4所述的纳米硅碳负极材料生产装置,其特征在于,所述沉积室(3)内设置有用于收集硅碳负极材料的沉积件(12),所述沉积件(12)与石墨板(10)或沉积室(3)顶部可拆卸连接。5. The nano-silicon carbon anode material production device according to claim 4, characterized in that a deposition part (12) for collecting silicon carbon anode material is provided in the deposition chamber (3), and the deposition part (12) ) is detachably connected to the graphite plate (10) or the top of the deposition chamber (3). 6.根据权利要求5所述的纳米硅碳负极材料生产装置,其特征在于,所述沉积件(12)为沉积板或沉积管。6. The nano-silicon carbon negative electrode material production device according to claim 5, characterized in that the deposition part (12) is a deposition plate or a deposition tube. 7.根据权利要求1所述的纳米硅碳负极材料生产装置,其特征在于,所述沉积炉(1)包括炉体(101)、上炉盖(102)和下炉盖(103),所述上炉盖(102)可拆卸设置在上炉体(101)顶部,所述下炉盖(103)可拆卸设置在炉体(101)底部;7. The nano silicon carbon negative electrode material production device according to claim 1, characterized in that the deposition furnace (1) includes a furnace body (101), an upper furnace cover (102) and a lower furnace cover (103), so The upper furnace cover (102) is detachably installed on the top of the upper furnace body (101), and the lower furnace cover (103) is detachably installed on the bottom of the furnace body (101); 所述纳米硅碳负极材料生产装置,还包括升降系统(13),所述升降系统(13)固定设置在下炉盖(103)上,用于驱动下炉盖(103)和升华室(2)与炉体(101)进行脱离或结合。The nano silicon carbon negative electrode material production device also includes a lifting system (13). The lifting system (13) is fixedly installed on the lower furnace cover (103) and is used to drive the lower furnace cover (103) and the sublimation chamber (2). Detach or combine with the furnace body (101). 8.根据权利要求7所述的纳米硅碳负极材料生产装置,其特征在于,所述升降系统(13)包括支撑架(1301)和多块滑移块(1302),所述支撑架(1301)架设在下炉盖(103)周侧,多块所述滑移块(1302)与下炉盖(103)可拆卸设置,所述支撑架(1301)上设置有驱动滑移块(1302)在支撑架(1301)上滑移升降的驱动件(1303)。8. The nano silicon carbon negative electrode material production device according to claim 7, characterized in that the lifting system (13) includes a support frame (1301) and a plurality of sliding blocks (1302), and the support frame (1301 ) is erected on the peripheral side of the lower furnace cover (103), a plurality of sliding blocks (1302) and the lower furnace cover (103) are detachably arranged, and a driving sliding block (1302) is provided on the support frame (1301). The driving member (1303) for sliding and lifting on the support frame (1301). 9.权利要求1-8任一所述纳米硅碳负极材料生产装置生产硅碳负极材料的生产方法,其特征在于,包括以下步骤:9. The production method for producing silicon carbon negative electrode material by the nano silicon carbon negative electrode material production device according to any one of claims 1 to 8, characterized in that it includes the following steps: S1:将硅基材料放置在升华室(2)中,先采用真空系统(8)控制升华室(2)、沉积室(3)和收尘室(4)的真空度,再采用载气系统(7)将惰性气体通入升华室(2)内;S1: Place the silicon-based material in the sublimation chamber (2), first use the vacuum system (8) to control the vacuum degree of the sublimation chamber (2), deposition chamber (3) and dust collection chamber (4), and then use the carrier gas system (7) Pass the inert gas into the sublimation chamber (2); S2:采用加热组件(5)对升华室(2)加热,使得升华室(2)中升华出硅源气体,并且惰性气体可将硅源气体携带至沉积室(3)中;再采用冷却系统(9)调节沉积室(3)温度,使得硅源气体冷凝形成硅基颗粒;S2: Use the heating component (5) to heat the sublimation chamber (2), so that the silicon source gas is sublimated out of the sublimation chamber (2), and the inert gas can carry the silicon source gas to the deposition chamber (3); then use a cooling system (9) Adjust the temperature of the deposition chamber (3) so that the silicon source gas condenses to form silicon-based particles; S3:采用加热组件(5)对沉积室(3)加热,并将碳源气体和还原性气体沿进气管(603)通入沉积室(3)内,保温,碳源气体在硅基颗粒表面发生气相化学沉积,形成硅碳负极材料;S3: Use the heating component (5) to heat the deposition chamber (3), and pass the carbon source gas and reducing gas into the deposition chamber (3) along the inlet pipe (603) to maintain heat. The carbon source gas is on the surface of the silicon-based particles. Vapor phase chemical deposition occurs to form silicon carbon anode material; S4:采用冷却系统(9)调节沉积室(3)温度,使得沉积室(3)内的硅碳负极材料剥落,收集硅碳负极材料;S4: Use the cooling system (9) to adjust the temperature of the deposition chamber (3), causing the silicon carbon anode material in the deposition chamber (3) to peel off, and collect the silicon carbon anode material; 其中,惰性气体的流量为15-24L/min,压力为1-10kPa;Among them, the flow rate of inert gas is 15-24L/min, and the pressure is 1-10kPa; 碳源气体的流量为1-10L/min,压力为2-5kPa;The flow rate of carbon source gas is 1-10L/min, and the pressure is 2-5kPa; 还原性气体的流量为1-10L/min,压力为2-5kPa。The flow rate of reducing gas is 1-10L/min, and the pressure is 2-5kPa.
CN202311004100.7A 2023-08-09 2023-08-09 Device and method for producing nano silicon-carbon negative electrode material Pending CN117026200A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117604486A (en) * 2023-12-06 2024-02-27 松山湖材料实验室 Carbon coating apparatus and method
CN118287346A (en) * 2024-04-20 2024-07-05 山东迈特瑞澳材料科技有限公司 Vacuum silicon-carbon cladding equipment for continuously producing silicon-based negative electrode material
CN118814138A (en) * 2024-09-19 2024-10-22 江苏道金智能制造科技股份有限公司 A preparation system for silicon-oxygen negative electrode materials for lithium batteries

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104342631A (en) * 2013-07-24 2015-02-11 广东先导稀材股份有限公司 Chemical vapor deposition furnace
WO2016031146A1 (en) * 2014-08-27 2016-03-03 株式会社豊田自動織機 Method for producing carbon-coated silicon material
CN109554687A (en) * 2017-09-27 2019-04-02 新特能源股份有限公司 The method that chemical vapor deposition stove and production aoxidize sub- silicon
CN110137446A (en) * 2019-04-03 2019-08-16 兰溪致德新能源材料有限公司 Nano-silicone wire/carbon negative electrode material process units and production technology
CN215328348U (en) * 2021-06-07 2021-12-28 苏州步科斯新材料科技有限公司 Silicon carbide coating equipment

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104342631A (en) * 2013-07-24 2015-02-11 广东先导稀材股份有限公司 Chemical vapor deposition furnace
WO2016031146A1 (en) * 2014-08-27 2016-03-03 株式会社豊田自動織機 Method for producing carbon-coated silicon material
CN109554687A (en) * 2017-09-27 2019-04-02 新特能源股份有限公司 The method that chemical vapor deposition stove and production aoxidize sub- silicon
CN110137446A (en) * 2019-04-03 2019-08-16 兰溪致德新能源材料有限公司 Nano-silicone wire/carbon negative electrode material process units and production technology
CN215328348U (en) * 2021-06-07 2021-12-28 苏州步科斯新材料科技有限公司 Silicon carbide coating equipment

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
蒋阳等: "《粉体工程》", 31 December 2005, 合肥工业大学出版社, pages: 171 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117604486A (en) * 2023-12-06 2024-02-27 松山湖材料实验室 Carbon coating apparatus and method
CN118287346A (en) * 2024-04-20 2024-07-05 山东迈特瑞澳材料科技有限公司 Vacuum silicon-carbon cladding equipment for continuously producing silicon-based negative electrode material
CN118814138A (en) * 2024-09-19 2024-10-22 江苏道金智能制造科技股份有限公司 A preparation system for silicon-oxygen negative electrode materials for lithium batteries

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