CN108173111A - Wavefront division single channel exports Slab Geometry Laser Resonator - Google Patents
Wavefront division single channel exports Slab Geometry Laser Resonator Download PDFInfo
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- H—ELECTRICITY
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
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Abstract
本发明公开了波前分割单路输出板条激光器谐振腔，属于激光和光学设计技术领域。该板条激光器谐振腔包括反射镜、激光晶体、全反镜、第一激光二极管泵浦模块和第二激光二极管泵浦模块。激光晶体设置在反射镜和全反镜之间，反射镜的外侧设有第一激光二极管泵浦模块，全反镜的外侧设有第二激光二极管泵浦模块。反射镜上镀有第二高反膜和第一高反膜，第二高反膜和第一高反膜相交于第一分界线，第二高反膜与第一分界线角度为本发明的板条激光器谐振腔反射镜利用垂直平面和斜面结合的方式，利用波前分割法，实现了点光源输出。
The invention discloses a wavefront division single-channel output slab laser resonator, which belongs to the technical field of laser and optical design. The slab laser resonant cavity includes a reflection mirror, a laser crystal, a total reflection mirror, a first laser diode pumping module and a second laser diode pumping module. The laser crystal is arranged between the reflection mirror and the total reflection mirror, the first laser diode pumping module is arranged on the outside of the reflection mirror, and the second laser diode pumping module is arranged on the outside of the total reflection mirror. The mirror is coated with a second high-reflection film and a first high-reflection film, the second high-reflection film and the first high-reflection film intersect at the first dividing line, and the angle between the second high-reflection film and the first dividing line is The resonant cavity reflector of the slab laser of the present invention realizes the point light source output by combining the vertical plane and the inclined plane and using the wave front division method.
Description
技术领域technical field
本发明属于激光和光学设计技术领域，具体涉及一种板条激光器谐振腔。The invention belongs to the technical field of laser and optical design, and in particular relates to a slab laser resonant cavity.
背景技术Background technique
板条激光器解决了固体激光器自身的热畸变问题，但其性能并没有预期的好，因此，自20世纪70年代以来，有很多的文章及专利报导，对板条激光器的泵浦、冷却方式、聚光腔以及光学谐振腔等提出了一些具体解决方法和改进措施。The slab laser solves the thermal distortion problem of the solid-state laser itself, but its performance is not as good as expected. Therefore, since the 1970s, there have been many articles and patent reports on the pumping, cooling methods, and methods of the slab laser. Concentrating cavity and optical resonant cavity etc. put forward some specific solutions and improvement measures.
常规的板条激光器平行平面谐振腔输出镜为全反镜，或者在其腔内加一个有一定倾斜角度的反射镜，采用线光源输出方式。本发明的板条激光器谐振腔反射镜利用垂直平面和斜面结合的方式，利用波前分割法，实现了点光源输出。The output mirror of the conventional slab laser parallel plane resonant cavity is a total reflection mirror, or a reflection mirror with a certain inclination angle is added in the cavity, and the output mode of the line light source is adopted. The resonant cavity reflector of the slab laser of the present invention realizes the point light source output by combining the vertical plane and the inclined plane and using the wave front division method.
发明内容Contents of the invention
本发明的板条激光器谐振腔目的利用全反镜对波前进行分割，实现可调谐的输出形式，使板条激光器拥有良好的转换效率和输出模式。The object of the resonant cavity of the slab laser of the present invention is to divide the wavefront by using the total reflection mirror to realize a tunable output form, so that the slab laser has good conversion efficiency and output mode.
本发明采用的技术方案为波前分割单路输出板条激光器谐振腔，该板条激光器谐振腔包括反射镜1、激光晶体2、全反镜3、第一激光二极管泵浦模块8和第二激光二极管泵浦模块9。The technical solution adopted in the present invention is a wavefront splitting single output slab laser resonator, the slab laser resonator includes a reflector 1, a laser crystal 2, a total reflection mirror 3, a first laser diode pumping module 8 and a second Laser diode pump module 9 .
激光晶体2设置在反射镜1和全反镜3之间，反射镜1的外侧设有第一激光二极管泵浦模块8，全反镜3的外侧设有第二激光二极管泵浦模块9。The laser crystal 2 is arranged between the reflection mirror 1 and the total reflection mirror 3 , a first laser diode pumping module 8 is provided outside the reflection mirror 1 , and a second laser diode pumping module 9 is provided outside the total reflection mirror 3 .
反射镜1上镀有第二高反膜5和第一高反膜4，第二高反膜5和第一高反膜4相交于第一分界线6，第二高反膜5与第一分界线6角度为 第一分界线6和第二分界线7的垂直距离不影响激光的输出。第一激光二极管泵浦模块8和第二激光二极管泵浦模块9分别从两端位置端面泵浦激光晶体2。The mirror 1 is coated with a second high reflection film 5 and a first high reflection film 4, the second high reflection film 5 and the first high reflection film 4 intersect at the first dividing line 6, the second high reflection film 5 and the first The dividing line 6 angle is The vertical distance between the first boundary line 6 and the second boundary line 7 does not affect the laser output. The first laser diode pumping module 8 and the second laser diode pumping module 9 end-pump the laser crystal 2 from both ends respectively.
第一分界线6设置在谐振腔中心线以上，将反射镜1面向腔内一侧水平分为两部分，分别为第一高反膜4和第二高反膜5，第二分界线7为激光晶体2靠近反射镜1一侧的上边线。The first dividing line 6 is set above the center line of the resonant cavity, and the mirror 1 is horizontally divided into two parts on the side facing the cavity, which are respectively the first high-reflective film 4 and the second high-reflective film 5, and the second dividing line 7 is The laser crystal 2 is close to the upper edge of the mirror 1 side.
反射镜1的第二高反膜5和第一高反膜4镀有相同反射率，其中经过第一高反膜4、激光晶体2以及全反镜3的光束在腔内产生谐振；而经过第二高反膜5的光束被反射，作为输出。The second high-reflection film 5 and the first high-reflection film 4 of the reflector 1 are coated with the same reflectivity, wherein the light beams passing through the first high-reflection film 4, laser crystal 2 and total reflection mirror 3 resonate in the cavity; The light beam of the second high reflection film 5 is reflected as an output.
第一激光二极管泵浦模块8从激光晶体2端面泵浦，经过反射镜1的第一高反膜4，而不经过第二高反膜5。The first laser diode pumping module 8 is pumped from the end face of the laser crystal 2 , passing through the first high-reflection film 4 of the mirror 1 without passing through the second high-reflection film 5 .
第二激光二极管泵浦模块9从激光晶体2的端面泵浦，经过全反镜3。The second laser diode pumping module 9 is pumped from the end face of the laser crystal 2 and passes through the total reflection mirror 3 .
反射镜1的第一高反膜4及第二高反膜5的第一分界线6在中心线以上，保证有足够的光通过第一高反膜4发生谐振，同时有部分光经过第二高反膜5输出。The first boundary line 6 of the first high-reflection film 4 and the second high-reflection film 5 of the reflector 1 is above the center line, ensuring that enough light passes through the first high-reflection film 4 to resonate, and at the same time, part of the light passes through the second high-reflection film. High reflection film 5 output.
激光晶体2与全反射镜1的距离在满足热稳区条件下，尽量靠近反射镜1，使光斑尺寸较大。The distance between the laser crystal 2 and the total reflection mirror 1 is as close as possible to the reflection mirror 1 under the condition of satisfying the thermal stability zone, so that the spot size is larger.
激光晶体2与全反射镜1的距离不影响经过第二高反膜5平面的光束输出。The distance between the laser crystal 2 and the total reflection mirror 1 does not affect the beam output passing through the plane of the second high reflection film 5 .
附图说明Description of drawings
图1为板条激光器谐振腔示意图。Figure 1 is a schematic diagram of a slab laser resonator.
图2为谐振腔内光斑半径随位置的变化示意图。Fig. 2 is a schematic diagram of the variation of the spot radius with the position in the resonant cavity.
具体实施方式Detailed ways
下面结合附图内容，详细介绍发明内容：Below in conjunction with accompanying drawing content, introduce content of invention in detail:
图1为板条激光器谐振腔示意图，包括：反射镜1，激光晶体2，全反镜3，第一激光二极管泵浦模块8和第二激光二极管泵浦模块9。整个谐振腔形状为平平腔，腔外含有第一激光二极管泵浦模块8和第二激光二极管泵浦模块9。利用第一激光二极管泵浦模块8、第二激光二极管泵浦模块9及激光晶体2在腔内形成1064nm激光，激光分为两部分，一部分光经第一高反膜4产生谐振，另一部分光通过反射镜1的第二高反膜5反射输出。FIG. 1 is a schematic diagram of a slab laser resonator, including: a reflector 1 , a laser crystal 2 , a total reflection mirror 3 , a first laser diode pumping module 8 and a second laser diode pumping module 9 . The shape of the entire resonant cavity is a flat cavity, and a first laser diode pumping module 8 and a second laser diode pumping module 9 are contained outside the cavity. The first laser diode pumping module 8, the second laser diode pumping module 9 and the laser crystal 2 are used to form 1064nm laser in the cavity. The output is reflected by the second high reflection film 5 of the mirror 1 .
反射镜1为K9玻璃平面镜切割而来，光学镜片基片尺寸长为15mm，宽为13mm，厚度为3mm。以边缘厚度为1mm从6.8mm处切割，第二高反膜5的第一分界线6与第二分界线7距离为0.2mm，大约为72.12°。采用两面镀膜方式，面向腔内一侧的第一高反膜4和5镀有0°入射的1064nm波长反射膜，反射率大于99.8％，面向腔外一侧镀有0°入射808nm高透膜，透过率大于95％。The reflector 1 is cut from a K9 glass plane mirror, and the size of the optical lens substrate is 15 mm in length, 13 mm in width and 3 mm in thickness. Cut from 6.8mm with an edge thickness of 1mm, the distance between the first dividing line 6 and the second dividing line 7 of the second high reflection film 5 is 0.2mm, About 72.12°. The first high-reflection film 4 and 5 on the side facing the cavity is coated with a 0° incident 1064nm wavelength reflective film, and the reflectivity is greater than 99.8%, and the side facing the outside of the cavity is coated with a 0° incident 808nm high-transmittance film , The transmittance is greater than 95%.
激光晶体2是Nd：YVO4，长为12mm，宽为10mm，厚度为1mm，两个通光端面镀有1064nm增透膜，对激光晶体2采用循环液体(去离子水)冷却，抑制Nd：YVO4的热透镜效应，提高输出功率稳定性和光束质量，冷却水温度设置在20℃。The laser crystal 2 is Nd:YVO 4 , with a length of 12mm, a width of 10mm, and a thickness of 1mm. The two transparent end faces are coated with a 1064nm anti-reflection film. The laser crystal 2 is cooled by circulating liquid (deionized water) to suppress Nd: The thermal lens effect of YVO 4 improves output power stability and beam quality, and the cooling water temperature is set at 20°C.
全反镜3为K9玻璃平面镜，光学镜片基片尺寸长为15mm，宽为13mm，厚度3mm。采用两面镀膜方式，面向腔内一侧镀有0°入射的1064nm反射膜，反射率大于99.8％，面向腔外一侧镀有0°入射808nm高透膜，透过率大于95％。The total reflection mirror 3 is a K9 glass plane mirror, and the size of the optical lens substrate is 15mm long, 13mm wide, and 3mm thick. The double-sided coating method is adopted, the side facing the cavity is coated with a 0° incident 1064nm reflective film, the reflectivity is greater than 99.8%, and the side facing the outside of the cavity is coated with a 0° incident 808nm high-transmittance film, the transmittance is greater than 95%.
利用软件模拟谐振腔内光斑半径随位置的变化，令腔长(约等于热焦距)为405mm，满足热稳区条件下，靠近反射镜1处光斑比较大。取激光晶体2距反射镜1为110mm，距全反镜3为295mm，利用MATLAB模拟光斑大小如图2。The software is used to simulate the change of the spot radius in the resonant cavity with the position, so that the cavity length (approximately equal to the thermal focal length) is 405mm, and the spot near the mirror is relatively large under the condition of thermal stability. Take laser crystal 2 to be 110mm away from reflector 1, and 295mm away from total mirror 3, and use MATLAB to simulate the spot size as shown in Figure 2.
采用功率为150W的808nm作为第一激光二极管泵浦模块8和第二激光二极管泵浦模块9，第一激光二极管泵浦模块8从反射镜1第一高反膜4的外侧泵浦激光晶体2，第二激光二极管泵浦模块9从全反镜3的外侧泵浦激光晶体2。808nm with a power of 150W is used as the first laser diode pumping module 8 and the second laser diode pumping module 9, and the first laser diode pumping module 8 pumps the laser crystal 2 from the outside of the mirror 1 and the first high reflection film 4 , the second laser diode pumping module 9 pumps the laser crystal 2 from the outside of the total reflection mirror 3 .
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113471813A (en) * | 2021-07-30 | 2021-10-01 | 中国科学院长春光学精密机械与物理研究所 | Edge-emitting laser |
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Application publication date: 20180615 |