Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present application more apparent, the embodiments of the present application will be described in further detail with reference to the accompanying drawings.
Currently, a display device with a touch function may include a display panel and a touch panel located on a light emitting side of the display panel. In order to enrich the interaction between the user and the display device, a pressure sensor is typically integrated in the touch panel, so that the touch panel also has a function of detecting the pressing forces applied to the display device by the user to different extents.
In the related art, please refer to fig. 1, fig. 1 is a schematic structural diagram of a touch panel provided in the related art. The touch panel 00 may include a substrate 01, a touch electrode layer 02 and a pressure sensor 03 on the substrate 01, and an insulating layer 04 between the touch electrode layer 02 and the pressure sensor 03.
The pressure sensor 03 may include, among other things, a first pressure electrode 031 and a second pressure electrode 032 disposed opposite one another, and a layer of piezoelectric material 033 between the first pressure electrode 031 and the second pressure electrode 032.
When a pressing force is applied to the piezoelectric material layer 033 in the pressure sensor 03, a change in charge occurs, and an electric signal that can be transmitted through the first pressure electrode 031 and the second pressure electrode 032 is formed. The touch panel can determine the magnitude of the pressing force applied to the piezoelectric material layer 033 by detecting the electric signals transmitted from the first and second pressure electrodes 031 and 032.
However, the thickness of the touch panel 00 integrated with the pressure sensor 03 is generally large, which in turn results in a large thickness of the display device integrated with the touch panel 00.
Referring to fig. 2, fig. 2 is a schematic diagram of a film structure of a touch substrate according to an embodiment of the application. The touch substrate 000 may include a substrate 100, a touch electrode 200, a pressure electrode 300, and a piezoelectric material layer 400.
The substrate 100 may be a glass base or an encapsulation layer in a display substrate. For example, when the touch substrate 000 is connected to the display substrate by bonding, the substrate 100 of the touch substrate 000 may be a glass base, and when the touch substrate 000 is integrated with the display substrate, the substrate 100 of the touch substrate 000 may be a package layer in the display substrate.
The plurality of touch electrodes 200 and the plurality of pressure electrodes 300 in the touch substrate 000 are located on the substrate 100, and at least part of the plurality of touch electrodes 200 and the plurality of pressure electrodes 300 are arranged in the same layer and made of the same material, and the front projection of the touch electrodes 200 on the substrate 100 is not coincident with the front projection of the pressure electrodes 300 on the substrate 100. In this way, the touch electrode 200 and the pressure electrode 300 are insulated from each other, that is, there is no connection relationship between the two, so that the touch electrode 200 and the pressure electrode 300 can work normally.
The piezoelectric material layer 400 is electrically connected to the plurality of pressure electrodes 300, and the piezoelectric material layer 400 is configured to generate a change in charge upon receiving a pressing force to form an electrical signal that can be transmitted through the pressure electrodes 300.
For example, please refer to fig. 3, fig. 3 is a schematic diagram of a piezoelectric material layer according to an embodiment of the present application. When the piezoelectric material layer 400 is not subjected to the pressing force F, no electric charge is generated on the surface of the piezoelectric material layer 400. Thus, the pressure electrode 300 does not output an electrical signal. When the piezoelectric material layer 400 is subjected to the pressing force F, positive charges are generated on the side close to the pressing force F and negative charges are generated on the side away from the pressing force F in the region where the piezoelectric material layer 400 is pressed. In this way, the pressure electrode 300 may transmit an electrical signal.
The magnitude of the pressing force received by the piezoelectric material layer 400 and the amount of charge generated by the piezoelectric material layer 400 are positively correlated. In this way, after the touch substrate 000 receives the pressing force, the piezoelectric material layer 400 in the pressing area of the touch substrate 000 generates a corresponding charge change, and the touch substrate 000 determines the magnitude of the pressing force received in the touch substrate 000 by detecting the electric signal transmitted by the pressure electrode 300.
In this case, after the touch substrate 000 is integrated in the display device, the pressing position of the user can be positioned through the touch electrode 200 in the touch substrate 000 so that the user can interact with the display device in a touch manner, and the pressing force of the user can be detected through the pressure electrode 300 and the piezoelectric material layer 400 in the touch substrate 000 so that the user can interact with the display device in a pressing manner.
In an embodiment of the present application, please refer to fig. 4, fig. 4 is a partial top view of a touch substrate according to an embodiment of the present application. The touch substrate 000 generally has a plurality of virtual electrodes 500 disposed on the same layer as the plurality of touch electrodes 200, and the plurality of touch electrodes 200 and the plurality of virtual electrodes 500 are uniformly distributed on the substrate 100, and there is no connection between the touch electrodes 200 and the virtual electrodes 500. The visual effect can be balanced through the plurality of virtual electrodes 500, and the probability of moire generation due to optical interference can be reduced through the plurality of virtual electrodes 500, so that the overall uniformity of the touch substrate 000 is ensured to be better, and the display effect of the display device integrated with the touch substrate 000 is effectively improved.
In the present application, since there is no connection between the touch electrode 200 and the pressure electrode 300, and the touch electrode 200 and the pressure electrode 300 are disposed on the same layer, the pressure electrode 300 can be used as the virtual electrode 500 of the touch electrode 200, that is, the pressure electrode 300 and the virtual electrode 500 are multiplexed. In this way, the thickness of the touch substrate 000 can be ensured to be small.
In summary, the embodiment of the application provides a touch substrate, which comprises a substrate, a touch electrode, a pressure electrode and a piezoelectric material layer. Because the touch electrode and the pressure electrode have no connection relationship, and the touch electrode and the pressure electrode are arranged on the same layer. Therefore, the pressure electrode may be used as a virtual electrode of the touch electrode, that is, the pressure electrode and the virtual electrode are multiplexed. Therefore, the thickness of the touch substrate is reduced on the premise that the display effect of the display device integrated with the touch substrate is good through the pressure electrode and the touch electrode which are arranged on the same layer, and the thickness of the display device can be reduced.
In the embodiment of the present application, as shown in fig. 4, each touch electrode 200 in the touch substrate 000 is a ring electrode, the pressure electrode 300 may be located in an area surrounded by the ring electrode, and the pressure electrode 300 is in a block shape as a whole.
In the present application, the plurality of touch electrodes 200 and the plurality of pressure electrodes 300 in the touch substrate 000 are made of metal materials, and the touch electrodes 200 and the pressure electrodes 300 are grid electrodes. That is, the touch electrode 200 is a ring electrode having a grid shape, and the pressure electrode 300 is a block electrode having a grid shape.
For example, when the touch substrate 000 is integrated into a display device, the front projection of the light emitting device in the display device on the substrate 100 is positioned in the grid holes in the front projection of the grid-like electrodes on the substrate 100. In this way, the light emitted by the light emitting device can pass through the grid holes in the grid-shaped electrode and then exit, so that the touch electrode 200 and the pressure electrode 300 made of metal materials do not affect the normal display of the display device.
In other possible implementations, the plurality of touch electrodes 200 and the plurality of pressure electrodes 300 in the touch substrate 000 are each made of a transparent conductive material. In this case, the touch electrode 200 is a transparent ring electrode, and the pressure electrode 300 is a transparent block electrode.
In the embodiment of the present application, as shown in fig. 4, the plurality of touch electrodes 200 in the touch substrate 000 include a plurality of touch driving electrodes 201 and a plurality of touch sensing electrodes 202. The touch driving electrodes 201 are arranged in a plurality of rows, each two adjacent touch driving electrodes 201 in each row of touch driving electrodes 201 can be connected through a touch driving signal line Tx, the touch sensing electrodes 202 are arranged in a plurality of columns, and each two adjacent touch sensing electrodes 202 in each column of touch sensing electrodes 202 can be connected through a touch sensing signal line Rx. In addition, the touch driving signal line Tx and the touch sensing signal line Rx are arranged in different layers, so that the short circuit phenomenon between the touch driving signal line Tx and the touch sensing signal line Rx can be avoided.
In the present application, there are a plurality of possible implementations of the distribution of the pressure electrodes 300 in the touch substrate 000, and the following two possible implementations of the embodiments of the present application are schematically illustrated.
Referring to fig. 5, fig. 5 is a schematic diagram of a film structure of another touch substrate according to an embodiment of the present application. The pressure electrodes 300 are all arranged on the same layer and made of the same material as the touch electrode 200. That is, all the pressure electrodes 300 and all the touch electrodes 200 are formed through one patterning process. The piezoelectric material layer 400 may be located at a side of the plurality of pressure electrodes 300 remote from the substrate 100, and the piezoelectric material layer 400 is electrically connected to each pressure electrode 300.
For example, please refer to fig. 6, fig. 6 is a schematic diagram of the touch substrate shown in fig. 5 sensing the pressing force. The pressure electrode 300 in the touch substrate 000 may be electrically connected to the pressure sensing chip 001. After the piezoelectric material layer 400 in the touch substrate 000 receives the pressing force, the piezoelectric material layer 400 may generate a change in charge, the touch substrate 000 transmits an electrical signal through the pressure electrode 300 electrically connected to the piezoelectric material layer 400, and the electrical signal may be transmitted to the pressure sensing chip 001 through the pressure electrode 300. In this process, since the charges generated on both sides of the piezoelectric material layer 400 after the piezoelectric material layer 400 is subjected to pressure are charges having the same magnitude and opposite charge properties. Therefore, the voltage sensor chip 001 can obtain the voltage difference Δv1 between the two sides of the piezoelectric material layer 400 by only collecting the electrical signal generated on one side of the piezoelectric material layer 400 through the pressure electrode 300 and performing differential processing with the ground signal end GND. In this way, the pressure sensor chip 001 determines the magnitude of the pressing force at the pressing point based on the magnitude of the voltage difference Δv1.
In an embodiment of the present application, please refer to fig. 7, fig. 7 is a top view of a plurality of pressure electrodes in a touch substrate according to an embodiment of the present application. The plurality of pressure electrodes 300 are arranged in a plurality of rows and a plurality of columns. The touch substrate 000 further includes a first connection line L1 electrically connected to a row of pressure electrodes 300 and a second connection line L2 electrically connected to a column of pressure electrodes 300. Wherein at least part of the first connecting line L1 and at least part of the second connecting line L2 are arranged in different layers. For example, the first connection line L1 has a portion crossing the second connection line L2, and the crossing portion in the first connection line L1 needs to be disposed in a different layer from the second connection line L2. Thus, the phenomenon that the first connecting line L1 and the second connecting line L2 are short-circuited at the crossing position can be effectively avoided.
In the present application, the touch substrate 000 may further include a plurality of bonding electrodes 600, and a part of the plurality of bonding electrodes 60 may be electrically connected to the plurality of first connection lines L1 in one-to-one correspondence, and another part of the plurality of bonding electrodes 600 may be electrically connected to the plurality of second connection lines L2 in one-to-one correspondence. In this way, after the flexible circuit board with the pressure-sensitive chip 001 is electrically connected to the plurality of bonding electrodes 600, the electrical connection between the pressure-sensitive chip 001 and the pressure electrode 300 can be achieved.
In this case, when the user interacts with the display device using his finger after the touch substrate 000 is integrated in the display device, the touch electrode 200 in the touch substrate 000 may detect a change in capacitance of a touch area of the user and the display device and position the touch area of the user and the display device through the touch driving signal line Tx and the touch sensing signal line Rx arranged in the touch substrate 000, on the one hand, and the pressure electrode 300 in the touch substrate 000 may detect a pressing force of the touch area of the user and the display device and position the pressing area of the user to the display device through the first connection line L1 and the second connection line L2 arranged in the touch substrate 000, on the other hand. It should be noted that the user may also interact with the display device using other conventional objects (e.g., a screen-specific stylus, an object capable of producing a threshold of change in capacitance that exceeds the display device, etc.).
In one scenario, when a user interacts with the display device through an irregular object (e.g., a chopstick, an object whose generated capacitance change cannot exceed the capacitance change threshold of the display device, etc.), the touch electrode 200 within the touch substrate 000 detects that the capacitance change amount of the contact area of the irregular object with the touch substrate 000 is very small, and thus, the touch substrate 000 cannot locate the position of the contact area of the irregular object with the touch substrate 000 according to the capacitance change amount. At this time, the pressure electrode 300 in the touch substrate 000 may detect the pressing force of the contact area of the non-conventional object with the touch substrate 000, and position the contact area of the non-conventional object with the touch substrate 000 through the first connection line L1 and the second connection line L2 arranged in the touch substrate 000. In this way, the touch substrate 000 can determine the position of the contact area between the determined non-conventional object and the touch substrate 000 by using the pressure electrode 300, and implement multi-scene application by combining the capacitance variation of the contact area between the non-conventional object and the touch substrate 000 detected by the touch electrode 200.
Optionally, referring to fig. 8, fig. 8 is a partial top view of another touch substrate according to an embodiment of the application. The plurality of pressure electrodes 300 are in one-to-one correspondence with the plurality of touch electrodes 200 such that the distribution density of the pressure electrodes 300 on the touch substrate 000 is the same as the distribution density of the touch electrodes 200 on the touch substrate 000. In this way, the touch substrate 000 can determine the magnitude of the pressing force received at each position on the touch substrate 000.
Note that, since the width of the contact area between the finger of the user and the touch substrate 000 is generally larger, the pressure electrode 300 does not need to be arranged at the same density as the touch electrode 200. In this way, the pressure electrodes 300 may not be in one-to-one correspondence with the touch electrodes 200. As such, in other possible implementations, a portion of the plurality of pressure electrodes 300 may correspond one-to-one with the plurality of virtual electrodes 500, as the application is not limited in this regard.
In the touch substrate shown in fig. 8, the touch sensing signal lines Rx and the touch electrodes 200 are arranged in different layers, and the touch driving signal lines Tx and the touch electrodes 200 are arranged in the same layer and made of the same material. In this case, the second connection line L2 is disposed in the same layer as the touch sensing signal line Rx, and at least part of the first connection line L1 may be disposed in the same layer as the touch driving signal line Tx. And the second connection line L2 is arranged in parallel with the touch sensing signal line Rx so that the second connection line L2 and the touch sensing signal line Rx do not have a cross short circuit phenomenon, and at least part of the first connection line L1 can be arranged in parallel with the touch driving signal line Tx so that at least part of the first connection line L1 and the touch driving signal line Tx do not have a cross short circuit phenomenon.
In the present application, since the touch electrode 200 is a ring electrode, the pressure electrode 300 is located in the area surrounded by the corresponding touch electrode 200. Accordingly, in order to avoid a short circuit between the first connection line L1 and the touch electrode 200 during the connection of the one row of pressure electrodes 300 through the first connection line L1, the first connection line L1 may include a jumper line L11 and a connection line body L12 connected to each other. The jumper L11 is arranged in different layers with the touch electrode 200, the jumper L11 is connected with the pressure electrode 300, and the connecting wire body L12 and the touch electrode 200 are arranged in the same layer and made of the same material. In this way, the first connection line L1 may avoid a short circuit phenomenon occurring when the first connection line L1 crosses the touch electrode 200 through the jumper line L11. In this case, FIG. 5 is a cross-sectional view of FIG. 8 at A-A'.
The above embodiment is schematically described with reference to the first connecting line L1 including the jumper line L11 and the connecting line body L12 connected to each other. In other possible implementations, when the touch sensing signal line Rx is disposed in the same layer as the touch electrode 200 and is made of the same material, and the touch driving signal line Tx is disposed in a different layer from the touch electrode 200, the first connection line L1 may be disposed in the same layer as the touch driving signal line Tx, and the second connection line L2 may include a jumper line and a connection line body connected to each other. Here, the connection manner of the second connection line L2 may refer to the corresponding content in the above embodiment, and the embodiment of the present application is not described herein again.
In the embodiment of the present application, when the piezoelectric material layer 400 is located on the side of the plurality of pressure electrodes 300 away from the substrate 100, the piezoelectric material layer 400 may be prepared in various ways. The embodiments of the present application are schematically illustrated with the following three alternative implementations.
For convenience of description, the principle of polarization treatment of the piezoelectric material is described in the embodiments of the present application. The untreated piezoelectric material is a piezoelectric film formed by spraying, printing or spin coating, and the piezoelectric film is generally mainly an α crystal form, which has weak piezoelectricity, so that the piezoelectric film cannot be used as the piezoelectric material layer 400. As such, it is necessary to subject the piezoelectric film mainly of the α crystal form to polarization treatment so that the piezoelectric film is converted from the α crystal form having weak piezoelectricity to the β crystal form having strong piezoelectricity, so that the piezoelectric film serves as the piezoelectric material layer 400.
In a first alternative implementation, the piezoelectric material layer 400 having the same pattern as the pressure electrode 300 is formed on the pressure electrode 300 through a one-time patterning process, and the piezoelectric material layer 400 is subjected to polarization treatment to obtain the piezoelectric material layer 400 having piezoelectric characteristics.
In a second alternative implementation, after the entire piezoelectric material is coated on the plane where the pressure electrode 300 is located, the protection area is provided on the entire piezoelectric material, so as to protect the areas where the touch electrode 200, the plurality of touch driving signal lines Tx and the plurality of touch sensing signal lines Rx are located. In this way, after the entire surface of the piezoelectric material coated on the plane where the pressure electrode 300 is located is subjected to the polarization treatment, the piezoelectric material layer 400 having the same pattern as the pressure electrode 300 and piezoelectric characteristics can be obtained.
In a third alternative implementation, after the entire piezoelectric material is coated on the plane where the pressure electrode 300 is located, the entire piezoelectric material is polarized, and then the piezoelectric material in the areas where the touch electrode 200, the plurality of touch driving signal lines Tx and the plurality of touch sensing signal lines Rx are located is removed by an etching process, so as to obtain the piezoelectric material layer 400 which has the same pattern as the pressure electrode 300 and has piezoelectric characteristics.
In all three alternative implementations, the piezoelectric material layer 400 with piezoelectric properties may be obtained, and in other possible implementations, the piezoelectric material layer 400 may also be directly formed by using a piezoelectric material with piezoelectric properties, which is not limited by the present application.
In the present application, as shown in fig. 5, the touch substrate 000 may include a first conductive layer P1, an insulating layer 700, and a second conductive layer P2 stacked on a substrate 100.
The first conductive layer P1 may include the jumper line L11, the touch sensing signal line Rx, and the second connection line L2 in the above embodiment.
The second conductive layer P2 may include the touch electrode 200, the pressure electrode 300, the connection line body L12, and the touch driving signal line Tx in the above-described embodiments.
The insulating layer 700 in the touch substrate 000 insulates two kinds of signal lines (e.g., the touch driving signal line Tx and the touch sensing signal line Rx) crossing each other, ensuring that there is no short circuit between the two kinds of signal lines crossing each other. The insulating layer 700 has a via hole, through which the touch electrode 200 may be electrically connected to the touch sensing signal line Rx, and the pressure electrode 300 may be electrically connected to the jumper line L11.
Referring to fig. 9, fig. 9 is a schematic diagram of a film structure of a touch substrate according to another embodiment of the present application. When the plurality of touch electrodes 200 and portions of the plurality of pressure electrodes 300 are arranged in the same layer and made of the same material, the plurality of pressure electrodes 300 may include a plurality of first pressure electrodes 301 and a plurality of second pressure electrodes 302, the plurality of first pressure electrodes 301 and the plurality of touch electrodes 200 are arranged in the same layer and made of the same material, and the plurality of second pressure electrodes 302 and the plurality of touch electrodes 200 are arranged in different layers. That is, all the first pressure electrodes 301 and all the touch electrodes 200 are formed through a patterning process. The plurality of first pressure electrodes 301 and the plurality of second pressure electrodes 302 are in one-to-one correspondence, and the orthographic projection of the first pressure electrodes 301 on the substrate 100 overlaps with the orthographic projection of the second pressure electrodes 302 on the substrate 100. The piezoelectric material layer 400 in the touch substrate 000 is located between the plurality of first pressure electrodes 301 and the plurality of second pressure electrodes 302, and the piezoelectric material layer 400 is electrically connected to each of the first pressure electrodes 301 and each of the second pressure electrodes 302.
For example, referring to fig. 10, fig. 10 is a schematic diagram of the touch substrate shown in fig. 9 sensing the pressing force. The first pressure electrode 301 and the second pressure electrode 302 in the touch substrate 000 are electrically connected to the pressure sensing chip 002. After the piezoelectric material layer 400 in the touch substrate 000 receives the pressing force, the piezoelectric material layer 400 may generate a charge change, the first pressure electrode 301 transmits an electrical signal on a side of the piezoelectric material layer 400 close to the first pressure electrode 301, and transmits the electrical signal to the pressure sensing chip 002, and the second pressure electrode 302 transmits an electrical signal on a side of the piezoelectric material layer 400 close to the second pressure electrode 302, and transmits the electrical signal to the pressure sensing chip 002. In this process, the pressure sensing chip 002 can obtain the voltage difference Δv2 between the two sides of the piezoelectric material layer 400 according to the electrical signals between the two sides of the piezoelectric material layer 400. Then, the pressure sensor chip 002 can determine the magnitude of the pressing force at the pressing point based on the correspondence between the magnitude of the voltage difference Δv2 and the pressing force.
In this case, after the touch substrate 000 is integrated in the display device, when a user interacts with the display device using his/her finger, the touch electrode 200 in the touch substrate 000 may detect a change in capacitance of a touch area of the user and the display device, and positions of the touch area of the user and the display device are positioned through the touch driving signal lines Tx and the touch sensing signal lines Rx arranged in the touch substrate 000, and the touch substrate 000 may detect a voltage difference Δv on the pressure electrode 300 of the touch area of the user and the display device according to position information of the touch area of the user and the display device, thereby detecting a pressing force of the touch area of the user and the display device.
In the embodiment of the present application, the plurality of first pressure electrodes 301 are arranged in a plurality of rows, the plurality of second pressure electrodes 302 are arranged in a plurality of rows, and the touch substrate 000 may further include a third connection line L3 electrically connected to the one row of first pressure electrodes 301, and a fourth connection line L4 electrically connected to the one row of second pressure electrodes 302. Wherein the second pressure electrode 302 and the fourth connecting line L4 are arranged in the same layer and made of the same material.
Referring to fig. 11, fig. 11 is a partial top view of a third conductive layer provided in an embodiment of the present application, assuming that the conductive layer where the plurality of second pressure electrodes 302 are located is the third conductive layer P3. The third conductive layer P3 may include a second pressure electrode 302 and a fourth connection line L4. When the touch sensing signal line Rx in the touch substrate 000 is disposed in different layers from the touch electrode 200, the touch sensing signal line Rx may be disposed in the same layer and of the same material as the second pressure electrode 302. That is, the third conductive layer P3 may further include a touch sensing signal line Rx. In this case, the fourth connection line L4 and the touch sensing signal line Rx cannot be crossed to ensure that a short circuit phenomenon does not occur between the second pressure electrode 302 and the touch electrode 200.
Referring to fig. 12, fig. 12 is a partial top view of a fourth conductive layer provided in an embodiment of the present application. The fourth conductive layer P4 may include the first pressure electrode 301 and the touch electrode 200. When the touch driving signal line Tx in the touch substrate 000 is disposed at the same layer as the touch electrode 200, the fourth conductive layer P4 may further include the touch driving signal line Tx.
In the embodiment of the present application, the plurality of first pressure electrodes 301 and the plurality of touch electrodes 200 may be in one-to-one correspondence, and in this case, the number of the plurality of first pressure electrodes 301, the plurality of touch electrodes 200, and the plurality of second pressure electrodes 302 is the same. Thus, when the touch electrodes 200 are ring electrodes, a first pressure electrode 301 is distributed in the area surrounded by each touch electrode 200, and the front projection of the first pressure electrode 301 on the substrate 100 may overlap with the front projection of the corresponding second pressure electrode 302 on the substrate 100.
In other possible implementations, the width of the contact area with the touch substrate 000 is generally larger due to the user's finger. Therefore, the number of the first pressure electrodes 301 may be less than the number of the touch electrodes 200. In this case, when the touch electrode 200 is a ring electrode, the plurality of first pressure electrodes 301 may be distributed in an area surrounded by a part of the touch electrodes 200 among the plurality of touch electrodes 200, and the virtual electrodes 500 need to be distributed in an area surrounded by another part of the touch electrodes 200 among the plurality of touch electrodes.
In the present application, since the touch electrode 200 is a ring electrode, the first pressure electrode 301 is located in the area surrounded by the corresponding touch electrode 200. Therefore, in order to avoid the short circuit between the third connection line L3 and the touch electrode 200 during the process of connecting the row of the first pressure electrodes 301 through the third connection line L3, the third connection line L3 needs to be disposed in a different layer from the touch electrode 200. For example, the third connection line L3 may be provided in the same layer and of the same material as the second pressure electrode 302. That is, the third conductive layer P3 may further include a third connection line L3.
In order to secure the effect of the electrical connection between the third connection line L3 and the first pressure electrode 301, it is necessary to provide a transfer electrode block L3a at the connection of the third connection line L3. The overlap area of the switching electrode block L3a and the first pressure electrode 301 is larger, so that the effect of electrical connection between the switching electrode block L3a and the first pressure electrode 301 is better, and the effect of electrical connection between the third connecting line L3 and the first pressure electrode 301 is also better.
In an embodiment of the present application, the touch substrate 000 may further include an insulating layer 700 disposed at the same layer as the piezoelectric material layer 400 and having a different material. In this case, both the piezoelectric material layer 400 and the insulating layer 700 are located between the third conductive layer P3 and the fourth conductive layer P4. A short circuit between two crossing electrodes in the third conductive layer P3 and the fourth conductive layer P4 can be prevented by the insulating layer 700.
For example, referring to fig. 13, fig. 13 is a partial top view of a film layer between a third conductive layer and a fourth conductive layer according to an embodiment of the present application. Among the film layers between the third conductive layer P3 and the fourth conductive layer P4, the portion between the first pressure electrode 301 and the second pressure electrode 302 is the piezoelectric material layer 400, and the remaining portions are the insulating layers 700.
In the embodiment of the present application, please refer to fig. 14, fig. 14 is a partial top view of the film layer stack shown in fig. 11, fig. 12 and fig. 13 according to the embodiment of the present application. In order to ensure that the first pressure electrode 301 is electrically connected to the third connection line L3, a via V needs to be provided in the insulating layer 700. In this way, the first pressure electrode 301 may be electrically connected to the transfer electrode block through the via hole V, so that the first pressure electrode 301 may be electrically connected to the third connection line L3.
In the two alternative implementations of the embodiment of the present application, as shown in fig. 5 and 9, the piezoelectric material layer 400 may further include a plurality of piezoelectric portions 401 corresponding to the plurality of pressure electrodes 300, where an orthographic projection of one piezoelectric portion 401 on the substrate 100 and an orthographic projection of the corresponding at least one pressure electrode 300 on the substrate 100 have overlapping areas. For example, for the first alternative implementation described above, one pressure electrode 300 may correspond to one piezoelectric portion 401, in which case there is an overlap region between the front projection of each pressure electrode 300 on the substrate 100 and the front projection of the corresponding piezoelectric portion 401 on the substrate. For the second alternative implementation described above, the plurality of pressure electrodes 300 (e.g., the first pressure electrode 301 and the second pressure electrode 302 that correspond to each other) may correspond to one piezoelectric portion 401, in which case there is an overlapping area of the front projection of the first pressure electrode 301 on the substrate 100 and the front projection of the corresponding piezoelectric portion 401 on the substrate, and there is an overlapping area of the front projection of the second pressure electrode 302 on the substrate 100 and the front projection of the corresponding piezoelectric portion 401 on the substrate. In other possible implementations, the plurality of piezoelectric portions 401 may also correspond to one pressure electrode 300.
In the present application, the shape of the piezoelectric portion 401 is variously described, and the embodiment of the present application is schematically described only in the following two cases.
In the first case, as shown in fig. 13, when the piezoelectric material layer 400 is made of a transparent piezoelectric material, the piezoelectric portion 401 is a block-shaped piezoelectric portion 401. Here, the transparent piezoelectric material layer 400 may be composed of a transparent piezoelectric material such as polyvinylidene fluoride (english: polyvinylidene difluoride, abbreviated as PVDF or PVF 2) and its copolymer polyvinylidene fluoride-co-trifluoroethylene (english: poly-difluoro-trifluoroethylene), abbreviated as P (VDF-TrFE).
In the second case, please refer to fig. 15, fig. 15 is a partial top view of another film layer between the third conductive layer and the fourth conductive layer according to an embodiment of the present application. When the piezoelectric material layer 400 is made of a non-transparent piezoelectric material, the piezoelectric portion 401 may be a lattice-shaped piezoelectric portion 401. Here, the non-transparent piezoelectric material layer 400 may be composed of one or more of Zinc oxide (english: zinc oxide, abbreviated as ZnO), lead zirconate titanate (english: lead zirconate titanate, abbreviated as PZT), barium titanate (english: barium titanate), lithium niobate (english: lithium niobate), or the piezoelectric material layer 400 may be composed of other non-transparent piezoelectric materials. The application is not limited in this regard. It should be noted that, after the touch substrate 000 is integrated in the display device, light emitted by the light emitting device in the display device may pass through the grid holes in the grid-shaped piezoelectric portion 401 and exit, so that the piezoelectric portion 401 made of the non-transparent piezoelectric material does not affect the normal display of the display device.
In the present application, the touch substrate 000 may further include a cover layer 800 for protecting the structure on the touch substrate 000. For example, when the touch substrate 000 is integrated within the display device, the cover layer 800 may be composed of transparent glass such that the cover layer 800 does not affect the display effect of the display device. It should be noted that, for the first implementation, since the piezoelectric material layer 400 is located on the side of the second conductive layer P2 away from the substrate 100, the thickness of the piezoelectric material layer 400 cannot exceed the thickness of the cover layer 800, so as to ensure that the cover layer 800 has a better protection effect on the touch substrate 000.
In summary, the embodiment of the application provides a touch substrate, which comprises a substrate, a touch electrode, a pressure electrode and a piezoelectric material layer. Because the touch electrode and the pressure electrode have no connection relationship, and the touch electrode and the pressure electrode are arranged on the same layer. Therefore, the pressure electrode may be used as a virtual electrode of the touch electrode, that is, the pressure electrode and the virtual electrode are multiplexed. Therefore, the thickness of the touch substrate is reduced on the premise that the display effect of the display device integrated with the touch substrate is good through the pressure electrode and the touch electrode which are arranged on the same layer, and the thickness of the display device can be reduced.
The embodiment of the application also provides a manufacturing method of the touch substrate, which can comprise the following steps:
and S1, forming a plurality of touch electrodes and a plurality of pressure electrodes on a substrate, wherein at least part of the touch electrodes and the pressure electrodes are arranged on the same layer and are made of the same material, and the orthographic projection of the touch electrodes on the substrate is not overlapped with the orthographic projection of the pressure electrodes on the substrate.
And S2, forming a piezoelectric material layer electrically connected with the plurality of pressure electrodes on the substrate, wherein the piezoelectric material layer is configured to generate charge change after receiving the pressing force so as to form an electric signal capable of being transmitted through the pressure electrodes.
In summary, the embodiment of the application provides a method for manufacturing a touch substrate, which includes forming a touch electrode, a pressure electrode and a piezoelectric material layer on a substrate. Because the touch electrode and the pressure electrode have no connection relationship, and the touch electrode and the pressure electrode are arranged on the same layer. Therefore, the pressure electrode may be used as a virtual electrode of the touch electrode, that is, the pressure electrode and the virtual electrode are multiplexed. Therefore, the thickness of the touch substrate is reduced on the premise that the display effect of the display device integrated with the touch substrate is good through the pressure electrode and the touch electrode which are arranged on the same layer, and the thickness of the display device can be reduced.
For the two alternative implementations, the following two executable manufacturing methods may be used for the manufacturing method of the touch substrate.
A first executable manufacturing method is used to manufacture the touch substrate shown in fig. 5 in the first executable implementation. The manufacturing method of the touch substrate may include:
and A1, forming a first conductive layer on the substrate.
By way of example, a layer of the first conductive film may be formed on the substrate by any of a variety of means, such as deposition, coating, and sputtering. And performing a patterning process on the first conductive film to obtain a first conductive layer. The first conductive layer may include the jumper line, the touch sensing signal line, and the second connection lead in the above embodiments. Optionally, the material of the first conductive layer may include a metal material such as metal aluminum, metal silver, metal molybdenum or an alloy.
And B1, sequentially forming an insulating layer with a via hole on the first conductive layer.
An insulating film is formed on the first conductive layer by any of a variety of means such as deposition, coating, and sputtering. And carrying out a patterning process on the insulating layer film to obtain the insulating layer with the via hole. The via hole in the insulating layer may include a via hole for electrically connecting the touch electrode and the touch sensing signal line and a via hole for electrically connecting the pressure electrode and the jumper line in the above embodiments. Optionally, the material of the insulating layer may include inorganic materials such as silicon nitride, silicon oxide, or silicon oxynitride.
And C1, forming a second conductive layer on the insulating layer.
The second conductive film is formed on the insulating layer by any of a variety of means such as deposition, coating, and sputtering. And performing a patterning process on the second conductive film to obtain a second conductive layer. The second conductive layer may include the touch electrode, the pressure electrode, the connection line body, and the touch driving signal line in the above embodiment. Optionally, the material of the second conductive layer may include a metal material such as metal aluminum, metal silver, metal molybdenum, or an alloy.
And D1, sequentially forming a piezoelectric material layer and a covering layer on the second conductive layer.
First, a piezoelectric film is formed on a second conductive layer by any one of various means such as spraying, printing, or spin coating. And performing a patterning process on the piezoelectric film once to obtain an untreated piezoelectric material layer. And then carrying out polarization treatment on the untreated piezoelectric material layer to obtain the piezoelectric material layer. Alternatively, the material of the piezoelectric material layer may include transparent piezoelectric material or non-transparent piezoelectric material as described above, such as PVDF, P (VDF-TrFE), PZT, etc.
Then, a cover layer is formed on the piezoelectric material layer by any one of various means such as deposition, coating, and sputtering. Alternatively, the material of the cover layer may include other transparent materials such as transparent glass.
The touch substrate shown in fig. 5 can be obtained through the steps A1 to D1.
A second executable manufacturing method is used to manufacture the touch substrate shown in fig. 9 in a second possible implementation. The manufacturing method of the touch substrate may include:
and A2, forming a third conductive layer on the substrate.
By way of example, a third conductive film may be formed on the substrate by any of a number of methods, such as deposition, coating, and sputtering. And performing a patterning process on the third conductive film to obtain a third conductive layer. The third conductive layer may include the second pressure electrode, the fourth connection line, the touch sensing signal line, the switching electrode block, and the third connection line in the above embodiments. Optionally, the material of the third conductive layer may include a metal material such as metal aluminum, metal silver, metal molybdenum, or an alloy.
And B2, sequentially forming an insulating layer and a piezoelectric material layer which are arranged in the same layer and are different in material on the third conductive layer.
First, an insulating layer film is formed on the third conductive layer by any one of a plurality of methods such as deposition, coating, and sputtering. And carrying out a patterning process on the insulating layer film to obtain the insulating layer, wherein the insulating layer is provided with a via hole and a containing area. The shape of the accommodating region of the insulating layer may be the same as the shape of the piezoelectric material layer. The via hole of the insulating layer may include a via hole for electrically connecting the first pressure electrode and the switching electrode block, and a via hole for contacting the control electrode and the touch sensing signal line in the above-described embodiment. Optionally, the material of the insulating layer may include inorganic materials such as silicon nitride, silicon oxide, or silicon oxynitride.
Then, the piezoelectric film is formed on the insulating layer by any one of various means such as spraying, printing, or spin coating. The piezoelectric material layer which is patterned in the accommodating area of the insulating layer can be obtained by performing a composition process on the piezoelectric film once, and the piezoelectric material layer in the accommodating area can be polarized to obtain the piezoelectric material layer which is arranged on the same layer as the insulating layer but has different materials. Alternatively, the material of the piezoelectric material layer may include transparent piezoelectric material or non-transparent piezoelectric material as described above, such as PVDF, P (VDF-TrFE), PZT, etc.
And C2, forming a fourth conductive layer on the piezoelectric material layer.
The fourth conductive film is formed on the piezoelectric material layer by any one of a plurality of means such as deposition, coating, and sputtering. And performing a patterning process on the fourth conductive film to obtain a fourth conductive layer. The fourth conductive layer may include the touch electrode, the first pressure electrode, and the touch driving signal line in the above embodiments. Optionally, the material of the fourth conductive layer may include a metal material such as metal aluminum, metal silver, metal molybdenum, or an alloy.
And D2, forming a covering layer on the fourth conductive layer.
A capping layer is formed on the fourth conductive layer by any of a number of means, such as deposition, coating, and sputtering. Alternatively, the material of the cover layer may include other transparent materials such as transparent glass.
The touch substrate shown in fig. 9 can be obtained through the steps A2 to D2.
It should be noted that, the primary patterning process in the above embodiment refers to photoresist coating, exposure, development, etching, and photoresist stripping.
It will be clear to those skilled in the art that, for convenience and brevity, the specific principles of the display panel described above may be referred to the corresponding matters in the foregoing embodiments of the structure of the display panel, and will not be repeated herein.
The embodiment of the application also provides a display panel, wherein the display panel 0000 may include a display substrate 111 and a touch substrate 000 located on the light emitting side of the display substrate 111, and the touch substrate 000 may be any one of the touch substrates 000 in fig. 2, fig. 5, and fig. 9.
In the embodiment of the present application, please refer to fig. 16 and 17, fig. 16 is a schematic structural diagram of a display panel integrated with the touch substrate shown in fig. 9 according to the embodiment of the present application, and fig. 17 is a schematic structural diagram of a display panel integrated with the touch substrate shown in fig. 5 according to the embodiment of the present application. The display substrate 111 in the display panel 0000 may include a back plate 101, a light emitting device 102 on the back plate 101, and an encapsulation layer 103 on a side of the light emitting device 102 away from the back plate 101.
The back plate 101 may include a substrate 1011 and driving thin film transistors 1012 arranged in an array on the substrate 1011. The driving thin film transistor 1012 in the back plate 101 has a gate electrode 1012a, a first electrode 1012b, a second electrode 1012c, and an active layer 1012d. Also, the first pole 1012b and the second pole 1012c are overlapped with the active layer 1012d, and the active layer 1012d is insulated from the gate electrode 1012 a. Note that the first electrode 1012b of the driving thin film transistor 1012 may be one of a source electrode and a drain electrode, and the second electrode 1012c may be the other of the source electrode and the drain electrode. In addition, the embodiment of the present application is schematically illustrated by taking the thin film transistor 1012 as a bottom gate thin film transistor. In other alternative implementations, the thin film transistor 1012 may also be a top gate thin film transistor, which is not limited by the embodiments of the present application.
In the present application, the light emitting devices 102 in the display substrate 111 are a plurality of light emitting devices 102 arranged in an array, and the display substrate 111 can realize a display function by emitting light from the plurality of light emitting devices 102. The light emitting device 102 may include an anode layer 1021, a light emitting layer 1022, and a cathode layer 1023, which are stacked. An anode layer 1021, a light emitting layer 1022, and a cathode layer 1023, which are stacked, may constitute a light emitting device 102, and the light emitting device 102 may be an Organic electronic device (Organic LIGHT EMITTING DISPLAY; OELD).
The light emitting device 102 may further include a pixel defining layer 1024 between any two light emitting devices 102, where the pixel defining layer 1024 is configured to define a plurality of pixel regions in the display substrate 111, where each pixel region may have one light emitting device 102 distributed therein. The light emitting device 102 may be electrically connected to the second electrode 1012c in the driving thin film transistor 1012 through the anode layer 1021. In this way, when the display substrate 111 can drive the light emitting device 102 to emit light by driving the thin film transistor 1012, the light emitting device 102 can emit visible light toward a side facing away from the substrate 1011.
It should be noted that the front projections of the touch electrode 200 and the pressure electrode 300 on the substrate 1011 are located in the front projection of the pixel defining layer 1024 on the substrate 1011. In this way, the touch electrode 200 and the pressure electrode 300 do not affect the light emitted from the light emitting device 102.
In the embodiment of the present application, the encapsulation layer 103 is the substrate 100 in the touch substrate 000. For example, the encapsulation layer 103 in the display substrate 111 may provide protection for the light emitting device 102 to extend the lifetime of the light emitting device 102. In the embodiment of the present application, when the touch substrate 000 is formed on the display substrate 111, the encapsulation layer 103 in the display substrate 111 may be the substrate 100 in the touch substrate 000. In this way, the thickness of the display panel 0000 can be further reduced.
In the present application, when the touch electrode 200 and the pressure electrode 300 are both grid-shaped electrodes, the orthographic projection of the light emitting device 102 on the back plate 101 is located in the grid holes in the orthographic projection of the grid-shaped electrodes on the back plate 101. Thus, when the touch substrate 000 is located on the display substrate 111, the light emitted by the light emitting device 102 in the display substrate 111 can pass through the touch electrode 200 and the pressure electrode 300 in the touch substrate 000, and the light emitted by the light emitting device 102 can be emitted from the grid holes in the touch electrode 200 and the pressure electrode 300, so that the display effect of the display substrate 111 is not affected by the touch substrate 000.
It should be noted that, when the piezoelectric material layer 400 in the touch substrate 000 is made of a transparent piezoelectric material, the thickness of the piezoelectric material layer 400 is not easy to be excessively large, so as to ensure that the transmittance of the piezoelectric material layer 400 is relatively high, and further the display effect of the display substrate 111 is not affected by the piezoelectric material layer 400. The thickness of the piezoelectric material layer 400 is typically 2um, for example.
In the embodiment of the present application, the display panel 0000 may be integrated in a different display device, and the display device may be a display device capable of interacting with a user, such as a smart phone, a smart watch, and a smart computer, which is not limited in the present application.
It is noted that in the drawings, the size of layers and regions may be exaggerated for clarity of illustration. Moreover, it will be understood that when an element or layer is referred to as being "on" another element or layer, it can be directly on the other element or intervening layers may be present. In addition, it will be understood that when an element or layer is referred to as being "under" another element or layer, it can be directly under the other element or intervening layers or elements may be present. In addition, it will be understood that when a layer or element is referred to as being "between" two layers or elements, it can be the only layer between the two layers or elements, or more than one intervening layer or element may also be present. Like reference numerals refer to like elements throughout.
In the present disclosure, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. The term "plurality" refers to two or more, unless explicitly defined otherwise.
The foregoing description of the preferred embodiments of the present application is not intended to limit the application, but is intended to cover all modifications, equivalents, alternatives, and improvements falling within the spirit and principles of the application.