CN104818512A - Device and method for preparing magnetically soft alloy continuous films through electric deposition of soluble separated anodes - Google Patents
Device and method for preparing magnetically soft alloy continuous films through electric deposition of soluble separated anodes Download PDFInfo
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Abstract
Description
技术领域technical field
本发明属于电化学沉积领域,尤其涉及一种可溶性分离阳极电沉积制备软磁合金连续薄膜的装置及方法。The invention belongs to the field of electrochemical deposition, and in particular relates to a device and a method for preparing a soft magnetic alloy continuous thin film by electrodeposition of a soluble separated anode.
背景技术Background technique
软磁合金薄膜是在弱磁场下具有低矫顽力和高磁导率的磁性材料。软磁材料易于磁化,也易于退磁,广泛用于电工设备和电子设备中,以及磁场屏蔽领域中。Soft magnetic alloy thin film is a magnetic material with low coercive force and high magnetic permeability under weak magnetic field. Soft magnetic materials are easy to magnetize and demagnetize, and are widely used in electrical equipment and electronic equipment, as well as in the field of magnetic field shielding.
软磁合金制备方法有轧制、磁控溅射、电沉积,其中电沉积制备铁镍合金设备简单、成本低、操作方便。然而在连续电沉积铁镍合金薄膜过程中,由于阴极不断沉积消耗电镀液中的金属离子,造成镀液中金属离子浓度降低,进而造成镀层金属含量比例失调,使生产出的连续带材成分含量不稳定。目前的连续电沉积设备通过外加金属离子补充镀液中减少的金属离子。美国专利US5360525和US4076597介绍了一种补充金属离子的方法,通过在酸中溶解金属得到金属离子,向镀液中补充金属离子,这种方法需要大量强酸溶解金属,对环境、产品和人身安全有不利影响。同时,根据中国专利CN100564606C金属薄膜连续电沉积装置及其方法介绍,当镀液循环电镀一段时间后,镀液金属离子就会下降,通过不同种类金属离子补液装置对电镀槽中的电镀液补充金属离子电镀液,达到金属离子浓度平衡。然而,这种补充金属离子的方法需要在补液装置中不停溶解各种金属盐类,工艺复杂和冗长,设备要求高。The preparation methods of soft magnetic alloy include rolling, magnetron sputtering and electrodeposition, among which the preparation of iron-nickel alloy by electrodeposition is simple, low in cost and easy to operate. However, in the process of continuous electrodeposition of iron-nickel alloy film, the metal ion concentration in the plating solution is reduced due to the continuous deposition of the cathode and the consumption of metal ions in the plating solution, which in turn causes the imbalance of the metal content of the coating, making the continuous strip produced. unstable. The current continuous electrodeposition equipment supplements the reduced metal ions in the plating solution by adding metal ions. U.S. Patents US5360525 and US4076597 have introduced a method of replenishing metal ions, which are obtained by dissolving metals in acid and replenishing metal ions to the plating solution. This method requires a large amount of strong acid to dissolve metals, which is harmful to the environment, products and personal safety. Negative Effects. At the same time, according to the introduction of the Chinese patent CN100564606C metal film continuous electrodeposition device and its method, when the plating solution is circulated and electroplated for a period of time, the metal ions in the plating solution will drop, and the electroplating solution in the electroplating tank will be supplemented with metal by means of different types of metal ion replenishment devices. Ion plating solution, to achieve metal ion concentration balance. However, this method of supplementing metal ions needs to continuously dissolve various metal salts in the liquid replenishing device, the process is complicated and lengthy, and the equipment requirements are high.
发明内容Contents of the invention
为了克服现有连续电沉积装置存在的技术问题,本发明提供了一种可溶性分离阳极电沉积制备软磁合金连续薄膜的装置及方法。所采用的技术方案为:选择合适的阴极材料,使用可溶性阳极,通过阳极分离并联排列,调节支路阳极的电流、电压,进而控制支路阳极的溶解量等于阴极金属离子沉积量,达到阴极沉积量与阳极溶解量平衡,保持镀液的金属离子含量稳定,生产出性能优异、成分含量稳定的连续软磁薄膜的目的。In order to overcome the technical problems existing in the existing continuous electrodeposition devices, the present invention provides a device and method for preparing soft magnetic alloy continuous films by electrodeposition of soluble separated anodes. The technical scheme adopted is: select the appropriate cathode material, use soluble anodes, separate and arrange the anodes in parallel, adjust the current and voltage of the branch anodes, and then control the dissolution amount of the branch anodes to be equal to the deposition amount of cathode metal ions to achieve cathode deposition. The purpose of maintaining the balance between the amount and the dissolved amount of the anode, keeping the metal ion content of the plating solution stable, and producing a continuous soft magnetic film with excellent performance and stable component content.
一种可溶性分离阳极电沉积制备软磁合金连续薄膜的装置,包括容纳电镀液的电镀槽;可以循环转动的环形金属阴极;可溶性阳极;电源装置;电机传动装置;循环装置、过滤装置;温度控制装置;剥离装置;清洗装置;钝化装置;烘干装置;张力控制调节装置和收卷装置,其特征在于电沉积过程中使用的阴极是表面镀氮化钛,背面与电绝缘高分子薄膜贴合形成绝缘层的不锈钢带、钛带形成的环形薄带。A device for preparing a continuous film of soft magnetic alloy by electrodeposition of a soluble separated anode, including an electroplating tank containing an electroplating solution; a circular metal cathode that can be rotated circularly; a soluble anode; a power supply device; a motor transmission device; a circulation device, a filter device; temperature control Device; peeling device; cleaning device; passivation device; drying device; An annular thin strip formed of stainless steel strips and titanium strips combined to form an insulating layer.
进一步,电沉积过程中,阳极材料是纯铁、纯镍、纯钴中的任两种,不同金属阳极构成分离阳极,交替排列,每种阳极形成一个独立阳极,不同金属阳极又并联构成综合阳极;分离阳极通过单独电源或者多电源控制,不同支路阳极的电流、电压可调。Further, in the electrodeposition process, the anode material is any two of pure iron, pure nickel, and pure cobalt. Different metal anodes form separate anodes and are arranged alternately. Each anode forms an independent anode, and different metal anodes are connected in parallel to form a comprehensive anode. ; Separated anodes are controlled by a single power supply or multiple power supplies, and the current and voltage of different branch anodes are adjustable.
进一步,其特征在于阴极和阳极之间设置有一离子通过性隔离膜,该膜与阴极带平行布置;通过循环泵使镀液在阴极和离子通过性隔离膜之间水平流动。Further, it is characterized in that an ion-permeable isolation membrane is arranged between the cathode and the anode, and the membrane is arranged in parallel with the cathode belt; the plating solution is horizontally flowed between the cathode and the ion-permeable isolation membrane by a circulation pump.
利用所述的装置制备软磁合金连续薄膜的方法,其特征在于循环运动的环形氮化钛阴极下端浸在镀液中,调节并联支路可溶性阳极电流、电压,控制支路阳极按镀层金属比例溶解,金属离子在离子通过性隔离膜和循环泵作用下混合均匀,在阴极上沉积一层合金薄膜,薄膜经过剥离、清洗、钝化、烘干后收卷成材。The method for preparing a soft magnetic alloy continuous thin film using the device is characterized in that the lower end of the circularly moving titanium nitride cathode is immersed in the plating solution, the parallel branch soluble anode current and voltage are adjusted, and the branch anode is controlled according to the metal ratio of the coating layer. Dissolving, the metal ions are evenly mixed under the action of the ion-permeable isolation membrane and the circulation pump, and a layer of alloy film is deposited on the cathode. The film is stripped, cleaned, passivated, and dried, and then rolled into a material.
根据上述目的,本发明采用了以下技术措施:According to above-mentioned purpose, the present invention adopts following technical measures:
1.为了生产连续的软磁薄膜,需要能够从阴极带上轻松剥离下电沉积层来,这就要求阴极带材表面光滑整洁,耐腐蚀性好,镀层剥离性好。本发明使用厚度为0.05~0.5mm环形不锈钢薄带和环形钛薄带,在其表面镀一层0.0005~0.05mm厚的氮化钛膜,背面与电绝缘高分子薄膜贴合形成绝缘层。环形不锈钢和钛带是通过带材首尾焊接而成,焊缝处存在缺陷,镀层不容易剥落。镀氮化钛的目的一是为了掩蔽环形带焊缝的缺陷,二是氮化钛上的镀层比不锈钢、钛上的镀层更容易剥离下来。1. In order to produce a continuous soft magnetic film, it is necessary to be able to easily peel off the electrodeposited layer from the cathode strip, which requires a smooth and clean surface of the cathode strip, good corrosion resistance, and good peelability of the coating. The invention uses an annular stainless steel strip and an annular titanium thin strip with a thickness of 0.05-0.5mm, coats a layer of titanium nitride film with a thickness of 0.0005-0.05mm on the surface, and forms an insulating layer by laminating the back side with an electrically insulating polymer film. The ring-shaped stainless steel and titanium strips are welded end-to-end. There are defects in the welds, and the coating is not easy to peel off. The purpose of titanium nitride plating is to mask the defects of the weld seam of the annular belt, and the second is that the coating on titanium nitride is easier to peel off than the coating on stainless steel and titanium.
2.本发明使用的可溶性阳极材料是纯铁、纯镍、纯钴,不同金属阳极交替排列在阳极槽里,两个阳极槽之间有绝缘材料隔离。同时不同金属阳极并联连接,调节并联电路中铁阳极和镍阳极的电流、电压,就能控制不同支路阳极的溶解速度。为了控制并联支路阳极的电流、电压,使用两种供电方式,一种使用单独电源,在并联支路阳极上设置电流、电压调节装置,包括滑动变阻器与电流表;另一种直接使用两个电源分别调节并联支路阳极的电流、电压,使第一可溶性阳极的溶解量等于阴极上此种金属沉积量,第二可溶性阳极的溶解量等于阴极上此种金属沉积量。2. The soluble anode materials used in the present invention are pure iron, pure nickel, and pure cobalt, and different metal anodes are alternately arranged in the anode tank, and insulating materials are separated between the two anode tanks. At the same time, different metal anodes are connected in parallel, and the dissolution rate of different branch anodes can be controlled by adjusting the current and voltage of the iron anode and nickel anode in the parallel circuit. In order to control the current and voltage of the anode of the parallel branch, two power supply methods are used, one uses a separate power supply, and a current and voltage regulating device is installed on the anode of the parallel branch, including a sliding rheostat and an ammeter; the other directly uses two power supplies Adjust the current and voltage of parallel branch anodes respectively, so that the dissolved amount of the first soluble anode is equal to the amount of metal deposited on the cathode, and the dissolved amount of the second soluble anode is equal to the amount of deposited metal on the cathode.
3.合金镀层中的成分含量主要由镀液成分、工艺参数决定。为了获得含铁量5%~95%的铁镍合金镀层,可以通过改变镀液成分和工艺参数得到,电镀液的成分和参数包括:硫酸镍20~300g/L,硫酸亚铁5g~120g/L,20~60g/L的硼酸,柠檬酸钠5~50g/L,抗坏血酸1g~15/L,十二烷基硫酸钠0.1~0.5g/L,糖精1~5g/L,苯亚磺酸钠0.1~0.6g/L,丁炔二醇0.1~0.8g/L,pH为1.5~4.5,温度为20~65℃,电流密度为1~100A/dm2。为了得到镀层铁镍含量比例稳定的合金薄膜,需要保持上述镀液中各成分浓度保持不变,这就要求铁阳极的溶解量等于阴极上铁的沉积量,镍阳极的溶解量等于阴极上镍的沉积量。并联支路铁阳极与镍阳极的电流之比的范围为1:17~20:1。3. The composition content in the alloy coating is mainly determined by the composition of the plating solution and the process parameters. In order to obtain an iron-nickel alloy coating with an iron content of 5% to 95%, it can be obtained by changing the composition and process parameters of the plating solution. The composition and parameters of the electroplating solution include: nickel sulfate 20-300g/L, ferrous sulfate 5g-120g/L L, 20-60g/L boric acid, sodium citrate 5-50g/L, ascorbic acid 1g-15/L, sodium lauryl sulfate 0.1-0.5g/L, saccharin 1-5g/L, benzenesulfinic acid Sodium 0.1-0.6g/L, butynediol 0.1-0.8g/L, pH 1.5-4.5, temperature 20-65°C, current density 1-100A/dm 2 . In order to obtain an alloy film with a stable iron-nickel content ratio in the coating, it is necessary to keep the concentration of each component in the above plating solution constant, which requires that the amount of dissolved iron in the anode is equal to the amount of iron deposited on the cathode, and the amount of dissolved nickel in the anode is equal to the amount of nickel on the cathode. amount of deposition. The current ratio of the parallel branch iron anode to nickel anode ranges from 1:17 to 20:1.
并联支路阳极电流之比的计算方法如下:The calculation method of the ratio of the anode current of the parallel branch is as follows:
W第一可溶性阳极—镀层中第一可溶性阳极金属的质量分数W first soluble anode - the mass fraction of the first soluble anode metal in the coating
W第二可溶性阳极—镀层中第二可溶性阳极金属的质量分数W second soluble anode - the mass fraction of the second soluble anode metal in the coating
R第一可溶性阳极—第一可溶性阳极的电化当量R the first soluble anode —the electrochemical equivalent of the first soluble anode
R第二可溶性阳极—第二可溶性阳极的电化当量 RSecond soluble anode —The electrochemical equivalent of the second soluble anode
4.为了消除交替排列的不同金属阳极溶解时造成的镀液局部金属离子浓度差异,本发明在阴极与阳极之间放置一与阴极带平行的离子透过性隔离膜,该膜可以透过可溶性阳极溶解的金属离子,不同金属离子经过离子隔离膜时混合均匀,并且该膜还有过滤杂质的作用。同时使用循环水泵使镀液在阴极带与离子透过性隔离膜之间水平流动,消除金属离子浓度差异的同时带走阴极上产生的气体。4. In order to eliminate the difference in local metal ion concentration of the plating solution caused by the dissolution of alternately arranged different metal anodes, the present invention places an ion-permeable isolation membrane parallel to the cathode band between the cathode and the anode, and the membrane can pass through soluble The metal ions dissolved in the anode and different metal ions are mixed evenly when passing through the ion isolation membrane, and the membrane also has the function of filtering impurities. At the same time, a circulating water pump is used to make the plating solution flow horizontally between the cathode belt and the ion-permeable isolation membrane, so as to eliminate the difference in metal ion concentration and take away the gas generated on the cathode.
附图说明Description of drawings
图1为本发明提供的用于软磁合金薄膜连续电沉积的装置示意图Fig. 1 is the device schematic diagram that is used for the continuous electrodeposition of soft magnetic alloy film provided by the present invention
图2为电镀槽示意图Figure 2 is a schematic diagram of the electroplating tank
图3为单电源分离并联阳极电路示意图Figure 3 is a schematic diagram of a single power supply separated parallel anode circuit
图4为双电源分离并联阳极电路示意图Figure 4 is a schematic diagram of a dual power supply separated parallel anode circuit
具体实施方式Detailed ways
现在结合附图和具体实施例对本发明做详细说明:The present invention is described in detail in conjunction with accompanying drawing and specific embodiment now:
一种软磁合金薄膜连续电沉积装置,如图1、图2、图3、图4中所示,其中1为第一支撑传送辊、4为第二支撑传送辊、5为第三支撑传送辊、6为第四支撑传送辊,2为石墨阴极导电辊,3为环形氮化钛阴极带,7为电镀槽,8为电镀溶液,9为镀液进水口,10为镀液出水口,11为阳极过滤网,12离子透过性隔离膜,13为阳极槽,14为循环水泵,15为温度控制装置,16为过滤器,17为镀层剥离辊,21为镀层清洗、钝化装置,包括清洗液18,储液箱19,钝化液20和支撑转动辊,22为烘干装置,23为第一压力导辊、24为第二压力导辊、25为第三压力导辊,26为张力传感器,27为张力控制器,28为磁粉耦合器,29为收卷辊,30为石墨导电板,31为石墨导电棒,32第一可溶性阳极,33为第二可溶性阳极,34为电源导线,35为电镀电源,36为电流、电压调节装置。A soft magnetic alloy thin film continuous electrodeposition device, as shown in Figure 1, Figure 2, Figure 3, and Figure 4, wherein 1 is the first supporting conveying roller, 4 is the second supporting conveying roller, and 5 is the third supporting conveying roller Roller, 6 is the fourth support transfer roller, 2 is the graphite cathode conductive roller, 3 is the annular titanium nitride cathode belt, 7 is the electroplating tank, 8 is the electroplating solution, 9 is the water inlet of the plating solution, 10 is the water outlet of the plating solution, 11 is an anode filter, 12 is an ion-permeable isolation membrane, 13 is an anode tank, 14 is a circulating water pump, 15 is a temperature control device, 16 is a filter, 17 is a coating stripping roller, 21 is a coating cleaning and passivation device, Including cleaning solution 18, liquid storage tank 19, passivation solution 20 and supporting rotating roller, 22 is a drying device, 23 is a first pressure guide roller, 24 is a second pressure guide roller, 25 is a third pressure guide roller, 26 is a tension sensor, 27 is a tension controller, 28 is a magnetic powder coupler, 29 is a winding roller, 30 is a graphite conductive plate, 31 is a graphite conductive rod, 32 is the first soluble anode, 33 is the second soluble anode, 34 is the power supply Wire, 35 is an electroplating power supply, and 36 is a current and voltage regulating device.
参考图1、图2、图3和图4,电镀溶液注入到电镀槽中,环形阴极套在支撑传送辊作电沉积阴极,阴极带下端浸在电镀溶液里,保证阴极带下端保持水平。在阳极槽里放入阳极导电装置石墨板、石墨棒,放入第一可溶性阳极、第二可溶性阳极,在阳极上端加过滤网和离子透过性隔离膜,石墨导电辊紧贴环形阴极带的上表面连接电源的负极,阳极导电装置连接电源正极,电源正极与阳极之间连接电流、电压调节装置。打开循环水泵,温度控制装置和过滤器,一段时间后电镀溶液达到设定温度。开启步进电机,设置参数,控制阴极循环转动速度。打开电源,使用电流、电压调节装置调节铁阳极和镍阳极的电流、电压,在阴极上电沉积一层合金镀层,当合金镀层转动到剥离辊时,剥离镀层,再经过清洗钝化装置、烘干装置得到干燥整洁的镀层,最后通过张力控制系统,包括压力导辊、张力传感器和张力控制器控制薄膜张力恒定,在磁粉耦合器、收卷辊组成的收卷装置上卷曲成材。环形阴极带循环运动,可溶性阳极不断溶解补充金属离子,镀层不断剥离,卷曲成材,这样就形成了连续的软磁合金薄膜带材。Referring to Fig. 1, Fig. 2, Fig. 3 and Fig. 4, the electroplating solution is injected into the electroplating tank, the annular cathode is set on the supporting conveying roller as the electrodeposition cathode, and the lower end of the cathode strip is immersed in the electroplating solution to ensure that the lower end of the cathode strip remains horizontal. Put the anode conductive device graphite plate and graphite rod in the anode tank, put the first soluble anode and the second soluble anode, add a filter screen and an ion-permeable isolation membrane on the upper end of the anode, and the graphite conductive roller is close to the ring cathode belt. The upper surface is connected to the negative pole of the power supply, the anode conductive device is connected to the positive pole of the power supply, and the current and voltage regulating device is connected between the positive pole of the power supply and the anode. Turn on the circulating water pump, temperature control device and filter, and the electroplating solution reaches the set temperature after a period of time. Turn on the stepper motor, set parameters, and control the rotation speed of the cathode cycle. Turn on the power supply, adjust the current and voltage of the iron anode and nickel anode with the current and voltage regulating device, and deposit a layer of alloy coating on the cathode. The drying device obtains a dry and clean coating, and finally controls the tension of the film to be constant through the tension control system, including pressure guide rollers, tension sensors and tension controllers, and winds the film on the winding device composed of magnetic powder coupler and winding roller. The ring-shaped cathode belt circulates, the soluble anode continuously dissolves and replenishes metal ions, and the coating layer is continuously peeled off and curled into a material, thus forming a continuous soft magnetic alloy thin film strip.
本发明使用厚度为0.05~0.5mm环形不锈钢薄带和环形钛薄带,在其表面镀一层0.0005~0.05mm厚的氮化钛膜,背面与电绝缘高分子薄膜贴合形成绝缘层,镀氮化钛目的是掩蔽环形带的焊缝和更加容易剥离镀层部分支撑导辊会浸在镀液中,这就要求导辊不与镀液发生化学腐蚀和电化学反应,并且在通电条件下,环形金属带会产生热量,这就要求导辊有一定得耐热性能,本发明中的制作导辊的材料使用的聚四氟乙烯。步进电机与支撑环形阴极的一个支撑转动辊相连。The present invention uses an annular stainless steel thin strip and an annular titanium thin strip with a thickness of 0.05-0.5mm, and coats a layer of titanium nitride film with a thickness of 0.0005-0.05mm on the surface, and the back side is bonded with an electrically insulating polymer film to form an insulating layer. The purpose of titanium nitride is to cover the welding seam of the endless belt and make it easier to peel off the coating. Part of the supporting guide roller will be immersed in the plating solution, which requires that the guide roller does not undergo chemical corrosion and electrochemical reaction with the plating solution, and under the condition of power on, Endless metal belt can generate heat, and this just requires guide roller to have certain heat resistance, the polytetrafluoroethylene that the material of making guide roller among the present invention uses. The stepper motor is connected to a supporting rotating roller supporting the annular cathode.
使用导电性良好的石墨辊做阴极导电介质,石墨辊的位置可以上下调节,保证石墨辊表面与阴极带上表面贴合紧密,石墨辊表面抛光,发生相对运动时不会对阴极带造成划伤,在石墨辊一端加一个碳刷,电源负极与碳刷连接给阴极通电。Use a graphite roller with good conductivity as the cathode conductive medium. The position of the graphite roller can be adjusted up and down to ensure that the surface of the graphite roller is closely attached to the upper surface of the cathode belt. The surface of the graphite roller is polished so that the cathode belt will not be scratched when relative movement occurs. , A carbon brush is added at one end of the graphite roller, and the negative electrode of the power supply is connected to the carbon brush to energize the cathode.
阳极导电装置由石墨板和石墨棒组成,石墨棒与石墨板一头连接,确保导电良好,另一头延伸到镀槽外面与电源正极连接,可溶性第一阳极和第二阳极交替排列在石墨板上,浸在电镀溶液中。The anode conductive device is composed of a graphite plate and a graphite rod. The graphite rod is connected to the graphite plate at one end to ensure good electrical conductivity. The other end extends out of the plating tank to connect with the positive electrode of the power supply. The soluble first anode and the second anode are alternately arranged on the graphite plate. Immerse in the plating solution.
为了阻止阳极溶解产生的杂质进入镀层,在阴阳极之间加涤纶过滤网,并且在循环系统中加一个过滤器对镀液进行过滤,定期对过滤装置进行清理。在循环系统中加一个温度控制装置保持镀液温度恒定,在一个储液箱中加入加热器、热电偶,加热器和热电偶与温度控制器相连,在温度控制器上设定和调节温度值。In order to prevent the impurities produced by the dissolution of the anode from entering the coating, a polyester filter is added between the anode and cathode, and a filter is added to the circulation system to filter the plating solution, and the filter device is cleaned regularly. Add a temperature control device in the circulation system to keep the temperature of the plating solution constant, add a heater and a thermocouple in a liquid storage tank, connect the heater and thermocouple to the temperature controller, set and adjust the temperature value on the temperature controller .
阴阳极间距离可以在5mm~100mm之间调节,由于可溶性阳极溶解造成镀液出现金属离子局部浓度差异,在阴极和阳极之间加一离子透过性隔离膜,不同金属离子经过离子透过性隔离膜时混合均匀。The distance between the cathode and anode can be adjusted between 5mm and 100mm. Due to the dissolution of the soluble anode, there are local differences in the concentration of metal ions in the plating solution. An ion-permeable isolation membrane is added between the cathode and the anode, and different metal ions pass through the ion-permeable separator. Mix well while isolating the membrane.
循环水泵使镀液在阴阳极之间水平流动,液体流动方向与环形阴极运动方向相反,加大镀液与阴极相对运动速度。消除镀液浓度差异,同时带走阴极上产生的气体清洗、钝化装置是由支撑转动辊、储液箱、清洗液和钝化液组成,主要是为了清洗镀层表面残留的镀液,在镀层表面形成一层保护膜,烘干装置是对镀层表面残留的液体进行烘干处理。The circulating water pump makes the plating solution flow horizontally between the cathode and the anode, and the liquid flow direction is opposite to the movement direction of the annular cathode, increasing the relative movement speed of the plating solution and the cathode. Eliminate the concentration difference of the plating solution and take away the gas generated on the cathode at the same time. A protective film is formed on the surface, and the drying device is used to dry the liquid remaining on the surface of the coating.
通过调节步进电机参数控制卷材收卷速度,随着卷材厚度的增加,卷材拉扯张力增加,张力太大会造成薄膜撕裂,本发明使用了一套张力控制系统,包括张力传感装置、张力控制器、磁粉耦合器,合金薄膜经过张力传感装置,张力改变反应到张力控制器上,张力控制器改变电流作用到与收卷辊相连的磁粉耦合器上,电流改变,磁粉耦合器的转矩改变,从而改变收卷速度,在收卷辊卷曲成材。The winding speed of the coil is controlled by adjusting the parameters of the stepping motor. As the thickness of the coil increases, the pulling tension of the coil increases. If the tension is too high, the film will be torn. This invention uses a set of tension control system, including a tension sensing device. , tension controller, magnetic powder coupler, the alloy film passes through the tension sensing device, the tension change is reflected on the tension controller, the tension controller changes the current and acts on the magnetic powder coupler connected to the winding roller, the current changes, the magnetic powder coupler The torque changes, thereby changing the winding speed, and the winding roller curls into a material.
示例:Example:
电镀液组成:78g/L的硫酸镍。9g/L的硫酸亚铁,40g/L的硼酸,柠檬酸钠20g/L,抗坏血酸5g/L,十二烷基硫酸钠0.2g/L,糖精3g/L,苯亚磺酸钠0.3g/L,丁炔二醇0.5g/LElectroplating solution composition: 78g/L nickel sulfate. 9g/L ferrous sulfate, 40g/L boric acid, 20g/L sodium citrate, 5g/L ascorbic acid, 0.2g/L sodium lauryl sulfate, 3g/L saccharin, 0.3g/L sodium benzenesulfinate L, butynediol 0.5g/L
(1)电镀铁镍合金溶液配制(1) Preparation of electroplating iron-nickel alloy solution
①在容量为8L的清洁镀槽中加入约70%体积的去离子水,加热至55℃。① Add about 70% volume of deionized water into a clean plating tank with a capacity of 8L, and heat it to 55°C.
②加入计算量的硫酸镍和氯化钠,搅拌溶解。② Add the calculated amount of nickel sulfate and sodium chloride and stir to dissolve.
③在单独容器中,用90℃以上的去离子水溶解计算量的硼酸,每千克硼酸用4~6kg去离子水溶解。③In a separate container, dissolve the calculated amount of boric acid with deionized water above 90°C, and dissolve every kilogram of boric acid with 4-6kg of deionized water.
④加入计算量的柠檬酸钠,搅拌溶解。④ Add the calculated amount of sodium citrate and stir to dissolve.
⑤加入计算量的硫酸亚铁,搅拌溶解。⑤ Add the calculated amount of ferrous sulfate and stir to dissolve.
⑥加入计算量的糖精、抗坏血酸、苯亚磺酸钠、丁炔二醇,搅拌溶解,加去离子水至所需体积。⑥Add the calculated amount of saccharin, ascorbic acid, sodium benzenesulfinate, butynediol, stir to dissolve, and add deionized water to the required volume.
⑦用5%的稀硫酸调节pH值到2.5。⑦ Adjust the pH value to 2.5 with 5% dilute sulfuric acid.
(2)将宽度为50mm的环形氮化钛阴极套在支撑转动辊上,安装石墨导辊紧贴在阴极外表面,将阳极导电装置放入阳极槽中,长宽厚为100mm*50mm*10mm的可溶性铁阳极和镍阳极交替排列放在阳极导电装置上,阴阳极距离35mm。(2) Put the ring-shaped titanium nitride cathode with a width of 50mm on the supporting rotating roller, install the graphite guide roller close to the outer surface of the cathode, put the anode conductive device into the anode groove, the length, width and thickness are 100mm*50mm*10mm Soluble iron anodes and nickel anodes are alternately arranged on the anode conductive device, and the distance between cathode and anode is 35mm.
(3)打开循环水泵,调节水泵流量为13L/min;打开温控装置,调节温度为55℃;开启过滤装置。一段时间后,电镀溶液达到55℃。(3) Turn on the circulating water pump and adjust the flow rate of the water pump to 13L/min; turn on the temperature control device and adjust the temperature to 55°C; turn on the filter device. After a while, the plating solution reached 55°C.
(4)打开高频电镀电源,设置阴极电流密度为3.5A/dm2,调节铁阳极和镍阳极的电流比为1:5.5。静止电镀一段时间,使镀层能够剥离。(4) Turn on the high-frequency electroplating power supply, set the cathode current density to 3.5A/dm 2 , and adjust the current ratio of the iron anode to the nickel anode to 1:5.5. Static electroplating for a period of time, so that the coating can be peeled off.
(5)将步进电机与支撑辊连接,打开电机,设置参数,使环形阴极以2m/h速度转动。(5) Connect the stepper motor with the support roller, turn on the motor, and set the parameters so that the ring cathode rotates at a speed of 2m/h.
(6)当镀层到达剥离辊时,剥离镀层,镀层经过清洗、钝化装置、烘干装置后得到干燥整洁的镀层,最后经过张控制器装置调节收卷速度,在收卷装置上收卷成材。(6) When the coating reaches the peeling roller, the coating is peeled off, and the coating is cleaned, passivated, and dried to obtain a dry and clean coating. Finally, the winding speed is adjusted by the tension controller device, and the material is wound on the winding device. .
采用本发明可溶性分离阳极电沉积软磁合金连续薄膜的方法,制备出含镍量85%的合金连续薄膜,合金薄膜宽度为50mm,厚度为20μm,饱和磁化强度在0.7T,硬度为460Hv。By adopting the method of the present invention for dissolving and separating anode electrodeposited soft magnetic alloy continuous films, an alloy continuous film containing 85% nickel is prepared, the width of the alloy film is 50 mm, the thickness is 20 μm, the saturation magnetization is 0.7 T, and the hardness is 460 Hv.
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