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CN107169160B - A Calculation Method for Non-Ionization Energy Loss of Heterojunction Bipolar Transistors - Google Patents

A Calculation Method for Non-Ionization Energy Loss of Heterojunction Bipolar Transistors Download PDF

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CN107169160B
CN107169160B CN201710235868.3A CN201710235868A CN107169160B CN 107169160 B CN107169160 B CN 107169160B CN 201710235868 A CN201710235868 A CN 201710235868A CN 107169160 B CN107169160 B CN 107169160B
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吕红亮
赵小红
赵曼丽
张义门
张玉明
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Xidian University
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Abstract

The invention discloses a method for calculating non-ionization energy loss of a heterojunction bipolar transistor, which relates to the technical field of environmental engineering, utilizes SRIM software to simulate the process of space radiation particles entering an InP/InGaAs HBT device, accurately calculates the relation between the non-ionization energy loss and the energy of the incident particles in the device to predict the performance degradation condition of the device in the space radiation environment, can determine a characteristic curve only by few tests, and saves the test expenditure and cost.

Description

一种异质结双极晶体管非电离能量损失的计算方法A Calculation Method for Non-Ionization Energy Loss of Heterojunction Bipolar Transistors

技术领域technical field

本发明涉及环境工程技术领域,特别是涉及一种异质结双极晶体管非电离能量损失的计算方法。The invention relates to the technical field of environmental engineering, in particular to a method for calculating the non-ionization energy loss of a heterojunction bipolar transistor.

背景技术Background technique

磷化铟异质结双极晶体管InP HBT具有超高的频率特性,较大的功率密度和良好的线性度等优点。在通信系统中,射频前端电路起着对无线信号和数字信号相互转换的作用,从而构成收发系统,包括低噪放大器,功率放大器,压控振荡器、混频器等电路,而在这些电路的实现上,InP基器件和电路具有其他器件所不具备的优势。因此,InP基器件和电路未来必将广泛地应用于卫星,雷达等军事领域。Indium phosphide heterojunction bipolar transistor InP HBT has the advantages of ultra-high frequency characteristics, large power density and good linearity. In the communication system, the RF front-end circuit plays a role in the mutual conversion of wireless signals and digital signals, thus forming a transceiver system, including low-noise amplifiers, power amplifiers, voltage-controlled oscillators, mixers and other circuits. In terms of implementation, InP-based devices and circuits have advantages that other devices do not have. Therefore, InP-based devices and circuits will be widely used in military fields such as satellites and radars in the future.

广泛应用于航天航空领域的InP器件和电路,在严重的空间辐射环境下会被高能质子、中子、α粒子、重离子等粒子轰击,产生各种辐射效应,比如说,总剂量效应、位移效应和单粒子效应,这些辐照效应使得器件或电路性能发生瞬时或永久的改变,进而使得整个航天器电学系统发生功能失效。因此,在器件损伤之前,我们需要对器件特性有一定的预估能力。InP devices and circuits, which are widely used in the aerospace field, will be bombarded by high-energy protons, neutrons, alpha particles, heavy ions and other particles in a severe space radiation environment, resulting in various radiation effects, such as total dose effect, displacement Effects and single event effects, these radiation effects cause instantaneous or permanent changes in device or circuit performance, and then make the entire spacecraft electrical system functional failure. Therefore, before the device is damaged, we need to have a certain ability to predict the device characteristics.

非电离能量损失(NIEL)是描述空间辐射粒子入射器件后,器件位移损伤情况。对NIEL的研究可以让人们对辐照损伤过程有更深入的认识,也可以用其来预期器件或者电路在辐射环境中的性能,因此得到更为广泛的应用。Non-ionizing energy loss (NIEL) describes the displacement damage of the device after space radiation particles are incident on the device. The research on NIEL can give people a deeper understanding of the radiation damage process, and can also use it to predict the performance of devices or circuits in the radiation environment, so it is more widely used.

然而,仅考虑位移损伤对NIEL的贡献是具有局限性的。通过研究发现,非电离能量损失NIEL不仅使得原子发生位移,也产生了大量声子,即晶格振动,其会促进原子发生位移,使得NIEL增大。我们知道,器件损伤因子与NIEL之间存在线性关系,可以通过NIEL值来预测器件性能。因此,求解准确的NIEL值是至关重要的。However, only considering the contribution of displacement damage to NIEL has limitations. Through research, it is found that the non-ionization energy loss NIEL not only causes the displacement of atoms, but also generates a large number of phonons, that is, lattice vibrations, which promote the displacement of atoms and increase the NIEL. We know that there is a linear relationship between the device damage factor and NIEL, and the device performance can be predicted by the NIEL value. Therefore, solving for an accurate NIEL value is crucial.

发明内容SUMMARY OF THE INVENTION

本发明实施例提供了一种异质结双极晶体管非电离能量损失的计算方法,可以解决现有技术中存在的问题。The embodiment of the present invention provides a method for calculating the non-ionization energy loss of a heterojunction bipolar transistor, which can solve the problems existing in the prior art.

一种异质结双极晶体管非电离能量损失的计算方法,该方法包括以下步骤:A method for calculating non-ionization energy loss of a heterojunction bipolar transistor, the method comprising the following steps:

利用SRIM软件模拟InP/InGaAs HBT器件在空间辐射环境下粒子入射器件的过程,并利用仿真结果计算器件中的非电离能量损失与入射粒子能量的关系;The SRIM software was used to simulate the process of particles entering the InP/InGaAs HBT device in the space radiation environment, and the relationship between the non-ionization energy loss in the device and the energy of the incident particles was calculated using the simulation results;

非电离能量损失包括产生空位所消耗的能量以及产生声子所消耗的能量,产生一个空位所需的能量M1见公式(1):The non-ionization energy loss includes the energy consumed to generate vacancies and the energy consumed to generate phonons. The energy M 1 required to generate a vacancy is shown in formula (1):

Figure GDA0002370564890000021
Figure GDA0002370564890000021

式(1)中,Td是指被辐照器件中原子位移阈能;In formula (1), T d refers to the atomic displacement threshold energy in the irradiated device;

产生一个声子所需要的能量M2见公式(2):The energy M 2 required to generate a phonon is shown in formula (2):

Figure GDA0002370564890000022
Figure GDA0002370564890000022

式(2)中,h是普朗克常数,c是光速,λ是拉曼光谱长度,A是系数;In formula (2), h is Planck's constant, c is the speed of light, λ is the length of the Raman spectrum, and A is the coefficient;

利用仿真结果计算非电离能量损失NIEL与入射深度D的关系曲线,见公式(3):Use the simulation results to calculate the relationship between the non-ionization energy loss NIEL and the incident depth D, see formula (3):

Figure GDA0002370564890000031
Figure GDA0002370564890000031

式(3)中,IONV(D)和RECV(D)分别是指一个入射原子以及一个反冲原子单位距离内产生的空位数目,IONP(D)和RECP(D)分别是指一个入射原子以及一个反冲原子单位距离内产生的声子数目,ρ为材料的原子密度;In formula (3), IONV(D) and RECV(D) refer to the number of vacancies generated within a unit distance of an incident atom and a recoil atom, respectively, IONP(D) and RECP(D) refer to an incident atom and The number of phonons generated within a unit distance of a recoil atom, ρ is the atomic density of the material;

求解入射粒子能量E随入射深度D的变化关系曲线,见公式(4)-(7):To solve the relationship between the incident particle energy E and the incident depth D, see formulas (4)-(7):

F(D)=10000{M1[IONV(D)+RECV(D)]+M2[IONP(D)+RECP(D)]}+10[IONI(D)+RECI(D)]F(D)=10000{M 1 [IONV(D)+RECV(D)]+M 2 [IONP(D)+RECP(D)]}+10[IONI(D)+RECI(D)]

(4) (4)

式(4)中,F(D)是指单位长度上产生空位、声子以及使得原子电离所需要的能量,IONI(D)和RECI(D)分别表示一个入射原子以及一个反冲原子单位距离内的电离能量损失;In formula (4), F(D) refers to the energy required to generate vacancies, phonons and atomic ionization per unit length, IONI(D) and RECI(D) represent an incident atom and a recoil atom per unit distance, respectively. ionization energy loss within;

Ec(D)=B×F(D) (5)E c (D)=B×F(D) (5)

式(5)中,Ec(D)是指在长度间隔B上累积消耗的原子能量;In formula (5), E c (D) refers to the accumulated atomic energy consumed in the length interval B;

Figure GDA0002370564890000032
Figure GDA0002370564890000032

式(6)中,Et(D)是指在入射粒子到达某一深度时,需要消耗的总能量;In formula (6), E t (D) refers to the total energy that needs to be consumed when the incident particle reaches a certain depth;

E(D)=E0-Et(D) (7)E(D)=E 0 -E t (D) (7)

式(7)中,E0为入射粒子的初始能量,E(D)是指粒子在入射路径上所具有的能量;In formula (7), E 0 is the initial energy of the incident particle, and E(D) refers to the energy of the particle on the incident path;

结合式(3)中得到的非电离能量损失NIEL与入射深度D的关系曲线,以及式(7)中得到的入射粒子能量E与入射深度D的变化关系曲线,最终得出非电离能量损失NIEL与入射粒子能量E的关系曲线。Combining the relationship curve between the non-ionization energy loss NIEL and the incident depth D obtained in equation (3), and the change relationship curve between the incident particle energy E and the incident depth D obtained in equation (7), the non-ionization energy loss NIEL is finally obtained. Relationship curve with incident particle energy E.

本发明利用SRIM软件来模拟空间辐射粒子入射InP/InGaAs HBT器件过程,精确计算器件中非电离能量损失与入射粒子能量的关系,来预测空间辐照环境中器件性能退化情况,而且只需要很少的试验就可以确定出该特征曲线,节约了试验经费和成本。The invention uses SRIM software to simulate the process of space radiation particles incident on an InP/InGaAs HBT device, accurately calculates the relationship between the loss of non-ionization energy in the device and the energy of the incident particles, and predicts the performance degradation of the device in the space radiation environment. The characteristic curve can be determined by the test, which saves the cost and cost of the test.

附图说明Description of drawings

为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained according to these drawings without creative efforts.

图1是SRIM仿真结果:(a)入射质子引入的电离、声子和空位产生率与入射深度D的关系图,(b)反冲原子引入的电离、声子和空位产生率与入射深度D的关系图;Figure 1 shows the SRIM simulation results: (a) the relationship between the ionization, phonon and vacancy generation rates introduced by incident protons and the incidence depth D, (b) the ionization, phonon and vacancy generation rates introduced by recoil atoms and the incidence depth D the relationship diagram;

图2是非电离能量损失NIEL与入射深度D关系图;Fig. 2 is the relationship diagram of non-ionization energy loss NIEL and incident depth D;

图3是单位间隔内累计消耗能量Ec与入射深度D关系图;Fig. 3 is the relationship diagram of the cumulative energy consumption E c and the incident depth D in the unit interval;

图4是总累计消耗能量Et与入射深度D关系图;Fig. 4 is the relationship diagram of the total accumulated energy consumption E t and the incident depth D;

图5是入射质子能量E与入射深度D关系图;Fig. 5 is the relation diagram of incident proton energy E and incident depth D;

图6是非电离能量损失NIEL与入射质子能量E关系图;Fig. 6 is the relationship diagram of non-ionization energy loss NIEL and incident proton energy E;

图7是考虑与不考虑声子影响的NIEL与入射质子能量E关系图;Fig. 7 is the relation diagram of NIEL and incident proton energy E considering and not considering the influence of phonon;

图8是对比不同粒子入射的NIEL与入射粒子能量E关系图。Figure 8 is a graph comparing the relationship between the NIEL of different particles incident and the incident particle energy E.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

本发明实施例中提供的一种异质结双极晶体管非电离能量损失的计算方法,该方法包括以下步骤:A method for calculating the non-ionization energy loss of a heterojunction bipolar transistor provided in the embodiment of the present invention includes the following steps:

第一步骤,利用SRIM软件模拟InP/InGaAs HBT器件在空间辐射环境下粒子入射器件的过程,并利用仿真结果计算器件中的非电离能量损失与入射粒子能量的关系;In the first step, the SRIM software is used to simulate the process of particles entering the InP/InGaAs HBT device in the space radiation environment, and the relationship between the non-ionization energy loss in the device and the energy of the incident particles is calculated by using the simulation results;

第二步骤,非电离能量损失主要包括产生空位所消耗的能量以及产生声子所消耗的能量。产生一个空位所需的能量M1见公式(1):In the second step, the non-ionization energy loss mainly includes the energy consumed to generate vacancies and the energy consumed to generate phonons. The energy M 1 required to generate a vacancy is shown in formula (1):

Figure GDA0002370564890000051
Figure GDA0002370564890000051

式(1)中,M1的单位为keV/vacancy,Td是指被辐照器件中原子位移阈能,单位为eV;In formula (1), the unit of M 1 is keV/vacancy, and T d refers to the atomic displacement threshold energy in the irradiated device, and the unit is eV;

产生一个声子所需要的能量M2见公式(2):The energy M 2 required to generate a phonon is shown in formula (2):

Figure GDA0002370564890000052
Figure GDA0002370564890000052

式(2)中,M2的单位为keV/phonon,h是普朗克常数,c是光速,λ是拉曼光谱长度,A是系数;In formula (2), the unit of M 2 is keV/phonon, h is Planck's constant, c is the speed of light, λ is the length of the Raman spectrum, and A is the coefficient;

第三步骤,利用仿真结果计算非电离能量损失NIEL与入射深度D的关系曲线,见公式(3):The third step is to use the simulation results to calculate the relationship between the non-ionization energy loss NIEL and the incident depth D, see formula (3):

Figure GDA0002370564890000061
Figure GDA0002370564890000061

式(3)中,NIEL的单位为MeV·cm2/g,IONV(D)和RECV(D)分别是指一个入射原子以及一个反冲原子单位距离内产生的空位数目,IONP(D)和RECP(D)分别是指一个入射原子以及一个反冲原子单位距离内产生的声子数目,以上均为SRIM仿真结果;ρ为材料的原子密度;In formula (3), the unit of NIEL is MeV·cm 2 /g, IONV(D) and RECV(D) refer to the number of vacancies generated within a unit distance of an incident atom and a recoil atom, respectively, IONP(D) and RECP(D) refers to the number of phonons generated within a unit distance of an incident atom and a recoil atom respectively, and the above are all SRIM simulation results; ρ is the atomic density of the material;

第四步骤,求解入射粒子能量E随入射深度D的变化关系曲线,见公式(4)-(7):The fourth step is to solve the relationship curve of the incident particle energy E with the incident depth D, see formulas (4)-(7):

F(D)=10000{M1[IONV(D)+RECV(D)]+M2[IONP(D)+RECP(D)]}+10[IONI(D)+RECI(D)]F(D)=10000{M 1 [IONV(D)+RECV(D)]+M 2 [IONP(D)+RECP(D)]}+10[IONI(D)+RECI(D)]

(4) (4)

式(4)中,F(D)是指单位长度上产生空位、声子以及使得原子电离所需要的能量,单位为keV/μm,IONI(D)和RECI(D)分别表示一个入射原子以及一个反冲原子单位距离内的电离能量损失;In formula (4), F(D) refers to the energy required to generate vacancies, phonons and atomic ionization per unit length, in keV/μm, IONI(D) and RECI(D) represent an incident atom and The ionization energy loss per unit distance of a recoil atom;

Ec(D)=B×F(D) (5)E c (D)=B×F(D) (5)

式(5)中,Ec(D)是指在长度间隔B上累积消耗的原子能量,其中,B的单位为μm;In formula (5), E c (D) refers to the atomic energy consumed cumulatively over the length interval B, where the unit of B is μm;

Figure GDA0002370564890000062
Figure GDA0002370564890000062

式(6)中,Et(D)是指在入射粒子到达某一深度时,需要消耗的总能量;In formula (6), E t (D) refers to the total energy that needs to be consumed when the incident particle reaches a certain depth;

E(D)=E0-Et(D) (7)E(D)=E 0 -E t (D) (7)

式(7)中,E0为入射粒子的初始能量,E(D)是指粒子在入射路径上所具有的能量;In formula (7), E 0 is the initial energy of the incident particle, and E(D) refers to the energy of the particle on the incident path;

第五步骤,结合式(3)中得到的非电离能量损失NIEL与入射深度D的关系曲线,以及式(7)中得到的入射粒子能量E与入射深度D的变化关系曲线,最终可以得出非电离能量损失NIEL与入射粒子能量E的关系曲线。器件的损伤系数与NIEL成线性关系,因此,可以通过求解NIEL来预测器件的性能。In the fifth step, combining the relationship curve between the non-ionization energy loss NIEL and the incident depth D obtained in formula (3), and the change relationship curve between the incident particle energy E and the incidence depth D obtained in formula (7), we can finally get Non-ionization energy loss NIEL versus incident particle energy E. The damage factor of the device is linearly related to NIEL, therefore, the performance of the device can be predicted by solving the NIEL.

下面结合一个具体实例对本发明作进一步说明。The present invention will be further described below in conjunction with a specific example.

1.以质子为例,设置初始能量E0=10MeV,利用SRIM软件模拟InP/InGaAs HBT器件在空间辐射环境下质子入射器件的过程,得到入射质子引入的电离、声子和空位产生率与入射深度的关系,如图1(a)所示,以及反冲原子引入的电离、声子和空位产生率与入射深度的关系,如图1(b)所示;1. Take protons as an example, set the initial energy E 0 =10MeV, use SRIM software to simulate the process of protons entering the device in the space radiation environment of InP/InGaAs HBT devices, and obtain the ionization, phonon and vacancy generation rates introduced by incident protons and incident depth as a function of depth, as shown in Fig. 1(a), and ionization, phonon and vacancy generation rates introduced by recoil atoms as a function of incident depth, as shown in Fig. 1(b);

2.结合仿真结果计算器件中的非电离能量损失与入射深度关系;2. Calculate the relationship between the non-ionization energy loss and the incident depth in the device based on the simulation results;

1)首先由公式(1)和公式(2)可得产生一个空位所需要的能量以及产生一个声子所需要的能量;1) First, the energy required to generate a vacancy and the energy required to generate a phonon can be obtained from formula (1) and formula (2);

2)结合仿真结果以及公式(3),可以得到器件中的非电离能量损失与入射深度关系,如图2所示。发现入射深度越深,非电离能量损失值越大。也就是说粒子入射停止的位置,将是损伤最大的区域。2) Combining the simulation results and formula (3), the relationship between the non-ionization energy loss in the device and the incident depth can be obtained, as shown in Figure 2. It was found that the deeper the depth of incidence, the greater the value of non-ionizing energy loss. That is to say, the position where the particle incidence stops will be the most damaged area.

3.求解入射粒子能量E与入射深度D的变化关系曲线;3. Solve the relationship curve between the incident particle energy E and the incident depth D;

1)求解单位长度上产生空位、声子以及使得原子电离所需要的能量F(D),单位为keV/μm,见公式(4);1) Calculate the energy F(D) required to generate vacancies, phonons and atomic ionization per unit length, in keV/μm, see formula (4);

2)已知F(D),求在长度间隔B上累积消耗的原子能量Ec(D),B的单位为μm,见公式(5),如图3所示;2) Knowing F(D), find the atomic energy E c (D) that is consumed cumulatively over the length interval B, the unit of B is μm, see formula (5), as shown in Figure 3;

3)在入射质子到达某一深度时,需要消耗的总能量Et(D),见公式(6),如图4所示;3) When the incident proton reaches a certain depth, the total energy E t (D) that needs to be consumed, see formula (6), as shown in Figure 4;

4)入射质子到达某一深度时,所具有的能量E(D),见公式(7),如图5所示,发现,随着入射深度的不断增加,质子能量逐渐降低,直至为零,最后停止在器件内部;4) When the incident proton reaches a certain depth, the energy E(D), see formula (7), as shown in Figure 5, it is found that with the continuous increase of the incident depth, the proton energy gradually decreases until it is zero, Finally stop inside the device;

4.结合前面得到的非电离能量损失NIEL与入射深度D的关系曲线,以及入射粒子能量E与入射深度D的关系,最终可以得出非电离能量损失NIEL与入射质子能量E的关系曲线,如图6所示,发现,质子能量越低,对器件造成的损伤越大,主要是由于低能量的质子入射进入器件中,速度较慢,与器件相互作用时间较长,作用面积大,淀积的能量更多,因此,产生的损伤大。同时给出了解析法计算NIEL的结果,对比可以看出,本专利所讲述的利用SRIM软件仿真考虑声子作用的NIEL计算方法是正确的。器件的损伤系数与NIEL成线性关系,因此,可以通过求解NIEL来预测器件的性能;4. Combining the relationship between the non-ionization energy loss NIEL and the incident depth D obtained earlier, and the relationship between the incident particle energy E and the incident depth D, the relationship between the non-ionization energy loss NIEL and the incident proton energy E can finally be obtained, such as As shown in Figure 6, it is found that the lower the proton energy, the greater the damage to the device, mainly due to the low energy protons entering the device, the speed is slow, the interaction time with the device is longer, the effect area is large, and the deposition more energy and, therefore, greater damage. At the same time, the results of calculating NIEL by the analytical method are given. It can be seen from the comparison that the calculation method of NIEL that uses SRIM software to simulate and consider phonon interaction described in this patent is correct. The damage coefficient of the device has a linear relationship with NIEL, so the performance of the device can be predicted by solving the NIEL;

5.基于以上方法,对比考虑与不考虑声子作用的NIEL与入射质子能量关系曲线,如图7所示。发现考虑声子的NIEL值均增大了,说明声子促进原子发生位移,使得非电离能量损伤值增大;5. Based on the above method, compare the relationship between NIEL and incident proton energy with and without phonon interaction, as shown in Figure 7. It was found that the NIEL values considering phonons all increased, indicating that phonons promote the displacement of atoms and increase the damage value of non-ionization energy;

6.以上方法对于其他空间辐射粒子,如碳、氦等粒子均适用,如图8所示,发现原子质量越大,非电离能量损失NIEL越大。主要是由于原子质量越大,就会与靶材原子产生更大的碰撞,淀积更多的能量,因此,造成更大的损伤。6. The above method is applicable to other space radiation particles, such as carbon, helium and other particles. As shown in Figure 8, it is found that the greater the atomic mass, the greater the non-ionization energy loss NIEL. The main reason is that the greater the atomic mass, the greater the collision with the target atoms, the deposition of more energy, and the greater the damage.

本领域内的技术人员应明白,本发明的实施例可提供为方法、系统、或计算机程序产品。因此,本发明可采用完全硬件实施例、完全软件实施例、或结合软件和硬件方面的实施例的形式。而且,本发明可采用在一个或多个其中包含有计算机可用程序代码的计算机可用存储介质(包括但不限于磁盘存储器、CD-ROM、光学存储器等)上实施的计算机程序产品的形式。As will be appreciated by one skilled in the art, embodiments of the present invention may be provided as a method, system, or computer program product. Accordingly, the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, the present invention may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) having computer-usable program code embodied therein.

本发明是参照根据本发明实施例的方法、设备(系统)、和计算机程序产品的流程图和/或方框图来描述的。应理解可由计算机程序指令实现流程图和/或方框图中的每一流程和/或方框、以及流程图和/或方框图中的流程和/或方框的结合。可提供这些计算机程序指令到通用计算机、专用计算机、嵌入式处理机或其他可编程数据处理设备的处理器以产生一个机器,使得通过计算机或其他可编程数据处理设备的处理器执行的指令产生用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的装置。The present invention is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the invention. It will be understood that each flow and/or block in the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to the processor of a general purpose computer, special purpose computer, embedded processor or other programmable data processing device to produce a machine such that the instructions executed by the processor of the computer or other programmable data processing device produce Means for implementing the functions specified in a flow or flow of a flowchart and/or a block or blocks of a block diagram.

这些计算机程序指令也可存储在能引导计算机或其他可编程数据处理设备以特定方式工作的计算机可读存储器中,使得存储在该计算机可读存储器中的指令产生包括指令装置的制造品,该指令装置实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能。These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory result in an article of manufacture comprising instruction means, the instructions The apparatus implements the functions specified in the flow or flows of the flowcharts and/or the block or blocks of the block diagrams.

这些计算机程序指令也可装载到计算机或其他可编程数据处理设备上,使得在计算机或其他可编程设备上执行一系列操作步骤以产生计算机实现的处理,从而在计算机或其他可编程设备上执行的指令提供用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的步骤。These computer program instructions can also be loaded on a computer or other programmable data processing device to cause a series of operational steps to be performed on the computer or other programmable device to produce a computer-implemented process such that The instructions provide steps for implementing the functions specified in the flow or blocks of the flowcharts and/or the block or blocks of the block diagrams.

尽管已描述了本发明的优选实施例,但本领域内的技术人员一旦得知了基本创造性概念,则可对这些实施例作出另外的变更和修改。所以,所附权利要求意欲解释为包括优选实施例以及落入本发明范围的所有变更和修改。Although preferred embodiments of the present invention have been described, additional changes and modifications to these embodiments may occur to those skilled in the art once the basic inventive concepts are known. Therefore, the appended claims are intended to be construed to include the preferred embodiment and all changes and modifications that fall within the scope of the present invention.

显然,本领域的技术人员可以对本发明进行各种改动和变型而不脱离本发明的精神和范围。这样,倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内,则本发明也意图包含这些改动和变型在内。It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention. Thus, provided that these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims (1)

1.一种异质结双极晶体管非电离能量损失的计算方法,其特征在于,该方法包括以下步骤:1. a calculation method of non-ionization energy loss of heterojunction bipolar transistor, is characterized in that, this method comprises the following steps: 利用SRIM软件模拟InP/InGaAs HBT器件在空间辐射环境下粒子入射器件的过程,并利用仿真结果计算器件中的非电离能量损失与入射粒子能量的关系;The SRIM software was used to simulate the process of particles entering the InP/InGaAs HBT device in the space radiation environment, and the relationship between the non-ionization energy loss in the device and the energy of the incident particles was calculated using the simulation results; 非电离能量损失包括产生空位所消耗的能量以及产生声子所消耗的能量,产生一个空位所需的能量M1见公式(1):The non-ionization energy loss includes the energy consumed to generate vacancies and the energy consumed to generate phonons. The energy M 1 required to generate a vacancy is shown in formula (1):
Figure FDA0001267923800000011
Figure FDA0001267923800000011
式(1)中,Td是指被辐照器件中原子位移阈能;In formula (1), T d refers to the atomic displacement threshold energy in the irradiated device; 产生一个声子所需要的能量M2见公式(2):The energy M 2 required to generate a phonon is shown in formula (2):
Figure FDA0001267923800000012
Figure FDA0001267923800000012
式(2)中,h是普朗克常数,c是光速,λ是拉曼光谱长度,A是系数;In formula (2), h is Planck's constant, c is the speed of light, λ is the length of the Raman spectrum, and A is the coefficient; 利用仿真结果计算非电离能量损失NIEL与入射深度D的关系曲线,见公式(3):Use the simulation results to calculate the relationship between the non-ionization energy loss NIEL and the incident depth D, see formula (3):
Figure FDA0001267923800000013
Figure FDA0001267923800000013
式(3)中,IONV(D)和RECV(D)分别是指一个入射原子以及一个反冲原子单位距离内产生的空位数目,IONP(D)和RECP(D)分别是指一个入射原子以及一个反冲原子单位距离内产生的声子数目,ρ为材料的原子密度;In formula (3), IONV(D) and RECV(D) refer to the number of vacancies generated within a unit distance of an incident atom and a recoil atom, respectively, IONP(D) and RECP(D) refer to an incident atom and The number of phonons generated within a unit distance of a recoil atom, ρ is the atomic density of the material; 求解入射粒子能量E随入射深度D的变化关系曲线,见公式(4)-(7):To solve the relationship between the incident particle energy E and the incident depth D, see formulas (4)-(7): F(D)=10000{M1[IONV(D)+RECV(D)]+M2[IONP(D)+RECP(D)]}+10[IONI(D)+RECI(D)]F(D)=10000{M 1 [IONV(D)+RECV(D)]+M 2 [IONP(D)+RECP(D)]}+10[IONI(D)+RECI(D)] (4) (4) 式(4)中,F(D)是指单位长度上产生空位、声子以及使得原子电离所需要的能量,IONI(D)和RECI(D)分别表示一个入射原子以及一个反冲原子单位距离内的电离能量损失;In formula (4), F(D) refers to the energy required to generate vacancies, phonons and atomic ionization per unit length, IONI(D) and RECI(D) represent an incident atom and a recoil atom per unit distance, respectively. ionization energy loss within; Ec(D)=B×F(D) (5)E c (D)=B×F(D) (5) 式(5)中,Ec(D)是指在长度间隔B上累积消耗的原子能量;In formula (5), E c (D) refers to the accumulated atomic energy consumed in the length interval B;
Figure FDA0001267923800000021
Figure FDA0001267923800000021
式(6)中,Et(D)是指在入射粒子到达某一深度时,需要消耗的总能量;In formula (6), E t (D) refers to the total energy that needs to be consumed when the incident particle reaches a certain depth; E(D)=E0-Et(D) (7)E(D)=E 0 -E t (D) (7) 式(7)中,E0为入射粒子的初始能量,E(D)是指粒子在入射路径上所具有的能量;In formula (7), E 0 is the initial energy of the incident particle, and E(D) refers to the energy of the particle on the incident path; 结合式(3)中得到的非电离能量损失NIEL与入射深度D的关系曲线,以及式(7)中得到的入射粒子能量E与入射深度D的变化关系曲线,最终得出非电离能量损失NIEL与入射粒子能量E的关系曲线。Combining the relationship curve between the non-ionization energy loss NIEL and the incident depth D obtained in equation (3), and the change relationship curve between the incident particle energy E and the incident depth D obtained in equation (7), the non-ionization energy loss NIEL is finally obtained. Relationship curve with incident particle energy E.
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