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CN111193169A - Ultraviolet laser based on twin crystal structure - Google Patents

Ultraviolet laser based on twin crystal structure Download PDF

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Publication number
CN111193169A
CN111193169A CN202010129107.1A CN202010129107A CN111193169A CN 111193169 A CN111193169 A CN 111193169A CN 202010129107 A CN202010129107 A CN 202010129107A CN 111193169 A CN111193169 A CN 111193169A
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China
Prior art keywords
light
fundamental frequency
frequency light
crystal
pulse
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Chinese (zh)
Inventor
周宇超
赵盛宇
林国栋
刘奇福
毛俊波
梁达科
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Shenzhen Hymson Laser Intelligent Equipment Co Ltd
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Shenzhen Hymson Laser Intelligent Equipment Co Ltd
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Priority to CN202010129107.1A priority Critical patent/CN111193169A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/08072Thermal lensing or thermally induced birefringence; Compensation thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/081Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/0813Configuration of resonator
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/108Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
    • H01S3/109Frequency multiplication, e.g. harmonic generation

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

The invention discloses an ultraviolet laser based on a double-crystal structure, which comprises: the first collimating lens group and the second collimating lens group are used for carrying out collimating treatment and/or focusing treatment on the first pump beam and the second pump beam; the first laser crystal and the second laser crystal are used for receiving the first pump beam and the second pump beam and outputting first fundamental frequency light and second fundamental frequency light; the acousto-optic Q-switch is used for receiving the first fundamental frequency light and the second fundamental frequency light and outputting first pulse fundamental frequency light and second pulse fundamental frequency light; the frequency doubling crystal is used for receiving the first pulse base frequency light and the second pulse base frequency light and outputting frequency doubling light; and the sum frequency crystal is used for receiving the first pulse base frequency light, the second pulse base frequency light and the frequency doubling light and outputting the sum frequency light. The ultraviolet laser disclosed by the invention is provided with the relatively long optical cavity, and the beam waist positions of the first pulse fundamental frequency light and the second pulse fundamental frequency light are adjusted to be positioned near the input end face of the frequency doubling crystal, so that the frequency doubling efficiency is further improved.

Description

Ultraviolet laser based on bicrystal structure
Technical Field
The invention relates to the field of laser, in particular to an ultraviolet laser based on a double-crystal structure.
Background
The laser as a novel light source has the characteristics of good directivity, high brightness, good monochromaticity, high energy density and the like. The laser industry based on laser is developed rapidly in the world, and is now widely applied to the aspects of industrial production, communication, information processing, medical health, military, cultural education, scientific research and the like. The development and application of all-solid-state uv lasers is currently one of the most interesting highlights.
Along with the increase of the demand of the industry on the high-power all-solid-state ultraviolet laser, the output power upper limit of the high-power all-solid-state ultraviolet laser is always improved due to the continuous appearance of novel nonlinear materials and the continuous improvement of material performance, but some problems still exist in the development of the high-power all-solid-state ultraviolet laser and need to be solved. The main problem faced by the current high-power ultraviolet laser technology industry and commercialization is the thermal effect management problem under high-power pumping. Due to the change of the refractive index of each space position of the crystal caused by the thermal lens effect, the oscillating light beam which propagates back and forth along the axis of the resonant cavity deviates from the original propagation direction due to refraction when passing through the crystal. The crystal is equivalent to a lens, so that additional phase delay is generated in the oscillating light, the self-reproduction of an oscillating light mode is influenced, the instability of the output power and the coupling among multiple modes are finally caused, the improvement of the laser power is limited, and the performance of the solid laser is seriously influenced.
Increasing the pump light power inevitably leads to severe thermal lensing, while high power laser designs achieve as large a mode volume as possible, enabling efficient extraction of energy from the active species. A large mode volume means a larger intracavity transmitted beam radius and a longer optical cavity length. And the efficiency of toggle frequency doubling is improved when the radius of the light beam is too large. Therefore, a contradiction and restriction relationship is formed between high-power pumping with large mode volume and high-efficiency frequency doubling, which is a great resistance of the ultraviolet laser to the development of higher power.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art. Therefore, the ultraviolet laser based on the double-crystal structure can be provided with a relatively long optical cavity, and the beam waist positions of the first pulse fundamental frequency light and the second pulse fundamental frequency light can be positioned near the input end face of the frequency doubling crystal through adjustment, so that the frequency doubling efficiency is further improved.
In a first aspect, an embodiment of the present invention provides an ultraviolet laser based on a bimorph structure, including: the device comprises a first pump source and a second pump source, wherein the first pump source and the second pump source are symmetrically arranged, the first pump source is used for generating a first pump beam, and the second pump source is used for generating a second pump beam;
the first collimating lens group is arranged between the first pumping source and the second pumping source and is used for collimating and/or focusing the first pumping beam;
the second collimating lens group is arranged between the first collimating lens group and the second pumping source and is used for collimating and/or focusing the second pumping beam;
the first laser crystal is used for receiving the first pump beam and outputting first fundamental frequency light;
the second laser crystal is used for receiving the second pump beam and outputting second fundamental frequency light;
the acousto-optic Q-switch is used for receiving the first fundamental frequency light and the second fundamental frequency light and outputting first pulse fundamental frequency light and second pulse fundamental frequency light;
the frequency doubling crystal is used for receiving the first pulse base frequency light and the second pulse base frequency light and outputting frequency doubling light;
and the sum frequency crystal is used for receiving the first pulse base frequency light, the second pulse base frequency light and the frequency doubling light and outputting the sum frequency light.
The ultraviolet laser based on the double-crystal structure provided by the embodiment of the invention at least has the following beneficial effects: the optical cavity with relative long length is arranged, and the beam waist positions of the first pulse fundamental frequency light and the second pulse fundamental frequency light can be positioned near the input end face of the frequency doubling crystal through adjustment, so that the frequency doubling efficiency is further improved.
According to other embodiments of the present invention, the ultraviolet laser based on the twin crystal structure, the first collimating lens group includes a first plano-convex lens, a second plano-convex lens;
the convex surface of the first plano-convex lens and the convex surface of the second plano-convex lens are symmetrically arranged;
the second collimating lens group comprises a third plano-convex lens and a fourth plano-convex lens;
the convex surface of the third plano-convex lens and the convex surface of the fourth plano-convex lens are symmetrically arranged.
According to the ultraviolet laser based on the double-crystal structure, the first laser crystal and the second laser crystal are arranged in an axial symmetry mode and are spaced by 5-20 mm.
According to other embodiments of the present invention, the ultraviolet laser based on the twin crystal structure further includes a semiconductor refrigerator for controlling the operating temperature of the frequency doubling crystal and the sum frequency crystal.
According to the ultraviolet laser based on the twin-crystal structure, according to other embodiments of the invention, the sum frequency crystal output end is provided with a brewster end face;
the Brewster end face is used for refracting and separating the first pulse fundamental frequency light, the second pulse fundamental frequency light, the frequency doubling light and the frequency summation light.
Ultraviolet lasers based on a bimorph structure according to further embodiments of the present invention further comprise: the first reflector, the second reflector and the third reflector;
the first reflector and the second reflector are used for reflecting the first fundamental frequency light and the second fundamental frequency light, so that the first fundamental frequency light and the second fundamental frequency light are transmitted to the acousto-optic Q-switch and output the first pulse fundamental frequency light and the second pulse fundamental frequency light;
the third reflector is used for reflecting the first pulse fundamental frequency light and the second pulse fundamental frequency light.
Ultraviolet lasers based on a bimorph structure according to further embodiments of the present invention further comprise: a fourth reflector, a fifth reflector and a sixth reflector;
the fourth reflector and the fifth reflector are used for reflecting the first pulse fundamental frequency light and the second pulse fundamental frequency light to the frequency doubling crystal;
the sixth reflector is used for enabling the first pulse fundamental frequency light and the second pulse fundamental frequency light to transmit the frequency doubling crystal for reflection and to transmit the frequency doubling crystal again for generating the frequency doubling light.
According to the ultraviolet laser based on the twin crystal structure, the sum frequency crystal receives the frequency doubling light, the first pulse base frequency light and the second pulse base frequency light and carries out II-type phase matching so as to output the sum frequency light.
According to the ultraviolet laser based on the twin-crystal structure, the surfaces of the first reflecting mirror, the second reflecting mirror, the third reflecting mirror, the fourth reflecting mirror, the fifth reflecting mirror and the sixth reflecting mirror are provided with high-reflection films and high-transmission films;
the high-reflection film is used for reflecting light with the wavelength of 1064nm and/or 532 nm;
the high-transmittance film is used for transmitting light of 808nm and/or 880 nm.
According to further embodiments of the present invention, the ultraviolet laser based on a bimorph structure, the first laser crystal and the second laser crystal include: nd is YVO4, Nd is YAG, Nd is YLF or Nd is GdVO 4;
the doping concentration of the first laser crystal and the second laser crystal is 0.1% -0.3%.
Drawings
FIG. 1 is a schematic structural diagram of an ultraviolet laser based on a bimorph structure in an embodiment of the present invention;
FIG. 2 is a schematic cavity of an ultraviolet laser based on a bimorph structure according to an embodiment of the present invention;
fig. 3 is a schematic diagram of an optical path structure of an ultraviolet laser based on a bimorph structure in the embodiment of the present invention.
Description of reference numerals:
reference numerals: 1. a first pump source; 2. a second pump source; 3. a first plano-convex lens; 4. a second plano-convex lens; 5. a third plano-convex lens; 6. a fourth plano-convex lens; 7. a first reflector; 8. a second reflector; 9. a fourth mirror; 10. a fifth mirror; 11. a sixth mirror; 12. a third reflector; 13. a first laser crystal; 14. a second laser crystal; 15. a sum frequency crystal; 16. frequency doubling crystals; 17. an acousto-optic Q-switch; 18. a first cavity mirror; 19. a second cavity mirror; 21. frequency doubling light; 22. sum frequency light; 30. a first collimating lens group; 40. a second collimating lens group; 20. a first high-reflection lens; 50. and a beam limiting device.
Detailed Description
The concept and technical effects of the present invention will be clearly and completely described below in conjunction with the embodiments to fully understand the objects, features and effects of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and those skilled in the art can obtain other embodiments without inventive effort based on the embodiments of the present invention, and all embodiments are within the protection scope of the present invention.
In the description of the present invention, if an orientation description is referred to, for example, the orientations or positional relationships indicated by "upper", "lower", "front", "rear", "left", "right", etc. are based on the orientations or positional relationships shown in the drawings, only for convenience of describing the present invention and simplifying the description, but not for indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. If a feature is referred to as being "disposed," "secured," "connected," or "mounted" to another feature, it can be directly disposed, secured, or connected to the other feature or indirectly disposed, secured, connected, or mounted to the other feature.
In the description of the embodiments of the present invention, if "a number" is referred to, it means one or more, if "a plurality" is referred to, it means two or more, if "greater than", "less than" or "more than" is referred to, it is understood that the number is not included, and if "greater than", "lower" or "inner" is referred to, it is understood that the number is included. If reference is made to "first" or "second", this should be understood to distinguish between features and not to indicate or imply relative importance or to implicitly indicate the number of indicated features or to implicitly indicate the precedence of the indicated features.
Volume of the mold: the volume occupied by the Gaussian beam in the resonant cavity.
Example one
Referring to fig. 1, a schematic structural diagram of an ultraviolet laser based on a bimorph structure in an embodiment of the present invention is shown. The ultraviolet laser based on the bimorph structure includes:
the device comprises a first pump source 1 and a second pump source 2, wherein the first pump source 1 and the second pump source 2 are symmetrically arranged, the first pump source 1 is used for generating a first pump beam, and the second pump source 2 is used for generating a second pump beam;
the first collimating lens group is arranged between the first pumping source 1 and the second pumping source 2 and is used for collimating and/or focusing the first pumping beam;
the second collimating lens group is arranged between the first collimating lens group and the second pumping source 2 and is used for collimating and/or focusing the second pumping beam;
a first laser crystal 13 for receiving the first pump beam and outputting a first fundamental frequency light;
a second laser crystal 14 for receiving the second pump beam and outputting a second fundamental frequency light;
the acousto-optic Q-switch 17 is used for receiving the first fundamental frequency light and the second fundamental frequency light and outputting first pulse fundamental frequency light and second pulse fundamental frequency light;
a frequency doubling crystal 16 for receiving the first pulse base frequency light and the second pulse base frequency light and outputting frequency doubling light 21;
and a sum frequency crystal 15 for receiving the first pulse base frequency light, the second pulse base frequency light, the frequency doubling light 21 and outputting a sum frequency light 22.
The first pump beam and the second pump beam have the same wavelength, and the wavelengths of the first pump beam and the second pump beam are 808nm or 88 xnm.
The first pump beam is collimated and/or focused by the first collimating lens group and focused on the surface of the first laser crystal 13. The first laser crystal 13 receives the first pump beam and outputs a first fundamental frequency light, and the wavelength of the first fundamental frequency light is 1064 nm.
The distance value of the focus of the first pump beam on the incident end face of the first laser crystal 13 is 1-3 mm; the focal point of the second pump beam is located at the incident end face of the second laser crystal 14 by a distance value of 1-3 mm.
The second pump beam is collimated and/or focused by the second collimating lens group and focused on the surface of the second laser crystal 14. The second laser crystal 14 receives the second pump beam and outputs a second fundamental frequency light, wherein the wavelength of the second fundamental frequency light is 1064 nm.
The first collimating lens group comprises a first plano-convex lens 3 and a second plano-convex lens 4; the convex surface of the first plano-convex lens 3 and the convex surface of the second plano-convex lens 4 are symmetrically arranged; the second collimating lens group comprises a third plano-convex lens 5 and a fourth plano-convex lens 6; the convex surface of the third plano-convex lens 5 is arranged symmetrically to the convex surface of the fourth plano-convex lens 6. The first laser crystal 13 and the second laser crystal 14 are arranged in an axisymmetric manner with a spacing of 5-20 mm. The magnification of the first collimating lens group and the second collimating lens group is 1.2.
The uv laser also includes a semiconductor refrigerator for controlling the operating temperature of frequency doubling crystal 16 and sum frequency crystal 15.
The output end of the sum frequency crystal 15 is provided with a Brewster end face; the brewster end face is used for refracting and separating the first pulse fundamental frequency light, the second pulse fundamental frequency light, the frequency doubling light 21 and the sum frequency light 22.
Example two
Referring to fig. 1, due to the thermal lens effect, the refractive index of each spatial position of the crystal changes, and the oscillating beam reciprocating along the axis of the resonant cavity deviates from the original propagation direction due to refraction when passing through the crystal. As shown in fig. 1, the first mirror 7, the second mirror 8, the third mirror 12, the fourth mirror 9, the fifth mirror 10, and the sixth mirror 11 form a resonant cavity.
The ultraviolet laser further includes: a first reflector 7, a second reflector 8, and a third reflector 12; the first reflector 7 and the second reflector 8 are used for reflecting the first fundamental frequency light and the second fundamental frequency light, so that the first fundamental frequency light and the second fundamental frequency light are transmitted to the acousto-optic Q-switch 17 and output first pulse fundamental frequency light and second pulse fundamental frequency light; the third reflector 12 is used for reflecting the first pulse fundamental frequency light and the second pulse fundamental frequency light.
The surface of the acousto-optic Q-switch 17 is provided with an antireflection film to improve the transmissivity of the acousto-optic Q-switch 17 to the first pulse fundamental frequency light and the second pulse fundamental frequency light.
The ultraviolet laser further includes: a fourth mirror 9, a fifth mirror 10, a sixth mirror 11; the fourth reflector 9 and the fifth reflector 10 are used for reflecting the first pulse fundamental frequency light and the second pulse fundamental frequency light to the frequency doubling crystal 16; the sixth mirror 11 is used to make the first pulse base frequency light and the second pulse base frequency light transmit the frequency doubling crystal 16 for reflection and transmit the frequency doubling crystal 16 again to generate the frequency doubling light 21.
The frequency doubling crystal 16 is located at the beam waist positions of the first pulse fundamental frequency light and the second pulse fundamental frequency light.
The first pulse fundamental frequency light and the second pulse fundamental frequency light are transmitted twice in the frequency doubling crystal 16, class I phase matching is carried out, and part of the first pulse fundamental frequency light and the second pulse fundamental frequency light are converted into frequency doubling light 21, the wavelength of the frequency doubling light 21 is 532nm, and the pulse width is 12-80 ns.
The frequency doubling light 21 is inputted into the sum frequency crystal 15 together with the first pulse fundamental frequency light and the second pulse fundamental frequency light, and is subjected to class II phase matching, and is partially converted into the sum frequency light 22, and the wavelength of the sum frequency light 22 is 355 nm.
The output end of the sum frequency crystal 15 is provided with a Brewster end face; the brewster end face is used for refracting and separating the first pulse fundamental frequency light, the second pulse fundamental frequency light, the frequency doubling light 21 and the sum frequency light 22.
The frequency doubling light 21 and the sum frequency light 22 are output out of the resonant cavity body, and the first pulse fundamental frequency light and the second pulse fundamental frequency light resonate in the resonant cavity body.
The surfaces of the first reflector 7, the second reflector 8, the third reflector 12, the fourth reflector 9, the fifth reflector 10 and the sixth reflector 11 are all provided with high-reflection films and high-transmission films;
the high-reflection film is used for reflecting light with 1064nm and/or 532 nm; the high-transmittance film is used for transmitting light of 808nm and/or 880 nm.
The first laser crystal 13 and the second laser crystal 14 include: nd is YVO4, Nd is YAG, Nd is YLF or Nd is GdVO 4;
the doping concentration of the first laser crystal 13 and the second laser crystal 14 is 0.1% -0.3%.
Fig. 2 is a schematic diagram of a cavity of an ultraviolet laser based on a twin-crystal structure according to an embodiment of the present invention. The cavity includes: the first cavity mirror 18 and the second cavity mirror 19 are arranged oppositely to form a resonant cavity body. A first laser crystal 13 and a second laser crystal 14 are arranged in the resonant cavity, the first laser crystal 13 and the second laser crystal 14 are arranged at a symmetrical interval, and a frequency doubling crystal 16 is arranged on one side of the second laser crystal 14 far away from the first laser crystal 13.
The mode volume of the gain medium in the cavity is equal to the sum of the mode volumes utilized by the bimorph by the fundamental mode gaussian beam. The first laser crystal 13 and the second laser crystal 14 are symmetrically arranged at intervals to fully utilize the mode volume of the laser crystal, so that higher output power can be obtained. Under a relatively long optical cavity, the beam waist positions of the first pulse fundamental frequency light and the second pulse fundamental frequency light can be positioned near the input end face of the frequency doubling crystal 16 by adjustment, so that the frequency doubling efficiency is further improved.
The mode volume V1 is increased when the two are placed at symmetrical intervals, and the change trend is slow; the die volume V2 is decreasing with a steeper trend when placed at equal intervals. In this case, V1< V2 means that the mode volume is large when the die is placed at equal intervals.
Since the mode volume V1 increases progressively when the first laser crystal 13 and the second laser crystal 14 are symmetrically spaced in the dual rod resonator, the trend is slower.
EXAMPLE III
Fig. 3 is a schematic diagram showing an optical path structure of an ultraviolet laser based on a bimorph structure according to an embodiment of the present invention. Please refer to fig. 1.
The ultraviolet laser based on the bimorph structure includes:
the device comprises a first pump source 1 and a second pump source 2, wherein the first pump source 1 and the second pump source 2 are symmetrically arranged, the first pump source 1 is used for generating a first pump beam, and the second pump source 2 is used for generating a second pump beam;
the first collimating lens group 30 is arranged between the first pumping source 1 and the second pumping source 2 and is used for collimating and/or focusing the first pumping beam;
the second collimating lens group 40 is arranged between the first collimating lens group 30 and the second pumping source 2 and is used for collimating and/or focusing the second pumping light beam;
a first laser crystal 13 for receiving the first pump beam and outputting a first fundamental frequency light;
a second laser crystal 14 for receiving the second pump beam and outputting a second fundamental frequency light;
the acousto-optic Q-switch 17 is used for receiving the first fundamental frequency light and the second fundamental frequency light and outputting first pulse fundamental frequency light and second pulse fundamental frequency light;
a frequency doubling crystal 16 for receiving the first pulse base frequency light and the second pulse base frequency light and outputting frequency doubling light 21;
and a sum frequency crystal 15 for receiving the first pulse base frequency light, the second pulse base frequency light, the frequency doubling light 21 and outputting a sum frequency light 22.
The first pump beam and the second pump beam have the same wavelength, and the wavelengths of the first pump beam and the second pump beam are 808nm or 88 xnm.
The first pump beam is collimated and/or focused by the first collimating lens group 30 and focused on the surface of the first laser crystal 13. The first laser crystal 13 receives the first pump beam and outputs a first fundamental frequency light, and the wavelength of the first fundamental frequency light is 1064 nm.
The distance value of the focus of the first pump beam on the incident end face of the first laser crystal 13 is 1-3 mm; the focal point of the second pump beam is located at the incident end face of the second laser crystal 14 by a distance value of 1-3 mm.
The second pump beam is collimated and/or focused by the second collimating lens group 40 and focused on the surface of the second laser crystal 14. The second laser crystal 14 receives the second pump beam and outputs a second fundamental frequency light, wherein the wavelength of the second fundamental frequency light is 1064 nm.
The first collimating lens group 30 includes a first plano-convex lens 3, a second plano-convex lens 4; the convex surface of the first plano-convex lens 3 and the convex surface of the second plano-convex lens 4 are symmetrically arranged; the second collimating lens group 40 includes a third plano-convex lens 5, a fourth plano-convex lens 6; the convex surface of the third plano-convex lens 5 is arranged symmetrically to the convex surface of the fourth plano-convex lens 6. The first laser crystal 13 and the second laser crystal 14 are arranged in an axisymmetric manner with a spacing of 5-20 mm. The magnification of the first collimating lens group and the second collimating lens group is 1.2.
The uv laser also includes a semiconductor refrigerator for controlling the operating temperature of frequency doubling crystal 16 and sum frequency crystal 15.
The output end of the sum frequency crystal 15 is provided with a Brewster end face; the brewster end face is used for refracting and separating the first pulse fundamental frequency light, the second pulse fundamental frequency light, the frequency doubling light 21 and the sum frequency light 22.
The ultraviolet laser based on the bimorph structure further includes: a first high-reflection lens 20 and a beam limiting device 50. The first high-reflection lens 20 is used for reflecting the first pump beam generated by the first pump source. The beam limiting device 50 is used to block the second excess frequency doubled light without the sum frequency effect. The beam limiting device 50 is provided with a light blocking hole, and the light blocking hole blocks the propagation path of the frequency doubling light to block redundant frequency doubling light, so that high-purity sum-frequency light output is obtained.
Referring to fig. 3, due to the thermal lens effect, the refractive index of each spatial position of the crystal changes, and the oscillating beam reciprocating along the axis of the resonant cavity deviates from the original propagation direction due to refraction when passing through the crystal. As shown in fig. 1, the first mirror 7, the second mirror 8, the third mirror 12, the fourth mirror 9, the fifth mirror 10, and the sixth mirror 11 form a resonant cavity.
The ultraviolet laser further includes: a first reflector 7, a second reflector 8, and a third reflector 12; the first reflector 7 and the second reflector 8 are used for reflecting the first fundamental frequency light and the second fundamental frequency light, so that the first fundamental frequency light and the second fundamental frequency light are transmitted to the acousto-optic Q-switch 17 and output first pulse fundamental frequency light and second pulse fundamental frequency light; the third reflector 12 is used for reflecting the first pulse fundamental frequency light and the second pulse fundamental frequency light.
The surface of the acousto-optic Q-switch 17 is provided with an antireflection film to improve the transmissivity of the acousto-optic Q-switch 17 to the first pulse fundamental frequency light and the second pulse fundamental frequency light.
The ultraviolet laser further includes: a fourth mirror 9, a fifth mirror 10, a sixth mirror 11; the fourth reflector 9 and the fifth reflector 10 are used for reflecting the first pulse fundamental frequency light and the second pulse fundamental frequency light to the frequency doubling crystal 16; the sixth mirror 11 is used to make the first pulse base frequency light and the second pulse base frequency light transmit the frequency doubling crystal 16 for reflection and transmit the frequency doubling crystal 16 again to generate the frequency doubling light 21.
The frequency doubling crystal 16 is located at the beam waist positions of the first pulse fundamental frequency light and the second pulse fundamental frequency light.
The first pulse fundamental frequency light and the second pulse fundamental frequency light are transmitted twice in the frequency doubling crystal 16, class I phase matching is carried out, and part of the first pulse fundamental frequency light and the second pulse fundamental frequency light are converted into frequency doubling light 21, the wavelength of the frequency doubling light 21 is 532nm, and the pulse width is 12-80 ns.
The frequency doubling light 21 is inputted into the sum frequency crystal 15 together with the first pulse fundamental frequency light and the second pulse fundamental frequency light, and is subjected to class II phase matching, and is partially converted into the sum frequency light 22, and the wavelength of the sum frequency light 22 is 355 nm.
The output end of the sum frequency crystal 15 is provided with a Brewster end face; the brewster end face is used for refracting and separating the first pulse fundamental frequency light, the second pulse fundamental frequency light, the frequency doubling light 21 and the sum frequency light 22.
The frequency doubling light 21 and the sum frequency light 22 are output out of the resonant cavity body, and the first pulse fundamental frequency light and the second pulse fundamental frequency light resonate in the resonant cavity body.
The surfaces of the first reflector 7, the second reflector 8, the third reflector 12, the fourth reflector 9, the fifth reflector 10 and the sixth reflector 11 are all provided with high-reflection films and high-transmission films;
the high-reflection film is used for reflecting light with 1064nm and/or 532 nm; the high-transmittance film is used for transmitting light of 808nm and/or 880 nm.
The first laser crystal 13 and the second laser crystal 14 include: nd is YVO4, Nd is YAG, Nd is YLF or Nd is GdVO 4;
the doping concentration of the first laser crystal 13 and the second laser crystal 14 is 0.1% -0.3%.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the gist of the present invention. Furthermore, the embodiments of the present invention and the features of the embodiments may be combined with each other without conflict.

Claims (10)

1.一种基于双晶结构的紫外激光器,其特征在于,包括:1. an ultraviolet laser based on twin crystal structure, is characterized in that, comprises: 第一泵浦源、第二泵浦源,所述第一泵浦源与所述第二泵浦源对称设置,第一泵浦源用于产生第一泵浦光束,第二泵浦源用于产生第二泵浦光束;A first pump source and a second pump source, the first pump source and the second pump source are arranged symmetrically, the first pump source is used to generate the first pump beam, and the second pump source is used for for generating the second pump beam; 第一准直透镜组,设置于所述第一泵浦源与所述第二泵浦源之间,用对所述第一泵浦光束进行准直处理和/或聚焦处理;a first collimating lens group, disposed between the first pump source and the second pump source, and used for collimating and/or focusing the first pump beam; 第二准直透镜组,设置于所述第一准直透镜组与所述第二泵浦源之间,用对所述第二泵浦光束进行准直处理和/或聚焦处理;a second collimating lens group, disposed between the first collimating lens group and the second pump source, and used for collimating and/or focusing the second pump beam; 第一激光晶体,用于接收所述第一泵浦光束并输出第一基频光;a first laser crystal for receiving the first pump beam and outputting the first fundamental frequency light; 第二激光晶体,用于接收所述第二泵浦光束并输出第二基频光;a second laser crystal for receiving the second pump beam and outputting the second fundamental frequency light; 声光调Q开关,用于接收所述第一基频光、所述第二基频光,并输出第一脉冲基频光、第二脉冲基频光;an acousto-optic Q-switch, used for receiving the first fundamental frequency light and the second fundamental frequency light, and outputting the first pulse fundamental frequency light and the second pulse fundamental frequency light; 倍频晶体,用于接收所述第一脉冲基频光、所述第二脉冲基频光并输出倍频光;a frequency doubling crystal, used for receiving the first pulse fundamental frequency light and the second pulse fundamental frequency light and outputting the frequency doubled light; 和频晶体,用于接收所述第一脉冲基频光、所述第二脉冲基频光、所述倍频光并输出和频光。The sum-frequency crystal is used for receiving the first pulse fundamental frequency light, the second pulse fundamental frequency light, and the frequency-doubling light and outputting the sum-frequency light. 2.根据权利要求1所述的基于双晶结构的紫外激光器,其特征在于,所述第一准直透镜组包括第一平凸透镜、第二平凸透镜;2. The ultraviolet laser based on a twin-crystal structure according to claim 1, wherein the first collimating lens group comprises a first plano-convex lens and a second plano-convex lens; 所述第一平凸透镜的凸面与所述第二平凸透镜的凸面对称设置;The convex surface of the first plano-convex lens is symmetrically arranged with the convex surface of the second plano-convex lens; 所述第二准直透镜组包括第三平凸透镜、第四平凸透镜;The second collimating lens group includes a third plano-convex lens and a fourth plano-convex lens; 所述第三平凸透镜的凸面与所述第四平凸透镜的凸面对称设置。The convex surface of the third plano-convex lens is symmetrically arranged with the convex surface of the fourth plano-convex lens. 3.根据权利要求1所述的基于双晶结构的紫外激光器,其特征在于,所述第一激光晶体与所述第二激光晶体轴对称设置,间隔为5-20mm。3 . The ultraviolet laser based on a twin-crystal structure according to claim 1 , wherein the first laser crystal and the second laser crystal are axially symmetrically arranged, with an interval of 5-20 mm. 4 . 4.根据权利要求1所述的基于双晶结构的紫外激光器,其特征在于,还包括半导体制冷器,用于控制所述倍频晶体和所述和频晶体的工作温度。4 . The ultraviolet laser based on the twin-crystal structure according to claim 1 , further comprising a semiconductor refrigerator for controlling the operating temperature of the frequency-doubling crystal and the sum-frequency crystal. 5 . 5.根据权利要求1所述的基于双晶结构的紫外激光器,其特征在于,所述和频晶体输出端设有布鲁斯特端面;5. The ultraviolet laser based on the twin-crystal structure according to claim 1, wherein the output end of the sum-frequency crystal is provided with a Brewster end face; 所述布鲁斯特端面用于使所述第一脉冲基频光、所述第二脉冲基频光、所述倍频光和所述和频光进行折射分离。The Brewster's end face is used for refracting and separating the first pulse fundamental frequency light, the second pulse fundamental frequency light, the frequency-doubling light and the sum-frequency light. 6.根据权利要求1所述的基于双晶结构的紫外激光器,其特征在于,还包括:第一反射镜、第二反射镜、第三反射镜;6. The ultraviolet laser based on a twin-crystal structure according to claim 1, further comprising: a first reflection mirror, a second reflection mirror, and a third reflection mirror; 所述第一反射镜和所述第二反射镜用于反射所述第一基频光、所述第二基频光,以使所述第一基频光、所述第二基频光传输至所述声光调Q开关并输出所述第一脉冲基频光、所述第二脉冲基频光;The first reflector and the second reflector are used to reflect the first fundamental frequency light and the second fundamental frequency light, so that the first fundamental frequency light and the second fundamental frequency light are transmitted to the acousto-optic Q-switch and output the first pulse fundamental frequency light and the second pulse fundamental frequency light; 所述第三反射镜用于反射所述第一脉冲基频光、所述第二脉冲基频光。The third reflecting mirror is used for reflecting the first pulse fundamental frequency light and the second pulse fundamental frequency light. 7.根据权利要求6所述的基于双晶结构的紫外激光器,其特征在于,还包括:第四反射镜、第五反射镜、第六反射镜;7. The ultraviolet laser based on a twin-crystal structure according to claim 6, further comprising: a fourth reflection mirror, a fifth reflection mirror, and a sixth reflection mirror; 所述第四反射镜、所述第五反射镜用于所述第一脉冲基频光、所述第二脉冲基频光反射至所述倍频晶体;The fourth reflection mirror and the fifth reflection mirror are used for reflecting the first pulse fundamental frequency light and the second pulse fundamental frequency light to the frequency doubling crystal; 所述第六反射镜用于使所述第一脉冲基频光、所述第二脉冲基频光透射所述倍频晶体发生反射并再次透射所述倍频晶体以生成所述倍频光。The sixth reflecting mirror is used to make the first pulse fundamental frequency light and the second pulse fundamental frequency light transmit and reflect through the frequency doubling crystal and transmit the frequency doubling crystal again to generate the frequency doubling light. 8.根据权利要求7所述的基于双晶结构的紫外激光器,其特征在于,所述和频晶体接收所述倍频光、所述第一脉冲基频光、所述第二脉冲基频光并进行II类相位匹配以输出所述和频光。8 . The ultraviolet laser based on a twin-crystal structure according to claim 7 , wherein the sum-frequency crystal receives the frequency-doubled light, the first pulsed fundamental frequency light, and the second pulsed fundamental frequency light. 9 . And perform type II phase matching to output the sum-frequency light. 9.根据权利要求7所述的基于双晶结构的紫外激光器,其特征在于,所述第一反射镜、所述第二反射镜、所述三反射镜、所述第四反射镜、所述第五反射镜和所述第六反射镜的表面均设有高反膜和高透膜;9 . The ultraviolet laser based on the twin crystal structure according to claim 7 , wherein the first reflection mirror, the second reflection mirror, the three reflection mirrors, the fourth reflection mirror, the The surfaces of the fifth reflector and the sixth reflector are both provided with a high-reflection film and a high-transmission film; 所述高反膜用于反射1064nm和/或532nm的光;The high-reflection film is used to reflect light at 1064 nm and/or 532 nm; 所述高透膜用于透射808nm和/或880nm的光。The high transmission film is used to transmit light at 808 nm and/or 880 nm. 10.根据权利要求1所述的基于双晶结构的紫外激光器,其特征在于,所述第一激光晶体和所述第二激光晶体包括:Nd:YVO4,Nd:YAG,Nd:YLF或Nd:GdVO4;10. The ultraviolet laser based on a twin-crystal structure according to claim 1, wherein the first laser crystal and the second laser crystal comprise: Nd:YVO4, Nd:YAG, Nd:YLF or Nd: GdVO4; 所述第一激光晶体和所述第二激光晶体的掺杂浓度为0.1%-0.3%。The doping concentration of the first laser crystal and the second laser crystal is 0.1%-0.3%.
CN202010129107.1A 2020-02-28 2020-02-28 Ultraviolet laser based on twin crystal structure Pending CN111193169A (en)

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