CN102815830A - System for recycle of cleaning liquid used for surface treatment wet process - Google Patents
System for recycle of cleaning liquid used for surface treatment wet process Download PDFInfo
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- CN102815830A CN102815830A CN2012102742717A CN201210274271A CN102815830A CN 102815830 A CN102815830 A CN 102815830A CN 2012102742717 A CN2012102742717 A CN 2012102742717A CN 201210274271 A CN201210274271 A CN 201210274271A CN 102815830 A CN102815830 A CN 102815830A
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- 239000007788 liquid Substances 0.000 title claims abstract description 139
- 238000000034 method Methods 0.000 title claims abstract description 39
- 238000004381 surface treatment Methods 0.000 title claims abstract description 33
- 238000004140 cleaning Methods 0.000 title claims abstract description 28
- 238000003860 storage Methods 0.000 claims abstract description 113
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 81
- 238000000909 electrodialysis Methods 0.000 claims abstract description 73
- 238000001223 reverse osmosis Methods 0.000 claims abstract description 55
- 239000012530 fluid Substances 0.000 claims abstract description 40
- 230000000149 penetrating effect Effects 0.000 claims abstract description 40
- 229920005989 resin Polymers 0.000 claims abstract description 26
- 239000011347 resin Substances 0.000 claims abstract description 26
- 238000000926 separation method Methods 0.000 claims abstract description 26
- 239000008367 deionised water Substances 0.000 claims abstract description 24
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 24
- 238000001179 sorption measurement Methods 0.000 claims abstract description 21
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229920000049 Carbon (fiber) Polymers 0.000 claims abstract description 12
- 239000004917 carbon fiber Substances 0.000 claims abstract description 12
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims abstract description 12
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 11
- 238000001914 filtration Methods 0.000 claims abstract description 6
- 230000002000 scavenging effect Effects 0.000 claims description 106
- 150000002500 ions Chemical class 0.000 claims description 49
- 238000000502 dialysis Methods 0.000 claims description 35
- 125000004122 cyclic group Chemical group 0.000 claims description 18
- 239000012535 impurity Substances 0.000 claims description 18
- 239000003352 sequestering agent Substances 0.000 claims description 17
- 239000012528 membrane Substances 0.000 claims description 16
- 125000002091 cationic group Chemical group 0.000 claims description 12
- 230000008929 regeneration Effects 0.000 claims description 11
- 238000011069 regeneration method Methods 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 6
- 238000010521 absorption reaction Methods 0.000 claims description 5
- 230000003647 oxidation Effects 0.000 claims description 5
- 238000007254 oxidation reaction Methods 0.000 claims description 5
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 claims description 4
- 230000003466 anti-cipated effect Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 229910001385 heavy metal Inorganic materials 0.000 claims description 3
- 239000007800 oxidant agent Substances 0.000 claims description 3
- FKNQFGJONOIPTF-UHFFFAOYSA-N Sodium cation Chemical compound [Na+] FKNQFGJONOIPTF-UHFFFAOYSA-N 0.000 claims description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 239000003610 charcoal Substances 0.000 claims description 2
- 229920001429 chelating resin Polymers 0.000 claims description 2
- 239000000460 chlorine Substances 0.000 claims description 2
- 229910052801 chlorine Inorganic materials 0.000 claims description 2
- 125000001309 chloro group Chemical group Cl* 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 239000004519 grease Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910001415 sodium ion Inorganic materials 0.000 claims description 2
- 239000012466 permeate Substances 0.000 claims 8
- 230000014759 maintenance of location Effects 0.000 claims 1
- 150000001450 anions Chemical class 0.000 abstract description 3
- 150000001768 cations Chemical class 0.000 abstract 2
- 239000012141 concentrate Substances 0.000 abstract 2
- 239000002738 chelating agent Substances 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 238000007747 plating Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000004064 recycling Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 208000034189 Sclerosis Diseases 0.000 description 1
- 238000005119 centrifugation Methods 0.000 description 1
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- 230000001351 cycling effect Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005194 fractionation Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000010808 liquid waste Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- NHDHVHZZCFYRSB-UHFFFAOYSA-N pyriproxyfen Chemical compound C=1C=CC=NC=1OC(C)COC(C=C1)=CC=C1OC1=CC=CC=C1 NHDHVHZZCFYRSB-UHFFFAOYSA-N 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
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- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The invention discloses a system for recycle of a cleaning liquid used for a surface treatment wet process. The system comprises 1, a cleaning liquid storage tank for collecting a cleaning liquid needing to be treated so that a stored cleaning liquid is obtained, 2, a carbon fiber filter for filtering the stored cleaning liquid, 3, an ozone generator for oxidizing hydroxy organic matters in the stored cleaning liquid and feeding back the treated stored cleaning liquid into the cleaning liquid storage tank, 4, a reverse osmosis separation unit for receiving the stored cleaning liquid and producing a concentrated solution and a penetrating fluid, 5, a double-pole electrodialysis separation unit for receiving the concentrated solution, producing a dialysed concentrate, separated water and dialysed water by electrodialysis, and feeding back the dialysed water into the reverse osmosis separation unit, 6, an adsorption separation unit for receiving the separated water, adsorbing anions, cations and a chelating agent in the separated water and feeding back the treated separated water into a concentrate storage tank, and 7, a backward-stage resin adsorption unit for receiving the penetrating fluid, adsorbing anions and cations in the penetrating fluid, and producing regenerated deionized water reaching to a deionized water level, wherein the regenerated deionized water can be recycled.
Description
Technical field
The centrifugation of filtering and concentrating effect and bieletrolysis liquid unit with dialysis that The present invention be more particularly directed to a kind of adsorption that utilizes resin, reverse osmosis membrane is with the surface treatment wet process scavenging solution cyclic utilization system of the purpose that reaches scavenging solution reclaiming and zero release.
Background technology
The surface treatment wet process has been widely used in the manufacturing of many products; Such as printed substrate (PCB) or semiconductor subassembly; Be electrically connected circuit or pattern on insulated substrate, to form; Form resist simultaneously so that the provide protection of blocks moisture, anti scuffing to be provided, wherein the surface treatment wet process often comprises the processing such as plating, chemical plating, cleaning, oven dry, coating, sclerosis of multi-pass, with the product of form layers stack structure.
Clean generally uses deionized water to be used as scavenging solution, and cleans the surface of target object with immersion way, to remove impurity or chemical; Therefore; Can contain unwanted impurity or chemical in the scavenging solution after the cleaning, and therefore this type impurity or chemical objectionable impurities or the resource of recycle value is arranged normally need carry out proper process; Meeting the emission standard of environmental regulation, or reclaim the resource that to utilize again.
In the prior art; The plating bath, scavenging solution or the waste water that are produced in the different processing procedures can be concentrated earlier and carry out scrubbing or recycling by polluting treatment facility or resource recycling equipment, and generally pollute the suitable costliness of structure and the complicated operation of treatment facility or resource recycling equipment; Maintenance is difficult for; Especially pending liquid comprises too many different impurity, such as particle, heavy metal, negatively charged ion and the positively charged ion of contaminative, or special chemical agent; Like sequestrant, thereby increase the bulk treatment difficulty.
Therefore; Need a kind of surface treatment wet process scavenging solution cyclic utilization system; Can directly be linked to coating bath, rinse bath, the contrary environmental protection treatment mode of oozing unit, bipolar electrodialysis unit and absorbing unit realization recycling and zero release of mat solves above-mentioned prior art problems.
Summary of the invention
Main purpose of the present invention is providing a kind of surface treatment wet process scavenging solution cyclic utilization system; Comprise scavenging solution storage tanks, carbon fiber filter, ozone generation device, HPP, reverse osmosis separating unit, liquid concentrator storage tanks, bipolar electrodialysis unit, adsorption separation unit and back grade resins absorbing unit; In order to reclaim and to utilize again tool contaminative negatively charged ion and cationic pending scavenging solution in the surface treatment wet process; Wherein the scavenging solution storage tanks is collected pending scavenging solution and is stored scavenging solution to form, and carbon fiber filter carries out filtration treatment with the storage scavenging solution in the scavenging solution storage tanks; Ozone generation device produces ozone and stores the hydroxyl organism in the scavenging solution with oxidation, forms and anticipates liquid, is recycled to the scavenging solution storage tanks; HPP forms and transmits high-pressure cleaning liquid with the pressurization of the storage scavenging solution in the scavenging solution storage tanks; The reverse osmosis separating unit receives the high-pressure cleaning liquid that transmit at high pressure group Pu, and separates and formation liquid concentrator and penetrating fluid through reverse osmosis; The liquid concentrator that the liquid concentrator storage tanks receives reverse osmosis unit stores liquid concentrator to form; Bipolar electrodialysis unit receives the storage liquid concentrator of liquid concentrator storage tanks; And through electrodialysis separation generation dialysis liquid concentrator, sour water, alkaline water, electrode solution and dialysis water; The dialysis liquid concentrator is recycled to the liquid concentrator storage tanks, and dialysis water is recycled to the reverse osmosis separating unit; Adsorption separation unit receives sour water, alkaline water, electrode solution, and is recycled to the liquid concentrator storage tanks behind adsorpting anion, positively charged ion and the sequestrant; Back level processing unit receives the penetrating fluid of a reverse osmosis separating unit part, and absorption negatively charged ion and positively charged ion wherein, produces the regeneration deionized water with deionized water grade, for utilizing again.
Therefore, system of the present invention can improve the cycling and reutilization of water resources in the surface treatment wet process, and then reaches the purpose that subtracts useless and zero release.
Description of drawings
Fig. 1 is the structural representation of surface treatment wet process scavenging solution cyclic utilization system of the present invention;
Fig. 2 is the structural representation of bipolar electrodialysis unit in the system of the present invention and electrodialysis storage element;
More than each figure shown in the indicated assembly of symbol be respectively:
10 scavenging solution storage tankss; 20 carbon fiber filters; 22 ozone generation devices; 30 reverse osmosis separating units; 40 liquid concentrator storage tankss; 50 bipolar electrodialysis unit; 60 electrodialysis storage elements; 61 sour water storage tankss; 63 alkaline water storage tankss; 65 electrode solution storage tankss; 67 dialysis water storage tankss; 70 adsorption separation unit; Grade resins absorbing unit after 80s; C electrodialysis cavity; F electrodialysis film; The pending scavenging solution of L1; L2 stores scavenging solution; L3 anticipates liquid; The L4 liquid concentrator; The L5 penetrating fluid; L6 stores liquid concentrator; The L7 liquid concentrator of dialysing; The L8 parting liquid; The L9 water of dialysing; The L10 deionized water of regenerating.
Embodiment
Below cooperate graphic and element numbers is done more detailed explanation to embodiment of the present invention, have the knack of this art and after studying this specification sheets carefully, can implement according to this in order to do making.
Consult Fig. 1, surface treatment wet process scavenging solution cyclic utilization system of the present invention is to comprise scavenging solution storage tanks 10, carbon fiber filter 20, ozone generation device 22, HPP (not shown), reverse osmosis separating unit 30, liquid concentrator storage tanks 40, bipolar electrodialysis unit 50, electrodialysis storage element 60, adsorption separation unit 70 and back grade resins absorbing unit 80.
The instance of above-mentioned surface treatment wet process can comprise in order to make or to handle printed substrate or the required processing procedure of semiconductor subassembly; Operation such as coating, etching, cleaning; Wherein when cleaning, that is utilize suitable scavenging solution, be generally deionized water; Remain in lip-deep impurity, plating bath or chemical substance with cleaning; Thereby produce and to comprise impurity, hydroxyl organism, molecular level particle, sequestrant, negatively charged ion and cationic pending scavenging solution L1, but mat the present invention realizes the resource that recycle wherein can utilize again, such as water resources.Negatively charged ion among the pending scavenging solution L1 can comprise sulfate ion at least, and the positively charged ion of pending scavenging solution L1 can comprise sodium ion at least.
Scavenging solution storage tanks 10 is collected pending scavenging solution L1, forms to store scavenging solution L2.The storage scavenging solution L2 that carbon fiber filter 20 receives in the scavenging solution storage tanks 10; And filter to remove the impurity among the storage scavenging solution L2; Wherein impurity can comprise molecule, heavy metal, prussiate (cyanide), COD (Chemical Oxygen Demand, COD) thing, chlorine-bearing compound.Ozone generation device 22 can produce ozone, stores the hydroxyl organism among the scavenging solution L2 in order to oxidation, and formation is anticipated liquid L3 and is recycled to scavenging solution storage tanks 10.
HPP can extract storage scavenging solution L2 and the pressurization in the scavenging solution storage tanks 10; Form high-pressure cleaning liquid; Be sent to reverse osmosis separating unit 30; And reverse osmosis separating unit 30 has the reverse osmosis membrane (not shown) of nano molecular level; Can be with high-pressure cleaning liquid through the penetrating fluid L5 that reverse osmosis separates and formation does not penetrate the liquid concentrator L4 of reverse osmosis membrane and penetrates reverse osmosis membrane, wherein penetrating fluid L5 does not contain sequestrant, and negatively charged ion and cationic concentration that liquid concentrator L4 is comprised are higher than negatively charged ion and the cationic concentration that penetrating fluid L5 is comprised.In addition, the penetrating fluid L5 of a part is recycled to scavenging solution storage tanks 10, and the penetrating fluid L5 of another part then is sent to back grade resins absorbing unit 80.
Liquid concentrator storage tanks 40 receives and stores the liquid concentrator L4 from reverse osmosis separating unit 30, forms to store liquid concentrator L6.Bipolar electrodialysis unit 50 receives the storage liquid concentrator L6 of liquid concentrator storage tanks 40; And separate and produce dialysis liquid concentrator L7, parting liquid L8 and dialysis water L9 through the electrodialysis of bipolar electrodialysis unit 50; The liquid concentrator L7 that wherein dialyses is recycled to liquid concentrator storage tanks 40; And parting liquid L8 comprises sour water, alkaline water and the electrode solution that is separated from each other, and parting liquid L8 and dialysis water L9 are sent to electrodialysis storage element 60.
The structural representation of bipolar electrodialysis unit 50 and electrodialysis storage element 60 is as shown in Figure 2; Wherein bipolar electrodialysis unit 50 comprises a plurality of electrodialysis film F and a plurality of electrodialysis cavity C; And be to separate between the adjacent electrodialysis cavity C by corresponding electrodialysis film F; Therefore bipolar electrodialysis unit 50 can apply voltage by external power source, so that electrodialysis film F produces the electrodialysis effect to storing liquid concentrator L6.In addition; Electrodialysis storage element 60 comprises sour water storage tanks 61, alkaline water storage tanks 63, electrode solution storage tanks 65, dialysis water storage tanks 67, in order to receive and to store sour water, alkaline water, electrode solution and the dialysis water L9 that bipolar electrodialysis unit 50 is produced respectively.
Be noted that; Fig. 2 is just in order to explain the instance of characteristic of the present invention; Be not in order to limiting the scope of the invention, that is the number of electrodialysis film, electrodialysis cavity and the configuration visual actual demand of arrangement mode and change, realize such as the electrodialysis cavity of yet circular casing capable of using.
Back grade resins absorbing unit 80 receives the penetrating fluid L5 of another part in the reverse osmosis separating unit 30; Wherein back grade resins absorbing unit 80 can comprise resin; In order to negatively charged ion and positively charged ion remaining among the adsorption and permeation liquid L5; Generation has the regeneration deionized water L10 of deionized water grade, and can discharge for other processing procedures and utilize.
In addition, another embodiment of the present invention is not comprise carbon fiber filter and/or ozone generation device, especially for the impurity and/or the organic pending scavenging solution of hydroxyl of tool low levels, and then can simplify integrated operation, and saves operating cost.Perhaps; Also can utilize other strainers and/or oxidizer unit to replace carbon fiber filter, ozone generation device respectively; Use the function that produces filtration, oxidation; Such as replacing carbon fiber filter, and replace ozone generation device with low pressure ultraviolet ray oxidizer unit with charcoal filter or amberlite grease filter.
The characteristics of the invention described above surface treatment wet process scavenging solution cyclic utilization system are; Utilize reverse osmosis unit and bipolar electrodialysis unit, the pending scavenging solution that comprises different impurities is carried out reverse osmosis, filtration, electrodialysis, separation, have the regeneration deionized water of deionized water grade with generation; Can supply other processing procedures to utilize again; Be used for manufacturing process for cleaning such as directly being used as scavenging solution, or supply allotment plating bath usefulness, and then realize falling the purpose that subtracts waste and zero disposal of pollutants.
Another characteristics of cyclic utilization system of the present invention are, can directly be linked to the coating bath or the rinse bath of existing surface treatment wet process, form the recycle water resources function with instant processing liquid waste; Simplify handling procedure, and improve manipulation efficient, can realize that especially the continous way operation is to replace discontinuous batch operation; Further increase the stability of integrated operation; And can realize full-automatic control, and save manpower, reduce artificial careless mistake.
The above only is used to explain preferred embodiment of the present invention, is not that the present invention is done any pro forma restriction, everyly does relevant any modification of the present invention or change following of identical invention spirit, includes within rights protection scope of the present invention.
Claims (10)
1. surface treatment wet process scavenging solution cyclic utilization system is to be used for pending scavenging solution that recycle produced by a surface treatment wet process to produce the regeneration deionized water, it is characterized in that, described surface treatment wet process scavenging solution system comprises:
One scavenging solution storage tanks is used for collecting this pending scavenging solution and stores scavenging solution to form, and this pending scavenging solution comprises impurity, hydroxyl organism, molecular level particle, sequestrant, negatively charged ion and positively charged ion;
One carbon fiber filter is used for receiving and filtering the storage scavenging solution of this scavenging solution storage tanks, to remove the impurity in this storage scavenging solution;
One ozone generation device should store the hydroxyl organism in scavenging solution in order to produce ozone oxidation, form and anticipate liquid, and this was anticipated liquid and was recycled to this scavenging solution storage tanks;
One HPP is used for the storage scavenging solution of this scavenging solution storage tanks is pressurizeed to form high-pressure cleaning liquid and to send out;
One reverse osmosis separating unit; It is reverse osmosis membrane with nano molecular level; In order to receive the high-pressure cleaning liquid that this HPP transmits; And separate and form the penetrating fluid that does not permeate the liquid concentrator of this reverse osmosis membrane and permeate this reverse osmosis membrane through reverse osmosis, this penetrating fluid does not contain sequestrant, and the negatively charged ion that this liquid concentrator comprised and cationic concentration are higher than negatively charged ion and the cationic concentration that this penetrating fluid comprises; Wherein the penetrating fluid of a part is recycled to this scavenging solution storage tanks, and the penetrating fluid of another part then sends out;
One liquid concentrator storage tanks is used to receive and store the liquid concentrator of this reverse osmosis separating unit, stores liquid concentrator to form;
One bipolar electrodialysis unit; Be used to receive the storage liquid concentrator of this liquid concentrator storage tanks; And through electrodialysis separation and generation dialysis liquid concentrator, parting liquid and dialysis water, this dialysis liquid concentrator is recycled to this liquid concentrator storage tanks, and this parting liquid comprises sour water, alkaline water and the electrode solution that is separated from each other;
One electrodialysis storage element is used to receive the dialysis water and the parting liquid of this bipolar electrodialysis unit, and this dialysis water is recycled to this reverse osmosis separating unit, and the parting liquid of a part is recycled to bipolar electrodialysis unit, and the parting liquid of another part then sends out;
One adsorption separation unit is used to receive the parting liquid of this electrodialysis storage element, and this adsorption separation unit comprises resin, in order to be recycled to the liquid concentrator storage tanks behind absorption negatively charged ion, positively charged ion and the sequestrant wherein; And,
One back grade resins absorbing unit; Be used for receiving the penetrating fluid of this this another part of reverse osmosis separating unit; Wherein this back grade resins absorbing unit comprises resin; In order to adsorb negatively charged ion and positively charged ion remaining in this penetrating fluid, produce regeneration deionized water, and discharge for utilizing again with deionized water grade.
2. surface treatment wet process scavenging solution cyclic utilization system, be in order to recycle by the pending scavenging solution that is produced in the surface treatment wet process to produce the regeneration deionized water, it is characterized in that described surface treatment wet process scavenging solution system comprises:
One scavenging solution storage tanks store scavenging solution in order to collect this pending scavenging solution to form, and this pending scavenging solution comprises impurity, hydroxyl organism, molecular level particle, sequestrant, negatively charged ion and positively charged ion;
One carbon fiber filter in order to receiving and to filter the storage scavenging solution in this scavenging solution storage tanks, and is recycled to this scavenging solution storage tanks, to remove the impurity in this storage scavenging solution;
One HPP is in order to pressurize the storage scavenging solution in this scavenging solution storage tanks to form high-pressure cleaning liquid and to send out;
One reverse osmosis separating unit; It is reverse osmosis membrane with nano molecular level; In order to receive the high-pressure cleaning liquid that this HPP transmits; And separate and form the penetrating fluid that does not permeate the liquid concentrator of this reverse osmosis membrane and permeate this reverse osmosis membrane through reverse osmosis, this penetrating fluid does not contain sequestrant, and the negatively charged ion that this liquid concentrator comprised and cationic concentration are higher than negatively charged ion and the cationic concentration that this penetrating fluid comprises; Wherein the penetrating fluid of a part is to be recycled to this scavenging solution storage tanks, and the penetrating fluid of another part then sends out;
One liquid concentrator storage tanks is used to receive and store the liquid concentrator of this reverse osmosis separating unit, stores liquid concentrator to form;
One bipolar electrodialysis unit; Be used to receive the storage liquid concentrator of this liquid concentrator storage tanks; And through electrodialysis separation and generation dialysis liquid concentrator, parting liquid and dialysis water, this dialysis liquid concentrator is recycled to this liquid concentrator storage tanks, and this parting liquid comprises sour water, alkaline water and the electrode solution that is separated from each other;
One electrodialysis storage element; Be used to receive the dialysis water and the parting liquid of this bipolar electrodialysis unit; This dialysis water is recycled to this reverse osmosis separating unit, and the parting liquid of a part is recycled to this bipolar electrodialysis separating unit, and the parting liquid of another part then sends out;
One adsorption separation unit is used to receive the parting liquid of this electrodialysis storage element, and this adsorption separation unit comprises resin, in order to be recycled to the liquid concentrator storage tanks behind absorption negatively charged ion, positively charged ion and the sequestrant wherein; And,
One back grade resins absorbing unit; Be used for receiving the penetrating fluid of this this another part of reverse osmosis separating unit; Wherein this back grade resins absorbing unit comprises resin; In order to adsorb negatively charged ion and positively charged ion remaining in this penetrating fluid, produce this regeneration deionized water, and discharge for utilizing again with deionized water grade.
3. surface treatment wet process scavenging solution cyclic utilization system, be in order to recycle by the pending scavenging solution that is produced in the surface treatment wet process to produce the regeneration deionized water, it is characterized in that described surface treatment wet process scavenging solution system comprises:
One scavenging solution storage tanks is used for collecting this pending scavenging solution and stores scavenging solution to form, and this pending scavenging solution comprises impurity, hydroxyl organism, molecular level particle, sequestrant, negatively charged ion and positively charged ion;
One ozone generation device is used to produce ozone, and receives the storage scavenging solution in this scavenging solution storage tanks, should store the hydroxyl organism in scavenging solution in order to oxidation, form and anticipate liquid, and this is anticipated liquid and is recycled to this scavenging solution storage tanks;
One HPP is used for the storage scavenging solution of this scavenging solution storage tanks is pressurizeed to form high-pressure cleaning liquid and to send out;
One reverse osmosis separating unit; It is reverse osmosis membrane with nano molecular level; In order to receive the high-pressure cleaning liquid that this HPP transmits; And separate and form the penetrating fluid that does not permeate the liquid concentrator of this reverse osmosis membrane and permeate this reverse osmosis membrane through reverse osmosis, this penetrating fluid does not contain sequestrant, and the negatively charged ion that this liquid concentrator comprised and cationic concentration system are higher than negatively charged ion and the cationic concentration that this penetrating fluid comprises; Wherein the penetrating fluid of a part is recycled to this scavenging solution storage tanks, and the penetrating fluid of another part then sends out;
One liquid concentrator storage tanks is used to receive and store the liquid concentrator of this reverse osmosis separating unit, stores liquid concentrator to form;
One bipolar electrodialysis unit; Be used to receive the storage liquid concentrator of this liquid concentrator storage tanks; And through electrodialysis separation and generation dialysis liquid concentrator, parting liquid and dialysis water, this dialysis liquid concentrator is recycled to this liquid concentrator storage tanks, and this parting liquid comprises sour water, alkaline water and the electrode solution that is separated from each other;
One electrodialysis storage element is used to receive the dialysis water and the parting liquid of this bipolar electrodialysis unit, and this dialysis water is recycled to this reverse osmosis separating unit, and the parting liquid of a part is recycled to this bipolar electrodialysis unit, and the parting liquid of another part then sends out;
One adsorption separation unit is used to receive the parting liquid of this electrodialysis storage element, and this adsorption separation unit comprises resin, in order to be recycled to the liquid concentrator storage tanks behind absorption negatively charged ion, positively charged ion and the sequestrant wherein; And,
One back grade resins absorbing unit; Be used for receiving the penetrating fluid of this this another part of reverse osmosis separating unit; Wherein this back grade resins absorbing unit comprises resin; In order to adsorb negatively charged ion and positively charged ion remaining in this penetrating fluid, produce this regeneration deionized water, and discharge for utilizing again with deionized water grade.
4. surface treatment wet process scavenging solution cyclic utilization system, be in order to recycle by the pending scavenging solution that is produced in the surface treatment wet process to produce the regeneration deionized water, it is characterized in that described surface treatment wet process scavenging solution system comprises:
One scavenging solution storage tanks is used for collecting this pending scavenging solution and stores scavenging solution to form, and this pending scavenging solution comprises impurity, hydroxyl organism, molecular level particle, sequestrant, negatively charged ion and positively charged ion;
One HPP is used for the storage scavenging solution of this scavenging solution storage tanks is pressurizeed to form high-pressure cleaning liquid and to send out;
One reverse osmosis separating unit; It is reverse osmosis membrane with nano molecular level; In order to receive the high-pressure cleaning liquid that this HPP transmits; And separate and form the penetrating fluid that does not permeate the liquid concentrator of this reverse osmosis membrane and permeate this reverse osmosis membrane through reverse osmosis, this penetrating fluid does not contain sequestrant, and the negatively charged ion that this liquid concentrator comprised and cationic concentration are higher than negatively charged ion and the cationic concentration that this penetrating fluid comprises; Wherein the penetrating fluid of part system is recycled to this scavenging solution storage tanks, and the penetrating fluid of another part then sends out;
One liquid concentrator storage tanks is used to receive and store the liquid concentrator of this reverse osmosis separating unit, stores liquid concentrator to form;
One bipolar electrodialysis unit; Be used to receive the storage liquid concentrator of this liquid concentrator storage tanks; And through electrodialysis separation and generation dialysis liquid concentrator, parting liquid and dialysis water, this dialysis liquid concentrator is recycled to this liquid concentrator storage tanks, and this parting liquid comprises sour water, alkaline water and the electrode solution that is separated from each other;
One electrodialysis storage element; Be used to receive the dialysis water and the parting liquid of this bipolar electrodialysis separating unit; This dialysis water is recycled to this reverse osmosis separating unit, and the parting liquid of a part is recycled to this bipolar electrodialysis separating unit, and the parting liquid of another part then sends out;
One adsorption separation unit is used to receive the parting liquid of this electrodialysis storage element, and this adsorption separation unit comprises resin, in order to be recycled to the liquid concentrator storage tanks behind absorption negatively charged ion, positively charged ion and the sequestrant wherein; And
One back grade resins absorbing unit; Be used for receiving the penetrating fluid of this this another part of reverse osmosis separating unit; Wherein this back grade resins absorbing unit comprises resin; In order to adsorb negatively charged ion and positively charged ion remaining in this penetrating fluid, produce this regeneration deionized water, and discharge for utilizing again with deionized water grade.
5. surface treatment wet process scavenging solution cyclic utilization system according to claim 1 and 2 is characterized in that, described carbon fiber filter adopts charcoal filter or amberlite grease filter.
6. according to claim 1 or 3 described surface treatment wet process scavenging solution cyclic utilization systems, it is characterized in that described ozone generation device adopts low pressure ultraviolet ray oxidizer unit.
7. according to each described surface treatment wet process scavenging solution cyclic utilization system in the claim 1 to 4; It is characterized in that; Impurity in the described storage scavenging solution comprise molecule, heavy metal, prussiate (cyanide), COD thing (Chemical Oxygen Demand, COD) and chlorine-bearing compound.
8. according to each described surface treatment wet process scavenging solution cyclic utilization system in the claim 1 to 4; It is characterized in that; Negatively charged ion in the described storage scavenging solution comprises sulfate ion at least, and the positively charged ion in this storage scavenging solution comprises sodium ion at least.
9. according to each described surface treatment wet process scavenging solution cyclic utilization system in the claim 1 to 4; It is characterized in that; Described bipolar electrodialysis unit comprises a plurality of electrodialysis films and a plurality of electrodialysis cavity; And be to be separated by corresponding electrodialysis film between the adjacent electrodialysis cavity, this bipolar electrodialysis unit applies voltage by external power source, uses to cooperate these electrodialysis films and to this storages liquid concentrator generation electrodialysis effect.
10. according to each described surface treatment wet process scavenging solution cyclic utilization system in the claim 1 to 4; It is characterized in that; Described this electrodialysis storage element comprises a sour water storage tanks, an alkaline water storage tanks, an electrode solution storage tanks and a dialysis water storage tanks, in order to sour water, alkaline water, electrode solution and the dialysis water that receives and store this bipolar electrodialysis unit respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103787523A (en) * | 2014-01-17 | 2014-05-14 | 四川顺应金属材料科技有限公司 | Process for processing hydrometallurgy wastewater through bipolar membrane |
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| CN101007672A (en) * | 2006-01-27 | 2007-08-01 | 中国科学院生态环境研究中心 | Direct drinking water purifying process and its processing system |
| CN201390684Y (en) * | 2009-04-17 | 2010-01-27 | 湖州森蓝环境工程有限公司 | Etching wastewater reuse and heavy metal recovery system |
| CN101780998A (en) * | 2010-03-20 | 2010-07-21 | 杭州天创净水设备有限公司 | Recycle treatment method for wafer rinse waste liquor |
| WO2012062353A1 (en) * | 2010-11-09 | 2012-05-18 | Voith Patent Gmbh | Method for using waste water arising during the production of lignocellulosic fibrous materials |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101007672A (en) * | 2006-01-27 | 2007-08-01 | 中国科学院生态环境研究中心 | Direct drinking water purifying process and its processing system |
| CN201390684Y (en) * | 2009-04-17 | 2010-01-27 | 湖州森蓝环境工程有限公司 | Etching wastewater reuse and heavy metal recovery system |
| CN101780998A (en) * | 2010-03-20 | 2010-07-21 | 杭州天创净水设备有限公司 | Recycle treatment method for wafer rinse waste liquor |
| WO2012062353A1 (en) * | 2010-11-09 | 2012-05-18 | Voith Patent Gmbh | Method for using waste water arising during the production of lignocellulosic fibrous materials |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103787523A (en) * | 2014-01-17 | 2014-05-14 | 四川顺应金属材料科技有限公司 | Process for processing hydrometallurgy wastewater through bipolar membrane |
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| CN102815830B (en) | 2014-02-12 |
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