CN102818815A - Thermal vacuum outgassing testing apparatus - Google Patents
Thermal vacuum outgassing testing apparatus Download PDFInfo
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- CN102818815A CN102818815A CN2012102906079A CN201210290607A CN102818815A CN 102818815 A CN102818815 A CN 102818815A CN 2012102906079 A CN2012102906079 A CN 2012102906079A CN 201210290607 A CN201210290607 A CN 201210290607A CN 102818815 A CN102818815 A CN 102818815A
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Abstract
The invention discloses a thermal vacuum outgassing testing apparatus. The apparatus mainly comprises a vacuum cover (including an outgassing collecting device and a sample groove, etc.), a vacuum pumping system, a high guarantee system, a low temperature guarantee system, a temperature vacuum degree measurement and control system and an auxiliary system. The vacuum pumping system provides vacuum degree required by the testing apparatus; and the high temperature guarantee system and the low temperature guarantee system are respectively a high temperature device and a low temperature circulating device, and provide a sample heating temperature of 125+/-1 DEG C and a temperature of 25+/-1 DEG C required by a collecting plate. The apparatus provided by the invention guarantees effective conduction of cooling capacity between the collecting plate and a cooling plate; and the collecting plate and the cooling plate have same and uniform temperature, and employ a double-row parallel structure to avoid mutual interference of the released gas. The operation is quick and convenient, so as to improve the accuracy of the test result.
Description
Technical field
The present invention relates to a kind of testing equipment, relate in particular to a kind of thermovacuum outgas test unit.
Background technology
Thermovacuum outgas test unit of the prior art is taked the test unit of two row's vertical structures, and as shown in Figure 1, every arranging device is made up of sample cell (well heater), coldplate, collecting box and collecting board etc. respectively.Every arranging device has 12 sample cells respectively, to 12 collecting boaries and collecting box should be arranged.Test unit is installed on the base plate of vacuum system that diameter is the 260mm bell jar, adopts the pass-through mode ring-type pedestal of a special use, and leans on backplanes support.The syndeton of collecting box, collecting board and coldplate is the key of testing equipment.Collecting box is made up of the space that dividing plate and coldplate constitute; Collecting board bottom welding screw and is connected through screw, nut between the coldplate.Another kind of thermovacuum outgas test unit, as shown in Figure 2, every bed device is made up of sample cell (well heater), coldplate, collecting box and collecting board etc. respectively.Every bed device has 12 sample cells respectively, to 12 collecting boaries and collecting box should be arranged.Collecting box is made up of barrier and cover plate, and collecting board is positioned within the barrier, and collecting board is fixed by the attraction that is positioned under the collecting board.The weak point of prior art is: vacuum (-tight) housing is a slim-lined construction, and vacuum-pumping system is positioned at the bottom of vacuum (-tight) housing, and it is less to take out mouth, is unfavorable for the foundation of high vacuum; Sample cell is 650 * 50 * 25 vertical structure, and sample cell need be provided with heating arrangement, has only the 0.75mm spacing between sample cell after the installation and the collecting box, and processing and bearing accuracy are difficult to guarantee.Especially 25 ± 1 ℃ of absolute assurances of needs of temperature of collecting board, the accuracy of its temperature directly determine the success or failure of material thermovacuum outgas test.And the temperature of collecting board comes from the conduction of coldplate cold, is decided by contact area and contact condition with coldplate.In order to guarantee that collecting board contacts with the good of coldplate, a bolt structure is designed at the collecting board back side.Collecting board is that a diameter reaches the steel plate that 33mm, thickness have only 0.65mm; No matter adopt which kind of frame mode between collecting board and the screw; All can influence the flatness of collecting board, and then influence the fit-state of collecting board and coldplate, influence collecting board temperature and homogeneity.Simultaneously, a bolt structure is designed at the collecting board back side, and the screw resigning hole need be offered in corresponding coldplate corresponding position, influences the transmission of heat by contact area of collecting board and coldplate, also influences collecting board temperature and homogeneity.Adopt double-layer structure up and down, the bleeding point of vacuum system is positioned at the centre position of flange at the bottom of the vacuum (-tight) housing, and the gas that the upper strata test material discharges is not caught by lower floor's collecting board unavoidably, and then the accuracy of influence test.Collecting board is positioned within the barrier, and barrier is through on notch clamping and the cold drawing.Space within the barrier is 49.25 * 49.25, highly is 11.95, collecting board diameter 33, and thickness 0.65 takes out comparatively difficulty of this thin slice of collecting board after the off-test.The fixedly employing magnetic attraction mode of collecting board, magnet on coldplate, are provided with stepped hole on the corresponding coldplate through screw retention, cause the contact area of collecting board and coldplate to reduce, and influence heat-transfer effect.Receive the restriction of magnet area, magnet is limited to the active area of collecting board, has only 0.65 thin plate and collecting board is a thickness, and this has just influenced the applying degree of collecting board and coldplate, and then influences the temperature of collecting board, influences accuracy of experimental results.Strict right alignment requirement is arranged between collecting board, collecting box and the sample cell venthole; This kind technology path collecting board location difficulty; Even if the shallow pit of coldplate processing is used for the location, receives process tool to influence pit periphery root and be difficult to back chipping, and then influence the applying degree of collecting board and coldplate.
Summary of the invention
The object of the invention is exactly in order to remedy the defective of prior art, to provide a kind of project organization simple, the uniform thermovacuum outgas of temperature test unit.
The present invention realizes through following technical scheme:
A kind of thermovacuum outgas test unit includes operator's console and the vacuum (-tight) housing that is installed in the operator's console top, and described operator's console below has temperature of heating plate control system, coldplate temperature control system, aerating device and vacuum system respectively; Temperature control system is precisely controlled the temperature of heating plate and coldplate respectively, and vacuum system provides needed vacuum tightness when testing, and in vacuum (-tight) housing, recharges the nitrogen of dried and clean at the off-test rear inflation apparatus; In the described vacuum (-tight) housing operating means is arranged, described operating means includes two identical devices and adopts double parallel construction to be distributed on the same operation panel, and each device has included heating plate and coldplate; Described coldplate is installed on the operation panel through support column, and described heating plate is supported on the coldplate through adiabatic supporting mechanism, and described heating plate is provided with position, six holes sample cell; Cover plate all is stamped in each sample cell top, and the sample cell sidewall is provided with well heater, and the position of corresponding each sample cell is respectively equipped with collecting board on coldplate; Each collecting board is located by a pressing plate groove respectively; Described pressing plate is circular open ears shapes, and internal recess is stepped, and depth of groove is less than collecting board thickness; Play the effect that compresses; Guarantee that collecting board contacts with the good of coldplate, described device also includes collecting box, and described collecting box covers on the outside of every block pressur plate; And be fixed on the coldplate, the position of corresponding each sample cell has six holes on the described collecting box top cover.
Described thermovacuum outgas test unit, it is characterized in that: described sample cell is shaped as the goblet shape.
Described thermovacuum outgas test unit is characterized in that: described pressing plate is by the dog screw location and fix the column part part positioning pressuring plate of described dog screw; Another part screws in coldplate; The location that is used for pressing plate and coldplate unscrews or during clamping platen, only needs rotation half-turn dog screw; Get final product operated clamp, reach the purpose that the time is shortened in quick assembling.
Described thermovacuum outgas test unit; It is characterized in that: described collecting box top board both sides of edges has pilot hole, and pin passes pilot hole and coldplate location, and is fastening by button-headed screw; During operation, as long as rotation half-turn button-headed screw can take off collecting box.
Described thermovacuum outgas test unit is characterized in that: the ears of described pressing plate are the semicircle arcuation, and one of them opening makes progress, and one Open Side Down, and when screwing a side dog screw, friction force has the trend of pressing plate near the opposite side dog screw that makes.
Described collecting board adopts aluminium alloy integral body to process; Reduce the caused rigging error of splicing construction, because of collecting box is elongated thin-wall part, very easily distortion in the process; Adopt repeatedly Technology for Heating Processing in the actual processing; Thereby guaranteed the design accuracy of part, on coldplate and the heating plate porosely all on the numerically-controlled machine of precision, machine, guaranteed the position accuracy demand between each hole.
Advantage of the present invention is: apparatus of the present invention have guaranteed the effective conduction of cold between collecting board and coldplate; Collecting board is consistent with the coldplate temperature; Temperature is even, and adopts double parallel construction, and the gas of having avoided discharging interferes with each other; Swift to operate, convenient, and then improved accuracy of experimental results.
Description of drawings
Fig. 1 is first kind of one type of prior art syringe synoptic diagram.
Fig. 2 is second kind of one type of prior art syringe synoptic diagram.
Fig. 3 is apparatus of the present invention synoptic diagram.
Fig. 4 is apparatus of the present invention part enlarged diagram.
Fig. 5 is the pressing plate synoptic diagram.
Fig. 6 is the pressing plate scheme of installation.
Fig. 7 is the collecting box structural representation.
Embodiment
Like Fig. 3, shown in 4, a kind of thermovacuum outgas test unit includes operator's console 8 and the vacuum (-tight) housing 3 that is installed in operator's console 8 tops; Described operator's console 8 belows have temperature of heating plate control system 4, coldplate temperature control system 5, aerating device 6 and vacuum system 7 respectively, and temperature control system is precisely controlled the temperature of heating plate 1 and coldplate 2, needed vacuum tightness when vacuum system 7 provides test respectively; In vacuum (-tight) housing 3, recharge the nitrogen of dried and clean at off-test rear inflation apparatus 6, in the described vacuum (-tight) housing 3 operating means is arranged, described operating means includes two identical devices and adopts double parallel construction to be distributed on the same operation panel 8; Described coldplate 2 is installed on the operation panel 8 through support column 9, and described heating plate 1 is supported on the coldplate 2 through adiabatic supporting mechanism 10, and described heating plate 1 is provided with position, six holes sample cell 11; Cover plate 12 all is stamped in each sample cell 11 top; Sample cell 11 sidewalls are provided with well heater, and the position of corresponding each sample cell 11 is respectively equipped with collecting board 13 on coldplate 1, and each collecting board 13 is located by a pressing plate 15 grooves respectively; As shown in Figure 5; Described pressing plate 15 is circular open ears shapes, and internal recess is stepped, and depth of groove is less than collecting board 13 thickness; Play the effect that compresses; Guarantee that collecting board 13 contacts with the good of coldplate 2, described device also includes collecting box 16, and described collecting box 16 covers on the outside of every block pressur plate 15; And be fixed on the coldplate 2, the position of corresponding each sample cell 11 has six holes 19 on described collecting box 16 top covers.
Described thermovacuum outgas test unit is characterized in that: described sample cell 11 is shaped as the goblet shape.
Described thermovacuum outgas test unit is characterized in that: as shown in Figure 6, described pressing plate 15 is by dog screw 14 location and fixing; The column part part positioning pressuring plate 15 of described dog screw 14, another part screws in coldplate 2, is used for the location of pressing plate 15 and coldplate 2; Unscrew or during clamping platen 15; Only need rotation half-turn dog screw 14, get final product operated clamp 15, reach the purpose that the time is shortened in quick assembling.
Described thermovacuum outgas test unit; It is characterized in that: as shown in Figure 7; Described collecting box 16 top board both sides of edges have pilot hole 20, and pin 18 passes pilot hole 20 and coldplate 2 location, and is fastening by button-headed screw 17; During operation, as long as rotation half-turn button-headed screw 17 can take off collecting box 16.
Described thermovacuum outgas test unit; It is characterized in that: the ears of described pressing plate 15 are the semicircle arcuation, and one of them opening makes progress, and one Open Side Down; When screwing a side dog screw 14, friction force has the trend of pressing plate near opposite side dog screw 14 that makes.
Claims (5)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210290607.9A CN102818815B (en) | 2012-08-16 | 2012-08-16 | Thermal vacuum outgassing testing apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210290607.9A CN102818815B (en) | 2012-08-16 | 2012-08-16 | Thermal vacuum outgassing testing apparatus |
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| Publication Number | Publication Date |
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| CN102818815A true CN102818815A (en) | 2012-12-12 |
| CN102818815B CN102818815B (en) | 2014-06-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210290607.9A Active CN102818815B (en) | 2012-08-16 | 2012-08-16 | Thermal vacuum outgassing testing apparatus |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103674754A (en) * | 2013-12-03 | 2014-03-26 | 上海卫星装备研究所 | Device for testing volatility of sample |
| RU170886U1 (en) * | 2016-09-01 | 2017-05-12 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Национальный исследовательский Мордовский государственный университет им. Н.П. Огарёва" | DEVICE FOR NON-DESTRUCTIVE TESTING OF TEMPERATURE CONDUCTIVITY OF THERMAL COMPENSATORS OF POWER SEMICONDUCTOR DEVICES |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4561286A (en) * | 1983-07-13 | 1985-12-31 | Laboratoire Suisse De Recherches Horlogeres | Piezoelectric contamination detector |
| JPS62207931A (en) * | 1986-03-07 | 1987-09-12 | Agency Of Ind Science & Technol | Absolute gas emission quantity measuring device and evaluating method for material using same |
| US6125687A (en) * | 1998-08-20 | 2000-10-03 | International Business Machines Corporation | Apparatus for measuring outgassing of volatile materials from an object |
| CN201555797U (en) * | 2009-11-25 | 2010-08-18 | 北京圣涛平试验工程技术研究院有限责任公司 | Thermal vacuum test device |
| CN201666862U (en) * | 2010-03-26 | 2010-12-08 | 中国电子技术标准化研究所 | Thermal vacuum outgassing test device |
| CN202939141U (en) * | 2012-08-16 | 2013-05-15 | 安徽万瑞冷电科技有限公司 | Thermal vacuum outgassing test device |
-
2012
- 2012-08-16 CN CN201210290607.9A patent/CN102818815B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4561286A (en) * | 1983-07-13 | 1985-12-31 | Laboratoire Suisse De Recherches Horlogeres | Piezoelectric contamination detector |
| JPS62207931A (en) * | 1986-03-07 | 1987-09-12 | Agency Of Ind Science & Technol | Absolute gas emission quantity measuring device and evaluating method for material using same |
| US6125687A (en) * | 1998-08-20 | 2000-10-03 | International Business Machines Corporation | Apparatus for measuring outgassing of volatile materials from an object |
| CN201555797U (en) * | 2009-11-25 | 2010-08-18 | 北京圣涛平试验工程技术研究院有限责任公司 | Thermal vacuum test device |
| CN201666862U (en) * | 2010-03-26 | 2010-12-08 | 中国电子技术标准化研究所 | Thermal vacuum outgassing test device |
| CN202939141U (en) * | 2012-08-16 | 2013-05-15 | 安徽万瑞冷电科技有限公司 | Thermal vacuum outgassing test device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103674754A (en) * | 2013-12-03 | 2014-03-26 | 上海卫星装备研究所 | Device for testing volatility of sample |
| CN103674754B (en) * | 2013-12-03 | 2016-03-16 | 上海卫星装备研究所 | A kind of device for testing sample venting |
| RU170886U1 (en) * | 2016-09-01 | 2017-05-12 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Национальный исследовательский Мордовский государственный университет им. Н.П. Огарёва" | DEVICE FOR NON-DESTRUCTIVE TESTING OF TEMPERATURE CONDUCTIVITY OF THERMAL COMPENSATORS OF POWER SEMICONDUCTOR DEVICES |
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| Publication number | Publication date |
|---|---|
| CN102818815B (en) | 2014-06-18 |
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