CN102923936B - 蚀刻装置 - Google Patents
蚀刻装置 Download PDFInfo
- Publication number
- CN102923936B CN102923936B CN201110229889.7A CN201110229889A CN102923936B CN 102923936 B CN102923936 B CN 102923936B CN 201110229889 A CN201110229889 A CN 201110229889A CN 102923936 B CN102923936 B CN 102923936B
- Authority
- CN
- China
- Prior art keywords
- liquid storage
- storage part
- etching
- etching system
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/04—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
- B05B13/0442—Installation or apparatus for applying liquid or other fluent material to separate articles rotated during spraying operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B3/00—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements
- B05B3/02—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements
- B05B3/10—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements discharging over substantially the whole periphery of the rotating member
- B05B3/1007—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements discharging over substantially the whole periphery of the rotating member characterised by the rotating member
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Weting (AREA)
Abstract
Description
| 蚀刻装置 | 100 |
| 基体 | 10 |
| 第一安装孔 | 11 |
| 第二安装孔 | 13 |
| 储液件 | 30 |
| 收容部 | 31 |
| 第一端面 | 311 |
| 容纳孔 | 3110 |
| 第二端面 | 312 |
| 侧面 | 313 |
| 喷射孔 | 3130 |
| 端盖部 | 33 |
| 连通孔 | 330 |
| 空气压缩机 | 40 |
| 转动件 | 50 |
| 主体 | 51 |
| 转动轴 | 53 |
| 曲面玻璃 | 200 |
Claims (9)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110229889.7A CN102923936B (zh) | 2011-08-11 | 2011-08-11 | 蚀刻装置 |
| TW100129472A TWI412502B (zh) | 2011-08-11 | 2011-08-17 | 蝕刻裝置 |
| US13/299,438 US20130037214A1 (en) | 2011-08-11 | 2011-11-18 | Curved glass sheet etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110229889.7A CN102923936B (zh) | 2011-08-11 | 2011-08-11 | 蚀刻装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102923936A CN102923936A (zh) | 2013-02-13 |
| CN102923936B true CN102923936B (zh) | 2014-12-10 |
Family
ID=47638900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110229889.7A Expired - Fee Related CN102923936B (zh) | 2011-08-11 | 2011-08-11 | 蚀刻装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20130037214A1 (zh) |
| CN (1) | CN102923936B (zh) |
| TW (1) | TWI412502B (zh) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107916747A (zh) * | 2017-11-13 | 2018-04-17 | 德睿盛兴(大连)装配式建筑科技有限公司 | 精致建造平整外面的装配墙板和生产方法 |
| CN108000368B (zh) * | 2017-12-01 | 2020-03-31 | 福建和达玻璃技术有限公司 | 曲边玻璃盖板防眩表面处理设备与处理方法 |
| CN107962501B (zh) * | 2017-12-01 | 2019-09-20 | 福建和达玻璃技术有限公司 | 带倾角的异形玻璃盖板防眩表面处理设备 |
| CN113499912A (zh) * | 2021-06-04 | 2021-10-15 | 重庆工程职业技术学院 | 一种便于固定的新能源汽车生产用轮毂喷漆装置 |
| CN116177899B (zh) * | 2023-03-17 | 2025-02-14 | 河北光兴半导体技术有限公司 | 玻璃减薄装置 |
| CN118925977B (zh) * | 2024-10-12 | 2024-12-17 | 常州鹏雷汽车零部件有限公司 | 一种用于汽车零部件气囊扣的涂装生产设备 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001028950A1 (en) * | 1999-10-19 | 2001-04-26 | Phifer Smith Corporation | A method and apparatus for treating a substrate with an ozone-solvent solution |
| CN101033116A (zh) * | 2006-02-17 | 2007-09-12 | 智圆技术株式会社 | 薄化玻璃衬底的设备 |
| CN101080806A (zh) * | 2004-12-17 | 2007-11-28 | 英特尔公司 | 在利用独立晶舟旋转的批次喷洒工艺中提高的均匀性 |
| CN101197255A (zh) * | 2006-12-08 | 2008-06-11 | Lg.菲利浦Lcd株式会社 | 用于刻蚀基板的装置和使用其制造液晶显示器的生产线 |
| CN101229954A (zh) * | 2007-01-25 | 2008-07-30 | 蔡孟廷 | 玻璃面板削减方法、玻璃面板削减装置及平板显示器 |
| CN201347410Y (zh) * | 2009-02-09 | 2009-11-18 | 新鋐源科技股份有限公司 | 直立式蚀刻机构 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1392855A (en) * | 1918-08-12 | 1921-10-04 | Jr Benjamin Skidmore | Hydraulic air-compressor and vacuum-producer |
| US3953276A (en) * | 1972-10-26 | 1976-04-27 | Zenith Radio Corporation | Etching apparatus with plural nozzle arrangements |
| US4485759A (en) * | 1983-01-19 | 1984-12-04 | Multi-Arc Vacuum Systems Inc. | Planetary substrate support apparatus for vapor vacuum deposition coating |
| US4851095A (en) * | 1988-02-08 | 1989-07-25 | Optical Coating Laboratory, Inc. | Magnetron sputtering apparatus and process |
| US6406551B1 (en) * | 1999-05-14 | 2002-06-18 | Fsi International, Inc. | Method for treating a substrate with heat sensitive agents |
| US6399513B1 (en) * | 1999-11-12 | 2002-06-04 | Texas Instruments Incorporated | Ozonated DI water process for organic residue and metal removal processes |
| JP3662484B2 (ja) * | 2000-08-09 | 2005-06-22 | エム・エフエスアイ株式会社 | ウェット処理方法及びウェット処理装置 |
| US7524771B2 (en) * | 2002-10-29 | 2009-04-28 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing method using alkaline solution and acid solution |
| US6977215B2 (en) * | 2003-10-28 | 2005-12-20 | Nec Electronics America, Inc. | Tungsten plug corrosion prevention method using gas sparged water |
| US7422031B2 (en) * | 2004-03-12 | 2008-09-09 | Fsi International, Inc. | Rotary unions, fluid delivery systems, and related methods |
| US7592264B2 (en) * | 2005-11-23 | 2009-09-22 | Fsi International, Inc. | Process for removing material from substrates |
| JP2008013389A (ja) * | 2006-07-04 | 2008-01-24 | Nec Corp | エッチング装置及び薄型ガラス基板の製造方法 |
-
2011
- 2011-08-11 CN CN201110229889.7A patent/CN102923936B/zh not_active Expired - Fee Related
- 2011-08-17 TW TW100129472A patent/TWI412502B/zh not_active IP Right Cessation
- 2011-11-18 US US13/299,438 patent/US20130037214A1/en not_active Abandoned
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001028950A1 (en) * | 1999-10-19 | 2001-04-26 | Phifer Smith Corporation | A method and apparatus for treating a substrate with an ozone-solvent solution |
| CN101080806A (zh) * | 2004-12-17 | 2007-11-28 | 英特尔公司 | 在利用独立晶舟旋转的批次喷洒工艺中提高的均匀性 |
| CN101033116A (zh) * | 2006-02-17 | 2007-09-12 | 智圆技术株式会社 | 薄化玻璃衬底的设备 |
| CN101197255A (zh) * | 2006-12-08 | 2008-06-11 | Lg.菲利浦Lcd株式会社 | 用于刻蚀基板的装置和使用其制造液晶显示器的生产线 |
| CN101229954A (zh) * | 2007-01-25 | 2008-07-30 | 蔡孟廷 | 玻璃面板削减方法、玻璃面板削减装置及平板显示器 |
| CN201347410Y (zh) * | 2009-02-09 | 2009-11-18 | 新鋐源科技股份有限公司 | 直立式蚀刻机构 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20130037214A1 (en) | 2013-02-14 |
| TW201307232A (zh) | 2013-02-16 |
| CN102923936A (zh) | 2013-02-13 |
| TWI412502B (zh) | 2013-10-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170316 Address after: Shenzhen City, Guangdong Guanlan Foxconn science and Technology Park B District Building 5 building C09 floor, C07 building, floor 2, C08 building, floor 4, floor C04, building, 1 Patentee after: SHENZHENSHI YUZHAN PRECISION TECHNOLOGY Co.,Ltd. Address before: 518109 Guangdong city of Shenzhen province Baoan District Guanlan Street third community Guanlan Foxconn Technology Park B District, building 4, building 6, building 7, building 13, (I) Patentee before: FuTaiHua Industry (Shenzhen) Co.,Ltd. Patentee before: HON HAI PRECISION INDUSTRY Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 518109 Foxconn H5 plant 101, No. 2, Donghuan 2nd Road, Fukang community, Longhua street, Longhua District, Shenzhen, Guangdong Province; plant 5, building C09, 4th floor, building C07, 2nd floor, building C08, 3rd floor, 4th floor, building C04, zone B, Foxconn Hongguan science and Technology Park, Fucheng Dasan community, Guanlan street, Guangdong Province Patentee after: Fulian Yuzhan Technology (Shenzhen) Co.,Ltd. Address before: 518109 Shenzhen Guanlan Foxconn Science and Technology Park, Guangdong Province, District B workshop 5 C09 4 storeys, C07 2 storeys, C08 3 storeys 4 storeys, C04 1 Patentee before: SHENZHENSHI YUZHAN PRECISION TECHNOLOGY Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141210 |