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CN1178285C - Method for packaging integrated circuit by printing - Google Patents

Method for packaging integrated circuit by printing Download PDF

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CN1178285C
CN1178285C CNB021468583A CN02146858A CN1178285C CN 1178285 C CN1178285 C CN 1178285C CN B021468583 A CNB021468583 A CN B021468583A CN 02146858 A CN02146858 A CN 02146858A CN 1178285 C CN1178285 C CN 1178285C
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chip
integrated circuit
substrate
sealant
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CN1405870A (en
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��ҫ��
何昆耀
宫振越
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Via Technologies Inc
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Abstract

本发明涉及一种以印刷方式构装集成电路的方法,当包含焊接凸块的芯片放置于基板上后,随即利用本发明的网板(Stencil)将封胶以印刷的方式填入芯片与基板之间的间隙以将芯片固定于基板上,由本发明的网板上的网目分布密度及样式设计的不同而控制封胶进入芯片与基板间的间隙的模式与速度,以避免在形成集成电路的构装结构后,芯片与基板之间的封胶内部产生气孔(Void)而降低构装集成电路的效能与品质。

Figure 02146858

The present invention relates to a method for assembling an integrated circuit by printing. After a chip including solder bumps is placed on a substrate, a sealant is then filled into the gap between the chip and the substrate by printing using a stencil of the present invention to fix the chip on the substrate. The pattern and speed of the sealant entering the gap between the chip and the substrate are controlled by the mesh distribution density and pattern design on the stencil of the present invention to avoid the generation of voids inside the sealant between the chip and the substrate after the integrated circuit assembly structure is formed, thereby reducing the performance and quality of the assembled integrated circuit.

Figure 02146858

Description

以印刷方式构装集成电路的方法Method for structuring integrated circuits by printing

技术领域technical field

本发明涉及一种以印刷方式构装集成电路的方法,以避免在形成集成电路的构装结构后,芯片与基板之间的封胶内部产生气孔而降低构装集成电路的效能与品质。The invention relates to a method for assembling an integrated circuit by printing, so as to avoid air holes in the sealant between the chip and the substrate to reduce the performance and quality of the integrated circuit after the integrated circuit is formed.

背景技术Background technique

集成电路一般需要架构于构装材料之内,例如传统的四边扁平构装(Quad Flat Package,QFP)。平坦的构装结构包含一引脚架,在引脚架上有许多接触于集成电路芯片(Chip)的引线。芯片被构装在一有机械支撑及与电路绝缘的坚固塑料内,而引线主要是焊接在印刷电路板上。Integrated circuits generally need to be constructed within a package material, such as the traditional Quad Flat Package (QFP). The flat assembly structure includes a lead frame on which there are many leads contacting an integrated circuit chip (Chip). The chip is housed in a strong plastic that is mechanically supported and insulated from the circuit, while the leads are primarily soldered to the printed circuit board.

在过去,集成电路厂商所发展出来的集成电路构装技术,已企图满足微小化的要求。对于微小化的集成电路改良方法,是使其能够在硅底材上结合包含电路、芯片等数以百万计的晶体管电路组件。这些改良的方法导致在有限的空间中构装电路组件的方法更受到重视。In the past, integrated circuit manufacturers have developed integrated circuit packaging technologies to meet the miniaturization requirements. The improvement method for miniaturized integrated circuits is to enable it to combine millions of transistor circuit components including circuits, chips, etc. on a silicon substrate. These improved methods have led to a greater emphasis on methods of building circuit assemblies in limited spaces.

集成电路由一硅晶圆经过复杂的蚀刻、掺杂、沉积及切割等技术,在集成电路设备中制造出来。一硅晶圆至少包含一集成电路芯片,每一芯片代表一单独的集成电路。最后,此芯片可由包围在芯片四周的塑料模具构装起来,且有多样化的针脚露出和互相连接的设计。例如:提供一相当平坦构装的M型双列直插式构装体(M Dual-In-Line-Package;M-Dip),其有两列平行的引脚从底部穿通孔中延伸出来,接触并固定于在下面的集成电路板上。容许较高密度集成电路的印刷电路板为单列式构装体(Single-In-Line-Package;SIP)和小外型接脚构装(Small Outline J-leaded;SOJ),其为采用模型的构装。Integrated circuits are manufactured in integrated circuit equipment from a silicon wafer through complex etching, doping, deposition and cutting techniques. A silicon wafer contains at least one integrated circuit chip, each chip representing an individual integrated circuit. Finally, the chip can be constructed by a plastic mold surrounding the chip, and has a variety of pin exposure and interconnection designs. For example: provide a fairly flat M-type dual-in-line-package (M Dual-In-Line-Package; M-Dip), which has two rows of parallel pins extending from the bottom through-hole, Contact and secure to the underlying IC board. Printed circuit boards that allow higher density integrated circuits are Single-In-Line-Package (SIP) and Small Outline J-leaded (SOJ), which are model-based Construct.

依照构装中组合的集成电路芯片数目,构装集成电路的种类大致可分为单芯片构装(Single Chip Package;SCP)与多芯片构装(MultichipPackage;MCP)两大类,多芯片构装也包括多芯片模块构装(MultichipModule;MCM)。若依照组件与电路板的接合方式,构装集成电路可区分为引脚插入型(Pin-Through-Hole;PTH)与表面黏着型(Surface MountTechnology;SMT)两大类。引脚插入型组件的引脚为细针状或是薄板状金属,以供插入脚座(Socket)或电路板的导孔(Via)中进行焊接固定。而表面黏着型的组件则先黏贴于电路板上后再以焊接的方式固定。目前所采用的较先进的构装技术为芯片直接黏结(Direct Chip Attach;DCA)构装,以降低构装集成电路的体积的大小,并增加构装集成电路内部的电路的积集度。芯片直接黏结的技术为直接将集成电路的芯片(Integrated Circuit Chip)固定至基板(Substrate)上,再进行电路的连结。According to the number of integrated circuit chips combined in the structure, the types of integrated circuits can be roughly divided into two categories: single chip package (Single Chip Package; SCP) and multichip package (Multichip Package; MCP). Also includes multi-chip module construction (MultichipModule; MCM). According to the bonding method of components and circuit boards, integrated circuits can be divided into two types: Pin-Through-Hole (PTH) and Surface Mount Technology (SMT). The pins of the pin-inserted components are thin needle-shaped or thin-plate-shaped metals, which can be inserted into the socket (Socket) or the guide hole (Via) of the circuit board for soldering and fixing. The surface mount components are first pasted on the circuit board and then fixed by soldering. The more advanced assembly technology currently used is Direct Chip Attach (DCA) assembly to reduce the size of the integrated circuit and increase the integration of the circuits inside the integrated circuit. The technology of direct chip bonding is to directly fix the integrated circuit chip (Integrated Circuit Chip) to the substrate (Substrate), and then connect the circuit.

目前所采用最普遍的构装方式为打线接合(wire-bonding)的方式,即为先将芯片固定在引脚架(lead-frame)上,接下来利用导线连接引脚架及芯片并利用灌胶模混合物(Molding Compound)覆盖芯片及部分的引脚架以形成一构装集成电路。构装集成电路可利用露出的引脚架固定于基板上以连接基板上的电路与构装集成电路内的电路。由于利用打线接合的构装技术无法缩小构装集成电路的体积,因此目前已发展出一覆晶接合(Flip-Chip)的构装技术以符合构装集成电路的体积越来越小的需求。覆晶接合的构装技术的特点为首先将芯片借芯片主动面上所安装的焊接凸块直接固定于基板上。接下来利用覆晶填充(Underfill)的方式将封胶填入芯片与基板之间的间隙以将芯片固定于基板上并保护芯片与基板之间的连结界面。由于不需使用引脚架,因此利用覆晶接合技术的构装集成电路的体积可充分地缩小以符合产品的需求。At present, the most common method of assembly is wire-bonding, that is, the chip is first fixed on the lead-frame (lead-frame), and then the lead-frame and the chip are connected by wires and used The molding compound covers the chip and part of the lead frame to form a packaged integrated circuit. The built-up integrated circuit can be fixed on the substrate by using the exposed lead frame to connect the circuit on the substrate and the circuit in the built-up integrated circuit. Since the wire-bonded assembly technology cannot reduce the size of the integrated circuit, a flip-chip bonding (Flip-Chip) assembly technology has been developed to meet the increasingly smaller requirements of the integrated circuit. . The feature of the flip-chip bonding assembly technology is that firstly, the chip is directly fixed on the substrate by soldering bumps installed on the active surface of the chip. Next, an underfill method is used to fill the gap between the chip and the substrate with encapsulant to fix the chip on the substrate and protect the connection interface between the chip and the substrate. Since no lead frame is required, the volume of integrated circuits constructed using the flip-chip bonding technology can be sufficiently reduced to meet product requirements.

参照图1所示,此为传统进行覆晶填充(Underfill)构装制程的示意图。参照图2A至图2C所示,此为利用传统方式进行覆晶填充构装制程时,封胶的填充模式及所产生的缺陷的示意图。在传统进行覆晶填充构装制程时,首先会将芯片10由芯片10上的焊接凸块连接至基板20上。接下来利用填胶装置25将封胶30填入芯片10与基板20之间的间隙,以保护芯片10与基板20之间的接触点。在传统的填胶过程中,填胶装置25所移动的路线大部分采用「一」字型、「L」字型或是「ㄇ」字型以配合芯片10的外型而将封胶30填入芯片10与基板20之间的间隙。利用覆晶填充构装制程的方式制作出的构装集成电路即为一覆晶接合构装(Flip Chip Package;FC)集成电路。Referring to FIG. 1 , this is a schematic diagram of a traditional underfill assembly process. Referring to FIG. 2A to FIG. 2C , these are schematic diagrams of the filling mode of the encapsulant and the defects generated when the conventional method is used for the flip-chip filling and assembly process. In the conventional flip-chip filling assembly process, the chip 10 is firstly connected to the substrate 20 by soldering bumps on the chip 10 . Next, the glue filling device 25 is used to fill the gap between the chip 10 and the substrate 20 with the sealant 30 to protect the contact point between the chip 10 and the substrate 20 . In the traditional glue filling process, most of the routes moved by the glue filling device 25 adopt the shape of "one", "L" or "ㄇ" to match the shape of the chip 10 and fill the sealant 30. into the gap between the chip 10 and the substrate 20. A packaged integrated circuit fabricated by using a flip chip filling process is a flip chip package (FC) integrated circuit.

在图2A中,填胶装置采用「一」字型的移动路线将封胶填入芯片与基板之间的间隙,因此封胶30以单一方向进入芯片与基板之间,而不会形成气孔于构装集成电路内。虽然当填胶装置以「一」字型的移动路线所形成的构装集成电路的内部不会含有气孔,但是此「一」字型的移动路线将花费较多的制程时间而影响构装集成电路的制程的运作效率。在第二B图与图2C中,填胶装置采用「L」字型或是「ㄇ」字型的移动路线将封胶填入芯片与基板之间的间隙,因此封胶30会以两种方向同时进入芯片与基板之间以提高构装集成电路的制程的运作效率。由于封胶30在此两方向上的速率并不相同,因此在构装集成电路内往往会形成气孔35而降低构装集成电路的品质。当构装集成电路内含有气孔35时表示封胶30并没有彻底地填充芯片与基板之间的间隙,而降低构装集成电路的可靠度。在构装制程中所形成的气孔将会成为运作时的构装集成电路的特异点而形成应力集中的现象,进而造成构装集成电路结构产生崩坏的缺陷。In Figure 2A, the glue filling device uses a "one"-shaped moving route to fill the sealant into the gap between the chip and the substrate, so the sealant 30 enters between the chip and the substrate in a single direction without forming air holes in the gap. built into the integrated circuit. Although the inside of the integrated circuit formed by the "one"-shaped movement route of the glue filling device will not contain air holes, this "one"-shaped movement route will take more process time and affect the assembly and integration. The operating efficiency of the manufacturing process of the circuit. In Figure 2B and Figure 2C, the glue filling device uses an "L"-shaped or "ㄇ"-shaped moving route to fill the gap between the chip and the substrate, so the glue 30 will be in two The direction enters between the chip and the substrate at the same time to improve the operation efficiency of the manufacturing process of the integrated circuit. Since the velocity of the encapsulant 30 in the two directions is not the same, air holes 35 are often formed in the assembled integrated circuit, thereby degrading the quality of the assembled integrated circuit. When there are air holes 35 in the assembled integrated circuit, it means that the encapsulant 30 does not completely fill the gap between the chip and the substrate, which reduces the reliability of the assembled integrated circuit. The air holes formed during the assembly process will become the singularity point of the integrated circuit during operation and form a phenomenon of stress concentration, which will further cause the structure of the integrated circuit to collapse.

由于利用传统的制程所形成的构装集成电路不是需要花费较多的制程时间而影响制程运作的效率,就是会在构装集成电路内部产生气孔而影响构装集成电路的品质,因此有必要提出较佳的制程方法以一方面提高构装集成电路的制程的运作效率且一方面提高构装集成电路的品质。Since the structured integrated circuits formed by the traditional manufacturing process either need to spend more process time and affect the efficiency of the process operation, or will generate pores inside the structured integrated circuits and affect the quality of the structured integrated circuits, it is necessary to propose The preferred manufacturing method improves the operation efficiency of the integrated circuit manufacturing process on the one hand and improves the quality of the integrated integrated circuit on the other hand.

发明内容Contents of the invention

鉴于上述的背景技术中,使用传统的构装集成电路制程不是会影响制程运作的效率就是会降低构装集成电路的品质。本发明提供一种构装集成电路的方法,利用本发明的网板上分布密度及样式不同的网目以控制封胶进入芯片与基板间的间隙的模式与速度并将封胶以印刷的方式填入芯片与基板之间的间隙,以避免在构装集成电路内部产生气孔的缺陷。In view of the above-mentioned background art, the use of traditional IC manufacturing processes will either affect the efficiency of the manufacturing process or reduce the quality of the IC ICs. The present invention provides a method for assembling an integrated circuit, using the meshes of different distribution densities and styles on the screen of the present invention to control the mode and speed at which the encapsulant enters the gap between the chip and the substrate and to print the encapsulant Fill the gap between the chip and the substrate to avoid the defect of air holes inside the integrated circuit.

本发明的第二个目的为利用本发明的网板上分布密度及样式不同的网目以控制封胶进入芯片与基板间的间隙的模式与速度并将封胶以印刷的方式填入芯片与基板之间的间隙,以提高集成电路的构装制程的运作效率。The second object of the present invention is to control the mode and speed at which the encapsulant enters the gap between the chip and the substrate by using the meshes with different distribution densities and styles on the screen of the present invention and to fill the encapsulant into the chip and the substrate by printing. The gap between the substrates is used to improve the operational efficiency of the integrated circuit assembly process.

本发明的第三个目的为利用本发明的网板上分布密度及样式不同的网目以控制封胶进入芯片与基板间的间隙的模式与速度并将封胶以印刷的方式填入芯片与基板之间的间隙,以降低构装集成电路的生产成本。The third object of the present invention is to control the mode and speed at which the encapsulant enters the gap between the chip and the substrate by using the meshes with different distribution densities and styles on the screen of the present invention and to fill the encapsulant into the chip and the substrate by printing. The gap between substrates to reduce the production cost of building integrated circuits.

本发明的第四个目的为利用本发明的网板上分布密度及样式不同的网目以控制封胶进入芯片与基板间的间隙的模式与速度并将封胶以印刷的方式填入芯片与基板之间的间隙,以提高构装集成电路的良率(yield)可靠度(Reliability)。The fourth object of the present invention is to control the mode and speed at which the encapsulant enters the gap between the chip and the substrate by using the meshes with different distribution densities and styles on the screen of the present invention and to fill the encapsulant into the chip and the substrate by printing. The gap between substrates is used to improve the yield reliability of integrated circuits.

本发明的再一个目的为利用本发明的网板上分布密度及样式不同的网目以控制封胶进入芯片与基板间的间隙的模式与速度并将封胶以印刷的方式填入芯片与基板之间的间隙,以提高构装集成电路的使用范围。Another object of the present invention is to control the mode and speed at which the encapsulant enters the gap between the chip and the substrate by using the meshes with different distribution densities and styles on the screen of the present invention and to fill the encapsulant into the chip and the substrate by printing The gap between them to improve the range of use of the integrated circuit.

根据以上所述的目的,本发明提供一种构装集成电路的方法,利用本发明的网板上分布密度及样式不同的网目以控制封胶进入芯片与基板间的间隙的模式与速度并将封胶以印刷的方式填入芯片与基板之间的间隙,以避免在构装集成电路内部产生气孔的缺陷。在本发明的网板上包含一第一区域、一第二区域、一第三区域、一第四区域与一第五区域。第二区域在第一区域内部,且第一区域上的网目密度较第二区域上的网目密度为低。第三区域、第四区域与第五区域均在第二区域内部且第四区域位于第三区域与第五区域之间。第五区域上并无网目的分布而第三区域与第四区域上的网目密度皆低于第二区域上的网目密度。本发明首先利用芯片上的焊接凸块与基板结合。接下来将包含芯片的基板放置于一平台上并在芯片的上方安装本发明所采用的网板。最后在部分的网板上涂上一封胶并利用一刮刀横越此网板的表面,以使封胶能经由网板上的所分布的网目而聚集于基板的四周并使封胶能渗透入芯片与基板之间的间隙。当封胶干燥成形之后,芯片即固定于基板上,且构装完成的集成电路的结构可依照产品的需求而将部分芯片包覆在封胶内并露出芯片的背面,以提高芯片的散热效率。在封胶流入芯片与基板的间隙的过程中,由于封胶流入芯片与基板的间隙的速度已经过网板上的不同网目密度分布区域的控制,因此封胶以单方向的形式流入芯片与基板的间隙而可避免气孔产生于芯片与基板的间隙。利用本发明的方法也可提高集成电路的构装制程的运作效率并降低构装集成电路的生产成本。本发明的方法更可提高构装集成电路的良率与提高构装集成电路的使用范围。According to the above-mentioned purpose, the present invention provides a method for assembling an integrated circuit, which utilizes the distribution density and meshes of different styles on the screen of the present invention to control the mode and speed at which the encapsulant enters the gap between the chip and the substrate. The encapsulant is filled into the gap between the chip and the substrate by printing to avoid the defect of air holes inside the integrated circuit. The screen of the present invention includes a first area, a second area, a third area, a fourth area and a fifth area. The second area is inside the first area, and the mesh density on the first area is lower than that on the second area. The third area, the fourth area and the fifth area are all inside the second area and the fourth area is located between the third area and the fifth area. There is no mesh distribution on the fifth area, and the mesh densities on the third area and the fourth area are lower than those on the second area. The present invention first utilizes soldering bumps on the chip to be combined with the substrate. Next, the substrate containing the chip is placed on a platform, and the screen used in the present invention is installed on the chip. Finally, apply sealant on part of the screen and use a scraper to traverse the surface of the screen, so that the sealant can gather around the substrate through the distributed mesh on the screen and allow the sealant to penetrate into the gap between the chip and the substrate. After the sealant is dried and formed, the chip is fixed on the substrate, and the structure of the assembled integrated circuit can be covered in the sealant and the back of the chip is exposed according to the product requirements, so as to improve the heat dissipation efficiency of the chip . In the process of sealing glue flowing into the gap between the chip and the substrate, because the speed of the sealing glue flowing into the gap between the chip and the substrate has been controlled by the different mesh density distribution areas on the screen, the sealing glue flows into the chip and the substrate in a unidirectional form. The gap between the substrate and the air hole can be avoided from the gap between the chip and the substrate. Utilizing the method of the present invention can also improve the operating efficiency of the integrated circuit assembly process and reduce the production cost of the integrated integrated circuit. The method of the invention can further improve the yield rate of the integrated circuit and increase the application range of the integrated circuit.

附图说明Description of drawings

图1为传统进行覆晶填充构装制程的示意图;FIG. 1 is a schematic diagram of a traditional flip-chip filling process;

图2A至图2C为利用传统方式进行覆晶填充构装制程时,封胶的填充模式及所产生的缺陷的示意图;2A to 2C are schematic diagrams of the filling mode of the encapsulant and the defects generated when the conventional flip-chip filling process is used;

图3为本发明的网板的示意图;Fig. 3 is the schematic diagram of stencil of the present invention;

图4为利用本发明的方法将封胶以印刷的方式填入芯片与基板之间的示意图;Fig. 4 is a schematic diagram of filling the encapsulant between the chip and the substrate by printing using the method of the present invention;

图5A与图5B为集成电路经过本发明的构装制程后的示意图;5A and 5B are schematic diagrams of the integrated circuit after the assembly process of the present invention;

图6A与图6B为在构装集成电路上安装一散热片的示意图。6A and 6B are schematic views of installing a heat sink on a built-up integrated circuit.

图中符号说明Explanation of symbols in the figure

10   芯片10 chips

20   基板20 Substrate

25   填胶装置25 Glue filling device

30   封胶30 sealant

35   气孔35 stomata

100  网板100 stencil

110  第一区域110 first area

120  第二区域120 second area

130  第三区域130 Third area

140  第四区域140 Fourth area

150  第五区域150 fifth area

200  平台200 platforms

210  芯片210 chips

220  焊接凸块220 solder bumps

230  基板230 substrate

240  封胶240 sealant

250  刮刀250 scraper

310  第一方向310 First Direction

320  第二方向320 second direction

400  散热片400 heat sink

具体实施方式Detailed ways

本发明的一些实施例会详细描述如下。然而,除了详细描述外,本发明还可以广泛地在其它的实施例施行,且本发明的范围不受实施例的限定,其以权利要求书的范围为准。Some embodiments of the present invention are described in detail as follows. However, the present invention can be widely practiced in other embodiments than those described in detail, and the scope of the present invention is not limited by the embodiments, but by the scope of the claims.

本发明提供一种构装集成电路的方法,利用本发明的网板上分布密度与样式不同的网目以控制封胶进入芯片与基板间的间隙的模式与速度并将封胶以印刷的方式填入芯片与基板之间的间隙,以避免在构装集成电路内部产生气孔的缺陷。参照图3所示,此为本发明的网板的示意图。在本发明的网板100包含数个网目且其上包含一第一区域110、一第二区域120、一第三区域130、一第四区域140与一第五区域150。第二区域120在第一区域110内部且第一区域110上的网目密度较第二区域120上的网目密度为低。第三区域130、第四区域140与第五区域150均在第二区域120内部且第四区域140位于第三区域130与第五区域150之间。第五区域150上并无开孔,而第三区域130与第四区域140上的网目密度皆低于第二区域120上的网目密度与第一区域110上的网目密度。第三区域130更可为一开放的状态,以在后续制程中使封胶可以更快的速度通过第三区域。在网板100的一第一方向310的表面上,各区域的排列顺序为第一区域110、第二区域120及第三区域130、第四区域140、第五区域150、及第一区域110,其中此第一方向310为在后续制程中刮刀所行进的方向。The present invention provides a method for assembling an integrated circuit, using the meshes of different distribution densities and styles on the screen of the present invention to control the mode and speed at which the encapsulant enters the gap between the chip and the substrate and to print the encapsulant Fill the gap between the chip and the substrate to avoid the defect of air holes inside the integrated circuit. Referring to FIG. 3 , this is a schematic diagram of the screen of the present invention. The screen plate 100 of the present invention includes several meshes and includes a first area 110 , a second area 120 , a third area 130 , a fourth area 140 and a fifth area 150 . The second area 120 is inside the first area 110 and the mesh density on the first area 110 is lower than that on the second area 120 . The third area 130 , the fourth area 140 and the fifth area 150 are all inside the second area 120 and the fourth area 140 is located between the third area 130 and the fifth area 150 . There is no opening on the fifth area 150 , and the mesh densities on the third area 130 and the fourth area 140 are lower than those on the second area 120 and the mesh density on the first area 110 . The third region 130 can be in an open state, so that the encapsulant can pass through the third region at a faster speed in subsequent processes. On the surface of a first direction 310 of the screen plate 100, the arrangement order of each area is the first area 110, the second area 120 and the third area 130, the fourth area 140, the fifth area 150, and the first area 110 , wherein the first direction 310 is the direction in which the scraper travels in subsequent processes.

参照图4所示,此为利用本发明的方法将封胶以印刷的方式填入芯片与基板之间的示意图。本发明首先利用芯片210第一表面(即主动面)212上所安装的焊接凸块220将芯片210与基板230结合。接下来将包含芯片210的基板230放置于一平台上200并在芯片210的上方安装本发明所采用的网板100。本发明的网板100上的第五区域150对应于芯片210,因此第五区域的大小随着芯片的第二表面214的表面积而增大或是缩小,其中芯片的第一表面与一第二表面相互平行。最后在部分的网板100上涂上一封胶240并利用一刮刀(Squeegee)250横越此网板100的表面,以使封胶240能经由网板100上所分布的网目而聚集于基板230上和芯片210的四周,并使封胶240能渗透入芯片210与基板230之间的间隙,其中所采用的封胶大部分为树脂(Resin)。Referring to FIG. 4 , this is a schematic diagram of filling the encapsulant between the chip and the substrate by printing using the method of the present invention. In the present invention, firstly, the chip 210 is combined with the substrate 230 by using the soldering bumps 220 mounted on the first surface (ie, the active surface) 212 of the chip 210 . Next, the substrate 230 including the chip 210 is placed on a platform 200 and the screen plate 100 used in the present invention is mounted on the chip 210 . The fifth area 150 on the grid plate 100 of the present invention corresponds to the chip 210, so the size of the fifth area increases or decreases with the surface area of the second surface 214 of the chip, wherein the first surface of the chip is connected to a second surface 214. The surfaces are parallel to each other. Finally, apply sealant 240 on part of the screen 100 and use a scraper (Squeegee) 250 to traverse the surface of the screen 100 so that the sealant 240 can be gathered on the substrate through the meshes distributed on the screen 100 230 and around the chip 210, and make the sealant 240 penetrate into the gap between the chip 210 and the substrate 230, wherein most of the sealant used is resin (Resin).

当刮刀以一第一方向310横越网板100的表面时,在网板100上的封胶240首先经过网板100上的第一110区域并经过此第一区域110的网目而聚集于基板230上。接下来封胶240同时经过网板100上的第二120区域与第三区域130并经过此第二区域120与第三区域130的网目而聚集于基板230上及芯片的四周。当封胶240进入网板100上的第一区域110时,由于第一区域110上的网目密度较小,因此封胶240可迅速通过第一区域110上的网目而聚集于基板230上。当封胶同时经过网板100上的第二120区域与第三区域130时,由于网板100上第二区域120上的网目密度高于第三区域130上的网目密度,因此封胶240在第三区域130上的渗透速度高于在第二区域120上的渗透速度,且封胶240可在基板230上形成第三区域130的形状。由于第三区域130也可为一开放无遮蔽状态,因此封胶240可以更快的速度通过网板100上的第三区域130。接下来封胶240同时经过网板100上的第二120区域与第四区域140并经过此第二区域120与第四区域140的网目而聚集于基板230上且于芯片的四周。当封胶240同时经过网板100上的第二120区域与第四区域140时,由于网板100上第二区域120上的网目密度高于第四区域140上的网目密度,因此封胶240在第四区域140上的渗透速度高于在第二区域120上的渗透速度,且封胶240可在基板230上形成第四区域140的形状。当封胶240经由网板100上的第二区域120、第三区域130与第四区域140聚集于基板230上及芯片210的四周时,由于封胶240在第三区域130与第四区域140的流动速度较封胶在第二区域120上的流动速度为快,因此封胶240可在第一方向310上以较快的速度扩散至芯片210与基板230的间隙并且会由一第二方向320(参照图3所示)由芯片210与基板230的间隙中扩散而出,其中第一方向310垂直于第二方向320。虽然封胶240也会经由网板100的第二区域120由第二方向320流向芯片210与基板230的间隙,但是由于封胶240在第一方向310上由芯片210与基板230的间隙扩散而出的速率较封胶240由第一方向310流向芯片210与基板230的间隙为快,因此封胶可以图2A中所显示的流动模式进入芯片210与基板230的间隙而不会产生气孔的缺陷。当利用本发明的印刷的方式将封胶240以图2A中所显示的流动模式填入芯片210与基板230之间的间隙更可避免空隙的产生。接下来封胶240同时经过网板100上的第二120区域与第五区域150并经过此第二区域120的网目而聚集于基板230上。由于网板100的第五区域150上并无分布网目为完全封闭的状态,因此封胶240不会形成于芯片的第二表面上。最后封胶240经过网板100上的第一区域110并经过此第一区域110的网目而聚集于基板230上。When the scraper traverses the surface of the screen 100 in a first direction 310, the sealant 240 on the screen 100 first passes through the first area 110 on the screen 100 and passes through the mesh of the first area 110 to gather on the substrate 230 on. Next, the encapsulant 240 passes through the second area 120 and the third area 130 on the screen 100 at the same time, passes through the meshes of the second area 120 and the third area 130 , and gathers on the substrate 230 and around the chip. When the sealant 240 enters the first region 110 on the screen plate 100, the sealant 240 can quickly pass through the mesh on the first region 110 and gather on the substrate 230 because the mesh density on the first region 110 is relatively small. . When the sealant passes through the second area 120 and the third area 130 on the screen 100 at the same time, since the mesh density on the second area 120 on the screen 100 is higher than the mesh density on the third area 130, the sealant The permeation speed of the sealant 240 on the third region 130 is higher than that on the second region 120 , and the sealant 240 can form the shape of the third region 130 on the substrate 230 . Since the third area 130 can also be in an open and unshielded state, the sealant 240 can pass through the third area 130 on the screen 100 at a faster speed. Next, the encapsulant 240 passes through the second area 120 and the fourth area 140 on the screen 100 at the same time, passes through the meshes of the second area 120 and the fourth area 140 , and gathers on the substrate 230 and around the chip. When the sealant 240 passes through the second area 120 and the fourth area 140 on the screen 100 at the same time, since the mesh density on the second area 120 on the screen 100 is higher than that on the fourth area 140, the sealing The penetration speed of the glue 240 on the fourth region 140 is higher than that on the second region 120 , and the sealant 240 can form the shape of the fourth region 140 on the substrate 230 . When the sealant 240 gathers on the substrate 230 and around the chip 210 through the second region 120, the third region 130 and the fourth region 140 on the screen plate 100, since the sealant 240 is in the third region 130 and the fourth region 140 The flow velocity of the encapsulant is faster than the flow velocity of the encapsulant on the second region 120, so the encapsulant 240 can spread to the gap between the chip 210 and the substrate 230 at a faster speed in the first direction 310 and will flow from a second direction 320 (shown in FIG. 3 ) is diffused from the gap between the chip 210 and the substrate 230 , wherein the first direction 310 is perpendicular to the second direction 320 . Although the sealant 240 also flows from the second direction 320 to the gap between the chip 210 and the substrate 230 via the second region 120 of the screen 100 , the sealant 240 diffuses from the gap between the chip 210 and the substrate 230 in the first direction 310 . The flow rate of the encapsulant 240 is faster than that of the sealant 240 flowing from the first direction 310 to the gap between the chip 210 and the substrate 230, so the sealant can enter the gap between the chip 210 and the substrate 230 in the flow mode shown in FIG. . When the printing method of the present invention is used to fill the sealant 240 into the gap between the chip 210 and the substrate 230 in the flow pattern shown in FIG. 2A , the generation of voids can be avoided. Next, the encapsulant 240 passes through the second region 120 and the fifth region 150 on the screen 100 at the same time, passes through the mesh of the second region 120 and gathers on the substrate 230 . Since the fifth area 150 of the mesh plate 100 does not have meshes in a completely closed state, the encapsulant 240 will not be formed on the second surface of the chip. Finally, the sealant 240 passes through the first region 110 on the screen 100 and passes through the mesh of the first region 110 to gather on the substrate 230 .

参照图5A与图5B所示,此为集成电路经过本发明的构装制程后的示意图。参照图6A与图6B所示,此为在构装集成电路上安装一散热片的示意图。当以印刷的方式所填入的封胶240干燥且成形之后,芯片210即固定于基板230上且完成本发明的构装集成电路的制程。利用本发明的方法所构装完成的集成电路的结构可依照产品的需求而形成不同的形状。利用封胶240所形成的保护体可包覆部分的芯片210与部分的基板230并露出芯片210的第二表面314,以提高芯片210的散热效率。随着产品需求的不同,本发明更可由控制网板的第一区域上的网目密度的分布以形成不同形状的构装集成电路。图5A为网板上的第一区域在第一方向的宽度较窄时所形成的构装集成电路的外型。图5B为网板上的第一区域在第一方向的宽度较宽时所形成的构装集成电路的外型。完成构装集成电路的制程后可在构装集成电路的芯片的第二表面上安装一散热片400以增加构装集成电路的散热效率,避免构装集成电路发生过热的缺陷。此散热片的长度及形状可随产品及制程的需求而不同。Referring to FIG. 5A and FIG. 5B , this is a schematic view of the integrated circuit after the assembly process of the present invention. Referring to FIG. 6A and FIG. 6B , this is a schematic diagram of installing a heat sink on a packaged integrated circuit. After the encapsulant 240 filled by printing is dried and shaped, the chip 210 is fixed on the substrate 230 and the manufacturing process of the integrated circuit of the present invention is completed. The structure of the integrated circuit assembled by the method of the present invention can be formed into different shapes according to the requirements of the product. The protective body formed by the encapsulant 240 can cover part of the chip 210 and part of the substrate 230 and expose the second surface 314 of the chip 210 to improve the heat dissipation efficiency of the chip 210 . According to the different requirements of products, the present invention can control the distribution of the mesh density on the first area of the screen to form different shapes of integrated circuits. FIG. 5A is an outline of a packaged integrated circuit formed when the width of the first region on the stencil is narrow in the first direction. FIG. 5B is an outline of a packaged integrated circuit formed when the width of the first region on the stencil is wider in the first direction. After completing the fabrication process of the integrated circuit, a heat sink 400 can be installed on the second surface of the integrated circuit chip to increase the heat dissipation efficiency of the integrated integrated circuit and avoid overheating of the integrated integrated circuit. The length and shape of the heat sink can vary with the requirements of products and processes.

利用本发明的方法以印刷的方式将封胶填入芯片与基板的间隙,可在不使用模具的状态下在芯片四周与基板上形成一保护体保护芯片与基板连结的界面。相较于传统需使用模具的灌胶模混合物构装制程而言,本发明的方式可提高构装制程的效率并降低构装制程的成本。利用本发明的网板上的不同网目密度分布将封胶填入芯片与基板的间隙,可达到传统利用填胶装置以「一」字型的行进路线所得到的封胶流动模式,更可在提高构装效能的前提下避免在构装集成电路内部形成气孔。因此利用本发明的方法也可提高构装集成电路的品质。在传统的覆晶填充(Underfill)构装制程与灌胶模混合物(Molding Compound)构装制程中,构装集成电路的外型均为一固定的形状。利用本发明的方法所形成的构装集成电路的结构,可视制程及产品的需求而形成不同形状的构装集成电路。因此利用本发明的方法更可提高构装集成电路的运用范围。Using the method of the present invention to fill the gap between the chip and the substrate with sealant by printing, a protective body can be formed around the chip and on the substrate to protect the interface between the chip and the substrate without using a mold. Compared with the traditional molding compound assembly process that needs to use a mold, the method of the present invention can improve the efficiency of the assembly process and reduce the cost of the assembly process. Utilizing the different mesh density distributions on the stencil of the present invention to fill the sealant into the gap between the chip and the substrate, the flow pattern of the sealant obtained by using the "one"-shaped travel route of the traditional glue filling device can be achieved, and more can be achieved. On the premise of improving the construction efficiency, the formation of air holes inside the integrated circuit is avoided. Therefore, the quality of the assembled integrated circuit can also be improved by using the method of the present invention. In the traditional underfill assembly process and molding compound assembly process, the appearance of the integrated circuit is a fixed shape. The structure of the integrated circuit formed by the method of the present invention can form integrated integrated circuits of different shapes depending on the requirements of the manufacturing process and the product. Therefore, using the method of the present invention can further increase the application range of the integrated circuit.

综上所述,本发明提供一种构装集成电路与其方法,利用本发明的网板上分布密度及样式设计不同的网目以控制封胶进入芯片与基板间的间隙的模式与速度并将封胶以印刷的方式填入芯片与基板之间的间隙,以避免在构装集成电路内部产生气孔的缺陷。在本发明的网板上包含一第一区域、一第二区域、一第三区域、一第四区域与一第五区域。第二区域在第一区域内部且第一区域上的网目密度较第二区域上的网目密度为低。第三区域、第四区域与第五区域均在第二区域内部且第四区域位于第三区域与第五区域之间。第五区域上并无网目的分布而第三区域与第四区域上的网目密度皆低于第二区域上的网目密度。本发明首先利用芯片上的焊接凸块与基板结合。接下来将包含芯片的基板放置于一平台上并在芯片的上方安装本发明所采用的网板。最后在部分的网板上涂上一封胶并利用一刮刀横越此网板的表面,以使封胶能经由网板上所分布的网目而聚集于基板上及芯片的四周,并使封胶能渗透入芯片与基板之间的间隙。当封胶干燥成形之后,芯片即固定于基板上且构装完成的集成电路的结构可依照产品的需求而将部分芯片包覆在封胶内并露出芯片的背面,以提高芯片的散热效率。在封胶流入芯片与基板的间隙的过程中,由于封胶流入芯片与基板的间隙的速度已经过网板上的不同网目密度分布区域的控制,因此封胶以单方向的形式流入芯片与基板的间隙而可避免气孔产生于芯片与基板的间隙。利用本发明的结构与方法也可提高集成电路的构装制程的效率并降低构装集成电路的生产成本。本发明的结构与方法更可提高构装集成电路的良率与提高构装集成电路的使用范围,不仅具有实用功效,并且为前所未见的设计,具有功效性与进步性的增进。To sum up, the present invention provides a kind of structure integrated circuit and its method, utilizes the distribution density and pattern design different meshes on the screen of the present invention to control the pattern and speed of encapsulant entering the gap between the chip and the substrate and The encapsulant is printed to fill the gap between the chip and the substrate to avoid the defect of air holes inside the integrated circuit. The screen of the present invention includes a first area, a second area, a third area, a fourth area and a fifth area. The second area is inside the first area and the mesh density on the first area is lower than that on the second area. The third area, the fourth area and the fifth area are all inside the second area and the fourth area is located between the third area and the fifth area. There is no mesh distribution on the fifth area, and the mesh densities on the third area and the fourth area are lower than those on the second area. The present invention first utilizes soldering bumps on the chip to be combined with the substrate. Next, the substrate containing the chip is placed on a platform, and the screen used in the present invention is installed on the chip. Finally, apply sealant on part of the screen and use a scraper to traverse the surface of the screen, so that the sealant can gather on the substrate and around the chip through the mesh distributed on the screen, and make the sealant The glue penetrates into the gap between the chip and the substrate. After the encapsulant is dried and formed, the chip is fixed on the substrate and the structure of the assembled integrated circuit can be covered in the encapsulant according to product requirements and the back of the chip is exposed to improve the heat dissipation efficiency of the chip. In the process of sealing glue flowing into the gap between the chip and the substrate, because the speed of the sealing glue flowing into the gap between the chip and the substrate has been controlled by the different mesh density distribution areas on the screen, the sealing glue flows into the chip and the substrate in a unidirectional form. The gap between the substrate and the air hole can be avoided from the gap between the chip and the substrate. Utilizing the structure and method of the present invention can also improve the efficiency of the assembly process of the integrated circuit and reduce the production cost of the integrated circuit. The structure and method of the present invention can improve the yield rate of the integrated circuit and increase the application range of the integrated circuit. It not only has practical effects, but also has an unprecedented design, and has improved efficacy and progress.

以上所述仅为本发明的较佳实施例,并非用以限定本发明的保护范围;凡其它未脱离本发明所揭示的精神下所完成的等效改变或修饰,均应包含在权利要求书的范围内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention; all other equivalent changes or modifications that do not deviate from the spirit disclosed in the present invention should be included in the claims In the range.

Claims (8)

1.一种集成电路的构装方法,其特征在于,该方法至少包含:1. A method for assembling an integrated circuit, characterized in that the method at least includes: (a)提供一包含一芯片与一基板的集成电路,其中该芯片的主动表面与该基板由数个焊接凸块以覆晶方式结合;(a) providing an integrated circuit comprising a chip and a substrate, wherein the active surface of the chip and the substrate are flip-chip bonded by solder bumps; (b)放置该集成电路于一平台上,且在该集成电路的该芯片上方安装一网板,该网板上包含数个网目及数个网目密度不同的区域;(b) place the integrated circuit on a platform, and install a stencil on the chip of the integrated circuit, the stencil includes several meshes and several areas with different mesh densities; (c)在该网板的部分的上表面涂上一封胶;(c) apply sealant to the upper surface of the portion of the screen; (d)于该网板上以第一方向移动一刮刀,将该封胶均匀涂布在该网板上的所有区域,并由该数个网目流入该网板下方,以覆盖部分的该基板表面及填充该芯片与该基板之间的区域;及(d) move a scraper on the screen in the first direction, apply the sealant evenly on all areas of the screen, and flow into the bottom of the screen from the meshes to cover part of the screen the surface of the substrate and filling the area between the chip and the substrate; and (e)干燥该封胶。(e) drying the sealant. 2.如权利要求1所述的集成电路的构装方法,其特征在于,该刮刀移动至该芯片正上方之前可经过一无网目的完全开放的网板区域。2 . The method for assembling an integrated circuit as claimed in claim 1 , wherein the scraper can pass through a completely open stencil area without mesh before moving directly above the chip. 3 . 3.如权利要求1所述的集成电路的构装方法,其特征在于,该网板位于该芯片表面正上方的区域为一无网目的封闭区域。3 . The method for assembling an integrated circuit as claimed in claim 1 , wherein the area of the stencil directly above the surface of the chip is a closed area without mesh. 4 . 4.如权利要求1所述的集成电路的构装方法,其特征在于,该封胶为一树脂。4. The method for assembling an integrated circuit as claimed in claim 1, wherein the encapsulant is a resin. 5.如权利要求1所述的集成电路的构装方法,其特征在于,该(e)步骤之后更包含安装一散热片。5. The method for assembling an integrated circuit as claimed in claim 1, further comprising installing a heat sink after step (e). 6.如权利要求1所述的集成电路的构装方法,其特征在于,其中(d)步骤中一第二方向垂直于该第一方向,该封胶在该第一方向上由该芯片与该基板之间的间隙扩散而出的速度大于该封胶由该第二方向流向该芯片与该基板之间的间隙的速度。6. The method for assembling an integrated circuit according to claim 1, wherein in step (d), a second direction is perpendicular to the first direction, and the encapsulant is formed from the chip and the first direction in the first direction. The speed at which the sealant diffuses out of the gap between the substrates is greater than the speed at which the encapsulant flows from the second direction to the gap between the chip and the substrate. 7.如权利要求1所述的集成电路的构装方法,其特征在于,该网板可包含:第一区域、第二区域、第三区域、第四区域、与第五区域,其中该第一区域分布于该第二、第三、第四与第五区域之外,该第二区域分布于该第三、第四与第五区域之外,该第四区域位于该第三与第五区域之间,该第五区域位于该芯片正上方为一无网目的封闭区域,而网目密度由大而小依序为:该第二区域、该第一区域、该第四区域、及该第三区域。7. The method for assembling an integrated circuit according to claim 1, wherein the stencil comprises: a first area, a second area, a third area, a fourth area, and a fifth area, wherein the first area A region is distributed outside the second, third, fourth and fifth regions, the second region is distributed outside the third, fourth and fifth regions, and the fourth region is located outside the third and fifth regions. Between the areas, the fifth area is located directly above the chip and is a closed area without mesh, and the order of mesh density from large to small is: the second area, the first area, the fourth area, and the third area. 8.如权利要求7所述的集成电路的构装方法,其特征在于,该第三区域可为一无网目的完全开放的区域。8. The method for assembling an integrated circuit as claimed in claim 7, wherein the third area is a completely open area without mesh.
CNB021468583A 2002-10-15 2002-10-15 Method for packaging integrated circuit by printing Expired - Lifetime CN1178285C (en)

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