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CN109407432A - A kind of production method of display base plate, display base plate and display device - Google Patents

A kind of production method of display base plate, display base plate and display device Download PDF

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Publication number
CN109407432A
CN109407432A CN201811260598.2A CN201811260598A CN109407432A CN 109407432 A CN109407432 A CN 109407432A CN 201811260598 A CN201811260598 A CN 201811260598A CN 109407432 A CN109407432 A CN 109407432A
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China
Prior art keywords
conductive
layer
forming
display
conductive pattern
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CN201811260598.2A
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Inventor
张东东
王志强
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BOE Technology Group Co Ltd
Ordos Yuansheng Optoelectronics Co Ltd
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BOE Technology Group Co Ltd
Ordos Yuansheng Optoelectronics Co Ltd
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Priority to CN201811260598.2A priority Critical patent/CN109407432A/en
Publication of CN109407432A publication Critical patent/CN109407432A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136227Through-hole connection of the pixel electrode to the active element through an insulation layer
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/13338Input devices, e.g. touch panels
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412Digitisers structurally integrated in a display
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01Manufacture or treatment
    • H10D86/021Manufacture or treatment of multiple TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441Interconnections, e.g. scanning lines
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136286Wiring, e.g. gate line, drain line
    • G02F1/136295Materials; Compositions; Manufacture processes

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Human Computer Interaction (AREA)
  • Geometry (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

本发明实施例提供了一种显示基板的制作方法、显示基板及显示装置,显示基板的制作方法包括:在形成所述第一导电图形后,在所述第一导电图形上形成导电柱,所述导电柱在所述显示基板的衬底基板上的正投影与所述第二导电图形在所述衬底基板上的正投影至少部分重叠。这样无需在显示基板上进行孔洞设计,通过导电柱可以将位于异层的第一导电图形和第二导电图形建立连接,避免了由于隔垫物掉入孔洞或者PI液的填充不充分而造成显示基板的颜色云纹、黑点或亮点的显示问题,可提升显示电子产品的画质质感。

Embodiments of the present invention provide a method for manufacturing a display substrate, a display substrate, and a display device. The method for manufacturing a display substrate includes: after forming the first conductive pattern, forming conductive pillars on the first conductive pattern, so that the The orthographic projection of the conductive column on the base substrate of the display substrate at least partially overlaps the orthographic projection of the second conductive pattern on the base substrate. In this way, there is no need to design holes on the display substrate, and the first conductive pattern and the second conductive pattern on different layers can be connected through the conductive pillars, which avoids the display caused by the spacer falling into the hole or insufficient filling of the PI liquid. The display problems of color moiré, black dots or bright spots on the substrate can improve the image quality and texture of display electronic products.

Description

A kind of production method of display base plate, display base plate and display device
Technical field
The present invention relates to field of display technology, in particular to a kind of production method of display base plate, display base plate and display Device.
Background technique
With the continuous improvement of living standards and the continuous development of display technology, image quality of the user to display electronic product Texture, which has, higher to be required, so as to become display field continuous for the experience of image quality is fine and smooth, color is more beautiful display effect The target of pursuit.However, existing display base plate can have the display problems such as color moire (Mura), colour contamination, stain or bright spot, The above display problem is exactly the stumbling-block for influencing display experience and being promoted.
Summary of the invention
In order to solve the above-mentioned technical problem, the embodiment of the invention provides a kind of production methods of display base plate, display base Plate and display device, to solve existing display base plate, there are the display problems of color moire (Mura) and stain or bright spot.
One aspect according to an embodiment of the present invention provides a kind of production method of display base plate, the display base plate The first conductive pattern and the second conductive pattern including the connection of different layer, the production method include: to form first conductive pattern After shape, form conductive column on first conductive pattern, the conductive column on the underlay substrate of the display base plate just It projects least partially overlapped with orthographic projection of second conductive pattern on the underlay substrate.
Optionally, after the step of forming conductive column on first conductive pattern, the method also includes:
Form the insulating layer for wrapping up the side surface of the conductive column.
Optionally, after the step of forming the insulating layer of side surface of the first conductive column of package, or described first After the step of forming the second conductive column on conductive pattern, the production method further include:
Flatness layer is formed on underlay substrate.
Optionally, first conductive pattern includes drain electrode, and second conductive pattern includes pixel electrode, described to lead Electric column includes the first conductive column;
After the step of forming flatness layer on underlay substrate, the production method further include:
It is rectangular at common electrode layer on the flat laye;
Passivation layer is formed above the common electrode layer;
Pixel electrode is formed above the passivation layer, the pixel electrode is connect with first conductive column.
Optionally, first conductive pattern includes touch control electrode, and second conductive pattern includes common electrode layer, institute Stating conductive column includes the second conductive column;
After the step of forming flatness layer on underlay substrate, the production method further include:
Rectangular at common electrode layer on the flat laye, the common electrode layer is connect with second conductive column.
Optionally, first conductive pattern includes drain electrode and touch control electrode, and second conductive pattern includes public Electrode layer and pixel electrode, the conductive column include the first conductive column and the second conductive column;
It is described to form conductive column on first conductive pattern, comprising:
The second conductive column is formed in touch control electrode by a patterning processes, and the first conductive column is formed on drain electrode;
The second conductive column is being formed in touch control electrode by a patterning processes, and the first conductive column is formed on drain electrode The step of after, the production method further include:
Form the insulating layer for wrapping up the side surface of first conductive column;
Flatness layer is formed on underlay substrate;
Rectangular at common electrode layer on the flat laye, the common electrode layer is connect with second conductive column;
Passivation layer is formed above the common electrode layer;
Pixel electrode is formed above the passivation layer, the pixel electrode is connect with first conductive column.
Optionally, the upper surface of the insulating layer is concordant with the upper surface of the passivation layer, the upper surface of the flatness layer It is concordant with the upper surface of second conductive column.
It is optionally, described to form the insulating layer for wrapping up the side surface of the conductive column, comprising:
Form the insulating layer for wrapping up the preset thickness of side surface of the conductive column.
Other side according to an embodiment of the present invention additionally provides a kind of display base plate, using display as described above The production method of substrate makes to obtain.
Another aspect according to an embodiment of the present invention additionally provides a kind of display device, including shows as described above Substrate.
The embodiment of the present invention has the following beneficial effects:
In the embodiment of the present invention, by forming conductive column on the first conductive pattern, and make conductive column in the display Orthographic projection and orthographic projection of second conductive pattern on the underlay substrate on the underlay substrate of substrate is at least partly heavy It is folded, in this way without carrying out hole design on display base plate, by conductive column can will be located at the first conductive pattern of different layer with Second conductive pattern establishes connection, falls into hole or PI (Polyimide, polyimides) liquid so as to avoid due to spacer material The Mura insufficient and that cause display base plate of filling, stain or bright spot display problem, the picture of display electronic product can be promoted Matter texture.
Detailed description of the invention
Fig. 1 is a kind of one of the structural schematic diagram of display base plate of the embodiment of the present invention;
Fig. 2 is the flow chart of the production method of display base plate shown in Fig. 1;
Fig. 3 is a kind of second structural representation of display base plate of the embodiment of the present invention;
Fig. 4 is a kind of third structural representation of display base plate of the embodiment of the present invention;
Fig. 5 is the four of the structural schematic diagram of a kind of display base plate of the embodiment of the present invention;
Fig. 6 is the five of the structural schematic diagram of a kind of display base plate of the embodiment of the present invention;
Fig. 7 is the six of the structural schematic diagram of a kind of display base plate of the embodiment of the present invention;
Fig. 8 is the seven of the structural schematic diagram of a kind of display base plate of the embodiment of the present invention.
Specific embodiment
To keep the technical problem to be solved in the present invention, technical solution and advantage clearer, below in conjunction with attached drawing and tool Body embodiment is described in detail.
Term " first ", " second " in description and claims of this specification etc. are for distinguishing similar right As without being used to describe a particular order or precedence order.It should be understood that the data used in this way in the appropriate case can be with It exchanges, so that the embodiment of the present invention described herein for example can be with suitable other than those of illustrating or describing herein Sequence is implemented.
Currently, routine TFT-LCD (Thin Film Transistor-Liquid Crystal Display, film crystal Pipe liquid crystal display) display base plate is made of first substrate and the second substrate, the filling liquid between first substrate and the second substrate Crystalline substance, and the stabilization supported to keep liquid crystal cell thickness for passing through spacer material.Since spacer material is usually designed at TPM (Touch Pattern metal, touch pattern metal or be touch control electrode) hole nearby or top, this results in spacer material to be easy to It falls into the hole TPM and makes the slight change of box thickness generation around, to will appear horizontal or perpendicular color in corresponding display area The display problem of moire.Furthermore the increase of array substrate surface hole defect depth will lead to the insufficient of PI liquid filling, thus shadow The arrangement and driving of its hole periphery liquid crystal are rung, and generates large batch of " pore " in display area.
Referring to Fig. 1, based on the above analysis, the embodiment of the invention provides a kind of display base plate, display base plate includes first Conductive pattern 1 and the second conductive pattern 2 will be located at the first conductive pattern 1 and the second conductive pattern 2 of different layer by conductive column 3 Connection is established, without carrying out hole design in display base plate, can fundamentally solve Mura, the stain of existing display base plate Or the display problem of bright spot.
Fig. 2 is the flow chart of the production method of display base plate shown in Fig. 1, referring to fig. 2, the production method of the display base plate Include:
Step 201: after forming first conductive pattern 1, conductive column 3, institute are formed on first conductive pattern 1 Orthographic projection of the conductive column 3 on the underlay substrate 4 of the display base plate and second conductive pattern 2 are stated in the underlay substrate Orthographic projection on 4 is least partially overlapped.
Wherein, the material of the conductive column 3 can for nano indium tin metal oxide (Indium Tin Oxides, ITO), it is of course not solely limited to this.
In the embodiment of the present invention, referring to Fig. 3, by forming conductive column on the first conductive pattern 1, and make conductive column 3 In the orthographic projection and positive throwing of second conductive pattern 2 on the underlay substrate 4 on the underlay substrate 4 of the display base plate Shadow is least partially overlapped, in this way without carrying out hole design on display base plate, can will be located at the of different layer by conductive column 3 One conductive pattern 1 and the second conductive pattern 2 establish connection, so as to avoid the filling for falling into hole or PI liquid due to spacer material It is insufficient and cause display base plate there are the display problem of Mura, stain or bright spot, the image quality matter of display electronic product can be promoted Sense.
In one embodiment, first conductive pattern 1 includes drain electrode 11, and second conductive pattern 2 includes pixel Electrode 21, the conductive column 3 include the first conductive column 31, and referring to Fig. 1 and Fig. 4 to Fig. 8, the production method of the display base plate has Body the following steps are included:
Step 301: after forming first conductive pattern 1, being formed on the drain electrode 11 of first conductive pattern 1 First conductive column 31;
In embodiments of the present invention, it is formed after drain electrode 11, can be existed on underlay substrate 4 by a patterning processes The first conductive column 31 is formed on the drain electrode 11, it should be noted that the embodiment of the present invention does not limit described first specifically The manufacturing process of conductive column 31.
With continued reference to Fig. 4, the position of the sets of holes 41 of the position and drain electrode 11 of first conductive column 31 is staggered.
Step 302: forming the insulating layer 5 for wrapping up the side surface of first conductive column 31;
Wherein, the height of the insulating layer 5 can be consistent with the height of first conductive column 31, it is to be understood that It is well contacted to guarantee that the pixel electrode 21 can have with first conductive column 31, the height of the insulating layer 5 can be omited Lower than the height of first conductive column 31.
In embodiments of the present invention, default thickness can be formed around the side surface of the conductive column by a patterning processes The insulating layer of degree, the preset thickness can be 100nm~200nm.It should be noted that the above related thickness of insulating layer And the description of manufacturing process is example and non-limiting.
It should be noted that the lower end of the insulating layer 5 is contacted with the drain electrode 11.
Step 303: flatness layer 6 is formed on underlay substrate 4;
Step 304: common electrode layer 22 is formed above the flatness layer 6;
It in embodiments of the present invention, can be by exposure and etching technics come really after the completion of common electrode layer 22 deposits Short circuit phenomenon will not be occurred by protecting the common electrode layer 22 and pixel electrode 21, the problems such as to prevent causing subsequent drive to fail.
Step 305: passivation layer 7 is formed above the common electrode layer 22;
In embodiments of the present invention, the upper surface of the insulating layer 5 is concordant with the upper surface of the passivation layer 7.
In embodiments of the present invention, the passivation layer 7 and the insulating layer 5 can use same material, certainly and not only It is limited to this.
Step 306: pixel electrode 21, the pixel electrode 21 and first conduction are formed above the passivation layer 7 Column 31 connects.
In embodiments of the present invention, pixel electrode 21 can be formed above the passivation layer 7 by a patterning processes.
In embodiments of the present invention, in the case where display base plate is designed without hole, pass through first conductive column 31 The connection between the drain electrode 11 and pixel electrode 21 of different layer can be achieved, avoid since spacer material falls into hole or PI The display problem for filling Mura that is insufficient and causing display base plate, stain or bright spot of liquid can promote display electronic product Image quality texture.
In another embodiment, first conductive pattern 1 includes touch control electrode 12, and second conductive pattern 2 wraps Common electrode layer 22 is included, the conductive column 3 includes the second conductive column 32, referring to fig. 4 to Fig. 8, the production method of the display base plate Specifically includes the following steps:
Step 401: after forming first conductive pattern 1, the shape in the touch control electrode 12 of first conductive pattern 1 At the second conductive column 32;
In embodiments of the present invention, it is formed after touch control electrode 12 on underlay substrate 4, a patterning processes can be passed through The second conductive column 32 is formed in touch control electrode 12, it should be noted that the embodiment of the present invention does not limit described second specifically The manufacturing process of conductive column 32.
Step 402: flatness layer 6 is formed on underlay substrate 4;
In embodiments of the present invention, the upper surface of the flatness layer 6 is concordant with the upper surface of second conductive column 32, can With understanding, preferably contacted to guarantee that common electrode layer 22 has with second conductive column 32, the upper table of the flatness layer Face can be slightly below the upper surface of second conductive column.
Step 403: common electrode layer 22, the common electrode layer 22 and described second are formed above the flatness layer 6 Conductive column 32 connects.
In embodiments of the present invention, in the case where display base plate is designed without hole, pass through second conductive column 32 Can be achieved positioned at different layer touch control electrode 12 and common electrode layer 22 between connection, avoid due to spacer material fall into hole or The display problem for filling Mura that is insufficient and causing display base plate, stain or bright spot of person's PI liquid can promote display electronics and produce The image quality texture of product.
In another embodiment, first conductive pattern 1 includes drain electrode 11 and touch control electrode 12, and described second is conductive Figure 2 includes common electrode layer 22 and pixel electrode 21, and the conductive column 3 includes the first conductive column 31 and the second conductive column 32, Referring to Fig. 1 and Fig. 4 to Fig. 8, the production method of the display base plate specifically includes the following steps:
Step 501: the second conductive column 32, the shape on drain electrode 11 are formed in touch control electrode 12 by a patterning processes At the first conductive column 31;
Wherein, the implementation principle of step 501 is identical as the implementation principle of step 301 and step 401, and similarity is no longer superfluous It states.
Step 502: forming the insulating layer 5 for wrapping up the side surface of first conductive column 31;
Wherein, the implementation principle of step 502 and the implementation principle of step 302 are identical, and similarity repeats no more.
Step 503: flatness layer 6 is formed on underlay substrate 4;
Wherein, the implementation principle of step 503 is identical as the implementation principle of step 402 and step 303, and similarity is no longer superfluous It states.
Step 504: common electrode layer 22, the common electrode layer 22 and described second are formed above the flatness layer 6 Conductive column 32 connects;
Wherein, the implementation principle of step 504 is identical as the implementation principle of step 403 and step 304, and similarity is no longer superfluous It states.
Step 505: passivation layer 7 is formed above the common electrode layer 22;
Wherein, the implementation principle of step 505 and the implementation principle of step 305 are identical, and similarity repeats no more.
Step 506: pixel electrode 21, the pixel electrode 21 and first conduction are formed above the passivation layer 7 Column 31 connects.
Wherein, the implementation principle of step 506 and the implementation principle of step 306 are identical, and similarity repeats no more.
In embodiments of the present invention, in the case where being not necessarily to hole design on display base plate, pass through first conductive column 31 can realize drain electrode 11 and pixel electrode 21 connection positioned at different layer, and the touching positioned at different layer may be implemented by the second conductive column The connection between electrode 12 and common electrode layer 22 is controlled, it is insufficient to avoid the filling that hole or PI liquid are fallen into due to spacer material And the display problem of the Mura of display base plate, stain or bright spot is caused, the image quality texture of display electronic product can be promoted.
Meanwhile the embodiment of the invention also provides a kind of display base plates, the display base plate is using display base as described above The production method of plate makes to obtain.Further, the embodiment of the invention also provides a kind of display device, including it is as described above Display base plate.
Wherein, display base plate through the embodiment of the present invention and display device can be avoided since spacer material falls into hole The display problem of the filling in hole or PI liquid Mura that is insufficient and causing display base plate, stain or bright spot can promote display electricity The image quality texture of sub- product.
Further, the conductive column can be cylinder, and the side cutaway view of the conductive column is rectangle at this time, and conventional orifices The side cutaway view in hole is mostly trapezoidal, designs with traditional hole, and the display base plate and display device of the embodiment of the present invention have resistance The advantages of uniformity is without mutation.
The above is a preferred embodiment of the present invention, it is noted that for those skilled in the art For, without departing from the principles of the present invention, it can also make several improvements and retouch, these improvements and modifications It should be regarded as protection scope of the present invention.

Claims (10)

1.一种显示基板的制作方法,所述显示基板包括异层连接的第一导电图形和第二导电图形,其特征在于,在形成所述第一导电图形后,在所述第一导电图形上形成导电柱,所述导电柱在所述显示基板的衬底基板上的正投影与所述第二导电图形在所述衬底基板上的正投影至少部分重叠。1. A method for manufacturing a display substrate, the display substrate comprising a first conductive pattern and a second conductive pattern that are connected in different layers, wherein after forming the first conductive pattern, A conductive column is formed thereon, and the orthographic projection of the conductive column on the base substrate of the display substrate at least partially overlaps the orthographic projection of the second conductive pattern on the base substrate. 2.根据权利要求1所述的制作方法,其特征在于,在所述第一导电图形上形成导电柱的步骤之后,所述方法还包括:2. The manufacturing method according to claim 1, wherein after the step of forming conductive pillars on the first conductive pattern, the method further comprises: 形成包裹所述导电柱的侧表面的绝缘层。An insulating layer is formed wrapping the side surfaces of the conductive pillars. 3.根据权利要求1或2所述的制作方法,其特征在于,在形成包裹第一导电柱的侧表面的绝缘层的步骤之后,或者在所述第一导电图形上形成第二导电柱的步骤之后,所述制作方法还包括:3. The manufacturing method according to claim 1 or 2, characterized in that, after the step of forming the insulating layer wrapping the side surface of the first conductive pillar, or after the step of forming the second conductive pillar on the first conductive pattern After the step, the manufacturing method further includes: 在衬底基板上形成平坦层。A flat layer is formed on the base substrate. 4.根据权利要求3所述的制作方法,其特征在于,所述第一导电图形包括漏电极,所述第二导电图形包括像素电极,所述导电柱包括第一导电柱;4. The manufacturing method according to claim 3, wherein the first conductive pattern comprises a drain electrode, the second conductive pattern comprises a pixel electrode, and the conductive column comprises a first conductive column; 在衬底基板上形成平坦层的步骤之后,所述制作方法还包括:After the step of forming the flat layer on the base substrate, the manufacturing method further includes: 在所述平坦层上方形成公共电极层;forming a common electrode layer over the flat layer; 在所述公共电极层上方形成钝化层;forming a passivation layer over the common electrode layer; 在所述钝化层上方形成像素电极,所述像素电极与所述第一导电柱连接。A pixel electrode is formed over the passivation layer, and the pixel electrode is connected to the first conductive column. 5.根据权利要求3所述的制作方法,其特征在于,所述第一导电图形包括触控电极,所述第二导电图形包括公共电极层,所述导电柱包括第二导电柱;5 . The manufacturing method according to claim 3 , wherein the first conductive pattern comprises touch electrodes, the second conductive pattern comprises a common electrode layer, and the conductive pillars comprise second conductive pillars; 6 . 在衬底基板上形成平坦层的步骤之后,所述制作方法还包括:After the step of forming the flat layer on the base substrate, the manufacturing method further includes: 在所述平坦层上方形成公共电极层,所述公共电极层与所述第二导电柱连接。A common electrode layer is formed over the flat layer, and the common electrode layer is connected with the second conductive pillars. 6.根据权利要求1所述的制作方法,其特征在于,所述第一导电图形包括漏电极和触控电极,所述第二导电图形包括公共电极层和像素电极,所述导电柱包括第一导电柱和第二导电柱;6 . The manufacturing method according to claim 1 , wherein the first conductive pattern comprises a drain electrode and a touch electrode, the second conductive pattern comprises a common electrode layer and a pixel electrode, and the conductive column comprises a first a conductive column and a second conductive column; 所述在所述第一导电图形上形成导电柱,包括:The forming conductive pillars on the first conductive pattern includes: 通过一次构图工艺在触控电极上形成第二导电柱,在漏电极上形成第一导电柱;A second conductive column is formed on the touch electrode by one patterning process, and a first conductive column is formed on the drain electrode; 在通过一次构图工艺在触控电极上形成第二导电柱,在漏电极上形成第一导电柱的步骤之后,所述制作方法还包括:After forming the second conductive column on the touch electrode and forming the first conductive column on the drain electrode through a patterning process, the manufacturing method further includes: 形成包裹所述第一导电柱的侧表面的绝缘层;forming an insulating layer wrapping the side surfaces of the first conductive pillars; 在衬底基板上形成平坦层;forming a flat layer on the base substrate; 在所述平坦层上方形成公共电极层,所述公共电极层与所述第二导电柱连接;forming a common electrode layer above the flat layer, the common electrode layer is connected with the second conductive pillar; 在所述公共电极层上方形成钝化层;forming a passivation layer over the common electrode layer; 在所述钝化层上方形成像素电极,所述像素电极与所述第一导电柱连接。A pixel electrode is formed over the passivation layer, and the pixel electrode is connected to the first conductive column. 7.根据权利要求4或6所述的制作方法,其特征在于,所述绝缘层的上表面与所述钝化层的上表面平齐,所述平坦层的上表面与所述第二导电柱的上表面平齐。7 . The manufacturing method according to claim 4 , wherein the upper surface of the insulating layer is flush with the upper surface of the passivation layer, and the upper surface of the flat layer is flush with the second conductive layer. 8 . The upper surface of the column is flush. 8.根据权利要求2所述的制作方法,其特征在于,所述形成包裹所述导电柱的侧表面的绝缘层,包括:8. The manufacturing method according to claim 2, wherein the forming an insulating layer wrapping the side surfaces of the conductive pillars comprises: 形成包裹所述导电柱的侧表面的预设厚度的绝缘层。An insulating layer of a preset thickness is formed wrapping the side surfaces of the conductive pillars. 9.一种显示基板,其特征在于,采用如权利要求1至8中任一项所述的显示基板的制作方法制作得到。9 . A display substrate, characterized in that, it is produced by the method for producing a display substrate according to any one of claims 1 to 8 . 10.一种显示装置,其特征在于,包括如权利要求9所述的显示基板。10. A display device, comprising the display substrate according to claim 9.
CN201811260598.2A 2018-10-26 2018-10-26 A kind of production method of display base plate, display base plate and display device Pending CN109407432A (en)

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