CN106903116B - A surface cleaning device, temperature control table system and surface cleaning method - Google Patents

Abstract

The embodiment of the present invention provides a kind of surface cleaning apparatus, thermal station system and method for cleaning surface.The device includes: the bracket that can be moved along the surface of thermal station, connects spray head on the bracket, and the gas input unit to spray head conveying gas；The spray head is arranged above the thermal station, and the spray head includes the first surface and second surface being oppositely arranged, at least one first air outlet is arranged on the first surface of the spray head；At least one second air outlet is set on the second surface of the spray head；Surface outlet air of first air outlet along spray head moving direction to the thermal station；Surface outlet air of second air outlet along spray head moving direction to substrate.The second air outlet is arranged by the way that the first air outlet is arranged on the first surface of spray head in the embodiment of the present invention on the second surface of spray head, can remove the particulate matter in the whole surface of thermal station and substrate simultaneously, to improve producing line mobility and product yield.

Description

A surface cleaning device, temperature control table system and surface cleaning method

technical field

The invention relates to the technical field of surface cleaning, in particular to a surface cleaning device, a temperature control table system and a surface cleaning method.

Background technique

Particulate matter tends to remain on the surface of the temperature control table of the exposure machine. If these particles are not cleaned up in time, after the surface of the substrate and the temperature control table are pressed for many times, the particles may be embedded in the coating on the surface of the temperature control table, so that the contact between the substrate and the surface of the temperature control table may cause the substrate The surface is also pitted. In the prior art, in order to solve this problem, the surface of the temperature control table is cleaned regularly. However, since there are also particles on the surface of the substrate, the cleaning process does not clean the surface of the substrate, and new particles are introduced in the cleaning process, so that the cleaning efficiency is low and the productivity is affected.

SUMMARY OF THE INVENTION

Embodiments of the present invention provide a surface cleaning device, a temperature control table system, and a surface cleaning method, so as to solve the problem that the existing technology cannot clean the particles on the surface of the temperature control table and the substrate at the same time.

In a first aspect, a surface cleaning device is provided, comprising: a support movable along the surface of a temperature control platform, a spray head connected to the support, and a gas input unit for supplying gas to the spray head; the spray head is arranged on the Above the temperature control platform, the spray head includes a first surface and a second surface arranged opposite to each other, at least one first air outlet is arranged on the first surface of the spray head; at least one first air outlet is arranged on the second surface of the spray head. Two air outlets; the first air outlet discharges air to the surface of the temperature control platform along the moving direction of the nozzle; the second air outlet discharges air to the surface of the substrate along the moving direction of the nozzle.

Further, it also includes: a high-voltage discharge unit disposed inside the showerhead, the high-voltage discharge unit ionizes the gas input by the gas input unit and then inputs the gas into the first air outlet and the second air outlet.

Further: at least one first adsorption port is provided on the first surface of the spray head; at least one second adsorption port is provided on the second surface of the spray head.

Further, it also includes: at least one adsorption unit, at least one adsorption unit is configured to be arranged on the side of the temperature control platform in the same direction as the moving direction of the nozzle, to adsorb the first air outlet and the first air outlet. Particulate matter removed by the second air outlet.

Further: there is a first distance between the first air outlet and the free end of the first surface of the nozzle, and the free end of the first surface of the nozzle is the end in the same direction as the moving direction of the nozzle; There is a second distance between the second air outlet and the free end of the second surface of the spray head, and the free end of the second surface of the spray head is the end in the same direction as the moving direction of the spray head.

Further: the first surface of the spray head is provided with at least one first guide groove parallel to the moving direction of the spray head, one end of the first guide groove extends to the first air outlet, the The other end of the first guide groove extends to the free end of the first surface of the temperature control platform; the second surface of the spray head is provided with at least one second guide groove parallel to the moving direction of the spray head, One end of the second guide groove extends to the second air outlet, and the other end of the second guide groove extends to the free end of the second surface of the temperature control platform.

Further, it also includes: a control unit, the control unit is electrically connected to the spray head, and is used to control the wind power of the first air outlet and the second air outlet of the spray head and/or the air outlet temperature of the first air outlet .

Further, it also includes: a particle detection unit and/or a temperature measurement unit, wherein the particle detection unit is electrically connected to the control unit, for detecting particles on the surface of the temperature control table, and measuring the temperature control table The position of the particulate matter on the surface is sent to the control unit; the control unit is configured to control the nozzle to move to the position of the particulate matter according to the position of the particulate matter to increase the wind force of the first air outlet; The temperature measurement unit is electrically connected to the control unit, and is used for detecting the temperature of the surface of the temperature control table, and sending the temperature of the surface of the temperature control table to the control unit; the control unit is used for according to The temperature of the surface of the temperature control platform and the set temperature of the surface of the temperature control platform adjust the air outlet temperature of the first air outlet.

In a second aspect, a temperature control table system is provided, including: a temperature control table and the above-mentioned surface cleaning device; the temperature control table includes a plurality of liftable support pins, the plurality of liftable support pins and the The surfaces of the temperature control table are parallel, and the plurality of liftable support pins are used to support the substrate; the first surface of the spray head of the surface cleaning device faces the surface of the temperature control table.

In a third aspect, a surface cleaning method is used for the above temperature control table system, the method includes: raising a plurality of liftable support pins of the temperature control table, so that the support pins and the temperature control table are connected to each other. The surface of the console is separated, and the height of the support needle is higher than that of the spray head of the surface cleaning device; the substrate is placed on the support needle; the gas input unit of the surface cleaning device, the first nozzle of the spray head are turned on. An air outlet and a second air outlet of the spray head enable the gas input unit to deliver gas to the spray head; open the support of the surface cleaning device, so that the support drives the spray head on the support along the temperature control table The surface of the temperature control platform moves from the first air outlet to the surface of the temperature control platform along the moving direction of the nozzle, and the second air outlet discharges the air to the surface of the substrate along the moving direction of the nozzle.

In this way, in the embodiment of the present invention, the first air outlet is provided on the first surface of the shower head to remove the particulate matter on the surface of the temperature control platform; the second air outlet is arranged on the second surface of the shower head to remove the substrate Particulate matter on the surface; the moving bracket drives the nozzle to move, which can remove the particulate matter on the entire surface of the temperature control table and the substrate at the same time, so as to improve the production line utilization rate and product yield.

Description of drawings

In order to illustrate the technical solutions of the embodiments of the present invention more clearly, the following briefly introduces the drawings that are used in the description of the embodiments of the present invention. Obviously, the drawings in the following description are only some embodiments of the present invention. , for those of ordinary skill in the art, other drawings can also be obtained from these drawings without creative labor.

1 is a schematic structural diagram 1 of a surface cleaning device and a temperature control platform according to the first embodiment of the present invention;

2 is a second structural schematic diagram of the surface cleaning device and the temperature control platform according to the first embodiment of the present invention;

3 is a top view of the surface cleaning device and the temperature control table according to the first embodiment of the present invention;

4 is a schematic diagram of the first surface of the nozzle of the surface cleaning device according to the first embodiment of the present invention;

5 is a schematic view of an end face of one end of the surface cleaning device according to the first embodiment of the present invention;

6 is a partial structural schematic diagram of the first surface of the nozzle of the surface cleaning device according to the first embodiment of the present invention;

7 is a first structural schematic diagram of a first diversion groove of the surface cleaning device according to the first embodiment of the present invention;

8 is a second structural schematic diagram of the first diversion groove of the surface cleaning device according to the first embodiment of the present invention;

9 is a schematic structural diagram of a particle detection unit of the surface cleaning device according to the first embodiment of the present invention;

10 is another schematic structural diagram of the particle detection unit of the surface cleaning device according to the first embodiment of the present invention;

11 is a schematic structural diagram of an auxiliary support pin supporting substrate of a temperature control station of a temperature control station system of a temperature control station system according to a second embodiment of the present invention;

12 is a schematic structural diagram of a support pin supporting substrate of a temperature control station of a temperature control station system according to a second embodiment of the present invention;

13 is a schematic diagram of the distribution of the temperature measurement units of the temperature control station of the temperature control station system according to the second embodiment of the present invention;

14 is a diagram showing the distribution of temperature measurement units and temperature adjustment units of the temperature control station system of the temperature control station system according to the second embodiment of the present invention;

FIG. 15 is a flow chart of a surface cleaning method according to a third embodiment of the present invention.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

first embodiment

The first embodiment of the present invention discloses a surface cleaning device. As shown in FIGS. 1 to 10 , the surface cleaning device includes: a support 1 that can move along the surface of the temperature control table 8 , a spray head 2 connected to the support 1 , and a gas input unit for supplying gas to the spray head 2 .

For example, the bracket 1 can be specifically composed of two support rods. Each support rod is provided at both ends of the temperature control table 8 . In this embodiment, the two ends of the temperature control platform 8 are two ends perpendicular to the moving direction of the support 1 . The two ends of the spray head 2 are respectively connected with two support rods, and the plane where the two ends of the spray head 2 are located is parallel to the moving direction of the spray head 2 . The carriage 1 can be moved on rails 3 . Specifically, the bracket 1 can move in one direction, and can also move in two opposite directions, as shown by the arrow in FIG. 3 .

The spray head 2 is arranged above the temperature control table 8 . The shower head 2 includes a first surface and a second surface which are arranged opposite to each other.

At least one first air outlet 21 is provided on the first surface of the spray head 2 . For example, the shape of the first air outlet 21 may be a long and narrow strip extending from one end of the spray head 2 to the other end. The nozzle 2 is also provided with an air inlet 25 . The gas input unit is communicated with the air inlet 25 , and the air is delivered into the shower head 2 through the air inlet 25 . For example, the air inlets 25 may be provided on the surfaces of both ends of the shower head 2 . The nozzle 2 is provided with a first air outlet channel 26, the first air outlet channel 26 is communicated with the first air outlet 21, and the included angle between the first air outlet channel 26 and the first surface of the nozzle 2 is an obtuse angle, there are It is beneficial for the wind blown out from the first air outlet 21 to flow in the moving direction of the nozzle head 2 . Therefore, the first air outlet 21 discharges air toward the surface of the temperature control table 8 along the moving direction of the shower head 2 , so as to remove the particulate matter on the surface of the temperature control table 8 . If there is only one first air outlet 21 on the first surface of the nozzle 2, since the wind blown out from the first air outlet 21 has a specific direction, after the nozzle 2 moves to the side of the temperature control table 8, it needs to return to the To the initial position, the next cleaning can be performed. Preferably, there are two first air outlets 21 , which are symmetrically arranged on the first surface of the spray head 2 . In this way, when the bracket 1 moves toward one side of the temperature control table 8, the first air outlet 21 close to one side of the temperature control table 8 can be opened; when the bracket 1 moves toward the opposite side of the temperature control table 8 , the first air outlet 21 that is close to the other side of the temperature control table 8 can be opened, so that when the nozzle 2 moves to one side of the temperature control table 8, it can be removed from the temperature control table 8 without returning to the initial position. Moving side to side for cleaning increases cleaning efficiency. In this embodiment, one side and the other side of the temperature control platform 8 are the two sides in the moving direction of the spray head 2 .

At least one second air outlet 22 is provided on the second surface of the spray head 2 . For example, the shape of the second air outlet 22 may be a long and narrow strip extending from one end of the spray head 2 to the other end. The nozzle 2 is provided with a second air outlet channel 27, the second air outlet channel 27 communicates with the second air outlet 22, and the angle between the second air outlet channel 27 and the second surface of the nozzle 2 is an obtuse angle, so that the The wind blown out from the second air outlet 22 flows in the moving direction of the shower head 2 . Therefore, the second air outlet 22 discharges air toward the surface of the substrate 9 along the moving direction of the shower head 2 , so as to remove the particulate matter on the surface of the substrate 9 . If there is only one second air outlet 22 on the second surface of the nozzle 2, since the wind blown out from the second air outlet 22 has a specific direction, after the nozzle 2 moves to the side of the temperature control table 8, it needs to return to the To the initial position, the next cleaning can be performed. Preferably, there are two second air outlets 22 , which are symmetrically arranged on the first surface of the spray head 2 . In this way, when the bracket 1 moves toward one side of the temperature control table 8, the second air outlet 22 close to one side of the temperature control table 8 can be opened; when the bracket 1 moves toward the opposite side of the temperature control table 8 , the second air outlet 22 that is close to the other side of the temperature control table 8 can be opened, so that when the nozzle 2 is moved to one side of the temperature control table 8, it can be removed from the temperature control table 8 without returning to the initial position. Moving side to side for cleaning increases cleaning efficiency.

Therefore, through the above structural design, the support 1 can drive the nozzle 2 to move along the surface of the temperature control table 8 , and the first air outlet 21 and the second air outlet 22 can simultaneously remove the particles on the temperature control table 8 and the substrate 9 .

The surface cleaning device further includes: a high-voltage discharge unit arranged inside the spray head 1 . The high-voltage discharge unit ionizes the gas input by the gas input unit and then sends it to the first air outlet 21 and the second air outlet 22 .

In the process of manufacturing the substrate 9, the problem of insufficient electrostatic treatment of the substrate 9 in the exposure machine may occur. During the multiple contact exposures between the substrate 9 and the mask, the static electricity of the mask itself is gradually increased, and the substrate 9 is also charged with static electricity, resulting in high occurrence of common defects. Therefore, after the gas is ionized by the high-voltage discharge unit, the air blown out from the first air outlet 21 and the second air outlet 22 is ionized air. The ion wind can not only clean the particles on the surfaces of the temperature control table 8 and the substrate 9 , but also remove static electricity from the surfaces of the temperature control table 8 and the substrate 9 .

The surface cleaning device further includes: at least one adsorption unit 4 . The adsorption unit 4 is configured to be disposed on the side of the temperature control platform 8 in the same direction as the moving direction of the spray head 2 to adsorb the particulate matter removed by the first air outlet 21 and the second air outlet 22 . For example, when the shower head 2 moves to one side of the temperature control table 8 , the adsorption unit 4 is arranged on one side of the temperature control table 8 . If the spray head 2 can move to one side of the temperature control table 8 or to the other side of the temperature control table 8 , one adsorption unit 4 can be provided on each side of the temperature control table 8 . In this way, when the nozzle 2 moves to one side of the temperature control table 8, the adsorption unit 4 on one side of the temperature control table 8 is turned on for adsorption; when the nozzle 2 moves to the other side of the temperature control table 8, the temperature control table is turned on The adsorption unit 4 on the other side of 8 performs adsorption.

Therefore, the adsorption unit 4 can adsorb the particles cleaned by the first air outlet 21 and the second air outlet 22, so as to prevent these particles from floating in the air and possibly falling back to the surface of the temperature control table 8 and the substrate 9. It is beneficial to improve the effect of removing particulate matter.

At least one first adsorption port 23 may also be provided on the first surface of the shower head 2 for adsorbing particulate matter on the surface of the temperature control platform 8 . Similarly, at least one second adsorption port 24 may also be provided on the second surface of the shower head 2 for adsorbing particles on the surface of the substrate 9 . In addition, the device further includes an air extraction unit, and at least one air outlet 28 is also provided on the surface of the spray head 2 to cooperate with the first adsorption port 23 and the second adsorption port 24 . The air outlets 28 may be provided on the surfaces of both ends of the spray head 2 . The air extraction unit communicates with the air outlet 28, and the air outlet 28 communicates with the first adsorption port 23 and the second adsorption port 24, respectively. During cleaning, the air extraction unit is turned on to extract air to generate negative pressure in the nozzle 2 , so that the first adsorption port 23 and the second adsorption port 24 can adsorb the particles on the surface of the temperature control table 8 and the substrate 9 .

Therefore, in addition to using the first air outlet 21 and the second air outlet 22 to clean the particulate matter, the first adsorption port 23 and the second adsorption port 24 can simultaneously adsorb the surface of the temperature control table 8 and the substrate 9 . The particles are further removed from the surfaces of the temperature control platform 8 and the substrate 9 .

Preferably, there is a first distance between the first air outlet 21 and the free end of the first surface of the nozzle 2 . The free end of the first surface of the shower head 2 is the end in the same direction as the moving direction of the shower head 2 . The first distance is such that the first air outlet 21 is not located at the edge of the first surface of the shower head 2 , but forms a platform with the free end of the first surface of the shower head 2 . Likewise, there is a second distance between the second air outlet 22 and the free end of the second surface of the spray head 2 . The free end of the second surface of the shower head 2 is the end in the same direction as the moving direction of the shower head 2 . The second distance is such that the second air outlet 22 is not located at the edge of the second surface of the spray head 2 , but forms a platform with the free end of the second surface of the spray head 2 .

If there is no such platform, the wind blown out from the first air outlet 21 and the second air outlet 22 is not blocked and guided by the platform, and after blowing directly to the surface of the temperature control table 8 and the substrate 9 respectively, changes the flow direction to form a hedge. The vortex is not conducive to cleaning the particles on the surface of the temperature control table 8 and the substrate 9 . Therefore, the platform formed by the above structural design makes the gas blown from the shower head 2 formed between the outlet surface of the first air outlet 21 and the surface of the temperature control table 8 , the outlet surface of the second air outlet 22 and the surface of the substrate 9 . The horizontal airflow layer is conducive to cleaning the particles on the surface of the temperature control table 8 or the substrate 9, and at the same time, the airflow ejected from the first air outlet 21 and the second air outlet 22 will not be turbulent, so that the temperature control table 8 can be removed more effectively. and particles and static electricity on the surface of the substrate 9 .

More preferably, as shown in FIG. 6 , the first surface of the spray head 2 is provided with at least one first guide groove 28 parallel to the moving direction of the spray head 2 . One end of the first guide groove 28 extends to the first air outlet 21 . The other end of the first guide groove 28 extends to the free end of the first surface of the temperature control platform 8 . Similarly, at least one second guide groove parallel to the moving direction of the spray head 2 is provided on the second surface of the spray head 2 . One end of the second guide groove extends to the second air outlet 22 . The other end of the second guide groove extends to the free end of the second surface of the temperature control platform 8 . The shapes of the first guide groove 28 and the second guide groove can be various. As shown in FIG. 7 , the cross-sectional shapes of the first guide grooves 28 and the second guide grooves are rectangular parallelepipeds. As shown in FIG. 8 , the cross-sectional shapes of the first guide groove 28 and the second guide groove are inverted triangles.

By arranging the first guide groove 28 and the second guide groove, the air blown out from the first air outlet 21 and the second air outlet 22 can be guided respectively, which is favorable for the airflow to flow in the direction of the movement of the nozzle 2 and reduces the airflow. turbulent phenomenon, so as to remove particles and static electricity from the surface of the temperature control table 8 and the substrate 9 more effectively.

The surface cleaning device further includes: a control unit. The control unit is electrically connected to the spray head 2 for controlling the wind power of the first air outlet 21 and the second air outlet 22 of the spray head 2 and/or the air temperature of the first air outlet 21 .

By setting the control unit, the wind power of the first air outlet 21 and the second air outlet 22 can be controlled according to the distribution of the particles on the temperature control table 8, and the particles on the surface of the temperature control table 8 and the substrate 9 can be effectively removed; The surface temperature of the temperature control table is determined, and the temperature of the air blown out from the first air outlet 21 is controlled, so that the surface of the temperature control table 8 can maintain the set surface temperature.

The surface cleaning device further includes: a particle detection unit. Wherein, the particle detection unit is electrically connected to the control unit for detecting particles on the surface of the temperature control table 8 and sending the position of the particles on the surface of the temperature control table 8 to the control unit. Then, the control unit can be used to control the nozzle head 2 to move to the position of the particulate matter to increase the wind power of the first air outlet 21 according to the position of the particulate matter. During the cleaning process, there may be residual particles in a certain position of the temperature control table 8. After the particle detection unit detects the position of the particles, the control unit can control the first air outlet 21 to be at this position during cleaning again. Increase the wind to blow away any remaining particles. The particle detection unit can detect particles in various ways, for example, by infrared detection, or by optical imaging, and so on. When the particle detection unit detects the particles by means of infrared, the particle detection unit may specifically include an infrared emission module 51 and an infrared reception module 52 . Specifically, in a preferred embodiment, the infrared emitting module 51 can be arranged on a support rod of the bracket 1, and the infrared receiving module 52 can be arranged on another support rod of the bracket 1, and is facing the infrared emitting module 51, In order to receive the infrared signal sent by the infrared transmitting module 51 . The infrared emitting module 51 and the infrared receiving module 52 at this position move with the movement of the bracket 1 , and can detect all positions on the surface of the temperature control platform 8 . In another preferred embodiment, the infrared emitting module 51 can be arranged at one end of the temperature control platform 8 , and the infrared receiving module 52 can be arranged at the other end of the temperature control platform 8 . This type of infrared transmitting module 51 needs to be arranged along one end of the temperature control table 8 , and the infrared receiving module 52 needs to be arranged along the other end of the temperature control table 8 to detect the entire surface of the temperature control table 8 . The particle detection unit can also issue an alarm to alert the operator. If residual particles are still detected at the same position of the temperature control table 8 after a limited number of cleanings (eg, two times), the operator can be alerted so that the operator can deal with the position of the temperature control table after shutdown.

Since the particles on the surface of the substrate 9 are under the action of gravity, after the surface cleaning device cleans it, the particles rarely remain, so a detection unit for inspecting the particles on the surface of the substrate 9 may not be provided. It should be understood that, according to specific circumstances, a detection unit for detecting particles on the surface of the substrate 9 may also be provided.

In order to better control the wind force, the surface cleaning device further includes: a wind force sensor 6 for detecting the magnitude of the wind force. The wind sensor 6 can be arranged near the first air outlet 21, so that the magnitude of the detected wind force is more accurate.

The surface cleaning device further includes: a temperature measuring unit 7 . The temperature measuring unit 7 is electrically connected to the control unit, and is used for measuring the temperature of the surface of the temperature control table 8 and sending the temperature of the surface of the temperature control table 8 to the control unit. Then the control unit is configured to adjust the air outlet temperature of the first air outlet 21 according to the temperature of the surface of the temperature control table 8 and the set temperature of the surface of the temperature control table 8 . Specifically, the temperature measuring unit 7 may use a temperature sensor. The position of the temperature measuring unit 7 on the spray head 2 can be set according to the actual situation. For example, the temperature measuring units 7 are arranged on both sides of the spray head 2 .

By setting the temperature measuring unit 7, the control unit can determine the difference between the measured temperature and the set temperature according to the actual temperature of the surface of the temperature control table 8, so that the temperature of the air out of the first air outlet 21 can be adjusted, thereby So that the surface of the temperature control table 8 can maintain the set temperature.

To sum up, in the surface cleaning device of the embodiment of the present invention, the first air outlet 21 is arranged on the first surface of the shower head 2 to remove the particulate matter on the surface of the temperature control table 8; Two air outlets 22 to remove the particles on the surface of the substrate 9; the moving support 1 drives the nozzle 2 to move, and the particles on the entire surface of the temperature control table 8 and the substrate 9 can be removed at the same time, so as to improve the production line utilization rate and Product yield; by setting a high-voltage discharge unit, after the gas is ionized, the wind blown from the first air outlet 21 and the second air outlet 22 is ionized wind, which can remove the static electricity on the surface of the temperature control table 8 and the substrate 9 at the same time; By setting the first adsorption port 23, the second adsorption port 24 and the adsorption unit 4, the particles on the surface of the temperature control table 8 and the substrate 9 can be adsorbed, which is beneficial to the cleaning effect of removing the particles; by setting the control unit, the particle detection unit and the temperature The measurement unit 7 can increase the wind force of the first air outlet 21 according to the position of the residual particles, and can also adjust the first air outlet according to the difference between the temperature of the surface of the temperature control table 8 and the set temperature of the surface 21 for the outlet air temperature.

Second Embodiment

The second embodiment of the present invention also discloses a temperature control station system. As shown in Figures 1 to 14, the temperature control station system includes: a temperature control station 8 and the above-mentioned surface cleaning device. The temperature control table 8 includes a plurality of liftable support pins 81 . The plurality of liftable support pins 81 are parallel to the surface of the temperature control table 8 so as not to affect the movement of the spray head 2 of the surface cleaning device. A plurality of liftable support pins 81 are used to support the substrate 9 . A support suction hole 811 is provided on the surface of the support substrate 9 of the support pin 81 . When the substrate is placed on the support pins 81 , the support suction holes 811 are opened to absorb the substrate 9 , so that the substrate 9 can be placed stably.

The temperature control table 8 also includes: a plurality of auxiliary support pins 82 that can be raised and lowered. The auxiliary support pins 82 are also used to support the substrate 9 and transfer the substrate 9 to the support pins 81 . The auxiliary support pin 82 is provided with auxiliary support suction holes. Likewise, when the substrate 9 is placed on the auxiliary support pins 82 , the auxiliary support suction holes are opened to absorb the substrate 9 , so that the substrate 9 can be placed stably. In specific use, the auxiliary support pin 82 can be raised, the auxiliary support suction hole can be opened, and the substrate 9 can be placed on the auxiliary support pin 82 . The support needle 81 is raised to a suitable height so that the height of the spray head 2 is between the support needle 81 and the surface of the temperature control table 8 (the height of the support needle 81 is lower than that of the auxiliary support needle 82). The auxiliary support pin 82 is lowered to the height of the support pin 81, so that the support pin 81 supports the substrate 9, the auxiliary support adsorption hole is closed, the support adsorption hole 811 is opened, and the auxiliary support pin 82 continues to be lowered below the surface of the temperature control table 8, thereby realizing the The substrate 9 is transferred from the auxiliary support pins 82 to the support pins 81 .

For the specific structure of the surface cleaning device, reference may be made to the structure of the surface cleaning device in the above-mentioned embodiment, which will not be repeated here. The first surface of the spray head 2 of the surface cleaning device faces the surface of the temperature control table 8, then when the substrate 9 is carried on the support pins 81 of the temperature control table 8, the second surface of the spray head 2 faces the substrate 9, so that the The first air outlet 21 on the first surface of the shower head 2 emits air to the surface of the temperature control table 8 , and the second air outlet 22 on the second surface of the shower head 2 emits air to the surface of the substrate 9 .

The temperature control station 8 may also be provided with a temperature control station temperature measurement unit 83 and a temperature adjustment unit 84 . A plurality of temperature control station temperature measurement units 83 may be evenly distributed inside the temperature control station 8 . The temperature measured by the temperature console temperature measuring unit 83 is generally the temperature inside the temperature console 8 . The temperature adjustment unit 84 can adjust the temperature inside the temperature control table 8 because it is arranged inside the temperature control table 8 , and at the same time, the temperature adjustment unit 84 can adjust the temperature inside the temperature control table 8 due to the heat transfer between the inside and outside. It assists in adjusting the temperature of the surface of the temperature control table 8 . The temperature adjustment unit 84 can adjust the temperature inside the temperature control station 8 according to the difference between the temperature measured by the temperature control station temperature measurement unit 83 and the set temperature of the surface. The temperature adjustment unit 84 can also adjust the temperature of the surface of the temperature control table 8 according to the control instruction of the control unit of the surface cleaning device, which is beneficial to make the temperature of the surface of the temperature control table 8 consistent with the set temperature of the surface. Specifically, the temperature adjustment unit 84 can be in the form of water circulation heat transfer.

To sum up, in the temperature control table system of the embodiment of the present invention, the nozzle 2 can be positioned between the temperature control table 8 and the substrate 9 through the lifting and lowering of the support needle 81 , and the substrate can be stably placed through the support suction hole 811 of the support needle 81 . 9; Since the temperature control station system includes the surface cleaning device of the above-mentioned embodiment, it also has the beneficial effects of the surface cleaning device of the above-mentioned embodiment; The temperature adjustment unit 84 adjusts the temperature of the inside and the surface of the temperature console 8 .

Third Embodiment

The third embodiment of the present invention also discloses a surface cleaning method. This surface cleaning method is used in the temperature console system described above. As shown in Figure 15, the method specifically includes the following steps:

Step S1501: Elevate a plurality of liftable support pins of the temperature control platform.

Through this step, the support needle is separated from the surface of the temperature control table, and the height of the support needle is higher than that of the spray head of the surface cleaning device, so that the spray head can move between the support needle and the surface of the temperature control table.

If the temperature control table further includes auxiliary support pins, the auxiliary support pins are raised before the plurality of liftable support pins of the temperature control table are raised, and the height of the auxiliary support pins is higher than that of the support pins.

Step S1502: Place the substrate on the support pins.

Specifically, in a preferred embodiment, the substrate can be placed on the support pin by a robot, and the support adsorption hole of the support pin can be opened to adsorb the substrate.

In addition, if the temperature control platform further includes auxiliary support pins, in another preferred embodiment, the substrate can be placed on the raised auxiliary support pins by a robot hand, and the auxiliary support adsorption holes on the auxiliary support pins can be opened. Adsorb the substrate so that the substrate is firmly placed on the auxiliary support pins. The height of the auxiliary support pin is higher than that of the support pin. After placing the substrate, lower the height of the auxiliary support pin until it is the same as the height of the support pin, then the substrate is placed on the support pin and the auxiliary support pin at the same time. The auxiliary support adsorption hole of the auxiliary support pin is closed, and the support adsorption hole of the support pin is opened, and the substrate is adsorbed through the support adsorption hole of the support pin. Lower the height of the auxiliary support pin below the surface of the temperature console to complete the transfer of the substrate from the auxiliary support pin to the support pin.

Step S1503: Turn on the gas input unit of the surface cleaning device, the first air outlet of the shower head, and the second air outlet of the shower head.

Through this step, the gas input unit sends gas to the shower head, so that the first air outlet and the second air outlet can discharge air for cleaning.

Step S1504: Open the support of the surface cleaning device, so that the support drives the nozzle on the support to move along the surface of the temperature control platform.

Through this step, the bracket is opened, and the movement of the bracket drives the nozzle to move along the surface of the temperature control table, so that the first air outlet discharges air to the surface of the temperature control table along the moving direction of the nozzle, and the second air outlet discharges air to the surface of the substrate along the moving direction of the nozzle , so that the nozzle can clean the entire surface of the temperature control table and the substrate. The bracket can move in only one direction, or it can reciprocate in two opposite directions. When the support moves back and forth, after the substrate flows away, it can move to the opposite direction from the position of the support to clean the next substrate. It should be understood that the step S1504 and the step S1503 can also be performed simultaneously.

If a high-voltage discharge unit is further provided inside the shower head, after step S1502, the high-voltage discharge unit may be turned on to ionize the input gas, so as to remove static electricity while cleaning particulate matter.

If the surface cleaning device further includes an air extraction unit, and the first surface and the second surface of the nozzle are further provided with a first adsorption port and a second adsorption port, after step S1502, the air extraction unit, the first adsorption port can also be turned on. The adsorption port and the second adsorption port are cleaned by adsorption.

If the surface cleaning device further includes an adsorption unit, after step S1502, the adsorption unit in the same direction as the moving direction of the nozzle can also be turned on, so that the adsorption unit adsorbs the particles cleaned by the first air outlet and the second air outlet.

If the surface cleaning device further includes a control unit, a particle detection unit, and a temperature measurement unit, after step S1502, the above-mentioned units can be turned on at the same time, so that during the cleaning process, the particle detection unit can detect the temperature of the temperature control station in real time. Residual particulate matter on the surface, so that the control unit can increase the wind power of the first air outlet and the second air outlet at the position of the residual particulate matter during the next cleaning. The temperature measuring unit can measure the temperature of the surface of the temperature control table in real time, so that the control unit can adjust the air temperature of the first air outlet and the second air outlet in real time, so as to make the temperature of the surface of the temperature control table match the setting of the surface. The temperature is the same.

If the temperature control station is provided with a temperature control station temperature measurement unit and a temperature adjustment unit, after step S1502, the temperature control station temperature measurement unit and the temperature adjustment unit may be simultaneously turned on. Then in the process of surface cleaning, the temperature inside the temperature control table is measured by the temperature measurement unit of the temperature control table and the temperature difference between the set temperature of the surface is measured, so that the temperature inside the temperature control table is adjusted by the temperature adjustment unit; The temperature adjustment unit can also adjust the temperature of the surface of the temperature control table according to the control instruction of the control unit of the surface cleaning device, which is beneficial to make the temperature of the surface of the temperature control table consistent with the set surface temperature.

To sum up, the surface cleaning method of the embodiment of the present invention, because the temperature control table system of the above-mentioned embodiment is adopted, can remove the particles on the entire surface of the temperature control table and the substrate at the same time, so as to improve the production line utilization rate and product yield rate .

The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the various embodiments may be referred to each other.

Although preferred embodiments of the embodiments of the present invention have been described, additional changes and modifications to these embodiments may be made by those skilled in the art once the basic inventive concepts are known. Therefore, the appended claims are intended to be construed to include the preferred embodiments as well as all changes and modifications that fall within the scope of the embodiments of the present invention.

Finally, it should also be noted that in this document, relational terms such as first and second are used only to distinguish one entity or operation from another, and do not necessarily require or imply these entities or that there is any such actual relationship or sequence between operations. Moreover, the terms "comprising", "comprising" or any other variation thereof are intended to encompass non-exclusive inclusion, such that a process, method, article or terminal device comprising a list of elements includes not only those elements, but also a non-exclusive list of elements. other elements, or also include elements inherent to such a process, method, article or terminal equipment. Without further limitation, an element defined by the phrase "comprises a..." does not preclude the presence of additional identical elements in the process, method, article or terminal device comprising said element.

The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited to this. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention. should be included within the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims (9)

1. A surface cleaning device, characterized in that it comprises: a support movable along the surface of a temperature control platform, a spray head connected to the support, and a gas input unit for delivering gas to the spray head; The spray head is arranged above the temperature control table, the spray head includes a first surface and a second surface arranged opposite to each other, and at least one first air outlet is arranged on the first surface of the spray head; the second surface of the spray head at least one second air outlet is arranged on it; The first air outlet discharges air to the surface of the temperature control table along the moving direction of the nozzle; The second air outlet discharges air toward the surface of the substrate along the moving direction of the nozzle; There is a first distance between the first air outlet and the free end of the first surface of the spray head, and the free end of the first surface of the spray head is the end in the same direction as the moving direction of the spray head; There is a second distance between the second air outlet and the free end of the second surface of the spray head, and the free end of the second surface of the spray head is the end in the same direction as the moving direction of the spray head. 2 . The device according to claim 1 , further comprising: a high-voltage discharge unit disposed inside the showerhead, wherein the high-voltage discharge unit ionizes the gas input from the gas input unit and then inputs it into the first outlet. 3 . air outlet and second air outlet. 3 . The device according to claim 1 , wherein at least one first adsorption port is provided on the first surface of the spray head; and at least one second adsorption port is provided on the second surface of the spray head. 4 . 4 . The device according to claim 1 , further comprising: at least one adsorption unit, and at least one of the adsorption units is configured to be arranged on a side of the temperature control platform that is in the same direction as the moving direction of the spray head. 5 . side, adsorbing the particulate matter removed by the first air outlet and the second air outlet. 5 . The device according to claim 1 , wherein at least one first guide groove parallel to the moving direction of the spray head is provided on the first surface of the spray head. One end extends to the first air outlet, and the other end of the first guide groove extends to the free end of the first surface of the temperature control platform; The second surface of the spray head is provided with at least one second guide groove parallel to the moving direction of the spray head, one end of the second guide groove extends to the second air outlet, the second guide groove The other end of the guide groove extends to the free end of the second surface of the temperature control platform. 6 . The device according to claim 1 , further comprising: a control unit, the control unit is electrically connected to the spray head, and is used to control the first air outlet and the second air outlet of the spray head. 7 . The wind power of the second air outlet and/or the air outlet temperature of the first air outlet. 7. The device according to claim 6, further comprising: a particle detection unit and/or a temperature measurement unit, wherein, The particle detection unit is electrically connected to the control unit for detecting particles on the surface of the temperature control table, and sending the position of the particles on the surface of the temperature control table to the control unit; the control unit for increasing the wind force of the first air outlet when the nozzle moves to the position of the particles according to the position of the particles; The temperature measurement unit is electrically connected with the control unit, and is used for detecting the temperature of the surface of the temperature control table, and sending the temperature of the surface of the temperature control table to the control unit; the control unit is used for The air outlet temperature of the first air outlet is adjusted according to the temperature of the surface of the temperature control table and the set temperature of the surface of the temperature control table. 8. A temperature control station system, characterized in that, comprising: a temperature control station and the surface cleaning device according to any one of claims 1-7; The temperature control table includes a plurality of liftable support pins, the plurality of liftable support pins are parallel to the surface of the temperature control table, and the plurality of liftable support pins are used to support the substrate; The first surface of the spray head of the surface cleaning device faces the surface of the temperature control table. 9. A surface cleaning method for use in the temperature console system of claim 8, the method comprising: Elevating a plurality of liftable support pins of the temperature control table to separate the support pins from the surface of the temperature control table, and to make the height of the support pins higher than the height of the spray head of the surface cleaning device; placing a substrate on the support pins; Turn on the gas input unit of the surface cleaning device, the first air outlet of the shower head and the second air outlet of the shower head, so that the gas input unit delivers gas to the shower head; Open the bracket of the surface cleaning device, so that the bracket drives the nozzle on the bracket to move along the surface of the temperature control table, and the first air outlet emits air to the surface of the temperature control table along the moving direction of the nozzle, so The second air outlet discharges air toward the surface of the substrate along the moving direction of the nozzle.