CN103260816A - Laser irradiation device and laser irradiation method - Google Patents

Abstract

The invention provides a laser irradiation device and a laser irradiation method, wherein output variation is suppressed and the output of irradiated laser is stable. A laser irradiation device (10) for irradiating a thin film with laser light for cutting the thin film includes: the laser device comprises a laser oscillator (1) for oscillating a laser beam (L), a beam splitter (3) for splitting the laser beam oscillated by the laser oscillator (1) into two beams and irradiating the laser beam as reflected light L1 to a film, a power sensor (4) for measuring the intensity of the laser beam as transmitted light L2, and a processing table (5) for calculating the output value of the laser oscillator (1) based on the measured intensity value, judging the magnitude of the output value relative to a set value, and correcting the output value so that the output value of the laser oscillator (1) approaches the set value.

Description

Laser irradiation device and laser irradiation method

technical field

The present invention relates to a laser irradiation device and a laser irradiation method capable of appropriately cutting a thin film in which output variation is suppressed and output of irradiated laser light is stabilized.

Background technique

Polarizing films are widely used in various products such as liquid crystal panels. Conventionally, although a cutting tool is used in the cutting process of the polarizing film, foreign matter such as film scraps is easily generated from the cut object, and the foreign matter adheres to the polarizing film, which reduces the yield of the product as the cut object.

Therefore, in the cutting process of a polarizing film in recent years, a laser is used instead of a cutter. Cutting with a laser is less likely to generate foreign matter such as film scraps from the object to be cut than cutting with a cutter, so it is possible to suppress a decrease in the yield of the product as the object to be cut. Therefore, cutting methods using laser light are useful, and various methods such as those described in Patent Documents 1 to 5 have been proposed.

patent documents

Patent Document 1: Japanese Laid-Open Patent Publication "JP-A-2008-284572 (published on November 27, 2008)"

Patent Document 2: Japanese Patent Laid-Open Publication No. 2008-302376 "published on December 18, 2008)"

Patent Document 3: Japanese patent publication "JP-A-2009-22978 (published on February 5, 2009)"

Patent Document 4: Japanese Laid-Open Patent Publication "JP-A-2009-167321 (published on July 30, 2009)"

Patent Document 5: Japanese Laid-Open Patent Publication "JP-A-2010-53310 Publication (Published on March 11, 2010)"

Contents of the invention

The problem to be solved by the invention

Generally speaking, the laser oscillator has the characteristics that the laser output is unstable, and the output value fluctuates around the set value with a certain amplitude in a very short period (for example, 1 millisecond). Therefore, even if the laser output value is set to a value required for processing to cut the polarizing film due to fluctuations in the output of the laser oscillator, there is a problem that the polarizing film may not be properly cut in practice. This problem will be specifically described below.

Usually, the cutting process of the polarizing film is carried out continuously by irradiating the laser beam while conveying the long polarizing film at a constant speed. Here, when the output value of the laser is set to a (lower) value required for the cutting process of the polarizing film, when the output value is lower (less than) the set value by a certain degree or more due to the fluctuation of the output , the polarizing film is cut off. Therefore, when the polarizing film after cutting processing is rolled up, the end (cut portion) of the polarizing film is either in a torn state or is broken from the end to the inside of the polarizing film. Condition. On the other hand, in order to solve the above-mentioned unfavorable situation, the output value of the laser is set to be higher than the value required for the cutting process of the polarizing film, so that cutting can be performed even when the output value is lower than the set value to a certain extent. Processing, when set in this way, when the output value is higher (greater than) the set value to a certain extent due to output fluctuations, the output value becomes too high, and the end of the polarizing film (cut part) or the laser beam Melting due to overheating due to irradiation, or swelling or warping due to thermal expansion. Therefore, another unfavorable situation occurs in that the quality of the polarizing film after the cutting process is deteriorated.

However, in the cutting methods described in Patent Documents 1 to 5, there is no special consideration or countermeasure for the above-mentioned characteristic of the laser oscillator, that is, the characteristic that the laser output fluctuates in an extremely short period. That is, in the cutting methods described in the above-mentioned Patent Documents 1 to 5, there is a problem that the polarizing film may not be properly cut. Therefore, a laser irradiation device and a laser irradiation method capable of cutting a polarizing film properly are demanded.

means of solving problems

The present invention was made in view of the above-mentioned problems, and its main object is to provide a laser irradiation device and a laser irradiation method in which output fluctuations are suppressed and the output of irradiated laser light is stabilized.

The laser irradiation device of the present invention, in order to solve the above-mentioned problems, is a laser irradiation device for cutting a thin film and irradiating laser light to the thin film. A beam splitter for irradiating one of the split laser beams to the film, a measuring device for measuring the intensity of the other of the split laser beams, and calculating an output value of the laser oscillator from the measured intensity , a correction device for judging the magnitude of the output value relative to the set value, and performing correction so that the output value of the laser oscillator is close to the set value.

If the above configuration is adopted, the measuring device is configured to measure the intensity of another laser beam among the laser beams separated by the beam splitter, calculate the output value of the laser oscillator based on the intensity by the calibration device, and judge the output value relative to the set value. The magnitude of the output value, and correct it so that the output value of the laser oscillator is close to the set value. Therefore, even if the output value of the laser light oscillated by the above-mentioned laser irradiation device is set to a value (and lower) required for cutting the film, the output fluctuation is suppressed, and the output value will not fall below (less than) the set value. When the fixed value exceeds a certain level, the film can be properly cut. Therefore, it is possible to provide a laser irradiation device capable of suppressing output variation (variation with respect to a set value), stabilizing the output of irradiated laser light, and capable of appropriately cutting a thin film.

It is more preferable that the above-mentioned measuring device is capable of measuring the intensity of transmitted light in the separated laser light. Furthermore, it is more preferable that the measuring device is a power sensor. Furthermore, it is more preferable that the above-mentioned laser oscillator is a CO ₂ laser oscillator.

In order to solve the above-mentioned problems, the laser irradiation method of the present invention is a laser irradiation method for irradiating laser light to the thin film in order to cut the thin film, including: dividing the laser light oscillated by the laser oscillator into two beams, and dividing the separated laser beam into two beams. A beam of laser light is irradiated on the film, and the intensity of another laser beam is measured at the same time, the output value of the laser oscillator is calculated according to the measured intensity, the size of the output value relative to the set value is judged, and full-time correction is performed to The step of bringing the output value of the laser oscillator close to a set value.

If the above configuration is adopted, the intensity of the other laser beam among the separated laser beams is measured, the output value of the laser oscillator is calculated based on the intensity, the magnitude of the output value relative to the set value is judged, and all Time is corrected so that the output value of the laser oscillator is close to the set value. Therefore, even if the output value of the laser light oscillated by the above-mentioned laser irradiation device is set to a value (and low) required for cutting the film, the output fluctuation is suppressed, and the output value will not fall below (less than) the set value. When the fixed value exceeds a certain level, the film can be properly cut. Therefore, it is possible to provide a laser irradiation method that suppresses output fluctuation (variation from a set value), stabilizes the output of the irradiated laser light, and can cut the thin film appropriately.

Invention effect

If the laser irradiation device and laser irradiation method of the present invention are used, even if the output value of the laser is set to a value (and lower) required for cutting the film, the output fluctuation is suppressed, and the output value will not be lower than (Less than) The set value is above a certain level, and the film can be cut off properly. Therefore, it is possible to provide a laser irradiation device and a laser irradiation method that suppress output fluctuations (variations from a set value), stabilize the output of irradiated laser light, and cut thin films appropriately.

The film that cuts off with laser irradiation device and laser irradiation method of the present invention, can not take place its end (cutting part) or the state that forms torn, or the situation that breaks from end to polarizing film inboard, and, because do not have laser beam The output value is set more than necessary, so there is no melting or swelling or warping due to thermal expansion. Therefore, there is no fear of deterioration in film quality after cutting.

Description of drawings

FIG. 1 shows an example of a laser irradiation device of the present invention, and is a block diagram showing its schematic configuration.

(a), (b), and (c) of FIG. 2 collectively show an example of stabilizing the output value of the laser light by the above-mentioned laser irradiation device, and are graphs showing fluctuations in the output of the laser light irradiated by the laser irradiation device.

FIG. 3 shows an example of a conventional laser irradiation device, and is a block diagram showing its schematic configuration.

(a), (b), and (c) of FIG. 4 are all graphs showing output variations of laser light irradiated by a conventional laser irradiation device.

(a), (b), and (c) of FIG. 5 are graphs comparing the output variation of laser light irradiated by the laser irradiation device of the present invention with the output variation of laser light irradiated by a conventional laser irradiation device.

Detailed ways

An embodiment of the present invention will be described below with reference to FIGS. 1 to 5 .

In the following description, the case where the cut film is a polarizing film is taken as an example. In addition, the term "cutting" the film in the present invention includes not only dividing the film into two parts, but also including "cutting at least a part" such as punching a through hole on the film or forming a groove (groove) of a predetermined depth on the film. Condition. More specifically, "cutting" includes, for example, cutting (cutting off) of the end of the film, half-cutting, marking processing, and the like.

[Laser irradiation device]

FIG. 1 shows an example of a laser irradiation device of the present invention. As shown in FIG. 1, the laser irradiation device 10 of this embodiment is a device for cutting a polarizing film (film) and irradiating laser light to the polarizing film, and includes: a laser oscillator 1, a bending mirror 2, a beam splitter 3, a power A sensor (measurement device) 4 , a processing table (calibration device) 5 , a condenser lens (not shown), and optical components such as a beam expander (not shown) are also provided as necessary.

The laser oscillator 1 is a member that oscillates the laser light L. For example, _CO2 laser oscillator (carbon dioxide laser oscillator), UV laser oscillator, semiconductor laser oscillator, YAG laser oscillator, excimer laser oscillator, etc. can be used to oscillate device, but the specific structure is not particularly limited. Among the oscillators exemplified above, a CO ₂ laser oscillator is preferable because it can oscillate and generate high-output laser light suitable for cutting processing of polarizing films.

Generally speaking, the laser oscillator has the characteristics that the output of the laser is unstable, and the output value fluctuates around the set value with a certain amplitude in a very short period (for example, 1 millisecond). Becoming unstable (the higher the output, the smaller the fluctuation range of the output value). Therefore, in order to stabilize the output value of the laser oscillator 1, it is preferable to make the output of the laser oscillator 1 high. However, if the output value is too high, the polarizing film may be melted by laser irradiation or overheated, or swell or warp due to thermal expansion, and the quality of the polarizing film after cutting may deteriorate. Therefore, the output value of the laser oscillator 1 may be set in advance to an appropriate setting value according to conditions such as the material and thickness of the polarizing film. That is, it is desirable to set the specific output value of the laser oscillator 1 to an appropriate setting value according to the material and thickness of the polarizing film, the conveying speed of the polarizing film, and the ratio of the transmitted light and reflected light generated by the beam splitter 3 .

The frequency of the laser light L to be irradiated may be appropriately set according to conditions such as the output of the laser oscillator 1, the material and thickness of the polarizing film, and the conveying speed of the polarizing film, but generally it can be set at 5 kHz or more and 100 kHz or less.

Then, the laser oscillator 1 outputs laser light according to the preset setting value, and the calibration device, ie, the processing table 5, performs full-time calibration so that the output value is close to the setting value.

It is more preferable that the laser irradiation device 10 has a beam expander on the optical path from the beam splitter 3 to the polarizing film. The beam expander expands the laser light L1 into a parallel beam, and a known beam expander can be used. Specifically, it is more preferable to expand the diameter of the laser light L1 by, for example, 2 to 10 times with a beam expander. By expanding the diameter of the laser beam, the spot diameter of the laser beam irradiated on the polarizing film can be further reduced.

The bent mirror (bent mirror) 2 is a member that reflects the laser light L oscillated by the laser oscillator 1 toward the beam splitter. It is suitable to use, for example, a flat mirror as the above-mentioned curved mirror 2 , as long as it has a structure capable of reflecting the laser light L to the beam splitter 3 . In addition, the number is not particularly limited, either.

The beam splitter (beam splitter) 3 is a component that divides the laser light L oscillated by the laser oscillator 1 and reflected by the curved mirror 2 into two beams at a certain ratio (proportion). That is, the beam splitter 3 is a member that splits the laser light L into reflected light L1 and transmitted light L2 at a constant ratio. Moreover, the beam splitter 3 irradiates the reflected light L1 (one beam of laser light) in the separated laser light onto the polarizing film through optical components such as a condenser lens, and is used for cutting processing of the polarizing film. Beam laser light) is irradiated on the power sensor 4 for output adjustment of the laser oscillator 1 . As the beam splitter 3, a known beam splitter can be used.

As the above-mentioned condensing lens, for example, a known lens such as a spherical lens or an aspheric lens may be used, and it is not particularly limited. In addition, since the focal diameter of the reflected light L1, that is, the laser light, determines the cutting width of the polarizing film, the focal diameter of the laser light on the polarizing film is preferably 5 μm or more and 500 μm or less, more preferably 10 μm or more and 400 μm or less.

In addition, the laser irradiation device 10 of the present embodiment is configured to use the reflected light L1 in the cutting process of the polarizing film and the transmitted light L2 in the output adjustment of the laser oscillator 1. (shown in the figure) adopts a configuration in which transmitted light L2 is used for cutting the polarizing film and reflected light L1 is used for output adjustment of the laser oscillator 1 .

A power sensor (power sensor) 4 as a measurement device is an element that converts the transmitted light L2 into a thermoelectromotive force and measures the laser intensity of the transmitted light L2. That is, the power sensor 4 measures the electric power generated by irradiation of laser light, thereby measuring the intensity of the laser light. The measurement interval by the power sensor 4 is preferably shorter, for example, 10 milliseconds, but it is not particularly limited. Also, as the power sensor 4, a known power sensor can be used. In addition, as long as the measuring device has a structure capable of measuring the intensity of laser light, it is sufficient.

Then, the power sensor 4 transmits data of the measured laser intensity (measured value) to the processing station 5 via an A/D converter (not shown). The above-mentioned A/D converter converts the analog data of the measured value into digital data, and sends the digital data of the measured value to the processing station 5 .

The processing table 5, which is the calibration device, has a built-in arithmetic processing device such as a CPU. The processing station 5 calculates the output value of the above-mentioned laser oscillator 1 based on the ratio (ratio) of the digital data of the measured value received from the power sensor 4 via the A/D converter to the transmitted light L2 separated by the beam splitter 3, and judges Full-time correction is performed to make the output value of the laser oscillator 1 close to the set value for the size (exceed or fall) of the output value relative to the set value set in advance. That is, the processing station 5 feeds back the calculation results to the laser oscillator 1 at all times, specifically, for example, every 10 milliseconds, and adjusts (corrects) the actual output value of the laser oscillator 1 close to the set value. More specifically, when the intensity of the laser light as the transmitted light L2 is small and the output value of the laser oscillator 1 is smaller than the set value, the output of the laser oscillator 1 is adjusted to increase the actual output value of the laser light L. On the other hand, When the intensity of the laser light as the transmitted light L2 is high and the output value of the laser oscillator 1 is greater than the set value, the output of the laser oscillator 1 is adjusted so that the actual output value of the laser light L decreases. The specific configuration of the processing table 5 is not limited as long as it can perform the above-mentioned calculations and judgments.

In the laser irradiation device 10 in the present embodiment, a so-called FTS ( Full time stabilizer (full time stabilizer) system, capable of adjusting (correcting) the actual output value of the laser oscillator 1 so as to be close to the set value, thus cutting the polarizing film appropriately.

The laser irradiation device 10 in this embodiment is used as one device constituting, for example, a tape cutting machine (not shown) that continuously cuts a polarizing film. In addition to the laser irradiation device 10, the tape cutting machine is equipped with components such as a discharge unit that discharges a long polarizing film (described later), a plurality of transport rollers that transport the polarizing film, and a winding unit that winds up and cuts the polarizing film. . The tape cutting machine will be described below. However, the structure other than the laser irradiation device 10 in the tape cutting machine can be a known structure, so the description thereof will be omitted.

The unwinding section holds the elongated polarizing film and unwinds the wound polarizing film to the conveyance roller by the rotation of the rotating device. Specifically, a known unwinding section can be used. In addition, the tension applied to the polarizing film and the transport speed of the polarizing film were adjusted with a rotating device. In addition, it is sufficient to provide only one discharge part, but by providing two, the polarizing film of one discharge part can be connected to the polarizing film of the other discharge part before all the polarizing films are released, so the number of rolls of replacement polarizing films can be reduced. drum time.

As a conveyance roller which conveys a polarizing film, there exists a well-known conveyance roller, for example. Usually, the width of the conveying roller is about 1.5m to 2.5m. The conveying speed of the polarizing film may be, for example, not less than 1 m/sec and not more than 100 m/sec, and is not particularly limited. Moreover, the contact roll which presses a polarizing film to a conveyance roll may be provided in a tape cutting machine.

Two take-up units are provided, and are take-up means for taking up the cut-processed polarizing film by the rotation of the rotating device. Specifically, a known take-up unit can be mentioned. Moreover, the tension|tensile_strength applied to the polarizing film after cutting processing, and the conveyance speed of a polarizing film are adjusted with a rotating device.

The laser irradiation apparatus 10 is arrange|positioned in the middle of the polarizing film conveyance path formed by several conveyance rollers, and cuts the polarizing film conveyed by a conveyance roller continuously. Moreover, instead of moving the polarizing film, the cutting process of the polarizing film may be performed while moving the laser irradiation device 10 .

Therefore, cutting processing of a polarizing film can be performed continuously by using the tape cutting machine of the said structure.

[film]

The film (cutting target) to be cut by the laser irradiation device 10 is not particularly limited, but known polarizing films can be used. As the polarizing film, generally, a polarizing film of a long size (for example, the length of the polarizing film in the cutting direction is 10 m or more), but a short size (for example, the length of the polarizing film in the cutting direction is 2 m or more) may be used. , less than 10m) or plate-shaped (for example, the length of the polarizing film in the cutting direction is 10 cm or more and less than 2 m).

As the composition of the polarizing film, specifically, for example, a TAC (triacetyl cellulose) film, a COP (cycloolefin polymer) film, etc. are bonded on both sides of the polarizing film as a protective film, The structure in which a protective film is laminated with an adhesive on the TAC film on the opposite (rear) surface of the irradiation device 10 . Examples of the polarizing film positioned at the center of the polarizing film include stretched polyvinyl alcohol films dyed with dyes such as iodine, and films bonded with protective film members such as TAC. Instead of the above-mentioned polyvinyl alcohol film, hydrophilic polymer films such as partially methylated polyvinyl alcohol-based films, ethylene-vinyl acetate copolymer-based partially saponified films, cellulose-based films, and dehydrating polyvinyl alcohol films can be used. Polyene oriented films such as treated products or dehydrochlorination-treated products of polyvinyl chloride.

As the above-mentioned protective film, films such as polyester film and polyethylene terephthalate film can also be used. The thickness and width of the above-mentioned protective film are not particularly limited, but for example, a thickness of 5 μm to 60 μm and a width of 200 mm to 1500 mm are suitable for use as a protective film for a polarizing film.

The thickness of the polarizing film including the protective film is not particularly limited, but can be 100 μm or more and 500 μm or less. In addition, the thickness of the polarizing film is generally not less than 10 μm and not more than 50 μm. In addition, the polarizing film may further contain other layers in addition to the above-mentioned three layers (polarizing film, TAC film, COP film, and protective film) within the range where there is no practical problem.

[Laser irradiation method]

The laser irradiation method of this embodiment is a method of irradiating laser light to the polarizing film in order to cut the polarizing film (film). For example, the reflected light L1 (one of the laser beams) is irradiated on the polarizing film through optical components such as a condenser lens, and is used for cutting processing of the polarizing film. At the same time, the intensity of the laser beam as the transmitted light L2 (another laser beam) is measured. Based on the measured intensity (for example, digital data of the measured value) and the ratio (proportion) of the transmitted light L2 in the splitting by the beam splitter 3, the output value of the above-mentioned laser oscillator 1 is calculated, and the output value of the laser oscillator 1 is judged relative to the preset setting. The magnitude (over and under) of the above-mentioned output value of the value is corrected at all times so that the output value of the above-mentioned laser oscillator 1 is close to the set value.

As the above-mentioned laser light L, a CO ₂ laser is preferable because a high output power suitable for cutting and processing of a polarizing film can be obtained. Also, the frequency of the laser light L to be irradiated may be appropriately set according to conditions such as the output power of the laser oscillator 1, the material and thickness of the polarizing film, and the conveying speed of the polarizing film. Generally, it can be 5 kHz or more and 100 kHz or less.

To split the laser light L into two beams, the beam splitter 3 may be used as described above. However, the splitting method is not limited to the method using a beam splitter, and any method can be used as long as the laser light L can be split into two beams. However, the ratio of the reflected light L1 to the transmitted light L2 may be set appropriately according to the output power of the laser oscillator 1, the material and thickness of the polarizing film, and the conveying speed of the polarizing film, and is not particularly limited.

Also, in the laser irradiation method of the present embodiment, the reflected light L1 is used for the cutting process of the film, and the transmitted light L2 is used for output adjustment of the laser oscillator 1, but it is also possible to use the transmitted light L2 for cutting the film, and the laser The output of oscillator 1 adjusts the structure using reflected light L1.

In order to measure the intensity of the laser light as the transmitted light L2, it is only necessary to use the power sensor 4 as described above. However, the measurement method is not limited to the method using a power sensor, and any method can be used as long as the intensity of laser light can be measured. The measurement interval is preferably as short as 10 milliseconds, but it is not particularly limited.

In order to perform full-time calibration so that the output value of the laser oscillator 1 approaches the set value, it is only necessary to use the processing table 5 as described above. However, the calibration method is not limited to the method using a processing table, as long as it can be used, for example, every 10 milliseconds, the measured laser intensity (for example, digital data of the measured value), the ratio (ratio) of the transmitted light L2, and the preset setting The calculation result of the value calculation is fed back to the laser oscillator 1, and adjustment (correction) is performed so that the actual output value of the laser oscillator 1 is close to the set value. More specifically, as long as the intensity of the laser light as the transmitted light L2 is small and the output value of the laser oscillator 1 is less than the set value, the output of the laser oscillator 1 can be adjusted so that the actual output value of the laser light L becomes larger. On the one hand, when the intensity of the laser light as the transmitted light L2 is high and the output value of the laser oscillator 1 is greater than the set value, it is sufficient to adjust the output of the laser oscillator 1 so that the actual output value of the laser light L is reduced.

In the laser irradiation method of this embodiment, the so-called FTS (full time stabilizer) system that measures the intensity of the transmitted light L2 at a measurement interval of, for example, 10 milliseconds and adjusts the output value of the laser light L can be used to perform adjustment (correction) so that the laser oscillates. The actual output value of the device 1 is close to the set value, so the polarizing film can be cut off properly.

The laser irradiation method of the present embodiment can be suitably used for, for example, a tape cutting machine that continuously cuts a polarizing film.

In addition, the laser irradiation device and the laser irradiation method of the present invention are devices and methods capable of appropriately cutting a thin film, and thus can also be understood as a laser cutting device and a laser cutting method.

Example

The performance of the laser irradiation device 10 of this embodiment has been discussed above. In addition, in order to compare with the performance of the laser irradiation device 10 of this embodiment, the performance of a conventional laser irradiation device was discussed. Specifically, the output variation of the laser light L oscillated by the laser oscillator 1 of the laser irradiation device 10 of the present embodiment and the conventional laser irradiation device was measured.

The configuration of the laser irradiation device for discussing performance is shown in FIG. 3 . As shown in FIG. 3 , a conventional laser irradiation device 20 includes a laser oscillator 1 , a curved mirror 2 , a curved mirror 8 , and a condenser lens (not shown). That is to say, the existing laser irradiation device 20 does not have a beam splitter, a power sensor, an A/D converter, and a processing table, and the laser light L oscillated by the laser oscillator 1 is reflected by the bending mirror 2 and the bending mirror 8. All of them are used for the cutting process of the film. Also, the laser irradiation device 20 includes configurations other than the configuration for correcting the output value of the laser oscillator 1 closer to the set value (for example, optical members such as a beam expander) as in the laser irradiation device 10 . In addition, as the laser oscillator 1 , the same oscillator is used in the laser irradiation device 10 and the laser irradiation device 20 .

Furthermore, the output variation of the laser light L oscillated by the laser oscillator 1 was measured using the laser irradiation device 10 of the present embodiment and the existing laser irradiation device 20 .

That is, the output value of the laser light L oscillated by the laser oscillator 1 was set at 14.0 W, and the thin film was cut at a speed of 6 m/min. In the laser irradiation device 10 of this embodiment, as shown in FIG. 2( a ), the output value of the actually output laser light L is generally in the range of 13.4 to 14.1W (average 13.8W, amplitude 0.7W). In contrast, in the conventional laser irradiation device 20, as shown in (a) of FIG. ). Therefore, as can be seen from the results shown in FIG. 5( a ), when the output value of the laser light L is set to 14.0 W, the output fluctuation of the laser light L oscillated by the laser oscillator 1 of the laser irradiation device 10 is small. Compared with the performance of the conventional laser irradiation device 20, it was judged that the performance of the laser irradiation device 10 of the present embodiment is extremely excellent.

The output value of the laser light L oscillated by the laser oscillator 1 was set to 49.5 W, and the thin film was cut at a speed of 30 m/min. The laser irradiation device 10 of the present embodiment generally has an output value of the laser light L actually output in the range of 48.9 to 50.4W (49.5W on average, 1.6W in amplitude) as shown in FIG. 2( b ). In contrast, in the conventional laser irradiation device 20 , as shown in FIG. 4( b ), the output value of the actually output laser light L generally fluctuates in the range of 46.4 to 51.1 W (average 49.2 W, amplitude 4.7 W). Therefore, as can be seen from the results shown in FIG. 5( b ), when the output value of the laser light L is set to 49.5 W, the output fluctuation of the laser light L oscillated by the laser oscillator 1 of the laser irradiation device 10 is small, which is comparable to that of Compared with the performance of the conventional laser irradiation device 20 , it was judged that the performance of the laser irradiation device 10 of the present embodiment is extremely excellent.

The output value of the laser light L oscillated by the laser oscillator 1 was set to 100.0 W, and the thin film was cut at a speed of 60 m/min. The laser irradiation device 10 of the present embodiment generally has an output value of the laser light L actually output in the range of 99.3 to 100.6 W (average 99.9 W, amplitude 1.3 W), as shown in FIG. 2( c ). In contrast, in the conventional laser irradiation device 20 , as shown in FIG. 4( c ), the output value of the actually output laser light L generally fluctuates in the range of 95.2 to 102.8 W (average 99.1 W, amplitude 7.6 W). Therefore, as can be seen from the results shown in FIG. 5( c ), when the output value of the laser light L is set to 100.0 W, the output fluctuation of the laser light L oscillated by the laser oscillator 1 of the laser irradiation device 10 is small, which is comparable to that of Compared with the performance of the conventional laser irradiation device 20, it was judged that the performance of the laser irradiation device 10 of the present embodiment is extremely excellent.

That is, it is clear from the results shown in (a) to (c) of FIG. The output fluctuation of the laser light L is small, so its performance is particularly excellent.

In addition, the present invention is not limited to the above-described embodiments, and can be implemented in various modifications within the range described above, and therefore, various changes are possible within the scope of the claims.

Industrial availability

If the laser irradiation device and laser irradiation method of the present invention are used, even if the output value of the laser is set to a value (and lower) required for cutting the film, the output fluctuation is suppressed, and the output value will not be lower than ( If the set value is above a certain level, the film can be properly cut off. Therefore, there is an effect of providing a laser irradiation device and a laser irradiation method capable of suppressing output fluctuations (variations with respect to a set value), stabilizing the output of irradiated laser light, and capable of appropriately cutting a thin film.

Therefore, the laser irradiation device and the laser irradiation method of the present invention can be beneficial to the cutting processing of such as polarizing film, so in the manufacturing process of various products such as liquid crystal panel with polarizing film, promptly in the various industries of using polarizing film Can be widely used.

Symbol Description

1 laser oscillator

2 curved mirrors

3 beam splitter

4 power sensor (measuring device)

5 processing table (calibration device)

10 Laser irradiation device

L Laser

L1 reflected light (laser)

L2 Transmitted light (laser).

Claims (5)

1. A laser irradiation device is a laser irradiation device that irradiates laser light to the film for cutting the film, characterized in that it has: A laser oscillator for oscillating laser light; A beam splitter that divides the laser light oscillated by the laser oscillator into two beams, and irradiates one of the separated laser beams to the thin film; measuring means for measuring the intensity of the other of the separated laser beams; and A correction device that calculates the output value of the laser oscillator based on the measured intensity, determines the magnitude of the output value relative to the set value, and performs correction so that the output value of the laser oscillator is close to the set value . 2. The laser irradiation device according to claim 1, wherein the measurement device is configured to measure the intensity of transmitted light in the separated laser light. 3. The laser irradiation device according to claim 1 or 2, wherein the measuring device is a power sensor. 4. The laser irradiation device according to claim 1, 2 or 3, wherein the laser oscillator is a _CO2 laser oscillator. 5. A laser irradiation method, which is a laser irradiation method for irradiating laser light to the thin film for cutting the thin film, is characterized in that, comprising the following steps: The laser light oscillated by the laser oscillator is divided into two beams, and one of the separated laser beams is irradiated on the thin film, and the intensity of the other laser beam is measured, Calculate the output value of the laser oscillator based on the measured intensity, determine the magnitude of the output value relative to the set value, and perform full-time correction to make the output value of the laser oscillator close to the set value.

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