CN102818815B - Thermal vacuum outgassing testing apparatus - Google Patents

Abstract

The invention discloses a thermal vacuum outgassing test device, which mainly includes a vacuum cover (including a outgassing collection device, a sample tank, etc.), a vacuum pumping system, a high and low temperature protection system, a temperature and vacuum degree measurement and control system, and an auxiliary system. The exhaust system provides the vacuum degree required by the test equipment, and the high and low temperature protection system is a high temperature device and a low temperature circulation device respectively, which provide the temperature requirements for heating samples at 125±1°C and collecting plates at 25±1°C. The device of the invention ensures the effective conduction of cold energy between the collecting plate and the cooling plate, the temperature of the collecting plate and the cooling plate is consistent and uniform, and adopts a double-row parallel structure, which avoids the mutual interference of released gases, and is quick and convenient to operate , thereby improving the accuracy of the test results.

Description

Thermal vacuum outgassing test device

technical field

The present invention relates to a test equipment, in particular to a thermal vacuum outgassing test device.

Background technique

The thermal vacuum outgassing test device in the prior art adopts two rows of vertical test devices, as shown in Figure 1, each row of devices is composed of a sample tank (heater), a cooling plate, a collection box, and a collection plate. Each row of devices has 12 sample slots, corresponding to 12 collection plates and collection boxes. The test device is installed on the bottom plate of the vacuum system with a diameter of 260mm bell jar, adopts a dedicated through-type ring base, and is supported by the bottom plate. The connection structure of the collection box, the collection plate and the cooling plate is the key to the test equipment. The collecting box is composed of a space formed by a partition and a cooling plate; screws are welded at the bottom of the collecting plate, and are connected with the cooling plate by screws and nuts. Another thermal vacuum outgassing test device is shown in Figure 2. Each layer of the device is composed of a sample tank (heater), a cooling plate, a collection box, and a collection plate. Each layer of the device has 12 sample slots, corresponding to 12 collection plates and collection boxes. The collection box is composed of a grille and a cover plate, the collection plate is located inside the grille, and the collection plate is attracted and fixed by a magnet directly below the collection plate. The disadvantages of the prior art are: the vacuum cover is a slender structure, the vacuum pumping system is located at the bottom of the vacuum cover, and the suction port is small, which is not conducive to the establishment of high vacuum; the sample tank is a vertical structure of 650×50×25 , and the sample tank needs to be equipped with a heating device. The distance between the installed sample tank and the collection box is only 0.75mm, and the processing and positioning accuracy are difficult to guarantee. In particular, the temperature of the collecting plate at 25±1°C needs to be absolutely guaranteed, and the accuracy of the temperature directly determines the success or failure of the thermal vacuum outgassing test of the material. The temperature of the collecting plate comes from the cold conduction of the cooling plate, which is determined by the contact area and contact state with the cooling plate. In order to ensure good contact between the collecting plate and the cooling plate, a screw structure is designed on the back of the collecting plate. The collecting plate is a steel plate with a diameter of 33mm and a thickness of only 0.65mm. No matter what structure is used between the collecting plate and the screw, it will affect the flatness of the collecting plate, and then affect the bonding state of the collecting plate and the cooling plate. Collection plate temperature and uniformity. At the same time, a screw structure is designed on the back of the collecting plate, and a screw relief hole needs to be opened at the corresponding place of the corresponding cooling plate, which affects the contact heat transfer area between the collecting plate and the cooling plate, and also affects the temperature and uniformity of the collecting plate. The upper and lower two-layer structure is adopted, and the exhaust port of the vacuum system is located in the middle of the bottom flange of the vacuum cover. The gas released from the upper layer of test materials will inevitably not be captured by the lower layer of collecting plate, which will affect the accuracy of the test. The collecting plate is located in the grille, and the grille is clamped on the cold plate through the notch. The space inside the grid is 49.25×49.25, the height is 11.95, the diameter of the collection plate is 33, and the thickness is 0.65. It is difficult to take out the thin piece of the collection plate after the test. The collecting plate is fixed by magnetic attraction, the magnet is fixed on the cooling plate by screws, and the corresponding cooling plate is provided with stepped holes, which reduces the contact area between the collecting plate and the cooling plate and affects the heat transfer effect. Limited by the area of the magnet, the magnet has a limited area of action on the collecting plate, and the collecting plate is a thin plate with a thickness of only 0.65, which affects the degree of bonding between the collecting plate and the cooling plate, which in turn affects the temperature of the collecting plate and affects the test results accuracy. There are strict coaxiality requirements between the collecting plate, the collecting box and the air outlet of the sample tank. It is difficult to locate the collecting plate in this technical route. Clear the roots, and then affect the degree of fit between the collecting plate and the cooling plate.

Contents of the invention

The object of the present invention is to provide a thermal vacuum outgassing test device with simple design and uniform temperature in order to remedy the defects of the prior art.

The present invention is achieved through the following technical solutions:

A thermal vacuum outgassing test device, comprising an operating table and a vacuum cover installed above the operating table, a heating plate temperature control system, a cooling plate temperature control system, an inflating device and a vacuum system are respectively arranged below the operating table, and the temperature The control system accurately controls the temperature of the heating plate and the cooling plate respectively. The vacuum system provides the vacuum degree required for the test. After the test, the inflator refills the dry and clean nitrogen into the vacuum cover. There is an operating device in the vacuum cover , the operating device includes two identical devices and is distributed on the same operating board in a double-row parallel structure, each device includes a heating plate and a cooling plate, and the cooling plate is installed on the operating board through a support column On the above, the heating plate is supported on the cooling plate through the heat-insulating support mechanism. The heating plate is provided with six-hole sample slots, each sample slot is covered with a cover plate, and the side wall of the sample slot is provided with a heating plate. The cooling plate is equipped with a collecting plate at the position corresponding to each sample groove, and each collecting plate is positioned by a pressing plate groove. The pressing plate is in the shape of a double ear with a circular opening, and the inner groove is stepped. The depth of the groove is smaller than the thickness of the collecting plate, which plays a role of pressing to ensure good contact between the collecting plate and the cooling plate. The device also includes a collecting box, which is covered on the outside of each pressing plate and fixed On the cooling plate, six holes are opened on the top cover of the collection box corresponding to each sample slot.

The thermal vacuum outgassing test device is characterized in that: the shape of the sample tank is a goblet shape.

The thermal vacuum outgassing test device is characterized in that: the pressure plate is positioned and fixed by a set screw, a part of the cylindrical part of the set screw positions the pressure plate, and the other part is screwed into the cooling plate for the pressure plate and For the positioning of the cooling plate, when loosening or tightening the pressing plate, it only needs to rotate half a turn of the positioning screw to operate the pressing plate, achieving the purpose of quick assembly and shortening the time.

The thermal vacuum outgassing test device is characterized in that: positioning holes are respectively opened on both sides of the edge of the top plate of the collection box, the pins pass through the positioning holes and the cooling plate to be positioned, and are fastened by half-head screws. During operation, as long as Twist the button head screw half a turn to remove the collection box.

The thermal vacuum outgassing test device is characterized in that: the two ears of the pressing plate are in the shape of a semicircle, one of which opens upwards and the other opens downwards, when one side positioning screw is tightened, the frictional force makes the pressing plate close to Tendency for set screws on the other side.

The collection plate is integrally processed by aluminum alloy, which reduces the assembly error caused by the splicing structure. Because the collection box is a slender and thin-walled part, it is easy to deform during processing. Multiple heat treatment processes are used in actual processing to ensure To ensure the design accuracy of the parts, all the holes on the cooling plate and heating plate are processed on the precision CNC machine tool, which ensures the position accuracy requirements between the holes.

The advantages of the present invention are: the device of the present invention ensures the effective conduction of cold energy between the collecting plate and the cooling plate, the temperature of the collecting plate and the cooling plate is consistent and uniform, and adopts a double-row parallel structure, which avoids the mutual interaction of released gases. Interference, fast and convenient operation, thereby improving the accuracy of test results.

Description of drawings

Fig. 1 is a schematic diagram of a device of the first prior art.

Fig. 2 is a schematic diagram of a second prior art device.

Fig. 3 is a schematic diagram of the device of the present invention.

Fig. 4 is a partially enlarged schematic view of the device of the present invention.

Figure 5 is a schematic diagram of the pressing plate.

Figure 6 is a schematic diagram of the installation of the pressure plate.

Fig. 7 is a schematic diagram of the structure of the collection box.

Detailed ways

As shown in Figures 3 and 4, a thermal vacuum outgassing test device includes an operating table 8 and a vacuum cover 3 installed on the top of the operating table 8, and a heating plate temperature control system 4, Cooling plate temperature control system 5, inflatable device 6 and vacuum system 7. The temperature control system accurately controls the temperature of heating plate 1 and cooling plate 2 respectively. The vacuum system 7 provides the vacuum degree required for the test. After the test, the inflatable device 6 Backfill dry and clean nitrogen into the vacuum cover 3. There is an operating device in the vacuum cover 3. The operating device includes two identical devices and is distributed on the same operating plate 8 in a double-row structure. The cooling plate 2 is installed on the operating panel 8 through the support column 9, the heating plate 1 is supported on the cooling plate 2 through the heat insulating support mechanism 10, and the heating plate 1 is provided with a six-hole sample tank 11, Each sample tank 11 top is covered with a cover plate 12, a heater is provided on the side wall of the sample tank 11, and a collecting plate 13 is respectively arranged at a position corresponding to each sample tank 11 on the cooling plate 1, and each collecting plate 13 is respectively Positioned by a pressure plate 15 grooves, as shown in Figure 5, the pressure plate 15 is a circular opening with two ears, the inner groove is stepped, and the depth of the groove is less than the thickness of the collecting plate 13, which plays the role of compression. To ensure good contact between the collecting plate 13 and the cooling plate 2, the device also includes a collecting box 16, the collecting box 16 covers the outside of each pressing plate 15, and is fixed on the cooling plate 2, the collecting There are six holes 19 on the top cover of the case 16 corresponding to each sample slot 11 .

The thermal vacuum outgassing test device is characterized in that the sample tank 11 is in the shape of a goblet.

Described thermal vacuum outgassing test device is characterized in that: as shown in Figure 6, described pressing plate 15 is positioned and fixed by set screw 14, and the cylinder portion of described set screw 14 is a part of positioning pressing plate 15, and another Part of it is screwed into the cooling plate 2 for the positioning of the pressing plate 15 and the cooling plate 2. When the pressing plate 15 is unscrewed or pressed, it only needs to rotate the positioning screw 14 half a turn to operate the pressing plate 15, achieving the purpose of quick assembly and shortening the time.

The thermal vacuum outgassing test device is characterized in that: as shown in Figure 7, positioning holes 20 are respectively arranged on both sides of the edge of the top plate of the collection box 16, and the pins 18 pass through the positioning holes 20 to locate with the cooling plate 2, Fastened by the round head screw 17, during operation, as long as the half circle round head screw 17 is rotated, the collection box 16 can be taken off.

The thermal vacuum outgassing test device is characterized in that: the two ears of the pressing plate 15 are semicircular arc-shaped, one opening is upward, and the other opening is downward. When tightening the set screw 14 on one side, the friction force is Tendency of the platen to be close to the set screw 14 on the other side.

Claims (5)

1. A thermal vacuum outgassing test device, comprising an operating table and a vacuum cover installed on the top of the operating table, a heating plate temperature control system, a cooling plate temperature control system, an inflator and a vacuum system are respectively arranged below the operating table , there is an operating device in the vacuum cover, which is characterized in that: the operating device includes two identical devices and is distributed on the same operating table in a double-row parallel structure, and each device includes a heating plate and a cooling plate, the cooling plate is installed on the operating table through a support column, the heating plate is supported on the cooling plate through a thermal insulation support mechanism, and the heating plate is provided with six-hole sample slots, each sample slot above All are covered with a cover plate, a heater is provided on the side wall of the sample tank, and a collecting plate is respectively provided on the cooling plate corresponding to each sample tank, and each collecting plate is positioned by a pressing plate groove, and the pressing plate is The circular opening is double-eared, the internal groove is stepped, and the depth of the groove is smaller than the thickness of the collecting plate. The device also includes a collecting box. The collecting box covers the outside of each pressing plate and is fixed on the cooling plate. On the top cover of the collection box, there are six holes corresponding to the position of each sample slot. 2. The thermal vacuum outgassing test device according to claim 1, wherein the shape of the sample tank is a goblet shape. 3. The thermal vacuum outgassing test device according to claim 1, wherein the pressing plate is positioned and fixed by a set screw, and a part of the cylindrical part of the set screw positions the pressing plate, and the other part is screwed into the cooling plate. 4. The thermal vacuum outgassing test device according to claim 1, positioning holes are respectively arranged on both sides of the edge of the top plate of the collection box, the pins pass through the positioning holes and the cooling plate is positioned, and are fastened by round head screws. 5. The thermal vacuum outgassing test device according to claim 1, wherein the two ears of the pressing plate are in the shape of a semicircle, one of which opens upward and the other opens downward.

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